Workpiece loading frame and vacuum treatment equipment

Abstract

The invention relates to the technical field of vacuum treatment, and particularly discloses a workpiece loading frame and vacuum treatment equipment. The workpiece loading frame comprises a mounting frame, a rotating frame and a mounting jig; a first rotating shaft is rotationally arranged on the mounting frame, is in transmission connection with the mounting part and is provided with a first shaft end part; the rotating frame is connected to the first rotating shaft; a second rotating shaft is rotationally arranged on the rotating frame and is provided with a second shaft end part; the mounting jig is connected to the second rotating shaft; and in the axis direction of the first rotating shaft, the first shaft end part is arranged on the side far away from the mounting part relative to the second shaft end part. The length of the workpiece loading frame in the axis direction is reduced, the space occupied by the whole workpiece loading frame in the vacuum treatment cavity is reduced, and therefore under the condition of the cavity with the limited specification and size, the space utilization rate and the treatment space are improved, the loading capacity of vacuum treatment equipment is improved, and the working efficiency is improved. Therefore, the requirement of the terminal on the loading capacity of single equipment is met.

Description

Technical Field

[0001] This invention relates to the field of vacuum processing technology, and in particular to a workpiece loading rack and vacuum processing equipment. Background Technology

[0002] Vacuum processing equipment is a type of equipment used for various processing techniques in a vacuum environment. Its applications are wide-ranging, including but not limited to vacuum coating equipment and vacuum etching equipment. Planetary workpiece loading racks are an important structure in vacuum processing equipment. They generally utilize gear transmission principles to cause the workpiece to rotate in multiple stages, such as revolution and rotation, thereby achieving technical effects such as uniform vacuum processing and improving workpiece processing efficiency and quality.

[0003] Planetary workpiece loaders typically achieve the rotation of multiple rotating disks carrying workpieces through multi-stage shaft transmission. However, existing vacuum processing equipment equipped with planetary workpiece loaders sometimes cannot meet end-user demands in terms of loading capacity. To increase the loading capacity of vacuum processing, the vacuum processing chamber can be enlarged, but this method tends to increase the material and floor space costs of the vacuum processing equipment. With a fixed vacuum processing chamber, the loading capacity can also be increased by increasing the number of planetary disks, but this method tends to increase the manufacturing and maintenance costs of the vacuum processing equipment. Summary of the Invention

[0004] The purpose of this invention is to provide a workpiece loading rack and vacuum processing equipment to solve the problem that the loading capacity of vacuum processing equipment is small under the condition of limited size and volume of the existing chamber, which cannot meet the terminal's requirements for the loading capacity of a single device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] On one hand, the present invention provides a workpiece loading rack that can be installed on a mounting part, the workpiece loading rack comprising:

[0007] A mounting bracket is provided with a first rotating shaft rotatably mounted on the mounting bracket. The first rotating shaft is connected to the mounting part in a driving manner. The first rotating shaft has a first shaft end.

[0008] A rotating frame is connected to a first rotating shaft; a second rotating shaft is rotatably mounted on the rotating frame, the second rotating shaft having a second shaft end; the first rotating shaft can drive the rotating frame to rotate relative to the mounting frame, so that the second rotating shaft rotates around the first rotating shaft relative to the mounting frame; the second rotating shaft is drively connected to the mounting frame, and when the second rotating shaft rotates around the first rotating shaft relative to the mounting frame, the drive end of the mounting frame can drive the second rotating shaft to rotate on its own axis;

[0009] The mounting fixture is connected to the second rotating shaft;

[0010] In the axial direction of the first rotating shaft, the first shaft end is located on the side away from the mounting portion relative to the second shaft end.

[0011] As an alternative to the above-mentioned workpiece loading rack, the mounting frame is recessed to the side away from the mounting part to form a first groove, and the first rotating shaft is rotatably disposed at the bottom of the first groove; the first groove has a first channel, and part of the first rotating shaft can pass through the first channel and be connected to the rotating frame.

[0012] As an alternative to the aforementioned workpiece loading rack, the rotating frame is recessed to the side away from the mounting frame to form a second groove, and a portion of the first rotating shaft is located within the second groove.

