A radio frequency power frequency tuning dynamic tracking method and system

Abstract

This invention relates to the field of radio frequency (RF) power supplies, specifically to an RF power supply frequency tuning dynamic tracking method and system. The method includes the following steps executed sequentially: S1: Generating a frequency-modulated signal based on an initial carrier frequency and the frequency of a preset modulation signal; S2: Coupled sampling of the RF signal output from the RF power supply after power amplification, filtering the sampled signal, extracting the corresponding signal components, and calculating the corresponding reflection coefficient amplitudes; S3: Comparing the corresponding reflection coefficient amplitudes and selecting the minimum reflection coefficient amplitude; S4: Using the frequency corresponding to the minimum reflection coefficient amplitude as the new carrier frequency, and obtaining a new first sideband frequency and a second sideband frequency based on the new carrier frequency; S5: Repeating steps S1 to S4 based on the updated frequencies. This solution, through iterative updates of the carrier frequency and sideband frequency, possesses the ability to detect and track the reflection coefficient amplitude in real time, and significantly shortens the tuning time.

Description

Technical Field

[0001] This application relates to the field of radio frequency power supplies, specifically to a method and system for dynamic tracking of radio frequency power supply frequency tuning. Background Technology

[0002] In industrial applications of plasma (such as semiconductor etching, thin film deposition, and cleaning) and scientific research, radio frequency (RF) power supplies are typically used as core power supply equipment. Impedance matching is essential to ensure the efficient, stable, and safe operation of RF power supplies, requiring the establishment of an impedance matching mechanism between the RF power supply and the load (plasma). Currently, conventional impedance matching schemes use a series-connected, automatically adjusting mechanical matching network. However, this type of network has a slow matching speed, typically on the order of seconds. Even high-performance systems require 2 to 3 seconds to complete one matching cycle, making it difficult to adapt to the rapidly changing requirements of plasma processes.

[0003] To address the efficiency issues of dynamic matching, the industry has developed Automatic Frequency Tuning (AFT) technology. AFT rapidly reduces reflected power by searching for the optimal operating frequency in real time, offering a response speed far superior to mechanical matching networks. Currently, the mainstream AFT implementation schemes mainly include two types: The first is a scanning frequency tuning scheme, which sequentially traverses all frequency points within a specified frequency range, recording the frequency corresponding to the lowest reflected power as the optimal frequency. When the reflected power exceeds a preset threshold, the scanning frequency tuning is restarted. The second is a trial-and-error mechanism scheme, which, based on the current output frequency, increases or decreases the frequency in both the left and right directions, adjusting the frequency adjustment direction according to the trend of reflected power changes until the optimal frequency is found. When the reflected power exceeds the threshold, tuning is retried.

[0004] However, the existing automatic frequency tuning schemes described above have significant drawbacks:

[0005] During frequency traversal or bidirectional probing, the reflected power will fluctuate and will not decrease continuously, thus affecting the load's effective absorption of power.

[0006] The system only re-triggers tuning when the reflected power exceeds the threshold, making it impossible to track the reflected power in real time and adjust the frequency dynamically, thus making it difficult to maintain the reflected power at the lowest level continuously.

[0007] Using full-band scanning to sequentially traverse all frequency points within a specified range, or searching both sides of the frequency range during the trial, both suffer from significant time consumption issues. Furthermore, re-searching for the optimal frequency each time incurs additional tuning time costs. Summary of the Invention

[0008] In view of this, the present invention proposes a dynamic tracking method for radio frequency power supply frequency tuning, comprising the following steps performed sequentially:

[0009] S1: Generate a frequency modulation signal based on the initial carrier frequency fc_0 and the frequency fm of the preset modulation signal. The frequency modulation signal includes the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm, and the second sideband frequency fn2_0=fc_0+fm.

[0010] S2: Couple and sample the RF signal output by the RF power supply after power amplification, and filter the sampled signal to extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm and the second sideband frequency fn2_0=fc_0+fm, and calculate the corresponding reflection coefficient amplitude respectively.

[0011] S3: Compare the magnitudes of the reflection coefficients corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm, and the second sideband frequency fn2_0=fc_0+fm, and select the smallest reflection coefficient magnitude.

