Hemispherical resonator gyroscope and vibration parameter measuring device, measuring method and control method thereof

By setting a transparent light window on the hemispherical resonator gyroscope and combining it with a Doppler laser vibrometer and control circuit, the problem that traditional detection methods cannot measure the true vibration parameters of the resonator is solved. This enables direct and accurate measurement and control of the resonator vibration, improving the testing accuracy and consistency of the hemispherical resonator gyroscope.

CN121702361APending Publication Date: 2026-03-20CHONGQING UNIV +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-01-28
Publication Date
2026-03-20

AI Technical Summary

Technical Problem

Traditional capacitive testing methods cannot directly and comprehensively measure the true physical vibration parameters of the resonator of a hemispherical resonator gyroscope under actual working conditions. Furthermore, the test data before packaging cannot accurately reflect the vibration behavior under actual working conditions, making it difficult to perform precise calibration and performance diagnosis.

Method used

A transparent light window is set on the package shell of the hemispherical resonator gyroscope. Combined with a Doppler laser vibrometer and control circuit, the vibration signal of the resonator is measured by laser. The host computer is integrated to process the signal and adjust the control parameters, so as to realize the direct measurement and control of the actual vibration parameters of the resonator.

Benefits of technology

It enables direct and accurate measurement of key physical quantities such as the actual physical amplitude of the resonator, provides a physical reference for the control loop, supports fault location and cause analysis, improves testing and verification, performance evaluation and debugging and maintenance capabilities, and enhances the accuracy and consistency of hemispherical resonant gyroscopes.

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Abstract

The invention discloses a hemispherical resonator gyroscope and a vibration parameter measurement device, a measurement method and a control method thereof, the device is provided with a transparent light window on a gyroscope packaging shell, and is integrated with a Doppler laser vibration meter, a control circuit and an upper computer to construct a direct optical measurement system. According to the device, the laser can directly irradiate the harmonic oscillator through the light window, so that the vibration parameters of the harmonic oscillator are directly measured, the motion state of the harmonic oscillator does not need to be deduced by relying on electrical signal parameters, the measurement result is more visual, accurate and reliable, and a reliable physical reference is provided for performance diagnosis and troubleshooting of the harmonic oscillator. Meanwhile, the invention further provides a measuring method adopting the device, the actual amplitude of the harmonic oscillator can be obtained by processing the collected vibration signals, the corresponding relation between the control parameters and the actual physical amplitude can be established and a circumferential rigidity distribution diagram can be mapped in combination with the recorded control parameters, and the measurement accuracy of the harmonic oscillator is improved. And direct data support is provided for calibration and performance optimization of the gyroscope.
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Description

Technical Field

[0001] This invention relates to the field of resonant gyroscope technology, specifically to a hemispherical resonant gyroscope and its vibration parameter measurement device, measurement method, and control method. Background Technology

[0002] The hemispherical resonant gyroscope is a high-precision angular velocity sensor. Compared with traditional gyroscopes, it has outstanding features such as small size, high precision, high reliability, and long life. It has significant advantages in high-precision inertial sensing fields such as satellite attitude control, spacecraft navigation, and oil exploration, and has become a hot research direction in inertial technology both at home and abroad.

[0003] Its basic working principle is as follows: An alternating electrostatic force is applied to the resonator through excitation electrodes, causing it to vibrate; the vibration signal of the resonator is then picked up by detection electrodes and fed back to the control circuit; the control circuit adjusts the excitation output in real time according to the detection signal, so that the resonator is stably maintained in the four-antinode vibration mode. When the gyroscope rotates with the carrier, the vibration mode of the resonator will precess in inertial space, and the signal obtained by the detection electrodes will change accordingly. After being analyzed by the control circuit, the angular velocity information of the carrier can be output. The above-mentioned excitation and detection method based on capacitive coupling is a non-contact measurement method with advantages such as high control accuracy and convenient signal acquisition, and is widely used in various hemispherical resonant gyroscopes and micro-hemispherical resonant gyroscopes.