[0013] As an alternative to the aforementioned workpiece loading rack, the mounting rack is provided with a first bearing seat, the first rotating shaft is rotatably mounted on the first bearing seat, and a portion of the first bearing seat passes through the first channel and is located in the second groove.

[0014] As an alternative to the aforementioned workpiece loading rack, the first rotating shaft has a first support portion and a first shaft portion. The first shaft portion is rotatably disposed within the first bearing housing. The first support portion is able to abut against the side end of the first bearing housing, and the other end of the first shaft portion away from the first support portion is drively connected to the mounting portion.

[0015] As an alternative to the above-mentioned workpiece loading frame, the rotating frame is provided with a second bearing seat, and the second rotating shaft is rotatably mounted on the second bearing seat; the rotating frame has a second channel, and part of the second rotating shaft can pass through the second channel and be connected to the mounting fixture.

[0016] As an alternative to the aforementioned workpiece loading rack, the second rotating shaft has a second support portion and a second shaft portion. The second shaft portion is rotatably disposed within the second bearing housing, the second support portion is able to abut against the side end of the second bearing housing, and the other end of the second shaft portion away from the second support portion is drively connected to the mounting frame.

[0017] As an optional embodiment of the above-mentioned workpiece loading frame, the outer periphery of the mounting frame is provided with an internal gear ring and / or an external gear ring, and the second rotating shaft is provided with a transmission gear. The side of the transmission gear near the first rotating shaft is meshed with the internal gear ring and / or the side of the transmission gear away from the first rotating shaft is meshed with the external gear ring.

[0018] As an optional solution for the above-mentioned workpiece loading rack, the mounting fixture includes a fixture frame and a fixture base plate. One side of the fixture frame is connected to the second rotating shaft, and an elastic component is provided on the other side of the fixture frame away from the second rotating shaft. The fixture frame has a slot, and the fixture base plate has a protrusion. The elastic component can elastically abut against the fixture base plate so that the protrusion is engaged in the slot.

[0019] As an optional embodiment of the above-mentioned workpiece loading rack, the elastic component includes a guide housing, an elastic element, and a top pin. The guide housing is disposed on the fixture frame. One end of the top pin is movably disposed within the guide housing, and the other end of the top pin can abut against the fixture base plate. The elastic element is disposed within the guide housing, and both ends of the elastic element abut against the fixture frame and the top pin, respectively.

[0020] On the other hand, the present invention provides a vacuum processing device, including the workpiece loading rack as described above. The vacuum processing device further includes the mounting part, a rotating disk, and a vacuum processing chamber. The rotating disk is disposed in the vacuum processing chamber. The mounting part is throttle-connected to the rotating disk, and the mounting rack is throttle-connected to the mounting part.

[0021] The beneficial effects of this invention are as follows:

[0022] The workpiece loading rack includes a mounting frame, a rotating frame, and a mounting fixture. A first rotating shaft is rotatably mounted on the mounting frame, and is driven by a mounting section. The rotating frame is connected to the first rotating shaft, allowing the drive end of the mounting section to drive the first rotating shaft to rotate the rotating frame. A second rotating shaft is rotatably mounted on the rotating frame. The first rotating shaft drives the rotating frame to rotate relative to the mounting frame, causing the second rotating shaft to rotate around the first rotating shaft relative to the mounting frame. The second rotating shaft is driven by the mounting frame. When the second rotating shaft rotates around the first rotating shaft relative to the mounting frame, the drive end of the mounting frame drives the second rotating shaft to rotate. Simultaneously, the mounting fixture is connected to the second rotating shaft, so that when the first rotating shaft drives the rotating frame to rotate, the second rotating shaft drives the mounting fixture to rotate, thereby adjusting the spatial position of the workpiece on the mounting fixture. The first rotating shaft has a first shaft end, and the second rotating shaft has a second shaft end. In the axial direction of the first rotating shaft, the first shaft end is located on the side away from the mounting part relative to the second shaft end. Thus, the second shaft end is located above the first shaft end on the overall workpiece loading frame. This allows the mounting fixture and the second rotating shaft to be positioned close to the side facing the mounting part, while the first rotating shaft is positioned close to the side below the mounting fixture. This makes the overall structure of the first rotating shaft, mounting frame, second rotating shaft, rotating frame, and mounting fixture more compact, thereby reducing the overall length of the workpiece loading frame in the axial direction and reducing the space occupied by the workpiece loading frame in the vacuum processing chamber. As a result, under the condition of limited chamber size and volume, the space utilization rate and processing space are improved, and the loading capacity of the vacuum processing equipment is increased, thus meeting the terminal's requirements for the loading capacity of a single device. Attached Figure Description

