Automatic position compensation system and method in TGV machining process

Abstract

The invention provides an automatic position compensation system and method in the TGV machining process, and the system comprises an XYZ movement module, an adsorption platform, at least two mask mark points, a cutting head, a laser system, a visual camera, a plurality of temperature sensing units and a computer control system. Acquiring and storing reference coordinates of each mask mark point; in the laser machining process, machining is suspended according to a preset machining interval, the visual camera is controlled to shoot the mask mark point again, and the current coordinate of the mask mark point is obtained; comparing the current coordinate with a coordinate recorded last time, and calculating a position offset compensation value and a rotation angle compensation value for compensating a subsequent processing path; controlling the XYZ motion module to move according to the position offset compensation value and the rotation angle compensation value; the method has the beneficial effects that online, automatic and global closed-loop compensation of machining position errors is realized.

Description

Technical Field

[0001] This invention relates to the field of TGV machining technology, and more specifically, to an automatic position compensation system and method for TGV machining. Background Technology

[0002] With the development of 3D IC and advanced packaging technologies, the requirements for TGV (Transformer Telescope) aperture (10–100µm), positional accuracy (≤±3µm), perpendicularity, and consistency are continuously increasing. In high-volume production applications, the stability of equipment during long-term operation and the consistency of products between batches have become key bottlenecks restricting the yield of the final product.

[0003] During long-term processing, equipment will inevitably produce various errors, the main sources of which include: Set errors: caused by equipment assembly, such as poor straightness of guide rails, orthogonality deviation of motion platform, lead screw pitch error, Abbe error, etc. These errors will directly lead to the offset of machining position and perpendicularity deviation.

[0004] Thermal error: Heat input during laser processing, heat generation of the spindle or linear motor, and fluctuations in ambient temperature can all cause thermal expansion and contraction of different parts of the equipment, i.e. thermal deformation, which can lead to drift in the processing position and deviations in processing dimensions.

[0005] Dynamic error: Vibrations generated by the motion module during high-speed acceleration and deceleration, response delays of the servo system, etc., can cause the actual motion trajectory to deviate from the command trajectory, resulting in problems such as increased hole position dispersion.

[0006] Systematic errors: Errors in the initial calibration of the equipment, as well as errors in the conversion process from the camera pixel coordinate system to the equipment mechanical coordinate system, will affect the accuracy of the positioning reference.

[0007] To address the aforementioned error problems, existing technologies have several limitations. First, they generally lack a comprehensive online automatic compensation scheme that integrates measurement, correction, control, and execution, thus failing to form an effective closed-loop control system. Second, existing technologies lack algorithms capable of decoupling and adaptively compensating for multi-source errors. Specific limitations include: a. Offline compensation: Most solutions rely on pre-calibration performed before the equipment leaves the factory or periodically to generate a static compensation table. This method cannot cope with dynamic errors that change in real time during processing, such as thermal drift and real-time vibration.

[0008] b. Single-point compensation: Some online compensation schemes only set a reference point at a local location in the processing area for compensation, which cannot guarantee the uniformity of accuracy across the entire processing area.

[0009] c. Reliance on manual intervention: Many calibration and adjustment processes require frequent manual intervention, which is not only inefficient but also prone to introducing human error, affecting the stability and reliability of the compensation effect.

[0010] Therefore, there is an urgent need for a system and method that can compensate for multiple composite errors generated during the machining process online, automatically, and across the entire process, in order to improve the yield and efficiency of high-precision TGV machining. Summary of the Invention

[0011] To overcome the shortcomings of existing technologies, this invention provides an automatic position compensation system and method for TGV machining, aiming to solve the problem of decreased machining position accuracy caused by multiple error sources such as aggregate error, thermal error, dynamic error and system error during TGV machining, and to achieve online, automatic, and global closed-loop compensation of machining position errors.

[0012] The technical solution adopted by this invention to solve its technical problem is: an automatic position compensation system for TGV processing, the improvement of which includes: The XYZ motion module includes an X motion module, a Y motion module, and a Z motion module; An adsorption platform, installed on the Y-motion module, is used to place the workpiece to be processed; At least two mask mark points are fixedly set at the corners of the adsorption platform; A cutting head, mounted on the Z motion module, is used for laser processing of the workpiece to be processed via a laser system; A vision camera, fixedly connected to the cutting head, is used to capture images of the mask mark points. Multiple temperature sensing units are respectively deployed in at least one of the XYZ motion module, the adsorption platform and the cutting head, for real-time monitoring of the temperature at the corresponding positions; The computer control system is electrically connected to the XYZ motion module, the laser system, the vision camera, and the multiple temperature sensing units, respectively. The computer control system is configured as follows: Before laser processing, the XYZ motion module is controlled to drive the vision camera to capture the mask mark points, and the reference coordinates of each mask mark point are obtained and saved. During laser processing, processing is paused at preset intervals, and the vision camera is controlled to re-capture the mask mark point to obtain its current coordinates. By comparing the current coordinates with the previously recorded coordinates, the position offset compensation value and the rotation angle compensation value used to compensate for subsequent processing paths are calculated. The XYZ motion module is controlled to perform overall offset compensation on the subsequent laser processing path based on the position offset compensation value and the rotation angle compensation value.

