Bidirectional piezoelectric MEMS valve and application

Abstract

The invention discloses a bidirectional piezoelectric MEMS valve and application, and belongs to the technical field of fluid valves, the bidirectional piezoelectric MEMS valve comprises a valve body, an auxiliary structure and at least one piezoelectric actuating structural member; the valve body serves as an outer frame structure to ensure the overall stability; the piezoelectric actuating structural member can be flexibly clamped on the valve body or the auxiliary structure, and a movable part is formed in a middle or periphery clamping mode. The component comprises a piezoelectric material layer and generates displacement by applying voltage so as to control a valve to be opened and closed. The gas / liquid flow channel is composed of a gap between the piezoelectric actuating structural member and the valve body or the auxiliary structure, and bidirectional flow can be achieved; by adjusting the polarity and magnitude of the voltage, the displacement of the structural part can be controlled, forward or reverse flowing of fluid and adjustment of the size of a flow channel opening can be achieved, the average flow resistance of the flow channel during forward and reverse flowing is close through the design, the accuracy and stability of fluid control are ensured, independent two-way control is achieved, an additional valve body assembly does not need to be added, and the cost is reduced. And the overall design is simplified.

Description

Technical Field

[0001] This invention belongs to the field of fluid valve technology, and particularly relates to a bidirectional piezoelectric MEMS valve and its application. Background Technology

[0002] With the development of microelectromechanical systems (MEMS) technology, miniaturized, high-efficiency, and low-power devices have been widely used in many fields, especially in fluid control, gas regulation, and precision drug delivery. Valves are key components, and as the core component of microfluidic systems, the performance of microvalves directly affects the reliability and control accuracy of the system. Currently, most microvalves employ electromagnetic, thermal bubble, or electrostatic actuation.

[0003] However, these technologies have the following drawbacks: Electromagnetic actuation, while offering high driving force, requires complex coils and magnetic materials, resulting in large device size, high power consumption, and unsuitability for portable devices. Thermal bubble actuation, which generates bubbles by heating liquid to drive valves, suffers from slow response, low control precision, and the potential risk of thermal damage. Electrostatic actuation is suitable for miniaturization, but its driving force is relatively small, making it difficult to overcome high fluid pressures.

[0004] In contrast, piezoelectric materials can achieve efficient mechanical motion control by inducing mechanical deformation through the application of an electric field. This property has led to their widespread application in valves. Commonly used piezoelectric materials in piezoelectric MEMS valves include PZT (lead zirconate titanate), AlN (aluminum nitride), and novel polymer-based piezoelectric materials. Compared to traditional electromagnetic drives, piezoelectric drives do not require complex magnetic circuit designs and consume less energy.

[0005] Piezoelectric actuation technology has become a research hotspot due to its advantages of fast response, low power consumption, and high driving force. However, unidirectional valves typically achieve fluid flow control through a single actuator or passive component, while bidirectional valves need to achieve bidirectional closure or bidirectional opening in more complex scenarios.

[0006] With the development of microelectromechanical systems (MEMS) technology, the problems we want to solve are how to design a compact and reliable bidirectional valve, how to ensure that the valve still has high sealing performance and long-term stability under miniaturization conditions, and how to improve drive efficiency without significantly increasing power consumption.

[0007] The existing solutions are as follows:

[0008] I. Traditional valve design: Mechanical valves used to control fluid flow or sound waves usually rely on complex mechanical structures and components, such as springs, pistons and other mechanical parts for operation.

[0009] II. Passive and static seals: These are fixed seals used to block or allow fluid flow, such as closed cantilever passive valves, ball valves, umbrella valves, etc. They achieve unidirectional fluid flow control through the interaction between the special arrangement of the valve body and the fluid flow direction.

[0010] Third, valve structures based on piezoelectric films represent a high-precision technology, and patents and designs for this product are relatively scarce in China. These valves are active control valves, while current solutions in the field of microfluidic control mostly use passive valves.

[0011] The existing solution has the following problems:

[0012] (i) There is no such structural design for a bidirectional normally closed valve that is compact and reliable in the market.

[0013] (ii) How to ensure that the two-way valve still has high sealing performance and long-term stability under miniaturization conditions.

[0014] (III) How to improve drive efficiency without significantly increasing power consumption.

[0015] (iv) Size and weight: The mechanical components of traditional valve designs are generally large, which increases the overall size and weight of the equipment. They are not suitable for the miniaturization requirements of modern portable devices and cannot be used in small electronic mobile devices such as headphones and mobile phones.

[0016] (v) Slow response speed: Passive valves have high opening pressure and require response time, which makes it difficult for the valve to respond quickly in application. In addition, the vibration of the actuator causes the volume of the cavity to change, resulting in a phase lag between the intake or exhaust gas and the valve, which affects the performance of the equipment.

[0017] To address the aforementioned issues, this invention proposes a bidirectional piezoelectric MEMS valve that, through innovative structural design and material selection, meets the demands for efficient, low-power, and highly reliable fluid control in microfluidic systems. Summary of the Invention

[0018] This invention provides a bidirectional piezoelectric MEMS valve and its application to solve the problems in the prior art.

[0019] The embodiments of the present invention adopt the following technical solution: a bidirectional piezoelectric MEMS valve, comprising a valve body, an auxiliary structure, and at least one piezoelectric actuation structure;

[0020] The valve body is the outer frame structure of the valve, ensuring the stability of the valve structure;

[0021] The piezoelectric actuation structure can be fixed to the valve body or to the auxiliary structure. After the piezoelectric actuation structure is fixed, the unfixed part forms a movable piezoelectric actuation structure.

[0022] The piezoelectric actuation structure can be fixed to the auxiliary structure in the form of a central fixed support, or it can be fixed to the valve body or the auxiliary structure in the form of a peripheral fixed support; the piezoelectric actuation structure includes at least a piezoelectric material layer, and applying voltage causes the unfixed part to displace, thereby controlling the opening and closing of the valve;

[0023] The gas / liquid flow channel of the valve is formed by the gap between the piezoelectric actuation structure and the non-piezoelectric actuation structural components (valve body or auxiliary structure). In this case, the valve body or auxiliary structure is designed with a recessed structure to form the gap. When there are multiple piezoelectric actuation structural components, the flow channel of the valve can also be formed by the gaps formed between the multiple piezoelectric actuation structural components.

[0024] The valve's flow channel can be opened in both directions. That is, by applying voltages of different polarities and magnitudes to the piezoelectric actuator, the displacement direction and magnitude of the piezoelectric actuator can be controlled, thereby enabling the valve to open in the forward or reverse direction for the fluid, as well as controlling the size of the flow channel opening. When the flow is flowing in the forward and reverse directions, the average flow resistance of the flow channel is relatively close.

