A focusing ring clamping jig

Abstract

The application provides a focusing ring clamping jig, and relates to the technical field of clamps, which comprises a supporting seat, a clamping mechanism and a rotary driving mechanism; the supporting seat is used for receiving a focusing ring; the clamping mechanism is centrally symmetrically arranged at least three times and comprises a base plate and an inner diameter positioning assembly and an outer diameter positioning assembly movably connected to the base plate; the base plate is movably arranged on the supporting seat, and the focusing ring is located between the inner diameter positioning assembly and the outer diameter positioning assembly; and the rotary driving mechanism is installed at the center of the supporting seat and used for simultaneously driving the at least three base plates of the clamping mechanism to move along the radial direction of the focusing ring relative to the supporting seat. The inner diameter positioning assembly and the outer diameter positioning assembly are used to respectively realize the positioning of the inner diameter and the outer diameter of the focusing ring, so that when the inner surface and the outer surface of the focusing ring need to be machined, the clamping mechanism does not need to be disassembled or replaced, and the positioning efficiency is higher.

Description

Technical Field

[0001] This invention relates to the field of machining fixtures for focusing rings of semiconductor etching equipment components, and in particular to a focusing ring clamping fixture. Background Technology

[0002] In semiconductor etching equipment, wafers are typically placed on electrostatic chucks, with a focusing ring positioned outside the chuck. The focusing ring serves to limit the wafer's position and improve the uniformity of etching at the wafer edges. During machining, the focusing ring is usually clamped using the machine tool's built-in three-jaw chuck. When both the inner and outer surfaces of the focusing ring need to be machined, two clamping operations are required, which is cumbersome and makes it difficult to maintain consistent positioning references. When the inner or outer surface of the focusing ring has an irregular shape, the clamping force is difficult to control, and instability during machining can easily lead to the focusing ring detaching. This is especially true when the focusing ring itself is hard and brittle; excessive clamping can damage the material, while unstable clamping can easily cause the focusing ring to detach, particularly during the clamping process on horizontal machining centers. Summary of the Invention

[0003] This invention provides a focusing ring clamping fixture, including a support base, a clamping mechanism, and a rotary drive mechanism;

[0004] The support base is used to receive the focusing ring;

[0005] At least three clamping mechanisms are arranged symmetrically in a central manner, including a base plate and an inner diameter positioning component and an outer diameter positioning component movably connected to the base plate. The base plate is movably disposed on the support base, and the focusing ring is located between the inner diameter positioning component and the outer diameter positioning component.

[0006] A rotary drive mechanism is mounted at the center of the support base to simultaneously drive at least three base plates of the clamping mechanism to move radially relative to the support base along the focusing ring, such that the inner diameter positioning component and / or the outer diameter positioning component clamps the focusing ring.

[0007] In an optional embodiment, the rotary drive mechanism includes a rotary seat, which is connected to three clamping mechanisms via three connecting rods. The two ends of the connecting rods are respectively hinged to the base plate of the clamping mechanism and the rotary seat. When the rotary seat rotates, it drives the base plate of the clamping mechanism to move through the connecting rods.

[0008] In an optional embodiment, the inner diameter positioning component includes a liftable inner diameter limiting block and a first end face pressure claw. The inner diameter limiting block is connected to the substrate, and the first end face pressure claw is mounted above the inner diameter limiting block. The outer diameter positioning component includes a liftable outer diameter limiting block and a second end face pressure claw. The outer diameter limiting block is connected to the substrate, and the second end face pressure claw is mounted above the outer diameter limiting block. The first end face pressure claw and the second end face pressure claw are used to press the focusing ring onto the support base.

[0009] In an alternative embodiment, the support base is provided with a mounting groove in the radial direction, and the substrate, the inner diameter positioning component, and the outer diameter positioning component of the clamping mechanism are arranged in the mounting groove. The inner diameter limiting block, the first end face clamping jaw, the outer diameter limiting block, and the second end face clamping jaw can all be lowered to a position not higher than the end face of the focusing ring close to the support base.

