Substrate conveying device

Abstract

The invention relates to the technical field of die bonding equipment, and discloses a substrate transporting device which comprises a workbench, a first transferring module, a second transferring module and a positioning assembly, the workbench is provided with a conveying channel extending in the first direction, the conveying channel is used for bearing a substrate, and the conveying channel is provided with a positioning station and a machining station which are arranged in the first direction; the first transferring module and the second transferring module are arranged on the workbench in the first direction, the positioning assembly is connected to the workbench and arranged corresponding to the positioning station, and in practical application, after a base plate is input to the conveying channel, the first transferring module pushes the base plate to the positioning station, and the second transferring module pushes the base plate to the positioning station. According to the substrate conveying device, the positioning assembly limits the position of the substrate at the positioning station, then the second transferring module transfers the substrate from the positioning station to the machining station, due to the fact that the first transferring module transfers the substrate in a pushing mode, a clamping structure does not need to be arranged, the structure of the substrate conveying device is simplified, and the structure of the substrate conveying device is relatively simple.

Description

Technical Field

[0001] This invention belongs to the field of die bonding equipment, and more specifically, relates to a substrate transport device. Background Technology

[0002] A die bonder is an automated device that enables the bonding of chips to substrates. The die bonder includes a substrate transport device, which is used to transport the substrate to the processing station. In related technologies, the substrate transport device has a transport channel. The substrate transport device clamps the substrate through a gripper mechanism, thereby driving the substrate to complete the transport action on the transport channel. This type of substrate transport device drives the substrate to transport by clamping, and its structure is complex. Summary of the Invention

[0003] The main objective of this invention is to provide a substrate transport device with a relatively simple structure.

[0004] According to a first aspect of the present invention, a substrate transport device is provided, comprising a worktable, a first transfer module, a second transfer module, and a positioning component. The worktable has a transport channel extending along a first direction for carrying a substrate. The transport channel has a positioning station and a processing station disposed along the first direction. The first transfer module and the second transfer module are disposed on the worktable along the first direction. The positioning component is connected to the worktable and is disposed corresponding to the positioning station. The first transfer module is used to push the substrate on the transport channel along the first direction to transport the substrate to the positioning station. The positioning component is used to position the substrate pushed by the first transfer module to the positioning station. The second transfer module is used to transfer the substrate located at the positioning station to the processing station along the first direction.

[0005] In a specific embodiment of the present invention, the substrate transport device has a second direction and a third direction, wherein the first direction, the second direction, and the third direction are perpendicular to each other;

[0006] The first transfer module includes a first transfer seat, a first drive assembly, a first connecting rod, and a first pusher block. The first transfer seat is connected to the worktable and is located on one side of the conveying channel in the second direction. The first transfer seat is slidable along the first direction. The first drive assembly is connected to the first transfer seat. The first connecting rod extends along the second direction. One end of the first connecting rod along its length is connected to the first drive assembly, and the other end is connected to the first pusher block. The first pusher block is disposed along the third direction corresponding to the conveying channel. The first pusher block is used to push the substrate. The first drive assembly is used to drive the first connecting rod to move along the third direction, thereby driving the first pusher block to move along the third direction.

[0007] In a specific embodiment of the present invention, the substrate has a positioning hole, and when the substrate is disposed in the conveying channel, the axis of the positioning hole extends along the third direction;

[0008] The second transfer module includes a second transfer seat, a second drive assembly, a connecting arm, and a positioning post. The second transfer seat is connected to the worktable and is located on one side of the conveying channel in the second direction. The second transfer seat is slidable along the first direction. The second drive assembly is connected to the second transfer seat. One end of the connecting arm along the second direction is connected to the second drive assembly, and the other end is connected to the positioning post. The positioning post is arranged along the third direction corresponding to the conveying channel, and its length direction extends along the third direction. The second drive assembly is used to drive the connecting arm to move along the third direction, so that the positioning post is inserted into or disengaged from the positioning hole.

[0009] In a specific embodiment of the present invention, the second driving assembly includes a first driving member, a first rack, a connecting shaft assembly, a first gear, a second gear, a second rack, and a connecting seat. The first driving member is fixedly connected to the second transfer seat. The first rack extends along a first direction and is connected to the first driving member. The first driving member is used to drive the first rack to move along the first direction. The connecting shaft assembly is rotatably connected to the second transfer seat. The rotation axis of the connecting shaft assembly extends along a second direction. The first gear and the second gear are fixedly connected at intervals along the second direction. The first gear meshes with the first rack, and the second gear meshes with the second rack. The second rack is fixedly connected to the connecting seat. The connecting seat is slidably connected to the second transfer seat. The sliding direction of the connecting seat is parallel to the third direction. The connecting arm is fixedly connected to the connecting seat.

[0010] In a specific embodiment of the present invention, the substrate transport device further includes a third transfer module, which is connected to the worktable. In the first direction, the third transfer module is located on the side of the second transfer module away from the first transfer module. The third transfer module is used to push the substrate located at the processing station to move in the first direction away from the positioning station.

[0011] The third transfer module includes a third transfer seat, a third drive assembly, a second connecting rod, a collision monitoring assembly, and a second pusher block. The third transfer seat is connected to the worktable and is located on one side of the conveying channel in the second direction. The third transfer seat can slide along the first direction. The fourth drive assembly is connected to the third transfer seat. The second connecting rod extends along the second direction, with one end connected to the third drive assembly and the other end connected to the collision monitoring assembly. The second pusher block is connected to the collision monitoring assembly and is used to push the substrate. The third drive assembly is used to drive the second connecting rod to move along the third direction, thereby driving the collision monitoring assembly and the second pusher block to move along the third direction. The collision monitoring assembly is used to monitor whether the substrate pushed by the second pusher block collides.

[0012] In a specific embodiment of the present invention, the collision monitoring component includes a first mounting base, a sensor, a sensing rod, and a spring. The first mounting base is fixedly connected to a second connecting rod. The first mounting base has a first connecting ear and a second connecting ear spaced apart along a first direction. The sensor is connected to the first mounting base and is located on the side of the first connecting ear away from the second connecting ear along the first direction. The length direction of the sensing rod extends along the first direction. The sensing rod passes through the first connecting ear and the second connecting ear and is slidable along the first direction. In the first direction, the end of the sensing rod away from the first connecting ear is connected to a second pusher block. The sensing rod has a limiting ring arranged around its axis. The limiting ring is located between the first connecting ear and the second connecting ear and contacts the second connecting ear. The spring is sleeved on the sensing rod and extends along the first direction. In the first direction, one end of the spring contacts the first connecting ear and the other end contacts the limiting ring. The sensor is used to monitor the position of the sensing rod.