[0012] S4: Based on the frequency corresponding to the minimum reflection coefficient amplitude, take the new carrier frequency fc_1, and based on the new carrier frequency fc_1, obtain the new first sideband frequency fn1_1=fc_1-fm, and the new second sideband frequency fn2_1=fc_1+fm.

[0013] S5: Based on the updated carrier frequency fc_1, the first sideband frequency fn1_1=fc_1-fm, and the second sideband frequency fn2_1=fc_1+fm, repeat steps S1 to S4;

[0014] The reflection coefficient amplitude is the absolute value of the reflection coefficient, which is defined as the ratio of the complex amplitude of the reflected wave to the incident wave of the signal component.

[0015] Furthermore, the amplitude of the preset modulation signal is smaller than the amplitude of the initial carrier signal, and much smaller.

[0016] Furthermore, in step S1, the power of the first sideband frequency fn1_0=fc_0-fm and the power of the second sideband frequency fn2_0=fc_0+fm are both lower than the power of the initial carrier frequency fc_0, and at least lower than a preset value.

[0017] Furthermore, in step S2, a digital filter with steep edges is used to filter the sampled signal to extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm, and the second sideband frequency fn2_0=fc_0+fm.

[0018] Furthermore, step S4 also includes:

[0019] If the updated carrier frequency exceeds the preset frequency adjustment range, the carrier frequency is set to the boundary value of the preset frequency adjustment range.

[0020] Accordingly, the present invention also proposes a radio frequency power supply frequency tuning dynamic tracking system for implementing the above method, comprising:

[0021] A frequency modulation signal generation module is used to generate a frequency modulation signal based on an initial carrier frequency fc_0 and a preset modulation signal frequency fm. The frequency modulation signal includes the initial carrier frequency fc_0, a first sideband frequency fn1_0 = fc_0 - fm, and a second sideband frequency fn2_0 = fc_0 + fm.

[0022] The signal sampling and filtering module is connected to the frequency modulation signal generation module. It is used to couple and sample the power-amplified radio frequency signal output by the radio frequency power supply, and to filter the sampled signal to extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm and the second sideband frequency fn2_0=fc_0+fm.

[0023] The reflection coefficient amplitude calculation module is connected to the signal sampling and filtering module and is used to calculate the reflection coefficient amplitude corresponding to each signal component. The reflection coefficient amplitude is the absolute value of the reflection coefficient, and the reflection coefficient is defined as the ratio of the complex amplitude of the reflected wave to the incident wave of the signal component.

[0024] The comparison and update module, connected to the reflection coefficient amplitude calculation module, is used to compare the reflection coefficient amplitudes corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm, and the second sideband frequency fn2_0=fc_0+fm and select the minimum reflection coefficient amplitude; and based on the frequency corresponding to the minimum reflection coefficient amplitude, to take as the new carrier frequency fc_1, to obtain the new first sideband frequency fn1_1=fc_1-fm and the new second sideband frequency fn2_1=fc_1+fm.

[0025] The repeat module connects the comparison update module and the frequency modulation signal generation module. According to the comparison update module, the carrier frequency fc_1, the first sideband frequency fn1_1=fc_1-fm and the second sideband frequency fn2_1=fc_1+fm of the frequency modulation signal generation module are updated, so that the frequency modulation signal generation module regenerates the frequency modulation signal.

[0026] Furthermore, in the frequency modulation signal generation module, the amplitude of the preset modulation signal is less than the amplitude of the initial carrier signal.

[0027] Furthermore, in the frequency modulation signal generation module, the power of the first sideband frequency fn1_0=fc_0-fm and the power of the second sideband frequency fn2_0=fc_0+fm are both lower than the power of the initial carrier frequency fc_0, and at least lower than a preset value.

[0028] Furthermore, in the signal sampling and filtering module, a digital filter with steep edges is used to filter the sampled signal in order to extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm, and the second sideband frequency fn2_0=fc_0+fm.

[0029] Furthermore, it also includes a boundary module connected to the comparison and update module. If the carrier frequency updated by the comparison and update module exceeds the preset frequency adjustment range, the carrier frequency is set to the boundary value of the preset frequency adjustment range.

