Automatic multi-surface detection equipment and automatic multi-surface detection method

Abstract

The invention relates to an automatic multi-surface detection device and an automatic multi-surface detection method. The automatic multi-face detection equipment comprises a feeding and discharging device, at least one front face detection device, a side face detection device and a back face detection device. The feeding and discharging device conveys at least one bearing object to the feeding end of the detection path and receives at least one bearing object at the discharging end of the detection path. The at least one bearing object carries at least one object to be tested. The at least one front detection device is arranged on the detection path to optically detect the first surface of the at least one object to be detected. The side surface detection device is arranged on the detection path to optically detect at least one side surface of at least one object to be detected. The back detection device is arranged on the detection path to optically detect the second surface of at least one object to be detected. The first surface and the second surface are opposite surfaces of at least one object to be measured. Through the structural design, the efficiency of the whole detection process of the object to be detected can be improved.

Description

Technical Field

[0001] This invention relates to a testing device, and more particularly to a multi-faceted testing device. Background Technology

[0002] With the development of semiconductor technology, chips and electronic components are becoming increasingly sophisticated. Therefore, quality inspection of semiconductor chips, electronic components, and electronic devices is becoming more and more important.

[0003] In existing technologies, surface image detection of the object under test is performed by optical scanning. However, this usually only allows detection of one surface of the object under test. As a result, defects that exist on other surfaces or in the appearance of the object under test may be missed during the detection process.

[0004] Therefore, how to improve the detection efficiency of the test objects and expand the items that can be tested by the test objects through the improvement of the testing equipment, so as to overcome the above-mentioned defects, has become one of the important issues that this cause wants to solve. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide an automatic multi-faceted inspection device, which addresses the shortcomings of the prior art. The device includes an infeed / outfeed device, at least one front inspection device, a side inspection device, and a back inspection device. The infeed / outfeed device delivers at least one object to the infeed end of the inspection path and receives at least one object at the outfeed end of the inspection path. The at least one object carries at least one object to be tested. The at least one front inspection device is disposed on the inspection path to optically inspect the first surface of the at least one object to be tested. The side inspection device is disposed on the inspection path to optically inspect at least one side surface of the at least one object to be tested. The back inspection device is disposed on the inspection path to optically inspect the second surface of the at least one object to be tested. The first surface and the second surface are opposite surfaces of the at least one object to be tested.

[0006] The technical problem to be solved by the present invention is to provide an automatic multi-faceted detection method that addresses the shortcomings of the prior art, comprising the following steps: feeding at least one carrier object to the inlet end of a detection path via an inlet / outlet device, and receiving at least one carrier object at the outlet end of the detection path, wherein the at least one carrier object carries at least one object to be tested; optically detecting the first surface of the at least one object to be tested via at least one front detection device; optically detecting at least one side surface of the at least one object to be tested via a side detection device; and optically detecting the second surface of the at least one object to be tested via a back detection device, wherein the first surface and the second surface are opposite surfaces of the at least one object to be tested.

[0007] One of the beneficial effects of this invention is that the automatic multi-face inspection equipment provided by this invention can perform multi-face inspection on the object under test by setting up a "management device", "inlet and outlet device", "front inspection device", "side inspection device" and "back inspection device", thereby improving the efficiency of the overall inspection process of the object under test. In addition, the automatic multi-face inspection machine can complete all inspection operations in the overall COWOS packaging process, from the component body to each packaging step, without the need to set up multiple additional inspection devices, reducing the equipment footprint and equipment cost.

[0008] Furthermore, the infeed and discharge device of the automatic multi-faceted inspection equipment uses a circulating transfer path to transport the carrier objects. In this way, the operator can quickly place uninspected carrier cartridges and retrieve inspected carrier cartridges in the same position, improving the efficiency of the inspection process and reducing the overall size of the equipment. However, the present invention is not limited thereto.

[0009] To further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are for reference and illustration only and are not intended to limit the present invention. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the architecture of an automatic multi-faceted inspection device according to an embodiment of the present invention.

[0011] Figure 2 This is a top view schematic diagram of an automatic multi-faceted inspection device according to an embodiment of the present invention.

[0012] Figure 3A This is a three-dimensional schematic diagram of a carrier cartridge according to an embodiment of the present invention.

[0013] Figure 3B This is a three-dimensional schematic diagram of a carrier object according to an embodiment of the present invention.

[0014] Figure 3C This is a three-dimensional schematic diagram of the test object according to an embodiment of the present invention.

[0015] Figure 4 This is a side view of the feeding and discharging device according to an embodiment of the present invention.

[0016] Figures 5A-5C for Figure 2 An enlarged schematic diagram of region X in the illustrated embodiment.

