Valve heating device

Abstract

The invention discloses a valve heating device, and particularly relates to the technical field of valves, the valve heating device comprises a mass flow controller and a pneumatic valve, a first Carton heater and a second Carton heater are arranged below the mass flow controller and the pneumatic valve respectively, and the bottom of the mass flow controller and the bottom of the pneumatic valve are both sleeved with heating seats; a water storage cavity is formed in the center of the heating base, a first liquid inlet pipe is arranged at the front end of the heating base and fixedly sleeved with a circulating mechanism, and a second liquid inlet pipe is arranged at the rear end of the heating base and fixedly sleeved with a cooling mechanism. According to the integrated type gas system, the first Karton heater and the second Karton heater are fixedly attached to the integrated type gas system base block, so that the attaching degree of the pneumatic valve and the mass flow controller is better than the side edge attaching effect in the prior art, the heating stability range is wider, water is circulated below the mass flow controller and the pneumatic valve, and the heating efficiency is improved. The energy utilization rate is improved.

Description

Technical Field

[0001] This invention relates to the field of valve technology, and more specifically to a valve heating device. Background Technology

[0002] In the gas delivery pipeline system of semiconductor process, valves are responsible for "on / off control, safety isolation, and flow direction switching", while MFC (mass flow controller) is responsible for "precise measurement and flow regulation". Generally, valves are installed on both sides of the MFC. The valves are mainly pneumatic valves. The valves provide stable front-end conditions for the MFC (such as cutting off the gas source and stabilizing the pressure) to avoid pressure shocks damaging the MFC sensor. After the MFC accurately regulates the flow of the gas, it distributes it to different process chambers or branches through the back-end valves to achieve multi-process collaboration.

[0003] In gas delivery pipeline systems for semiconductor processes, the measurement accuracy of MFCs is extremely sensitive to temperature. In existing technologies, patch-type silicone heaters are often installed on the side of the internal flow channels of the MFC to ensure a constant temperature environment for the MFC and pipelines. For valves, some semiconductor process gases (such as trimethylgallium, triethylaluminum and other organometallic precursors) are prone to liquefaction and solidification at room temperature or low temperature. If they condense in the valve flow channels, they will block the pipeline, contaminate the medium, and even cause the valve to jam. In existing technologies, patch-type silicone heaters are often installed on the side area of ​​the valve. The heaters can maintain the temperature of the valve and surrounding pipelines above the dew point of the medium, ensuring that the medium is always in a stable gaseous state and ensuring smooth delivery.

[0004] A search revealed, for example, a Chinese patent application with publication number CN217459596U, which discloses a gas heating device for a plasma reaction process. This device includes an MFC mass control flow meter, a gas pipeline, a gas storage device, a heating device, an OES detector, and a controller. The MFC mass control flow meter is connected to the top of the process chamber via the gas pipeline. The gas storage device is located within the gas pipeline and is equipped with a heating device. The OES detector is installed at an opening on one side of the process chamber and is connected to the controller. The controller is connected to the heating device. This heating device utilizes the cooperation of the OES detector, the temperature controller, and the heating device to control the gas temperature in the gas pipeline, thereby stabilizing and regulating the plasma reaction intensity inside the control chamber.

[0005] However, in actual use, existing conventional patch heaters cannot fully heat the bottom of the valve and the bottom of the MFC. In addition, after prolonged use, the fit may deteriorate due to aging and other reasons, affecting the heating effect. Even if the gas is heated in the gas pipeline, the temperature inside the MFC and valve is low, and the gas temperature will still drop through heat exchange, affecting the normal use of the system. Summary of the Invention

[0006] The purpose of this invention is to provide a valve heating device that solves the problem that conventional patch heaters in the prior art cannot fully heat the bottom of the valve and the bottom of the MFC, thus affecting the heating effect.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a valve heating device, comprising a first Capton heater, a first integrated gas system base block disposed at the bottom of the first Capton heater, a second integrated gas system base block disposed symmetrically along the longitudinal vertical plane on the outer side of the first integrated gas system base block, a second Capton heater disposed at the top of the second integrated gas system base block, a mass flow controller disposed above the first Capton heater, a pneumatic valve disposed above the second Capton heater, and heating seats sleeved on the bottom of the mass flow controller and the bottom of the pneumatic valve;

[0008] The heating base has fixing holes at its four corners, and fixing bolts are installed inside the fixing holes for fixing the mass flow controller, the first Capton heater, the first integrated gas system module, and the pneumatic valve, the second Capton heater, and the second integrated gas system module.

