Miniaturized OCS optical switch based on MEMS technology and manufacturing method

Abstract

The invention relates to a miniaturized OCS optical switch based on an MEMS technology, which comprises an input collimation optical fiber array and an output collimation optical fiber array which are located on the same straight line, and a triangular prism is arranged between the input collimation optical fiber array and the output collimation optical fiber array. An input MEMS chip array which is obliquely distributed and coupled with the input collimation optical fiber array is arranged on the light outlet side of the input collimation optical fiber array, an output MEMS chip array which is obliquely distributed and coupled with the output collimation optical fiber array is arranged on the light inlet side of the output collimation optical fiber array, and the input MEMS chip array is coupled with the output MEMS chip array through a triangular prism. The input collimation optical fiber array, the output collimation optical fiber array, the triangular prism, the input MEMS chip array and the output MEMS chip array are all located in a shell. The beneficial effects are that the input collimation optical fiber array and the output collimation optical fiber array can be directly coupled and can be rapidly fixed at the optimal position, a lot of time can be saved, and the optical fibers do not need to be bent.

Description

Technical Field

[0001] This invention relates to the field of optical communication technology, specifically to a miniaturized OCS optical switch based on MEMS technology and its manufacturing method. Background Technology

[0002] An optical circuit switch (OCS) is an all-optical switching matrix that can transmit optical signals from input ports to output ports. With the increasing dimension of the OCS, the integration of Micro-Electro-Mechanical Systems (MEMS) chips becomes extremely high, resulting in very small spacing between mirrors. Even a tiny displacement within the system can lead to drastic performance degradation, such as channel insertion loss. During the operation of receiving customer signal light, the mirrors on the MEMS chip may shift due to factors such as charge accumulation, or environmental factors such as vibration may cause channel performance to deteriorate, affecting usability. To address this problem, patent application number 202510138726X discloses an OCS array optical switch and its monitoring method. However, this solution has the following drawbacks: the input coupling module and the output coupling module are separate, far apart, and angled (i.e., figure-eight shaped distribution), resulting in a long time required to adjust the coupling between the input and output coupling modules. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to provide a miniaturized OCS optical switch based on MEMS technology and a method for manufacturing it, so as to overcome the shortcomings of the prior art.

[0004] The technical solution of the present invention to solve the above-mentioned technical problems is as follows: A miniaturized OCS optical switch based on MEMS technology includes: an input collimated fiber array and an output collimated fiber array on the same straight line, a triangular prism disposed between the input collimated fiber array and the output collimated fiber array, an input MEMS chip array disposed at an angle and coupled thereto on the light-emitting side of the input collimated fiber array, and an output MEMS chip array disposed at an angle and coupled thereto on the light-input side of the output collimated fiber array, the input MEMS chip array being coupled to the output MEMS chip array via the triangular prism, and the input collimated fiber array, the output collimated fiber array, the triangular prism, the input MEMS chip array, and the output MEMS chip array all being housed within a single housing.

[0005] The beneficial effects of this invention are: it places the input collimated fiber array and the output collimated fiber array on the same straight line, so that the input collimated fiber array and the output collimated fiber array can be directly coupled and quickly fixed in the optimal position, thereby saving a lot of time, and the fiber does not need to be bent and has a small size.

[0006] Based on the above technical solution, the present invention can be further improved as follows.

[0007] Furthermore, both the input collimating fiber array and the output collimating fiber array are horizontally distributed, the bottom surface of the triangular prism is horizontally distributed, and the angle between the two reflecting surfaces of the triangular prism and the bottom surface is the same.

[0008] Furthermore, the included angle between the two reflecting surfaces of the triangular prism is 90°, the refractive index of the triangular prism is greater than 1.6, and both the input MEMS chip array and the output MEMS chip array are tilted at 45°.

[0009] Furthermore, the housing has an input fiber front port coupled to the input collimated fiber array embedded on the side wall near the input collimated fiber array, and an output fiber front port coupled to the output collimated fiber array embedded on the side wall near the output collimated fiber array. The input collimated fiber array, the output collimated fiber array, the input fiber front port, and the output fiber front port are all on the same straight line.