[0017] Figure 5D This is a schematic diagram of the side surface detection of the test object according to an embodiment of the present invention.

[0018] Figure 5E This is a schematic diagram of the side surface detection of the test object according to another embodiment of the present invention.

[0019] Figure 6 This is a schematic diagram of the appearance of the first transfer module of a transfer device according to an embodiment of the present invention.

[0020] Figure 7 This is a schematic diagram of an automatic multi-faceted inspection process according to an embodiment of the present invention.

[0021] Figure 8 This is a side view of the object to be measured according to another embodiment of the present invention. Detailed Implementation

[0022] The following specific embodiments illustrate the implementation of the "automatic multi-faceted inspection device" disclosed in this invention. Those skilled in the art can understand the advantages and effects of this invention from the content disclosed in this specification. This invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this invention. Furthermore, the accompanying drawings of this invention are for simple illustrative purposes only and are not depictions of actual dimensions; this is stated beforehand. The following embodiments will further describe the relevant technical content of this invention in detail, but the disclosed content is not intended to limit the scope of protection of this invention.

[0023] Please see Figure 1 and Figure 2 , Figure 1 This is a schematic diagram of the architecture of an automatic multi-faceted inspection device according to an embodiment of the present invention. Figure 2 This is a top view schematic diagram of an automatic multi-faceted inspection device according to an embodiment of the present invention. The automatic multi-faceted inspection device 100 inspects multiple test objects 9 along a detection path P, wherein the two ends of the detection path P have an inlet end T1 and an outlet end T2, respectively. The automatic multi-faceted inspection device 100 includes a management device 1, an inlet / outlet device 2, at least one front detection device 3, a side detection device 4, a back detection device 5, and at least one transfer device 6.

[0024] Please see Figures 3A to 3C , Figure 3A This is a three-dimensional schematic diagram of a carrier cartridge according to an embodiment of the present invention. Figure 3B This is a three-dimensional schematic diagram of a carrier object according to an embodiment of the present invention. Figure 3C This is a three-dimensional schematic diagram of the test object according to an embodiment of the present invention.

[0025] The test object 9 is carried by at least one carrier 8. In some embodiments, the at least one carrier 8 is, for example, a carrier disk, but the present invention is not limited thereto. The at least one carrier 8 has a plurality of receiving slots 81, each receiving slot 81 holding a corresponding test object 9. In some embodiments, the automatic multi-faceted inspection equipment 100 inspects multiple carrier objects 8 in an inspection process. When not being inspected, the multiple carrier objects 8 are stored in at least one carrier cartridge 7 for convenient transport. In some embodiments, the test object 9 is, for example, a chip. In other embodiments, the test object 9 may also be an IC substrate (ST), a die, or a metal heat sink (LID), and the present invention is not limited thereto. In other words, the automatic multi-faceted inspection equipment 100 can perform automatic multi-faceted inspection operations corresponding to the structures of various test objects 9 in industrial products.

[0026] In some embodiments, each test object 9 has a first surface 91, a second surface 92, and a plurality of side surfaces 93. The first surface 91 and the second surface 92 are opposite surfaces of the test object 9. The automatic multi-face inspection device 100 of the present invention is used to perform comprehensive inspection on the first surface 91, the second surface 92, and the plurality of side surfaces 93 of each test object 9.

[0027] In some embodiments, the management device 1 is electrically connected to the infeed / outfeed device 2, at least one front detection device 3, a side detection device 4, a back detection device 5, and at least one transfer device 6. The management device 1 can send control commands to the infeed / outfeed device 2, at least one front detection device 3, a side detection device 4, a back detection device 5, and at least one transfer device 6, and can receive information (e.g., image information) fed back from the front detection device 3, the side detection device 4, and the back detection device 5. In some embodiments, the management device 1 is, for example, a processor, a computer-readable medium, and a memory processing and storage component to execute a computer program to implement the corresponding function of automatic multi-face detection. Examples of processors may include a central processing unit (CPU), a multi-core CPU, a graphics processing unit (GPU), etc., and the present invention is not limited thereto. Examples of computer-readable media may include compact disc read-only memory (CD-ROM), hard disk drives, erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), etc., and the present invention is not limited thereto. Examples of memory may include dynamic random access memory (DRAM), static random access memory (SRAM), flash memory, etc., and the present invention is not limited thereto. It is worth noting that the term "computer program" as used herein refers to an application program stored in computer-readable media that can be read into memory for processing by a processor. In some embodiments, the application program may be written in any combination of one or more programming languages. Programming languages ​​include object-oriented programming languages ​​such as Java, Smalltalk, C++, or similar languages, as well as traditional programming languages ​​such as C or similar programming languages.