[0013] In a specific embodiment of the present invention, the first connecting ear includes an ear body and an adjusting block. The ear body is connected to the second mounting base, the adjusting block is threadedly connected to the ear body, and the adjusting block can be adjusted in position along the first direction. The spring is in contact with the adjusting block.

[0014] In a specific embodiment of the present invention, the substrate transport device has a second direction and a third direction, wherein the first direction, the second direction, and the third direction are perpendicular to each other;

[0015] The positioning component includes a second mounting base, a fourth driving component, and a positioning block. The second mounting base is connected to the worktable and is located in the conveying channel and corresponding to the positioning station. The fourth driving component is connected to the second mounting base, and the positioning block is connected to the fourth driving component. The fourth driving component is used to drive the positioning block to move along the third direction so that the positioning block blocks or releases the substrate.

[0016] In a specific embodiment of the present invention, the substrate transport device has a second direction, and the first direction and the second direction are perpendicular to each other;

[0017] The worktable includes a first base, a second base, and a fifth drive assembly. The first base has a first plate, the thickness direction of which extends along the second direction. The first plate and the second base form the conveying channel. The fifth drive assembly is connected to the first base and is used to drive the first base to move along the second direction to adjust the size of the conveying channel in the second direction.

[0018] The first transfer module and the second transfer module are connected to the first base, and the positioning component is connected to the second base.

[0019] In a specific embodiment of the present invention, the substrate transport device has a third direction, wherein the first direction, the second direction, and the third direction are perpendicular to each other;

[0020] The second base includes a second plate, a sixth drive assembly, and a mounting plate. The thickness direction of the second plate extends along the second direction. The second plate and the first plate are spaced apart along the second direction to form the conveying channel. The sixth drive assembly is connected to the second plate. The thickness direction of the mounting plate extends along the third direction. The mounting plate is connected to the sixth drive assembly. In the second direction, the mounting plate is located between the first plate and the second plate.

[0021] The substrate transport device further includes a eutectic assembly, which includes a heating table, a cover plate, and an air knife. The heating table is connected to the mounting plate and is located at the processing station of the transport channel. The cover plate is connected to the second plate and is located on the side of the heating table away from the mounting plate along the third direction. The cover plate and the heating table are spaced apart. The cover plate has clearance holes and the air knife is connected to the cover plate. The air knife is provided on both sides of the clearance holes in the first direction.

[0022] The sixth driving component is used to drive the mounting plate to move along the third direction so that the heating stage and the cover plate cooperate to clamp the substrate; when the cover plate is in contact with the substrate, the cover plate and the substrate form an air cavity, the air cavity is used to allow inert gas to pass through, and the clearance hole communicates with the air cavity.

[0023] One of the above-described technical solutions of the present invention has at least one of the following advantages or beneficial effects:

[0024] In the substrate transport device of the present invention, after the substrate is input into the transport channel, the first transfer module pushes the substrate to the positioning station, and the positioning component defines the position of the substrate at the positioning station. Then, the second transfer module transfers the substrate from the positioning station to the processing station. Since the first transfer module realizes the transfer of the substrate by pushing, it does not need to set up a clamping structure, which simplifies the structure of the substrate transport device, making the structure of the substrate transport device relatively simple. In addition, the setting of the positioning component can define the transfer position of the substrate, which can effectively counteract the positional displacement of the substrate caused by inertia during the pushing process. The substrate can accurately stop at the positioning station, providing a reliable position reference for the second transfer module to transfer the substrate, ensuring the alignment accuracy of the substrate at the processing station. Attached Figure Description

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0026] Figure 1 This is a structural diagram of the substrate transport device according to an embodiment of the present invention;

[0027] Figure 2 This is an embodiment of the present invention. Figure 1 Enlarged diagram of A in the middle;

[0028] Figure 3 This is a structural diagram of the second transfer module according to an embodiment of the present invention;

[0029] Figure 4 This is a schematic diagram of the structure of the second transfer seat, the second drive assembly, and the connecting arm in an embodiment of the present invention.

[0030] Figure 5This is a structural diagram of the third transfer module according to an embodiment of the present invention;

[0031] Figure 6 This is a structural diagram of the third transfer module in an embodiment of the present invention from another angle;

[0032] Figure 7 This is a structural diagram of the collision detection component and the second pusher block in an embodiment of the present invention;

[0033] Figure 8 This is a structural diagram of the positioning component according to an embodiment of the present invention;

[0034] Figure 9 This is an embodiment of the present invention. Figure 1 Enlarged diagram of B in the middle;

[0035] Figure 10 This is a structural diagram of the second base according to an embodiment of the present invention;

[0036] Figure 11 This is a structural diagram of the eutectic component according to an embodiment of the present invention.

[0037] The figure labels for each figure are as follows:

[0038] 1. Workbench; 101. Conveying channel; 11. First base; 111. First plate; 12. Second base; 121. Second plate; 122. Sixth drive assembly; 123. Mounting plate; 13. Fifth drive assembly;

[0039] 2. First transfer module; 21. First transfer seat; 211. First seat body; 2111. First connecting plate; 212. Second seat body; 2121. Second connecting plate; 2121A. Accommodation hole; 213. Connecting bolt; 214. Rotary wheel; 22. First drive assembly; 23. First connecting rod; 24. First pusher block;

[0040] 3. Second transfer module; 31. Second transfer seat; 32. Second drive assembly; 321. First drive component; 322. First rack; 323. Connecting shaft assembly; 324. First gear; 325. Second gear; 326. Second rack; 327. Connecting seat; 33. Connecting arm; 34. Positioning post;

[0041] 4. Positioning component; 41. Second mounting base; 42. Fourth drive component; 43. Positioning block;