[0004] However, this traditional capacitive detection method also has the following limitations: First, the system can only be sensitive to the fourth-order working mode vibration signal of the resonator, and cannot directly detect and evaluate error modes such as the first to third order mass imbalance caused by uneven processing; Second, the amplitude control, quadrature control and other loops can only be adjusted and compared based on the electrical control quantity, and cannot obtain the actual motion parameters such as the true physical amplitude of the resonator, resulting in a lack of physical benchmark for control accuracy and state evaluation; Third, when the gyroscope control loop malfunctions, it is difficult to perform effective fault location and root cause analysis because the actual vibration state of the resonator cannot be directly observed.

[0005] Furthermore, existing technologies include methods for testing the vibration characteristics of a resonator in a vacuum environment using a laser Doppler vibrometer before packaging. While this method can provide a preliminary assessment of the resonator's intrinsic properties, the actual performance often differs from the pre-packaging test results because the boundary conditions, assembly stresses, and operating environment of the resonator change significantly after packaging. Therefore, the pre-packaging test data cannot accurately and completely reflect the gyroscope's vibration behavior under actual operating conditions, making it difficult to use for precise device-level calibration and performance diagnosis. Summary of the Invention

[0006] To address the aforementioned shortcomings of existing technologies, the present invention aims to provide a hemispherical resonator gyroscope and its vibration parameter measurement device, measurement method, and control method, thereby solving the problem that traditional capacitive detection methods cannot directly and comprehensively measure the true physical vibration parameters of the resonator in the actual working state of the hemispherical resonator gyroscope.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows:

[0008] A hemispherical resonator gyroscope includes a housing and a resonator located inside the housing; at least one transparent light window is provided on the housing; the resonator is able to receive external light beams through the transparent light window.

[0009] Furthermore, the transparent light window is disposed on the side wall and top of the encapsulation housing.

[0010] Furthermore, a test post is provided on the top of the resonator.

[0011] Furthermore, the material of the transparent window includes sapphire glass or quartz glass.

[0012] A device for measuring the vibration parameters of a hemispherical resonator gyroscope includes:

[0013] The aforementioned hemispherical resonant gyroscope;

[0014] A Doppler laser vibrometer is used to emit a laser through the transparent optical window into the resonator inside the hemispherical resonator gyroscope, and to obtain the vibration signal of the resonator based on the returned laser signal.

[0015] A control circuit, electrically connected to the hemispherical resonator gyroscope, is used to excite and control the vibration of the resonator.

[0016] The host computer is connected to the Doppler laser vibrometer and the control circuit for collecting and processing the vibration signals to obtain vibration parameters, adjusting the control parameters of the control circuit, and recording the vibration parameters and control parameters and fitting their relationship.

[0017] Furthermore, the measuring device also includes a buffer circuit, which is connected between the lead-out electrodes of the hemispherical resonator gyroscope and the control circuit, and is used for signal pickup, amplification or conditioning.

[0018] Furthermore, the vibration signal includes a displacement signal and a velocity signal; the vibration parameters include the actual physical amplitude of the harmonic oscillator; and the control parameters include amplitude control parameters and standing wave precession angle.

[0019] A method for measuring the vibration parameters of a hemispherical resonator gyroscope, using the aforementioned hemispherical resonator gyroscope vibration parameter measuring device, includes the following steps:

[0020] S1. Fix the hemispherical resonant gyroscope, and use the host computer to control the circuit to excite the resonator and adjust the control parameters to establish and maintain a stable four-wave antinode standing wave oscillation.

[0021] S2. Adjust the Doppler laser vibrometer so that the emitted laser beam passes through the transparent window and is focused on the lip of the harmonic oscillator;

[0022] S3. The vibration signal measured by the Doppler laser vibration meter is acquired in real time by the host computer. During this process, the standing wave is pushed to precession, and the vibration signal is observed. The standing wave is pushed to the position with the largest vibration signal amplitude. The vibration signal at this time is acquired by the host computer and processed into vibration parameters, thus completing the measurement of vibration parameters.

[0023] A method for measuring the vibration parameters of a hemispherical resonator gyroscope, using the aforementioned hemispherical resonator gyroscope vibration parameter measuring device, and for measuring the circumferential stiffness distribution of the resonator, includes the following steps:

[0024] S1. Fix the hemispherical resonant gyroscope, and use the host computer to control the circuit to excite the resonator and adjust the control parameters to establish and maintain a stable four-wave antinode standing wave oscillation.