[0025] Furthermore, the piezoelectric actuation structure can be a combination of two or more piezoelectric materials to achieve bidirectional pushing and pulling actions, thereby changing the opening direction of the valve cavity; each piezoelectric actuation structure is one of the following shapes: conical, trapezoidal, rectangular, and fan-shaped.

[0026] Furthermore, the piezoelectric actuation structure can be a cantilever beam or a bridge, or other structures that provide rotational symmetry and mirror left-right / up-down symmetry. The cantilever beam is fixed on one side of the perimeter, and the bridge is fixed on both sides of the perimeter.

[0027] Furthermore, when the fluid controlled by the valve flows in the first direction, the piezoelectric actuation component applies voltage to generate displacement in the first direction, and the valve opens in the first direction of the bidirectional flow channel. At this time, the valve controls the unidirectional opening and closing in the first direction. When the fluid controlled by the valve flows in the opposite direction of the first direction, the piezoelectric actuation component generates displacement in this direction from a flat state, and the valve opens in the other direction of the bidirectional flow channel. Thus, the valve can achieve bidirectional opening and closing by applying voltages of different polarities to the piezoelectric actuation component.

[0028] Furthermore, the gap can be formed by multiple piezoelectric actuating structures fixed on the same side, with the multiple piezoelectric actuating structures arranged in parallel and bent or expanded in the same direction to form a channel opening for fluid flow. After applying voltage, one or more piezoelectric sheets are arranged in parallel and move in the same direction, causing the channel to open and close.

[0029] Furthermore, the gap can be formed by the interaction between the piezoelectric actuation structure and the inner wall of the frame. This means that the piezoelectric sheet is attached to the inner wall of the valve body frame. When a voltage is applied, the piezoelectric sheet bends or stretches, the gap opens to form an opening, and the inner wall of the frame provides support to ensure that the deformation direction of the piezoelectric sheet is controlled, thus forming an open and closed state.

[0030] Furthermore, the gap can be formed by a combination of the two types of gaps. The piezoelectric actuation structure can be bent toward the frame or the opening can be formed by the reverse deformation of adjacent piezoelectric sheets. The inner wall of the frame provides boundary conditions for the piezoelectric sheets, thereby improving the rigidity and stability of the structure.

[0031] Furthermore, the plurality of piezoelectric actuation structures are fixed on the same side or fixed on opposite sides.

[0032] Furthermore, the valve body ensures that the fluid can flow in a predetermined direction when passing through the valve, and regulates the flow rate or pressure by controlling the position of the piezoelectric actuation structure and support fasteners, providing a passage for the fluid to pass through the valve, and maintaining internal sealing to prevent fluid leakage; the valve body is the external support frame of the valve, which includes inlet and outlet flow channels and fluid channels, and can control the bidirectional fluid flow channel to limit the opening of the valve.

[0033] Furthermore, when the auxiliary structure serves as a fixed support component for the piezoelectric actuation structure, there can be multiple such components. Each fixed support component supports and fixes each piezoelectric actuation structure or forms a flow channel by combining with a groove structure.

[0034] Furthermore, the piezoelectric actuation structure forms gaps in the same direction using a frame or sealed design. The gaps can be formed simply by the movement characteristics of the piezoelectric sheet itself, and the driving consistency of the deformation in the same direction can be guaranteed, with a very fast response speed.

[0035] Furthermore, the gap formed by the interaction between the piezoelectric actuation structure and the inner wall of the frame is a combination of the inner wall of the frame and the piezoelectric actuation structure, which effectively reduces the risk of leakage, especially performing excellently in the closed state. The mechanical support provided by the frame improves the overall pressure resistance of the valve, and the inner wall of the frame serves as a fixed point, facilitating the design of symmetrical bidirectional flow control.

[0036] Furthermore, the gap formed by the mixture is formed by the piezoelectric actuation structure's piezoelectric sheet bending towards the frame direction, or by the reverse deformation of adjacent piezoelectric sheets. The inner wall of the frame provides boundary conditions for the piezoelectric actuation structure, while simultaneously improving the structure's rigidity and stability.

[0037] Furthermore, the device includes two bidirectional fluid channels, which can control the forward and reverse fluid flow respectively. The two channels can be geometrically symmetrically distributed at the center of the valve to ensure pressure balance during fluid transport. Alternatively, it can be an asymmetrical design, where the displacement direction and magnitude of the piezoelectric actuator are controlled by applying voltages of different polarities and magnitudes to the piezoelectric actuator to control the forward or reverse flow of the fluid. The average flow resistance of the channel is relatively close when the flow is forward or reverse.

[0038] Furthermore, the two fluid channels are each controlled by a corresponding piezoelectric actuation structure, which can independently adjust the flow rate and speed of the forward and reverse flows, thereby achieving precise bidirectional flow control of fluid or sound waves.

[0039] Furthermore, the fluid channel is formed into a microchannel using piezoelectric MEMS technology.

[0040] Furthermore, the size of the fluid channel can be adjusted by moving the piezoelectric actuated structural components, forming the open, closed, or partially open state of the forward or reverse fluid channel. The width range of the gap can be precisely controlled, ranging from one micrometer to tens of micrometers, ensuring the closing characteristics.

[0041] Furthermore, the cross-sectional shape of the fluid channel is trapezoidal, rectangular, or streamlined with a groove to reduce fluid turbulence and energy loss, and improve the efficiency of fluid flow.

[0042] An application of a bidirectional piezoelectric MEMS valve is available in smart headphones, smart glasses, smartwatches, smart bracelets, head-mounted devices, wearable devices, smartphones, game controllers, gaming headsets, gaming steering wheels, gaming pedals, mice, keyboards, touchscreens, electrical control panels, touch devices, screen sound devices, in-vehicle haptic feedback devices, smart cockpits, gaming chairs, massage chairs, massagers, haptic feedback vests, haptic feedback gloves, haptic feedback belts, haptic feedback leg devices, hearing aids, sleep aids, or haptic feedback network interconnection devices.

[0043] The above-described at least one technical solution adopted in the embodiments of the present invention can achieve the following beneficial effects:

[0044] 1. It can achieve independent bidirectional control, controlling the forward and reverse fluid flow separately, without the need to add additional valve body components or other components, which greatly simplifies the overall design.

[0045] 2. By controlling the movement of piezoelectric elements to adjust the gap width of the fluid flow channel, precise control of flow rate and pressure can be achieved.

[0046] 3. Suitable for miniaturized electronic devices, the design of microelectromechanical systems (MEMS) is suitable for the miniaturization needs of modern portable devices.