[0010] In an alternative embodiment, the inner diameter positioning component further includes an inner slider. The inner diameter limiting block is arranged in the inner slider in a liftable manner. The bottom of the inner diameter limiting block is connected to the inner slider through a spring. The inner diameter limiting block is in a "convex" shape. The top of the inner slider is provided with a limiting surface facing the stepped surface of the "convex" shape. The first end face clamping jaw is connected to the driving end of the first clamping cylinder through a first connecting rod. The first clamping cylinder is installed on the end face of the support base away from the focusing ring. The first connecting rod 500 is movably arranged through the inner slider and the inner diameter limiting block; the inner slider is provided with a notch for accommodating the first end face clamping jaw corresponding to the end of the first end face clamping jaw extending towards the focusing ring; the outer diameter positioning component further includes an outer slider. The outer diameter limiting block is arranged in the outer slider in a liftable manner. The bottom of the outer diameter limiting block is connected to the outer slider through a spring. The outer diameter limiting block is in a "convex" shape. The top of the outer slider is provided with a limiting surface facing the stepped surface of the "convex" shape. The second end face clamping jaw is connected to the driving end of the second clamping cylinder through a second connecting rod. The second clamping cylinder is installed on the end face of the support base away from the focusing ring. The second connecting rod is movably arranged through the outer slider and the outer diameter limiting block; the outer slider is provided with a notch for accommodating the second end face clamping jaw corresponding to the end of the second end face clamping jaw extending towards the focusing ring.

[0011] In an alternative embodiment, the inner diameter positioning component further includes a first lifting drive mechanism for driving the first connecting rod to lift, and the outer diameter positioning component further includes a second lifting drive mechanism for driving the second connecting rod to lift. The first lifting drive mechanism and the second lifting drive mechanism are both slidably connected to the lower slide rail, and the lower slide rail is arranged on the support base.

[0012] In an alternative embodiment, both the inner slider and the outer slider are slidably connected to the upper slide rail, and the upper slide rail is arranged on the support base. The moving directions of both the inner slider and the outer slider are the same as the moving direction of the substrate.

[0013] In an alternative embodiment, the substrate is provided with a first kidney-shaped hole and a second kidney-shaped hole. The first connecting rod passes through the first kidney-shaped hole, and the first connecting rod is configured to be able to reciprocate along the length direction of the first kidney-shaped hole. The second connecting rod passes through the second kidney-shaped hole, and the second connecting rod is configured to be able to reciprocate along the length direction of the second kidney-shaped hole; a reset mechanism is arranged between both the inner diameter positioning component and the outer diameter positioning component and the support base. One end of the reset mechanism is connected to the support base, and the other end is connected to the inner diameter positioning component / outer diameter positioning component.

[0014] In an alternative embodiment, a washer for contacting the focusing ring is further arranged on the support base, and the washer is located between the inner diameter positioning component and the outer diameter positioning component.

[0015] In an optional embodiment, the driving element of the rotary drive mechanism is a rotary cylinder, which is mounted on a chuck clamping member. The chuck clamping member is mounted on the side of the support base away from the product, and is used for mounting the focusing ring clamping fixture on the machine tool.

[0016] The focusing ring clamping fixture provided by the present invention has the following beneficial effects: the rotary drive mechanism can drive the inner diameter positioning component and the outer diameter positioning component to move through the base plate, thereby using the inner diameter positioning component and the outer diameter positioning component to realize the positioning of the inner diameter and the outer diameter of the focusing ring respectively. When both the inner surface and the outer surface of the focusing ring need to be processed, there is no need to disassemble or replace the clamping mechanism, and the positioning efficiency is higher. Attached Figure Description

[0017] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0018] Figure 1 This is one of the three-dimensional structural schematic diagrams of the focusing ring clamping fixture provided in an embodiment of the present invention;

[0019] Figure 2 This is a second three-dimensional structural schematic diagram of the focusing ring clamping fixture provided in an embodiment of the present invention;

[0020] Figure 3 This is a top view of the focusing ring clamping fixture provided in an embodiment of the present invention;

[0021] Figure 4 for Figure 3 Sectional view at point AA;

[0022] Figure 5 This is an exploded view of the clamping mechanism in the focusing ring clamping fixture provided in an embodiment of the present invention;

[0023] Figure 6 This is an exploded view of a portion of the clamping mechanism in the focusing ring clamping fixture provided in an embodiment of the present invention;

[0024] Figure 7 The third three-dimensional structural schematic diagram of the focusing ring clamping fixture provided in the embodiment of the present invention.