[0028] Please refer to the following: Figure 2 And see Figure 4 , Figure 4This is a side view of an infeed / outfeed device according to an embodiment of the present invention. In some embodiments, the infeed / outfeed device 2 includes at least one first conveying component 21 and at least one second conveying component 22. In some embodiments, the infeed / outfeed device 2 provides a carrier 8 loaded with the test object 9 to the infeed end T1 of the detection path P, and the carrier 8 is conveyed by at least one first conveying component 21 through the front detection device 3, the side detection device 4, and the back detection device 5 to complete the multi-face detection operation of the test object 9. After the test object 9 completes the multi-face detection operation, the infeed / outfeed device 2 receives the carrier 8 loaded with the test object 9 at the outfeed end T2 of the detection path P. In some embodiments, the infeed / outfeed device 2 includes two first conveying components 21, which are arranged parallel to each other. The present invention is not limited thereto, and the number and arrangement of the first conveying components 21 can be changed according to the detection process.

[0029] In some embodiments, before providing the carrier object 8 to at least one first conveying assembly 21, the infeed / outfeed device 2 transfers at least one carrier cartridge 7 along a cyclic transfer path T. The transfer path T passes through the infeed end T1 and the outfeed end T2 of the detection path P. In some embodiments, the carrier cartridge 7 has multiple compartments, each compartment capable of holding one carrier object 8. When transferring at least one carrier cartridge 7, an operator first places at least one carrier cartridge 7 filled with carrier objects 8 to be tested on a take-up / put-down cartridge position P1 on at least one second conveying assembly 22. At least one carrier cartridge 7 filled with carrier objects 8 to be tested is conveyed to an infeed position P2 via at least one second conveying assembly 22. At the infeed position P2, multiple carrier objects 8 to be tested in at least one carrier cartridge 7 are placed one by one onto at least one first conveying assembly 21 via the infeed end T1, and then multi-faceted detection of the test object 9 is performed along the detection path P. After the load-bearing objects 8 are unloaded, at least one empty load-bearing cartridge 7 is conveyed along the transfer path T by at least one second conveying assembly 22 to a discharge position P3. Then, through the discharge end T2, in conjunction with mechanical operation, multiple inspected load-bearing objects 8 are placed back into at least one load-bearing cartridge 7. Finally, at least one load-bearing cartridge 7, refilled with load-bearing objects 8, is conveyed by at least one second conveying assembly 22 to a return cartridge position P1, where it is retrieved by an operator. This completes a cyclic cartridge conveying operation. In some embodiments, the infeed / outfeed device 2 includes four second conveying assemblies 22, arranged in pairs parallel to each other to form a rectangular structure, thereby completing the cyclic transfer path T. This invention is not limited to this; the number and arrangement of the second conveying assemblies 22 can be changed according to the inspection process.

[0030] Please refer to it again. Figures 1 to 3CAt least one front detection device 3 detects the first surface 91 of each object 9 to be tested 9 by optical detection. In some embodiments, the at least one front detection device 3 includes one or more front light source modules 31 and one or more front image acquisition modules 32, which acquire images of the first surface 91 of the object 9 to be tested 9 by optical image capture. In some embodiments, the light source of the front light source module 31 is, for example, white light, infrared light, fluorescence, or laser. In some embodiments, the light source of the front light source module 31 is, for example, a coaxial light source or a side light source, and the present invention is not limited thereto. The front image acquisition module 32 is, for example, a line scan camera, a surface scan camera, or a 3D laser sensor, and acquires images at a shooting angle orthogonal to the first surface 91 or at a side shooting angle with an angle to the first surface 91, and the present invention is not limited thereto. In some embodiments, the front image acquisition module 32 may capture a complete surface or a partial surface of the first surface 91, and the present invention is not limited thereto. In some embodiments, when the front detection device 3 detects by white light, fluorescence, or laser, it can confirm whether there are defects in the appearance of the first surface 91 (e.g., scratches, black spots, dirt, pores, or cracks, etc.). When the front detection device 3 performs infrared detection, it can confirm whether there are defects (such as microcracks or fissures) inside the first surface 91. The selection of the front light source module 31 and the front image acquisition module 32 of at least one front detection device 3 in actual application can be determined according to the defective object to be detected, as well as the expected detection efficiency and quality, and the present invention is not limited thereto.

