A recovery medium valve with controllable recovery amount

Abstract

The present application belongs to the technical field of valve body, disclose a kind of recovery medium valve with controllable back suction quantity, including valve body assembly, the inside of one end of the valve body assembly is provided with the valve core assembly for controlling medium on-off, the present application is in off state, recovery fin plate is formed open-close structure in the periphery of recovery bottom shaft platform, when recovery fin plate is formed open-close structure in the periphery of recovery bottom shaft platform by closed, recovery fin plate and recovery bottom shaft platform form liquid extraction structure between, the medium in medium outlet passage enters the liquid extraction cavity formed by recovery fin plate and recovery bottom shaft platform by seat warehouse liquid extraction groove when, when recovery fin plate is formed open-close structure in the periphery of recovery bottom shaft platform by opened, the medium in the liquid extraction cavity between recovery bottom shaft platform and recovery fin plate is compressed and discharged from seat warehouse drain pipe at this time, by this structure, realize the medium off and medium recovery of valve body in valve body assembly, and simultaneously realize the pumping of recovery medium.

Description

Technical Field

[0001] This invention belongs to the field of valve body technology, specifically relating to a recovery medium valve with controllable backflow. Background Technology

[0002] Currently, media recovery valves commonly used in the semiconductor industry are mostly made of corrosion-resistant materials such as PFA (perfluoroalkoxy resin), and possess a certain media recovery function. However, existing recovery valves generally suffer from the following problems:

[0003] Inaccurate control of backflow rate: Most valves use a fixed recovery structure or a simple negative pressure adsorption method, making it impossible to adjust the backflow rate according to actual process requirements. This often leads to excessive or incomplete media recovery. Excessive recovery may cause media waste and process fluctuations; insufficient recovery will result in pipeline residues, affecting the purity and consistency of the next process.

[0004] Low recycling efficiency and complex structure: Some valves adopt a multi-component separate design, the recycling process relies on an external power system, the structure is complex, the response is slow, and it is not easy to integrate with intelligent semiconductor production lines.

[0005] Therefore, there is an urgent need for a special valve that can withstand strong corrosion and high-purity media, achieve precise and controllable backflow, has a compact structure, is easy to integrate, and is suitable for semiconductor clean environments, so as to improve process stability, resource utilization and chip yield. Summary of the Invention

[0006] To address the problems mentioned in the background section, this invention provides a recovery medium valve with controllable backflow rate, which is easy to integrate.

[0007] To achieve the above objectives, the present invention provides a recoverable medium valve with controllable backflow, comprising a valve body assembly. One end of the valve body assembly has a valve core assembly for controlling the flow of the medium, and the other end of the valve body assembly has a medium recovery module for recovering the medium. The top of the medium recovery module has a backflow control component for controlling the backflow. When the valve core assembly blocks the medium at the inlet of the valve body assembly, the medium recovery module is automatically triggered to recover the medium at the outlet of the valve body assembly.

[0008] In a preferred embodiment of a recovery medium valve with controllable backflow, the valve body assembly includes a third valve body. A first valve body and a second valve body are fixedly mounted at both ends of the top of the third valve body. The first valve body has a valve core cavity inside, and the second valve body has a first moving cavity and a second moving cavity inside. A grooved inner disc is fixedly mounted between the first and second moving cavities. The third valve body has a medium inlet channel, a medium blocking channel, and a medium outlet channel inside. A sealed cavity is located at one end of the third valve body facing the top of the valve core cavity, and a recovery cavity is located at the other end of the third valve body facing the top of the second moving cavity. A first inlet port is located on one side of the second moving cavity, and a second inlet port is located on one side of the bottom of the valve core cavity. A first interface is located on one side of the medium inlet channel, and a second interface is located on one side of the medium outlet channel.

[0009] In a preferred embodiment of a recovery medium valve with controllable back suction, the valve core assembly includes a valve core piston, a first pressure spring and a second pressure spring are fixedly disposed on the top of the valve core piston, and a first sealing ring is fixedly disposed on the bottom of the valve core piston.

[0010] The valve core piston moves up and down in the valve core cavity, the edge of the first sealing ring is sealed and fixedly connected to the top of the sealed cavity, and the tops of the first and second pressure springs are fixedly abutted against the top of the valve core cavity.

[0011] In a preferred embodiment of a recovery medium valve with controllable back suction volume, the back suction volume control assembly includes a control screw, and a tightening nut and a limiting platform are respectively fixedly provided at the top and bottom of the control screw;

[0012] The control screw is threaded to the top of the second valve body, the limiting platform is disposed in the first moving cavity, and the tightening nut is disposed above the second valve body.