[0042] 5. Third transfer module; 51. Third transfer seat; 52. Third drive assembly; 53. Second connecting rod; 54. Collision monitoring assembly; 541. First mounting base; 5411. First connecting ear; 54111. Ear body; 54112. Adjusting block; 5412. Second connecting ear; 542. Sensor; 543. Sensing rod; 5431. Limiting ring; 544. Spring; 55. Second pusher block;

[0043] 6. Eutectic module; 61. Heating platform; 62. Cover plate; 6201. Clearance hole; 63. Air knife;

[0044] 7. First guide rail;

[0045] 8. Second guide rail;

[0046] 100. Substrate;

[0047] X, first direction; Y, second direction; Z, third direction. Detailed Implementation

[0048] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0049] Reference Figures 1 to 11 As shown, a preferred embodiment of this application discloses a substrate transport device having two perpendicular directions X, Y, and Z. The substrate transport device includes a worktable 1, a first transfer module 2, a second transfer module 3, and a positioning component 4. The worktable 1 has a transport channel 101 extending along the first direction X, which carries a substrate 100. The transport channel 101 has a positioning station and a processing station arranged along the first direction X. The first transfer module 2 and the second transfer module 3 are arranged on the worktable 1 along the first direction X. The positioning component 4 is connected to the worktable 1 and is arranged corresponding to the positioning station. The first transfer module 2 is used to push the substrate 100 on the transport channel 101 along the first direction X to transport the substrate 100 to the positioning station. The positioning component 4 is used to position the substrate 100 pushed by the first transfer module 2 to the positioning station. The second transfer module 3 is used to transfer the substrate 100 located at the positioning station to the processing station along the first direction X.

[0050] In the substrate transport device of this application, after the substrate 100 is input into the transport channel 101, the first transfer module 2 pushes the substrate 100 to the positioning station, and the positioning component 4 defines the position of the substrate 100 at the positioning station. Then, the second transfer module 3 transfers the substrate 100 from the positioning station to the processing station. Since the first transfer module 2 realizes the transfer of the substrate 100 by pushing, it does not need to set up a clamping structure, which simplifies the structure of the substrate transport device and makes the structure of the substrate transport device relatively simple. In addition, the setting of the positioning component 4 can define the transfer position of the substrate 100, which can effectively counteract the positional displacement of the substrate 100 due to inertia during the pushing process. The substrate 100 can accurately stop at the positioning station, providing a reliable position reference for the second transfer module 3 to transfer the substrate 100, and ensuring the alignment accuracy of the substrate 100 at the processing station.

[0051] It should be noted that both ends of the conveying channel 101 in the first direction X and one end in the third direction Z are open ends. In the first direction X, one end of the conveying channel 101 is the input end and the other end is the output end. The positioning station and the processing station are arranged from the input end to the output end.

[0052] In this embodiment, the first transfer module 2 includes a first transfer seat 21, a first driving assembly 22, a first connecting rod 23, and a first pusher block 24. The first transfer seat 21 is connected to the worktable 1 and is located on one side of the conveying channel 101 in the second direction Y. The first transfer seat 21 can slide along the first direction X. The first driving assembly 22 is connected to the first transfer seat 21. The first connecting rod 23 extends along the second direction Y. One end of the first connecting rod 23 along its length is connected to the first driving assembly 22, and the other end is connected to the first pusher block 24. The first pusher block 24 is disposed along the third direction Z corresponding to the conveying channel 101. The first pusher block 24 is used to push the substrate 100. The first driving assembly 22 is used to drive the first connecting rod 23 along the second direction Y. The three-way Z-motion drives the first pusher block 24 to move along the third direction Z. Specifically, the purpose of driving the first pusher block 24 to move along the third direction Z is to allow the first pusher block 24 to be inserted into the conveying channel 101. When the first transfer seat 21 moves along the first direction X toward the side where the positioning station is located, the first pusher block 24 can push the substrate 100 to move; or to allow the first pusher block 24 to move along the third direction Z away from the worktable 1 to the first preset position, so that the first pusher block 24 can avoid the substrate 100 from being input from the input end of the conveying channel 101, ensuring the normal operation of the substrate conveying device. The first transfer module 2 with this structure does not need to set a clamping structure to realize the transfer of the substrate 100. The structure is simple and simplifies the structure of the substrate conveying device.

[0053] The conveying channel 101 has a feeding station. The feeding station, positioning station and processing station are arranged at intervals along the first direction X. The working process of the first transfer module 2 is as follows: In the initial state, the first transfer module 2 is set along the second direction Y to correspond to the feeding station. The first pusher block 24 is in a position that avoids the input of the substrate 100. This position is the first preset position mentioned above. When the substrate 100 is input to the feeding station, in the first direction X, the first pusher block 24 is located on the side of the substrate 100 away from the positioning station along the first direction X. The first drive component 22 drives the first connecting rod 23 to move toward the side where the worktable 1 is located, so that the first pusher block 24 is inserted into the conveying channel 101. After that, the first transfer seat 21 moves along the first direction X toward the side where the positioning station is located, so that the first pusher block 24 pushes the substrate 100 to the positioning station. After the transfer of the substrate 100 is completed, the first transfer seat 21 and the first drive component 22 are reset, and the above process is repeated to push the substrate 100 one by one.

[0054] In this embodiment, the substrate conveying device is suitable for the substrate 100 described below. The substrate 100 has a positioning hole. When the substrate 100 is placed in the conveying channel 101, the axis of the positioning hole extends along the third direction Z. Based on this, the second transfer module 3 includes a second transfer seat 31, a second drive assembly 32, a connecting arm 33, and a positioning post 34. The second transfer seat 31 is connected to the worktable 1 and is located on one side of the conveying channel 101 in the second direction Y. The second transfer seat 31 can slide along the first direction X. The second drive assembly 32 is connected to the second transfer seat 31. One end of the connecting arm 33 along the second direction Y is connected to the second drive assembly 32, and the other end is connected to the positioning post 34. The positioning post 34 is disposed along the third direction Z corresponding to the conveying channel 101. The length direction of the positioning post 34 extends along the third direction Z. The second drive assembly 32 is used to drive the connecting arm 33 to move along the third direction Z, so that the positioning post 34 is inserted into or removed from the third direction Z. Similarly, the purpose of driving the connecting arm 33 to move along the third direction Z is to: insert the positioning post 34 into the positioning hole of the substrate 100 at the positioning station; when the second transfer seat 31 moves from the positioning station to the processing station along the first direction X, the positioning post 34 can drive the substrate 100 to move, wherein the outer peripheral surface of the positioning post 34 contacts the inner peripheral surface of the positioning hole to ensure the stable transport of the substrate 100; or to disengage the positioning post 34 from the positioning hole at the processing station so that the substrate 100 can be processed; the second transfer module 3 with this structure also does not need to set a clamping structure to realize the transfer of the substrate 100, which is simple in structure and simplifies the structure of the substrate transport device; in addition, the advantage of driving the substrate 100 to be transported by inserting the positioning post 34 into the positioning hole is that the substrate 100 will not be offset due to inertia when it is transported to the processing station, thus ensuring the alignment accuracy of the substrate 100 at the processing station.