[0023] Figure 1 This is a first cross-sectional view of the workpiece loading rack provided in an embodiment of the present invention;

[0024] Figure 2 This is a second sectional view of the workpiece loading rack provided in an embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of the mounting bracket provided in an embodiment of the present invention;

[0026] Figure 4 This is a partial sectional view of the workpiece loading frame at the first rotating shaft provided in an embodiment of the present invention;

[0027] Figure 5 This is a partial sectional view of the workpiece loading frame at the second rotating shaft provided in an embodiment of the present invention;

[0028] Figure 6 This is a schematic diagram of the mounting fixture for the mounting bracket provided in an embodiment of the present invention;

[0029] Figure 7 This is a cross-sectional view of the mounting fixture for the mounting bracket provided in an embodiment of the present invention.

[0030] In the picture:

[0031] 1. Housing; 11. First rotating shaft; 111. First shaft end; 112. First support part; 113. First shaft part; 114. Second transmission bevel gear; 12. First bearing seat; 121. First bearing bracket; 122. First bearing; 13. First locking nut; 14. First anti-loosening snap ring; 2. Mounting bracket; 21. First groove; 211. First channel; 3. Rotating bracket; 31. Second rotating shaft; 311. Second shaft end; 312. Second support part; 313. Second... 32. Shaft portion; 33. Second groove; 34. Second bearing seat; 35. Second channel; 36. Transmission gear; 37. Second locking nut; 4. Second anti-loosening retaining ring; 4. Mounting fixture; 41. Fixture frame; 411. Slot; 42. Fixture base plate; 421. Protrusion; 43. Elastic component; 431. Guide housing; 432. Elastic element; 433. Top pin; 5. Mounting part; 51. Support housing; 511. Intermediate bevel gear; 52. Rotating shaft; 521. First transmission bevel gear. Detailed Implementation

[0032] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0033] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Furthermore, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0035] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0036] like Figures 1 to 7 As shown, the present invention provides a workpiece loading rack that can be installed on the mounting part 5 for adjusting the spatial position of the workpiece in the vacuum processing chamber.

[0037] The workpiece loading rack includes a mounting frame 2, a rotating frame 3, and a mounting fixture 4. A first rotating shaft 11 is rotatably mounted on the mounting frame 2, and the first rotating shaft 11 is driveably connected to the mounting part 5. The rotating frame 3 is connected to the first rotating shaft 11, so that the driving end of the mounting part 5 can drive the first rotating shaft 11 to rotate the rotating frame 3. Optionally, a mounting housing 1 is fitted over the first rotating shaft 11, and the mounting housing 1 is detachably connected to the mounting frame 2 or integrally formed.

[0038] In one embodiment, the mounting part 5 includes a supporting housing 51 and a rotating shaft 52 rotatably disposed within the supporting housing 51. The two ends of the rotating shaft 52 are respectively connected to a rotating disk and a first rotating shaft 11, so that the rotating disk can drive the rotating shaft 52 to rotate, and the rotating shaft 52 can drive the first rotating shaft 11 to rotate. In one embodiment, the mounting housing 1 and the supporting housing 51 are detachably connected via a pin hole or similar structure. In one embodiment, a first transmission bevel gear 521 is provided on the rotating shaft 52, an intermediate bevel gear 511 is provided on the supporting housing 51, and a second transmission bevel gear 114 is provided on the first rotating shaft 11. The first transmission bevel gear 521, the intermediate bevel gear 511, and the second transmission bevel gear 114 are sequentially meshed and connected, so that while the rotating shaft 52 can drive the first rotating shaft 11 to rotate, the workpiece loading rack can also swing relative to the mounting part 5.