[0030] This invention, by selecting the frequency corresponding to the minimum reflection coefficient amplitude, can always maintain the correct tuning direction, significantly improve tuning efficiency, avoid fluctuations, facilitate stable absorption of load power, and significantly shorten tuning time, further optimizing the timeliness and stability of the tuning process; the steps are executed cyclically, quickly responding to load changes, possessing real-time detection and tracking capabilities, and dynamically adjusting the output frequency to keep the reflected power at the lowest level. Attached Figure Description

[0031] Figure 1 This is a flowchart illustrating the steps of a dynamic tracking method for radio frequency power supply tuning according to the present invention.

[0032] Figure 2 This is a schematic diagram of a dynamic tracking system for radio frequency power supply tuning according to the present invention.

[0033] Figure 3 This is a flowchart illustrating an embodiment of the present invention. Detailed Implementation

[0034] In industrial applications of plasma (such as semiconductor etching, thin film deposition, and cleaning) and scientific research, radio frequency (RF) power supplies are typically used as core power supply equipment. Impedance matching is essential to ensure the efficient, stable, and safe operation of RF power supplies, requiring the establishment of an impedance matching mechanism between the RF power supply and the load (plasma). Currently, conventional impedance matching schemes use a series-connected, automatically adjusting mechanical matching network. However, this type of network has a slow matching speed, typically on the order of seconds. Even high-performance systems require 2 to 3 seconds to complete one matching cycle, making it difficult to adapt to the rapidly changing requirements of plasma processes.

[0035] To address the efficiency issues of dynamic matching, the industry has developed Automatic Frequency Tuning (AFT) technology. AFT rapidly reduces reflected power by searching for the optimal operating frequency in real time, offering a response speed far superior to mechanical matching networks. Currently, the mainstream AFT implementation schemes mainly include two types: The first is a scanning frequency tuning scheme, which sequentially traverses all frequency points within a specified frequency range, recording the frequency corresponding to the lowest reflected power as the optimal frequency. When the reflected power exceeds a preset threshold, the scanning frequency tuning is restarted. The second is a trial-and-error mechanism scheme, which, based on the current output frequency, increases or decreases the frequency in both the left and right directions, adjusting the frequency adjustment direction according to the trend of reflected power changes until the optimal frequency is found. When the reflected power exceeds the threshold, tuning is retried.

[0036] However, the existing automatic frequency tuning schemes described above have significant drawbacks:

[0037] During frequency traversal or bidirectional probing, the reflected power will fluctuate and will not decrease continuously, thus affecting the load's effective absorption of power.

[0038] The system only re-triggers tuning when the reflected power exceeds the threshold, making it impossible to track the reflected power in real time and adjust the frequency dynamically, thus making it difficult to maintain the reflected power at the lowest level continuously.

[0039] Using full-band scanning to sequentially traverse all frequency points within a specified range, or searching both sides of the frequency range during the trial, both suffer from significant time consumption issues. Furthermore, re-searching for the optimal frequency each time incurs additional tuning time costs.

[0040] In view of this, the present invention proposes a dynamic tracking method and system for radio frequency power supply frequency tuning, which aims to solve the above problems.

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the various embodiments of this application will be described in detail below with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been presented in the various embodiments of this application to enable the reader to better understand this application. However, the technical solutions claimed in this application can be implemented even without these technical details and various changes and modifications based on the following embodiments.

[0042] In the following description, certain specific details are set forth for the purpose of illustrating various disclosed embodiments in order to provide a thorough understanding of the various disclosed embodiments. However, those skilled in the art will recognize that embodiments may be practiced without one or more of these specific details. In other instances, well-known apparatuses, structures, and techniques associated with this application may not have been shown or described in detail to avoid unnecessarily obscuring the description of the embodiments.

[0043] Unless the context requires otherwise, throughout the specification and claims, the word “comprising” and its variations, such as “including” and “having”, shall be understood to have an open, inclusive meaning, that is, to be interpreted as “including, but not limited to”.

[0044] The embodiments of this application will be described in detail below with reference to the accompanying drawings to provide a clearer understanding of the purpose, features, and advantages of this application. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of this application, but are merely for illustrating the essential spirit of the technical solution of this application.