[0025] Icons: 100-Focusing ring; 200-Support base; 211-Base plate; 212-First oblong hole; 213-Second oblong hole; 220-Inner diameter positioning assembly; 221-Inner diameter limiting block; 222-First end face pressure claw; 223-First clamping cylinder; 230-Outer diameter positioning assembly; 231-Outer diameter limiting block; 232-Second end face pressure claw; 233-Second clamping cylinder; 240-Mounting groove; 250-Washer; 261-Inner slider; 262-Outer slider; 270-Tension spring; 310-Rotating seat; 320-Connecting rod; 330-Rotating cylinder; 400-Chuck; 500-First connecting rod; 510-First movable connecting part; 520-First upper support part; 600-Second connecting rod; 610-Second movable connecting part; 620-Second upper support part; 700 - Air slip ring; 810 - Upper slide rail; 820 - Lower slide rail; 900 - Spring. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0028] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0029] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0030] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0031] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0032] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0033] This invention provides a focusing ring clamping fixture for machine tools, such as... Figures 1 to 7 As shown, the focusing ring 100 clamping fixture includes a support base 200, a clamping mechanism, and a rotary drive mechanism; the support base 200 is used to receive the focusing ring 100; at least three clamping mechanisms are arranged symmetrically at the center, including a base plate 211 and an inner diameter positioning component 220 and an outer diameter positioning component 230 movably connected to the base plate 211. The base plate 211 is movably disposed on the support base 200, and the focusing ring 100 is located between the inner diameter positioning component 220 and the outer diameter positioning component 230; the rotary drive mechanism is installed at the center of the support base 200 and is used to simultaneously drive the base plate 211 of all clamping mechanisms to move radially relative to the support base 200 along the focusing ring 100.

[0034] in, Figure 1 This is one of the three-dimensional structural schematic diagrams of the focusing ring 100 clamping fixture provided in an embodiment of the present invention. Figure 1 This includes the focusing ring 100; Figure 2 This is the second three-dimensional structural schematic diagram of the focusing ring 100 clamping fixture provided in an embodiment of the present invention. Figure 2 The focus ring 100 has been removed from the center. Figure 3 This is a top view of the focusing ring 100 clamping fixture provided in an embodiment of the present invention; Figure 4 for Figure 3 Sectional view at point AA; Figure 5 This is an exploded view of the clamping mechanism in the focusing ring 100 clamping fixture provided in an embodiment of the present invention; Figure 6 This is an exploded view of a portion of the clamping mechanism in the focusing ring 100 clamping fixture provided in an embodiment of the present invention. Figure 7 The third three-dimensional structural schematic diagram of the focusing ring 100 clamping fixture provided in this embodiment of the invention is a schematic diagram of a horizontal machine tool; wherein... Figure 1 The chuck 400 shown in the other accompanying drawings is a component of a machining tool.

[0035] In use, the focusing ring 100 is placed between the inner diameter positioning component 220 and the outer diameter positioning component 230 beforehand. Then, the rotary drive mechanism is started. The rotary drive mechanism simultaneously drives the three base plates 211 of the clamping mechanism to move radially relative to the support base 200 along the focusing ring 100. The base plates 211 drive the inner diameter positioning component 220 and the outer diameter positioning component 230 to move, thereby using the inner diameter positioning component 220 or the outer diameter positioning component 230 to achieve the positioning of the inner diameter or outer diameter of the focusing ring 100. When both the inner and outer surfaces of the focusing ring 100 need to be machined, there is no need to disassemble or replace the clamping mechanism, resulting in higher positioning efficiency.

[0036] Specifically, in combination Figure 3 and Figure 4 In this embodiment, the rotary drive mechanism includes a rotary seat 310, which is connected to three clamping mechanisms via three connecting rods 320. The two ends of the connecting rods 320 are hinged to the base plate 211 of the clamping mechanism and the rotary seat 310, respectively. When the rotary seat 310 rotates, it drives the base plate 211 of the clamping mechanism to move via the connecting rods 320. The rotary seat 310 is driven by a rotary cylinder 330. For example, first, the rotary seat 310 is driven to rotate, causing the base plate 211 to move linearly, so that the inner diameter positioning component 220 clamps the inner surface of the focusing ring 100. At this time, the outer diameter positioning component 230 moves away from the outer surface of the focusing ring 100. After the machine tool completes the machining of the outer surface, the rotary cylinder 330 is rotated in the opposite direction, causing the inner diameter positioning component 220 to move away from the focusing ring 100, and the outer diameter positioning component 230 to simultaneously approach and clamp the outer surface of the focusing ring 100, thus machining the inner surface of the focusing ring 100.