[0010] The further beneficial effects of adopting the above are: the input collimated fiber array, the output collimated fiber array, the input fiber front port, and the output fiber front port are all on the same straight line, making fiber optic cabling more convenient. The fiber can be straight out to the input fiber front port and the output fiber front port without bending. Moreover, the input fiber front port and the output fiber front port are on the same line, which facilitates the connection between two switch cabinets, and the fiber between the two switch cabinets does not need to be bent.

[0011] Furthermore, the first sidewall of the outer shell is adjacent to the triangular prism, and a ridge-shaped structure that accommodates the triangular prism extends outward from the area corresponding to the triangular prism on the first sidewall. The second sidewall of the outer shell, which is opposite to the first sidewall, is a horizontally distributed plane.

[0012] The further beneficial effects of adopting the above are as follows: Based on this structure, two shells can be connected in the form of a back-to-back structure with the second sidewall connected first, and then the two adjacent back-to-back structures can be connected with a front-to-back staggered arrangement. The back-to-back structures located in odd-numbered positions are aligned, and the back-to-back structures located in even-numbered positions are aligned, forming an optical switch array. This reduces the cabinet space in the vertical direction. At the same time, the optical ports between adjacent optical switches are one in front of the other, with enough space to facilitate the insertion and removal of optical port patch cords. The structure is more compact and the size is smaller.

[0013] Furthermore, the first sidewall of the outer shell is adjacent to the triangular prism, and a ridge-shaped structure that accommodates the triangular prism extends outward from the area corresponding to the triangular prism on the first sidewall. On the second sidewall of the outer shell opposite to the first sidewall, a triangular groove is provided inwardly in the area corresponding to the ridge-shaped structure. The size of the triangular groove matches the size of the ridge-shaped structure. The input MEMS chip array and the output MEMS chip array are distributed on both sides of the triangular groove.

[0014] The further beneficial effects of adopting the above are as follows: Based on this structure, multiple shells can be connected in sequence, and the ridge-shaped structure of the lower shell can be connected to the triangular groove of the upper shell to form an optical switch array, making the overall structure more compact and smaller in size.

[0015] Based on the above technical solution, the present invention also provides a method for manufacturing a miniaturized OCS optical switch based on MEMS technology, which is used to manufacture the miniaturized OCS optical switch based on MEMS technology as described above, including the following steps: S10. In active mode, the input collimating fiber array and the output collimating fiber array inside the housing are directly coupled and fixed in the optimal position. S20. Arrange triangular prisms of the same size in an upper and lower configuration, and auxiliary triangular prisms. The two reflective surfaces of the auxiliary triangular prisms are coated with total reflection film. The auxiliary triangular prism at the bottom is coarsely fixed to the triangular prism and is used to reflect the light output from the input collimating fiber array to the triangular prisms, and to reflect the light output from the triangular prisms to the output collimating fiber array. S30. Adjust the position of the triangular prism to minimize input and output insertion loss, and then fix the triangular prism. S40, Remove the auxiliary triangular prism; S50. Deploy the input MEMS chip array and the output MEMS chip array so that the input collimating fiber array is coupled to the triangular prism through the input MEMS chip array, and the triangular prism is coupled to the output collimating fiber array through the output MEMS chip array, and fix the input MEMS chip array and the output MEMS chip array.

[0016] The further advantages of adopting the above are: convenient coupling, saving a lot of time, and small size.

[0017] Based on the above technical solution, the present invention also provides a method for manufacturing a miniaturized OCS optical switch based on MEMS technology, which is used to manufacture the aforementioned miniaturized OCS optical switch based on MEMS technology, comprising the following steps: S10. Process the shell array. The shell array is composed of multiple back-to-back structures connected in sequence. Each back-to-back structure is composed of two shells connected by a second sidewall. The two adjacent back-to-back structures are staggered in front and back. The back-to-back structures in odd positions are aligned, and the back-to-back structures in even positions are aligned. S20. In the active case, the input collimating fiber array and the output collimating fiber array in each housing are directly coupled and fixed in the optimal position. S30. Arrange triangular prisms and auxiliary triangular prisms of the same size. The two reflective surfaces of the auxiliary triangular prisms are coated with total reflection film. The auxiliary triangular prisms are coarsely fixed to the triangular prisms and are used to reflect the light output from the input collimating fiber array to the triangular prisms and to reflect the light output from the triangular prisms to the output collimating fiber array. S40. Adjust the position of the triangular prism to minimize input and output insertion loss, and then fix the triangular prism. S50, Remove the auxiliary triangular prism; S60. Deploy the input MEMS chip array and the output MEMS chip array so that the input collimating fiber array is coupled to the triangular prism through the input MEMS chip array, and the triangular prism is coupled to the output collimating fiber array through the output MEMS chip array, and fix the input MEMS chip array and the output MEMS chip array. S70, used to construct array-type optical switches.