[0031] In some embodiments, the automatic multi-face inspection device 100 includes two front-side inspection devices 3 and 3', wherein one front-side inspection device 3 is located near the inlet end T1, and the other front-side inspection device 3' is located near the outlet end T2. The light source modules 31 of the two front-side inspection devices 3 and 3' are different. For example, the light source module 31 of the front-side inspection device 3 includes a white light source and an infrared light source, while the light source module 31 of the front-side inspection device 3' includes a laser light source. Thus, white light and infrared light detection can be performed on the front-side inspection device 3, and fluorescence and 3D laser head detection can be performed on the front-side inspection device 3'. By setting up different light source modules, the automatic multi-face inspection device 100 can acquire (inspect) more images of the test object 9 for different defects. However, in other embodiments, the present invention does not limit the number of front-side inspection devices 3 to two, and the configuration can be changed according to the requirements of the inspection process.

[0032] The side detection device 4 detects each side surface 93 of the object under test 9 by optical detection. In some embodiments, the side detection device 4 includes one or more side light source modules 41, one or more side image acquisition modules 42, and a vacuum rotating stage 43, and acquires images of the side surfaces 93 of the object under test 9 by optical image capture. In some embodiments, the light source of the side light source module 41 is, for example, white light. In some embodiments, the light source of the side light source module 41 is, for example, a coaxial light source or a side light source, and the present invention is not limited thereto. In some embodiments, the side image acquisition module 42 is, for example, a line scan camera or a surface scan camera, and acquires lateral images at a shooting angle parallel to the side surface 93 or at an angle to the side surface 93, and the present invention is not limited thereto. In some embodiments, the side image acquisition module 42 may capture a complete surface or a partial surface of each side surface 93, and the present invention is not limited thereto. When the side detection device 4 detects by white light, it can confirm whether there are defects (such as scratches, black spots, dirt, pores, or cracks, etc.) in the appearance of each side surface 93. In some instances, the vacuum rotary stage 43 can be adjusted in orientation according to the requirements of the inspection process, for example, by turning at a 90-degree angle on the horizontal plane to reduce the overall size of the side inspection device 4.

[0033] Please see Figures 5A to 5C , Figures 5A to 5C for Figure 2 The diagram shows an enlarged view of region X in the illustrated embodiment. In some embodiments, the vacuum rotary stage 43 has multiple accommodating spaces S, each accommodating space S respectively carrying multiple test objects 9, and multiple stage positioning components 431 are disposed on the outer edge of each accommodating space S. In some embodiments, the stage positioning component 431 is, for example, a column, but this invention is not limited thereto; in other embodiments, the shape of the stage positioning component 431 can be changed according to design requirements. The stage positioning component 431 can be raised and lowered vertically relative to the vacuum rotary stage 43. When the test object 9 is placed on the vacuum rotary stage 43, each test object 9 can be positioned in the corresponding accommodating space S (e.g., ...) by means of the raised stage positioning component 431. Figure 5B (As shown). During the side inspection of the test object 9, the stage positioning assembly 431 is lowered to be parallel to the surface of the vacuum rotating stage 43 to avoid the stage positioning assembly 431 obscuring the side surface 93 to be photographed (as shown). Figure 5C (As shown). In other embodiments, the method of positioning the object to be tested 9 on the vacuum rotating stage 43 is not limited by the present invention and can be modified according to actual needs.

[0034] Please see Figure 5D , Figure 5DThis is a schematic diagram of the side surface detection of the object under test in one embodiment of the present invention. In some embodiments, when performing side surface detection of the object under test 9, the side image acquisition module 42 acquires a side image at an angle α (such as the angle between the imaging direction of the side image acquisition module 42 and the surface of the vacuum rotating stage 43) with respect to the side surface 93 of the object under test 9. In some embodiments, the side image acquisition module 42 is equipped with an angle adjustment mechanism (not shown) to adjust the imaging angle of the side image acquisition module 42 (such as the aforementioned angle α). Therefore, when the side image acquisition module 42 is a one-line scanning camera, it can be driven by a camera transfer mechanism (not shown) to first move along a first side image acquisition direction D1 to capture one side surface 93 of the object under test 9; then, driven by the camera transfer mechanism, it moves along a second side image acquisition direction D2 opposite to the first side image acquisition direction D1 to capture the other side surface 93 of the object under test 9 relative to one side surface 93. Thus, by taking one round trip of the side image acquisition module 42, images of the test object 9 relative to its two side surfaces 93 can be obtained. In other embodiments, the side image acquisition module 42 is fixedly installed, and a platform transfer mechanism (not shown in the figure) is provided on the vacuum rotating platform 43 to drive the entire vacuum rotating platform 43 to move linearly, which can still complete the acquisition of images of the test object 9 relative to its two side surfaces 93 in one round trip of the shooting as described above.