[0013] In a preferred embodiment of a recovery medium valve with controllable back suction volume, the medium recovery module includes a medium recovery component, the medium recovery component includes an abutting slide rod, a connecting piston and a back suction piston are fixedly installed at the top and bottom of the abutting slide rod respectively, a second sealing ring is fixedly installed at the bottom of the back suction piston, and an abutting spring is fixedly installed at the bottom end of the connecting piston;

[0014] The abutting slide rod slides through the grooved inner plate, the connecting piston moves up and down in the first moving cavity, the suction piston moves up and down in the second moving cavity, the edge of the second sealing ring is sealed and fixedly connected to the top of the recovery cavity, and the top and bottom of the abutting spring are respectively fixed on the connecting piston and the grooved inner plate.

[0015] In a preferred embodiment of a recovery medium valve with controllable back suction, the medium recovery module includes a drive piston assembly, a drive shaft assembly, a recovery arm assembly, and a recovery chamber assembly. The drive piston assembly includes a piston rod, with a first drive piston and a second drive piston fixedly disposed at the top and bottom of the piston rod, respectively. A connecting bottom rod is fixedly disposed at the bottom of the second drive piston, and a collar is fixedly disposed at the bottom of the connecting bottom rod. A protrusion is fixedly disposed on the inner wall of the collar, and a return spring is fixedly disposed at the bottom end of the first drive piston.

[0016] The drive shaft assembly includes a drive shaft base rod, a drive shaft top rod and a fixed arm ring are fixedly installed at the top and bottom of the drive shaft base rod respectively, a spiral groove is opened on the drive shaft top rod, and multiple pawls are rotatably installed on the bottom inner wall of the fixed arm ring, and a pawl spring is fixedly installed between the pawls and the inner wall of the fixed arm ring.

[0017] The recovery arm assembly includes a recovery end shaft, with a ratchet and a recovery bottom shaft platform fixedly installed at the top and bottom of the recovery end shaft, respectively. Multiple recovery fins are rotatably installed on the recovery bottom shaft platform, and fin springs are fixedly installed between the recovery fins and the recovery bottom shaft platform.

[0018] The recycling bin assembly includes a recycling bin, the bottom of which is provided with a bin suction trough and a bin drain pipe, and the inner wall of the recycling bin is fixedly provided with an inclined block.

[0019] In a preferred embodiment of a recovery medium valve with controllable back suction, the recovery chamber is fixedly installed inside the recovery cavity, the chamber's suction trough is connected to the medium outlet channel, a one-way valve is installed on the chamber's drain pipe, and the chamber's drain pipe passes through a third valve body and is connected to an external medium recovery system.

[0020] In a preferred embodiment of a recovery medium valve with controllable back suction, an inner groove sealing disc is fixedly installed on the top of the recovery chamber and the recovery seat. The recovery end shaft is rotatably mounted on this inner groove sealing disc via a bearing. The ratchet is located above the inner groove sealing disc, and the recovery bottom shaft platform is located below the inner groove sealing disc, and the recovery bottom shaft platform is located inside the recovery seat.

[0021] In a preferred embodiment of a recovery medium valve with controllable back suction, the fixed arm ring is sleeved outside the ratchet. The ratchet is pushed by the ratchet spring, and the ratchet abuts against the ratchet. An inner groove fixed plate is provided at the bottom of the second moving cavity. The drive shaft bottom rod is rotatably mounted on this inner groove fixed plate through a bearing. The drive shaft top rod is located above the inner groove fixed plate.

[0022] In a preferred embodiment of a recovery medium valve with controllable back suction, the piston rod slides through the grooved inner disc, the first driving piston moves up and down in the first moving cavity, the second driving piston slides up and down in the second moving cavity, the collar is sleeved on the outside of the drive shaft top rod, the protrusion is inserted into the spiral groove, and the top and bottom of the return spring are respectively fixed on the first driving piston and the grooved inner disc.

[0023] Compared with the prior art, the beneficial effects of the present invention are:

[0024] 1. When the present invention is in the open circuit state, the first and second pressure springs push the valve core piston, causing the first sealing ring to seal and press against the medium blocking channel, thereby disconnecting the medium inlet channel and the medium outlet channel.

[0025] 2. When the present invention is in the open circuit state, the recovery fin forms an open and closed structure around the recovery bottom shaft platform. When the recovery fin changes from a closed structure to an open structure around the recovery bottom shaft platform, a liquid extraction structure is formed between the recovery fin and the recovery bottom shaft platform. At this time, the medium in the medium outlet channel enters the liquid extraction chamber formed by the recovery fin and the recovery bottom shaft platform through the seat chamber liquid suction groove. When the recovery fin changes from an open structure to a closed structure around the recovery bottom shaft platform, the medium in the liquid extraction chamber between the recovery bottom shaft platform and the recovery fin is compressed and discharged from the seat chamber drain pipe. Through this structure, the medium in the valve body of the valve body assembly is disconnected and the medium is recovered, and the recovered medium is pumped out simultaneously.