[0018] The further beneficial effects of adopting the above are: convenient coupling, which can save a lot of time, reduce the cabinet space in the vertical direction, and the optical ports between adjacent optical switches are one in front of the other, with enough space to facilitate the insertion and removal of optical port patch cords. The structure is more compact and the size is smaller.

[0019] Based on the above technical solution, the present invention also provides a method for manufacturing a miniaturized OCS optical switch based on MEMS technology, which is used to manufacture the aforementioned miniaturized OCS optical switch based on MEMS technology, comprising the following steps: S10. In the active case, the input collimating fiber array and the output collimating fiber array in each housing are directly coupled and fixed in the optimal position. S20. Deploy the triangular prism, input MEMS chip array, and output MEMS chip array. Adjust the positions of the triangular prism, input MEMS chip array, and output MEMS chip array to couple the input collimating fiber array to the triangular prism via the input MEMS chip array, and to couple the triangular prism to the output collimating fiber array via the output MEMS chip array, minimizing input and output insertion losses. Then fix the triangular prism, input MEMS chip array, and output MEMS chip array.

[0020] The further advantages of adopting the above are: convenient coupling, saving a lot of time, and small size.

[0021] Based on the above technical solution, the present invention also provides a method for manufacturing a miniaturized OCS optical switch based on MEMS technology, which is used to manufacture the aforementioned miniaturized OCS optical switch based on MEMS technology, comprising the following steps: S10. Process the shell array, which is composed of multiple shells connected in sequence. The ridge-shaped structure of the lower shell between two adjacent shells enters the triangular groove of the upper shell. S20. In the active case, the input collimating fiber array and the output collimating fiber array in each housing are directly coupled and fixed in the optimal position. S30. Deploy the triangular prism, input MEMS chip array, and output MEMS chip array. Adjust the positions of the triangular prism, input MEMS chip array, and output MEMS chip array to couple the input collimating fiber array to the triangular prism via the input MEMS chip array, and to couple the triangular prism to the output collimating fiber array via the output MEMS chip array, minimizing input and output insertion losses. Then fix the triangular prism, input MEMS chip array, and output MEMS chip array. S40, to construct an array-type optical switch.

[0022] The further beneficial effects of adopting the above are: convenient coupling, saving a lot of time, more compact overall structure, and smaller size. Attached Figure Description

[0023] Figure 1 This is a top view of the first miniaturized OCS optical switch based on MEMS technology in this invention; Figure 2 This is a top view of the second type of miniaturized OCS optical switch based on MEMS technology in this invention; Figure 3 This is a flowchart illustrating the fabrication process of the first miniaturized OCS optical switch based on MEMS technology in this invention. Figure 4 This is a flowchart illustrating the fabrication process of the first miniaturized OCS optical switch array based on MEMS technology in this invention. Figure 5 This is a flowchart illustrating the fabrication process of the second type of miniaturized OCS optical switch array based on MEMS technology in this invention.

[0024] The attached diagram lists the components represented by each number as follows: 1. Input collimated fiber array; 2. Output collimated fiber array; 3. Triangular prism; 4. Input MEMS chip array; 5. Output MEMS chip array; 6. Housing; 610. First sidewall; 611. Roof-shaped structure; 620. Second sidewall; 621. Triangular groove; 7. Input fiber front port; 8. Output fiber front port. Detailed Implementation

[0025] The principles and features of the present invention are described below with reference to the accompanying drawings. The examples given are only for explaining the present invention and are not intended to limit the scope of the present invention.