[0035] Please see Figure 5E , Figure 5E This is a schematic diagram of the side surface detection of the test object according to another embodiment of the present invention. In another embodiment, the side image acquisition module 42 includes a beam splitter 421. The side image acquisition module 42 is arranged in a direction parallel to the side surface 93, and the side image of the test object 9 is acquired through the beam splitter 421. Figure 5E The side detection method in this example is the same as that shown in the 5D diagram. It does not require adjusting the angle of the side image acquisition module 42; only the angle of the beam splitter 42 needs to be adjusted. By setting an included angle β required for image acquisition, images of the test object 9 relative to the two side surfaces 93 can be obtained in one round trip. In other embodiments, the configuration of the side image acquisition module 42 can be changed according to detection requirements, and is not limited to... Figure 5D and Figure 5E What is disclosed is restricted.

[0036] Please refer to it again. Figures 1 to 3CThe back-side detection device 5 detects the second surface 92 of the object under test 9 using optical detection. In some embodiments, the back-side detection device 5 includes one or more back-side light source modules 51 and one or more back-side image acquisition modules 52, which acquire images of the second surface 92 of the object under test 9 by optical image capture. In some embodiments, the light source of the back-side light source module 51 is, for example, white light or laser, and the present invention is not limited thereto. In some embodiments, the back-side image acquisition module 52 is, for example, a line scan camera, a surface scan camera, or a 3D laser sensor, which acquires images at a shooting angle orthogonal to the second surface 92 or at a lateral shooting angle with an angle to the second surface 92, and the present invention is not limited thereto. In some embodiments, the back-side image acquisition module 52 may capture a complete surface or a partial surface of the second surface 92, and the present invention is not limited thereto. In some embodiments, when the back-side detection device 5 detects using white light or laser, it can confirm whether there are defects in the appearance of the second surface 92 (e.g., scratches, black spots, dirt, pores, or cracks, etc.). The selection of the back light source module 51 and the back image acquisition module 52 in the back detection device 5 for actual application can be determined according to the defective object to be detected and the expected detection efficiency and quality. This invention is not limited thereto.

[0037] Please see Figure 6 See also Figure 2 , Figure 6 This is a schematic diagram of the appearance of the first transfer module of a transfer device according to an embodiment of the present invention. In some embodiments, at least one transfer device 6 includes at least one first transfer module 61 and a second transfer module 62. The at least one first transfer module 61 is used to transfer the object to be tested 9, and the second transfer module 62 is used to transfer the carrier object 8.

[0038] like Figure 6 As shown, in some embodiments, at least one first transfer module 61 includes at least one bearing 611 and a plurality of suction nozzles 612, with each bearing 611 having a plurality of suction nozzles 612 arranged in the extending direction. In some embodiments, the first transfer module 61 includes two bearings 611, the distance between which is adjustable, and the adjacent spacing of the plurality of suction nozzles 612 on the same bearing 611 is also adjustable. In some embodiments, the adjacent spacing between the suction nozzles 612 can be individually adjusted; in other words, the bearing 611 and the suction nozzles 612 can be adjusted according to the position of the object to be tested 9, thereby performing the subsequent suction (or pick-up) step. Each time the first transfer module 61 performs a transfer step, the suction nozzles 612 on the same bearing 611 transfer the same row or column of objects to be tested 9. In some embodiments, the second transfer module 62 is a gripping component, such as a robotic arm. The robotic arm can grip and transfer the object 8.

[0039] like Figure 2As shown, the automatic multi-face inspection device 100 includes two first transfer modules 61 and 61', respectively disposed on one side of the two first conveying components 21. The first transfer module 61 is used to place the object to be tested 9 on the vacuum rotating stage 43, and the first transfer module 61' is used to pick up the object to be tested 9 from the vacuum rotating stage 43 to the back-side inspection device 5 for back-side inspection. In some embodiments, the automatic multi-face inspection device 100 further includes another transfer device 6'. That is, a second transfer module 62 and 62' are respectively disposed on one side of the first transfer modules 61 and 61'. In other embodiments, the arrangement of the first transfer modules 61 and 61' and the second transfer modules 62 and 62' can be changed according to the device design, and the present invention is not limited thereto. After the test object 9 is detected by the side detection device 4, another first transfer module 61' picks up multiple test objects 9 from the stage 43 and moves them to a back detection area A2. In this back detection area A2, the back detection device 5 detects the second surface 92 of the test object 9. After the back detection device 5 acquires the detection image, the other first transfer module 61' puts the multiple test objects 9 back onto the carrier object 8.

[0040] See again Figure 2 In some embodiments, the automatic multi-faceted inspection device 100 includes a dust removal zone A1 in the inspection path P. Within this dust removal zone A1, the blowing and suction device (not shown) of the automatic multi-faceted inspection device 100 removes dust from the surface of the test object 9 after it passes through the dust removal zone A1, thus avoiding affecting the subsequent inspection quality. In other embodiments, whether or not the dust removal zone A1 needs to be set can be determined according to the dust requirement level, and the present invention is not limited thereto.

