Superfine pitch cantilever type probe card based on stress buffer structure

Abstract

The invention discloses a super-fine-pitch cantilever type probe card based on a stress buffer structure, and belongs to the technical field of semiconductor detection, and the super-fine-pitch cantilever type probe card comprises a plate, an insulating plate is fixedly installed on a substrate through bolts, a clamping groove is formed in the insulating plate, a rubber block is slidably connected in the clamping groove, a probe is installed at the lower end of the rubber block, and a fixing plate is installed on the insulating plate. A sliding groove is formed in the fixing plate, a sliding block is slidably connected into the sliding groove, a spring is installed in the sliding groove, one end of the spring is connected to the sliding block, a limiting rod is connected to the sliding block, a limiting sleeve is installed on the rubber block, the limiting rod penetrates through the limiting sleeve, and an installation groove is formed in the rubber block. According to the invention, the defects in the prior art are overcome, the corresponding probe can be quickly disassembled through the mutual cooperation of the substrate, the insulating plate, the clamping groove, the rubber block, the probe, the fixed plate, the sliding block, the spring, the sliding rod, the limiting rod, the limiting sleeve and other structures, the overall disassembly of parts is not needed, the manual labor is reduced, the time is saved, and the equipment applicability is improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor testing, and in particular to an ultra-fine pitch cantilever probe card based on a stress buffer structure. Background Technology

[0002] In the semiconductor chip packaging and testing process, probe cards serve as the signal transmission medium between the chip and the testing equipment, and their performance directly affects the testing accuracy and efficiency. Currently, ultra-fine pitch cantilever probe cards are widely used due to their suitability for high-density chip testing needs.

[0003] However, the probes of existing ultra-fine pitch cantilever probe cards are all welded. After long-term wear, when the probe needs to be replaced, it needs to be re-welded, which is time-consuming and labor-intensive, reduces work efficiency, and leads to increased testing costs and insufficient equipment applicability. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides an ultra-fine pitch cantilever probe card based on a stress-buffering structure, overcoming the deficiencies of existing technologies.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an ultra-fine pitch cantilever probe clip based on a stress buffer structure, comprising a substrate, an insulating plate fixedly mounted on the substrate by bolts, a slot formed on the insulating plate, a rubber block slidably connected in the slot, a probe mounted on the lower end of the rubber block, a fixing plate mounted on the insulating plate, a sliding groove formed on the fixing plate, a slider slidably connected in the sliding groove, a spring installed in the sliding groove, one end of the spring connected to the slider, a limit rod connected to the slider, a limit sleeve installed on the rubber block, the limit rod passing through the limit sleeve, an installation groove formed in the rubber block, an elastic buffer member installed in the installation groove, a movable block connected to the lower end of the elastic buffer member, and the upper end of the probe penetrating the rubber block and connected to the movable block.

[0006] By adopting the above technical solution, during use, the chip is tested using probes and testing equipment. When the probe is subjected to force, it applies force to the movable block, causing the movable block to slide within the mounting groove. The elastic buffer deforms, generating a buffering force that protects the probe from damage due to excessive force. When the probe needs to be replaced, force is applied to the slider, causing it to slide along the slide rod within the groove and compress the spring. The slider then drives the limit rod to move. Once the limit rod disengages from the limit sleeve, force is applied to the rubber block, causing it to slide along the slot. The second magnetic block separates from the first magnetic block until the rubber block is completely detached from the slot, at which point the probe and rubber block can be removed. When replacing the probe and rubber block, the above operation is performed in reverse. This eliminates the need for complete disassembly of the components, reducing manual labor, saving time, and improving the applicability of the equipment.

[0007] As a preferred embodiment of the present invention, the elastic buffer is a buffer spring, and the two ends of the buffer spring are fixedly connected to the mounting groove wall and the movable block, respectively.

[0008] By adopting the above technical solution, the buffer spring has good elastic deformation capability, can quickly respond to the force applied to the probe, provide timely buffer protection, and has a simple structure and strong stability.

[0009] As a preferred embodiment of the present invention, the end of the limiting rod away from the slider is provided as an inclined surface, and the opening of the limiting sleeve is provided with a guide surface adapted to the inclined surface.

[0010] By adopting the above technical solution, when installing the rubber block, the guide surface and the inclined surface cooperate to facilitate the quick insertion of the limiting rod into the limiting sleeve, thereby improving installation efficiency.

[0011] As a preferred embodiment of the present invention, a lever is installed on the slider, and the lever passes through the fixing plate and extends outward.

[0012] By adopting the above technical solution, the pusher provides the operator with a point of force application, which facilitates the movement of the slider and further simplifies the probe replacement operation.

[0013] As a preferred embodiment of the present invention, the probe and the movable block are fixed by welding, and the probe is made of tungsten alloy.

[0014] By adopting the above technical solution, welding and fixing ensure the firmness of the connection between the probe and the moving block. The tungsten alloy material has high strength, high hardness and good conductivity, which meets the application requirements of ultra-fine pitch detection.