[0009] The heating base has a water storage cavity in the center and a first liquid inlet pipe at the front end of the heating base. The first liquid inlet pipe is fixedly connected to a circulation mechanism for heating the water inside the water storage cavity.

[0010] The heating base is provided with a second liquid inlet pipe at the rear end, and a cooling mechanism is fixedly connected to the second liquid inlet pipe for cooling the water inside the water storage chamber.

[0011] Preferably, the cooling mechanism includes a main water tank, and a partition is fixedly connected inside the main water tank. The partition divides the interior of the main water tank into a first space and a second space. The first space is located above the second space. The first space and the second space are connected by a connecting pipe, and a second solenoid valve is installed on the surface of the connecting pipe.

[0012] Preferably, a first water outlet pipe is fixedly installed on the outer wall of the main water tank above the partition, a second water outlet pipe is fixedly connected to the outer wall of the main water tank below the partition, and a third water outlet pipe is fixedly installed on the outer wall of the main water tank below the partition. The third water outlet pipe and the second water outlet pipe are respectively installed on opposite sides of the main water tank.

[0013] Preferably, an inlet pipe is fixedly sleeved on the surface of the first outlet pipe, a second water pump is fixedly connected to the side of the water injection tank, one end of the inlet pipe is fixedly sleeved with the inlet end of the second water pump, a return pipe is fixedly sleeved on the outlet end of the second water pump, and one end of the return pipe is connected to the first space inside the water injection tank.

[0014] Preferably, the outer wall of the water inlet pipe is connected to the second liquid inlet pipe via a tee.

[0015] Preferably, the circulation mechanism includes a hot water tank, the outer wall of which is fixedly connected to the outer wall of the main water tank, a connecting pipe is fixedly installed in the bottom of the hot water tank, a first solenoid valve is installed on the surface of the connecting pipe, and the port of the connecting pipe is fixedly sleeved with the port of the third water outlet pipe.

[0016] Preferably, a first water pump is fixedly connected to the side of the hot water tank, and an inlet circulation pipe is fixedly connected to the second outlet pipe port. One end of the inlet circulation pipe is fixedly connected to the inlet end of the first water pump, and an outlet circulation pipe is fixedly sleeved at the outlet end port of the first water pump. One end of the outlet circulation pipe is connected to the inside of the hot water tank.

[0017] Preferably, the surface of the water inlet circulation pipe is connected to the first liquid inlet pipe via a tee.

[0018] Preferably, temperature sensors are installed on the inner wall of the first space of the main water tank and the inner wall of the water storage chamber.

[0019] Preferably, a water inlet is fixedly provided at the center of the top of the main water tank, and a water outlet is provided at the center of the bottom of the main water tank.

[0020] The technical effects and advantages provided by the present invention in the above technical solution are as follows:

[0021] 1. This invention achieves heating of the bottom of the mass flow controller and the pneumatic valve by attaching heating seats to the bottom of both the mass flow controller and the pneumatic valve. A first Capton heater is fixedly installed at the bottom of the heating seat of the mass flow controller, and a second Capton heater is fixedly installed at the bottom of the heating seat of the pneumatic valve. This heating effect is better than the existing side heating effect. Furthermore, both the first and second Capton heaters are firmly attached to the integrated gas system base block, which makes the fit between the pneumatic valve and the mass flow controller better than the side fit effect of the prior art, and makes the heating stability range higher.

[0022] 2. During the heating process of the mass flow controller and pneumatic valve, the liquid in the water storage chamber inside the heating base can be heated simultaneously. During the heating stage, the first water pump is started, causing the water in the second space of the main water tank to flow into the hot water tank, and then diverted to the water storage chamber. At this time, the water will absorb the excess heat generated when the first and second Capton heaters are started, improving the flow utilization rate. During the circulation process, by opening the first solenoid valve, the water flowing from the second space to the water storage chamber can be returned, thereby maintaining the stability of the water temperature in the second space of the main water tank. When the pneumatic valve and mass flow controller are heated to the target temperature, the first and second Capton heaters are turned off, while maintaining the water circulation in the second space, which can form a stable heat preservation effect for the mass flow controller and pneumatic valve. After all the water in the second space is introduced into the hot water tank, the first water pump is turned off again to realize the storage of hot water. In subsequent use, the stored hot water can be directly used to circulate and heat the mass flow controller and pneumatic valve, further improving energy utilization efficiency and reducing energy consumption.