[0045] Throughout this specification, references to "an embodiment" or "an embodiment" indicate that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment. Therefore, the appearance of "in an embodiment" or "an embodiment" in various places throughout the specification does not necessarily refer to the same embodiment. Furthermore, a particular feature, structure, or characteristic may be combined in any manner in one or more embodiments.

[0046] The present invention proposes a dynamic tracking method for radio frequency power supply tuning, such as... Figure 1 As shown, the following steps are performed sequentially:

[0047] S1: Generate a frequency modulation signal based on the initial carrier frequency fc_0 and the frequency fm of the preset modulation signal. The frequency modulation signal includes the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm, and the second sideband frequency fn2_0=fc_0+fm.

[0048] S2: Couple and sample the RF signal output by the RF power supply after power amplification, and filter the sampled signal to extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm and the second sideband frequency fn2_0=fc_0+fm, and calculate the corresponding reflection coefficient amplitude respectively.

[0049] S3: Compare the magnitudes of the reflection coefficients corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm, and the second sideband frequency fn2_0=fc_0+fm, and select the smallest reflection coefficient magnitude.

[0050] S4: Based on the frequency corresponding to the minimum reflection coefficient amplitude, take the new carrier frequency fc_1, and based on the new carrier frequency fc_1, obtain the new first sideband frequency fn1_1=fc_1-fm, and the new second sideband frequency fn2_1=fc_1+fm.

[0051] S5: Based on the updated carrier frequency fc_1, the first sideband frequency fn1_1=fc_1-fm, and the second sideband frequency fn2_1=fc_1+fm, repeat steps S1 to S4.

[0052] The initial carrier frequency fc_0 is the reference frequency of the RF power supply output signal. Through continuous looping, it is updated to carrier frequencies fc_1, fc_2, ...

[0053] Since the frequency corresponding to the minimum reflection coefficient amplitude is the most suitable frequency for signal transmission, by directly comparing the reflection coefficient amplitudes of the three frequency points, there is no need to traverse a large number of frequency points or conduct bidirectional trials, which greatly improves the tuning efficiency.

[0054] Because the plasma load impedance can change rapidly, the optimal frequency also changes dynamically. By updating the carrier frequency and sideband frequency in real time, it is ensured that each tuning is based on a frequency point near the current optimal frequency, thus achieving dynamic approximation of the optimal frequency.

[0055] The reflection coefficient is defined as the ratio of the complex amplitude of the reflected wave to that of the incident wave. It contains information about the wave's amplitude and phase, and is a complex number denoted by Γ. The amplitude of the reflection coefficient is the absolute value of the reflection coefficient, i.e., |Γ|.

[0056] |Γ|=0: Perfect match, no reflection;

[0057] |Γ|=1: Total internal reflection, all energy is reflected back, and no energy is absorbed by the load;

[0058] 0 < |Γ| < 1: Partial power is reflected, and partial power is absorbed by the load. In practical applications, the smaller |Γ| is, the smaller the reflected power is, and the more power is absorbed by the load.

[0059] This invention, by selecting the frequency corresponding to the minimum reflection coefficient amplitude, can always maintain the correct tuning direction, significantly improve tuning efficiency, avoid fluctuations, facilitate stable absorption of load power, and significantly shorten tuning time, further optimizing the timeliness and stability of the tuning process; the steps are executed cyclically, quickly responding to load changes, possessing real-time detection and tracking capabilities, and dynamically adjusting the output frequency to keep the reflected power at the lowest level.

[0060] Furthermore, the amplitude of the preset modulation signal is smaller than the amplitude of the initial carrier signal. This ensures that the core component of the frequency modulation signal remains the initial carrier frequency, avoids excessive modulation signal amplitude leading to carrier signal distortion, and ensures the stability and reliability of the RF power supply output signal.

[0061] Furthermore, in step S1, the power of the first sideband frequency fn1_0 = fc_0 - fm and the second sideband frequency fn2_0 = fc_0 + fm are both required to be lower than the power of the initial carrier frequency fc_0, and at least lower than a preset value. This ensures that the main power output of the RF power supply is concentrated on the carrier frequency, meeting the load's core power requirements.