[0013] Furthermore, the plurality of temperature sensing units include: five temperature sensing units respectively installed on the cutting head mounting base, the center of the adsorption platform, and the edge of the adsorption platform on the X motion module, Y motion module, and Z motion module.

[0014] Furthermore, the vision camera is fixedly connected to the cutting head via a parietal mounting plate, so that the mounting reference plane of the vision camera is perpendicular to the optical path of the cutting head.

[0015] Furthermore, the computer control system is also configured to: Before laser processing, a temperature compensation table is established and stored, which records the distance difference between at least two mask mark points caused by thermal deformation at different temperatures; During laser processing, the temperature values ​​of the multiple temperature sensing units are acquired in real time, and the distance between the current at least two mask mark points is calculated. The current distance is compared with the pre-stored reference distance. When the distance difference exceeds a preset distance threshold, the temperature compensation table is corrected based on the distance difference and the current temperature value.

[0016] Furthermore, the specific method by which the computer control system calculates the position offset compensation value and the rotation angle compensation value is as follows: Calculate the difference between the current coordinates of each mask mark point and the previously recorded coordinates on the X and Y axes respectively; The average values ​​of the X-axis difference and the Y-axis difference are calculated to obtain the X-axis offset compensation amount and the Y-axis offset compensation amount, which together constitute the position offset compensation value. Calculate the straight line angle determined by the coordinates of two mask mark points recorded in the previous record, and the straight line angle determined by the coordinates of the two mask mark points currently recorded. Subtracting the two straight-line angles yields the rotation angle compensation value.

[0017] The present invention also provides an automatic position compensation method for TGV machining process, applied to the TGV machining process automatic position compensation system described above, wherein the improvement is that it includes the following steps: a. Reference information acquisition steps: Before the laser processing begins, the vision camera is controlled to capture the mask mark points on the adsorption platform, the image is processed to obtain and save the reference coordinates of each mask mark point, and the reference coordinates are used as the reference coordinates of the initial processing path to be compensated. b. Interval detection and compensation calculation steps: During the laser processing, after each preset processing interval is completed, the processing is paused, and the mask mark point is photographed again to obtain its current coordinates; the current coordinates are compared with the coordinates recorded when this step was performed last time, and the X-axis offset compensation amount, Y-axis offset compensation amount and rotation angle compensation amount are calculated; c. Path compensation application steps: Apply the X-axis offset compensation amount, Y-axis offset compensation amount, and rotation angle compensation amount to the laser processing path of the subsequent processing interval to perform overall offset and rotation compensation on the path; d. Repeat steps b and c until all TGV processing paths are completed.

[0018] Furthermore, the preset processing interval is a preset number of processing rows and columns or a preset number of processing points.

[0019] Furthermore, following step a, it also includes: Record the reference distances corresponding to the reference coordinates of the at least two mask mark points; In step b, while obtaining the current coordinates of each mask mark point, the current distance between each mask mark point is also calculated, and the current temperature value is obtained from the temperature sensing unit; The current distance is compared with the reference distance to obtain the distance difference; Determine whether the distance difference is less than a preset distance threshold; if yes, perform the compensation calculation in step b; if no, correct the pre-stored temperature compensation table based on the distance difference and the current temperature value, and repeat the interval detection step.

[0020] Furthermore, the method also includes preparatory steps before equipment production: The equipment is compensated using a laser interferometer, and an initial temperature compensation table is established. The temperature compensation table is established by measuring the distance between at least two mask mark points under different temperature environments, and calculating the corresponding distance difference at each temperature based on the distance at a certain reference temperature.