[0055] The working process of the second transfer module 3 is as follows: In the initial state, the second transfer module 3 is set up along the second direction Y to correspond to the positioning station. The positioning post 34 is positioned to avoid the input positioning station of the substrate 100. The positioning post 34 can reach the avoidance position by being driven by the second drive component 32. After the substrate 100 is transported to the positioning station, the second drive component 32 drives the connecting arm 33 to move along the third direction Z toward the side where the worktable 1 is located, so that the positioning post 34 is inserted into the positioning hole. After that, the second transfer seat 31 moves from the positioning station toward the processing station along the first direction X. During this process, the positioning post 34 drives the substrate 100 to move. When the substrate 100 moves to the processing station, the second drive component 32 drives the connecting arm 33 to move along the third direction Z away from the worktable 1, so that the positioning post 34 is disengaged from the positioning hole. After that, the second transfer seat 31 and the positioning post 34 are reset, and this process is repeated to transport the substrate 100 one by one.

[0056] In this embodiment, the second drive assembly 32 includes a first drive member 321, a first rack 322, a connecting shaft assembly 323, a first gear 324, a second gear 325, a second rack 326, and a connecting seat 27. The first drive member 321 is fixedly connected to the second transfer seat 31. The first rack 322 extends along the first direction X and is connected to the first drive member 321. The first drive member 321 is used to drive the first rack 322 to move along the first direction X. The shaft assembly 323 is rotatably connected to the second transfer seat 31. The rotation axis of the shaft assembly 323 extends along the second direction Y. The shaft assembly 323 is fixedly connected to the first gear 324 and the second gear 325 at intervals along the second direction Y. The first gear 324 meshes with the first rack 322, and the second gear 325 meshes with the second rack 326. The second rack 326 is fixedly connected to the connecting seat 27, and the connecting seat 27 is slidably connected to the second transfer seat 31. The sliding of the connecting seat 27... The direction is parallel to the third direction Z. The connecting arm 33 is fixedly connected to the connecting seat 27. In practical applications, when it is necessary to drive the connecting arm 33 to move along the third direction Z, the first driving member 321 drives the first rack 322 to move along the first direction X. The first rack 322 drives the first gear 324 to rotate. The first gear 324 drives the connecting shaft assembly 323 to rotate, thereby driving the second gear 325 to rotate. The rotation of the second gear 325 will drive the second rack 326 and the connecting seat 27 to slide along the third direction Z. Based on this, the connecting arm 33 is driven to move along the third direction Z. The advantage of this structure of the second driving member 32 is that the movement of the positioning column 34 is realized through the meshing transmission of the first gear 324 and the first rack 322, and the second rack 326 and the second rack 326. The meshing transmission has no slippage, the stroke of the positioning column 34 is easy to control, and the movement of the positioning column 34 is smooth, which is conducive to the stable transportation of the base plate 100. For example, the first driving member 321 is a lead screw stepper motor.

[0057] In practical applications, after the substrate 100 completes its processing at the processing station, it needs to be output from the conveying channel 101. In this embodiment, the substrate transport device further includes a third transfer module 5, which is connected to the worktable 1. In the first direction X, the third transfer module 5 is located on the side of the second transfer module 3 away from the first transfer module 2. The third transfer module 5 is used to push the substrate 100 located at the processing station to move along the first direction X in a direction away from the positioning station, so that the substrate 100 is output from the output end of the conveying channel 101. The third transfer module 5 includes a third transfer seat 51, a third transfer seat 52, and a third transfer seat 53. The drive assembly 52, the second connecting rod 53, the collision monitoring assembly 54, and the second pusher block 55 are connected to the workbench 1. The third transfer seat 51 is located on one side of the conveying channel 101 in the second direction Y and can slide along the first direction X. The fourth drive assembly 42 is connected to the third transfer seat 51. The second connecting rod 53 extends along the second direction Y, with one end of the second connecting rod 53 connected to the third drive assembly 52 and the other end connected to the collision monitoring assembly 54. The second pusher block 55 is connected to the collision monitoring assembly 54 and is used to push the base. The third drive assembly 52 drives the second connecting rod 53 to move along the third direction Z, thereby driving the collision monitoring assembly 54 and the second pusher block 55 to move along the third direction Z. The collision monitoring assembly 54 is used to monitor whether the substrate 100 pushed by the second pusher block 55 collides. Specifically, the purpose of the third drive assembly 52 driving the second connecting rod 53 to move along the third direction Z is to enable the second pusher block 55 to move along the third direction Z to insert into the conveying channel 101. When the third transfer seat 51 slides in the first direction X, the second pusher block 55 can push the substrate 100 to move; or enable the second pusher block to move. The second pusher block 55 can move along the third direction Z away from the worktable 1 to the second preset position to avoid collision between the second pusher block 55 and the substrate 100. Specifically, when the processed substrate 100 is output, the third transfer seat 51 moves along the first direction X toward the side where the positioning station is located to the space between the positioning station and the processing station, so that the second pusher block 55 moves to the side of the substrate 100 in the processing station away from the output end of the conveying channel 101 along the first direction X, so as to ensure the normal operation of the substrate 100 output. During this process, it is necessary to avoid collision between the second pusher block 55 and the substrate 100 in the processing station.The advantage of this third transfer module 5 is that it also uses a pushing method to transport the substrate 100, eliminating the need for a clamping structure and simplifying the structure of the substrate transport device. In addition, since the third transfer module 5 is used to push the substrate 100 out, if there is a material accumulation at the output end of the transport channel 101, the substrate 100 is prone to collision during the output process. Based on this, the third transfer module 5 is also equipped with a collision monitoring component 54. The collision monitoring component 54 can monitor whether the substrate 100 pushed by the second pusher block 55 has collided. If a collision occurs, the third transfer seat 51 can be controlled to stop moving, which can reduce the damage caused by the collision and ensure the product quality of the substrate 100.