[0062] Furthermore, in step S2, a digital filter with steep edges is used to filter the sampled signal to extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm, and the second sideband frequency fn2_0=fc_0+fm.

[0063] A digital filter with steep edges has good frequency selectivity, which can accurately separate signals with different frequency components, effectively filter out noise and other irrelevant frequency components in the sampled signal, and accurately extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fc_0 minus fm, and the second sideband frequency fc_0 plus fm, ensuring the accuracy of subsequent reflection coefficient amplitude calculation.

[0064] In step S3, when the reflection coefficient amplitude corresponding to the initial carrier frequency fc_0 is the minimum reflection coefficient amplitude, the initial carrier frequency fc_0 is determined to be the current optimal output frequency.

[0065] A smaller reflection coefficient amplitude means a lower proportion of the RF signal is reflected by the load, resulting in higher effective power absorption by the load and higher operating efficiency of the RF power supply. This is the core objective of RF power supply operation. When the reflection coefficient amplitude corresponding to fc_0 is the smallest among the three frequency points, it indicates that within the currently detected frequency range, the impedance matching state corresponding to fc_0 is optimal, the signal transmission efficiency is highest, and the effective power absorbed by the load is maximized. At this point, there is no need to adjust the carrier frequency; fc_0 can be directly determined as the current optimal output frequency. This meets the requirements for efficient operation of the RF power supply while avoiding additional fluctuations caused by frequency adjustments.

[0066] Step S4 specifically includes:

[0067] If the reflection coefficient amplitude corresponding to the first sideband frequency fn1_0=fc_0-fm is the smallest, then the carrier frequency fc_1 is updated to fc_0-fm, the first sideband frequency is updated to fc_1-fm=fc_0-2fm, and the second sideband frequency is updated to fc_1+fm=fc_0.

[0068] If the reflection coefficient amplitude corresponding to the initial carrier frequency fc_0 is the smallest, it remains unchanged, the carrier frequency fc_1=fc_0, the first sideband frequency fc_1-fm=fc_0-fm, and the second sideband frequency fc_1+fm=fc_0+fm.

[0069] If the reflection coefficient amplitude corresponding to the second sideband frequency fn2_0=fc_0+fm is the smallest, then the carrier frequency fc_1 is updated to fc_0+fm, the first sideband frequency is updated to fc_1-fm=fc_0, and the second sideband frequency is updated to fc_1+fm=fc_0+2fm.

[0070] Furthermore, step S4 also includes:

[0071] If the updated carrier frequency exceeds the preset frequency adjustment range, the carrier frequency is set to the boundary value of the preset frequency adjustment range.

[0072] To prevent the system from experiencing unlimited frequency drift and tuning loss when sudden load changes cause the optimal frequency to exceed the device's capabilities, thus avoiding the need to restart the initialization process and increase additional time overhead.

[0073] Accordingly, this invention also proposes a dynamic tracking system for radio frequency power supply tuning to implement the above method, such as... Figure 2 As shown, it includes:

[0074] A frequency modulation signal generation module is used to generate a frequency modulation signal based on an initial carrier frequency fc_0 and a preset modulation signal frequency fm. The frequency modulation signal includes the initial carrier frequency fc_0, a first sideband frequency fn1_0 = fc_0 - fm, and a second sideband frequency fn2_0 = fc_0 + fm.

[0075] The signal sampling and filtering module is connected to the frequency modulation signal generation module. It is used to couple and sample the power-amplified radio frequency signal output by the radio frequency power supply, and to filter the sampled signal to extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm and the second sideband frequency fn2_0=fc_0+fm.

[0076] The reflection coefficient amplitude calculation module is connected to the signal sampling and filtering module and is used to calculate the reflection coefficient amplitude corresponding to each signal component. The reflection coefficient amplitude is the absolute value of the reflection coefficient, and the reflection coefficient is defined as the ratio of the complex amplitude of the reflected wave to the incident wave of the signal component.