[0021] Furthermore, the specific process for calculating the X-axis offset compensation, Y-axis offset compensation, and rotation angle compensation in step b is as follows: The mask has four mark points, and the coordinates of the four mask mark points recorded in the last recording are denoted as P. 01 (X 01 ,Y 01 ), P 02 (X 02 ,Y 02 ), P 03 (X 03 ,Y03 ), P 04 (X 04 ,Y 04 ); The coordinates of the four mask mark points currently obtained are P 11 (X 11 ,Y 11 ), P 12 (X 12 ,Y 12 ), P 13 (X 13 ,Y 13 ), P 14 (X 14 ,Y 14 ); Calculate the offset difference between the X and Y axes: ΔX i =X 1i X 0i ΔY i =Y 1i Y 0i , where i = 1, 2, 3, 4; Calculate the X-axis offset compensation amount and Y-axis offset compensation amount : ; ; Under the baseline condition, calculate P 01 P 02 Horizontal angle: θ0= ; Calculate P in the current state. 11 P 12 Horizontal angle: θ1= ; Calculate the rotation angle compensation Rcomp = θ1 - θ0.

[0022] Compared with the prior art, the present invention has the following beneficial effects: Firstly, it achieves online closed-loop compensation: Through the "processing-detection-compensation" cycle mode, this invention can track and compensate for various errors generated during the processing in real time, realizing online closed-loop control of processing position errors, which is significantly better than the traditional offline compensation method.

[0023] Secondly, it achieves full-range precision control: by arranging mark points at the four corners of the adsorption platform, a reference coordinate system covering the entire processing range is constructed, which can detect and compensate for the overall translation, rotation, scaling and other full-range errors of the platform, ensuring the uniformity of overall precision when processing large-size workpieces and overcoming the limitations of single-point compensation.

[0024] Thirdly, it achieves collaborative compensation for multi-source errors: This invention integrates visual detection and multi-point temperature sensing. Through innovative algorithm logic, it can collaboratively process composite position deviations caused by multiple factors such as set error, dynamic error and thermal error, and achieve synchronous decoupling and compensation of multi-source errors.

[0025] Fourth, it improves automation and production efficiency: The entire compensation process is completed automatically by the computer system without human intervention, which greatly reduces downtime and human error caused by manual adjustment, thereby effectively improving equipment uptime, production yield and capacity, and providing strong support for the large-scale production of advanced packaging. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the device coordinate system and the positional relationship between the cutting head and the camera in an embodiment of the present invention.

[0027] Figure 2 This is a schematic diagram of the mask mark points (circular and cross-shaped) in an embodiment of the present invention.

[0028] Figure 3 This is a schematic diagram showing the positions of the four mark points (LU, RU, LD, RD) on the adsorption platform in an embodiment of the present invention.

[0029] Figure 4 This is a schematic diagram of distance expansion and contraction compensation caused by thermal expansion and contraction in an embodiment of the present invention.

[0030] Figure 5 This is a schematic diagram of offset compensation caused by the overall offset and rotation of the platform in an embodiment of the present invention. Detailed Implementation

[0031] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0032] The following will clearly and completely describe the concept, specific structure, and technical effects of the present invention in conjunction with embodiments and accompanying drawings, so as to fully understand the purpose, features, and effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. Other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are all within the scope of protection of the present invention. Furthermore, all connections / linkages involved in the patent do not simply refer to direct contact between components, but rather to the ability to form a better connection structure by adding or reducing connecting accessories according to specific implementation conditions. The various technical features in this invention can be combined interactively without contradicting each other.

[0033] Example 1 Reference Figures 1 to 5 As shown, this invention provides an automatic position compensation system for TGV processing. The system includes an XYZ motion module, an adsorption platform, mask mark points, a laser system, a cutting head, a vision camera, multiple temperature sensing units, and a computer control system. The number of mask mark points is at least two; in this embodiment, four mask mark points are included.

[0034] The XYZ motion module includes an X motion module, a Y motion module, and a Z motion module. An adsorption platform is mounted on the Y motion module for placing the workpiece to be processed. Four mask mark points are fixedly installed at the four corners of the adsorption platform. A cutting head is mounted on the Z motion module for laser processing of the workpiece using a laser system. A vision camera is fixedly connected to the cutting head for capturing images of the four mask mark points. In this embodiment, the vision camera is fixedly connected to the cutting head via a parallax mounting plate so that the mounting reference plane of the vision camera is perpendicular to the optical path of the cutting head. Multiple temperature sensing units are respectively arranged in at least one of the XYZ motion module, the adsorption platform, and the cutting head for real-time monitoring of the temperature at corresponding locations. Specifically, in this embodiment, the multiple temperature sensing units include five temperature sensing units: a cutting head mounting base installed on the X motion module, the Y motion module, and the Z motion module; a center of the adsorption platform; and an edge of the adsorption platform. The temperature sensing units installed in the X-motion module and Y-motion module are located at the corresponding guide rail sliders and are used to monitor the heating of the moving parts of the X-motion module and Y-motion module, respectively. The temperature sensing unit installed on the cutting head mounting base is used to monitor the heat conduction of laser processing. The temperature sensing units at the center and edge of the adsorption platform are used to monitor the influence of the platform's own thermal deformation and the ambient temperature.