[0025] S2. Adjust the Doppler laser vibrometer so that the emitted laser beam passes through the transparent window and is focused on the lip of the harmonic oscillator;

[0026] S3. The displacement signal measured by the Doppler laser vibration meter is acquired in real time by the host computer. During this process, the standing wave is pushed to precession, and the displacement signal is observed. The standing wave is pushed to the position with the largest displacement signal amplitude, and this position is recorded as 0°.

[0027] S4. Record the amplitude control parameters and the actual physical amplitude at this time;

[0028] S5. Keep the amplitude control parameter unchanged, adjust the standing wave, and make the standing wave precess to several different circumferential measurement positions on the circumference of the harmonic oscillator lip, which are sufficient to characterize its circumferential stiffness distribution.

[0029] S6. At each measurement position, adjust the laser beam angle to maximize the displacement signal amplitude, and record the actual physical amplitude corresponding to the measurement position.

[0030] S7. Calculate the normalized stiffness value based on the actual physical amplitude;

[0031] S8. Based on the angles of the multiple measurement positions relative to the 0° position and their corresponding normalized stiffness values, draw the circumferential stiffness distribution diagram of the harmonic oscillator.

[0032] A method for controlling the actual physical amplitude of a hemispherical resonant gyroscope, using the aforementioned hemispherical resonant gyroscope vibration parameter measurement device, includes the following steps:

[0033] S1. Fix the hemispherical resonant gyroscope, and use the host computer to control the circuit to excite the resonator and adjust the control parameters to establish and maintain a stable four-wave antinode standing wave oscillation.

[0034] S2. Adjust the Doppler laser vibrometer so that the emitted laser beam passes through the transparent window and is focused on the lip of the harmonic oscillator;

[0035] S3. The displacement signal measured by the Doppler laser vibration meter is acquired in real time by the host computer. During this process, the standing wave is pushed to precession, and the displacement signal is observed. The standing wave is pushed to the position with the largest displacement signal amplitude.

[0036] S4. Record the amplitude control parameters and the actual physical amplitude at this time;

[0037] S5. Change the set value of the amplitude control parameter. After re-establishing a stable four-wave antinode standing wave vibration, repeat steps S3 to S4 to obtain multiple sets of amplitude control parameter and actual physical amplitude data pairs.

[0038] S6. Based on the above data pairs, establish the correspondence between the amplitude control parameters and the actual physical amplitude;

[0039] S7. Based on the established correspondence between the amplitude control parameter and the actual physical amplitude, determine the amplitude control parameter that needs to be adjusted according to the actual physical amplitude to be achieved, and then adjust the amplitude control parameter to the determined value to control the actual physical amplitude to the required value.

[0040] Compared with the prior art, the present invention has the following beneficial effects:

[0041] 1. This invention provides a hemispherical resonator gyroscope, which, by setting a transparent light window on its packaging shell, facilitates direct observation of the actual vibration of the resonator inside the gyroscope with the naked eye, laying an important foundation for in-depth research on the actual vibration characteristics of the resonator of the hemispherical resonator gyroscope.

[0042] 2. This invention provides a vibration parameter measurement device for a hemispherical resonator gyroscope. It employs a hemispherical resonator gyroscope with a transparent optical window, and integrates a Doppler laser vibrometer, control circuitry, and a host computer to construct a system capable of directly observing the actual vibration of the resonator under operating conditions. This device overcomes the limitations of traditional purely electrical detection methods, enabling the direct and accurate measurement of key physical quantities such as the actual physical amplitude of the resonator. This not only achieves physical calibration of the gyroscope's core performance parameters, providing a true physical benchmark for the control loop, but also allows for fault location and cause analysis based on intuitive vibration states when gyroscope control malfunctions, greatly improving the testing, verification, performance evaluation, and debugging / maintenance capabilities of high-precision hemispherical resonator gyroscopes.

