Four-axis carrying device and method combined with visual identification

Abstract

The invention discloses a four-axis carrying device and method combined with visual identification, and relates to the field of semiconductors. According to the four-axis carrying device and method combined with visual identification, the theta-direction axis rotating module, the Z-direction axis module, the linear transmission module, the visual detection module and the visual detection platform are arranged, so that when a wafer is conveyed to the position below the visual detection platform, a light source on a camera support can irradiate the surface of the wafer at a specific angle; a clear reflection / scattering boundary can be formed in a detected area, so that the contrast ratio of silicon wafer characteristics and the clear edge are obviously improved; a camera lens in the visual detection module collects an image of an illuminated area in real time, the image processing module calculates the position deviation and the rotation angle of the wafer relative to the visual center by recognizing the edge morphology, a notch or a positioning key and other characteristics of the wafer, and the deviation information serves as key input in follow-up fine alignment. The pre-alignment work is synchronously completed in the transmission process of the wafer, and the working efficiency is improved.

Description

Technical Field

[0001] This invention relates to semiconductor technology, and more specifically to a four-axis handling device and method incorporating visual recognition. Background Technology

[0002] With the rapid development of the consumer electronics industry, semiconductor manufacturing is playing an increasingly important role in the global industrial chain, placing higher demands on the performance of manufacturing equipment. Especially in photolithography, the exposure equipment, as the core equipment determining chip pattern accuracy and production efficiency, is seeing its key component—the wafer transport mechanism—become increasingly crucial.

[0003] Currently, the mainstream close-contact fully automated exposure machines on the market typically use four-axis multi-joint robotic arms, but they are generally expensive and have long delivery cycles. At the same time, their functions are relatively simple, making it difficult to meet the precision and flexibility requirements of wafer handling systems. Therefore, it is necessary to redesign a set of equipment for handling wafers and introduce visual recognition to improve the precision and flexibility requirements of wafer handling equipment. Summary of the Invention

[0004] The purpose of this invention is to provide a four-axis handling device and method that combines visual recognition, so as to solve the problem that the existing equipment has a single function and cannot meet the accuracy and flexibility requirements of wafer handling equipment.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a four-axis handling device incorporating visual recognition, comprising:

[0006] The θ-axis rotation module includes a Z-axis bending plate and a protective plate connected to the Z-axis bending plate. A motor base is connected to the protective plate, and a first reducer and a rotary motor are connected to the motor base for mutual transmission. A main shaft is connected to the output shaft of the first reducer through a first coupling.

[0007] The Z-axis module includes a Z-axis base plate, a Z-axis guide rail connected to the Z-axis base plate, and a first guide rail slider connected to the Z-axis guide rail. The first guide rail slider is connected to the Z-axis bending plate.

[0008] A linear transmission module includes a fixed support assembly connected to the main shaft, a lower baffle that can slide along the Y direction connected to the fixed support assembly, an upper baffle provided on the lower baffle, a vacuum arm assembly slidably connected to the lower baffle, a finger assembly connected to the vacuum arm assembly, a surface light assembly and a sensor mounting plate connected to the upper baffle, and a third sensor connected to the sensor mounting plate.

[0009] The visual inspection module includes a camera bracket connected to the lower baffle, a camera mounting plate connected to the camera bracket, and a camera connected to the camera mounting plate, the camera emitting a light source;

[0010] A visual inspection platform is located at the end of the finger assembly.

[0011] Preferably, a bearing support is connected to the Z-axis bending plate, and the main shaft is rotatably connected to the bearing support.

[0012] Preferably, a limiting post and a first light-blocking plate are connected to the main shaft, a limiting block and a second light-blocking plate are connected to the Z-axis bending plate, and a first photoelectric sensor and a second photoelectric sensor are connected to the limiting block.