[0035] The computer control system is electrically connected to the XYZ motion module, the laser system, the vision camera, and the plurality of temperature sensing units, respectively; the computer control system is configured as follows: S1. Before laser processing, control the XYZ motion module to drive the vision camera to capture the four mask mark points, and obtain and save the reference coordinates of each of the four mask mark points. S2. During the laser processing, at a preset processing interval, pause the processing and control the vision camera to re-capture the four mask mark points to obtain their current coordinates; S3. Compare the current coordinates with the previously recorded coordinates, and calculate the position offset compensation value and rotation angle compensation value used to compensate for subsequent processing paths; S4. Control the XYZ motion module to perform overall offset compensation on the subsequent laser processing path according to the position offset compensation value and rotation angle compensation value.

[0036] Furthermore, the computer control system is also configured to: S10. Before laser processing, establish and store a temperature compensation table, which records the distance difference between the four mask mark points caused by thermal deformation at different temperatures. S20. During the laser processing, the temperature values ​​of the multiple temperature sensing units are acquired in real time, and the distance between the four mask mark points is calculated. S30. Compare the current distance with the pre-stored reference distance. When the distance difference exceeds the preset distance threshold, correct the temperature compensation table based on the distance difference and the current temperature value.

[0037] In step S3 above, the computer control system calculates the position offset compensation value and the rotation angle compensation value in the following specific way: S301. Calculate the four differences between the current coordinate and the previously recorded coordinate on the X and Y axes respectively; S302. Calculate the average of the four X-axis differences and the four Y-axis differences to obtain the X-axis offset compensation amount and the Y-axis offset compensation amount, which together constitute the position offset compensation value. S303. Calculate the straight line angle determined by the coordinates of two mask mark points recorded in the previous record, and the straight line angle determined by the coordinates of the two mask mark points currently recorded. S304. Subtract the two straight-line angles to obtain the rotation angle compensation value.

[0038] Example 2 Based on the above-described TGV machining process automatic position compensation system, this embodiment provides a TGV machining process automatic position compensation method, specifically, the method includes the following steps: a. Reference information acquisition steps: Before the laser processing begins, the vision camera is controlled to capture images of four mask mark points on the adsorption platform. The images are processed to obtain and save the reference coordinates of each mask mark point, and these reference coordinates are used as the reference coordinates of the initial processing path to be compensated. b. Interval detection and compensation calculation steps: During the laser processing, after each preset processing interval is completed, the processing is paused, and the four mask mark points are photographed again to obtain their current coordinates; the current coordinates are compared with the coordinates recorded when this step was performed last time, and the X-axis offset compensation amount, Y-axis offset compensation amount and rotation angle compensation amount are calculated; The preset processing interval is a preset number of processing rows and columns or a preset number of processing points; The specific process for calculating the X-axis offset compensation, Y-axis offset compensation, and rotation angle compensation in step b is as follows: Let P be the coordinates of the four mask mark points recorded last time. 01 (X 01 ,Y 01 ), P 02 (X 02 ,Y 02 ), P 03 (X 03 ,Y 03 ), P 04 (X 04 ,Y 04 ); The coordinates of the four mask mark points currently obtained are P 11 (X 11 ,Y 11 ), P 12 (X 12 ,Y 12 ), P 13 (X 13 ,Y 13 ), P 14 (X 14 ,Y 14 ); Calculate the offset difference between the X and Y axes: ΔX i =X 1i X 0i ΔY i =Y 1i Y 0i , where i = 1, 2, 3, 4; Calculate the X-axis offset compensation amount and Y-axis offset compensation amount : ; ; Under the baseline condition, calculate P 01 P 02 Horizontal angle: θ0= ; Calculate P in the current state. 11 P 12 Horizontal angle: θ1= ; Calculate the rotation angle compensation Rcomp = θ1 - θ0; c. Path compensation application steps: Apply the X-axis offset compensation amount, Y-axis offset compensation amount, and rotation angle compensation amount to the laser processing path of the subsequent processing interval to perform overall offset and rotation compensation on the path; d. Repeat steps b and c until all TGV processing paths are completed.

[0039] Furthermore, following step a, it also includes: a1. Record the reference distances corresponding to the reference coordinates of the four mask mark points; a2. In step b, while obtaining the current coordinates of each mask mark point, the current distance between each mask mark point is also calculated, and the current temperature value is obtained from the temperature sensing unit. a3. Compare the current distance with the reference distance to obtain the distance difference; a4. Determine whether the distance difference is less than a preset distance threshold; if yes, perform the compensation calculation in step b; if no, correct the pre-stored temperature compensation table according to the distance difference and the current temperature value, and repeat the interval detection step.