[0043] 3. This invention also provides a measurement method based on the aforementioned device: The actual vibration signal of the resonator is acquired using a Doppler laser vibrometer, and then processed into actual vibration parameters by a host computer. This achieves visualized measurement of the resonator vibration, resulting in more accurate and reliable measurement results, providing reliable data support for performance evaluation, fault location, and cause analysis. Furthermore, by synchronously acquiring the physical vibration signal directly measured by laser and the electrical parameters within the control system, a direct quantitative mapping relationship is established for the first time between the electronic control system and the actual mechanical vibration of the resonator. This method can accurately calibrate the correspondence between the amplitude control quantity and the actual physical amplitude, thereby achieving precise control of the actual physical amplitude. It can also accurately map the circumferential stiffness uniformity of the resonator; this not only provides direct data support for the precise calibration and performance optimization of the gyroscope but also constructs a complete technical path for diagnosing vibration states from a physical perspective, significantly improving the development accuracy and product consistency of hemispherical resonator gyroscopes. Attached Figure Description

[0044] Figure 1 This is a frontal three-dimensional structural schematic diagram of the hemispherical resonant gyroscope of the present invention;

[0045] Figure 2 This is a side view of the three-dimensional structure of the hemispherical resonant gyroscope of the present invention;

[0046] Figure 3 This is a schematic diagram of the vibration parameter measuring device for a hemispherical resonator gyroscope according to the present invention;

[0047] In the figure, the package shell is 1, the transparent light window is 2, the first transparent light window is 2-1, the second transparent light window is 2-2, the resonator is 3, the test post is 3-1, the lip is 3-2, the buffer circuit is 4, and the lead electrode is 5. Detailed Implementation

[0048] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and specific examples.

[0049] Example 1: A hemispherical resonant gyroscope

[0050] like Figure 1 As shown in the figure, an embodiment of the present invention provides a hemispherical resonator gyroscope, including a package shell 1 and a resonator 3 located inside the package shell 1; at least one transparent light window 2 is provided on the package shell 1; the resonator 3 can receive external light beams through the transparent light window 2.

[0051] like Figure 2 As shown, in a specific implementation, there are two transparent light windows 2, including a first transparent light window 2-1 disposed on the side wall of the encapsulation shell 1 and a second transparent light window 2-2 disposed on the top of the encapsulation shell 1.

[0052] In specific implementation, a test post 3-1 is provided on the top of the resonator 3.

[0053] In specific implementation, the material of the transparent light window 2 includes sapphire glass or quartz glass.

[0054] In specific implementation, the encapsulation shell 1 is made of Kovar alloy. This material has a relatively constant coefficient of expansion within the operating temperature range of the hemispherical resonator gyroscope, which is close to the coefficient of expansion of the sealed materials such as glass and ceramics, thus achieving a good matching sealing effect.

[0055] In practice, the transparent light window 2 and the encapsulation shell 1 are connected by welding.

[0056] Example 2: A device for measuring vibration parameters of a hemispherical resonator gyroscope

[0057] like Figure 3 As shown, an embodiment of the present invention provides a device for measuring the vibration parameters of a hemispherical resonant gyroscope, comprising:

[0058] The aforementioned hemispherical resonant gyroscope;

[0059] A Doppler laser vibrometer is used to emit a laser through the transparent light window 2 into the resonator 3 inside the hemispherical resonator gyroscope, and to obtain the vibration signal of the resonator 3 based on the returned laser signal.

[0060] The control circuit is electrically connected to the hemispherical resonant gyroscope and is used to excite and control the vibration of the resonator 3.

[0061] The host computer is connected to the Doppler laser vibrometer and the control circuit for collecting and processing the vibration signals to obtain vibration parameters, adjusting the control parameters of the control circuit, and recording the vibration parameters and control parameters and fitting their relationship.

[0062] In practice, the laser emitted by the Doppler laser vibrometer is focused on the test column 3-1 or the lip 3-2 of the resonator 3.

[0063] When the laser is focused on the test column 3-1, the two transparent light windows create conditions for calculating the first to third order mass imbalance. Specifically, two Doppler laser vibrometers are irradiated onto the test column through the two transparent light windows. By measuring the physical amplitude and other parameters at the test column and combining them with the corresponding algorithm, the magnitude of the first to third order additional vibrations can be further calculated, and the first to third order mass imbalance can be calculated.

[0064] In a specific implementation, the measuring device further includes a buffer circuit 4, which is connected between the lead-out electrode 5 of the hemispherical resonant gyroscope and the control circuit, and is used for signal pickup, amplification or conditioning.

