Multi-dimensional vibration platform with three-sandwich type piezoelectric actuators arranged in same direction and excitation method of multi-dimensional vibration platform

Abstract

The invention belongs to the technical field of high-frequency vibration and micro-nano control, solves the problems that an existing multi-dimensional vibration platform is insufficient in degree of freedom, asymmetric in structure, complex in modal coupling and the like, and provides a three-sandwich type piezoelectric actuator equidirectional arrangement type multi-dimensional vibration platform and an excitation method thereof. The platform comprises a center platform, three piezoelectric actuators, three end covers and three bolts, the center platform is of a mirror symmetry structure, the three piezoelectric actuators are arranged in a 1 + 2 triangle mode, one piezoelectric actuator is located on a longitudinal symmetry plane, and the other two piezoelectric actuators are symmetrical about the plane. Each piezoelectric actuator is integrated with a longitudinal vibration ceramic group, a bending vibration ceramic group around a Y axis and a bending vibration ceramic group around a Z axis, three-direction translation along the X axis, the Y axis and the Z axis and three-direction rotation around the X axis, the Y axis and the Z axis can be achieved through an in-phase or anti-phase excitation strategy, and six-degree-of-freedom high-frequency micro-vibration output is achieved in total. The vibration platform is fixed by a node bracket, so that the main mode is prevented from being interfered; the method is suitable for precise engineering scenes such as laser micromachining, ultrasonic-assisted manufacturing, cell manipulation and active vibration suppression.

Description

Technical Field

[0001] This invention relates to the fields of high-frequency vibration engineering and micro / nano manipulation technology, and in particular to a multidimensional vibration platform suitable for six-degree-of-freedom high-frequency microscale motion control. Background Technology

[0002] In biomedical manipulation, precision micromachining, ultrasound-assisted manufacturing, and active vibration suppression systems, it is often necessary to apply high-frequency micro-vibrations with multiple degrees of freedom (a combination of translation and rotation) to end effectors. Traditional piezoelectric vibration platforms typically employ a single or dual-actuator structure, achieving two-dimensional or three-dimensional motion through longitudinal and bending mode coupling. However, limited by the number of actuators and spatial layout, they struggle to meet the demands of complex trajectories or multi-axis collaborative control. While existing technologies have attempted to increase the number of actuators to enhance degrees of freedom, they generally suffer from structural asymmetry, severe parasitic mode interference, and excessive system height, hindering their application in confined spaces or high-precision scenarios. Summary of the Invention

[0003] This invention aims to solve the problems of insufficient degrees of freedom, structural asymmetry, and complex modal coupling in existing multidimensional vibration platforms. It proposes a three-sandwich piezoelectric actuator co-arranged multidimensional vibration platform and its excitation method. By symmetrically distributing three piezoelectric actuators in a triangle, it can achieve independent or composite vibration output of six degrees of freedom, which significantly improves the motion flexibility of the system.

[0004] To achieve the above objectives, the present invention provides the following technical solution: This invention proposes a three-cage piezoelectric actuator co-directional arrangement multidimensional vibration platform, which includes a central platform, three piezoelectric actuators, three end caps, and three bolts; The central platform is a composite structure that integrates multiple functional sub-components. The sub-components include at least an end platform, three flexible hinges, and three amplitude rods. The end platform is a mirror-symmetric structure, and its symmetry plane is a longitudinal plane passing through the geometric center of the end platform and along the vibration transmission direction; The amplitude-changing rod is a variable cross-section rod body, including a large diameter end and a small diameter end. The end faces of the large diameter end and the small diameter end are parallel to each other, and the large diameter end is provided with a threaded hole. The piezoelectric actuator has parallel end faces and a through hole along the axial direction; The two ends of the end cap are parallel and have an axial through hole; One end face of the piezoelectric actuator is in contact with the upper end face of the end cover, and the other end face is in contact with the large-diameter end face of the amplitude rod. The bolt passes through the through holes of the end cap and the piezoelectric actuator in sequence and is screwed into the threaded hole at the large diameter end of the amplitude rod to achieve axial fastening of the three. The axes of the bolt, end cap and piezoelectric actuator are collinear, and the end face of the bolt nut fits against the lower end face of the end cap to provide preload. The small-diameter end of the amplitude rod is connected to the lower end face of the flexible hinge, and the upper end face of the flexible hinge is connected to the lower end face of the end platform. Both the amplitude transformer and the piezoelectric actuator are provided with brackets for fixing and constraining in the circumferential direction. The structure of the vibration platform is arranged in a mirror-symmetric manner about the longitudinal symmetry plane passing through the center of the end platform; The three piezoelectric actuators are arranged in a triangle along the longitudinal plane of symmetry of the vibration platform: the axis of one piezoelectric actuator is located on the longitudinal plane of symmetry, and the other two piezoelectric actuators are arranged on both sides of the plane of symmetry, and are mirror-symmetric about the plane of symmetry.

[0005] Furthermore, a preferred approach is proposed, in which a coordinate system is established with the geometric center of the aforementioned end platform as the origin. The X-axis points vertically from the piezoelectric actuator to the end platform, the Y-axis points to the left perpendicular to the longitudinal symmetry plane of the end platform, and the Z-axis is determined by the right-hand rule. The motion of the end platform along the X / Y / Z axes and around the X / Y / Z axes is based on this coordinate system.

[0006] Furthermore, a preferred embodiment is proposed, wherein the piezoelectric actuator comprises any combination of longitudinal vibration ceramic group, bending vibration ceramic group around Y-axis and bending vibration ceramic group around Z-axis; each ceramic group is provided with a driving electrode and a ground electrode, and the corresponding vibration mode can be excited by applying a voltage between the driving electrode and the ground electrode.