[0058] The working process of the third transfer module 5 is as follows: After the substrate 100 is processed at the processing station, the third transfer seat 51 moves along the first direction X toward the side where the positioning station is located to the space between the positioning station and the processing station. During this process, the second pusher block 55 is in the second preset position to avoid collision with the substrate 100. After that, the third drive component 52 drives the second connecting rod 53 to move along the third direction Z toward the side where the worktable 1 is located, so that the second pusher block 55 is inserted into the conveying channel 101. Then the third transfer seat 51 moves along the first direction X toward the side where the output end of the conveying channel 101 is located, thereby realizing the single output of the substrate 100. The above process is repeated to output the substrate 100 one by one.

[0059] In this embodiment, the collision monitoring component 54 includes a first mounting base 541, a sensor 542, a sensing rod 543, and a spring 544. The first mounting base 541 is fixedly connected to the second connecting rod 53. The first mounting base 541 has first connecting ears 5411 and second connecting ears 5412 arranged at intervals along a first direction X. The sensor 542 is connected to the first mounting base 541, and the sensor 542 is located on the side of the first connecting ear 5411 away from the second connecting ear 5412 along the first direction X. The length of the sensing rod 543 is... Extending along the first direction X, the sensing rod 543 passes through the first connecting ear 5411 and the second connecting ear 5412. The sensing rod 543 is slidable along the first direction X. In the first direction X, the end of the sensing rod 543 away from the first connecting ear 5411 is connected to the second pusher block 55. The sensing rod 543 has a limiting ring 5431 arranged around its axis. The limiting ring 5431 is located between the first connecting ear 5411 and the second connecting ear 5412, and the limiting ring 5431 contacts the second connecting ear 5412. A spring 544 is sleeved on the sensing rod. On the sensing rod 543, a spring 544 extends along the first direction X. In the first direction X, one end of the spring 544 contacts the first connecting ear 5411, and the other end contacts the limiting ring 5431. The sensor 542 is used to monitor the position of the sensing rod 543. Specifically, the sensor 542 can be an infrared sensor 542. The function of the spring 544 is to keep the sensing rod 543 stable and prevent it from sliding arbitrarily. If the substrate 100 collides, the collision force will be transmitted to the second pusher block 55. As a result, the limiting ring 5431 will compress the spring 544, and the sensing rod 543 will move along the first direction X toward the side where the sensor 542 is located and be detected by the sensor 542. At this time, by controlling the third transfer seat 51 to stop moving, the damage caused by the collision can be reduced, and the product quality of the substrate 100 can be guaranteed. By reasonably designing the position of the sensor 542, the movement of the third transfer seat 51 can be stopped when the substrate 100 is subjected to slight resistance, which can minimize the damage. This collision monitoring component 54 has a simple and reliable structure and can effectively play a monitoring role.

[0060] Furthermore, the first connecting ear 5411 includes an ear body 54111 and an adjusting block 54112. The ear body 54111 is connected to the second mounting base 41, and the adjusting block 54112 is threadedly connected to the ear body 54111. The adjusting block 54112 can be adjusted in position along the first direction X. The spring 544 contacts the adjusting block 54112. Specifically, the ear body 54111 has a threaded hole extending along the first direction X, and the adjusting block 54112 has a matching external thread. In addition, both the adjusting block 54112 and the second connecting ear 5412 have mounting through holes, which are coaxially arranged with their axes along the first direction X. Extending in the X direction, the sensing rod 543 passes through two mounting holes; by rotating the adjusting block 54112, it can be moved closer to or further away from the second connecting ear 5412 in the first direction X. Thus, the pre-compression of the spring 544 can be adjusted to control the magnitude of the elastic force on the sensing rod 543, thereby setting the collision force threshold for triggering sensing and monitoring of the substrate 100. When the collision force on the substrate 100 is greater than the threshold, the sensing rod 543 is displaced and captured by the sensor 542, thus completing the collision monitoring. That is, the first connecting ear 5411 with this structure can adjust the collision force trigger threshold, which is highly flexible.

[0061] In this embodiment, the positioning component 4 includes a second mounting base 41, a fourth driving component 42, and a positioning block 43. The second mounting base 41 is connected to the worktable 1 and is located in the conveying channel 101 and corresponding to the positioning station. The fourth driving component 42 is connected to the second mounting base 41, and the positioning block 43 is connected to the fourth driving component 42. The fourth driving component 42 is used to drive the positioning block 43 to move along the third direction Z, so that the positioning block 43 blocks or releases the substrate 100. This type of positioning component 4 has a simple structure and is easy to install. In practical applications, in the initial state, the positioning block 43 is in the position of blocking the substrate 100. Thus, the first transfer module 2 moves the substrate 100 from the inlet of the conveying channel 101. During the process of transporting the material from the material station to the positioning station, the positioning block 43 can directly stop the substrate 100 at the positioning station. When the second transfer module 3 transports the substrate 100 from the positioning station to the processing station, the fourth drive component 42 drives the positioning block 43 to move along the third direction Z toward the side where the mounting plate 123 is located on the worktable 1. At this time, the positioning block 43 releases the substrate 100. After the second transfer module 3 and the substrate 100 have passed, the fourth drive component 42 drives the positioning block 43 to move along the third direction Z away from the mounting plate 123 on the worktable 1 to reset, so as to stop the next substrate 100 and realize the positioning of the next substrate 100. It should be noted that the position of the substrate 100 after being stopped by the positioning block 43 is the aforementioned positioning station.