[0023] 3. This invention has a precise temperature control mechanism to prevent overheating when heating the water inside the water storage chamber. When the water temperature in the storage chamber exceeds the preset threshold, the operator can start the second water pump to inject cold water from the first space into the storage chamber, thereby reducing the water temperature inside the storage chamber. This ensures that the heating temperature of the pneumatic valve and mass flow controller is kept within the appropriate operating range, guaranteeing the reliability and heating accuracy of the equipment. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0025] Figure 1 This is an overall structural diagram of the present invention;

[0026] Figure 2 This is a structural diagram of the mass flow controller of the present invention;

[0027] Figure 3 This is a structural diagram of the pneumatic valve of the present invention;

[0028] Figure 4 This is a structural diagram of the heating seat of the present invention;

[0029] Figure 5 This is a side sectional view of the heating seat of the present invention;

[0030] Figure 6 This is a structural diagram of the circulation mechanism of the present invention;

[0031] Figure 7 This is a structural diagram of the cooling mechanism of the present invention;

[0032] Figure 8 This is a structural diagram of the main water tank of the present invention.

[0033] Explanation of reference numerals in the attached figures:

[0034] 1. Mass flow controller; 2. Pneumatic valve; 3. Heating base; 31. Heating base body; 32. Fixing hole; 33. First inlet pipe; 34. Water storage chamber; 35. Second inlet pipe; 4. First Capton heater; 5. Second Capton heater; 6. Circulation mechanism; 61. First water pump; 62. Hot water tank; 63. First solenoid valve; 64. Inlet circulation pipe; 65. Outlet circulation pipe; 66. Connecting pipe; 7. Cooling mechanism; 71. Second water pump; 72. Main water tank; 73. Second solenoid valve; 74. First outlet pipe; 75. Second outlet pipe; 76. Third outlet pipe; 77. Baffle; 78. Connecting pipe; 79. Inlet pipe; 710. Return pipe; 8. First integrated gas system base block; 9. Second integrated gas system base block. Detailed Implementation

[0035] To enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0036] This invention provides, for example Figure 1-8 The valve heating device shown includes a first Capton heater 4, a first integrated gas system base block 8 at the bottom of the first Capton heater 4, a second integrated gas system base block 9 symmetrically arranged vertically along the outer side of the first integrated gas system base block 8, a second Capton heater 5 at the top of the second integrated gas system base block 9, a mass flow controller 1 above the first Capton heater 4, and a pneumatic valve 2 above the second Capton heater 5.

[0037] Both the first Capton heater 4 and the second Capton heater 5 are made of PI film material, which can achieve effective heating at 250℃.

[0038] Heating seats 3 are fitted onto the bottom of both the mass flow controller 1 and the pneumatic valve 2. Fixing holes 32 are provided at the four corners of the heating seats 3. Fixing bolts are installed inside the fixing holes 32 to fix the mass flow controller 1, the first Capton heater 4, the first integrated gas system base block 8, and the pneumatic valve 2, the second Capton heater 5, and the second integrated gas system base block 9.

[0039] The system is primarily controlled by an industrial PC as the main controller and a PLC (Programmable Logic Controller) as an auxiliary processor, enabling automatic and manual control of signals to control gas flow, gas pressure, and pneumatic valve 2. The control system offers both automatic and manual control modes, which can be switched between each other. The industrial PC uses an industrial communication bus network to exchange data and perform digital control on the PLC, mass flow controller 1, temperature controller, and other devices within the network. The main program resides on the industrial PC, and the operator views and inputs parameters via a human-machine interface using a keyboard and mouse. The industrial PC controls the PLC to process some low-level analog data through data exchange. Simultaneously, a menu of safety states is pre-programmed in the PLC registers for emergency handling in abnormal situations.

[0040] The first integrated gas system module 8 and two second integrated gas system modules 9 are integrated together. The two second integrated gas system modules 9 encapsulate two different pneumatic valves 2 respectively. The first integrated gas system module 8 encapsulates a mass flow controller 1. In terms of hardware, the two pneumatic valves 2 of the mass flow controller 1 are controlled by a single multi-interface board. In the software automatic mode, only the flow rate of the mass flow controller 1 needs to be controlled. The two pneumatic valves 2 will automatically open and close according to the preset time interval and their inherent logical relationship.