[0039] A second rotating shaft 31 is rotatably mounted on the rotating frame 3. The first rotating shaft 11 can drive the rotating frame 3 to rotate relative to the mounting frame 2, so that the second rotating shaft 31 rotates around the first rotating shaft 11 relative to the mounting frame 2. The second rotating shaft 31 is connected to the mounting frame 2. When the second rotating shaft 31 rotates around the first rotating shaft 11 relative to the mounting frame 2, the driving end of the mounting frame 2 can drive the second rotating shaft 31 to rotate. At the same time, the mounting fixture 4 is connected to the second rotating shaft 31, so that when the first rotating shaft 11 drives the rotating frame 3 to rotate, the second rotating shaft 31 can drive the mounting fixture 4 to rotate, thereby adjusting the spatial position of the workpiece on the mounting fixture 4. Optionally, multiple second rotating shafts 31 and multiple mounting fixtures 4 are provided, with multiple second rotating shafts 31 and multiple mounting fixtures 4 arranged in a one-to-one correspondence, and multiple second rotating shafts 31 and multiple mounting fixtures 4 arranged circumferentially around the outer periphery of the rotating frame 3. Optionally, the mounting bracket 2 is provided with an internal gear ring and / or an external gear ring on its outer periphery, and the second rotating shaft 31 is provided with a transmission gear 35. The transmission gear 35 is meshed with the internal gear ring on the side closer to the first rotating shaft 11 and / or meshed with the external gear ring on the side away from the first rotating shaft 11. Thus, the rotation of the second rotating shaft 31 is realized by driving the transmission gear 35 through the internal gear ring and / or driving the transmission gear 35 through the external gear ring.

[0040] The first rotating shaft 11 has a first shaft end 111, and the second rotating shaft 31 has a second shaft end 311. In the axial direction of the first rotating shaft 11, the first shaft end 111 is located on the side away from the mounting part 5 relative to the second shaft end 311. Thus, the second shaft end 311 is located above the first shaft end 111 on the workpiece loading frame as a whole, so that the mounting fixture 4 and the second rotating shaft 31 can be arranged close to the side of the mounting part 5, while the first rotating shaft 11 is arranged close to the side below the mounting fixture 4. This makes the overall structure of the first rotating shaft 11, mounting frame 2, second rotating shaft 31, rotating frame 3 and mounting fixture 4 more compact, thereby reducing the overall length of the workpiece loading frame in the axial direction and reducing the space occupied by the workpiece loading frame in the vacuum processing chamber. In this way, under the condition of limited chamber size and volume, the space utilization and processing space are improved, and the loading capacity of the vacuum processing equipment is increased, thereby meeting the terminal's requirements for the loading capacity of a single device. Understandably, the first shaft end 111 is located at the end of the first rotating shaft 11 away from the mounting portion 5, and the second shaft end 311 is located at the end of the second rotating shaft 31 away from the mounting portion 5.

[0041] like Figure 2 and Figure 3As shown, the mounting bracket 2 has a first groove 21 recessed on the side away from the mounting part 5. The first rotating shaft 11 is rotatably disposed at the bottom of the first groove 21. The first groove 21 has a first channel 211, through which part of the first rotating shaft 11 can pass and connect to the rotating frame 3. Thus, the mounting housing 1 and part of the first rotating shaft 11 are located in the first groove 21, while the other part of the first rotating shaft 11 is located between the mounting bracket 2 and the rotating frame 3. This causes the mounting housing 1 and the first rotating shaft 11 to be positioned close to the mounting fixture 4, thereby reducing the overall length of the workpiece loading bracket in the axial direction. Optionally, the mounting bracket 2 is provided with weight-reducing holes to reduce the weight of the mounting bracket 2, and the groove wall of the first groove 21 is connected with reinforcing ribs to enhance the structural strength of the mounting bracket 2.