[0040] In addition, the method also includes preparatory steps before equipment production: The equipment is compensated using a laser interferometer, and an initial temperature compensation table is established. The temperature compensation table is established by measuring the distance between the four mask mark points under different temperature environments, and calculating the corresponding distance difference at each temperature based on the distance at a certain reference temperature.

[0041] Example 3 Continue to combine Figures 1 to 5As shown, the present invention provides a high-precision TGV machining process automatic position compensation system, which includes an XYZ motion module, an adsorption platform, four mask mark points, a laser system, a cutting head, a vision camera, multiple temperature sensing units, and a computer control system.

[0042] A key feature of this invention is that at the four corners of the adsorption platform (e.g., Figure 3 As shown, LU (top left), RU (top right), LD (bottom left), and RD (bottom right) are each fixedly installed with a mask mark point. These four mark points together form a global reference coordinate system covering the entire processing area. By monitoring the position changes of these four fixed points, the overall translation, rotation, and scaling errors of the platform caused by equipment assembly errors (such as XY axis orthogonality deviation and guide rail straightness error) and thermal deformation can be comprehensively reflected, overcoming the limitation of single-point compensation in existing technologies that can only correct local positions. The mask mark points can be installed using methods such as... Figure 2 The circular or cross mark shown is made of chromium and plated on a quartz substrate, with high contrast (≥100:1), which facilitates stable recognition by the visual system.

[0043] The laser system and cutting head are used to perform drilling operations on the TGV, with the cutting head mounted on the Z-motion module. The vision camera is fixedly connected to the cutting head via a parallax mounting plate (e.g., ...). Figure 1 As shown in the diagram, ensure a fixed, calibrated offset between the camera's field of view center and the laser processing point (cutting head center). In this way, by moving the XYZ module to align the camera with the mark point, the precise position of the laser processing point relative to the mark point can be obtained through coordinate calculation.

[0044] Another core feature of this invention is that the system is equipped with multiple temperature sensing units to specifically eliminate thermal errors. In a preferred embodiment, a total of five temperature sensing units (e.g., PT1000 high-precision platinum resistance thermometers) are configured: one is installed on the side of the linear motor mover of the X-axis motion module to monitor the heating of the X-axis moving parts; one is installed on the side of the linear motor mover of the Y-axis motion module to monitor the heating of the Y-axis moving parts; one is installed on the side of the mounting base of the Z-axis cutting head to monitor the impact of heat conduction from laser processing; and two are installed on the adsorption platform (one at the center and one at the edge) to monitor the platform's own thermal deformation and its susceptibility to ambient temperature. By collecting temperature data from these five key locations in real time, the system can establish a mapping relationship between "temperature change and position offset" and directly and accurately compensate for errors caused by thermal effects.

[0045] The computer control system is the brain of the entire system. It is electrically connected to all the hardware units mentioned above and is responsible for executing the automatic compensation method proposed in this invention.

[0046] The following details the automatic position compensation method for high-precision TGV machining process of the present invention, which can be divided into three stages: equipment preparation before production, automatic compensation before equipment operation, and dynamic compensation during machining.

[0047] Phase 1: Preparations before equipment production.

[0048] Step 1: Perform basic calibration of the equipment. Use a laser interferometer to measure and compensate for the positioning accuracy and straightness of the XYZ motion module. Then, establish an initial temperature compensation table. The specific method is as follows: Place the equipment in a temperature-controlled environment, using a reference temperature (e.g., 22℃), and change the ambient temperature at 0.1℃ intervals. At each temperature point, use a laser interferometer in conjunction with a vision camera to measure the X and Y distances between four mark points; compare the distances at each temperature with the distances at the reference temperature to obtain the difference (Δ). ,Δ This creates a temperature-compensation mapping table as shown below:

[0049] 2. Step 2: Set the visual camera parameters, such as exposure, gain, and brightness, to ensure that the mark point image can be clearly captured.

[0050] Phase 2: Automatic compensation before equipment operation (acquiring reference).

[0051] Before starting the processing of each batch of workpieces, perform the following steps to obtain a baseline of the current state: 1. Step 3: The computer control system calls up the preset camera parameters.

[0052] 2. Step 4: Control the XYZ motion module to move the vision camera directly above the four mark points (LU, LD, RU, RD) in sequence.

[0053] 3. Step 5: Take a picture of each mark point, extract its center pixel coordinates using image processing algorithms (such as edge detection and subpixel localization), and then convert them to coordinates in the device's mechanical coordinate system using a pre-defined coordinate transformation relationship. Simultaneously, record the temperature values ​​of the five temperature sensing units.