[0013] Preferably, a motor support is connected to the bottom of the Z-axis base plate, and a second reducer and a lifting motor are connected to the motor support for mutual transmission. The output shaft of the second reducer is connected to a Z-axis lead screw through a second coupling. The Z-axis lead screw is rotatably connected to the Z-axis base plate through a first support seat and a second support seat, and the Z-axis lead screw is threadedly connected to the first guide rail slider. A first guide rail baffle is provided at the end of the Z-axis guide rail. A Z-sensor seat is connected to the Z-axis base plate, and a first sensor is connected to the Z-sensor seat.

[0014] Preferably, the fixed support assembly is connected to a lead screw module, a slider mounting base, and a buffer seat. The lead screw module is connected to a first linear motor and a lead screw module slider. The lead screw module is configured to drive the lead screw module slider to slide via the first linear motor. The slider mounting base is connected to a guide rail and a second guide rail baffle. A second guide rail slider is slidably connected to the guide rail. The lower baffle is connected to the lead screw module slider and the second guide rail slider. A motor mounting plate is connected to the bottom of the lower baffle, and a second linear motor is connected to the motor mounting plate. The upper side of the lower baffle is connected to a third light-blocking plate, a second sensor, an adjusting seat, a pulley shaft, a first belt pressure plate, a pulley, a pulley seat, a fourth light-blocking plate, a telescopic guide rail, and an idler wheel. The pulley shaft is connected to the pulley seat and to the pulley. A synchronous belt is connected to the output shaft of the pulley, the idler wheel, and the second linear motor. The first belt pressure plate and the second belt pressure plate are connected to the synchronous belt. The pulley seat is connected to the upper baffle. The guide rail sliders on the two telescopic guide rails are respectively connected to the first belt pressure plate and the second belt pressure plate. A vacuum arm assembly is connected to the guide rail sliders.

[0015] Preferably, the camera bracket is also connected to an amplifier assembly and a wiring harness.

[0016] A method of using a four-axis handling device incorporating visual recognition, applied to a four-axis handling device incorporating visual recognition, comprising:

[0017] The rotational power output by the lifting motor is amplified and its speed adjusted by the second reducer, and then transmitted to the Z-axis lead screw through the second coupling. During the rotation, the Z-axis lead screw converts the angular displacement of the motor into linear displacement, driving the first guide rail slider, which is rigidly connected to the Z-axis lead screw, to move along the Z-axis. During the movement, the first guide rail slider drives the Z-axis bending plate to move towards the Z-axis, thereby driving the wafer to move upward.

[0018] The linear transmission module is divided into X-axis and Y-axis movement. The Y-axis movement is transmitted to the lead screw module through the bushing after the first linear motor outputs rotational force. The lead screw module converts the angular displacement into linear displacement and outputs it to the lead screw module slider, which ultimately drives the vision inspection platform to move along the Y-axis. The X-axis movement is transmitted to the pulley after the second linear motor outputs rotational power. The pulley drives the synchronous belt to move, which ultimately drives the vision inspection platform to move along the X-axis.

[0019] A rotary motor drives a vision inspection platform to rotate. When the light source illuminates the wafer and the camera above the wafer observes a notch on the wafer, the rotary motor stops rotating. If the notch is not detected, the deviation value is calculated and sent to the alignment mechanism for alignment, thus completing one alignment operation.

[0020] Compared with the prior art, the present invention provides a four-axis handling device and method that combines visual recognition. By setting up a θ-axis rotation module, a Z-axis module, a linear transmission module, a visual inspection module and a visual inspection platform, when the wafer is transported to the underside of the visual inspection platform, the light source on the camera bracket will illuminate the wafer surface at a specific angle, which can form a clear reflection / scattering boundary in the area being measured, thereby significantly improving the contrast and edge clarity of the silicon wafer features.