[0065] In a specific implementation, the buffer circuit 4 is welded to the lead-out electrode 5.

[0066] In practice, the vibration signal includes displacement signal and velocity signal; the vibration parameters include the actual physical amplitude of the harmonic oscillator 3; and the control parameters include amplitude control parameters and standing wave precession angle.

[0067] The remaining unmentioned device structures are all existing technologies. For example, in addition to the resonator 3, the encapsulation shell 1 also contains a flat plate electrode that is welded and fixed to the resonator 3 for exciting and detecting the vibration of the resonator 3. These are all existing technologies and will not be described in detail here.

[0068] Example 3: A method for measuring the actual physical amplitude of a hemispherical resonant gyroscope

[0069] This embodiment details the method for measuring actual physical amplitude using the aforementioned measuring device, including the following steps:

[0070] S1. Fix the hemispherical resonator gyroscope to the test fixture. Start the host computer, input the operating frequency of the resonator through the host computer, and adjust the amplitude and orthogonal loop control parameters to make the resonator establish and stabilize in the four-antinode standing wave vibration mode;

[0071] S2. Adjust the position and angle of the Doppler laser vibrometer so that its emitted laser beam passes through the first transparent window on the package and is focused on the lip of the resonator. Adjust the light intensity of the Doppler laser vibrometer to maximize the signal strength.

[0072] S3. The displacement signal measured by the Doppler laser vibration meter is acquired in real time by the host computer. During this process, the standing wave is pushed to precession, and the displacement signal is observed. The standing wave is pushed to the position with the largest displacement signal amplitude. The host computer acquires the displacement signal at this time and processes it into the actual physical amplitude, thus completing the measurement of the actual physical amplitude.

[0073] Example 4: A method for controlling the actual physical amplitude of a hemispherical resonator gyroscope

[0074] This embodiment details how to use the aforementioned measuring device to establish a quantitative correspondence between the amplitude control parameter (E) of the hemispherical resonant gyroscope and the actual physical amplitude (A), and to control the actual physical amplitude. The specific steps are as follows:

[0075] S1. Fix the hemispherical resonator gyroscope to the test fixture. Start the host computer, input the operating frequency of the resonator through the host computer, and adjust the amplitude and orthogonal loop control parameters to make the resonator establish and stabilize in the four-antinode standing wave vibration mode.

[0076] S2. Adjust the position and angle of the Doppler laser vibrometer so that its emitted laser beam passes through the first transparent window on the package and is focused on the lip of the resonator. Adjust the light intensity of the Doppler laser vibrometer to maximize the signal strength.

[0077] S3. The displacement signal measured by the Doppler laser vibration meter is acquired in real time by the host computer. During this process, the standing wave is propelled to precession by adjusting the standing wave azimuth (Cp) control parameter, while the displacement signal is observed. The standing wave is pushed to the position with the largest displacement signal amplitude.

[0078] S4. Record the amplitude control parameter (E) and the actual physical amplitude (A) at this time.

[0079] S5. Change the set value of the amplitude control parameter. After re-establishing a stable four-wave antinode standing wave vibration, repeat steps S3 to S4 to obtain multiple sets of amplitude control parameter (E) and actual physical amplitude (A) data pairs.

[0080] S6. Based on the above data pairs, establish the correspondence between the amplitude control parameters and the actual physical amplitude through curve fitting (such as linear fitting, polynomial fitting, etc.);

[0081] S7. Based on the established correspondence between the amplitude control parameter and the actual physical amplitude, determine the amplitude control parameter that needs to be adjusted according to the actual physical amplitude to be achieved, and then adjust the amplitude control parameter to the determined value to control the actual physical amplitude to the required value.

[0082] Example 5: A method for measuring the vibration parameters of a hemispherical resonant gyroscope (mapping the circumferential stiffness distribution)

[0083] This embodiment details how to use the measuring device to measure the uniformity of the circumferential stiffness distribution of the harmonic oscillator. Since the working mode of the hemispherical resonant gyroscope is a four-antinode standing wave, its vibration distribution has a 90° periodicity. Therefore, in a preferred embodiment, by measuring multiple positions within the range of 0° to 90°, its stiffness distribution characteristics in the entire circumferential direction can be characterized.