[0026] Example 1 like Figure 1 , Figure 2 As shown, a miniaturized OCS optical switch based on MEMS technology includes: An input collimating fiber array 1 and an output collimating fiber array 2 are arranged on the same straight line, with the output light-emitting surface of the input collimating fiber array 1 facing the incident light-emitting surface of the output collimating fiber array 2. A triangular prism 3 is placed between the input collimating fiber array 1 and the output collimating fiber array 2. An input MEMS chip array 4 is arranged at an angle on the output side of the input collimating fiber array 1 and coupled to the input collimating fiber array 1. An output MEMS chip array 5 is arranged at an angle on the incident side of the output collimating fiber array 2 and coupled to the output collimating fiber array 2. MS chip array 4 is coupled to output MEMS chip array 5 via triangular prism 3. Signal light enters input collimating fiber array 1, then is incident on input MEMS chip array 4, and is reflected by input MEMS chip array 4 onto triangular prism 3. Signal light entering triangular prism 3 is reflected twice and then exits and is incident on output MEMS chip array 5. Finally, it is reflected by output MEMS chip array 5 and coupled into output collimating fiber array 2. Input collimating fiber array 1, output collimating fiber array 2, triangular prism 3, input MEMS chip array 4, and output MEMS chip array 5 are all located within a housing 6.

[0027] In this invention, the input collimated fiber array 1 and the output collimated fiber array 2 are aligned on the same straight line. This allows the input collimated fiber array 1 and the output collimated fiber array 2 to be directly coupled and quickly fixed in the optimal position, thereby saving a lot of time and eliminating the need to bend the optical fibers.

[0028] Example 2 like Figure 1 , Figure 2 As shown, this embodiment is a further improvement on embodiment 1, as detailed below: The input collimating fiber array 1 is horizontally distributed, the output collimating fiber array 2 is horizontally distributed, the bottom surface of the triangular prism 3 is horizontally distributed, and the angle between the two reflecting surfaces of the triangular prism 3 and the bottom surface is the same.

[0029] Furthermore, the included angle between the two reflecting surfaces of the triangular prism 3 is 90°, meaning the included angle between the two reflecting surfaces of the triangular prism 3 and the bottom surface is 45°. The refractive index of the triangular prism 3 is greater than 1.6. According to the formula: Sin45°×n=sin90°×1, where n is the refractive index of the triangular prism and 1 is the refractive index of air, it can be calculated that the minimum requirement for the refractive index of the triangular prism 3 is 1.415, i.e., n>1.415 is sufficient. To ensure sufficient margin, in actual production, glass with a refractive index greater than 1.6 is selected. Glass with a refractive index of 1.6 or higher is a common material, and the cost will not increase. The input MEMS chip array 4 is tilted at 45°, and the output MEMS chip array 5 is also tilted at 45°. The input MEMS chip array 4 and the output MEMS chip array 5 form a figure-eight structure, and the triangular prism 3 is located at the constriction end of the figure-eight structure formed by the input MEMS chip array 4 and the output MEMS chip array 5.

[0030] Example 3 like Figure 1 , Figure 2 As shown, this embodiment is a further improvement on embodiment 1 or 2, as detailed below: The housing 6 has an input fiber front port 7 embedded on the side wall near the input collimated fiber array 1, coupled to the input collimated fiber array 1. The housing 6 also has an output fiber front port 8 embedded on the side wall near the output collimated fiber array 2, coupled to the output collimated fiber array 2. The input collimated fiber array 1, the output collimated fiber array 2, the input fiber front port 7, and the output fiber front port 8 are all on the same straight line, making fiber optic cabling more convenient. The fiber can be directly delivered to the input fiber front port 7 and the output fiber front port 8 without bending. Furthermore, the input fiber front port 7 and the output fiber front port 8 are on the same line, which facilitates the connection between two switch cabinets. The fiber between the two switch cabinets also does not need to be bent.