[0041] The heating base 3 has a water storage cavity 34 in the center and a fixing hole 32 on the side of the water storage cavity 34. The front end of the heating base 3 is provided with a first liquid inlet pipe 33, and a circulation mechanism 6 is fixedly connected to the first liquid inlet pipe 33 for heating the water inside the water storage cavity 34. The rear end of the heating base 3 is provided with a second liquid inlet pipe 35, and a cooling mechanism 7 is fixedly connected to the second liquid inlet pipe 35 for cooling the water inside the water storage cavity 34.

[0042] like Figure 8 As shown, the cooling mechanism 7 includes a main water tank 72, and a partition 77 is fixedly connected inside the main water tank 72. The partition 77 divides the interior of the main water tank 72 into a first space and a second space. The first space is located above the second space. The partition 77 is divided into an intermediate heat insulation layer, a radiation blocking layer, and a sealing layer. The outer wall of the intermediate heat insulation layer is provided with a sealing layer, and the bottom of the sealing layer is provided with a radiation blocking layer. The intermediate heat insulation layer is a vacuum heat insulation board, the radiation blocking layer is an aluminum foil composite fiberglass cloth (with a high reflectivity aluminum film coated on the surface), the top sealing layer is a 304 stainless steel sheet, and the bottom sealing layer is a 316L stainless steel sheet.

[0043] The above design enables the partition 77 to be insulated, preventing the cold water in the first space from being affected by the hot water in the second space.

[0044] The first space and the second space are connected by a connecting pipe 78. A second solenoid valve 73 is installed on the surface of the connecting pipe 78. When there is less water in the second space, the water in the first space is injected into the second space by opening the second solenoid valve 73.

[0045] The outer wall of the main water tank 72 is fixedly provided with a first water outlet pipe 74 located above the partition 77, the outer wall of the main water tank 72 is fixedly connected with a second water outlet pipe 75 located below the partition 77, and the outer wall of the main water tank 72 is fixedly provided with a third water outlet pipe 76 located below the partition 77. The third water outlet pipe 76 and the second water outlet pipe 75 are respectively located on opposite sides of the main water tank 72.

[0046] When mass flow controller 1 and pneumatic valve 2 are heated, the first Capton heater 4 and the second Capton heater 5 are started by the industrial control computer. The first Capton heater 4 and the second Capton heater 5 will heat the heating seat body 31 at the bottom of mass flow controller 1 and the heating seat body 31 at the bottom of pneumatic valve 2, respectively.

[0047] The bottom of the inner wall of the two different heating seat bodies 31 are in contact with the bottom of the mass flow controller 1 and the bottom of the pneumatic valve 2 respectively, and will heat the bottom of the mass flow controller 1 and the bottom of the pneumatic valve 2 respectively. The heating effect is better than the existing side heating effect.

[0048] In order to achieve hot water circulation, such as Figure 6 As shown, the circulation mechanism 6 includes a hot water tank 62, the outer wall of the hot water tank 62 is fixedly connected to the outer wall of the main water tank 72, a connecting pipe 66 is fixedly installed in the bottom of the hot water tank 62, a first solenoid valve 63 is installed on the surface of the connecting pipe 66, and the port of the connecting pipe 66 is fixedly connected to the port of the third water outlet pipe 76.

[0049] A first water pump 61 is fixedly connected to the side of the hot water tank 62. A water inlet circulation pipe 64 is fixedly connected to the port of the second water outlet pipe 75. One end of the water inlet circulation pipe 64 is fixedly connected to the water inlet of the first water pump 61. A water outlet circulation pipe 65 is fixedly sleeved at the water outlet port of the first water pump 61. One end of the water outlet circulation pipe 65 is connected to the inside of the hot water tank 62. The surface of the water inlet circulation pipe 64 is connected to the first liquid inlet pipe 33 through a tee.

[0050] Specifically, when the first Capton heater 4 and the second Capton heater 5 are started, the first water pump 61 and the first solenoid valve 63 are started by the industrial control computer, so that the water inside the second space of the main water tank 72 flows to the inlet circulation pipe 64. The water inside the inlet circulation pipe 64 flows into the outlet circulation pipe 65 through the first water pump 61. The water inside the outlet circulation pipe 65 flows into the hot water tank 62. Because the first solenoid valve 63 is open, the water in the hot water tank 62 can return to the second space of the main water tank 72 through the connecting pipe 66. At the same time, the water inside the inlet circulation pipe 64 can flow into the storage chamber 34 through the three-way valve. At this time, the water will absorb the excess heat generated when the first Capton heater 4 and the second Capton heater 5 are started. The water inside the storage chamber 34 eventually flows back into the second space, thereby maintaining the stability of the water temperature in the second space of the main water tank 72. After the water moves to the storage chamber 34, it will absorb some of the heat from the surface of the heating seat body 31, causing the water temperature to rise.