[0026] 3. The second valve body of the present invention is provided with a back suction control component at the top. By tightening the control screw by tightening the nut, the limiting platform moves down at the top of the first moving cavity. The downward movement of the limiting platform controls the maximum upward stroke of the first driving piston, thereby controlling the stroke of the second driving piston to drive the collar upward, thereby realizing the control and adjustment of the medium recovery amount. Attached Figure Description

[0027] Figure 1 This is a perspective view of a recovery medium valve with controllable back suction volume according to the present invention;

[0028] Figure 2 This is a cross-sectional view of a recovery medium valve with controllable backflow rate according to the present invention.

[0029] Figure 3 This is a perspective view of the drive piston assembly, drive shaft assembly, recovery arm assembly, and recovery chamber assembly of the present invention;

[0030] Figure 4 This is a cross-sectional view of the drive piston assembly, drive shaft assembly, recovery arm assembly, and recovery bin assembly of the present invention during installation.

[0031] Figure 5This is a perspective view of the piston drive assembly of the present invention;

[0032] Figure 6 This is a perspective view of the drive shaft assembly of the present invention;

[0033] Figure 7 This is a perspective view of the recovery arm assembly of the present invention;

[0034] Figure 8 This is a perspective view of the recycling bin assembly of the present invention;

[0035] Figure 9 This is a perspective view of the drive shaft assembly and the recovery arm assembly of the present invention.

[0036] Explanation of reference numerals in the attached drawings: 100, Valve body assembly; 101, First valve body; 102, Second valve body; 103, Third valve body; 104, Medium inlet channel; 105, Medium sealing channel; 106, Medium outlet channel; 107, Valve core cavity; 108, First moving cavity; 109, Grooved inner disc; 110, First pilot inlet; 111, Second moving cavity; 112, Second pilot inlet; 113, First interface; 114, Second interface; 115, Recovery cavity; 116, Sealed cavity; 200, Valve core assembly; 201, Valve core piston; 202, First top pressure spring; 203, Second top pressure spring; 204, First sealing ring; 300, Back suction control assembly; 301, Control screw; 302, Limiting platform; 303, Tightening nut; 400, Medium recovery assembly; 401, Connection. Piston; 402, Abutting Spring; 403, Abutting Slide Rod; 404, Suction Piston; 405, Second Sealing Ring; 500, Drive Piston Assembly; 501, Piston Rod; 502, Return Spring; 503, First Drive Piston; 504, Second Drive Piston; 505, Connecting Bottom Rod; 506, Protrusion; 507, Collar; 600, Drive Shaft Assembly; 601, Drive Shaft Bottom Rod; 602, Spiral Slide Groove; 603, Drive Shaft Top Rod; 604, Fixed Arm Ring; 605, Pawl; 606, Pawl Spring; 700, Recovery Arm Assembly; 701, Recovery End Shaft Rod; 702, Ratchet; 703, Recovery Bottom Shaft Platform; 704, Recovery Fin Plate; 705, Fin Plate Spring; 800, Recovery Chamber Assembly; 801, Recovery Seat Chamber; 802, Inclined Block; 803, Seat Chamber Drain Pipe; 804, Seat Chamber Suction Tank. Detailed Implementation

[0037] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] Example 1

[0039] Please see Figures 1-2 As shown, the present invention provides a recoverable medium valve with controllable backflow, including a valve body assembly 100. A valve core assembly 200 for controlling the flow of medium is disposed inside one end of the valve body assembly 100, and a medium recovery module for recovering medium is disposed inside the other end of the valve body assembly 100. A backflow control component 300 for controlling the backflow is disposed on the top of the medium recovery module. When the valve core assembly 200 blocks the medium at the inlet of the valve body assembly 100, the medium recovery module is automatically triggered to recover the medium at the outlet of the valve body assembly 100.

[0040] In a preferred embodiment, please refer to Figure 1 and Figure 2 The valve body assembly 100 includes a third valve body 103. A first valve body 101 and a second valve body 102 are fixedly disposed at both ends of the top of the third valve body 103. The first valve body 101 has a valve core cavity 107 inside. The second valve body 102 has a first moving cavity 108 and a second moving cavity 111 inside. A grooved inner disc 109 is fixedly disposed between the first moving cavity 108 and the second moving cavity 111. The third valve body 103 has a medium inlet channel 104 and a medium blocking channel 10 inside. 5 and medium outlet channel 106, one end of the third valve body 103 is provided with a sealed cavity 116 facing the top of the valve core cavity 107, the other end of the third valve body 103 is provided with a recovery cavity 115 facing the top of the second moving cavity 111, a first inlet 110 is provided on one side of the second moving cavity 111, a second inlet 112 is provided on one side of the bottom of the valve core cavity 107, a first interface 113 is provided on one side of the medium inlet channel 104, and a second interface 114 is provided on one side of the medium outlet channel 106.