[0042] Meanwhile, the rotating frame 3 has a second groove 32 recessed on the side away from the mounting frame 2. A portion of the first rotating shaft 11 is located within the second groove 32, so that the second groove 32 protrudes towards the side below the mounting fixture 4. This causes a portion of the rotating frame 3 and a portion of the first rotating shaft 11 to move closer to the lower surface of the mounting fixture 4, thereby reducing the overall length of the workpiece loading frame in the axial direction. Understandably, the rotating frame 3 may also be without the second groove 32, and the rotating frame 3 may be connected to the axial side of the first rotating shaft 11, as long as the driving end of the mounting part 5 can drive the first rotating shaft 11 to rotate the rotating frame 3.

[0043] like Figure 2 and Figure 4 As shown, the mounting bracket 2 is provided with a first bearing seat 12, and the first rotating shaft 11 is rotatably mounted on the first bearing seat 12. Part of the first bearing seat 12 passes through the first channel 211 and is located in the second groove 32. By setting the first bearing seat 12, the installation and rotation of the first rotating shaft 11 can be facilitated. Furthermore, part of the first bearing seat 12 is located in the first groove 21, and the other part of the first bearing seat 12 is located in the second groove 32. This makes reasonable use of space and makes the workpiece loading bracket more compact in the axial direction.

[0044] Specifically, the first rotating shaft 11 has an integrally formed first support portion 112 and a first shaft portion 113. The first shaft portion 113 is rotatably disposed within the first bearing seat 12, and the first support portion 112 can abut against the side end of the first bearing seat 12. The other end of the first shaft portion 113 away from the first support portion 112 is connected to the mounting portion 5. Thus, the first rotating shaft 11 is set as an integral structure, which can avoid the use of a detachable rotating shaft, facilitate the shortening of the length of the first rotating shaft 11, and thereby reduce the overall length of the workpiece loading frame in the axial direction. At the same time, by setting an integral first rotating shaft 11 and adding the first support portion 112, the force-bearing capacity of the first rotating shaft 11 can also be enhanced. Optionally, the length of the first bearing housing 12 in the axial direction can be reduced, and a first locking nut 13 is provided on the side of the first shaft portion 113 away from the first support portion 112. The first locking nut 13 and the first support portion 112 can be limited to both sides of the first bearing housing 12 to prevent the first rotating shaft 11 from moving along the axial direction on the first bearing housing 12. A first anti-loosening retaining ring 14 is provided between the first locking nut 13 and the first bearing housing 12 to reinforce the first locking nut 13 and prevent it from loosening. Further optionally, the first bearing housing 12 includes a first bearing bracket 121 and a first bearing 122 disposed on the first bearing bracket. Multiple first bearings are provided, and multiple first bearings 122 are sleeved on the first rotating shaft 11 along the axial direction. One of the multiple first bearings 122 is enlarged to abut against one of the first support portion 112, thereby cooperating with the first support portion 112 to enhance the force on the first rotating shaft 11.

[0045] like Figure 2 and Figure 5 As shown, a second bearing seat 33 is provided on the rotating frame 3, and a second rotating shaft 31 is rotatably mounted on the second bearing seat 33. The rotating frame 3 has a second channel 34, through which part of the second rotating shaft 31 can pass and be connected to the mounting fixture 4. Thus, by setting the second bearing seat 33, the installation and rotation of the second rotating shaft 31 can be facilitated. The second bearing seat 33 and part of the second rotating shaft 31 are located between the mounting frame 2 and the rotating frame 3, while the other part of the second rotating shaft 31 is located between the rotating frame 3 and the mounting fixture 4. This makes reasonable use of space and makes the workpiece loading frame more compact in the axial direction.

[0046] Specifically, the second rotating shaft 31 has an integrally formed second support portion 312 and a second shaft portion 313. The second shaft portion 313 is rotatably disposed within the second bearing seat 33. The second support portion 312 can abut against the side end of the second bearing seat 33, and the other end of the second shaft portion 313 away from the second support portion 312 is connected to the mounting frame 2. Thus, the second rotating shaft 31 is set as an integral structure, which can avoid the use of a detachable rotating shaft, facilitate the shortening of the length of the second rotating shaft 31, and thereby reduce the overall length of the workpiece loading frame in the axial direction. At the same time, by setting an integral second rotating shaft 31 and adding a second support portion 312, the force-bearing capacity of the second rotating shaft 31 can also be enhanced. Optionally, the length of the second bearing housing 33 in the axial direction can be reduced, and a second locking nut 36 is provided on the side of the second shaft portion 313 away from the second support portion 312. The second locking nut 36 can move closer to the first support portion 112 and press the transmission gear 35 against the second bearing housing 33 to prevent the second rotating shaft 31 from moving along the axial direction on the second bearing housing 33. A second anti-loosening retaining ring 37 is provided between the second locking nut 36 and the transmission gear 35. The second anti-loosening retaining ring 37 is used to reinforce the second locking nut 36 and prevent the second locking nut 36 from loosening.