[0007] Furthermore, a preferred embodiment is proposed, wherein the piezoelectric actuator is a stacked type, a patch type, a piezoelectric tube type, or any combination thereof, to adapt to different displacement output and mechanical response requirements.

[0008] Furthermore, a preferred method is proposed in which the aforementioned flexible hinge is fixed to the end platform and the amplitude rod by means of threaded connection, adhesive bonding, welding or integral molding.

[0009] Furthermore, a preferred embodiment is proposed, wherein the aforementioned flexible hinge is a biaxially symmetrical or omnidirectional type, used to transmit linear motion and multi-directional bending deformation.

[0010] Furthermore, a preferred method is proposed in which the above-mentioned vibration platform is installed and fixed by means of an amplitude transformer bracket, a piezoelectric actuator bracket, or a combination of the two, so as to achieve efficient vibration energy coupling.

[0011] Furthermore, a preferred embodiment is proposed, wherein the vibration platform comprises three functional assemblies, each consisting of a bolt, an end cap, a piezoelectric actuator, an amplitude transformer, and a flexible hinge connected sequentially along the vibration transmission path; the axes of the internal parts of each assembly are collinear, and the overall axes of the three assemblies are parallel to each other.

[0012] Furthermore, a preferred embodiment is proposed in which, when the three assemblies are arranged in a non-collinear manner, the axial angle between any two pairs of axes of the three amplitude rods, the three flexible hinges, and the three piezoelectric actuators is less than 90 degrees.

[0013] Based on the same inventive concept, this invention also provides a vibration excitation method for a multidimensional vibration platform. The method is implemented using a three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform, and specifically includes the following steps: When an in-phase alternating voltage signal is applied to the Z-axis bending resonant ceramic assembly of three piezoelectric actuators, and the frequency matches the Z-axis bending resonant mode, due to the geometric symmetry of the amplitude rod and the flexible hinge, the bending resonant mode can excite translational vibration along the Y-axis and rotational vibration around the Z-axis of the end platform during transmission. When an alternating voltage signal is applied to the Z-axis bending ceramic group of a piezoelectric actuator located on the longitudinal symmetry plane of the end platform, and at the same time, alternating voltage signals with a phase difference of 180 degrees are applied to the Z-axis bending ceramic groups of two other piezoelectric actuators located on both sides of the symmetry plane, and the frequencies of the three signals are all matched to the bending resonant mode around the Z-axis, the end platform is excited to generate rotational vibration around the X-axis. When an in-phase alternating voltage signal is applied to the three piezoelectric actuators in a bending resonant ceramic array around the Y-axis, and the frequency matches the bending resonant mode around the Y-axis, the bending resonant mode can excite translational vibration along the Z-axis and rotational vibration around the Y-axis of the end platform during transmission. When alternating voltage signals with a phase difference of 180 degrees are applied to the two piezoelectric actuators on both sides of the plane of symmetry, and the frequencies of the two signals are matched to the bending resonant mode around the Y-axis, the end platform is excited to generate rotational vibration around the X-axis. When an in-phase alternating voltage signal is applied to the longitudinal resonant ceramic assembly of three piezoelectric actuators, and the frequency matches the longitudinal resonant mode, the longitudinal resonant mode can excite translational vibration of the end platform along the X-axis during transmission. When the longitudinal vibration ceramic groups of the two piezoelectric actuators located on both sides of the plane of symmetry are respectively applied with alternating voltage signals that are 180 degrees out of phase, and the frequencies of the two signals are matched with the longitudinal vibration resonant mode, the end platform is excited to generate rotational vibration around the Z-axis. When an alternating voltage signal is applied to the longitudinal vibration ceramic group of one piezoelectric actuator located on the longitudinal symmetry plane of the end platform, and at the same time, alternating voltage signals with a phase difference of 180 degrees are applied to the longitudinal vibration ceramic groups of two other piezoelectric actuators located on both sides of the symmetry plane, and the frequencies of the three signals are all matched to the longitudinal vibration resonant mode, the end platform is excited to generate rotational vibration around the Y-axis.

[0014] The beneficial effects of this invention are as follows: 1. Breaking through the limitations of degrees of freedom and achieving six degrees of freedom omnidirectional control: Compared with the existing longitudinal-bending composite piezoelectric platforms that can usually only achieve vibration of 2-3 degrees of freedom, this invention, through the symmetrical arrangement of three sandwich piezoelectric actuators in the same direction, and using the principle of vector synthesis, achieves for the first time independent and controllable output of six degrees of freedom, including translation along the X / Y / Z axes and rotation around the X / Y / Z axes, which is suitable for complex spatial motion tasks.

[0015] 2. Optimized structural layout, balancing symmetry and compactness: The three piezoelectric actuators are arranged in a "1+2" ​​mirror symmetric triangular configuration, which retains the torque balance advantage brought by the bilateral symmetry, enhances the axial excitation capability through the central actuator, effectively suppresses parasitic modes, and maintains the advantage of low platform height, making it easy to integrate in narrow spaces.

[0016] 3. Reliable pre-tightening and extended service life: The bolt thread fastening provides stable pre-pressure to the piezoelectric ceramic, avoiding tensile stress damage and ensuring long-term operational reliability.

[0017] 4. Compact integration and strong adaptability: The overall height and volume are reduced, making it easy to embed in minimally invasive instruments, microfluidic devices or precision optomechanical systems.

[0018] 5. Flexible excitation, no additional circuit required: By adjusting the signal phase and frequency, multiple motion modes can be switched. Rotation or translation can be achieved through phase modulation using the same channel, greatly simplifying the control system.