[0077] The comparison and update module, connected to the reflection coefficient amplitude calculation module, is used to compare the reflection coefficient amplitudes corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm, and the second sideband frequency fn2_0=fc_0+fm and select the minimum reflection coefficient amplitude; and based on the frequency corresponding to the minimum reflection coefficient amplitude, to take as the new carrier frequency fc_1, to obtain the new first sideband frequency fn1_1=fc_1-fm and the new second sideband frequency fn2_1=fc_1+fm.

[0078] The repeat module connects the comparison update module and the frequency modulation signal generation module. According to the comparison update module, the carrier frequency fc_1, the first sideband frequency fn1_1=fc_1-fm and the second sideband frequency fn2_1=fc_1+fm of the frequency modulation signal generation module are updated, so that the frequency modulation signal generation module regenerates the frequency modulation signal.

[0079] Furthermore, in the frequency modulation signal generation module, the amplitude of the preset modulation signal is smaller than the amplitude of the initial carrier signal, and much smaller.

[0080] Furthermore, in the frequency modulation signal generation module, the power of the first sideband frequency fn1_0=fc_0-fm and the power of the second sideband frequency fn2_0=fc_0+fm are both lower than the power of the initial carrier frequency fc_0, and at least lower than a preset value.

[0081] Furthermore, in the signal sampling and filtering module, a digital filter with steep edges is used to filter the sampled signal in order to extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm, and the second sideband frequency fn2_0=fc_0+fm.

[0082] Furthermore, the RF power supply frequency tuning dynamic tracking system also includes a boundary module connected to the comparison update module. If the carrier frequency updated by the comparison update module exceeds the preset frequency adjustment range, the carrier frequency is set to the boundary value of the preset frequency adjustment range.

[0083] In one embodiment, the initial carrier frequency of the RF power supply is 13.56MHz, the frequency fm of the preset modulation signal is 1kHz, and the boundary value of the preset frequency adjustment range is 13.56MHz±5%.

[0084] like Figure 3As shown, after the frequency modulated signal is generated, it sequentially undergoes power amplification, signal coupling and sampling, signal processing and extraction, calculation of the reflection coefficient amplitude and determination of the minimum value, updating the carrier frequency, and determining whether it has exceeded the limit. This process is repeated to regenerate the frequency modulated signal and enter the next cycle. When the reflection coefficient amplitude value of the carrier frequency is at its minimum, the carrier frequency is determined to be the current optimal frequency.

[0085] The solutions provided by the embodiments of this application have been described in detail above. The various embodiments in the specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since it corresponds to the method disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to in the method section. It should be noted that those skilled in the art can make several improvements and modifications to this application without departing from the principles of this application, and these improvements and modifications also fall within the protection scope of the claims of this application.

[0086] Those skilled in the art will further recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of both. To clearly illustrate the interchangeability of hardware and software, the components and steps of the various examples have been generally described in terms of functionality in the foregoing description. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0087] The steps of the methods or algorithms described in conjunction with the embodiments disclosed herein can be implemented directly by hardware, a software module executed by a processor, or a combination of both. The software module can be located in random access memory (RAM), main memory, read-only memory (ROM), electrically programmable ROM, electrically erasable programmable ROM, registers, hard disk, removable disk, CD-ROM, or any other form of storage medium known in the art.

Claims

1. A method for dynamic tracking of radio frequency power supply tuning, characterized in that, The following steps are performed sequentially: S1: Generate a frequency modulation signal based on the initial carrier frequency fc_0 and the frequency fm of the preset modulation signal. The frequency modulation signal includes the initial carrier frequency fc_0, the first sideband frequency fn1_0=fc_0-fm, and the second sideband frequency fn2_0=fc_0+fm. S2: Couple and sample the RF signal output by the RF power supply after power amplification, and filter the sampled signal to extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0 and the second sideband frequency fn2_0, and calculate the corresponding reflection coefficient amplitude respectively. S3: Compare the magnitudes of the reflection coefficients corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0, and the second sideband frequency fn2_0, and select the smallest reflection coefficient magnitude; S4: Based on the frequency corresponding to the minimum reflection coefficient amplitude, take the new carrier frequency fc_1, and based on the new carrier frequency fc_1, obtain the new first sideband frequency fn1_1=fc_1-fm, and the new second sideband frequency fn2_1=fc_1+fm. S5: Repeat steps S1 to S4 based on the updated carrier frequency fc_1, the first sideband frequency fn1_1, and the second sideband frequency fn2_1; The reflection coefficient amplitude is the absolute value of the reflection coefficient, which is defined as the ratio of the complex amplitude of the reflected wave to the incident wave of the signal component.