[0047] like Figure 6 and Figure 7 As shown, the mounting fixture 4 includes a fixture frame 41 and a fixture base plate 42. One side of the fixture frame 41 is connected to the second rotating shaft 31, and an elastic component 43 is provided on the other side of the fixture frame 41 opposite to the second rotating shaft 31. The fixture frame 41 has a slot 411, and the fixture base plate 42 has a protrusion 421. The elastic component 43 can elastically abut against the fixture base plate 42, so that the protrusion 421 is engaged in the slot 411. Therefore, when the fixture base plate 42 is disassembled, the fixture base plate 42 can... The fixture base plate 42 can be moved towards the side closer to the fixture frame 41 by overcoming the elastic pressure of the elastic component 43, so that the locking protrusion 421 is disengaged from the locking groove 411, thereby realizing the disassembly of the fixture base plate 42 and the fixture frame 41, which facilitates the installation of the workpiece after the fixture base plate 42 is disassembled. When the fixture base plate 42 is being installed, the fixture base plate 42 can be subjected to the elastic pressure of the elastic component 43, so that the locking protrusion 421 is engaged in the locking groove 411, thereby completing the installation of the fixture base plate 42 and the fixture frame 41.

[0048] Specifically, the elastic component 43 includes a guide housing 431, an elastic element 432, and a top pin 433. The guide housing 431 is disposed on the fixture frame 41. One end of the top pin 433 is movably disposed inside the guide housing 431, and the other end of the top pin 433 can abut against the fixture substrate 42. The elastic element 432 is disposed inside the guide housing 431, and both ends of the elastic element 432 abut against the fixture frame 41 and the top pin 433, respectively. Thus, under the elastic abutment of the elastic element 432, the top pin 433 can always move towards one side of the fixture substrate 42 to press the locking protrusion 421 of the fixture substrate 42 into the locking groove 411 of the fixture frame 41. The elastic component 43 has a simple structure, low cost, and can meet the pressing requirements of the fixture substrate 42.

[0049] This embodiment also provides a vacuum processing device, including the workpiece loading rack as described above. The vacuum processing device further includes a mounting part 5, a rotating disk, and a vacuum processing chamber. The rotating disk is disposed in the vacuum processing chamber. The mounting part 5 is driven to the rotating disk, and the mounting frame 2 is driven to the mounting part 5. Thus, the mounting part 5 can drive the workpiece loading rack to rotate around the rotating disk. By using the workpiece loading rack as described above, the vacuum processing device can reduce the space occupied by the workpiece loading rack in the vacuum processing chamber. In this way, under the condition of limited chamber size and volume, the space utilization rate and processing space are improved, and the loading capacity of the vacuum processing device is increased, thereby meeting the terminal's requirements for the loading capacity of a single device.

[0050] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A workpiece loading rack, capable of being installed in a mounting section (5), characterized in that, The workpiece loading rack includes: Mounting bracket (2), on which a first rotating shaft (11) is rotatably provided, the first rotating shaft (11) is connected to the mounting part (5) in a driving connection, and the first rotating shaft (11) has a first shaft end (111); A rotating frame (3) is connected to a first rotating shaft (11); a second rotating shaft (31) is rotatably mounted on the rotating frame (3), the second rotating shaft (31) having a second shaft end (311); the first rotating shaft (11) can drive the rotating frame (3) to rotate relative to the mounting frame (2), so that the second rotating shaft (31) rotates around the first rotating shaft (11) relative to the mounting frame (2); the second rotating shaft (31) is connected to the mounting frame (2) in a transmission manner, and when the second rotating shaft (31) rotates around the first rotating shaft (11) relative to the mounting frame (2), the driving end of the mounting frame (2) can drive the second rotating shaft (31) to rotate on its own. Mounting fixture (4) is connected to the second rotating shaft (31); In the axial direction of the first rotating shaft (11), the first shaft end (111) is located on the side away from the mounting part (5) relative to the second shaft end (311).