[0037] like Figure 5 As shown, the inner diameter limiting block 221 and the outer diameter limiting block 231 are used to clamp and fix the inner and outer surfaces of the focusing ring 100, respectively. In order to further improve the clamping strength, the clamping mechanism is also provided with a liftable first end face pressure claw 222 and a second end face pressure claw 232, which can press the focusing ring 100 onto the support base 200. At this time, the inner diameter limiting block 221 and the outer diameter limiting block 231 do not need to be excessively clamped when fixing the focusing ring 100, and a stable clamping effect can be achieved. This avoids the influence of irregular shapes on the inner or outer surfaces of the focusing ring 100 on the clamping effect, so as not to damage the hard and brittle focusing ring 100 and to ensure the clamping effect.

[0038] In this embodiment, the lifting directions of the first end face clamping claw 222 and the second end face clamping claw 232 are perpendicular to the movement direction of the substrate 211. The inner diameter positioning component 220 is provided with a first clamping cylinder 223 for driving the first end face clamping claw 222 to lift, and the outer diameter positioning component 230 is provided with a second clamping cylinder 233 for driving the second end face clamping claw 232 to lift. In other embodiments, other types of driving elements, such as linear motors, can also be used for lifting.

[0039] Taking the inner diameter positioning component 220 as an example, before positioning, the first clamping cylinder 223 is in the raised extended state. At this time, the first end face pressure claw 222 is higher than the focusing ring 100. The rotating seat 310 rotates and drives the inner diameter limiting block 221. When the inner diameter limiting block 221 abuts against the inner surface of the focusing ring 100, the first end face pressure claw 222 will not hit the focusing ring 100 because it is higher than the inner diameter limiting block 221. After the inner diameter limiting block 221 is in place, the first clamping cylinder 223 is activated to lower and retract it, driving the first end face pressure claw 222 to press on the focusing ring 100. The inner diameter positioning component 220 completes the simultaneous positioning and clamping of the inner surface and end face of the focusing ring 100, which can fully guarantee the clamping effect. The inner diameter limiting block 221 can ensure the clamping stability even without applying too much force.

[0040] After the outer surface is machined, the first clamping cylinder 223 is activated to extend it, causing the first end face pressure claw 222 to move away from the focusing ring 100. Then, the rotating seat 310 is activated to rotate in the opposite direction, and the substrate 211 moves radially toward the center, causing the inner diameter limiting block 221 to leave the inner surface of the focusing ring 100. At the same time, the outer diameter positioning component 230 clamps the outer surface of the focusing ring 100. The positioning and release process of the outer diameter positioning component 230 is the same as that of the inner diameter positioning component 220, and will not be described again here.

[0041] Furthermore, the inner diameter limiting block 221, the first end face clamping claw 222, the outer diameter limiting block 231, and the second end face clamping claw 232 can all be lowered to a position no higher than the end face of the support base 200, thereby avoiding interference with the cutting tool when machining the corresponding side. Combined with Figure 1 , Figure 4 As shown, the support base 200 is provided with a mounting groove 240. The base plate 211, inner diameter positioning component 220, and outer diameter positioning component 230 of the clamping mechanism are all disposed in the mounting groove 240, and combined with... Figure 5 and Figure 6As shown, in this embodiment, the inner diameter positioning component 220 further includes an inner slider 261. An inner diameter limiting block 221 is vertically and flexibly disposed within the inner slider 261. The bottom of the inner diameter limiting block 221 is connected to the inner slider 261 via a spring 900. The inner diameter limiting block 221 is convex in shape, and the top of the inner slider 261 has a limiting surface directly opposite the convex step surface, which can limit the height of the inner diameter limiting block 221 extending beyond the inner slider 261. The first end face pressure claw 222 is connected to the drive end of the first clamping cylinder 223 via a first connecting rod 500. The first clamping cylinder 223 is mounted on the end face of the support base 200 away from the focusing ring 100. The first connecting rod 500 is movably inserted through... The first end face pressure claw 222 is located inside the inner slider 261 and the inner diameter limiting block 221. When the first end face pressure claw 222 rises under the drive of the first clamping cylinder 223, the spring 900 causes the inner diameter limiting block 221 to rise to clamp the inner surface of the focusing ring 100. When the tool processes the inner diameter of the focusing ring 100 and needs to be hidden in the mounting groove 240, the first end face pressure claw 222 falls under the drive of the first clamping cylinder 223. At the same time, the spring 900 is compressed so that the first end face pressure claw 222 and the inner diameter limiting block 221 are both located in the cavity of the inner slider 261. Correspondingly, the inner slider 261 has a slot at the end of the first end face pressure claw 222 that extends toward the focusing ring 100 to facilitate the accommodation of the first end face pressure claw 222.