[0084] The specific steps in this embodiment are as follows:

[0085] S1. Fix the hemispherical resonator gyroscope to the test fixture. Start the host computer, input the operating frequency of the resonator through the host computer, and adjust the amplitude and orthogonal loop control parameters to make the resonator establish and stabilize in the four-antinode standing wave vibration mode.

[0086] S2. Adjust the position and angle of the Doppler laser vibrometer so that its emitted laser beam passes through the first transparent window on the package and is focused on the lip of the resonator. Adjust the light intensity of the Doppler laser vibrometer to maximize the signal strength.

[0087] S3. The displacement signal measured by the Doppler laser vibrometer is acquired in real time by the host computer. During this process, the azimuth (Cp) control parameter is used to drive the standing wave to precess along the lip of the harmonic oscillator. At the same time, the displacement signal is observed. The standing wave is pushed to the position with the largest displacement signal amplitude and this position is recorded as 0°.

[0088] S4. Record the amplitude control parameter E and the actual physical amplitude A0 at this time;

[0089] S5. Keeping the amplitude control parameter unchanged, use the control parameter (Cp) to push the standing wave along the lip of the harmonic oscillator to multiple measurement positions deflected by 10°, 20°, ..., 90° relative to the reference 0° position;

[0090] S6. At each measurement position, adjust the Doppler laser beam angle to maximize the displacement signal amplitude, and record the actual physical amplitude (A1, A2...A9) corresponding to the measurement position.

[0091] S7, Based on the actual physical amplitude A n Calculate the normalized stiffness value (1 / A) n );

[0092] S8. Based on the angles of the multiple measurement positions relative to the 0° position and their corresponding normalized stiffness values, draw schematic diagrams of 1 / A1, ..., 1 / A9 unfolded along 0~90° to obtain the circumferential stiffness distribution diagram of the harmonic oscillator.

[0093] It should be noted that, in this embodiment, to balance measurement efficiency and accuracy, the multiple circumferential measurement positions are selected at equal intervals (e.g., 10°). It is understood that the number and interval of measurement positions can be adjusted according to accuracy requirements.

[0094] The above embodiments only disclose in detail the measurement methods for the actual physical amplitude calibration and circumferential stiffness distribution of the harmonic oscillator. For more complex vibration modal analysis (such as the calculation of 1st to 3rd order mass imbalances), extended measurement configurations (such as dual optical windows and dual vibration meters) combined with corresponding algorithms can be used. This part will be protected in a separate application.

[0095] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit the technical solutions. Those skilled in the art should understand that any modifications or equivalent substitutions to the technical solutions of the present invention without departing from the spirit and scope of the present invention should be covered within the scope of the claims of the present invention.

Claims

1. A hemispherical resonator gyroscope, comprising a housing and a resonator located within the housing; characterized in that, At least one transparent light window is provided on the packaging shell; the resonator can receive external light beams through the transparent light window.

2. The hemispherical resonator gyroscope according to claim 1, characterized in that, The transparent light window is disposed on the side wall and top of the encapsulation shell.

3. The hemispherical resonator gyroscope according to claim 1, characterized in that, A test post is provided on the top of the resonator.

4. The hemispherical resonator gyroscope according to claim 1, characterized in that, The transparent window is made of sapphire glass or quartz glass.

5. A device for measuring the vibration parameters of a hemispherical resonator gyroscope, characterized in that, include: The hemispherical resonator gyroscope according to any one of claims 1 to 4; A Doppler laser vibrometer is used to emit a laser through the transparent optical window into the resonator inside the hemispherical resonator gyroscope, and to obtain the vibration signal of the resonator based on the returned laser signal. A control circuit, electrically connected to the hemispherical resonator gyroscope, is used to excite and control the vibration of the resonator. The host computer is connected to the Doppler laser vibrometer and the control circuit for collecting and processing the vibration signals to obtain vibration parameters, adjusting the control parameters of the control circuit, and recording the vibration parameters and control parameters and fitting their relationship.

6. The hemispherical resonator gyroscope vibration parameter measuring device according to claim 5, characterized in that, The measuring device also includes a buffer circuit, which is connected between the lead-out electrodes of the hemispherical resonant gyroscope and the control circuit, and is used for signal pickup, amplification or conditioning.