[0021] The camera lens in the vision inspection module acquires images of the illuminated area in real time and transmits the images to the image processing module. The image processing module identifies the edge shape and features such as notches or positioning keys of the wafer, calculates its positional deviation and rotation angle relative to the visual center. The above deviation information will serve as the key input in the subsequent fine alignment, enabling the wafer to be pre-aligned synchronously during the transmission process and improving work efficiency. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0023] Figure 1 A schematic diagram of the overall structure provided for an embodiment of the present invention. Figure 1 ;

[0024] Figure 2 A schematic diagram of the overall structure provided for an embodiment of the present invention. Figure 2 ;

[0025] Figure 3 This is a schematic diagram of the θ-axis rotation module structure provided in an embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the Z-axis module structure provided in an embodiment of the present invention;

[0027] Figure 5 A schematic diagram of the linear transmission module structure provided in an embodiment of the present invention. Figure 1 ;

[0028] Figure 6 A schematic diagram of the linear transmission module structure provided in an embodiment of the present invention. Figure 2 ;

[0029] Figure 7 A schematic diagram of the linear transmission module structure provided in an embodiment of the present invention. Figure 3 ;

[0030] Figure 8 This is a schematic diagram of the structure of the visual inspection module provided in an embodiment of the present invention.

[0031] Explanation of reference numerals in the attached figures:

[0032] 1. Thermocouple axis rotation module; 11. Limiting post; 12. Bearing support; 13. Limiting stop; 14. First photoelectric sensor; 15. Second photoelectric sensor; 16. Z-axis bending plate; 17. Protective plate; 18. Rotary motor; 19. First reducer; 110. First coupling; 111. Main shaft; 112. First light-blocking plate; 113. Second light-blocking plate; 114. Motor base; 2. Z-axis module; 21. Z-axis base plate; 22. First guide rail baffle; 23. First sensor; 24. Z-sensor base; 25. Z-axis lead screw; 26. Second coupling; 27. Lifting motor; 28. Second reducer; 29. Z-axis guide rail; 210, first support base; 211, first guide rail slider; 212, second support base; 213, motor support; 3, linear transmission module; 31, finger assembly; 32, third light-blocking plate; 33, second sensor; 34, surface light assembly; 35, vacuum arm assembly; 37, upper baffle; 38, adjusting seat; 39, pulley shaft; 310, first belt pressure plate; 311, pulley; 312, pulley seat; 313, fourth light-blocking plate; 314, telescopic guide rail; 315, idler wheel; 316, synchronous belt; 317, second belt pressure plate; 318, fixed support. Components; 320, Third sensor; 321, Sensor mounting plate; 322, First linear motor; 323, Lead screw module; 324, Second linear motor; 325, Second guide rail baffle; 326, Guide rail; 327, Second guide rail slider; 328, Lead screw module slider; 329, Lower baffle; 330, Slider mounting base; 331, Buffer base; 332, Motor mounting plate; 4. Vision inspection module; 41, Camera mounting plate; 42, Camera; 43, Camera bracket; 44, Light source; 45, Amplifier assembly; 46, Circuit bundle; 5. Vision inspection platform. Detailed Implementation

[0033] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0034] As attached Figure 1 To be continued Figure 8 As shown:

[0035] Example:

[0036] A four-axis handling device incorporating visual recognition comprises five parts: a theta-axis rotation module 1, a Z-axis module 2, a linear transmission module 3, a visual inspection module 4, and a visual inspection platform 5.

[0037] The θ-axis rotation module 1 includes a Z-axis bending plate 16 and a protective plate 17 connected to the Z-axis bending plate 16. A motor base 114 is connected to the protective plate 17. A first reducer 19 and a rotary motor 18 are connected to the motor base 114 and are mutually driven. A main shaft 111 is connected to the output shaft of the first reducer 19 through a first coupling 110. A bearing support 12 is connected to the Z-axis bending plate 16. The main shaft 111 is rotatably connected to the bearing support 12. A limit post 11 and a first light-blocking plate 112 are connected to the main shaft 111. A limit stop 13 and a second light-blocking plate 113 are connected to the Z-axis bending plate 16. A first photoelectric sensor 14 and a second photoelectric sensor 15 are connected to the limit stop 13.