[0042] Similarly, the outer diameter positioning assembly 230 also includes an outer slider 262. An outer diameter limiting block 231 is vertically and flexibly disposed in the outer slider 262. The bottom of the outer diameter limiting block 231 is connected to the outer slider 262 via a spring 900. The outer diameter limiting block 231 is convex in shape, and the top of the outer slider 262 is provided with a limiting surface that faces the convex step surface, which can limit the height of the outer diameter limiting block 231 extending out of the outer slider 262. The second end face pressure claw 232 is connected to the drive end of the second clamping cylinder 233 via a second connecting rod 600. The second clamping cylinder 233 is installed on the end face of the support 200 away from the focusing ring 100. The second connecting rod 600 is movably inserted through the outer... The second end face pressure claw 232 is located within the outer slider 262 and the outer diameter limiting block 231. When the second end face pressure claw 232 rises under the drive of the second clamping cylinder 233, the spring 900 causes the outer diameter limiting block 231 to rise, clamping the outer surface of the focusing ring 100. When the tool processes the outer diameter of the focusing ring 100 and needs to be hidden in the mounting groove 240, the second end face pressure claw 232 descends under the drive of the second clamping cylinder 233, while the spring 900 is compressed so that both the second end face pressure claw 232 and the outer diameter limiting block 231 are located in the cavity of the outer slider 262. Correspondingly, the outer slider 262 has a slot at the end of the second end face pressure claw 232 that extends towards the focusing ring 100 to facilitate the accommodation of the second end face pressure claw 232.

[0043] Taking the inner diameter positioning component 220 as an example, in the initial state, the inner diameter limiting block 221 and the first end face pressure claw 222 are in a clearance state, that is, located inside the inner slider 261. As the inner diameter positioning component 220 approaches the focusing ring 100, the first clamping cylinder 223 drives the first connecting rod 500 to move upward, the first end face pressure claw 222 rises, and at the same time, the spring 900 resets, causing the inner diameter limiting block 221 to rise to the limit at the top of the inner slider 261. The first clamping cylinder 223 drives the first connecting rod 500 downwards after the inner diameter limiting block 221 clamps the inner diameter of the focusing ring 100. This causes the first end face pressure claw 222 to descend and press against the upper end face of the focusing ring 100. At this time, since the lower surface of the first end face pressure claw 222 is higher than the inner diameter limiting block 221, it will not compress the spring 900. Therefore, the inner diameter limiting block 221 remains in its original position and continues to clamp the inner diameter of the focusing ring 100. When it is necessary to release the positioning, the first end face pressure claw 222 is first raised. After the inner diameter positioning component 220 moves away from the focusing ring 100, the first end face pressure claw 222 is lowered until the first end face pressure claw 222 and the inner diameter limiting block 221 are accommodated in the inner slider 261. The outer diameter positioning component 230 and the inner diameter positioning component 220 have the same structure, which will not be described in detail here.

[0044] When the focusing ring 100 clamping fixture is applied to a horizontal machine tool, the focusing ring 100 is longitudinally clamped within the fixture. After the outer surface machining is completed, the outer diameter positioning component 230 must maintain the clamping state of the focusing ring 100, while the inner diameter positioning component 220 clamps the focusing ring 100. At this time, both the inner diameter positioning component 220 and the outer diameter positioning component 230 clamp the focusing ring 100 simultaneously, and only then can the outer diameter positioning component 230 be released from positioning. During this process, the focusing ring 100 remains clamped; switching between the inner diameter positioning component 220 and the outer diameter positioning component 230 prevents the focusing ring 100 from falling due to gravity.

[0045] Specifically, such as Figure 5 As shown, in Figure 5 The substrate 211 and other structural components were exploded to show their positional relationship. The substrate 211 has a first oblong hole 212 and a second oblong hole 213. A first connecting rod 500 passes through the first oblong hole 212 and is configured to reciprocate along the length of the first oblong hole 212, specifically, the length of the first oblong hole 212 is greater than the diameter of the first connecting rod 500. A second connecting rod 600 passes through the second oblong hole 213 and is configured to reciprocate along the length of the second oblong hole 213, specifically, the length of the second oblong hole 213 is greater than the diameter of the second connecting rod 600. The clamping mechanism also includes a reset mechanism for resetting the inner diameter positioning assembly 220 and the outer diameter positioning assembly 230.