[0062] In this embodiment, the workbench 1 includes a first base 11, a second base 12, and a fifth drive assembly 13. The first base 11 has a first plate 111, the thickness direction of which extends along the second direction Y. A conveying channel 101 is formed between the first plate 111 and the second base 12. The fifth drive assembly 13 is connected to the first base 11 and is used to drive the first base 11 to move along the second direction Y to adjust the size of the conveying channel 101 in the second direction Y. The first transfer module 2 and the second transfer module 3 are connected to the first base 11, and the positioning assembly 4 is connected to the second base 12. The workbench 1 with this structure is driven by the fifth drive assembly 13. The first base 11 moves along the second direction Y, which can adjust the size of the conveying channel 101 in the second direction Y. Based on this, the conveying channel 101 can be used to convey substrates 100 of different specifications and sizes, and the substrate conveying device has the characteristics of strong applicability. The fifth drive component 13 includes a motor and a lead screw and nut mechanism. The motor is connected to the lead screw and nut mechanism, and the lead screw and nut mechanism is connected to the first base 11. The first base 11 is driven to move along the second direction Y by the motor and the lead screw and nut mechanism. The worktable 1 also includes a table plate. The first base 11 is connected to the table plate by a guide rail. The guide rail extends along the second direction Y and assists the first base 11 to slide along the second direction Y. The structure is stable and reliable.

[0063] Furthermore, the second base 12 includes a second plate 121, a sixth drive assembly 122, and a mounting plate 123. The thickness direction of the second plate 121 extends along the second direction Y. The second plate 121 and the first plate 111 are spaced apart along the second direction Y to form a conveying channel 101. The sixth drive assembly 122 is connected to the second plate 121. The thickness direction of the mounting plate 123 extends along the third direction Z. The mounting plate 123 is connected to the sixth drive assembly 122. In the second direction Y, the mounting plate 123 is located between the first plate 111 and the second plate 121. The substrate transport device also includes a common... The eutectic assembly 6 includes a heating platform 61, a cover plate 62, and an air knife 63. The heating platform 61 is connected to the mounting plate 123 and is located at the processing station of the conveying channel 101. The cover plate 62 is connected to the second plate 121 and is located on the side of the heating platform 61 away from the mounting plate 123 along the third direction Z. The cover plate 62 and the heating platform 61 are spaced apart. The cover plate 62 has a clearance hole 6201 and an air knife 63 is connected to the cover plate 62. Air knives 63 are provided on both sides of the clearance hole 6201 in the first direction X. The sixth drive assembly 122 is used to drive the mounting plate 123. 23 moves along the third direction Z so that the heating stage 61 and the cover plate 62 cooperate to clamp the substrate 100; when the cover plate 62 is in contact with the substrate 100, the cover plate 62 and the substrate 100 form an air cavity, which is used to allow inert gas to pass through, and the clearance hole 6201 communicates with the air cavity; specifically, based on the setting of the eutectic component 6, the substrate 100 can perform eutectic work at the processing station, with a simple and compact structure, and the location of the eutectic component 6 is the aforementioned processing station; in practical applications, when the substrate 100 is moved to the processing station, the sixth drive component 122 drives the mounting plate 123 to move along the third direction Z toward the cover plate 6 The heating stage 61 and cover plate 62 move to clamp the substrate 100, and perform eutectic operation on the substrate 100 at the clearance hole 6201. The function of the heating stage 61 is to heat the substrate 100 to a suitable temperature. The purpose of introducing inert gas into the air chamber is to create an inert atmosphere to ensure the smooth progress of the eutectic operation. One of the air knives 63 blows air towards the clearance hole 6201, and the other air knife 63 sucks air. In this way, the inert gas overflowing from the clearance hole 6201 can be removed, which is beneficial for the camera positioning component 4 to position the chip and can also remove dust from the chip.

[0064] Furthermore, the eutectic assembly 6 includes a mounting bracket connected to the side of the second plate 121 facing away from the first plate 111 along the second direction Y. A cover plate 62 is connected to the mounting bracket. The mounting bracket has an elongated hole extending along the second direction Y, and the cover plate 62 has a threaded hole. The cover plate 62 is fixed by bolts passing through the elongated hole and threadedly connected to the threaded hole. Thus, the position of the cover plate 62 in the second direction Y is adjustable. Similarly, the heating stage 61 is also fixedly connected to the mounting plate 123 by bolts engaging with the elongated hole. The position of the heating stage 61 in the second direction Y is also adjustable. Based on this, after adjusting the size of the conveying channel 101 in the second direction Y, the positions of the cover plate 62 and the heating stage 61 in the second direction Y are simultaneously adjusted so that the cover plate 62 and the heating stage 61 are synchronously adapted to the substrate 100 of the corresponding size.

[0065] In this embodiment, the first transfer seat 21, the second transfer seat 31, and the third transfer seat 51 have the same structure. The first transfer seat 21 includes a first seat body 211, a second seat body 212, a connecting bolt 213, and a rotating wheel 214. The first seat body 211 is connected to the first base 11 via a first guide rail 7, and the second seat body 212 is connected to the first base 11 via a second guide rail 8. The first guide rail 7 and the second guide rail 8 extend along a first direction X. The first guide rail 7 is located on the side of the second guide rail 8 away from the conveying channel 101 along a second direction Y. The body 211 has a first connecting plate 2111, and the second base body 212 has a second connecting plate 2121. The thickness direction of the first connecting plate 2111 and the second connecting plate 2121 extends along the third direction Z. The first connecting plate 2111 is located on the side of the second base body 121 along the third direction Z that is close to the first base 11. The rotating wheel 214 is rotatably connected to the first connecting plate 2111, and the rotation axis of the rotating wheel 214 extends along the third direction Z. The second connecting plate 2121 has a receiving hole 2121A that extends along the third direction Z. The device has an opening facing away from the conveying channel 101 in the second direction Y. A rotating wheel 214 is disposed in a receiving hole 2121A, and the outer peripheral surface of the rotating wheel 214 contacts the hole wall of the receiving hole 2121A. In the first direction X, connecting bolts 213 are provided on both sides of the receiving hole 2121A. The connecting bolts 213 connect the first connecting plate 2111 and the second connecting plate 2121. There is a floating fit clearance between the first connecting plate 2111 and the second connecting plate 2121. The first connecting plate 2111 and the second connecting plate 2121 are not rigidly locked. The dynamic fit clearance can effectively compensate for the machining and assembly errors of the first guide rail 7 and the second guide rail 8. At the same time, the outer peripheral surface of the rotating wheel 214 contacts the hole wall of the receiving hole 2121A, and the rotating wheel 214 can rotate relative to the first base 211 around its axis. This structure can realize the flexible connection of the first connecting plate 2111 and the second connecting plate 2121, avoiding the problems of stress concentration under rigid connection, deformation of the first connecting plate 2111 and the second connecting plate 2121, and accelerated wear of the first guide rail 7 and the second guide rail 8, thus extending the service life of the structure.