[0038] Z-axis module 2 includes a Z-axis base plate 21, a Z-axis guide rail 29 connected to the Z-axis base plate 21, and a first guide rail slider 211 connected to the Z-axis guide rail 29. The first guide rail slider 211 is connected to the Z-axis bending plate 16. A motor support 213 is connected to the bottom of the Z-axis base plate 21. A second reducer 28 and a lifting motor 27 are connected to the motor support 213 and are mutually driven. The output shaft of the second reducer 28 is connected to a Z-axis lead screw 25 through a second coupling 26. The Z-axis lead screw 25 is rotatably connected to the Z-axis base plate 21 through a first support 210 and a second support 212. The Z-axis lead screw 25 is threadedly driven to the first guide rail slider 211. A first guide rail baffle 22 is provided at the end of the Z-axis guide rail 29. A Z-sensor seat 24 is connected to the Z-axis base plate 21, and a first sensor 23 is connected to the Z-sensor seat 24.

[0039] The linear transmission module 3 includes a fixed support assembly 318 connected to the main shaft 111. A lower baffle 329 that can slide along the Y direction is connected to the fixed support assembly 318. An upper baffle 37 is provided on the lower baffle 329. A vacuum arm assembly 35 is slidably connected to the lower baffle 329. A finger assembly 31 is connected to the vacuum arm assembly 35. A surface light assembly 34 and a sensor mounting plate 321 are connected to the upper baffle 37. A third sensor 320 is connected to the sensor mounting plate 321.

[0040] The fixed support assembly 318 consists of a base plate connected to the main shaft 111, four support plates, and a fixed plate. A lead screw module 323, a slider mounting base 330, and a buffer seat 331 are connected to the fixed plate. A first linear motor 322 and a lead screw module slider 328 are connected to the lead screw module 323. The lead screw module 323 is configured to drive the lead screw module slider 328 to slide via the first linear motor 322. A guide rail 326 and a second guide rail baffle 325 are connected to the slider mounting base 330. A second guide rail slider 327 is slidably connected to the guide rail 326. A lower baffle 329 is connected to the lead screw module slider 328 and the second guide rail slider 327. A motor mounting plate 332 is connected to the bottom of the lower baffle 329. A second... A linear motor 324 is included. The upper side of the lower baffle 329 is connected to a third light-blocking plate 32, a second sensor 33, an adjusting seat 38, a pulley shaft 39, a first pressure plate 310, a pulley 311, a pulley seat 312, a fourth light-blocking plate 313, a telescopic guide rail 314, and an idler wheel 315. The pulley shaft 39 is connected to the pulley seat 312 and to the pulley 311. A synchronous belt 316 is connected to the pulley 311, the idler wheel 315, and the output shaft of the second linear motor 324. The first pressure plate 310 and the second pressure plate 317 are connected to the synchronous belt 316. The pulley seat 312 is connected to the upper baffle 37. The guide rail sliders on the two telescopic guide rails 314 are respectively connected to the first pressure plate 310 and the second pressure plate 317. A vacuum arm assembly 35 is connected to the guide rail sliders.

[0041] The visual inspection module 4 includes a camera bracket 43 connected to the lower baffle 329, a camera mounting plate 41 connected to the camera bracket 43, and a camera 42 connected to the camera mounting plate 41. The camera 42 emits a light source 44. An amplifier assembly 45 and a circuit bundle 46 are also connected to the camera bracket 43.

[0042] The visual inspection platform 5 is located at the end of the finger assembly 31.

[0043] A method of using a four-axis handling device incorporating visual recognition, applied to a four-axis handling device incorporating visual recognition, comprising:

[0044] The rotational power output by the lifting motor 27 is amplified and speed adjusted by the second reducer 28, and then transmitted to the Z-axis lead screw 25 through the second coupling 26. During the rotation, the Z-axis lead screw 25 converts the angular displacement of the motor into linear displacement, driving the first guide rail slider 211, which is rigidly connected to the Z-axis lead screw 25, to move along the Z-axis. During the movement, the first guide rail slider 211 drives the Z-axis bending plate 16 to move along the Z-axis, thereby driving the wafer to move upward.