[0019] 6. Adjustable vibration parameters: By adjusting the stiffness of the flexible hinge, the vibration amplitude and resonant frequency can be adjusted without changing the shape of the platform, supporting customized design.

[0020] In summary, the three-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform and its excitation method proposed in this invention are applicable to fields such as laser micromachining, ultrasonic-assisted cutting, cell manipulation, microrobots and active vibration suppression, and have broad application prospects. Attached Figure Description

[0021] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of the three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform described in Embodiment 1. Figure 2 This is an exploded view of the three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform described in Embodiment 1. Figure 3 This is a full cross-sectional schematic diagram of the three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform described in Embodiment 1. Figure 4 This is a schematic diagram of the vibration of the three-sandwich piezoelectric actuator co-arranged multidimensional vibration platform described in Embodiment 8, when a co-phase alternating voltage signal is applied and the frequency is matched to the bending resonant mode around the Z-axis, the end platform translates along the Y-axis and rotates around the Z-axis. Figure 5 This is a schematic diagram illustrating the vibration of the end platform rotating around the X-axis when an alternating voltage signal is applied to one of the Z-axis bending ceramic groups in the three-sandwich piezoelectric actuator co-arranged multidimensional vibration platform described in Embodiment 8, and alternating voltage signals with a phase difference of 180 degrees and whose frequencies are all matched to the bending resonance mode around the Z-axis are applied to the other Z-axis bending ceramic groups.

[0023] Figure 6 This is a schematic diagram of the vibration of the three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform described in Embodiment 8, when a co-phase alternating voltage signal is applied and the frequency is matched to the bending resonance mode around the Y-axis, the end platform translates along the Z-axis and rotates around the Y-axis. Figure 7 This is a schematic diagram showing the vibration of the end platform rotating around the X-axis when two piezoelectric actuators located on both sides of the symmetry plane of the multidimensional vibration platform with co-directional arrangement of three sandwich piezoelectric actuators are respectively applied with alternating voltage signals that are 180 degrees out of phase and whose frequencies are matched in the bending resonance mode around the Y-axis.

[0024] Figure 8 This is a schematic diagram of the vibration of the three-sandwich piezoelectric actuator co-arranged multidimensional vibration platform described in Embodiment 8, when a co-phase alternating voltage signal is applied and the frequency matches the longitudinal resonance mode, and the end platform translates along the X-axis. Figure 9This is a schematic diagram showing the vibration of the end platform rotating around the Z-axis when the longitudinal vibration ceramic groups of the two piezoelectric actuators located on both sides of the plane of symmetry in the multidimensional vibration platform of the three-sandwich piezoelectric actuators arranged in the same direction are respectively applied with alternating voltage signals with a phase difference of 180 degrees and the frequencies match the longitudinal vibration resonance mode. Figure 10 This is a schematic diagram illustrating the vibration of the end platform rotating around the Y-axis when an alternating voltage signal is applied to the longitudinal vibration ceramic group located on the longitudinal symmetry plane of the end platform in the three-sandwich piezoelectric actuator co-arranged multidimensional vibration platform described in Embodiment 8, while alternating voltage signals with a phase difference of 180 degrees and frequency matching the longitudinal vibration resonance mode are applied to the other two longitudinal vibration ceramic groups located on both sides of the symmetry plane.

[0025] Among them, 1-central platform; 2-piezoelectric actuator; 3-end cap; 4-bolt; 1-central platform includes 1-1-end platform, 1-2-flexible hinge, 1-3-amplitude rod. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0027] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0028] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0029] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0030] Implementation Method 1, see Figure 1 , Figure 2 and Figure 3 This embodiment describes a three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform, the vibration platform comprising: 1. Central platform; 2. Three piezoelectric actuators; 3. Three end caps; 4. Three bolts; The central platform 1 is a composite structure that integrates multiple functional sub-components. The sub-components include at least an end platform 1-1, three flexible hinges 1-2, and three amplitude rods 1-3. The end platform 1-1 is a mirror-symmetric structure, and its symmetry plane is a longitudinal plane passing through the geometric center of the end platform 1-1 and along the vibration transmission direction; The amplitude rod 1-3 is a variable cross-section rod body, including a large diameter end and a small diameter end. The end faces of the large diameter end and the small diameter end are parallel to each other. The large diameter end is provided with a threaded hole. The piezoelectric actuator 2 has parallel end faces and a through hole along the axial direction; The two ends of the end cap 3 are parallel and have an axial through hole; One end face of the piezoelectric actuator 2 is attached to the upper end face of the end cover 3, and the other end face is attached to the large diameter end face of the amplitude rod 1-3. The bolt 4 passes through the through holes of the end cap 3 and the piezoelectric actuator 2 in sequence and is screwed into the large-diameter end threaded hole of the amplitude rod 1-3 to achieve axial fastening of the three. The axes of the bolt 4, the end cap 3 and the piezoelectric actuator 2 are collinear. The nut end face of the bolt 4 fits against the lower end face of the end cap 3 to provide preload. The small-diameter end of the amplitude rod 1-3 is connected to the lower end face of the flexible hinge 1-2, and the upper end face of the flexible hinge 1-2 is connected to the lower end face of the end platform 1-1. Both the amplitude rod 1-3 and the piezoelectric actuator 2 are provided with brackets for fixed constraint in the circumferential direction; The structure of the vibration platform is arranged in a mirror-symmetric manner about the longitudinal symmetry plane passing through the center of the end platform 1-1; The three piezoelectric actuators 2 are arranged in a triangle along the longitudinal symmetry plane of the vibration platform: the axis of one piezoelectric actuator 2 is located on the longitudinal symmetry plane, and the other two piezoelectric actuators 2 are arranged on both sides of the symmetry plane and are mirror-symmetrical about the symmetry plane. With the geometric center of end platform 1-1 as the origin, the X-axis is along the vertical axis of the end platform (pointing from piezoelectric actuator 2 to end platform 1-1), the Y-axis is perpendicular to the longitudinal symmetry plane of end platform 1-1 and points to the left, and the Z-axis satisfies the right-hand rule. All descriptions of end platform 1-1 "along the X / Y / Z axes" and "around the X / Y / Z axes" are based on this coordinate system.