[0031] Example 4 like Figure 1 As shown, this embodiment is a further improvement on embodiment 1, 2, or 3, as detailed below: The first sidewall 610 of the outer shell 6 is adjacent to the triangular prism 3. A ridge-shaped structure 611 for accommodating the triangular prism 3 extends outward from the area corresponding to the triangular prism 3 on the first sidewall 610. The second sidewall 620 of the outer shell 6 opposite to the first sidewall 610 is a horizontally distributed plane. Based on this structure, two outer shells 6 can be connected to form a back-to-back structure with the second sidewall 620 connected. Then, the two adjacent back-to-back structures can be staggered front and back, with the back-to-back structures in odd positions aligned and the back-to-back structures in even positions aligned, thereby constructing an optical switch array, reducing the cabinet space in the vertical direction. At the same time, the optical ports between adjacent optical switches are one in front and one behind, with enough space to facilitate the insertion and removal of optical port patch cords.

[0032] Example 5 like Figure 2 As shown, this embodiment is a further improvement on embodiment 1, 2, or 3, as detailed below: The first sidewall 610 of the outer shell 6 is adjacent to the triangular prism 3. A ridge-shaped structure 611 for accommodating the triangular prism 3 extends outward from the first sidewall 610 in the area corresponding to the triangular prism 3. The second sidewall 620 of the outer shell 6, which is opposite to the first sidewall 610, has an inwardly recessed triangular groove 621 in the area corresponding to the ridge-shaped structure 611. The size of the triangular groove 621 matches the size of the ridge-shaped structure 611. During mass production, the ridge-shaped structure 611 of the next outer shell 6 can enter the triangular groove 621 of the previous outer shell 6 and be connected, thereby making the structure more compact and reducing costs. The input MEMS chip array 4 and the output MEMS chip array 5 are distributed on both sides of the triangular groove 621.

[0033] Example 6 like Figure 3 As shown, a method for fabricating a miniaturized OCS optical switch based on MEMS technology, used to fabricate a miniaturized OCS optical switch based on MEMS technology as described in any of Examples 1 to 3, includes the following steps: S10. In the active state, the input collimated fiber array 1 and the output collimated fiber array 2 inside the housing 6 are directly coupled, that is, the input collimated fiber array 1 is connected to an external light source, and the output collimated fiber array 2 is connected to an external optical power meter, and fixed in the optimal position. The optimal position is the position of the input collimated fiber array 1 and the output collimated fiber array 2 corresponding to the maximum reading of the optical power meter. S20. Arrange triangular prisms 3 and auxiliary triangular prisms in an upper and lower configuration. The upper and lower configurations are described using the top view as an example. The size of the triangular prism 3 is the same as that of the auxiliary triangular prism. The two reflective surfaces of the auxiliary triangular prism are coated with total reflection film. The lower auxiliary triangular prism is used to coarsely fix the triangular prism 3. At the same time, the auxiliary triangular prism is used to reflect the light output from the input collimating fiber array 1 to the triangular prism 3, and the auxiliary triangular prism is used to reflect the light output from the triangular prism 3 to the output collimating fiber array 2. S30. Adjust the position of the triangular prism 3 to minimize the input and output insertion loss, and fix the triangular prism 3. Specifically, it can be understood that the signal light incident from the input collimating fiber array 1 on one of the reflective surfaces of the auxiliary triangular prism is reflected to the triangular prism 3. The signal light entering the triangular prism 3 is reflected twice and then emitted out and incident on the other reflective surface of the auxiliary triangular prism. It is then reflected and coupled into the output collimating fiber array 2. S40, Remove the auxiliary triangular prism; S50. Arrange the input MEMS chip array 4 and the output MEMS chip array 5 so that the input collimating fiber array 1 is coupled to the triangular prism 3 through the input MEMS chip array 4, and the triangular prism 3 is coupled to the output collimating fiber array 2 through the output MEMS chip array 5, and fix the input MEMS chip array 4 and the output MEMS chip array 5.