[0046] Taking the outer diameter as an example, when the substrate 211 moves from the inside to the outside, since the first connecting rod 500 can move along the length direction of the first waist-shaped hole 212, the first connecting rod 500 will not move when the end wall of the first waist-shaped hole 212 is not in contact with the first connecting rod 500, and the entire inner diameter positioning assembly 220 will not move either. When the substrate 211 continues to move until the end wall of the first waist-shaped hole 212 contacts the first connecting rod 500, the continued movement of the substrate 211 will drive the first connecting rod 500 to move, thereby bringing the inner diameter positioning assembly 220 closer to the focusing ring 100. After the inner diameter positioning assembly 220 is in place, the inner diameter positioning assembly 220 clamps the focusing ring 100. After processing, the inner diameter positioning component 220 remains clamped. At this time, the substrate 211 moves from the outside to the inside. Similarly, when the end wall of the first waist-shaped hole 212 and the first connecting rod 500 are not in contact, the first connecting rod 500 will not move. Since the first end face pressure claw 222 is pressed against the end face of the focusing ring 100, the reset mechanism does not work under the action of friction. The entire inner diameter positioning component 220 will not move, that is, the inner diameter positioning component 220 will not leave the focusing ring 100 and will be in a clamped state. During the process of the substrate 211 moving from the outside to the inside, the end wall of the second waist-shaped hole 213 will drive the outer diameter positioning component 230 to approach the focusing ring 100 after contacting the second connecting rod 600. The outer diameter positioning component 230 clamps and positions the focusing ring 100. At this time, both the inner diameter positioning component 220 and the outer diameter positioning component 230 are in a clamped state. Subsequently, the inner diameter positioning component 220 is released from its positioning state, and the first end face pressure claw 222 leaves the focusing ring 100. At this instant, the reset mechanism can drive the inner diameter positioning component 220 away from the focusing ring 100, and the first connecting rod 500 can move along the length direction of the first oblong hole 212 to the reset state. The reset state can be that the first connecting rod 500 contacts the end wall of the first oblong hole 212 or reaches the reset position of the reset mechanism. At this time, the inner diameter of the focusing ring 100 can be machined.

[0047] In some embodiments, the substrate 211 has only one waist-shaped hole, through which the first connecting rod 500 and the second connecting rod 600 pass. The two end walls of the waist-shaped hole are used to drive the first connecting rod 500 and the second connecting rod 600, respectively.

[0048] In this embodiment, the reset mechanism uses a tension spring 270. One end of the tension spring 270 can be fixed to the support base 200, and the other end can be fixed to the inner diameter positioning component 220 or the outer diameter positioning component 230. The tension spring 270 can thus reset the inner diameter positioning component 220 or the outer diameter positioning component 230. In this embodiment, as... Figure 1 and Figure 4As shown, the support base 200 is provided with a mounting groove 240. The base plate 211, inner diameter positioning component 220, and outer diameter positioning component 230 of the clamping mechanism are disposed in the mounting groove 240. The inner diameter limiting block 221, the first end face pressure claw 222, the outer diameter limiting block 231, and the second end face pressure claw 232 can all be lowered to a position no higher than the end face of the support base 200 and can be raised to a position higher than the upper end face of the support base 200. The width of the mounting groove 240 in the attached figure is not a limitation. The mounting groove 240 is only used to reduce the exposed height of the clamping mechanism. The width of the mounting groove 240 can be set according to the movement stroke requirements of the connecting rod 320.

[0049] Understandably, in order to prevent damage while ensuring clamping force, the contact surfaces of the inner diameter limiting block 221, the first end face pressure claw 222, the second end face pressure claw 232, the outer diameter limiting block 231 and the focusing ring 100 can be provided with hard polymer inserts, such as polyurethane plates, Teflon plates, etc. During the clamping process, the movement speed is controlled by a gas regulating valve.

[0050] like Figure 5 As shown, in this embodiment, both the inner slider 261 and the outer slider 262 are movably disposed on the support base 200, and the movement directions of the inner slider 261 and the outer slider 262 are the same as the movement direction of the base plate 211. Both the inner slider 261 and the outer slider 262 are connected to the support base 200 via the upper slide rail 810, and both the first clamping cylinder 223 and the second clamping cylinder 233 are connected to the support base 200 via the lower slide rail 820. The inner slider 261, the outer slider 262, the first clamping cylinder 223, and the second clamping cylinder 233 achieve accurate linear movement.