[0031] In this embodiment, bolts 4 pass through the end cap 3 and the piezoelectric actuator 2 in sequence and engage with the threaded holes of the amplitude rod 1-3 to axially fasten the three together, thereby applying a stable initial preload to the piezoelectric ceramic. This preload can effectively prevent it from bearing tensile stress during operation, prevent performance degradation or structural damage caused by tensile failure, and significantly improve service life and output stability.

[0032] The symmetrical arrangement of the three piezoelectric actuators 2 effectively balances the system's inertial force and torque, suppresses force eccentricity and unexpected parasitic vibrations caused by unilateral excitation, and improves the purity of the main modes and the consistency of dynamic response.

[0033] This vibration platform is not only suitable for precision manufacturing scenarios that require high-dimensional and high-frequency vibration control, such as laser micromachining and ultrasonic-assisted cutting, but can also be used in active vibration suppression systems to counteract external high-frequency interference; its six-degree-of-freedom output capability has significant advantages in complex trajectory control and multi-directional vibration suppression.

[0034] The overall design adopts a slender shape, which extends the vibration transmission path while reducing the cross-sectional area. This is beneficial for high-order mode separation and coupling control, and significantly reduces the platform height and space occupation, making it easy to integrate into confined environments such as minimally invasive surgical instruments, microfluidic chips, or precision optomechanical systems.

[0035] By selectively exciting the longitudinal, Y-axis or Z-axis bending ceramic groups in different piezoelectric actuators 2 and adjusting the signal phase and frequency, one-dimensional to six-dimensional vibration output can be flexibly achieved; the vibration amplitude and resonant frequency of the end platform 1-1 can be customized by adjusting the stiffness of the flexible hinge 1-2 without changing the overall shape or height of the platform, supporting optimized design for specific working conditions.

[0036] Implementation Method 2: This implementation method further defines the three-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform described in Implementation Method 1. The piezoelectric actuator 2 includes any combination of longitudinal vibration ceramic group, Y-axis bending vibration ceramic group, and Z-axis bending vibration ceramic group. Each ceramic group is provided with a driving electrode and a grounding electrode. By applying a voltage between the driving electrode and the grounding electrode, the corresponding vibration mode can be excited respectively. When the piezoelectric actuator 2 includes all three types of ceramic groups, six-degree-of-freedom omnidirectional control can be realized (see Implementation Method 8). When it contains only a single ceramic group, vibration with 1-2 degrees of freedom can be realized.

[0037] In this embodiment, the piezoelectric actuator 2 possesses high stiffness characteristics, making it suitable for vibration applications in the high-frequency and even ultrasonic frequency ranges. Its integrated longitudinal, Y-axis, and Z-axis bending ceramic groups respond rapidly under voltage excitation. Compared to traditional motors or mechanical transmission mechanisms, it can operate at higher frequencies and consumes less power. This high-stiffness structure helps to increase the overall resonant frequency of the system, achieving efficient ultrasonic excitation, and is particularly suitable for precision operation scenarios with stringent requirements for environmental noise and vibration stability.

[0038] Furthermore, by using three piezoelectric actuators 2 to coordinate excitation in a "1+2" ​​mirror symmetric manner, the longitudinal vibration, bending vibration around the Y-axis, and bending vibration around the Z-axis modes independently excited by each actuator can be spatially vector synthesized, effectively coupled and extended into the three-axis translational motion along the X, Y, and Z axes and the three-axis rotation around the X, Y, and Z axes of the end platform 1-1, thereby realizing a complete six-degree-of-freedom high-frequency micro-vibration output, significantly enhancing the platform's control capability in complex spatial motion tasks.

[0039] Implementation Method 3: This implementation method further defines the three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform described in Implementation Method 2. The piezoelectric actuator 2 can be a stacked type, a patch type, a piezoelectric tube type, or any combination thereof, to adapt to different displacement output and mechanical response requirements.

[0040] The structure of the piezoelectric actuator 2 can be flexibly selected according to specific working conditions. A stacked structure offers large output displacement and high stiffness, suitable for high-frequency, high-output scenarios; a surface-mount structure is small in size and low in power consumption, suitable for applications with limited energy and space; and a piezoelectric tube structure combines radial and axial deformation capabilities, suitable for multi-directional excitation requirements. By rationally selecting or combining different structural forms, mechanical performance and driving efficiency can be balanced within a limited installation space, thereby optimizing the overall dynamic response characteristics of the platform.

[0041] Implementation Method 4: This implementation method further defines the three-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform described in Implementation Method 1. The flexible hinge 1-2 is fixed to the end platform 1-1 and the amplitude rod 1-3 by means of threaded connection, adhesive bonding, welding or integral molding.

[0042] The connection method between the flexible hinge 1-2 and the end platform 1-1 and the amplitude transformer 1-3 directly affects the structural integrity and dynamic reliability of the system. Appropriate selection of the connection process can effectively suppress loosening, interface slippage, or fatigue damage that may occur under high-frequency vibration or alternating loads, ensuring long-term stable operation.