2. The workpiece loading rack according to claim 1, characterized in that, The mounting bracket (2) has a first groove (21) recessed on the side away from the mounting part (5), and the first rotating shaft (11) is rotatably disposed at the bottom of the first groove (21); the first groove (21) has a first channel (211), and part of the first rotating shaft (11) can pass through the first channel (211) and be connected to the rotating bracket (3).

3. The workpiece loading rack according to claim 2, characterized in that, The rotating frame (3) is recessed on the side away from the mounting frame (2) to form a second groove (32), and part of the first rotating shaft (11) is located in the second groove (32).

4. The workpiece loading rack according to claim 3, characterized in that, The mounting bracket (2) is provided with a first bearing seat (12), the first rotating shaft (11) is rotatably disposed on the first bearing seat (12), and part of the first bearing seat (12) passes through the first channel (211) and is located in the second groove (32).

5. The workpiece loading rack according to claim 4, characterized in that, The first rotating shaft (11) has a first support portion (112) and a first shaft portion (113). The first shaft portion (113) is rotatably disposed in the first bearing seat (12). The first support portion (112) can abut against the side end of the first bearing seat (12), and the other end of the first shaft portion (113) away from the first support portion (112) is drively connected to the mounting portion (5).

6. The workpiece loading rack according to claim 1, characterized in that, The rotating frame (3) is provided with a second bearing seat (33), and the second rotating shaft (31) is rotatably disposed on the second bearing seat (33); the rotating frame (3) is provided with a second channel (34), and part of the second rotating shaft (31) can pass through the second channel (34) and be connected to the mounting fixture (4).

7. The workpiece loading rack according to claim 6, characterized in that, The second rotating shaft (31) has a second support portion (312) and a second shaft portion (313). The second shaft portion (313) is rotatably disposed in the second bearing seat (33). The second support portion (312) can abut against the side end of the second bearing seat (33), and the other end of the second shaft portion (313) away from the second support portion (312) is drively connected to the mounting bracket (2).

8. The workpiece loading rack according to claim 1, characterized in that, The mounting bracket (2) is provided with an internal gear ring and / or an external gear ring on its outer periphery, and the second rotating shaft (31) is provided with a transmission gear (35). The transmission gear (35) is meshed with the internal gear ring on the side close to the first rotating shaft (11) and / or the transmission gear (35) is meshed with the external gear ring on the side away from the first rotating shaft (11).

9. The workpiece loading rack according to any one of claims 1 to 8, characterized in that, The mounting fixture (4) includes a fixture frame (41) and a fixture base plate (42). One side of the fixture frame (41) is connected to the second rotating shaft (31), and an elastic component (43) is provided on the other side of the fixture frame (41) away from the second rotating shaft (31). The fixture frame (41) has a slot (411), and the fixture base plate (42) has a protrusion (421). The elastic component (43) can elastically abut against the fixture base plate (42) so that the protrusion (421) is engaged in the slot (411).

10. The workpiece loading rack according to claim 9, characterized in that, The elastic component (43) includes a guide housing (431), an elastic element (432), and a top pin (433). The guide housing (431) is disposed on the fixture frame (41). One end of the top pin (433) is movably disposed within the guide housing (431), and the other end of the top pin (433) can abut against the fixture base plate (42). The elastic element (432) is disposed within the guide housing (431), and both ends of the elastic element (432) abut against the fixture frame (41) and the top pin (433), respectively.

11. A vacuum processing device, characterized in that, The vacuum processing equipment includes the workpiece loading rack as described in any one of claims 1 to 10, and further includes the mounting part (5), a rotating disk and a vacuum processing chamber, wherein the rotating disk is disposed in the vacuum processing chamber, the mounting part (5) is tractively connected to the rotating disk, and the mounting frame (2) is tractively connected to the mounting part (5).

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