[0051] In this embodiment, as Figure 1 and 2 As shown, the support base 200 is also provided with a washer 250 for contacting the focusing ring 100. The washer 250 is located between the inner diameter positioning component 220 and the outer diameter positioning component 230. The first end face clamping claw 222 and the second end face clamping claw 232 press the focusing ring 100 onto the washer 250. The washer 250 is higher than the support base 200. The washer 250 can lift the focusing ring 100 off the support base 200. The width of the washer 250 is smaller than that of the focusing ring 100, so that the lower ends of the inner and outer surfaces of the focusing ring 100 are exposed. The cutting tool can machine to the lower ends of the inner and outer surfaces of the focusing ring 100, completing the complete machining of the inner and outer surfaces of the focusing ring 100. Specifically, the washer 250 can also be set to a detachable installation method, so that the corresponding size of the washer 250 can be selected for different sizes of focusing rings 100.

[0052] In this embodiment, the driving element of the rotary drive mechanism is a rotary cylinder 330. The rotary cylinder 330 or a motor can accurately control the driving force, avoiding excessive pressure on the focusing ring 100 during clamping, thus protecting the hard and brittle focusing ring 100 and ensuring machining consistency. In particular, compared to the prior art where a three-jaw chuck 400 directly fixes the hard and brittle focusing ring 100, the present invention uses a rotary cylinder 330 to clamp the focusing ring 100 with a defined clamping force, avoiding excessive stress on the focusing ring 100 during clamping. In other embodiments, the rotary drive mechanism can also be a motor.

[0053] In this embodiment, as Figure 7 As shown, the support base 200 of the focusing ring 100 clamping fixture is mounted on the chuck 400 of the machine tool, which can be easily modified based on the existing chuck 400 structure of the machine tool. The air slip ring 700 is mounted on the chuck 400. The air slip ring 700 can stably transmit gas and electrical signals or data when the equipment rotates continuously 360 degrees. Therefore, when the chuck 400 rotates, it continuously and stably supplies gas and control signals to the rotary cylinder 330, the inner diameter positioning component 220 and the outer diameter positioning component 230. The inner diameter positioning component 220 and the outer diameter positioning component 230 can work normally during the rotation of the chuck 400. After the chuck 400 stops, it can also directly drive the rotary cylinder 330.

[0054] In other embodiments, the machine tool may also directly use the focusing ring 100 clamping fixture instead of the chuck 400.

[0055] This invention is particularly suitable for silicon carbide ring-shaped blanks produced by vapor deposition sintering. Even if the inner and outer surfaces have irregular shapes, it can achieve a good clamping effect and will not generate excessive stress during the clamping process, thus avoiding damage to the hard and brittle silicon carbide ring-shaped blanks.

[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A focusing ring clamping fixture, characterized in that, Includes a support base (200), a clamping mechanism, and a rotary drive mechanism; The support (200) is used to receive the focusing ring (100); At least three clamping mechanisms are arranged symmetrically at the center, including a base plate (211) and an inner diameter positioning component (220) and an outer diameter positioning component (230) movably connected to the base plate (211). The base plate (211) is movably disposed on the support base (200), and the focusing ring (100) is located between the inner diameter positioning component (220) and the outer diameter positioning component (230). The rotary drive mechanism is mounted at the center of the support base (200) and is used to simultaneously drive at least three base plates (211) of the clamping mechanism to move radially relative to the support base (200) along the focusing ring (100), so that the inner diameter positioning component (220) and / or the outer diameter positioning component (230) clamp the focusing ring (100). The inner diameter positioning component (220) includes a liftable inner diameter limiting block (221) and a first end face pressure claw (222), and the outer diameter positioning component (230) includes a liftable outer diameter limiting block (231) and a second end face pressure claw (232). The support base (200) is provided with a mounting groove (240) in the radial direction. The base plate (211), inner diameter positioning component (220) and outer diameter positioning component (230) of the clamping mechanism are disposed in the mounting groove (240). The inner diameter limiting block (221), the first end face pressure claw (222), the outer diameter limiting block (231) and the second end face pressure claw (232) can all be lowered to a position not higher than the end face of the focusing ring (100) near the support base (200). The inner diameter positioning assembly (220) also includes an inner slider (261), the inner diameter limiting block (221) is movably disposed in the inner slider (261), the first end face pressure claw (222) is connected to the drive end of the first clamping cylinder (223) through the first connecting rod (500), the outer diameter positioning assembly (230) also includes an outer slider (262), the outer diameter limiting block (231) is movably disposed in the outer slider (262), the second end face pressure claw (232) is connected to the drive end of the second clamping cylinder (233) through the second connecting rod (600); The substrate (211) is provided with a first kidney-shaped hole (212) and a second kidney-shaped hole (213). The first connecting rod (500) passes through the first kidney-shaped hole (212), and the first connecting rod (500) is configured to be reciprocally movable along the length direction of the first kidney-shaped hole (212). The second connecting rod (600) passes through the second kidney-shaped hole (213), and the second connecting rod (600) is configured to be reciprocally movable along the length direction of the second kidney-shaped hole (213). A reset mechanism is provided between both the inner diameter positioning component (220) and the outer diameter positioning component (230) and the support base. One end of the reset mechanism is connected to the support base (200), and the other end is connected to the inner diameter positioning component (220) / outer diameter positioning component (230).