[0047] 4. Piezoelectric actuators have extremely fast response times, typically reaching microseconds or even milliseconds, allowing for rapid changes in fluid flow direction.

[0048] 5. Extremely low power consumption: Piezoelectric actuation components only consume energy when they are in motion, and do not consume energy when they are not in motion. They do not require long-term voltage maintenance and are suitable for some applications that use battery power.

[0049] 6. High reliability: The reduced number of mechanical parts and simpler assembly of this active valve lowers the risk of failure. Furthermore, its non-contact opening and closing action enhances the long-term reliability of the equipment. These characteristics give it a significant advantage in portable electronic devices.

[0050] 7. The piezoelectric actuation structure directly drives the valve structure, which greatly reduces energy loss and enables efficient force transmission. Attached Figure Description

[0051] The accompanying drawings, which are included to provide a further understanding of the invention and form part of this invention, illustrate exemplary embodiments of the invention and are used to explain the invention, but do not constitute an undue limitation of the invention. In the drawings:

[0052] Figure 1 This is a schematic diagram of Embodiment 1 of the present invention;

[0053] Figure 2 A schematic diagram of the cross-section obtained along section line AA for a valve in the non-actuated / closed state;

[0054] Figure 3 This is a schematic diagram of a cross section along section line AA when the drive element is in the downward-opening state.

[0055] Figure 4 This is a schematic diagram of a cross section along section line AA when the driving element is in the upward-opening state.

[0056] Figure 5 This is a schematic diagram of Embodiment 2 of the present invention;

[0057] Figure 6 A cross-sectional view of the valve in the non-actuated / closed state along the BB section line;

[0058] Figure 7 This is a schematic diagram of a cross section along section line BB when the drive element is in the downward-opening state.

[0059] Figure 8 This is a schematic cross-sectional view along section line BB when the drive element is in the upward-opening state.

[0060] Figure 9 This is a schematic diagram of Embodiment 3 of the present invention;

[0061] Figure 10 The cross-section of the valve in the non-actuated / closed state along the CC section line;

[0062] Figure 11 A schematic diagram of the cross section obtained along section line CC when the drive element is in the downward open state;

[0063] Figure 12 This is a schematic cross-sectional view along section line CC when the driving element is in the upward-opening state.

[0064] Figure 13 This is a schematic diagram of Embodiment 4 of the present invention;

[0065] Figure 14 The cross-section of the valve in the non-actuated / closed state along the DD profile line;

[0066] Figure 15 This is a schematic diagram of a cross section obtained along section line DD when the drive element is in the downward open state.

[0067] Figure 16 This is a schematic diagram of the cross section obtained along section line DD when the drive element is in the upward open state.

[0068] Figure 17 This is a schematic diagram of Embodiment 5 of the present invention;

[0069] Figure 18 A cross-sectional view of the valve in the non-actuated / closed state along the EE section line;

[0070] Figure 19 A schematic diagram of the cross section obtained along section line EE when the drive element is in the downward open state;

[0071] Figure 20 A schematic diagram of the cross section obtained along section line EE when the drive element is in the upward open state;

[0072] Figure 21 This is a schematic diagram of Embodiment 6 of the present invention;

[0073] Figure 22 A cross-sectional view of the valve in the non-actuated / closed state along the FF section line;

[0074] Figure 23This is a schematic diagram of a cross section obtained along section line FF when the drive element is in the downward open state.

[0075] Figure 24 This is a schematic diagram of the cross section obtained along section line FF when the drive element is in the upward open state.

[0076] Figure 25 This is a schematic diagram of Embodiment 7 of the present invention;

[0077] Figure 26 A cross-sectional view of the valve in the non-actuated / closed state along the GG section line;

[0078] Figure 27 A schematic diagram of the cross section obtained along section line GG when the driving element is in the downward open state;

[0079] Figure 28 A schematic diagram of the cross section obtained along section line GG when the driving element is in the upward open state;

[0080] Figure 29 This is a schematic diagram of the cross-section obtained along section line GG when the left side of the driving element is in the downward opening state and the right side is in the upward opening state.

[0081] Figure 30 This is a schematic diagram of the cross-section obtained along section line GG when the left side of the driving element is in the downward opening state and the right side is in the upward opening state.

[0082] Figure 31 This is a schematic diagram of Embodiment 8 of the present invention;

[0083] Figure 32 A cross-sectional view of the valve in the non-actuated / closed state along the HH profile line;

[0084] Figure 33 A schematic diagram of the cross section obtained along section line HH when the driving element is in the downward open state;

[0085] Figure 34 A schematic diagram of the cross section obtained along section line HH when the driving element is in the upward open state;

[0086] Figure 35 This is a schematic diagram of the cross section obtained along section line GG when the left side of the driving element is in the upward opening state and the right side is in the downward opening state.

[0087] Figure 36 This is a schematic diagram of the cross-section obtained along section line GG when the left side of the driving element is in the upward opening state and the right side is in the downward opening state.

[0088] Figure label:

[0089] Outer frame 1, gap 2, central support 3, peripheral support 4, opening 5. Detailed Implementation

[0090] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0091] The following detailed description, in conjunction with the accompanying drawings, illustrates the technical solution of a bidirectional piezoelectric MEMS valve and its application provided by various embodiments of the present invention.

[0092] Reference Figures 1 to 36 As shown, an embodiment of the present invention provides a bidirectional piezoelectric MEMS valve, including a valve body, an auxiliary structure, and at least one piezoelectric actuation structure.

[0093] The valve body is the outer frame 1 structure of the valve, which ensures the stability of the valve structure;

[0094] The piezoelectric actuation structure can be fixed to the valve body or to the auxiliary structure. After the piezoelectric actuation structure is fixed, the unfixed part forms a movable piezoelectric actuation structure.

[0095] The piezoelectric actuation structure can be fixed to the auxiliary structure in the form of an intermediate fixed support 3, or it can be fixed to the valve body or auxiliary structure in the form of a peripheral fixed support 4. The piezoelectric actuation structure includes at least a piezoelectric material layer. Applying voltage causes displacement in its unfixed portion to control the opening and closing of the valve.

[0096] The gas / liquid flow channel of the valve is formed by the gap between the piezoelectric actuation structure and the non-piezoelectric actuation structural components (valve body or auxiliary structure). In this case, the valve body or auxiliary structure is designed with a recessed structure to form the gap. When there are multiple piezoelectric actuation structural components, the flow channel of the valve can also be formed by the gaps formed between the multiple piezoelectric actuation structural components.