[0041] In a preferred embodiment, please refer to Figure 1 and Figure 2 The valve core assembly 200 includes a valve core piston 201, a first pressure spring 202 and a second pressure spring 203 are fixedly disposed on the top of the valve core piston 201, and a first sealing ring 204 is fixedly disposed on the bottom of the valve core piston 201.

[0042] The valve core piston 201 moves up and down in the valve core cavity 107. The edge of the first sealing ring 204 is sealed and fixedly connected to the top of the sealed cavity 116. The tops of the first pressure spring 202 and the second pressure spring 203 are fixed to the top of the valve core cavity 107.

[0043] In a preferred embodiment, please refer to Figure 1 and Figure 2The back suction volume control component 300 includes a control screw 301, and a tightening nut 303 and a limiting platform 302 are respectively fixedly provided at the top and bottom of the control screw 301;

[0044] The control screw 301 is threadedly connected to the top of the second valve body 102, the limiting platform 302 is located in the first moving cavity 108, and the tightening nut 303 is located above the second valve body 102.

[0045] In a preferred embodiment, please refer to Figure 1 and Figure 2 The media recovery module includes a media recovery component 400, which includes an abutting slide bar 403. A connecting piston 401 and a suction piston 404 are fixedly installed at the top and bottom of the abutting slide bar 403, respectively. A second sealing ring 405 is fixedly installed at the bottom of the suction piston 404, and an abutting spring 402 is fixedly installed at the bottom of the connecting piston 401.

[0046] The sliding contact rod 403 slides through the grooved inner plate 109, the connecting piston 401 moves up and down in the first moving cavity 108, the suction piston 404 moves up and down in the second moving cavity 111, the edge of the second sealing ring 405 is sealed and fixedly connected to the top of the recovery cavity 115, and the top and bottom of the contact spring 402 are fixed to the connecting piston 401 and the grooved inner plate 109 respectively.

[0047] The working principle of this invention is as follows: When conveying the medium in the semiconductor process, the medium enters from the medium inlet channel 104 and flows out from the medium blocking channel 105 and the medium outlet channel 106. In actual use, when the invention is in the open state, the second pilot inlet 112 and the first pilot inlet 110 are connected to the external driving medium through pipes. The external driving medium enters below the valve core piston 201 through the second pilot inlet 112 and overcomes the pressure of the first top pressure spring 202 and the second top pressure spring 203 on the valve core. The top pressure of piston 201 causes valve core piston 201 to move above the valve core cavity 107. At this time, the first sealing ring 204 releases the blockage of the medium blocking channel 105, allowing the medium to flow smoothly between the medium inlet channel 104, the medium blocking channel 105 and the medium outlet channel 106. At the same time, the driving medium introduced into the first inlet port 110 overcomes the top thrust of the resisting spring 402 and presses the suction piston 404 downward. The suction piston 404 drives the second sealing ring 405 to the bottom of the recovery cavity 115.

[0048] When the present invention is in the open circuit state, the second inlet port 112 and the first inlet port 110 are not connected to the external driving medium. At this time, the driving force in the second inlet port 112 and the first inlet port 110 disappears. At this time, the first pressure spring 202 and the second pressure spring 203 push the valve core piston 201, so that the first sealing ring 204 seals and presses against the medium blocking channel 105, so that the medium inlet channel 104 and the medium outlet channel 106 are disconnected. At the same time, the contact spring 402 pushes the connecting piston 401, so that the connecting piston 401 drives the suction piston 404 to move upward. The suction piston 404 drives the second sealing ring 405 to move upward in the recovery chamber 115, so that the recovery chamber 115 recovers and extracts the medium remaining in the medium outlet channel 106. Through this structure, the medium disconnection and medium recovery of the valve body in the valve body assembly 100 are realized.

[0049] To address the issue of controlling the amount of media recovered, the second valve body 102 of this invention is equipped with a back suction control component 300. A control screw 301 is threadedly connected to the top of the second valve body 102. A limiting platform 302 is located within the first moving cavity 108, and a tightening nut 303 is located above the second valve body 102. In actual use, the control screw 301 is tightened by tightening the nut 303, causing the limiting platform 302 to move downward from the top of the first moving cavity 108. The downward movement of the limiting platform 302 controls the maximum upward stroke of the connecting piston 401, thereby controlling the upward stroke of the back suction piston 404 driving the second sealing ring 405, thus achieving the control and adjustment of the amount of media recovered.