2. The radio frequency power supply frequency tuning dynamic tracking method according to claim 1, characterized in that, The amplitude of the preset modulation signal is less than the amplitude of the initial carrier signal.

3. The radio frequency power supply frequency tuning dynamic tracking method according to claim 1, characterized in that, In step S1, the power of the first sideband frequency fn1_0 and the second sideband frequency fn2_0 are required to be lower than the power of the initial carrier frequency fc_0, and at least lower than a preset value.

4. The radio frequency power supply frequency tuning dynamic tracking method according to claim 1, characterized in that, In step S2, a digital filter with steep edges is used to filter the sampled signal in order to extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0 and the second sideband frequency fn2_0.

5. The radio frequency power supply frequency tuning dynamic tracking method according to claim 1, characterized in that, Step S4 also includes: If the updated carrier frequency exceeds the preset frequency adjustment range, the carrier frequency is set to the boundary value of the preset frequency adjustment range.

6. A dynamic tracking system for radio frequency power supply tuning, characterized in that, include: A frequency modulation signal generation module is used to generate a frequency modulation signal based on an initial carrier frequency fc_0 and a preset modulation signal frequency fm. The frequency modulation signal includes the initial carrier frequency fc_0, a first sideband frequency fn1_0 = fc_0 - fm, and a second sideband frequency fn2_0 = fc_0 + fm. The signal sampling and filtering module is connected to the frequency modulation signal generation module. It is used to couple and sample the power-amplified radio frequency signal output by the radio frequency power supply, and to filter the sampled signal to extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0 and the second sideband frequency fn2_0. The reflection coefficient amplitude calculation module is connected to the signal sampling and filtering module and is used to calculate the reflection coefficient amplitude corresponding to each signal component. The reflection coefficient amplitude is the absolute value of the reflection coefficient, and the reflection coefficient is defined as the ratio of the complex amplitude of the reflected wave to the incident wave of the signal component. The comparison and update module, connected to the reflection coefficient amplitude calculation module, is used to compare the reflection coefficient amplitudes corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0, and the second sideband frequency fn2_0 and select the minimum reflection coefficient amplitude; and based on the frequency corresponding to the minimum reflection coefficient amplitude, to take as the new carrier frequency fc_1, to obtain the new first sideband frequency fn1_1 = fc_1 - fm, and the new second sideband frequency fn2_1 = fc_1 + fm. The repeat module connects the comparison update module and the frequency modulation signal generation module. It updates the carrier frequency fc_1, the first sideband frequency fn1_1 and the second sideband frequency fn2_1 of the frequency modulation signal generation module according to the comparison update module, so that the frequency modulation signal generation module regenerates the frequency modulation signal.

7. The radio frequency power supply frequency tuning dynamic tracking system according to claim 6, characterized in that, In the frequency modulation signal generation module, the amplitude of the preset modulation signal is less than the amplitude of the initial carrier signal.

8. The radio frequency power supply frequency tuning dynamic tracking system according to claim 6, characterized in that, In the frequency modulation signal generation module, the power of the first sideband frequency fn1_0 and the second sideband frequency fn2_0 are required to be lower than the power of the initial carrier frequency fc_0, and at least lower than a preset value.

9. The radio frequency power supply frequency tuning dynamic tracking system according to claim 6, characterized in that, In the signal sampling and filtering module, a digital filter with steep edges is used to filter the sampled signal in order to extract the signal components corresponding to the initial carrier frequency fc_0, the first sideband frequency fn1_0 and the second sideband frequency fn2_0.

10. The radio frequency power supply frequency tuning dynamic tracking system according to claim 6, characterized in that, It also includes a boundary module, which is connected to the comparison and update module. If the carrier frequency updated by the comparison and update module exceeds the preset frequency adjustment range, the carrier frequency is set to the boundary value of the preset frequency adjustment range.

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