[0034] Example 7 like Figure 4 As shown, a method for fabricating a miniaturized OCS optical switch based on MEMS technology, used to fabricate the miniaturized OCS optical switch based on MEMS technology as in Example 4, includes the following steps: S10. Process the shell array 6. The shell array 6 is composed of multiple back-to-back structures connected in sequence. Each back-to-back structure is composed of two shells 6 connected by a second sidewall 620. The two adjacent back-to-back structures are staggered in front and back. The back-to-back structures in odd positions are aligned, and the back-to-back structures in even positions are aligned. Specifically, it can be understood that: the side of the ridge structure 611 in the lower shell 6 is connected to the side of the ridge structure 611 in the upper shell 6 between two adjacent back-to-back structures. S20. In the active state, the input collimated fiber array 1 and the output collimated fiber array 2 inside each housing 6 are directly coupled, that is, the input collimated fiber array 1 is connected to an external light source, and the output collimated fiber array 2 is connected to an external optical power meter, and fixed in the optimal position. The optimal position is the position of the input collimated fiber array 1 and the output collimated fiber array 2 corresponding to the maximum reading of the optical power meter. S30. Arrange triangular prism 3 and auxiliary triangular prism. The size of triangular prism 3 is the same as that of auxiliary triangular prism. The two reflective surfaces of auxiliary triangular prism are coated with total reflection film. Auxiliary triangular prism is used to coarsely fix triangular prism 3. At the same time, auxiliary triangular prism is used to reflect the output light of input collimating fiber array 1 to triangular prism 3 and to reflect the output light of triangular prism 3 to output collimating fiber array 2. S40. Adjust the position of the triangular prism 3 to minimize the input and output insertion loss, and fix the triangular prism 3. Specifically, it can be understood that the signal light incident from the input collimating fiber array 1 on one of the reflective surfaces of the auxiliary triangular prism is reflected to the triangular prism 3. The signal light entering the triangular prism 3 is reflected twice and then emitted out and incident on the other reflective surface of the auxiliary triangular prism. It is then reflected and coupled into the output collimating fiber array 2. S50, Remove the auxiliary triangular prism; S60. Arrange the input MEMS chip array 4 and the output MEMS chip array 5 so that the input collimating fiber array 1 is coupled to the triangular prism 3 through the input MEMS chip array 4, and the triangular prism 3 is coupled to the output collimating fiber array 2 through the output MEMS chip array 5, and fix the input MEMS chip array 4 and the output MEMS chip array 5. S70, used to construct array-type optical switches.

[0035] Example 8 like Figure 2 As shown, a method for fabricating a miniaturized OCS optical switch based on MEMS technology, used to fabricate a miniaturized OCS optical switch based on MEMS technology as described in any of Embodiments 1-3 or Embodiment 5, includes the following steps: S10. In the active state, the input collimated fiber array 1 and the output collimated fiber array 2 inside each housing 6 are directly coupled, that is, the input collimated fiber array 1 is connected to an external light source, and the output collimated fiber array 2 is connected to an external optical power meter, and fixed in the optimal position. The optimal position is the position of the input collimated fiber array 1 and the output collimated fiber array 2 corresponding to the maximum reading of the optical power meter. S20. Deploy the triangular prism 3, the input MEMS chip array 4, and the output MEMS chip array 5. Adjust the positions of the triangular prism 3, the input MEMS chip array 4, and the output MEMS chip array 5 so that the input collimating fiber array 1 is coupled to the triangular prism 3 through the input MEMS chip array 4, and the triangular prism 3 is coupled to the output collimating fiber array 2 through the output MEMS chip array 5, minimizing the input and output insertion losses. Then fix the triangular prism 3, the input MEMS chip array 4, and the output MEMS chip array 5.

[0036] Example 9 like Figure 5 As shown, a method for fabricating a miniaturized OCS optical switch based on MEMS technology, used to fabricate the miniaturized OCS optical switch based on MEMS technology as in Example 5, includes the following steps: S10. Process the array of outer shells 6. The array of outer shells 6 is formed by connecting multiple outer shells 6 in sequence. The ridge-shaped structure 611 of the lower outer shell 6 between two adjacent outer shells 6 enters the triangular groove 621 of the upper outer shell 6. S20. In the active state, the input collimated fiber array 1 and the output collimated fiber array 2 inside each housing 6 are directly coupled, that is, the input collimated fiber array 1 is connected to an external light source, and the output collimated fiber array 2 is connected to an external optical power meter, and fixed in the optimal position. The optimal position is the position of the input collimated fiber array 1 and the output collimated fiber array 2 corresponding to the maximum reading of the optical power meter. S30. Deploy the triangular prism 3, the input MEMS chip array 4, and the output MEMS chip array 5. Adjust the positions of the triangular prism 3, the input MEMS chip array 4, and the output MEMS chip array 5 so that the input collimating fiber array 1 is coupled to the triangular prism 3 through the input MEMS chip array 4, and the triangular prism 3 is coupled to the output collimating fiber array 2 through the output MEMS chip array 5, while minimizing the input and output insertion losses. Then fix the triangular prism 3, the input MEMS chip array 4, and the output MEMS chip array 5. S40, to construct an array-type optical switch.