[0050] It should be noted that the resisting spring 402 can be replaced with a magnetic structure, i.e., magnetic drive. Specifically, a magnet is provided at the top of the first moving cavity 108, and a magnet is provided at the top of the connecting piston 401. The attraction between the magnets replaces the pushing force of the resisting spring 402. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0051] Example 2

[0052] Please see Figures 1-9As shown, the present invention provides a recoverable medium valve with controllable backflow, including a valve body assembly 100. A valve core assembly 200 for controlling the flow of medium is disposed inside one end of the valve body assembly 100, and a medium recovery module for recovering medium is disposed inside the other end of the valve body assembly 100. A backflow control component 300 for controlling the backflow is disposed on the top of the medium recovery module. When the valve core assembly 200 blocks the medium at the inlet of the valve body assembly 100, the medium recovery module is automatically triggered to recover the medium at the outlet of the valve body assembly 100.

[0053] In a preferred embodiment, please refer to Figure 2 The valve body assembly 100 includes a third valve body 103. A first valve body 101 and a second valve body 102 are fixedly disposed at both ends of the top of the third valve body 103. The first valve body 101 has a valve core cavity 107 inside. The second valve body 102 has a first moving cavity 108 and a second moving cavity 111 inside. A grooved inner disc 109 is fixedly disposed between the first moving cavity 108 and the second moving cavity 111. The third valve body 103 has a medium inlet channel 104 and a medium blocking channel 10 inside. 5 and medium outlet channel 106, one end of the third valve body 103 is provided with a sealed cavity 116 facing the top of the valve core cavity 107, the other end of the third valve body 103 is provided with a recovery cavity 115 facing the top of the second moving cavity 111, a first inlet 110 is provided on one side of the second moving cavity 111, a second inlet 112 is provided on one side of the bottom of the valve core cavity 107, a first interface 113 is provided on one side of the medium inlet channel 104, and a second interface 114 is provided on one side of the medium outlet channel 106.

[0054] In a preferred embodiment, please refer to Figure 2 The valve core assembly 200 includes a valve core piston 201, a first pressure spring 202 and a second pressure spring 203 are fixedly disposed on the top of the valve core piston 201, and a first sealing ring 204 is fixedly disposed on the bottom of the valve core piston 201.

[0055] The valve core piston 201 moves up and down in the valve core cavity 107. The edge of the first sealing ring 204 is sealed and fixedly connected to the top of the sealed cavity 116. The tops of the first pressure spring 202 and the second pressure spring 203 are fixed to the top of the valve core cavity 107.

[0056] In a preferred embodiment, please refer to Figure 2 The back suction volume control component 300 includes a control screw 301, and a tightening nut 303 and a limiting platform 302 are respectively fixedly provided at the top and bottom of the control screw 301;

[0057] The control screw 301 is threadedly connected to the top of the second valve body 102, the limiting platform 302 is located in the first moving cavity 108, and the tightening nut 303 is located above the second valve body 102.

[0058] In a preferred embodiment, please refer to Figure 5 The media recovery module includes a drive piston assembly 500, a drive shaft assembly 600, a recovery arm assembly 700, and a recovery bin assembly 800. The drive piston assembly 500 includes a piston rod 501. A first drive piston 503 and a second drive piston 504 are fixedly disposed at the top and bottom of the piston rod 501, respectively. A connecting bottom rod 505 is fixedly disposed at the bottom of the second drive piston 504. A collar 507 is fixedly disposed at the bottom of the connecting bottom rod 505. A protrusion 506 is fixedly disposed on the inner wall of the collar 507. A return spring 502 is fixedly disposed at the bottom end of the first drive piston 503.

[0059] The piston rod 501 slides through the grooved inner disk 109. The first drive piston 503 moves up and down in the first motion cavity 108, and the second drive piston 504 slides up and down in the second motion cavity 111. The collar 507 is sleeved on the outside of the drive shaft push rod 603, and the protrusion 506 is inserted into the spiral groove 602. The top and bottom of the return spring 502 are fixed on the first drive piston 503 and the grooved inner disk 109, respectively.

[0060] In a preferred embodiment, please refer to Figure 6 The drive shaft assembly 600 includes a drive shaft base rod 601. A drive shaft top rod 603 and a fixed arm ring 604 are fixedly installed at the top and bottom of the drive shaft base rod 601, respectively. A spiral groove 602 is provided on the drive shaft top rod 603. Multiple pawls 605 are rotatably provided on the inner wall of the bottom of the fixed arm ring 604. A pawl spring 606 is fixedly installed between the pawls 605 and the inner wall of the fixed arm ring 604.