[0015] As a preferred embodiment of the present invention, a slide rod is fixedly connected inside the slide groove, the slide rod passes through the slider and the spring, and the slider is slidably connected to the slide rod.

[0016] By adopting the above technical solution, the slider is prevented from detaching from the groove.

[0017] As a preferred embodiment of the present invention, a fixing groove is provided in the rubber block, and a fixing rod is fixedly connected to the bottom of the groove. The fixing groove and the fixing rod are positioned correspondingly. Two first magnetic blocks are symmetrically fixedly connected to the bottom of the groove, and a second magnetic block is fixedly connected to the bottom of the groove. The first magnetic blocks and the second magnetic blocks are magnetically attracted to each other.

[0018] By adopting the above technical solution, the rubber block is limited, thereby improving the stability of the rubber block installation.

[0019] Compared with the prior art, the beneficial effects of the present invention are: This invention utilizes a structure comprising a substrate, an insulating plate, a slot, a rubber block, a probe, a fixing plate, a slider, a spring, a sliding rod, a limiting rod, and a limiting sleeve. The probe and testing equipment detect the chip. When the probe is subjected to force, it applies force to the movable block, causing the block to slide within the mounting groove. The elastic buffer deforms, generating a buffering force that protects the probe from damage due to excessive force. When the probe needs replacement, force is applied to the slider, causing it to slide along the sliding rod within the groove and compress the spring. The slider then moves the limiting rod. Once the limiting rod disengages from the limiting sleeve, force is applied to the rubber block, causing it to slide along the slot. The second magnetic block separates from the first magnetic block until the rubber block is completely detached from the slot, at which point the probe and rubber block can be removed. Replacing the probe and rubber block with a new one involves reversing the above steps. This eliminates the need for complete disassembly, reducing manual labor, saving time, and improving equipment versatility.

[0020] This invention utilizes structures such as mounting grooves, elastic buffers, and movable blocks. The elastic buffers absorb and buffer external forces to protect the probe and prevent it from bending under stress, thereby improving the service life of the equipment. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a cross-sectional structural diagram of the present invention; Figure 3 This is a schematic diagram of the internal structure of the rubber block in this invention; Figure 4 for Figure 3 Enlarged view of section A; Figure 5 for Figure 3 Enlarged view of section B.

[0022] Explanation of reference numerals in the attached figures: 1. Base plate; 2. Insulating plate; 3. Slot; 4. Rubber block; 5. Probe; 6. Fixing plate; 7. Slider; 8. Spring; 9. Slide rod; 10. Limiting rod; 11. Limiting sleeve; 12. Fixing groove; 13. Fixing rod; 14. First magnetic block; 15. Second magnetic block; 16. Mounting groove; 17. Elastic buffer; 18. Movable block. Detailed Implementation

[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] Please see Figure 1-5 An ultra-fine pitch cantilever probe clip based on a stress-buffered structure includes a base plate 1, an insulating plate 2 fixedly mounted on the base plate 1 by bolts, a slot 3 on the insulating plate 2, a rubber block 4 slidably connected within the slot 3, a probe 5 mounted on the lower end of the rubber block 4, and the probe 5 fixedly to a movable block 18 by welding. The probe 5 is made of tungsten alloy. The welding ensures the strong connection between the probe 5 and the movable block 18. Tungsten alloy has high strength, high hardness, and good conductivity, meeting the requirements for ultra-fine pitch detection. A fixing plate 6 is installed on the insulating plate 2. A sliding groove is opened on the fixing plate 6. A slider 7 is slidably connected in the sliding groove. A spring 8 is installed in the sliding groove, and one end of the spring 8 is connected to the slider 7. A lever is installed on the slider 7, and the lever passes through the fixing plate 6 and extends outward. The lever provides a force point for the operator to easily drive the slider 7 to move, further simplifying the replacement operation of the probe 5. A sliding rod 9 is fixedly connected in the sliding groove. The sliding rod 9 passes through the slider 7 and the spring 8, and the slider 7 is slidably connected to the sliding rod 9 to prevent the slider 7 from detaching from the sliding groove. A limiting rod 10 is connected to the slider 7, and a limiting sleeve 11 is installed on the rubber block 4. The limiting rod 10 passes through the limiting sleeve 11. The end of the limiting rod 10 away from the slider 7 is set as an inclined surface, and the opening of the limiting sleeve 11 is provided with a guide surface that matches the inclined surface. When installing the rubber block 4, the guide surface and the inclined surface cooperate to facilitate the limiting rod 10 to quickly snap into the limiting sleeve 11, thereby improving the installation efficiency. The rubber block 4 has an installation groove 16, and an elastic buffer 17 is installed in the installation groove 16. The elastic buffer 17 is a buffer spring, and the two ends of the buffer spring are fixedly connected to the groove wall of the installation groove 16 and the movable block 18 respectively. The buffer spring has good elastic deformation capability, can quickly respond to the force on the probe 5, and provide timely buffer protection. It also has a simple structure and strong stability. The lower end of the elastic buffer 17 is connected to the movable block 18, and the upper end of the probe 5 passes through the rubber block 4 and is connected to the movable block 18. A fixing groove 12 is provided inside the rubber block 4. A fixing rod 13 is fixedly connected to the bottom of the groove 3. The fixing groove 12 and the fixing rod 13 are positioned correspondingly. Two first magnetic blocks 14 are symmetrically fixedly connected to the bottom of the groove 3. A second magnetic block 15 is fixedly connected to the bottom of the groove 3. The first magnetic blocks 14 and the second magnetic blocks 15 are magnetically attracted to each other to limit the position of the rubber block 4 and improve the stability of the installation of the rubber block 4.