[0037] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A miniaturized OCS optical switch based on MEMS technology, characterized in that, include: An input collimated fiber array (1) and an output collimated fiber array (2) are located on the same straight line. A triangular prism (3) is arranged between the input collimated fiber array (1) and the output collimated fiber array (2). An input MEMS chip array (4) is arranged at an angle and coupled to the light output side of the input collimated fiber array (1). An output MEMS chip array (5) is arranged at an angle and coupled to the light input side of the output collimated fiber array (2). The input MEMS chip array (4) is coupled to the output MEMS chip array (5) through the triangular prism (3). The input collimated fiber array (1), the output collimated fiber array (2), the triangular prism (3), the input MEMS chip array (4) and the output MEMS chip array (5) are all located in a housing (6).

2. The miniaturized OCS optical switch based on MEMS technology according to claim 1, characterized in that, The input collimating fiber array (1) and the output collimating fiber array (2) are both horizontally distributed, the bottom surface of the triangular prism (3) is horizontally distributed, and the angle between the two reflecting surfaces of the triangular prism (3) and the bottom surface is the same.

3. A miniaturized OCS optical switch based on MEMS technology according to claim 2, characterized in that, The included angle between the two reflective surfaces of the triangular prism (3) is 90°, the refractive index of the triangular prism (3) is greater than 1.6, and the input MEMS chip array (4) and the output MEMS chip array (5) are both tilted at 45°.

4. A miniaturized OCS optical switch based on MEMS technology according to claim 1, characterized in that, The housing (6) has an input fiber front port (7) coupled to the input collimated fiber array (1) embedded on the side wall near the input collimated fiber array (1), and an output fiber front port (8) coupled to the output collimated fiber array (2) embedded on the side wall near the output collimated fiber array (2). The input collimated fiber array (1), the output collimated fiber array (2), the input fiber front port (7) and the output fiber front port (8) are on the same straight line.

5. A miniaturized OCS optical switch based on MEMS technology according to any one of claims 1 to 4, characterized in that, The first sidewall (610) of the outer shell (6) is adjacent to the triangular prism (3). The first sidewall (610) extends outward in the area corresponding to the triangular prism (3) to form a ridge-shaped structure (611) that accommodates the triangular prism (3). The second sidewall (620) of the outer shell (6) opposite to the first sidewall (610) is a horizontally distributed plane.

6. A miniaturized OCS optical switch based on MEMS technology according to any one of claims 1 to 4, characterized in that, The first sidewall (610) of the outer shell (6) is adjacent to the triangular prism (3). The first sidewall (610) extends outward in the area corresponding to the triangular prism (3) to form a ridge-shaped structure (611) that accommodates the triangular prism (3). The second sidewall (620) of the outer shell (6) opposite to the first sidewall (610) has an inwardly recessed triangular groove (621) in the area corresponding to the ridge-shaped structure (611). The size of the triangular groove (621) matches the size of the ridge-shaped structure (611). The input MEMS chip array (4) and the output MEMS chip array (5) are distributed on both sides of the triangular groove (621).

7. A method for fabricating a miniaturized OCS optical switch based on MEMS technology, characterized in that, The method for manufacturing a miniaturized OCS optical switch based on MEMS technology as described in any one of claims 1 to 5 includes the following steps: S10. In the active case, the input collimated fiber array (1) inside the housing (6) is directly coupled to the output collimated fiber array (2) and fixed in the optimal position; S20. Arrange triangular prisms (3) of the same size in an upper and lower configuration, and auxiliary triangular prisms. The two reflective surfaces of the auxiliary triangular prisms are coated with total reflection film. The auxiliary triangular prisms located below are roughly fixed to the triangular prisms (3) and are used to reflect the light output from the input collimating fiber array (1) to the triangular prisms (3) and to reflect the light output from the triangular prisms (3) to the output collimating fiber array (2). S30. Adjust the position of the triangular prism (3) to minimize the input and output insertion loss, and fix the triangular prism (3). S40, Remove the auxiliary triangular prism; S50. Arrange the input MEMS chip array (4) and the output MEMS chip array (5) so that the input collimating fiber array (1) is coupled to the triangular prism (3) through the input MEMS chip array (4), and the triangular prism (3) is coupled to the output collimating fiber array (2) through the output MEMS chip array (5), and fix the input MEMS chip array (4) and the output MEMS chip array (5).