[0054] 4. Step 6: Save the mechanical coordinates of these four mark points and calculate the distance between them as the "baseline distance" for this processing.

[0055] Phase 3: Dynamic compensation during processing.

[0056] This is the core of the method of the present invention, which achieves dynamic error correction through a closed-loop "processing-detection-compensation" cycle.

[0057] 1. Step 7: Dynamic correction check of thermal compensation table. Before starting or continuing processing, the system will perform a thermal compensation check, calculate the distance between the current four mark points, and compare it with the "baseline distance" saved in step 6 to obtain the distance difference.

[0058] If the distance difference is less than a preset distance threshold (e.g., ±1µm), it indicates that the device is relatively stable and the thermal deformation is within a controllable range, then proceed to step 8. The setting of this threshold takes into account both hardware capabilities (camera sub-pixel positioning accuracy ±0.5µm, temperature sensor corresponding position resolution ≤ ±0.1µm) and industry process requirements (TGV position accuracy ≤ ±3µm), achieving a balance between ensuring accuracy and avoiding frequent corrections.

[0059] If the distance difference exceeds this threshold, it indicates significant thermal deformation. In this case, the system will adjust the temperature compensation table established in the first stage in real time based on the current distance difference and the readings from the temperature sensor unit. For example, this can be done using a correction coefficient. Adjust accordingly. After correction, loop back to the beginning of this step and re-detect until the distance difference meets the requirements.

[0060] For correction coefficient Based on the determination of the temperature-compensation mapping table in step 1, a real-time correction algorithm is provided, including step af: a. The current temperature is T curr ; b. Collect the actual position difference ΔX of the current mark point in the XY direction. real ΔY real ; c. Query the current compensation table for temperature T curr Corresponding compensation amount ΔX theo ΔY theo ; d. Correction coefficient K X = K Y = ; (ΔX) theo When =0, and ΔX real When K is ≤±1um X =1;ΔX real When the value is ≥±1µm, the system indicates that the compensation data is abnormal and the equipment needs to be recalibrated for laser interferometer compensation, X / Y direction offset compensation, and temperature compensation meter calibration. e. Corrected compensation amount: ΔX adjust =ΔXtheo *K X ΔY adjust =ΔY theo *K Y ; f. Corresponding temperature T in the updated temperature compensation table curr The compensation amount ensures that the temperature-compensation mapping table is dynamically optimized according to the processing environment.

[0061] 2. Step 8: Record the initial coordinates of the processing segment and begin processing. After passing the check in Step 7, the system records the center coordinates of the four current mark points as the "reference coordinates" for the upcoming processing segment. 0i Then, laser processing can begin or continue according to the TGV processing path.

[0062] 3. Step 9: Interval detection. After the laser has processed the preset interval (for example, 50 columns or 200 holes), the system pauses processing.

[0063] 4. Step 10: Obtain the current coordinates. The system again controls the vision camera to capture images of the four mark points, obtaining their center coordinates at the current moment, denoted as "current coordinates" P. 1i ; 5. Step 11: Calculate the compensation value. The system compares the "current coordinates" P. 1i And the "reference coordinates" P recorded in step 8 0i The offset compensation in the X / Y directions and the rotation compensation in the R direction are calculated. This calculation process is crucial for decoupling and integrating errors; by analyzing the overall changes at four points, the translation and rotation components can be separated. The specific calculations are as follows: Calculate the offset difference for each mark point: ΔX i =X 1i X 0i ΔY i =Y 1i Y 0i , where i = 1, 2, 3, 4; By averaging, the overall translation compensation is obtained, which can effectively filter out random noise from individual mark point measurements. X-axis offset compensation : ; Y-axis offset compensation : ; The rotation compensation amount (e.g., by calculating the angle change of the line connecting the mark points) is obtained. Figure 5 (as shown) Under the baseline condition, calculate P 01 P02 The horizontal angle (i.e., the reference angle): θ0 = ; Calculate P in the current state. 11 P 12 The horizontal angle (i.e., the current angle): θ1= ; Calculate the rotation angle compensation Rcomp = θ1 - θ0; 6. Step 12: Apply compensation and update the reference. The computer control system will apply the calculated compensation value. , Rcomp is applied to the coordinates of all machining points in the next machining segment; that is, a global translation and rotation transformation is performed on the subsequent machining path. Simultaneously, the "current coordinates" P obtained in step 10 are... 1i Save it as a new "reference coordinate" for the next compensation calculation.

[0064] 7. Step 13: Loop. Continue laser processing and repeat steps 9 to 12 to form a continuous closed-loop compensation until all TGV processing paths are completed.