[0045] The linear transmission module 3 is divided into X-axis and Y-axis movement. The Y-axis movement is transmitted by the first linear motor 322 through the bushing to the lead screw module 323. The lead screw module 323 converts the angular displacement into linear displacement and outputs it to the lead screw module slider 328, which ultimately drives the vision inspection platform 5 to move along the Y-axis. The X-axis movement is transmitted by the second linear motor 324 through the pulley 311. The pulley 311 drives the synchronous belt 316 to move. The synchronous belt 316 drives the guide rail slider of the telescopic guide rail 314 to move through the first belt pressure plate 310 and the second belt pressure plate 317, which ultimately drives the vision inspection platform 5 to move along the X-axis.

[0046] Rotary motor 18 drives visual inspection platform 5 to rotate, and light source 44 illuminates it. When camera 42 located above the wafer observes a notch on the wafer, rotary motor 18 stops rotating. If the wafer notch is not detected, the deviation value is calculated and sent to the alignment mechanism for alignment, thereby completing one alignment operation.

[0047] The present invention provides a four-axis handling device and method that combines visual recognition. By setting up a θ-axis rotation module 1, a Z-axis module 2, a linear transmission module 3, a visual inspection module 4, and a visual inspection platform 5 respectively, when the wafer is transported to the visual inspection platform 5, the light source on the camera bracket 43 will illuminate the wafer surface at a specific angle, which can form a clear reflection / scattering boundary in the area being measured, thereby significantly improving the contrast and edge clarity of the silicon wafer features.

[0048] The camera 42 in the vision inspection module 4 acquires images of the illuminated area in real time and transmits the images to the image processing module. The image processing module identifies the edge shape and features such as notches or positioning keys of the wafer, calculates its positional deviation and rotation angle relative to the visual center. The above deviation information will serve as the key input in the subsequent fine alignment, realizing the pre-alignment of the wafer during the transmission process and improving work efficiency.

[0049] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A four-axis handling device in combination with visual recognition, characterized in that, The application relates to a visual detection device, which comprises the following parts: a theta-axis rotating module (1) comprising a Z-axis bending plate (16) and a protection plate (17) connected to the Z-axis bending plate (16), a motor base (114) connected to the protection plate (17), a first speed reducer (19) and a rotating motor (18) connected to each other in transmission and connected to the motor base (114), and a main shaft (111) connected to the output shaft of the first speed reducer (19) through a first coupling (110); a Z-axis module (2) comprising a Z-axis bottom plate (21), a Z-axis guide rail (29) connected to the Z-axis bottom plate (21), and a first guide rail sliding block (211) connected to the Z-axis guide rail (29), wherein the first guide rail sliding block (211) is connected to the Z-axis bending plate (16); a linear transmission module (3) comprising a fixed support assembly (318) connected to the main shaft (111), a lower baffle (329) slidably connected to the fixed support assembly (318) along a Y direction, an upper baffle (37) arranged on the lower baffle (329), a vacuum arm assembly (35) slidably connected to the lower baffle (329), a finger assembly (31) connected to the vacuum arm assembly (35), a surface light assembly (34) and a sensor mounting plate (321) connected to the upper baffle (37), and a third sensor (320) connected to the sensor mounting plate (321); a visual detection module (4) comprising a camera support (43) connected to the lower baffle (329), a camera mounting plate (41) connected to the camera support (43), and a camera (42) connected to the camera mounting plate (41), wherein the camera (42) emits a light source (44); a visual detection platform (5) arranged at the end of the finger assembly (31).

2. A four-axis handling device in combination with visual recognition according to claim 1, characterized in that A bearing support (12) is connected to the Z-axis bending plate (16), and the main shaft (111) is rotationally connected to the bearing support (12).

3. A four-axis handling device in combination with visual recognition according to claim 2, characterized in that A limiting column (11) and a first light shielding piece (112) are connected to the main shaft (111), a limiting block (13) and a second light shielding piece (113) are connected to the Z-axis bending plate (16), and a first photoelectric sensor (14) and a second photoelectric sensor (15) are connected to the limiting block (13).