8. A method for fabricating a miniaturized OCS optical switch based on MEMS technology, characterized in that, The method for fabricating the miniaturized OCS optical switch based on MEMS technology as described in claim 5 includes the following steps: S10, process the shell (6) array, the shell (6) array is formed by multiple back-to-back structures connected in sequence, each back-to-back structure is formed by two shells (6) connected by the second sidewall (620), the two adjacent back-to-back structures are staggered in front and back, the back-to-back structures in the odd position are aligned, and the back-to-back structures in the even position are aligned. S20. In the active case, the input collimated fiber array (1) in each housing (6) is directly coupled to the output collimated fiber array (2) and fixed in the optimal position; S30. Arrange triangular prisms (3) and auxiliary triangular prisms of the same size. The two reflective surfaces of the auxiliary triangular prisms are coated with total reflection film. The auxiliary triangular prisms are roughly fixed to the triangular prisms (3) and are used to reflect the light output from the input collimating fiber array (1) to the triangular prisms (3) and to reflect the light output from the triangular prisms (3) to the output collimating fiber array (2). S40. Adjust the position of the triangular prism (3) to minimize the input and output insertion loss, and fix the triangular prism (3). S50, Remove the auxiliary triangular prism; S60. Arrange the input MEMS chip array (4) and the output MEMS chip array (5) so that the input collimating fiber array (1) is coupled to the triangular prism (3) through the input MEMS chip array (4), and the triangular prism (3) is coupled to the output collimating fiber array (2) through the output MEMS chip array (5), and fix the input MEMS chip array (4) and the output MEMS chip array (5). S70, used to construct array-type optical switches.

9. A method for fabricating a miniaturized OCS optical switch based on MEMS technology, characterized in that, The method for manufacturing a miniaturized OCS optical switch based on MEMS technology as described in any one of claims 1 to 4 or claim 6 includes the following steps: S10. In the active case, the input collimated fiber array (1) in each housing (6) is directly coupled to the output collimated fiber array (2) and fixed in the optimal position; S20. Arrange the triangular prism (3), the input MEMS chip array (4), and the output MEMS chip array (5). Adjust the positions of the triangular prism (3), the input MEMS chip array (4), and the output MEMS chip array (5) so that the input collimating fiber array (1) is coupled to the triangular prism (3) through the input MEMS chip array (4), and the triangular prism (3) is coupled to the output collimating fiber array (2) through the output MEMS chip array (5). Minimize the insertion loss of the input and output. Then fix the triangular prism (3), the input MEMS chip array (4), and the output MEMS chip array (5).

10. A method for fabricating a miniaturized OCS optical switch based on MEMS technology, characterized in that, The method for fabricating the miniaturized OCS optical switch based on MEMS technology as described in claim 6 includes the following steps: S10, process the shell (6) array, the shell (6) array is formed by connecting multiple shells (6) in sequence, and the ridge-shaped structure (611) of the lower shell (6) between two adjacent shells (6) enters the triangular groove (621) of the upper shell (6); S20. In the active case, the input collimated fiber array (1) in each housing (6) is directly coupled to the output collimated fiber array (2) and fixed in the optimal position; S30. Arrange the triangular prism (3), the input MEMS chip array (4), and the output MEMS chip array (5). Adjust the positions of the triangular prism (3), the input MEMS chip array (4), and the output MEMS chip array (5) so that the input collimating fiber array (1) is coupled to the triangular prism (3) through the input MEMS chip array (4), and the triangular prism (3) is coupled to the output collimating fiber array (2) through the output MEMS chip array (5). Minimize the insertion loss of the input and output. Then fix the triangular prism (3), the input MEMS chip array (4), and the output MEMS chip array (5). S40, to construct an array-type optical switch.

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