[0065] Through the above system and method, this invention unifies multiple error sources (aggregate error, thermal error, dynamic error) into the position and orientation changes of four reference mark points during the processing. By high-frequency interval detection and real-time calculation, these changes are quantified into specific compensation values, and the subsequent processing path is dynamically corrected, thereby realizing online, global, and closed-loop automatic compensation for processing position errors.

[0066] This invention achieves a single solution to simultaneously address ensemble error, thermal error, dynamic error, and system error through a logic of "layered detection, centralized decoupling, and dynamic compensation": Layer 1: Baseline Detection (addressing system error + ensemble error). A global baseline coordinate system is established through initial calibration and real-time detection of the four corner markers. System errors are corrected using a coordinate system transformation algorithm, while ensemble error is captured by changes in distance and angle between markers. Layer 2: Dynamic Tracking (addressing dynamic error). An interval detection mechanism captures dynamically generated errors during processing in real time, preventing error accumulation. Layer 3: Thermal Error Linkage (addressing thermal error). Temperature data collected by the temperature sensing unit is correlated with positional deviation data detected by the markers. Positional offsets caused by thermal deformation are corrected using a temperature compensation table. Layer 4: Decoupling and Compensation (integrating all errors). A core algorithm separates the multi-source errors detected by the above three layers (e.g., distinguishing between "linear expansion deviation caused by temperature" and "angular deviation caused by platform orthogonality"), calculates corresponding compensation amounts for each, and finally achieves integrated compensation through the XYZ motion module, ensuring that each error source is accurately eliminated and does not interfere with each other.

[0067] Compared with existing technologies, this invention has the following advantages: First, it achieves online closed-loop compensation: Through a "processing-detection-compensation" cycle, this invention can track and compensate for various errors generated during processing in real time, achieving online closed-loop control of processing position errors, which is significantly better than traditional offline compensation methods. Second, it achieves full-domain precision control: By arranging mark points at the four corners of the adsorption platform, a reference coordinate system covering the entire processing range is constructed, which can detect and compensate for the overall translation, rotation, scaling, and other full-domain errors of the platform, ensuring the uniformity of overall precision when processing large-size workpieces and overcoming the limitations of single-point compensation. Third, it achieves collaborative compensation for multi-source errors: This invention integrates visual inspection and multi-point temperature sensing. Through innovative algorithm logic, it can collaboratively handle composite position deviations caused by multiple factors such as set errors, dynamic errors, and thermal errors, achieving synchronous decoupling and compensation of multi-source errors. Fourth, it improves automation and production efficiency: The entire compensation process is completed automatically by the computer system without human intervention, which greatly reduces downtime and human error caused by manual adjustment, thereby effectively improving equipment uptime, production yield and capacity, and providing strong support for the large-scale production of advanced packaging.

[0068] The above is a detailed description of the preferred embodiments of the present invention. However, the present invention is not limited to the embodiments described. Those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention. All such equivalent modifications or substitutions are included within the scope defined by the claims of this application.

Claims

1. An automatic position compensation system for TGV machining process, characterized in that, include: The XYZ motion module includes an X motion module, a Y motion module, and a Z motion module; An adsorption platform, installed on the Y-motion module, is used to place the workpiece to be processed; At least two mask mark points are fixedly set at the corners of the adsorption platform; A cutting head, mounted on the Z motion module, is used for laser processing of the workpiece to be processed via a laser system; A vision camera, fixedly connected to the cutting head, is used to capture images of the mask mark points. Multiple temperature sensing units are respectively deployed in at least one of the XYZ motion module, the adsorption platform and the cutting head, for real-time monitoring of the temperature at the corresponding positions; The computer control system is electrically connected to the XYZ motion module, the laser system, the vision camera, and the multiple temperature sensing units, respectively. The computer control system is configured as follows: Before laser processing, the XYZ motion module is controlled to drive the vision camera to capture the mask mark points, and the reference coordinates of each mask mark point are obtained and saved. During laser processing, processing is paused at preset intervals, and the vision camera is controlled to re-capture the mask mark point to obtain its current coordinates. By comparing the current coordinates with the previously recorded coordinates, the position offset compensation value and the rotation angle compensation value used to compensate for subsequent processing paths are calculated. The XYZ motion module is controlled to perform overall offset compensation on the subsequent laser processing path based on the position offset compensation value and the rotation angle compensation value.

2. The automatic position compensation system for TGV machining process according to claim 1, characterized in that, The plurality of temperature sensing units include: five temperature sensing units respectively installed on the cutting head mounting base, the center of the adsorption platform, and the edge of the adsorption platform on the X motion module, Y motion module, and Z motion module.

3. The automatic position compensation system for TGV machining process according to claim 1, characterized in that, The vision camera is fixedly connected to the cutting head via a parietal mounting plate, so that the mounting reference plane of the vision camera is perpendicular to the optical path of the cutting head.