4. A four-axis handling device in combination with visual recognition according to claim 3, characterized in that A motor support (213) is connected to the bottom of the Z-axis bottom plate (21), a second speed reducer (28) and a lifting motor (27) connected to each other in transmission are connected to the motor support (213), a Z-axis lead screw (25) is connected to the output shaft of the second speed reducer (28) through a second coupling (26), the Z-axis lead screw (25) is rotationally connected to the Z-axis bottom plate (21) through a first support base (210) and a second support base (212), the Z-axis lead screw (25) is threadedly connected to the first guide rail sliding block (211), a first guide rail baffle (22) is arranged at the end of the Z-axis guide rail (29), a Z sensor base (24) is connected to the Z-axis bottom plate (21), and a first sensor (23) is connected to the Z sensor base (24).

5. A four-axis handling device in combination with visual recognition according to claim 4, characterized in that The fixed support assembly (318) is connected with a lead screw module (323), a sliding block mounting seat (330) and a buffer seat (331), the lead screw module (323) is connected with a first linear motor (322) and a lead screw module sliding block (328), the lead screw module (323) is configured to drive the lead screw module sliding block (328) to slide through the first linear motor (322), the sliding block mounting seat (330) is connected with a guide rail (326) and a second guide rail baffle (325), the guide rail (326) is connected with a second guide rail sliding block (327) in a sliding manner, the lower baffle (329) is connected to the lead screw module sliding block (328) and the second guide rail sliding block (327), the bottom of the lower baffle (329) is connected with a motor mounting plate (332), the motor mounting plate (332) is connected with a second linear motor (324), the upper side of the lower baffle (329) is connected with a third light barrier (32), a second sensor (33), an adjusting seat (38), a belt wheel shaft (39), a first belt pressing plate (310), a belt wheel (311), a belt wheel seat (312), a fourth light barrier (313), a telescopic guide rail (314) and an idler (315), the belt wheel shaft (39) is connected to the belt wheel seat (312) and connected with the belt wheel (311), the belt wheel (311), the idler (315) and the output shaft of the second linear motor (324) are connected with a synchronous belt (316), the first belt pressing plate (310) and the second belt pressing plate (317) are connected to the synchronous belt (316), the belt wheel seat (312) is connected with the upper baffle (37), the guide rail sliding blocks on the two telescopic guide rails (314) are connected with the first belt pressing plate (310) and the second belt pressing plate (317) respectively, and the guide rail sliding blocks are connected with a vacuum arm assembly (35).

6. The four-axis handling device in combination with visual recognition according to claim 1, characterized in that The camera support (43) is also connected with an amplifier assembly (45) and a circuit tube bundle (46).

7. A method of using a four-axis handling device in conjunction with visual recognition, the method comprising: The four-axis carrying device applied to any one of claims 1-6, comprising: The rotation power output by the lifting motor (27) is transmitted to the Z-direction lead screw (25) through the second coupling (26) after torque amplification and speed regulation by the second speed reducer (28), the Z-direction lead screw (25) converts the angular displacement of the motor into linear displacement during rotation, drives the first guide rail sliding block (211) rigidly connected with the Z-direction lead screw (25) to move along the Z-axis, and the first guide rail sliding block (211) drives the Z-direction bending plate (16) to move towards the Z-axis during movement, thereby driving the wafer to move upwards; The linear transmission module (3) is divided into X direction and Y direction movement. The Y direction movement is outputted by the first linear motor (322) after rotating force is transmitted to the screw module (323) through the shaft sleeve. The screw module (323) converts the angular displacement into linear displacement and then outputs to the screw module slider (328). Finally, the visual detection platform (5) is driven to move along the Y axis. The X direction movement is outputted by the second linear motor (324) after rotating power is transmitted to the pulley (311). The pulley (311) drives the synchronous belt (316) to move, so as to finally drive the visual detection platform (5) to move along the X axis. The rotary motor (18) drives the visual detection platform (5) to rotate, and the light source (44) irradiates. When the camera (42) located above the wafer observes that the wafer has a gap, the rotary motor (18) stops rotating. If the wafer gap is not identified, the deviation value is calculated and transmitted to the alignment mechanism for alignment, so as to complete the alignment work once.

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