[0097] The valve's flow channel can be opened in both directions. That is, by applying voltages of different polarities and magnitudes to the piezoelectric actuator, the displacement direction and magnitude of the piezoelectric actuator can be controlled, thereby enabling the valve to open in the forward or reverse direction for the fluid, as well as controlling the size of the flow channel opening 5. When the flow is flowing in the forward and reverse directions, the average flow resistance of the flow channel is relatively close.

[0098] Specifically, the piezoelectric actuation structure can be a combination of two or more piezoelectric materials to achieve bidirectional pushing and pulling action, thereby changing the opening direction of the valve cavity; each piezoelectric actuation structure is one of the following shapes: conical, trapezoidal, rectangular, and fan-shaped.

[0099] Specifically, the piezoelectric actuation structure uses PZT or AlN thin film, which can be a cantilever beam or bridge type, or other structures that provide rotational symmetry and mirror left-right / up-down symmetry. The cantilever beam is fixed on one side of the perimeter, and the bridge type is fixed on both sides of the perimeter.

[0100] Specifically, when the fluid controlled by the valve flows in the first direction, the piezoelectric actuation component applies voltage to generate displacement in the first direction, and the valve opens in the first direction of the bidirectional flow channel. At this time, the valve controls the unidirectional opening and closing in the first direction. When the fluid controlled by the valve flows in the opposite direction of the first direction, the piezoelectric actuation component generates displacement in this direction from a flat state, and the valve opens in the other direction of the bidirectional flow channel. Thus, the valve can achieve bidirectional opening and closing by applying voltages of different polarities to the piezoelectric actuation component.

[0101] Specifically, the gap 2 can be formed by multiple piezoelectric actuation structures fixed on the same side, with the multiple piezoelectric actuation structures arranged in parallel and bent or expanded in the same direction to form a channel opening 5 for fluid flow. After applying voltage, one or more piezoelectric sheets are arranged in parallel and move in the same direction, causing the channel to open and close.

[0102] Specifically, the gap 2 can be formed by the interaction between the piezoelectric actuation structure and the inner wall of the frame. This means that the piezoelectric sheet is attached to the inner wall of the valve body frame. When a voltage is applied, the piezoelectric sheet bends or stretches, and the gap 2 opens to form the opening 5. The inner wall of the frame provides support to ensure that the deformation direction of the piezoelectric sheet is controlled, thus forming an open and closed state.

[0103] Specifically, the gap 2 can be formed by a combination of the two types of gaps mentioned above. Its piezoelectric actuation structure can be bent towards the frame direction, or the opening 5 can be formed by the reverse deformation of adjacent piezoelectric sheets. The inner wall of the frame provides boundary conditions for the piezoelectric sheets, while improving the rigidity and stability of the structure.

[0104] Specifically, the plurality of piezoelectric actuation structures are fixed on the same side or fixed on opposite sides.

[0105] Specifically, the valve body ensures that fluid can flow in a predetermined direction when passing through the valve, and regulates the flow rate or pressure by controlling the position of the piezoelectric actuation structure and support components, providing a passage for fluid to pass through the valve, and maintaining internal sealing to prevent fluid leakage; the valve body is the external support frame of the valve, which includes inlet and outlet flow channels and fluid channels, and can control the bidirectional fluid flow channel to limit the opening of the valve.

[0106] Specifically, when the auxiliary structure serves as a fixed support component for a piezoelectric actuation structure, there can be multiple such components. Each fixed support component supports and fixes each piezoelectric actuation structure or forms a flow channel by combining with a groove structure.

[0107] Specifically, the piezoelectric actuation structure forms the gap 2 in the same direction by adopting a frame or sealed design. The gap 2 can be formed simply by the movement characteristics of its own piezoelectric sheet, and the driving consistency of the deformation in the same direction can be guaranteed, and the response speed is very fast.

[0108] Specifically, the gap 2 formed by the interaction between the piezoelectric actuation structure and the inner wall of the frame is a combination of the inner wall of the frame and the piezoelectric actuation structure, which effectively reduces the risk of leakage, especially performing well in the closed state. The mechanical support provided by the frame improves the overall pressure resistance of the valve, and the inner wall of the frame serves as a fixed point, which facilitates the design of symmetrical bidirectional flow control.

[0109] Specifically, the gap formed by the mixture is formed by the piezoelectric actuation structure's piezoelectric sheet bending towards the frame direction, or by the reverse deformation of adjacent piezoelectric sheets. The inner wall of the frame provides boundary conditions for the piezoelectric actuation structure, while improving the structure's rigidity and stability.

[0110] Specifically, the device includes two bidirectional fluid channels, which can control the forward and reverse fluid flow respectively. These two channels can be geometrically symmetrically distributed at the center of the valve to ensure pressure balance during fluid transport. Alternatively, an asymmetrical design can be used, where the displacement direction and magnitude of the piezoelectric actuator are controlled by applying voltages of different polarities and magnitudes to control the forward or reverse fluid flow. The average flow resistance of the channel is relatively similar during both forward and reverse flow. The fluid can be either a gas or a liquid.

[0111] Specifically, the two fluid channels are controlled by corresponding piezoelectric actuation structures, which can independently adjust the flow rate and speed of forward and reverse flow, thereby achieving precise bidirectional flow control of fluid or sound waves.

[0112] Specifically, the fluid channel is formed into a microchannel using piezoelectric MEMS technology; preferably, the etching process in the piezoelectric MEMS process can effectively reduce flow resistance.

[0113] Specifically, the size of the fluid channel is adjusted by the movement of the piezoelectric actuation structure, forming the opening, closing or partial opening state of the forward or reverse fluid channel. The width range of the gap 2 can be precisely controlled, ranging from one micrometer to tens of micrometers, to ensure the closing characteristics.

[0114] Specifically, the cross-sectional shape of the fluid channel is trapezoidal, rectangular, or streamlined with a groove to reduce fluid turbulence and energy loss, and improve the efficiency of fluid flow.

[0115] An application of a bidirectional piezoelectric MEMS valve is available in smart headphones, smart glasses, smartwatches, smart bracelets, head-mounted devices, wearable devices, smartphones, game controllers, gaming headsets, gaming steering wheels, gaming pedals, mice, keyboards, touchscreens, electrical control panels, touch devices, screen sound devices, in-vehicle haptic feedback devices, smart cockpits, gaming chairs, massage chairs, massagers, haptic feedback vests, haptic feedback gloves, haptic feedback belts, haptic feedback leg devices, hearing aids, sleep aids, or haptic feedback network interconnection devices.

