Magnetic sensor array and magnetic field detection method

Abstract

The application provides a magnetic sensor array and a magnetic field detection method. The magnetic sensor array comprises at least one magnetic sensing unit, each magnetic sensing unit comprising a spin-orbit torque layer and a magnetic tunnel junction. The free layer of the magnetic tunnel junction is adjacent to the spin-orbit torque layer, and the magnetic moment direction of the free layer deviates from the in-plane direction, and the magnetic moment direction of the reference layer is along the in-plane direction. An alternating current of a target direction is applied to the spin-orbit torque layer to induce three-dimensional precession of the magnetic moment of the free layer. When an external magnetic field exists, the angle of the magnetic moment precession will be deviated, thereby changing the signal value output by the magnetic sensing unit. Each single magnetic sensing unit in the array can realize independent three-dimensional magnetic field detection, avoiding the complex design of integrating multiple direction magnetic sensing units in the traditional magnetic sensor array, simplifying the structure and manufacturing process of the magnetic sensor array, saving the occupied space, reducing the crosstalk and alignment error between different axes of the magnetic sensing unit, improving the system sensitivity, and further realizing the three-dimensional magnetic field spatial distribution detection.

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