[0051] Once the pneumatic valve 2 and the mass flow controller 1 are heated to the target temperature, the first Capton heater 4 and the second Capton heater 5 are shut off via the industrial control computer. At the same time, the water flow in the second space is kept circulating, which can create a stable heat preservation effect for the mass flow controller 1 and the pneumatic valve 2. After all the water in the second space is introduced into the hot water tank 62, the first water pump 61 is shut off again to realize the storage of hot water. In subsequent use, the stored hot water can be directly used to circulate and heat the mass flow controller 1 and the pneumatic valve 2, further improving energy utilization efficiency and reducing energy consumption.

[0052] Temperature sensors are installed on the inner wall of the first space of the main water tank 72 and the inner wall of the water storage chamber 34. The temperature sensors are connected to the industrial control computer via a data cable. The first Capton heater 4 and the second Capton heater 5 are connected to the industrial control computer via a serial port and a temperature controller on the industrial communication bus.

[0053] Specifically, both temperature sensors are connected to the PLC's analog input (AI) module via data cables to transmit analog signals of the real-time water temperature in the cavity to the PLC.

[0054] The first Capton heater 4 is connected to the power output terminal of the first temperature controller, and the second Capton heater 5 is connected to the power output terminal of the second temperature controller. The two temperature controllers are connected to the industrial communication bus via RS485 serial port, and then connected to the PLC's communication module or the CPU's built-in communication port via the bus to realize the PLC control command issuance and temperature controller status feedback.

[0055] The PLC communicates bidirectionally with the industrial computer via an industrial communication bus, enabling the industrial computer to set parameters, monitor status, and store data of the PLC.

[0056] This system adopts a PLC-driven dual-path independent closed-loop PID constant temperature control algorithm. Constant temperature control loops are constructed for the main water tank 72 second space and the heating seat 3 water storage cavity 34 respectively to achieve that the two temperature controls do not interfere with each other. The target water temperature and PID control parameters of the two cavities are set through the industrial control computer. The parameters are sent to the PLC and stored via the industrial bus.

[0057] The PLC acquires real-time water temperature signals from two temperature sensors through an analog input module. After completing the analog-to-digital conversion, the water temperature data is stored in an internal register and simultaneously uploaded to the industrial control computer for real-time display.

[0058] The PLC calls a dual-path independent PID control program to calculate the "deviation between real-time water temperature and target water temperature". Based on the deviation value, it automatically calculates the corresponding heater power adjustment command (for example, when the deviation is large, it outputs a full power command to increase the heating power of the first Capton heater 4 and the second Capton heater 5; when the deviation is small, it outputs a heat preservation power command to reduce the heating power of the first Capton heater 4 and the second Capton heater 5; when the water temperature is the same as the preset temperature and when the water temperature exceeds the preset temperature, it outputs a stop heating command to turn off the first Capton heater 4 and the second Capton heater 5).

[0059] When using two Capton heaters, the PLC sends two power adjustment commands to the corresponding temperature controllers via the industrial communication bus. After receiving the commands, the temperature controllers precisely adjust the heating power of the corresponding Capton heaters.

[0060] As can be seen from the above, the temperature sensor located inside the water storage chamber 34 will display the collected temperature on the industrial control computer screen, while the water temperature located in the first space of the main water tank 72 will be displayed on the industrial control computer screen through the temperature sensor in the first space, so that the staff can understand the water temperature.

[0061] As described above, when the water temperature exceeds the limit, the first Capton heater 4 and the second Capton heater 5 will be shut down. To enable the mass flow controller 1 and pneumatic valve 2 to operate, the water needs to be cooled, such as... Figure 7 As shown, this application cools the water by injecting cold water into the water storage chamber 34. Specifically, an inlet pipe 79 is fixedly sleeved on the surface of the first outlet pipe 74, and a second water pump 71 is fixedly connected to the side of the main water tank 72. One end of the inlet pipe 79 is fixedly sleeved with the inlet end of the second water pump 71, and a return pipe 710 is fixedly sleeved with the outlet end of the second water pump 71. One end of the return pipe 710 is connected to the first space inside the main water tank 72, and the outer wall of the inlet pipe 79 is connected to the second liquid inlet pipe 35 through a tee.