[0061] The fixed arm ring 604 is sleeved on the outside of the ratchet 702. The ratchet 605 is pushed by the ratchet spring 606 and the ratchet 605 abuts against the ratchet 702. The bottom of the second motion cavity 111 is provided with an inner groove fixed plate. The drive shaft bottom rod 601 is rotatably mounted on this inner groove fixed plate through the bearing. The drive shaft top rod 603 is located above the inner groove fixed plate.

[0062] In a preferred embodiment, please refer to Figure 7 The recovery arm assembly 700 includes a recovery end shaft 701. A ratchet 702 and a recovery bottom shaft platform 703 are fixedly installed at the top and bottom of the recovery end shaft 701, respectively. Multiple recovery fins 704 are rotatably installed on the recovery bottom shaft platform 703. A fin spring 705 is fixedly installed between the recovery fins 704 and the recovery bottom shaft platform 703.

[0063] In a preferred embodiment, please refer to Figure 8 The recycling bin assembly 800 includes a recycling bin 801, the bottom of which is provided with a bin suction trough 804 and a bin drain pipe 803, and the inner wall of the recycling bin 801 is fixedly provided with an inclined block 802.

[0064] The recovery chamber 801 is fixedly installed in the recovery cavity 115. The chamber liquid suction tank 804 is connected to the medium outlet channel 106. A one-way valve is installed on the chamber drain pipe 803, and the chamber drain pipe 803 passes through the third valve body 103 and is connected to the external medium recovery system.

[0065] An inner groove sealed plate is fixedly installed on the top of the recovery compartment 801 and the recovery chamber 115. The recovery end shaft 701 is rotatably mounted on this inner groove sealed plate through a bearing. The ratchet 702 is located above the inner groove sealed plate, and the recovery bottom shaft platform 703 is located below the inner groove sealed plate, and the recovery bottom shaft platform 703 is located inside the recovery compartment 801.

[0066] The working principle of this invention is as follows: When conveying the medium in the semiconductor process, the medium enters from the medium inlet channel 104 and flows out from the medium blocking channel 105 and the medium outlet channel 106. In actual use, when the invention is in the passage state, the second inlet port 112 and the first inlet port 110 are connected to the external driving medium through pipes. The external driving medium enters below the valve core piston 201 through the second inlet port 112 and overcomes the top pressure of the first top pressure spring 202 and the second top pressure spring 203 on the valve core piston 201, so that the valve core piston 201 moves above the valve core cavity 107. At this time, the first sealing ring 204 releases the blockage of the medium blocking channel 105, so that the medium can flow smoothly between the medium inlet channel 104, the medium blocking channel 105 and the medium outlet channel 106. At the same time, the driving medium entering the first inlet port 110 overcomes the top thrust of the reset spring 502 and presses the second driving piston 504 downward, so that the collar 507 is at the bottom of the drive shaft push rod 603.

[0067] When the present invention is in an open circuit state, the second pilot inlet 112 and the first pilot inlet 110 are not connected to the external driving medium. At this time, the driving force in the second pilot inlet 112 and the first pilot inlet 110 disappears. At this time, the first pressing spring 202 and the second pressing spring 203 push the valve core piston 201, so that the first sealing ring 204 seals and presses against the medium blocking channel 105, thereby disconnecting the medium inlet channel 104 and the medium outlet channel 106. At the same time, the return spring 502 pushes the first driving piston 503. This causes the first drive piston 503 to drive the second drive piston 504 to move upward. The second drive piston 504 drives the collar 507 to move upward outside the drive shaft push rod 603. Since the protrusion 506 is inserted into the spiral groove 602, during the upward movement of the collar 507, the drive shaft push rod 603 rotates clockwise in the second moving cavity 111. At this time, the fixed arm ring 604 at the bottom of the drive shaft push rod 603 drives multiple pawls 605 to rotate clockwise. Since the pawls 605 abut and mesh with the ratchet 702, the pawls 605 pass through... Ratchet 702 drives the recovery base platform 703 to rotate. When the recovery base platform 703 rotates, multiple recovery fins 704 on the outside of the recovery base platform 703 rotate inside the recovery chamber 801. An inclined block 802 is provided on the inner wall of the recovery chamber 801. Through the contact between the inclined block 802 and the recovery fins 704, the recovery fins 704 form an opening and closing structure around the recovery base platform 703 as the recovery base platform 703 rotates. When the recovery fins 704 change from a closed to an open structure around the recovery base platform 703, the recovery fins 704 and the recovery base platform... A liquid extraction structure is formed between 703. At this time, the medium in the medium outlet channel 106 enters the liquid extraction chamber formed by the recovery fin 704 and the recovery bottom shaft platform 703 through the seat liquid suction groove 804. When the recovery fin 704 changes from an open structure to a closed structure around the recovery bottom shaft platform 703, the medium in the liquid extraction chamber between the recovery bottom shaft platform 703 and the recovery fin 704 is compressed and discharged from the seat drain pipe 803. Through this structure, the medium circuit is cut off and the medium is recovered in the valve body of the valve body assembly 100, and the recovered medium is pumped out simultaneously to avoid backflow.