[0025] Working principle: During use, the chip is tested through probe 5 and testing equipment. When probe 5 is subjected to force, it applies force to movable block 18, causing movable block 18 to slide within mounting groove 16. Elastic buffer 17 provides buffer protection for probe 5. When the corresponding probe 5 needs to be replaced, force is applied to the corresponding slider 7, causing slider 7 to slide within groove. The movement of slider 7 compresses spring 8, and the movement of slider 7 also drives limit rod 10 to move. When limit rod 10 moves from limit sleeve 1... When the rubber block 4 is disengaged from the slot 3, a force is applied to the corresponding rubber block 4, causing the rubber block 4 to slide inside the slot 3. This causes the second magnetic block 15 on the rubber block 4 to separate from the first magnetic block 14 inside the slot 3 until the rubber block 4 is completely disengaged from the slot 3. At this point, the corresponding rubber block 4 and probe 5 can be removed. Then, the above operation can be repeated to replace the new probe 5 and rubber block 4. The above structure facilitates the disassembly and installation of the corresponding probe 5 without disassembling the entire component, thereby reducing manual labor, saving time, and improving the applicability of the equipment.

[0026] Finally, it should be noted that in the description of this invention, the terms "vertical," "upper," "lower," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0027] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0028] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A cantilever probe clip with an ultra-fine pitch based on a stress buffer structure, comprising a substrate (1), an insulating plate (2) fixedly mounted on the substrate (1) by bolts, a slot (3) formed on the insulating plate (2), a rubber block (4) slidably connected in the slot (3), a probe (5) mounted on the lower end of the rubber block (4), a fixing plate (6) mounted on the insulating plate (2), a sliding groove formed on the fixing plate (6), a slider (7) slidably connected in the sliding groove, and a spring (8) installed in the sliding groove. The spring (8) is connected to the slider (7) at one end. A limit rod (10) is connected to the slider (7). A limit sleeve (11) is installed on the rubber block (4). The limit rod (10) passes through the limit sleeve (11). An installation groove (16) is opened in the rubber block (4). An elastic buffer (17) is installed in the installation groove (16). A movable block (18) is connected to the lower end of the elastic buffer (17). The upper end of the probe (5) passes through the rubber block (4) and is connected to the movable block (18).

2. The ultra-fine pitch cantilever probe card based on a stress buffer structure according to claim 1, characterized in that: The elastic buffer (17) is a buffer spring, and the two ends of the buffer spring are fixedly connected to the groove wall of the mounting groove (16) and the movable block (18) respectively.

3. The ultra-fine pitch cantilever probe card based on a stress buffer structure according to claim 1, characterized in that: The end of the limiting rod (10) away from the slider (7) is set as an inclined surface, and the opening of the limiting sleeve (11) is provided with a guide surface that is adapted to the inclined surface.

4. The ultra-fine pitch cantilever probe card based on a stress buffer structure according to claim 3, characterized in that: A lever is installed on the slider (7), and the lever passes through the fixing plate (6) and extends outward.

5. The ultra-fine pitch cantilever probe card based on a stress buffer structure according to claim 1, characterized in that: The probe (5) is fixed to the movable block (18) by welding, and the probe (5) is made of tungsten alloy.

6. The ultra-fine pitch cantilever probe card based on a stress buffer structure according to claim 5, characterized in that: A slide rod (9) is fixedly connected inside the slide groove. The slide rod (9) passes through the slider (7) and the spring (8), and the slider (7) is slidably connected to the slide rod (9).

7. The ultra-fine pitch cantilever probe card based on a stress buffer structure according to claim 1, characterized in that: The rubber block (4) has a fixing groove (12) inside. The bottom of the slot (3) is fixedly connected to a fixing rod (13). The fixing groove (12) and the fixing rod (13) are positioned opposite each other. The bottom of the slot (3) is symmetrically fixedly connected to two first magnetic blocks (14). The bottom of the slot (3) is fixedly connected to a second magnetic block (15). The first magnetic block (14) and the second magnetic block (15) are magnetically attracted to each other.

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