[0062] When injecting cold water into the water storage chamber 34, the second water pump 71 needs to be shut down first through the industrial control computer. Then, the staff starts the first water pump 61 through the industrial control computer. After the first water pump 61 starts, it transports the cold water in the first space of the main water tank 72 to the inlet pipe 79, and then through the second water pump 71 to the return pipe 710, and finally back to the first space of the main water tank 72.

[0063] The inlet pipe 79 injects cold water into the water storage chamber 34 through the tee and extracts some water from the water storage chamber 34. After the temperature collected by the temperature sensor in the water storage chamber 34 reaches the preset value, the staff manually shuts off the second water pump 71 using the industrial control computer. At this time, the water in the water storage chamber 34 is at the preset water temperature. The staff then starts the first water pump 61 and closes the first solenoid valve 63 to store all the water in the water storage chamber 34 into the hot water tank 62.

[0064] A water inlet is fixedly installed at the center of the top of the main water tank 72, and a water outlet is installed at the center of the bottom of the main water tank 72. The water inside the main water tank 72 is phenyl silicone oil. The boiling point of phenyl silicone oil at normal pressure can reach more than 300℃. It is chemically inert at 250℃, with no volatilization or decomposition. Its heat conduction uniformity is far superior to that of heat transfer oil. It does not react with metal or non-metal materials, is clean and pollution-free, and will not cause pollution or blockage to precision components such as the mass flow controller 1 and the pneumatic valve 2.

[0065] A third solenoid valve is installed on the surface of the outlet. A third water pump is fixedly connected to the top of the main water tank 72. The outlet of the third water pump is fixedly connected to the inlet. An installation pipe is fixedly connected to the inlet of the third water pump. One end of the installation pipe is connected to the storage tank. The storage tank stores room temperature phenyl silicone oil. When there is too much phenyl silicone oil, the third solenoid valve can be opened to pour out part of the phenyl silicone oil located in the second space. When the temperature of the phenyl silicone oil in the first space is too high and it is not enough to effectively reduce the temperature of the phenyl silicone oil in the water storage chamber 34, the third water pump can be started to inject the room temperature phenyl silicone oil in the storage tank into the first space of the main water tank 72.

[0066] Finally, it should be noted that both the hot water tank 62 and the main water tank 72 have a multi-layer structure. The inner wall is made of Inconel 600 nickel-based alloy (nickel-chromium-iron-based solid solution reinforced alloy), the middle layer is made of aerogel insulation felt, which has a better insulation effect than aluminum silicate fiber and further reduces heat loss. The outer wall is a 316L stainless steel protective layer, the middle layer needs to be moisture-proofed, and the outer wall is covered with aluminum foil fiberglass cloth to prevent water vapor from penetrating and affecting the insulation effect.

[0067] The connection points between the hot water tank 62 and the main water tank 72 and the pipeline are sealed with flanges (the gaskets are graphite composite gaskets) to prevent high-temperature silicone oil leakage.

[0068] Considering that the viscosity of phenyl silicone oil at 250℃ is 50-100 mm² / s (approximately 50-100 times that of water at room temperature), high-temperature gear pumps are selected for the first water pump 61 and the second water pump 71.

[0069] In addition, the first water pump 61 and the second water pump 71 are integrated with a preheating device. When starting at low temperature, the pump body is preheated to 80-100°C by a heater to reduce the viscosity of the silicone oil and avoid overload damage to the pump body.

[0070] It is worth noting that the first integrated gas system base block 8 and the second integrated gas system base block 9 of the present invention are fixedly installed inside the semiconductor equipment, and the main water tank 72 is fixedly connected to the surface of the semiconductor equipment housing.

[0071] Finally, the following points should be noted: First, in the description of this application, it should be noted that, unless otherwise specified and limited, the terms "installation", "connection", and "linkage" should be interpreted broadly, and can be mechanical or electrical connections, or internal connections between two components, or direct connections. "Up", "down", "left", "right", etc. are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may change.