[0043] Specifically, threaded connections facilitate disassembly and maintenance, making them suitable for applications requiring periodic adjustments or replacements; adhesive bonding or welding provides high interface stiffness and integrity, suitable for applications with high structural strength requirements; integral molding refers to the flexible hinge 1-2 being integrally machined with the end platform 1-1 and the amplitude transformer 1-3 to form an interface-free structure, belonging to a generalized fixed connection method, achieving optimal mechanical continuity, and suitable for high-reliability, maintenance-free integrated applications. Depending on material properties, assembly conditions, and usage requirements, the above connection methods can be used individually or in combination to balance performance, manufacturability, and service life.

[0044] Implementation Method 5: This implementation method further defines the three-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform described in Implementation Method 1. The flexible hinges 1-2 are biaxially symmetrical or omnidirectional and are used to transmit linear motion and multi-directional bending deformation.

[0045] The type of flexible hinge 1-2 directly affects motion transmission efficiency and modal characteristics. The biaxially symmetric structure has regular geometry and good manufacturability, which is conducive to maintaining the symmetry and consistency of vibration modes and is suitable for high-precision resonance control scenarios; the universal type is designed like a mechanical universal joint and has multi-directional bending capability, which is suitable for applications that require large-angle or compound-directional deformation.

[0046] Appropriate selection can optimize the transmission path of excitation force, reduce energy loss, and suppress the excitation of non-dominant modes. By matching the hinge configuration with the platform's motion requirements, the expected bending or deflection response can be achieved while ensuring structural strength, effectively reducing stray vibrations and improving the system's dynamic stability and positioning accuracy.

[0047] Implementation Method Six: This implementation method further defines the three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform described in Implementation Method One. The vibration platform can be installed and fixed by means of the amplitude rod 1-3 bracket, the piezoelectric actuator 2 bracket, or a combination of the two, to achieve efficient vibration energy coupling.

[0048] The brackets are arranged in the node areas of each major mode of the vibration platform, providing reliable installation support while minimizing interference with the working modes. This design ensures that the vibration energy generated by the piezoelectric actuator 2 is efficiently transmitted to the end platform 1-1, and prevents external constraints from introducing additional stiffness or damping, which helps maintain the high electromechanical conversion efficiency and modal purity of the system.

[0049] Implementation Method Seven: This implementation method further defines the three-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform described in Implementation Method One. The vibration platform comprises three functional assemblies, each assembly consisting of a bolt 4, an end cap 3, a piezoelectric actuator 2, an amplitude transformer 1-3, and a flexible hinge 1-2 connected sequentially along the vibration transmission path. In a preferred configuration, the axes of the internal parts of each assembly are collinear, and the overall axes of the three assemblies are parallel to each other. As an optional solution, the three assemblies can also be arranged non-collinearly, in which case the included angle between any two pairs of axes of the three amplitude transformers 1-3, the three flexible hinges 1-2, and the three piezoelectric actuators 2 is less than 90 degrees.

[0050] The relative spatial arrangement of the three functional assemblies directly affects the vibration amplitude distribution, coupling characteristics between degrees of freedom, and overall structural compactness of the end-platform 1-1. With the preferred parallel axis configuration, the system has a minimum envelope size and low modal cross-interference, which is beneficial for high-precision independent control. When a non-collinear arrangement is adopted, the vibration coupling effect in a specific direction can be enhanced by adjusting the angles between the axes of each assembly (any pairwise angle less than 90 degrees), thereby expanding the multidimensional motion capability. During the design process, synergistic optimization can be performed between structural compactness, motion decoupling, and modal excitation efficiency according to application requirements.

[0051] Implementation Method 8, see below Figures 4 to 10 This embodiment describes a three-sandwich piezoelectric actuator co-rotating multidimensional vibration platform. The excitation method described in this embodiment is based on the three-sandwich piezoelectric actuator co-rotating multidimensional vibration platform described in Embodiment 1. The excitation method includes: When an in-phase alternating voltage signal is applied to the Z-axis bending resonant ceramic assembly of the three piezoelectric actuators 2, and the frequency matches the Z-axis bending resonant mode, due to the geometric symmetry between the amplitude transformer 1-3 and the flexible hinge 1-2, this bending resonant mode can excite translational vibration along the Y-axis and rotational vibration around the Z-axis of the end platform 1-1 during transmission, such as... Figure 4 As shown; When an alternating voltage signal is applied to the Z-axis bending ceramic assembly of one piezoelectric actuator 2 located on the longitudinal symmetry plane of the end platform 1-1, and simultaneously, alternating voltage signals with a 180-degree phase difference are applied to the Z-axis bending ceramic assemblies of two other piezoelectric actuators 2 located on either side of the symmetry plane, and the frequencies of all three signals match the bending resonant mode around the Z-axis, the end platform 1-1 is excited to generate rotational vibration around the X-axis, as shown below. Figure 5 As shown; When an in-phase alternating voltage signal is applied to the three piezoelectric actuators 2 around the Y-axis bending resonant ceramic assembly, and the frequency matches the bending resonant mode around the Y-axis, this bending resonant mode can excite translational vibration along the Z-axis and rotational vibration around the Y-axis of the end platform 1-1 during transmission, such as... Figure 6 As shown; When alternating voltage signals with a phase difference of 180 degrees are applied to the two piezoelectric actuators 2 located on both sides of the plane of symmetry, and the frequencies of both signals match the bending resonant mode around the Y-axis, the end platform 1-1 is excited to generate rotational vibration around the X-axis, as shown below. Figure 7 As shown; When an in-phase alternating voltage signal is applied to the longitudinal resonant ceramic assembly of the three piezoelectric actuators 2, and the frequency matches the longitudinal resonant mode, this longitudinal resonant mode can excite translational vibration of the end platform 1-1 along the X-axis during transmission, such as... Figure 8 As shown; When alternating voltage signals with a phase difference of 180 degrees are applied to the longitudinal resonant ceramic assemblies of the two piezoelectric actuators 2 located on opposite sides of the plane of symmetry, and the frequencies of both signals match the longitudinal resonant mode, the end platform 1-1 is excited to generate rotational vibration around the Z-axis, as shown below. Figure 9 As shown; When an alternating voltage signal is applied to the longitudinal resonant ceramic assembly of one piezoelectric actuator 2 located on the longitudinal symmetry plane of the end platform 1-1, and simultaneously, alternating voltage signals with a phase difference of 180 degrees are applied to the longitudinal resonant ceramic assemblies of two other piezoelectric actuators 2 located on both sides of the symmetry plane, and the frequencies of all three signals match the longitudinal resonant mode, the end platform 1-1 is excited to generate rotational vibration around the Y-axis, as shown below. Figure 10 As shown.