[0116] Normally closed bidirectional type:

[0117] Example 1:

[0118] The examples above illustrate normally closed or normally open bidirectional flow-type active valves, allowing for more flexible valve regulation in response to fluid or acoustic pressure. This invention patent enables the valve to open in both directions. Figure 1 and Figure 2 The diagram shows a bottom view of the valve in its non-actuated / closed state and a cross-sectional view along section line AA. In this state, the valve is considered substantially flat, and the gaps 2 between each of the multiple actuating elements and the valve, as well as the gaps 2 between each actuating element, are very small, approximately on the micrometer (µm) level. Therefore, the valve is considered closed. The valve body has arc-shaped recesses on both the upper and lower sides of the gaps between the valve body frame 1 and the actuating elements. These recesses do not affect the closed state of the valve when it is stationary. In other aspects, each actuating element consists of a diaphragm layer and a piezoelectric material layer, not shown in the diagram. The diaphragm covers the supporting element of the intermediate fixed support 3 and forms free ends through the various gaps. Then, the respective piezoelectric material layers cover the diaphragm to drive the free ends of the diaphragm to produce vertical displacement.

[0119] Further references can be made. Figure 3 and Figure 4 Describe in more detail the vibration patterns of the drive element when the valve is in the actuated / open state. Figure 3 This is a schematic cross-sectional view along section line AA when the drive element is in the downward-opening state. Figure 3 A voltage is applied to the drive element, causing it to move downwards. This, combined with the concave arc structure of the valve body, causes the valve to change from a closed state to an open state in the downward direction, allowing fluid to flow from top to bottom. Figure 4 This is a schematic cross-sectional view along section line AA when the drive element is in the upward-opening state. Figure 4By applying voltage to the drive element, it is displaced upwards. Combined with the concave arc structure on the upper part of the valve body, the valve changes from a closed state to an open state, allowing fluid to flow from bottom to top. This bidirectional valve structure can open upwards or downwards according to the direction of fluid pressure, thus avoiding the obstruction caused by the pressure direction being opposite to the vibration direction of the drive element when voltage is applied to open the valve, providing greater flexibility.

[0120] Example 2:

[0121] The examples above illustrate normally closed or normally open bidirectional flow-type active valves, allowing for more flexible valve regulation in response to fluid or acoustic pressure. This invention patent enables the valve to open in both directions. Figure 5 and Figure 6 The diagram shows a bottom view of the valve in its non-actuated / closed state and a cross-sectional view along section line BB. In this state, the valve is considered substantially flat, and the gaps 2 between each of the multiple actuating elements and the valve, as well as the gaps 2 between each actuating element, are very small, approximately on the micrometer (µm) level. Therefore, the valve is considered closed. The valve body has a trapezoidal structure on both the upper and lower sides of the gap between the valve body frame 1 and the actuating elements; this structure does not affect the closed state of the valve when it is stationary. In other aspects, each actuating element consists of a diaphragm layer and a piezoelectric material layer, not shown in the diagram. The diaphragm covers the supporting element of the intermediate fixed support 3 and forms free ends through various gaps. Then, the respective piezoelectric material layers are applied over the diaphragm to drive the free ends of the diaphragm to produce vertical displacement.

[0122] Further references can be made. Figure 7 and Figure 8 Describe in more detail the vibration patterns of the drive element when the valve is in the actuated / open state. Figure 7 This is a schematic cross-sectional view along section line BB when the drive element is in the downward-opening state. Figure 7 A voltage is applied to the drive element, causing it to move downwards. Combined with the trapezoidal structure of the valve body, the valve changes from a closed state to an open state in the downward direction, allowing fluid to flow from top to bottom. Figure 8 This is a schematic cross-sectional view along section line BB when the drive element is in the upward-opening state. Figure 8 Applying voltage to the drive element causes it to move upwards. Combined with the trapezoidal structure on the upper part of the valve body, the valve changes from a closed state to an open state, allowing fluid to flow from bottom to top. This bidirectional valve structure can open upwards or downwards according to the direction of fluid pressure, thus avoiding the obstruction caused by the pressure direction being opposite to the vibration direction of the drive element when voltage is applied to open the valve, resulting in more flexible characteristics.

[0123] Example 3:

[0124] The examples above illustrate normally closed or normally open bidirectional flow-type active valves, allowing for more flexible valve regulation in response to fluid or acoustic pressure. This invention patent enables the valve to open in both directions. Figure 9 and Figure 10 The diagram shows a bottom view of the valve in its non-actuated / closed state and a cross-sectional view along the CC section line. In this state, the valve is considered substantially flat, and the gaps 2 between each of the multiple actuating elements and the valve, as well as the gaps 2 between each actuating element, are very small, approximately on the micrometer (µm) level. Therefore, the valve is considered closed. The valve body has boss structures on both the upper and lower sides of the gap between the valve body frame 1 and the actuating elements; this structure does not affect the closed state of the valve when it is stationary. In other aspects, each actuating element consists of a diaphragm layer and a piezoelectric material layer, not shown in the diagram. The diaphragm covers the supporting element of the intermediate fixed support 3 and forms free ends through various gaps. Then, the respective piezoelectric material layers cover the diaphragm to drive the free ends of the diaphragm to produce vertical displacement.

[0125] Further references can be made. Figure 11 and Figure 12 Describe in more detail the vibration patterns of the drive element when the valve is in the actuated / open state. Figure 3 This is a schematic cross-sectional view along section line CC when the drive element is in the downward-opening state. Figure 3 A voltage is applied to the drive element, causing it to move downwards. In conjunction with the boss structure of the valve body, the valve changes from the closed state to the open state in the downward direction, allowing fluid to flow from top to bottom. Figure 12 This is a schematic cross-sectional view along section line CC when the driving element is in the upward-opening state. Figure 12 Applying voltage to the drive element causes it to move upwards. This, combined with the boss structure on the upper part of the valve body, allows the valve to open from the closed state to the upward direction, enabling fluid to flow from bottom to top. This bidirectional valve structure can open upwards or downwards according to the direction of fluid pressure, thus avoiding the obstruction caused by the pressure direction being opposite to the vibration direction of the drive element when voltage is applied to open the valve, resulting in more flexible operation.

[0126] Example 4:

[0127] The examples above illustrate normally closed or normally open bidirectional flow-type active valves, allowing for more flexible valve regulation in response to fluid or acoustic pressure. This invention patent enables the valve to open in both directions. Figure 13 and Figure 14The diagram shows a bottom view of the valve in its non-actuated / closed state and a cross-sectional view along section DD. In this state, the valve is considered substantially flat. The gaps 2 between each of the multiple actuating elements and the central grooved post, as well as the gaps 2 between each actuating element, are very small, approximately on the micrometer (µm) scale; therefore, the valve is considered closed. There are arc-shaped recessed structures on both the upper and lower sides of the gaps between the actuating elements and the central grooved post; these structures do not affect the closed state of the valve when it is stationary. In other aspects, each actuating element consists of a diaphragm layer and a piezoelectric material layer, not shown in the diagram. The diaphragm covers the peripheral fixed support element 4 and forms free ends through various gaps. Then, the respective piezoelectric material layers are applied over the diaphragm to drive the free ends of the diaphragm to produce vertical displacement.