[0068] Based on the above, the recovery of the medium is accomplished by the clockwise rotation of the recovery arm assembly 700 within the recovery chamber 801. Specifically, when the drive piston assembly 500 moves upward, it cooperates with the drive shaft assembly 600 to convert the upward stroke of the drive piston assembly 500 into clockwise rotation of the drive shaft assembly 600. This clockwise rotation of the drive shaft assembly 600 drives the recovery arm assembly 700 to rotate clockwise within the recovery chamber 801. However, when the drive piston assembly 500 moves downward, the drive shaft assembly 600 rotates counterclockwise. Therefore, the recovery arm assembly 700 can only rotate clockwise within the recovery chamber 801 and cannot rotate counterclockwise. To address the disconnection of power drive to the recovery arm assembly 700 when the drive shaft assembly 600 rotates counterclockwise, the bottom of the fixed arm ring 604 is designed... Multiple pawls 605 are rotatably mounted on the inner wall. A pawl spring 606 is fixed between the pawls 605 and the inner wall of the fixed arm ring 604. The fixed arm ring 604 is sleeved on the outside of the ratchet 702. Through the push of the pawl spring 606 against the pawl 605, the pawl 605 abuts against the ratchet 702. Through the cooperation of the pawl 605 and the ratchet 702, when the drive shaft assembly 600 rotates counterclockwise, the pawl 605 and the ratchet 702 are in a power disconnection structure during the counterclockwise rotation. At this time, the driving force of the drive shaft assembly 600 will not be transmitted to the recovery arm assembly 700. In this way, the power disconnection between the drive shaft assembly 600 and the recovery arm assembly 700 is achieved, ensuring that the recovery arm assembly 700 only rotates clockwise within the recovery bin assembly 800, thereby ensuring the subsequent recovery of the medium.

[0069] To address the issue of controlling the amount of media recovered, the second valve body 102 of this invention is equipped with a backflow control component 300 at its top. A control screw 301 is threadedly connected to the top of the second valve body 102. A limiting platform 302 is located within the first moving cavity 108, and a tightening nut 303 is positioned above the second valve body 102. In actual use, the control screw 301 is tightened by tightening the nut 303, causing the limiting platform 302 to move downwards from the top of the first moving cavity 108. The downward movement of the limiting platform 302 controls the maximum upward stroke of the first driving piston 503, thereby controlling the upward stroke of the second driving piston 504 driving the collar 507, thus achieving the control and adjustment of the amount of media recovered.

[0070] It should be noted that the number of recovery fins 704 on the recovery base 703 can be increased, or a flexible material can be selected. The purpose is to ensure that when the recovery fins 704 are closed, they can smoothly press the recovered medium into the chamber drain pipe 803. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0071] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A recovery medium valve with controllable backflow rate, comprising a valve body assembly (100), characterized in that: The valve body assembly (100) has a valve core assembly (200) for controlling the flow of the medium inside one end, and a medium recovery module for recovering the medium inside the other end of the valve body assembly (100). The top of the medium recovery module has a back suction control component (300) for controlling the back suction amount. When the valve core assembly (200) is controlled to block the medium at the inlet of the valve body assembly (100), the medium recovery module is automatically triggered to recover the medium at the outlet of the valve body assembly (100). The media recovery module includes a drive piston assembly (500), a drive shaft assembly (600), a recovery arm assembly (700), and a recovery bin assembly (800). The drive piston assembly (500) includes a piston rod (501). A first drive piston (503) and a second drive piston (504) are fixedly disposed at the top and bottom of the piston rod (501), respectively. A connecting bottom rod (505) is fixedly disposed at the bottom of the second drive piston (504). A collar (507) is fixedly disposed at the bottom of the connecting bottom rod (505). A protrusion (506) is fixedly disposed on the inner wall of the collar (507). A return spring (502) is fixedly disposed at the bottom end of the first drive piston (503). The drive shaft assembly (600) includes a drive shaft base rod (601), a drive shaft top rod (603) and a fixed arm ring (604) are fixedly provided at the top and bottom of the drive shaft base rod (601), a spiral groove (602) is provided on the drive shaft top rod (603), and a plurality of pawls (605) are rotatably provided on the inner wall of the bottom of the fixed arm ring (604), and a pawl spring (606) is fixedly provided between the pawls (605) and the inner wall of the fixed arm ring (604). The recovery arm assembly (700) includes a recovery end shaft (701), a ratchet (702) and a recovery bottom shaft platform (703) are fixedly installed at the top and bottom of the recovery end shaft (701), and a plurality of recovery fins (704) are rotatably installed on the recovery bottom shaft platform (703). A fin spring (705) is fixedly installed between the recovery fins (704) and the recovery bottom shaft platform (703). The recycling bin assembly (800) includes a recycling bin (801), the bottom of which is provided with a bin suction trough (804) and a bin drain pipe (803), and the inner wall of the recycling bin (801) is fixedly provided with an inclined block (802).