[0052] The excitation method described in this embodiment is based on the three-piezoelectric actuator co-directional arrangement multidimensional vibration platform described in Embodiment 1. Three piezoelectric actuators 2 are used in a "1+2" ​​mirror symmetry configuration to collaboratively excite the longitudinal vibration, bending vibration around the Y-axis, and bending vibration around the Z-axis ceramic assembly. This successfully achieves high-frequency micro-vibration output with six degrees of freedom: three-axis translational motion along the X, Y, and Z axes and three-axis rotation around the X, Y, and Z axes. This multidimensional excitation strategy supports flexible switching between independent and coupled motion modes, meeting the needs of advanced applications such as complex trajectory generation, multi-directional micro-manipulation, and omnidirectional active vibration suppression.

[0053] The method uses a piezoelectric actuator 2 as the actuation core, fully utilizing the high rigidity of the sandwich structure and the rapid response capability of the inverse piezoelectric effect to achieve high-precision, high-bandwidth vibration control at the micron to nanometer scale. Compared with traditional mechanical or electromagnetic drive methods, this solution has no moving parts contact, no frictional wear, and has advantages such as long life, high reliability, and maintenance-free operation. It is particularly suitable for precision engineering systems in clean environments, with high stability requirements, or for long-term continuous operation.

[0054] Implementation Method Nine: This implementation method provides a specific embodiment of the three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform described in Implementation Method One, and also serves to explain Implementation Methods Two to Eight. Specifically: A three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform mainly includes: 1. Central platform; 2. Three piezoelectric actuators; 3. Three end caps; 4. Three bolts; The central platform 1 is a composite structure that integrates multiple functional sub-components. The sub-components include at least an end platform 1-1, three flexible hinges 1-2, and three amplitude rods 1-3. The end platform 1-1 is a mirror-symmetric structure, and its symmetry plane is a longitudinal plane passing through the geometric center of the end platform 1-1 and along the vibration transmission direction; The amplitude rod 1-3 is a variable cross-section rod body, including a large diameter end and a small diameter end. The end faces of the large diameter end and the small diameter end are parallel to each other. The large diameter end is provided with a threaded hole. The piezoelectric actuator 2 has parallel end faces and a through hole along the axial direction; The two ends of the end cap 3 are parallel and have an axial through hole; One end face of the piezoelectric actuator 2 is attached to the upper end face of the end cover 3, and the other end face is attached to the large diameter end face of the amplitude rod 1-3. The bolt 4 passes through the through holes of the end cap 3 and the piezoelectric actuator 2 in sequence and is screwed into the large-diameter end threaded hole of the amplitude rod 1-3 to achieve axial fastening of the three. The axes of the bolt 4, the end cap 3 and the piezoelectric actuator 2 are collinear. The nut end face of the bolt 4 fits against the lower end face of the end cap 3 to provide preload. The small-diameter end of the amplitude rod 1-3 is connected to the lower end face of the flexible hinge 1-2, and the upper end face of the flexible hinge 1-2 is connected to the lower end face of the end platform 1-1. Both the amplitude rod 1-3 and the piezoelectric actuator 2 are provided with brackets for fixed constraint in the circumferential direction; The structure of the vibration platform is arranged in a mirror-symmetric manner about the longitudinal symmetry plane passing through the center of the end platform 1-1; The three piezoelectric actuators 2 are arranged in a triangle along the longitudinal symmetry plane of the vibration platform: the axis of one piezoelectric actuator 2 is located on the longitudinal symmetry plane, and the other two piezoelectric actuators 2 are arranged on both sides of the symmetry plane and are mirror-symmetrical about the symmetry plane. With the geometric center of end platform 1-1 as the origin, the X-axis is along the vertical axis of the end platform (pointing from piezoelectric actuator 2 to end platform 1-1), the Y-axis is perpendicular to the longitudinal symmetry plane of end platform 1-1 and points to the left, and the Z-axis satisfies the right-hand rule. All descriptions of end platform 1-1 "along the X / Y / Z axes" and "around the X / Y / Z axes" are based on this coordinate system.

[0055] The piezoelectric actuator 2 includes any combination of longitudinal vibration ceramic group, bending vibration ceramic group around Y axis and bending vibration ceramic group around Z axis. Each ceramic group is provided with a driving electrode and a ground electrode. By applying a voltage between the driving electrode and the ground electrode, the corresponding vibration mode can be excited respectively.

[0056] The piezoelectric actuator 2 can be a stacked structure to adapt to different displacement output and mechanical response requirements.

[0057] The flexible hinges 1-2 are fixed to the end platform and the amplitude rod by an integral molding method.