[0072] Secondly: The accompanying drawings of the embodiments disclosed in this invention only involve the structures involved in the embodiments disclosed in this invention. Other structures can refer to the general design. In the absence of conflict, the same embodiment and different embodiments of this invention can be combined with each other.

[0073] In conclusion, the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A valve heating device, comprising a first Capton heater (4), a first integrated gas system base block (8) disposed at the bottom of the first Capton heater (4), a second integrated gas system base block (9) disposed symmetrically along the longitudinal direction on the outer side of the first integrated gas system base block (8), a second Capton heater (5) disposed at the top of the second integrated gas system base block (9), a mass flow controller (1) disposed above the first Capton heater (4), and a pneumatic valve (2) disposed above the second Capton heater (5), characterized in that: Heating seats (3) are fitted onto the bottom of both the mass flow controller (1) and the pneumatic valve (2). The heating base (3) has fixing holes (32) at its four corners. Fixing bolts are installed inside the fixing holes (32) to fix the mass flow controller (1), the first Capton heater (4), the first integrated gas system module (8), and the pneumatic valve (2), the second Capton heater (5), and the second integrated gas system module (9). The heating seat (3) has a water storage cavity (34) in the center and a first liquid inlet pipe (33) is provided at the front end of the heating seat (3). The first liquid inlet pipe (33) is fixedly connected to a circulation mechanism (6) for heating the water inside the water storage cavity (34). The heating base (3) is provided with a second liquid inlet pipe (35) at its rear end. The second liquid inlet pipe (35) is fixedly connected to a cooling mechanism (7) for cooling the water inside the water storage chamber (34).

2. The valve heating device according to claim 1, characterized in that: The cooling mechanism (7) includes a main water tank (72), and a partition (77) is fixedly connected inside the main water tank (72). The partition (77) divides the interior of the main water tank (72) into a first space and a second space. The first space is located above the second space. The first space and the second space are connected by a connecting pipe (78). A second solenoid valve (73) is installed on the surface of the connecting pipe (78).

3. The valve heating device according to claim 2, characterized in that: The main water tank (72) is fixedly provided with a first water outlet pipe (74) located above the partition (77) on the outer wall. The main water tank (72) is fixedly connected with a second water outlet pipe (75) located below the partition (77) on the outer wall. The main water tank (72) is fixedly provided with a third water outlet pipe (76) located below the partition (77) on the outer wall. The third water outlet pipe (76) and the second water outlet pipe (75) are respectively located on opposite sides of the main water tank (72).

4. A valve heating device according to claim 3, characterized in that: The first outlet pipe (74) is fixedly sleeved with an inlet pipe (79), and the main water tank (72) is fixedly connected to a second water pump (71) on the side. One end of the inlet pipe (79) is fixedly sleeved with the inlet end of the second water pump (71), and the outlet end of the second water pump (71) is fixedly sleeved with a return pipe (710). One end of the return pipe (710) is connected to the first space inside the water tank (72).

5. A valve heating device according to claim 4, characterized in that: The outer wall of the water inlet pipe (79) is connected to the second liquid inlet pipe (35) via a tee.

6. A valve heating device according to claim 3, characterized in that: The circulation mechanism (6) includes a hot water tank (62), the outer wall of which is fixedly connected to the outer wall of the main water tank (72), a connecting pipe (66) is fixedly installed in the bottom of the hot water tank (62), a first solenoid valve (63) is installed on the surface of the connecting pipe (66), and the port of the connecting pipe (66) is fixedly connected to the port of the third water outlet pipe (76).

7. A valve heating device according to claim 6, characterized in that: The hot water tank (62) is fixedly connected to the side of a first water pump (61), and the second water outlet pipe (75) is fixedly connected to an inlet circulation pipe (64). One end of the inlet circulation pipe (64) is fixedly connected to the inlet end of the first water pump (61), and the outlet end of the first water pump (61) is fixedly fitted with an outlet circulation pipe (65). One end of the outlet circulation pipe (65) is connected to the inside of the hot water tank (62).

8. A valve heating device according to claim 7, characterized in that: The surface of the water inlet circulation pipe (64) is connected to the first liquid inlet pipe (33) via a tee.

9. A valve heating device according to claim 6, characterized in that: Temperature sensors are provided on the inner wall of the first space of the main water tank (72) and the inner wall of the water storage chamber (34).

10. A valve heating device according to claim 6, characterized in that: The main water tank (72) has a water inlet fixedly installed at the top center and a water outlet installed at the bottom center.

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