Workpiece loading frame and vacuum treatment equipment
By designing the workpiece loading rack and utilizing the transmission connection between the first and second rotating shafts, the spatial position of the workpiece can be adjusted, solving the problem of insufficient loading capacity in vacuum processing equipment and improving space utilization and loading capacity.
CN121852873APending Publication Date: 2026-04-14OPTORUN SHANGHAI CO LTD
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Patent Information
- Application Number
- CN202411431965.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-14
- Publication Date
- 2026-04-14
AI Technical Summary
Technical Problem
Existing vacuum processing equipment, with its limited chamber size and dimensions, has a small loading capacity, which cannot meet the terminal requirements for the loading capacity of a single unit.
Method used
The workpiece loading rack design includes a mounting frame, a rotating frame, and a mounting fixture. The workpiece's spatial position can be adjusted through the transmission connection of the first and second rotating shafts. The overall structure is compact, reducing space occupation and improving space utilization.
Benefits of technology
Under the constraints of limited chamber size and dimensions, the loading capacity of vacuum processing equipment has been increased to meet the terminal's requirements for the loading capacity of a single unit.
✦ Generated by Eureka AI based on patent content.
Abstract
The invention relates to the technical field of vacuum treatment, and particularly discloses a workpiece loading frame and vacuum treatment equipment. The workpiece loading frame comprises a mounting frame, a rotating frame and a mounting jig; a first rotating shaft is rotationally arranged on the mounting frame, is in transmission connection with the mounting part and is provided with a first shaft end part; the rotating frame is connected to the first rotating shaft; a second rotating shaft is rotationally arranged on the rotating frame and is provided with a second shaft end part; the mounting jig is connected to the second rotating shaft; and in the axis direction of the first rotating shaft, the first shaft end part is arranged on the side far away from the mounting part relative to the second shaft end part. The length of the workpiece loading frame in the axis direction is reduced, the space occupied by the whole workpiece loading frame in the vacuum treatment cavity is reduced, and therefore under the condition of the cavity with the limited specification and size, the space utilization rate and the treatment space are improved, the loading capacity of vacuum treatment equipment is improved, and the working efficiency is improved. Therefore, the requirement of the terminal on the loading capacity of single equipment is met.
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