[0058] The flexible hinges 1-2 are omnidirectional and are used to transmit linear motion and multi-directional bending deformation.

[0059] The vibration platform can be installed and fixed through the amplitude rod 1-3 bracket to achieve efficient vibration energy coupling.

[0060] The vibration platform comprises three functional assemblies. Each assembly consists of a bolt 4, an end cap 3, a piezoelectric actuator 2, an amplitude transformer 1-3, and a flexible hinge 1-2 connected sequentially along the vibration transmission path. The axes of the internal parts of each assembly are collinear, and the overall axes of the three assemblies are parallel to each other.

[0061] Reference Figure 4 When an in-phase alternating voltage signal is applied to the three piezoelectric actuators 2 and the frequency matches the bending resonant mode around the Z-axis, due to the geometric symmetry between the amplitude rod 1-3 and the flexible hinge 1-2, the bending resonant mode can excite the translational vibration of the end platform 1-1 along the Y-axis and the rotational vibration around the Z-axis during the transmission process. Reference Figure 5When an alternating voltage signal is applied to the Z-axis bending ceramic group of one piezoelectric actuator 2 located on the longitudinal symmetry plane of the end platform 1-1, and at the same time the Z-axis bending ceramic groups of the other two piezoelectric actuators 2 located on both sides of the symmetry plane are applied with alternating voltage signals that are 180 degrees out of phase, and the frequencies of the three signals are all matched to the bending resonant mode around the Z-axis, the end platform 1-1 is excited to generate rotational vibration around the X-axis. Reference Figure 6 When an in-phase alternating voltage signal is applied to the three piezoelectric actuators 2 around the Y-axis bending resonant ceramic group, and the frequency matches the bending resonant mode around the Y-axis, the bending resonant mode can excite the translational vibration of the end platform 1-1 along the Z-axis and the rotational vibration around the Y-axis during the transmission process. Reference Figure 7 When the two piezoelectric actuators 2 located on both sides of the plane of symmetry apply alternating voltage signals with a phase difference of 180 degrees to the ceramic groups of bending vibration around the Y-axis, and the frequencies of the two signals are matched with the bending resonance mode around the Y-axis, the end platform 1-1 is excited to generate rotational vibration around the X-axis. Reference Figure 8 When an in-phase alternating voltage signal is applied to the longitudinal vibration ceramic group of the three piezoelectric actuators 2, and the frequency matches the longitudinal vibration resonant mode, the longitudinal vibration mode can excite the translational vibration of the end platform 1-1 along the X-axis during the transmission process. Reference Figure 9 When the longitudinal vibration ceramic groups of the two piezoelectric actuators 2 located on both sides of the plane of symmetry are respectively applied with alternating voltage signals that are 180 degrees out of phase, and the frequencies of the two signals are matched with the longitudinal vibration resonant mode, the end platform 1-1 is excited to generate rotational vibration around the Z-axis. Reference Figure 10 When an alternating voltage signal is applied to the longitudinal vibration ceramic group of one piezoelectric actuator 2 located on the longitudinal symmetry plane of the end platform 1-1, and at the same time, alternating voltage signals with a phase difference of 180 degrees are applied to the longitudinal vibration ceramic groups of the other two piezoelectric actuators 2 located on both sides of the symmetry plane, and the frequencies of the three signals are all matched to the longitudinal vibration resonant mode, the end platform 1-1 is excited to generate rotational vibration around the Y-axis.

[0062] The vibration platform of this invention can achieve high-frequency micro-vibration output with a total of six degrees of freedom, including three-axis translation along the X, Y, and Z axes and three-axis rotation around the X, Y, and Z axes. It is suitable for high-level application scenarios such as complex trajectory generation, multi-dimensional micro-nano fabrication, precision operation, and omnidirectional active vibration suppression.

[0063] The technical solutions provided by the present invention have been described in further detail above with reference to the accompanying drawings in order to highlight their advantages and benefits, and are not intended to limit the present invention. Any modifications, combinations, improvements and equivalent substitutions of the present invention based on the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform, characterized in that, The multidimensional vibration platform includes a central platform (1), three piezoelectric actuators (2), three end caps (3), and three bolts (4). The central platform (1) is a composite structure that integrates multiple functional sub-components. The sub-components include at least an end platform (1-1), three flexible hinges (1-2), and three amplitude rods (1-3). The end platform (1-1) is a mirror-symmetric structure, and its symmetry plane is a longitudinal plane passing through the geometric center of the end platform (1-1) and along the vibration transmission direction; The amplitude rod (1-3) is a variable cross-section rod body, including a large diameter end and a small diameter end. The end faces of the large diameter end and the small diameter end are parallel to each other, and the large diameter end is provided with a threaded hole. The piezoelectric actuator (2) has parallel end faces and through holes along the axial direction; The end cap (3) has parallel two ends and is provided with an axial through hole; One end face of the piezoelectric actuator (2) is in contact with the upper end face of the end cap (3), and the other end face is in contact with the large diameter end face of the amplitude rod (1-3). The bolt (4) passes through the through holes of the end cap (3) and the piezoelectric actuator (2) in sequence and is screwed into the large-diameter end threaded hole of the amplitude rod (1-3) to achieve axial fastening of the three. The axes of the bolt (4), the end cap (3) and the piezoelectric actuator (2) are collinear. The nut end face of the bolt (4) fits against the lower end face of the end cap (3) to provide preload. The small-diameter end of the amplitude rod (1-3) is connected to the lower end face of the flexible hinge (1-2), and the upper end face of the flexible hinge (1-2) is connected to the lower end face of the end platform (1-1). Both the amplitude rod (1-3) and the piezoelectric actuator (2) are provided with brackets for fixing and constraining in the circumferential direction; The structure of the vibration platform is arranged in a mirror-symmetric manner about the longitudinal symmetry plane passing through the center of the end platform (1-1); The three piezoelectric actuators (2) are arranged in a triangle along the longitudinal symmetry plane of the vibration platform: the axis of one of the piezoelectric actuators (2) is located on the longitudinal symmetry plane, and the other two piezoelectric actuators (2) are arranged on both sides of the symmetry plane and are mirror symmetric about the symmetry plane.