[0041] Please see Figure 7 , Figure 7 This is a schematic diagram of an automatic multi-faceted inspection process according to an embodiment of the present invention. The automatic multi-faceted inspection process includes at least steps S01 to S07.

[0042] In step S01, the carrier object carrying the test object is placed into one of the first conveying components via a circulating infeed / outfeed device. In some embodiments, in step S01, the infeed / outfeed device 2 provides the carrier object 8 carrying the test object 9 to the infeed end T1 of the detection path P via at least one second conveying component 22, as can be seen in [reference needed]. Figure 2 and Figure 4 .

[0043] In step S02, the object being transported is conveyed along the detection path by the first conveying component through one of the front detection devices to complete one of the front detection operations. In some embodiments, in step S02, the front detection device 3 includes one or more front light source modules 31 and one or more front image acquisition modules 32, which acquire an image of the first surface 91 of the object to be tested 9 by means of optical image photography.

[0044] In step S03, the first transfer module transfers the object to be tested to the vacuum rotary stage for side inspection. In some embodiments, in step S03, the first transfer module 61 places the object to be tested 9 on the vacuum rotary stage 43. The side inspection device 4 includes one or more side light source modules 41 and one or more side image acquisition modules 42. The side image acquisition module 42 acquires side images at an angle parallel to the side surface 93 of the object to be tested 9 or at an angle α or β with the side surface 93.

[0045] In step S04, the second transfer module transfers the carrier object to another first conveying assembly. In some embodiments, in step S04, the second transfer module 62 is, for example, a robotic arm, which picks up the empty carrier object 8 and moves it to another first conveying assembly 21.

[0046] In step S05, the first transfer module transfers the object to be tested to the backside inspection device to complete the backside inspection operation. In some embodiments, in step S05, the backside inspection device 5 includes one or more backside light source modules 51 and one or more backside image acquisition modules 52. Another first transfer module 61' picks up the object to be tested 9 from the vacuum rotating stage 43 and moves it to the backside inspection device 5. The backside image acquisition module 52 acquires an image of the second surface 92 of the object to be tested relative to the first surface 91 by optical image taking.

[0047] In step S06, the object being transported is conveyed by the first conveying assembly along the detection path through another front detection device to complete another front detection operation. In some embodiments, in step S06, the other front detection device 3' is positioned adjacent to the discharge end T2. The front light source module of the other front detection device 3' has a different light source, so that different types of surface images can be obtained for the first surface 91 of the object to be tested through different light sources, thereby obtaining information on different defects.

[0048] In step S07, the infeed / outfeed device receives the carrier loaded with the test object at the outlet end of the detection path. In some embodiments, in step S07, after the test object 9 has completed the multi-face detection operation, the infeed / outfeed device 2 receives the carrier 8 loaded with the tested test object 9 at the outlet end T2 of the detection path P.

[0049] Please see Figure 8 , Figure 8This is a side view of the test object 9' according to another embodiment of the present invention. In another embodiment, the test object 9' is a stacked chip that has been COWOS packaged. The test object 9' includes a substrate 901, a chip 902, a heat dissipation component 903, a plurality of external solder balls 904, a plurality of metal bumps 905, and a filler layer 906. The external solder balls 904 are soldered to one side of the substrate 901, the metal bumps 905 are disposed between the substrate 901 and the chip 902, and the filler layer 906 is disposed in the space between the substrate 901, the chip 902 and the metal bumps 905. The heat dissipation component 903 is disposed on the other side of the chip 902 opposite to the substrate 901. For the stacked chip test object 9', the automated multi-face inspection equipment 100 can perform different inspections on different components, such as substrate 901, chip 902, heat dissipation component 903, external solder ball 904, metal bump 905 and filler layer 906. In other words, the automated multi-face inspection equipment 100 can inspect a single component before COWOS packaging, or it can be used to inspect each step in the COWOS packaging process to ensure the quality of each packaging step.

[0050] It should be noted that, according to some embodiments, the defects detected by the automatic multi-faceted inspection equipment 100 of the present invention may be that any component of the test object 9' or the surface (appearance) during the packaging process does not meet specifications, such as exposed metal paint layer, exposed metal circuitry, etc. Defects may also include chipping, cracks, scratches, contamination, pits, markings, hidden cracks, or pins.

[0051] According to some embodiments, the items detected by the automatic multi-faceted inspection equipment 100 also include the adhesive width of the filler layer 906, the adhesive height of the adhesive layer, whether the adhesive layer has glue creep, whether there is glue seepage, and whether there is residual glue.