[0066] In addition, the substrate transport device also includes a linear motor that extends along the first direction X. The linear motor has three independently operating movers, which are respectively connected to the first body 211 of the first transfer seat 21, the second transfer seat 31, and the third transfer seat 51. The three movers respectively drive the first transfer seat 21, the second transfer seat 31, and the third transfer seat 51 to move along the first direction X. The first body 211 of the second transfer seat 31 and the third transfer seat 51 is also connected to the first base 11 through the first guide rail 7, and the second body 212 of the second transfer seat 31 and the third transfer seat 51 is also connected to the first base 11 through the second guide rail 8.

[0067] The first drive assembly 22, the second drive assembly 32, the fourth drive assembly 42, and the sixth drive assembly 122 are all wedge block lifting mechanisms. Each wedge block lifting mechanism includes a drive component, a wedge block, and a driven member. The wedge block and the driven member cooperate, and the drive component enables the lifting and lowering movement of the driven member. Taking the first drive assembly 22 as an example, the drive component is fixedly connected to the first transfer seat 21, the wedge block is fixedly connected to the drive component, and the first connecting rod 23 is fixedly connected to the driven member. The drive component drives the wedge block to move along the first direction X, thereby causing the driven member to... The first connecting rod 23 moves along the third direction Z by moving the component in the third direction Z. Similarly, the second drive assembly 32 realizes the movement of the connecting arm 33 in the third direction Z by the principle of the wedge lifting mechanism, the fourth drive assembly 42 realizes the movement of the positioning block 43 in the third direction Z by the principle of the wedge lifting mechanism, and the sixth drive assembly 122 realizes the movement of the mounting plate 123 in the third direction Z by the principle of the wedge lifting mechanism. This application will not elaborate further on these points. The drive components can be lead screw stepper motors, electric cylinders, etc.

[0068] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, a direct connection, or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0069] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A substrate transport device, characterized in that, The system includes a worktable (1), a first transfer module (2), a second transfer module (3), and a positioning component (4). The worktable (1) has a conveying channel (101) extending along a first direction (X). The conveying channel (101) is used to carry a substrate (100). The conveying channel (101) has a positioning station and a processing station arranged along the first direction (X). The first transfer module (2) and the second transfer module (3) are arranged on the worktable (1) along the first direction (X). The positioning component (4) is connected to the worktable. On the platform (1), the positioning component (4) is set corresponding to the positioning station, wherein the first transfer module (2) is used to push the substrate (100) on the conveying channel (101) along the first direction (X) to transport the substrate (100) to the positioning station, the positioning component (4) is used to position the substrate (100) pushed by the first transfer module (2) to the positioning station, and the second transfer module (3) is used to transfer the substrate (100) located at the positioning station along the first direction (X) to the processing station.

2. The substrate transport device according to claim 1, characterized in that, The substrate transport device has a second direction (Y) and a third direction (Z), wherein the first direction (X), the second direction (Y), and the third direction (Z) are perpendicular to each other; The first transfer module (2) includes a first transfer seat (21), a first drive assembly (22), a first connecting rod (23), and a first pusher block (24). The first transfer seat (21) is connected to the workbench (1), and the first transfer seat (21) is located on one side of the conveying channel (101) in the second direction (Y). The first transfer seat (21) is slidable along the first direction (X). The first drive assembly (22) is connected to the first transfer seat (21), and the first connecting rod (23) slides along the second direction (X). Extending in the direction (Y), one end of the first connecting rod (23) along its length direction is connected to the first driving component (22), and the other end is connected to the first pusher block (24). The first pusher block (24) is arranged along the third direction (Z) corresponding to the conveying channel (101). The first pusher block (24) is used to push the substrate (100). The first driving component (22) is used to drive the first connecting rod (23) to move along the third direction (Z) so as to drive the first pusher block (24) to move along the third direction (Z).

3. The substrate transport device according to claim 2, characterized in that, The substrate (100) has a positioning hole, and when the substrate (100) is disposed in the conveying channel (101), the axis of the positioning hole extends along the third direction (Z). The second transfer module (3) includes a second transfer seat (31), a second drive assembly (32), a connecting arm (33), and a positioning post (34). The second transfer seat (31) is connected to the worktable (1) and is located on one side of the conveying channel (101) in the second direction (Y). The second transfer seat (31) can slide along the first direction (X). The second drive assembly (32) is connected to the second transfer seat (31). One end of the connecting arm (33) along the second direction (Y) is connected to the second drive assembly (32), and the other end is connected to the positioning post (34). The positioning post (34) is set along the third direction (Z) corresponding to the conveying channel (101). The length direction of the positioning post (34) extends along the third direction (Z). The second drive assembly (32) is used to drive the connecting arm (33) to move along the third direction (Z) so that the positioning post (34) is inserted into or disengaged from the positioning hole.

4. The substrate transport device according to claim 3, characterized in that, The second drive assembly (32) includes a first drive member (321), a first rack (322), a connecting shaft assembly (323), a first gear (324), a second gear (325), a second rack (326), and a connecting seat (327). The first drive member (321) is fixedly connected to the second transfer seat (31). The first rack (322) extends along the first direction (X) and is connected to the first drive member (321). The first drive member (321) drives the first rack (322) to move along the first direction (X). The connecting shaft assembly (323) is rotatably connected to the second transfer seat (31). The rotation axis of the connecting shaft assembly (323) extends along the second direction (Y). The connecting shaft assembly (323) is fixedly connected to the first gear (324) and the second gear (325) at intervals along the second direction (Y). The first gear (324) meshes with the first rack (322), and the second gear (325) meshes with the second rack (326). The second rack (326) is fixedly connected to the connecting seat (327). The connecting seat (327) is slidably connected to the second transfer seat (31). The sliding direction of the connecting seat (327) is parallel to the third direction (Z). The connecting arm (33) is fixedly connected to the connecting seat (327).