2. A recovery medium valve with controllable backflow rate according to claim 1, characterized in that: The valve body assembly (100) includes a third valve body (103). A first valve body (101) and a second valve body (102) are fixedly disposed at both ends of the top of the third valve body (103). The first valve body (101) has a valve core cavity (107) inside, and the second valve body (102) has a first moving cavity (108) and a second moving cavity (111) inside. A grooved inner disc (109) is fixedly disposed between the first moving cavity (108) and the second moving cavity (111). The third valve body (103) has a medium inlet channel (104) and a medium blocking channel (105) inside. The third valve body (103) has a sealed cavity (116) at one end facing the top of the valve core cavity (107), and a recovery cavity (115) at the other end facing the top of the second moving cavity (111). A first inlet (110) is provided on one side of the second moving cavity (111), a second inlet (112) is provided on one side of the bottom of the valve core cavity (107), a first interface (113) is provided on one side of the medium inlet channel (104), and a second interface (114) is provided on one side of the medium outlet channel (106).

3. A recovery medium valve with controllable backflow rate according to claim 2, characterized in that: The valve core assembly (200) includes a valve core piston (201), a first pressure spring (202) and a second pressure spring (203) are fixedly provided on the top of the valve core piston (201), and a first sealing ring (204) is fixedly provided on the bottom of the valve core piston (201). The valve core piston (201) moves up and down in the valve core cavity (107), the edge of the first sealing ring (204) is sealed and fixedly connected to the top of the sealed cavity (116), and the tops of the first pressure spring (202) and the second pressure spring (203) are fixedly abutted against the top of the valve core cavity (107).

4. A recovery medium valve with controllable backflow rate according to claim 3, characterized in that: The backflow control assembly (300) includes a control screw (301), and a tightening nut (303) and a limiting platform (302) are fixedly provided at the top and bottom of the control screw (301), respectively. The control screw (301) is threaded to the top of the second valve body (102), the limiting platform (302) is located in the first motion cavity (108), and the tightening nut (303) is located above the second valve body (102).

5. A recovery medium valve with controllable backflow rate according to claim 4, characterized in that: The recovery chamber (801) is fixedly installed in the recovery cavity (115). The chamber liquid suction tank (804) is connected to the medium outlet channel (106). A one-way valve is installed on the chamber drain pipe (803), and the chamber drain pipe (803) passes through the third valve body (103) and is connected to the external medium recovery system.

6. A recovery medium valve with controllable backflow rate according to claim 4, characterized in that: The top of the recovery chamber (801) and the recovery cavity (115) are fixedly provided with an inner groove sealed plate. The recovery end shaft (701) is rotatably mounted on this inner groove sealed plate through a bearing. The ratchet (702) is located above the inner groove sealed plate. The recovery bottom shaft platform (703) is located below the inner groove sealed plate and is located inside the recovery chamber (801).

7. A recovery medium valve with controllable backflow rate according to claim 4, characterized in that: The fixed arm ring (604) is sleeved on the outside of the ratchet (702). The ratchet (605) is pushed by the ratchet spring (606), and the ratchet (605) abuts against the ratchet (702). The bottom of the second motion cavity (111) is provided with an inner groove fixed plate. The drive shaft bottom rod (601) is rotatably mounted on this inner groove fixed plate through the bearing. The drive shaft top rod (603) is located above the inner groove fixed plate.

8. A recovery medium valve with controllable backflow rate according to claim 4, characterized in that: The piston rod (501) slides through the grooved inner disk (109), the first driving piston (503) moves up and down in the first moving cavity (108), the second driving piston (504) slides up and down in the second moving cavity (111), the collar (507) is sleeved on the outside of the drive shaft push rod (603), the protrusion (506) is inserted in the spiral groove (602), and the top and bottom of the return spring (502) are fixed on the first driving piston (503) and the grooved inner disk (109) respectively.

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