[0052] According to some embodiments, the items detected by the automated multi-faceted inspection equipment 100 also include whether there is any missing, bridging defect, tombstone, shift, or breakage during the COWOS packaging process.

[0053] According to some embodiments, the items inspected by the automatic multi-faceted inspection equipment 100 also include the number, whether it is offset, its diameter, shape, and whether it is deformed of the outer solder balls 904 and metal bumps 905.

[0054] In other words, the automatic multi-faceted inspection equipment 100 of the present invention has a variety of defect detection items, which can be set according to the needs of users or customers.

[0055] "Beneficial effects of the embodiments"

[0056] One of the beneficial effects of this invention is that the automatic multi-face inspection equipment provided by this invention can perform multi-face inspection on the object under test through the technical solutions of "management device", "inlet and outlet device", "front inspection device", "side inspection device" and "back inspection device", thereby improving the efficiency of the overall inspection process of the object under test. In addition, the automatic multi-face inspection machine can complete all inspection operations in the overall COWOS packaging process, from the component body to each packaging step, without the need to set up multiple additional inspection devices, reducing the equipment footprint and equipment cost.

[0057] Furthermore, the infeed and discharge device of the automatic multi-faceted inspection equipment uses a circulating transfer path to transport the carrier objects. In this way, the operator can quickly place uninspected carrier cartridges and retrieve inspected carrier cartridges in the same position, improving the efficiency of the inspection process and reducing the overall size of the equipment. However, the present invention is not limited thereto.

[0058] The content disclosed above is only a preferred and feasible embodiment of the present invention, and is not intended to limit the scope of protection of the claims of the present invention. Therefore, all equivalent technical changes made based on the content of the present invention specification and drawings are included within the scope of protection of the claims of the present invention.

Claims

1. An automatic multi-faceted inspection device, characterized in that, The automated multi-faceted inspection equipment includes: An inlet / outlet device delivers at least one load-bearing object to an inlet end of a detection path and receives the at least one load-bearing object at an outlet end of the detection path, wherein the at least one load-bearing object carries at least one object to be tested. At least one front detection device is disposed on the detection path to optically detect a first surface of the at least one object to be tested; A side detection device is disposed on the detection path to optically detect at least one side surface of the at least one object to be tested; as well as A back-side detection device is disposed on the detection path to optically detect a second surface of the at least one object to be tested, wherein the first surface and the second surface are opposite surfaces of the at least one object to be tested.

2. The automatic multi-faceted inspection equipment according to claim 1, characterized in that, The automatic multi-faceted inspection equipment further includes at least one transfer device, which includes at least one first transfer module and a second transfer module; the at least one first transfer module is used to transfer the at least one object to be tested, and the second transfer module is used to transfer the at least one carrier object.

3. The automatic multi-faceted inspection equipment according to claim 2, characterized in that, The at least one first transfer module includes at least one bearing and a plurality of suction nozzles. The at least one bearing is provided with a plurality of suction nozzles in an extending direction, and the adjacent spacing between the plurality of suction nozzles can be individually adjusted.

4. The automatic multi-faceted inspection equipment according to claim 2, characterized in that, The at least one first transfer module includes multiple shaft seats, and the distance between the multiple shaft seats can be adjusted.

5. The automatic multi-faceted inspection equipment according to claim 1, characterized in that, The infeed / outfeed device transfers the at least one load-bearing object along a cyclic transfer path, the transfer path passing through the infeed end and the outfeed end of the detection path respectively.

6. The automatic multi-faceted inspection equipment according to claim 5, characterized in that, The infeed / outfeed device includes at least one first conveying component and at least one second conveying component. The at least one first conveying component conveys the at least one object along the detection path through the at least one front detection device, the side detection device, and the back detection device to complete a multi-face detection operation of the at least one object to be tested.

7. The automatic multi-faceted inspection equipment according to claim 6, characterized in that, The at least one second conveying component transfers at least one carrier cartridge, the at least one carrier object is stored in the at least one carrier cartridge, and the at least one carrier cartridge passes through a take-up and release position, a feeding position, and a discharging position along the transfer path, and then returns to the take-up and release position.

8. The automatic multi-faceted inspection equipment according to claim 1, characterized in that, The at least one front detection device includes at least one front light source module and at least one front image acquisition module; the side detection device includes at least one side light source module and at least one side image acquisition module; the rear detection device includes at least one rear light source module and at least one rear image acquisition module.

9. The automatic multi-faceted inspection equipment according to claim 8, characterized in that, The automatic multi-face inspection equipment further includes two front inspection devices. One of the two front inspection devices is located near the feed end, and the other front inspection device is located near the discharge end. The at least one front light source module of the one front inspection device includes at least one of a white light source and an infrared light source, and the at least one front light source module of the other front inspection device includes a laser light source.