[0128] Further references can be made. Figure 15 and Figure 16 Describe in more detail the vibration patterns of the drive element when the valve is in the actuated / open state. Figure 15 This is a schematic cross-sectional view along section line DD when the drive element is in the downward-opening state. Figure 3 A voltage is applied to the drive element, causing it to move downwards. Combined with the arc-shaped concave structure of the valve body, the valve changes from the closed state to the open state in the downward direction, allowing fluid to flow from top to bottom. Figure 16 This is a schematic cross-sectional view along section line DD when the drive element is in the upward-opening state. Figure 16 Applying voltage to the drive element causes it to move upwards. Combined with the arc-shaped recessed structure on the upper part of the valve body, the valve changes from a closed state to an open state, allowing fluid to flow from bottom to top. This bidirectional valve structure can open upwards or downwards according to the direction of fluid pressure, thus avoiding the obstruction caused by the pressure direction being opposite to the vibration direction of the drive element when voltage is applied to open the valve, resulting in more flexible characteristics.

[0129] Example 5:

[0130] The examples above illustrate normally closed or normally open bidirectional flow-type active valves, allowing for more flexible valve regulation in response to fluid or acoustic pressure. This invention patent enables the valve to open in both directions. Figure 17 and Figure 18The diagram shows a bottom view of the valve in its non-actuated / closed state and a cross-sectional view along section line EE. In this state, the valve is considered substantially flat, and the gaps 2 between each of the multiple actuating elements and the central grooved pillar, as well as the gaps 2 between each actuating element, are very small, approximately on the micrometer (µm) scale; therefore, the valve is considered closed. There are central trapezoidal pillar structures on both the upper and lower sides of the gaps between the actuating elements and the central grooved pillars; these structures do not affect the closed state of the valve when it is stationary. In other aspects, each actuating element consists of a diaphragm layer and a piezoelectric material layer, not shown in the diagram. The diaphragm covers the peripheral fixed support element 4 and forms free ends through various gaps. Then, the respective piezoelectric material layers are applied over the diaphragm to drive the free ends of the diaphragm to produce vertical displacement.

[0131] Further references can be made. Figure 19 and Figure 20 Describe in more detail the vibration patterns of the drive element when the valve is in the actuated / open state. Figure 19 This is a schematic cross-sectional view along section line EE when the drive element is in the downward-opening state. Figure 19 A voltage is applied to the drive element, causing it to move downwards. In conjunction with the trapezoidal column structure in the middle of the valve body, the valve changes from a closed state to an open state in the downward direction, allowing fluid to flow from top to bottom. Figure 20 This is a schematic cross-sectional view along section line EE when the drive element is in the upward-opening state. Figure 20 Applying voltage to the drive element causes it to move upwards. This, combined with the trapezoidal column structure in the upper part of the valve body, opens the valve from a closed state to an upward-open state, allowing fluid to flow from bottom to top. This bidirectional valve structure can open upwards or downwards according to the direction of fluid pressure, thus avoiding the obstruction caused by the pressure direction being opposite to the vibration direction of the drive element when voltage is applied to open the valve, resulting in more flexible operation.

[0132] Example 6:

[0133] The examples above illustrate normally closed or normally open bidirectional flow-type active valves, allowing for more flexible valve regulation in response to fluid or acoustic pressure. This invention patent enables the valve to open in both directions. Figure 21 and Figure 22The diagram shows a bottom view of the valve in its non-actuated / closed state and a cross-sectional view along section line FF. In this state, the valve is considered substantially flat. The gaps 2 between each of the multiple actuating elements and the central pillar, as well as the gaps 2 between each actuating element, are very small, approximately on the micrometer (µm) scale; therefore, the valve is considered closed. There are intermediate trapezoidal pillar structures on both the upper and lower sides of the gaps between the actuating elements and the central grooved pillar. This structure does not affect the closed state of the valve when it is stationary. In other aspects, each actuating element consists of a diaphragm layer and a piezoelectric material layer, not shown in the diagram. The diaphragm covers the peripheral fixed support element 4 and forms free ends through various gaps. Then, the respective piezoelectric material layers are applied over the diaphragm to drive the free ends of the diaphragm to produce vertical displacement.

[0134] Further references can be made. Figure 23 and Figure 24 Describe in more detail the vibration patterns of the drive element when the valve is in the actuated / open state. Figure 23 This is a schematic cross-sectional view along section line FF when the drive element is in the downward-opening state. Figure 23 A voltage is applied to the drive element, causing it to move downwards. In conjunction with the central column structure of the valve body, the valve changes from a closed state to an open state in the downward direction, allowing fluid to flow from top to bottom. Figure 24 This is a schematic cross-sectional view along section line FF when the drive element is in the upward-opening state. Figure 24 Applying voltage to the drive element causes it to move upwards. This, combined with the central pillar structure in the upper part of the valve body, opens the valve from a closed state to an upward-open state, allowing fluid to flow from bottom to top. This bidirectional valve structure can open upwards or downwards according to the direction of fluid pressure, thus avoiding the obstruction caused by the pressure direction being opposite to the vibration direction of the drive element when voltage is applied to open the valve, resulting in more flexible characteristics.

[0135] Example 7:

[0136] The examples above illustrate normally closed or normally open bidirectional flow-type active valves, allowing for more flexible valve regulation in response to fluid or acoustic pressure. This invention patent enables the valve to open in both directions. Figure 25 and Figure 26The diagram shows a bottom view of the valve in its non-actuated / closed state and a cross-sectional view along the GG section line. In this state, the valve is considered substantially flat, and the gaps 2 between each of the multiple actuating elements and the central pillar, as well as the gaps 2 between each actuating element, are very small, approximately on the micrometer (µm) scale; therefore, the valve is considered closed. There are intermediate trapezoidal pillar structures on both the upper and lower sides of the gaps between the actuating elements and the central grooved pillar; these structures do not affect the closed state of the valve when it is stationary. In other aspects, each actuating element consists of a diaphragm layer and a piezoelectric material layer, not shown in the diagram. The diaphragm covers the peripheral fixed support element 4 and forms free ends through various gaps. Then, the respective piezoelectric material layers are applied over the diaphragm to drive the free ends of the diaphragm to produce vertical displacement.