2. The focusing ring clamping fixture according to claim 1, characterized in that, The rotation driving mechanism includes a rotating seat (310). The rotating seat (310) is respectively connected to the three clamping mechanisms through three connecting rods (320). Two ends of the connecting rod (320) are respectively hinged to the substrate (211) of the clamping mechanism and the rotating seat (310). When the rotating seat (310) rotates, the substrate (211) of the clamping mechanism is driven to move through the connecting rod (320).

3. The focusing ring clamping fixture according to claim 1, characterized in that, The inner diameter limiting block (221) is connected to the substrate (211). The first end face pressing claw (222) is installed above the inner diameter limiting block (221). The outer diameter limiting block (231) is connected to the substrate (211). The second end face pressing claw (232) is installed above the outer diameter limiting block (231). The first end face pressing claw (222) and the second end face pressing claw (232) are used to press the focusing ring (100) onto the support base (200).

4. The focusing ring clamping fixture according to claim 1, characterized in that, The bottom of the inner diameter limiting block (221) is connected to an inner slider (261) through a spring. The inner diameter limiting block (221) is in a "convex" shape. The top of the inner slider (261) is provided with a limiting surface facing the "convex" stepped surface. The first clamping cylinder (223) is installed on the end face of the support base (200) away from the focusing ring (100). The first connecting rod (500) is movably disposed within the inner slider (261) and the inner diameter limiting block (221). A notch for accommodating the first end face pressing claw (222) is provided at one end of the inner slider (261) corresponding to the first end face pressing claw (222) extending towards the focusing ring (100). The bottom of the outer diameter limiting block (231) is connected to the outer slider (262) through a spring. The outer diameter limiting block (231) is in a "convex" shape. The top of the outer slider (262) is provided with a limiting surface facing the "convex" stepped surface. The second clamping cylinder (233) is installed on the end face of the support seat (200) away from the focusing ring (100). The second connecting rod (600) is movably inserted into the outer slider (262) and the outer diameter limiting block (231). A notch for accommodating the second end face claw (232) is provided at one end of the outer slider (262) corresponding to the end where the second end face claw (232) extends towards the focusing ring (100).

5. The focusing ring clamping fixture according to claim 4, characterized in that, The inner diameter positioning component (220) further includes a first lifting drive mechanism for driving the first connecting rod (500) to lift. The outer diameter positioning component (230) further includes a second lifting drive mechanism for driving the second connecting rod (600) to lift. The first lifting drive mechanism and the second lifting drive mechanism are both slidably connected to the lower slide rail (820), and the lower slide rail (820) is provided on the support seat (200).

6. The focusing ring clamping fixture according to claim 4, characterized in that, The inner slider (261) and the outer slider (262) are both slidably connected to the upper slide rail (810), and the upper slide rail (810) is provided on the support seat (200). The moving directions of the inner slider (261) and the outer slider (262) are the same as the moving direction of the substrate (211).

7. The focusing ring clamping fixture according to claim 1, characterized in that, A washer (250) for contacting the focusing ring (100) is further provided on the support seat (200), and the washer (250) is located between the inner diameter positioning component (220) and the outer diameter positioning component (230).

8. The focusing ring clamping fixture according to claim 1, characterized in that, The driving element of the rotary drive mechanism is a rotary cylinder (330). The rotary cylinder (330) is installed on the chuck clamping member, and the chuck clamping member is installed on the side of the support seat away from the product for the installation of the focusing ring clamping fixture on the machine tool.

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