10. The automatic multi-faceted inspection device according to claim 8, characterized in that, The at least one side image acquisition module of the side detection device includes a beam splitter, and the at least one side image acquisition module acquires the side image of the at least one object under test through the beam splitter.

11. The automatic multi-faceted inspection equipment according to claim 1, characterized in that, The side detection device includes a vacuum rotating stage, which has at least one accommodating space. The at least one accommodating space carries the at least one object to be tested. Multiple stage positioning components are arranged on the outer edge of the at least one accommodating space. Each stage positioning component can be raised and lowered relative to the vacuum rotating stage in a vertical direction.

12. An automatic multi-faceted inspection method, characterized in that, The automatic multi-faceted detection method includes the following steps: At least one carrying object is sent to an inlet end of a detection path through an inlet / outlet device, and the at least one carrying object is received at an outlet end of the detection path. The at least one carrying object carries at least one object to be tested. A first surface of the at least one test object is optically detected by at least one front detection device; At least one side surface of the at least one test object is optically detected using a side detection device; and A second surface of the at least one test object is optically detected by a back-side detection device, wherein the first surface and the second surface are opposite surfaces of the at least one test object.

13. The automatic multi-faceted inspection method according to claim 12, characterized in that, The at least one object to be tested is transferred through at least one first transfer module of the at least one transfer device, and the at least one carrier object is transferred through a second transfer module of the at least one transfer device.

14. The automatic multi-faceted detection method according to claim 13, characterized in that, The at least one carrier object carries multiple test objects, and the at least one first transfer module includes multiple suction nozzles. By adjusting the adjacent spacing between the multiple suction nozzles, multiple test objects are adsorbed accordingly.

15. The automatic multi-faceted inspection method according to claim 13, characterized in that, The at least one carrier carries multiple test objects, and the at least one first transfer module includes multiple bearings. By adjusting the spacing between the multiple bearings, multiple test objects can be adsorbed accordingly.

16. The automatic multi-faceted inspection method according to claim 12, characterized in that, The infeed / outfeed device transfers the at least one load-bearing object along a cyclic transfer path, the transfer path passing through the infeed end and the outfeed end of the detection path respectively.

17. The automatic multi-faceted inspection method according to claim 16, characterized in that, The at least one carrying object is conveyed along the detection path by at least one first conveying component of the infeed / outfeed device, passing through the at least one front detection device, the side detection device, and the back detection device to complete a multi-face detection operation of the at least one object to be tested.

18. The automatic multi-faceted inspection method according to claim 16, characterized in that, The at least one carrying object is housed in at least one carrying cassette, and the at least one carrying cassette is conveyed along the transfer path by at least one second conveying component of the infeed / outfeed device, passing through a take-up / release cassette position, an infeed position, an outfeed position, and then returning to the take-up / release cassette position.

19. The automatic multi-faceted inspection method according to claim 12, characterized in that, The at least one front detection device includes at least one front light source module, which uses a white light source and an infrared light source from the at least one front light source module to perform defect detection on the surface and interior of the at least one object to be tested, respectively; the automatic multi-face detection method also uses a laser light source from the at least one front light source module to perform fluorescence detection on the surface of the at least one object to be tested.

20. The automatic multi-faceted inspection method according to claim 12, characterized in that, The side detection device includes at least one side image acquisition module, and the side detection device acquires the side image of the at least one test object through a beam splitting component of the at least one side image acquisition module.

21. The automatic multi-faceted detection method according to claim 20, characterized in that, The side detection device includes a vacuum rotating stage that carries the at least one object to be tested. The at least one object to be tested has multiple side surfaces. The side detection device adjusts the orientation of the multiple side surfaces of the at least one object to be tested so that they face the at least one side image acquisition module via the vacuum rotating stage.

22. The automatic multi-faceted detection method according to claim 21, characterized in that, The vacuum rotating stage includes multiple stage positioning components, each of which can be raised and lowered relative to the vacuum rotating stage in a vertical direction. The vacuum rotating stage positions the at least one object to be tested by raising the multiple stage positioning components, and when taking a side surface image of the at least one object to be tested, the multiple stage positioning components are lowered to be parallel to the surface of the vacuum rotating stage.

23. The automatic multi-faceted inspection method according to claim 21, characterized in that, The at least one side image acquisition module first moves along a first side image acquisition direction to capture one side surface of the at least one object under test, and then moves along a second side image acquisition direction opposite to the first side image acquisition direction to capture the other side surface of the at least one object under test relative to the first side surface.

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