[0137] Further references can be made. Figure 27 and Figure 28 Describe in more detail the vibration patterns of the drive element when the valve is in the actuated / open state. Figure 27 This is a schematic cross-sectional view along section line GG when the drive element is in the downward-opening state. Figure 27 A voltage is applied to the drive element, causing it to move downwards. In conjunction with the central column structure of the valve body, the valve changes from a closed state to an open state in the downward direction, allowing fluid to flow from top to bottom. Figure 28 This is a schematic cross-sectional view along section line GG when the drive element is in the upward-opening state. Figure 28 Applying voltage to the drive element causes it to move upwards. This, combined with the central pillar structure in the upper part of the valve body, opens the valve from a closed state to an upward-open state, allowing fluid to flow from bottom to top. This bidirectional valve structure can open upwards or downwards according to the direction of fluid pressure, thus avoiding the obstruction caused by the pressure direction being opposite to the vibration direction of the drive element when voltage is applied to open the valve, resulting in more flexible characteristics.

[0138] Further, you can refer to Figure 29 and Figure 30 Describe in more detail the vibration patterns of the drive element when the valve is in the actuated / open state. Figure 29 This is a schematic cross-sectional view along section line GG, showing the drive element with its left side in the downward-opening state and its right side in the upward-opening state. (See diagram below.) Figure 29 When a voltage is applied to the drive element, it moves the piezoelectric plate downwards to the left and the piezoelectric plate upwards to the right. In conjunction with the central column structure of the valve body, the valve changes from the closed state to the open state in the downward direction, allowing fluid to flow from top to bottom. Figure 30 This is a schematic cross-sectional view along section line GG, showing the drive element with its left side in the downward-opening state and its right side in the upward-opening state. (See diagram below.) Figure 30Applying voltage to the drive element causes it to move upwards on the left piezoelectric plate and downwards on the right piezoelectric plate. This, combined with the central pillar structure on the upper part of the valve body, opens the valve from a closed state to an upward-open state, allowing fluid to flow from bottom to top. This bidirectional valve structure can open upwards or downwards according to the direction of fluid pressure, thus increasing the flow rate and achieving a more efficient suction and discharge method.

[0139] Example 8:

[0140] The examples above illustrate normally closed or normally open bidirectional flow-type active valves, allowing for more flexible valve regulation in response to fluid or acoustic pressure. This invention patent enables the valve to open in both directions. Figure 31 and Figure 32 The diagram shows a bottom view of the valve in its non-actuated / closed state and a cross-sectional view along the HH section line. In this state, the valve is considered substantially flat, and the gaps 2 between each of the multiple actuating elements and the valve, as well as the gaps 2 between each actuating element, are very small, approximately on the micrometer (µm) level. Therefore, the valve is considered closed. The valve body has arc-shaped recesses on both the upper and lower sides of the gaps between the valve body frame 1 and the actuating elements. These recesses do not affect the closed state of the valve when it is stationary. In other aspects, each actuating element consists of a diaphragm layer and a piezoelectric material layer, not shown in the diagram. The diaphragm covers the central fixed support 3 and forms free ends through the various gaps. Then, the respective piezoelectric material layers cover the diaphragm, thereby driving the free ends of the diaphragm to produce vertical displacement.

[0141] Further references can be made. Figure 33 and Figure 34 Describe in more detail the vibration patterns of the drive element when the valve is in the actuated / open state. Figure 33 This is a schematic cross-sectional view along section line HH when the drive element is in the downward-opening state. Figure 33 A voltage is applied to the drive element, causing it to move downwards. This, combined with the concave arc structure of the valve body, causes the valve to change from a closed state to an open state in the downward direction, allowing fluid to flow from top to bottom. Figure 34 This is a schematic cross-sectional view along section line HH when the drive element is in the upward-opening state. Figure 34 By applying voltage to the drive element, it is displaced upwards. Combined with the concave arc structure on the upper part of the valve body, the valve changes from a closed state to an open state, allowing fluid to flow from bottom to top. This bidirectional valve structure can open upwards or downwards according to the direction of fluid pressure, thus avoiding the obstruction caused by the pressure direction being opposite to the vibration direction of the drive element when voltage is applied to open the valve, providing greater flexibility.

[0142] Further, you can refer to Figure 35 and Figure 36 Describe in more detail the vibration patterns of the drive element when the valve is in the actuated / open state. Figure 35 This is a schematic cross-sectional view along section line GG, showing the drive element with its left side in the upward-opening state and its right side in the downward-opening state. (See diagram below.) Figure 35 When a voltage is applied to the drive element, it moves the piezoelectric plate downwards to the left and the piezoelectric plate upwards to the right. In conjunction with the central column structure of the valve body, the valve changes from the closed state to the open state in the downward direction, allowing fluid to flow from top to bottom. Figure 36 This is a schematic cross-sectional view along section line GG, showing the drive element with its left side in the upward-opening state and its right side in the downward-opening state. (See diagram below.) Figure 36 Applying voltage to the drive element causes it to move upwards on the left piezoelectric plate and downwards on the right piezoelectric plate. This, combined with the central pillar structure on the upper part of the valve body, opens the valve from a closed state to an upward-open state, allowing fluid to flow from bottom to top. This bidirectional valve structure can open upwards or downwards according to the direction of fluid pressure, thus increasing the flow rate and achieving a more efficient suction and discharge method.

[0143] The above description is merely an embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principle of the present invention should be included within the scope of the claims of the present invention.

Claims

1. A bidirectional piezoelectric MEMS valve, characterized by, Includes a valve body, auxiliary structure, and at least one piezoelectric actuation component; The valve body is the outer frame (1) structure of the valve, which ensures the stability of the valve structure; The piezoelectric actuation structure can be fixed to the valve body or to the auxiliary structure. After the piezoelectric actuation structure is fixed, the unfixed part forms a movable piezoelectric actuation structure. The piezoelectric actuation structure can be fixed to the auxiliary structure in the form of intermediate fixed support (3), or it can be fixed to the valve body or auxiliary structure in the form of peripheral fixed support (4); the piezoelectric actuation structure includes at least a piezoelectric material layer, and applying voltage causes the unfixed part to be displaced, thereby controlling the opening and closing of the valve; The gas / liquid flow channel of the valve is formed by the gap between the piezoelectric actuation structure and the non-piezoelectric actuation structural components (valve body or auxiliary structure). In this case, the valve body or auxiliary structure is designed with a recessed structure to form the gap. When there are multiple piezoelectric actuation structural components, the flow channel of the valve can also be formed by the gaps formed between the multiple piezoelectric actuation structural components. The valve's flow channel can be opened in both directions. That is, by applying voltages of different polarities and magnitudes to the piezoelectric actuator, the displacement direction and magnitude of the piezoelectric actuator can be controlled, thereby enabling the valve to open in the forward or reverse direction for the fluid, as well as controlling the size of the flow channel opening (5). When the flow channel flows in the forward and reverse directions, the average flow resistance of the flow channel is relatively close.