7. The hemispherical resonator gyroscope vibration parameter measuring device according to claim 5, characterized in that, The vibration signal includes displacement signal and velocity signal; the vibration parameters include the actual physical amplitude of the harmonic oscillator; the control parameters include amplitude control parameters and standing wave precession angle.

8. A method for measuring the vibration parameters of a hemispherical resonant gyroscope, characterized in that, The measurement of vibration parameters using the hemispherical resonator gyroscope vibration parameter measuring device according to any one of claims 5 to 7 includes the following steps: S1. Fix the hemispherical resonant gyroscope, and use the host computer to control the circuit to excite the resonator and adjust the control parameters to establish and maintain a stable four-wave antinode standing wave oscillation. S2. Adjust the Doppler laser vibrometer so that the emitted laser beam passes through the transparent window and is focused on the lip of the harmonic oscillator; S3. The vibration signal measured by the Doppler laser vibration meter is acquired in real time by the host computer. During this process, the standing wave is pushed to precession, and the vibration signal is observed. The standing wave is pushed to the position with the largest vibration signal amplitude. The vibration signal at this time is acquired by the host computer and processed into vibration parameters, thus completing the measurement of vibration parameters.

9. A method for measuring the vibration parameters of a hemispherical resonant gyroscope, characterized in that, The measurement is performed using the hemispherical resonator gyroscope vibration parameter measuring device according to any one of claims 5 to 7, and is used to measure the circumferential stiffness distribution of the resonator, comprising the following steps: S1. Fix the hemispherical resonant gyroscope, and use the host computer to control the circuit to excite the resonator and adjust the control parameters to establish and maintain a stable four-wave antinode standing wave oscillation. S2. Adjust the Doppler laser vibrometer so that the emitted laser beam passes through the transparent window and is focused on the lip of the harmonic oscillator; S3. The displacement signal measured by the Doppler laser vibration meter is acquired in real time by the host computer. During this process, the standing wave is pushed to precession, and the displacement signal is observed. The standing wave is pushed to the position with the largest displacement signal amplitude, and this position is recorded as 0°. S4. Record the amplitude control parameters and the actual physical amplitude at this time; S5. Keep the amplitude control parameter unchanged, adjust the standing wave, and make the standing wave precess to several different circumferential measurement positions on the circumference of the harmonic oscillator lip, which are sufficient to characterize its circumferential stiffness distribution. S6. At each measurement position, adjust the laser beam angle to maximize the displacement signal amplitude, and record the actual physical amplitude corresponding to the measurement position. S7. Calculate the normalized stiffness value based on the actual physical amplitude; S8. Based on the angles of the multiple measurement positions relative to the 0° position and their corresponding normalized stiffness values, draw the circumferential stiffness distribution diagram of the harmonic oscillator.

10. A method for controlling the actual physical amplitude of a hemispherical resonant gyroscope, characterized in that, Controlling the gyroscope using the vibration parameter measuring device of any one of claims 5 to 7 includes the following steps: S1. Fix the hemispherical resonant gyroscope, and use the host computer to control the circuit to excite the resonator and adjust the control parameters to establish and maintain a stable four-wave antinode standing wave oscillation. S2. Adjust the Doppler laser vibrometer so that the emitted laser beam passes through the transparent window and is focused on the lip of the harmonic oscillator; S3. The displacement signal measured by the Doppler laser vibration meter is acquired in real time by the host computer. During this process, the standing wave is pushed to precession, and the displacement signal is observed. The standing wave is pushed to the position with the largest displacement signal amplitude. S4. Record the amplitude control parameters and the actual physical amplitude at this time; S5. Change the set value of the amplitude control parameter. After re-establishing a stable four-wave antinode standing wave vibration, repeat steps S3 to S4 to obtain multiple sets of amplitude control parameter and actual physical amplitude data pairs. S6. Based on the above data pairs, establish the correspondence between the amplitude control parameters and the actual physical amplitude; S7. Based on the established correspondence between the amplitude control parameter and the actual physical amplitude, determine the amplitude control parameter that needs to be adjusted according to the actual physical amplitude to be achieved, and then adjust the amplitude control parameter to the determined value to control the actual physical amplitude to the required value.