5. The substrate transport device according to claim 4, characterized in that, The substrate transport device further includes a third transfer module (5), which is connected to the worktable (1). In the first direction (X), the third transfer module (5) is located on the side of the second transfer module (3) away from the first transfer module (2). The third transfer module (5) is used to push the substrate (100) located at the processing station to move along the first direction (X) away from the positioning station. The third transfer module (5) includes a third transfer seat (51), a third drive assembly (52), a second connecting rod (53), a collision monitoring assembly (54), and a second pusher block (55). The third transfer seat (51) is connected to the workbench (1) and is located on one side of the conveying channel (101) in the second direction (Y). The third transfer seat (51) can slide along the first direction (X). The fourth drive assembly (42) is connected to the third transfer seat (51). The second connecting rod (53) extends along the second direction (Y). One end of the second pusher block (55) is connected to the third drive assembly (52) along its length direction, and the other end is connected to the collision monitoring assembly (54). The second pusher block (55) is connected to the collision monitoring assembly (54). The second pusher block (55) is used to push the substrate (100). The third drive assembly (52) is used to drive the second connecting rod (53) to move along the third direction (Z) so as to drive the collision monitoring assembly (54) and the second pusher block (55) to move along the third direction (Z). The collision monitoring assembly (54) is used to monitor whether the substrate (100) pushed by the second pusher block (55) collides.

6. The substrate transport device according to claim 5, characterized in that, The collision monitoring component (54) includes a first mounting base (541), a sensor (542), a sensing rod (543), and a spring (544). The first mounting base (541) is fixedly connected to the second connecting rod (53). The first mounting base (541) has a first connecting ear (5411) and a second connecting ear (5412) spaced apart along the first direction (X). The sensor (542) is connected to the first mounting base (541), and the sensor (542) is located on the side of the first connecting ear (5411) away from the second connecting ear (5412) along the first direction (X). The length direction of the sensing rod (543) extends along the first direction (X). The sensing rod (543) passes through the first connecting ear (5411) and the second connecting ear (5412). The sensing rod (543) is capable of moving along the first connecting ear (5411) and the second connecting ear (5412). The sensing rod (543) slides in the first direction (X). In the first direction (X), the end of the sensing rod (543) away from the first connecting ear (5411) is connected to the second pusher block (55). The sensing rod (543) has a limiting ring (5431) arranged around its axis. The limiting ring (5431) is located between the first connecting ear (5411) and the second connecting ear (5412). The limiting ring (5431) is in contact with the second connecting ear (5412). The spring (544) is sleeved on the sensing rod (543). The spring (544) extends along the first direction (X). In the first direction (X), one end of the spring (544) is in contact with the first connecting ear (5411) and the other end is in contact with the limiting ring (5431). The sensor (542) is used to monitor the position of the sensing rod (543).

7. The substrate transport device according to claim 6, characterized in that, The first connecting ear (5411) includes an ear body (54111) and an adjusting block (54112). The ear body (54111) is connected to the second mounting base (41). The adjusting block (54112) is threadedly connected to the ear body (54111) and the adjusting block (54112) can be adjusted in position along the first direction (X). The spring (544) is in contact with the adjusting block (54112).

8. The substrate transport device according to claim 1, characterized in that, The substrate transport device has a second direction (Y) and a third direction (Z), wherein the first direction (X), the second direction (Y), and the third direction (Z) are perpendicular to each other; The positioning component (4) includes a second mounting base (41), a fourth drive component (42), and a positioning block (43). The second mounting base (41) is connected to the workbench (1) and is located in the conveying channel (101) and is set corresponding to the positioning station. The fourth drive component (42) is connected to the second mounting base (41). The positioning block (43) is connected to the fourth drive component (42). The fourth drive component (42) is used to drive the positioning block (43) to move along the third direction (Z) so that the positioning block (43) blocks or releases the substrate (100).

9. The substrate transport device according to claim 1, characterized in that, The substrate transport device has a second direction (Y), and the first direction (X) and the second direction (Y) are perpendicular to each other; The workbench (1) includes a first base (11), a second base (12), and a fifth drive assembly (13). The first base (11) has a first plate (111) with the thickness direction of the first plate (111) extending along the second direction (Y). The first plate (111) and the second base (12) form the conveying channel (101). The fifth drive assembly (13) is connected to the first base (11) and is used to drive the first base (11) to move along the second direction (Y) to adjust the size of the conveying channel (101) in the second direction (Y). The first transfer module (2) and the second transfer module (3) are connected to the first base (11), and the positioning component (4) is connected to the second base (12).

10. The substrate transport device according to claim 9, characterized in that, The substrate transport device has a third direction (Z), and the first direction (X), the second direction (Y) and the third direction (Z) are perpendicular to each other; The second base (12) includes a second plate (121), a sixth drive assembly (122), and a mounting plate (123). The thickness direction of the second plate (121) extends along the second direction (Y). The second plate (121) and the first plate (111) are spaced apart along the second direction (Y) to form the conveying channel (101). The sixth drive assembly (122) is connected to the second plate (121). The thickness direction of the mounting plate (123) extends along the third direction (Z). The mounting plate (123) is connected to the sixth drive assembly (122). In the second direction (Y), the mounting plate (123) is located between the first plate (111) and the second plate (121). The substrate transport device further includes a eutectic assembly (6), which includes a heating table (61), a cover plate (62), and an air knife (63). The heating table (61) is connected to the mounting plate (123) and is located at the processing station of the transport channel (101). The cover plate (62) is connected to the second plate (121) and is located on the side of the heating table (61) away from the mounting plate (123) along the third direction (Z). The cover plate (62) and the heating table (61) are spaced apart. The cover plate (62) has a clearance hole (6201). The air knife (63) is connected to the cover plate (62), and the air knife (63) is provided on both sides of the clearance hole (6201) in the first direction (X). The sixth driving component (122) is used to drive the mounting plate (123) to move along the third direction (Z) so that the heating stage (61) and the cover plate (62) cooperate to clamp the substrate (100); when the cover plate (62) and the substrate (100) are in contact, the cover plate (62) and the substrate (100) form an air cavity, the air cavity is used to allow inert gas to pass through, and the clearance hole (6201) communicates with the air cavity.

Images