2. The bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: The piezoelectric actuation structure can be a combination of two or more piezoelectric materials to achieve bidirectional pushing and pulling action, thereby changing the opening direction of the valve cavity; each piezoelectric actuation structure is one of the following shapes: conical, trapezoidal, rectangular, and fan-shaped.

3. The bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: The piezoelectric actuation structure can be a cantilever beam or a bridge, or other structures that provide rotational symmetry and mirror left-right / up-down symmetry. The cantilever beam is fixed on one side of the perimeter, and the bridge is fixed on both sides of the perimeter.

4. The bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: When the fluid controlled by the valve flows in the first direction, the piezoelectric actuator applies voltage to generate displacement in the first direction, and the valve opens in the first direction of the bidirectional flow channel. At this time, the valve controls the unidirectional opening and closing in the first direction. When the fluid controlled by the valve flows in the opposite direction of the first direction, the piezoelectric actuator generates displacement in this direction from a flat state, and the valve opens in the other direction of the bidirectional flow channel. Thus, the valve can achieve bidirectional opening and closing by applying voltages of different polarities to the piezoelectric actuator.

5. A bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: The gap (2) can be formed by multiple piezoelectric actuation structures fixed on the same side, with multiple piezoelectric actuation structures arranged in parallel and bent or expanded in the same direction to form a channel opening (5) for fluid flow. After applying voltage, one or more piezoelectric sheets are arranged in parallel and move in the same direction, causing the channel to open and close.

6. A bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: The gap (2) can be formed by the interaction between the piezoelectric actuation structure and the inner wall of the frame. This means that the piezoelectric sheet is attached to the inner wall of the valve body frame. When a voltage is applied, the piezoelectric sheet bends or stretches, and the gap (2) opens to form an opening (5). The inner wall of the frame provides support to ensure that the deformation direction of the piezoelectric sheet is controlled, thus forming an open and closed state.

7. A bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: The gap (2) can be formed by a combination of the gaps described in claims 4 to 5. The piezoelectric actuation structure can be bent toward the frame direction or the opening (5) can be formed by the reverse deformation of adjacent piezoelectric sheets. The inner wall of the frame provides boundary conditions for the piezoelectric sheets, while improving the rigidity and stability of the structure.

8. A bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: The plurality of piezoelectric actuation structural components are fixed on the same side or fixed on opposite sides.

9. A bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: The valve body ensures that fluid can flow in a predetermined direction when passing through the valve, and regulates the flow rate or pressure by controlling the position of the piezoelectric actuation structure and support components, providing a passage for fluid to pass through the valve, and maintaining internal sealing to prevent fluid leakage; the valve body is the external support frame of the valve, which includes inlet and outlet flow channels and fluid channels, and can control the bidirectional fluid flow channel to limit the valve opening.

10. A bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: When the auxiliary structure serves as a fixed support component for a piezoelectric actuation structure, there can be multiple such components. Each fixed support component supports and fixes each piezoelectric actuation structure or forms a flow channel by combining with a groove structure.

11. A bidirectional piezoelectric MEMS valve according to claim 5, characterized in that: The piezoelectric actuation structure forms a gap (2) in the same direction by adopting a frame or sealed design. It only needs to use the movement characteristics of its own piezoelectric sheet to form a gap (2), and the driving consistency of the deformation in the same direction can be guaranteed, and the response speed is very fast.

12. A bidirectional piezoelectric MEMS valve according to claim 6, characterized in that: The piezoelectric actuation structure interacts with the inner wall of the frame to form a gap (2), which is a combination of the inner wall of the frame and the piezoelectric actuation structure, effectively reducing the risk of leakage. It performs particularly well in the closed state. The mechanical support provided by the frame improves the overall pressure resistance of the valve. The inner wall of the frame serves as a fixed point, which facilitates the design of symmetrical bidirectional flow control.

13. A bidirectional piezoelectric MEMS valve according to claim 7, characterized in that: The gap formed by the mixture is formed by the piezoelectric actuation structure piece being able to bend toward the frame direction, or by the reverse deformation of adjacent piezoelectric pieces (2). The inner wall of the frame provides boundary conditions for the piezoelectric actuation structure piece, while improving the rigidity and stability of the structure.

14. A bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: The valve includes two bidirectional fluid channels, which can control the forward and reverse fluid flow respectively. The two channels can be geometrically symmetrically distributed at the center of the valve to ensure pressure balance during fluid transport. It can also be an asymmetric design, in which the displacement direction and magnitude of the piezoelectric actuator are controlled by applying voltages of different polarities and magnitudes to the piezoelectric actuator to control the forward or reverse flow of fluid; when the flow channel flows in the forward and reverse directions, the average flow resistance of the flow channel is relatively close.

15. A bidirectional piezoelectric MEMS valve according to claim 14, characterized in that: The two fluid channels are controlled by corresponding piezoelectric actuation components, which can independently adjust the flow rate and speed of forward and reverse flow, thereby achieving precise bidirectional flow control of fluid or sound waves.

16. A bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: The fluid channel is formed into a microchannel using piezoelectric MEMS technology.

17. A bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: The size of the fluid channel is adjusted by the movement of the piezoelectric actuated structural component, forming the opening, closing or partial opening state of the forward or reverse fluid channel. The width range of the gap (2) can be precisely controlled, ranging from one micrometer to tens of micrometers, to ensure the closing characteristics.

18. A bidirectional piezoelectric MEMS valve according to claim 1, characterized in that: The cross-sectional shape of the fluid channel is trapezoidal, rectangular, or grooved streamlined to reduce fluid turbulence and energy loss, and improve the efficiency of fluid flow.

19. An application of the bidirectional piezoelectric MEMS valve according to any one of claims 1-18, characterized in that, Applications include smart headphones, smart glasses, smartwatches, smart bracelets, head-mounted devices, wearable devices, smartphones, game controllers, gaming headsets, gaming steering wheels, gaming pedals, mice, keyboards, touchscreens, electrical control panels, touch devices, screen sound devices, in-vehicle haptic feedback devices, smart cockpits, gaming chairs, massage chairs, massagers, haptic feedback vests, haptic feedback gloves, haptic feedback belts, haptic feedback leg devices, hearing aids, sleep aids, or haptic feedback network interconnection devices.

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