2. The three-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform according to claim 1, characterized in that, A coordinate system is established with the geometric center of the end platform (1-1) as the origin. The X-axis points vertically from the piezoelectric actuator (2) to the end platform (1-1), the Y-axis is perpendicular to the longitudinal symmetry plane of the end platform (1-1) and points to the left, and the Z-axis is determined by the right-hand rule. The movement of the end platform (1-1) along the X / Y / Z axes and around the X / Y / Z axes is based on this coordinate system.

3. The three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to claim 1, characterized in that, The piezoelectric actuator (2) includes any combination of longitudinal vibration ceramic group, bending vibration ceramic group around Y axis and bending vibration ceramic group around Z axis; each ceramic group is provided with driving electrode and ground electrode, and the corresponding vibration mode can be excited by applying voltage between driving electrode and ground electrode respectively.

4. A three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to claim 1, characterized in that, The piezoelectric actuator (2) is a stacked, patch, piezoelectric tube, or any combination thereof, to adapt to different displacement output and mechanical response requirements.

5. A three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to claim 1, characterized in that, The flexible hinge (1-2) is fixed to the end platform (1-1) and the amplitude rod (1-3) by means of threaded connection, adhesive bonding, welding or integral molding.

6. A three-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform according to claim 1, characterized in that, The flexible hinge (1-2) is biaxially symmetrical or omnidirectional, used to transmit linear motion and multi-directional bending deformation.

7. A three-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform according to claim 1, characterized in that, The vibration platform is installed and fixed by means of an amplitude rod (1-3) bracket, a piezoelectric actuator (2) bracket or a combination of the two, so as to achieve efficient vibration energy coupling.

8. A three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to claim 1, characterized in that, The vibration platform comprises three functional assemblies. Each assembly consists of a bolt (4), an end cap (3), a piezoelectric actuator (2), an amplitude transformer (1-3), and a flexible hinge (1-2) connected sequentially along the vibration transmission path. The axes of the internal parts of each assembly are collinear, and the overall axes of the three assemblies are parallel to each other.

9. A three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to claim 8, characterized in that, When the three assemblies are arranged in a non-collinear manner, the axial angle between any two axes of the three amplitude rods (1-3), the three flexible hinges (1-2), and the three piezoelectric actuators (2) is less than 90 degrees.

10. An excitation method for a vibration platform, characterized in that, The method is based on a three-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to any one of claims 1-9, and the method includes: When an in-phase alternating voltage signal is applied to the Z-axis bending resonant ceramic assembly of the three piezoelectric actuators (2), and the frequency matches the Z-axis bending resonant mode, according to the geometric symmetry of the amplitude rod (1-3) and the flexible hinge (1-2), the bending resonant mode excites the translational vibration along the Y-axis and the rotational vibration around the Z-axis of the end platform (1-1) during the transmission process. When an alternating voltage signal is applied to the Z-axis bending ceramic group of a piezoelectric actuator (2) located on the longitudinal symmetry plane of the end platform (1-1), and at the same time, alternating voltage signals with a phase difference of 180 degrees are applied to the Z-axis bending ceramic groups of the other two piezoelectric actuators (2) located on both sides of the symmetry plane, and the frequencies of the three signals are all matched to the bending resonant mode around the Z-axis, the end platform (1-1) is excited to generate rotational vibration around the X-axis. When an in-phase alternating voltage signal is applied to the Y-axis bending resonant ceramic group of the three piezoelectric actuators (2), and the frequency matches the bending resonant mode around the Y-axis, the bending resonant mode can excite the translational vibration along the Z-axis and the rotational vibration around the Y-axis of the end platform (1-1) during the transmission process. When the two piezoelectric actuators (2) located on both sides of the plane of symmetry apply alternating voltage signals with a phase difference of 180 degrees to the ceramic groups of bending vibration around the Y-axis, and the frequencies of the two signals are matched with the bending resonance mode around the Y-axis, the end platform (1-1) is excited to generate rotational vibration around the X-axis. When an in-phase alternating voltage signal is applied to the longitudinal vibration ceramic group of the three piezoelectric actuators (2) and the frequency matches the longitudinal vibration resonant mode, the longitudinal vibration mode excites the translational vibration of the end platform (1-1) along the X-axis direction during the transmission process; When the longitudinal vibration ceramic groups of the two piezoelectric actuators (2) located on both sides of the plane of symmetry are respectively applied with alternating voltage signals that are 180 degrees out of phase, and the frequencies of the two signals are matched with the longitudinal vibration resonant mode, the end platform (1-1) is excited to generate rotational vibration around the Z-axis. When an alternating voltage signal is applied to the longitudinal vibration ceramic group of one piezoelectric actuator (2) located on the longitudinal symmetry plane of the end platform (1-1), and at the same time, the longitudinal vibration ceramic groups of the other two piezoelectric actuators (2) located on both sides of the symmetry plane apply alternating voltage signals with a phase difference of 180 degrees, and the frequencies of the three signals are all matched with the longitudinal vibration resonant mode, the end platform (1-1) is excited to generate rotational vibration around the Y-axis.

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