4. The automatic position compensation system for TGV machining process according to claim 1, characterized in that, The computer control system is also configured to: Before laser processing, a temperature compensation table is established and stored, which records the distance difference between at least two mask mark points caused by thermal deformation at different temperatures; During laser processing, the temperature values ​​of the multiple temperature sensing units are acquired in real time, and the distance between the current at least two mask mark points is calculated. The current distance is compared with the pre-stored reference distance. When the distance difference exceeds a preset distance threshold, the temperature compensation table is corrected based on the distance difference and the current temperature value.

5. The automatic position compensation system for TGV machining process according to claim 1, characterized in that, The specific method by which the computer control system calculates the position offset compensation value and the rotation angle compensation value is as follows: Calculate the difference between the current coordinates of each mask mark point and the previously recorded coordinates on the X and Y axes respectively; The average values ​​of the X-axis difference and the Y-axis difference are calculated to obtain the X-axis offset compensation amount and the Y-axis offset compensation amount, which together constitute the position offset compensation value. Calculate the straight line angle determined by the coordinates of two mask mark points recorded in the previous record, and the straight line angle determined by the coordinates of the two mask mark points currently recorded. Subtract the two straight-line angles to obtain the rotation angle compensation value.

6. An automatic position compensation method for TGV machining process, applied to the automatic position compensation system for TGV machining process according to any one of claims 1-5, characterized in that, Includes the following steps: a. Reference information acquisition steps: Before the laser processing begins, the vision camera is controlled to capture the mask mark points on the adsorption platform, the image is processed to obtain and save the reference coordinates of each mask mark point, and the reference coordinates are used as the reference coordinates of the initial processing path to be compensated. b. Interval detection and compensation calculation steps: During the laser processing, after each preset processing interval is completed, the processing is paused, and the mask mark point is photographed again to obtain its current coordinates; the current coordinates are compared with the coordinates recorded when this step was performed last time, and the X-axis offset compensation amount, Y-axis offset compensation amount and rotation angle compensation amount are calculated; c. Path compensation application steps: Apply the X-axis offset compensation amount, Y-axis offset compensation amount, and rotation angle compensation amount to the laser processing path of the subsequent processing interval to perform overall offset and rotation compensation on the path; d. Repeat steps b and c until all TGV processing paths are completed.

7. The automatic position compensation method for TGV machining process according to claim 6, characterized in that, The preset processing interval is either a preset number of processing rows and columns or a preset number of processing points.

8. The automatic position compensation method for TGV machining process according to claim 6, characterized in that, Following step a, the following also includes: Record the reference distances corresponding to the reference coordinates of the at least two mask mark points; In step b, while obtaining the current coordinates of each mask mark point, the current distance between each mask mark point is also calculated, and the current temperature value is obtained from the temperature sensing unit; The current distance is compared with the reference distance to obtain the distance difference; Determine whether the distance difference is less than a preset distance threshold; if yes, perform the compensation calculation in step b; if no, correct the pre-stored temperature compensation table based on the distance difference and the current temperature value, and repeat the interval detection step.

9. The automatic position compensation method for TGV machining process according to claim 8, characterized in that, The method also includes preparatory steps before equipment production: The equipment is compensated using a laser interferometer, and an initial temperature compensation table is established. The temperature compensation table is established by measuring the distance between at least two mask mark points under different temperature environments, and calculating the corresponding distance difference at each temperature based on the distance at a certain reference temperature.

10. The automatic position compensation method for TGV machining process according to claim 6, characterized in that, The specific process for calculating the X-axis offset compensation, Y-axis offset compensation, and rotation angle compensation in step b is as follows: The mask has four mark points, and the coordinates of the four mask mark points recorded in the last recording are denoted as P. 01 (X 01 ,Y 01 ), P 02 (X 02 ,Y 02 ), P 03 (X 03 ,Y 03 ), P 04 (X 04 ,Y 04 ); The coordinates of the four mask mark points currently obtained are P 11 (X 11 ,Y 11 ), P 12 (X 12 ,Y 12 ), P 13 (X 13 ,Y 13 ), P 14 (X 14 ,Y 14 ); Calculate the offset difference between the X and Y axes: ΔX i =X 1i X 0i ΔY i =Y 1i Y 0i , where i = 1, 2, 3, 4; Calculate the X-axis offset compensation amount and Y-axis offset compensation amount : ； ； Under the baseline condition, calculate P 01 P 02 Horizontal angle: θ0= ; Calculate P in the current state. 11 P 12 Horizontal angle: θ1= ; Calculate the rotation angle compensation Rcomp = θ1 - θ0.

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