Dust-free shoes with toxic gas detection and alarm functions
By installing a toxic gas detector and alarm facing the ground on cleanroom shoes, the problem of real-time monitoring of toxic gas leaks during the production of red LED epitaxial wafers was solved, enabling rapid and accurate gas concentration alarms and ensuring the safety of workshop personnel.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- FUJIAN PRIMA OPTOELECTRONICS CO LTD
- Filing Date
- 2026-03-26
- Publication Date
- 2026-05-12
AI Technical Summary
In the existing technology, there is a lack of effective real-time monitoring and alarm methods for the leakage of highly toxic gases phosphine and arsine used in the production of red LED epitaxial wafers, which makes it impossible to ensure the safety of workshop workers in a timely manner.
A toxic gas detector and alarm is installed on the cleanroom shoe body, with the detection end facing the ground. It utilizes the settling characteristics of toxic gases to monitor the gas concentration in real time and issue an alarm signal when the concentration exceeds the set threshold.
It enables rapid and accurate monitoring of toxic gas concentrations, timely alarms, and safeguards the life, health, and safety of workshop personnel, avoids monitoring blind spots, and improves the safety protection level of the production workshop.
Smart Images
Figure CN122004566A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of red LED technology, and in particular to a cleanroom shoe with a toxic gas detection and alarm function. Background Technology
[0002] GaAs-based AlGaInP red light-emitting diodes (LEDs) are widely used in lighting, displays, and medical fields due to their advantages such as high brightness, high stability, low energy consumption, and long lifespan. However, the Group V source phosphine (PH3) and arsine (AsH3) used in the production of GaAs-based red LED epitaxial wafers are highly toxic and flammable hazardous gases. The lethal concentrations of phosphine and arsine are 200 ppm and 250 ppm, respectively. Exposure to lethal concentrations can cause death within minutes, posing a serious threat to human life and industrial production safety. Therefore, timely monitoring and alarming of phosphine and arsine leaks in the production of red LED epitaxial wafers, providing sufficient safe evacuation time for personnel in the workshop, is particularly important. Summary of the Invention
[0003] The technical problem to be solved by the present invention is to provide a cleanroom shoe with a toxic gas detection and alarm function, which can realize real-time monitoring of the concentration of toxic gases in low-level spaces and issue an alarm signal in a timely manner when the gas concentration exceeds the safety threshold, so as to protect the life, health and safety of workshop workers.
[0004] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is as follows: A cleanroom shoe with a toxic gas detection and alarm function includes a cleanroom shoe body and a toxic gas detection and alarm device, wherein the toxic gas detection and alarm device is installed on the cleanroom shoe body; The detection end of the toxic gas detector is set towards the ground to monitor the concentration of toxic gases used in the production of red LED epitaxial wafers in real time near the ground, and to issue an alarm signal when the concentration exceeds a set threshold.
[0005] The beneficial effects of this invention are as follows: This solution involves installing a toxic gas detector and alarm on the cleanroom shoe with the detection end facing the ground. Utilizing the settling characteristics of the toxic gases used in red LED epitaxial wafer production, the detection end is directly aimed at low-lying areas where toxic gases tend to accumulate. This allows for faster and more accurate detection of the current toxic gas concentration, enabling real-time monitoring. When the concentration exceeds a set threshold, an alarm signal is promptly issued, providing sufficient evacuation time for personnel and effectively protecting their health and safety during operations. Furthermore, integrating the detector and alarm with the cleanroom shoe does not interfere with normal operations. The device can dynamically monitor different areas as personnel move, avoiding blind spots and improving the overall safety level of the red LED epitaxial wafer production workshop. Attached Figure Description
[0006] Figure 1 This is a schematic diagram of the structure of the dust-free shoe with toxic gas detection and alarm function of the present invention; Figure 2 This is a connection block diagram of the dust-free shoe with toxic gas detection and alarm function of the present invention; Figure 3 This is a circuit diagram of the cleanroom shoe with toxic gas detection and alarm function of the present invention; Label Explanation: 1. The dust-free shoe itself; 2. Toxic gas detector and alarm; 21. Alarm response module; 22. Toxic gas detection module; 23. Alarm signal output module; 24. Power supply module; 3. Display screen; 4. Fixing straps. Detailed Implementation
[0007] To explain in detail the technical content, objectives, and effects of the present invention, the following description is provided in conjunction with the embodiments and accompanying drawings.
[0008] Please refer to Figure 1 A cleanroom shoe with a toxic gas detection and alarm function includes a cleanroom shoe body 1 and a toxic gas detection and alarm device 2, wherein the toxic gas detection and alarm device 2 is installed on the cleanroom shoe body 1. The detection end of the toxic gas detector 2 is set facing the ground to monitor the concentration of toxic gases used in the production of red LED epitaxial wafers in real time near the ground, and to issue an alarm signal when the concentration exceeds a set threshold.
[0009] As can be seen from the above description, the beneficial effects of the present invention are as follows: This solution involves installing a toxic gas detector 2 on the cleanroom shoe body 1 with the detection end facing the ground. Utilizing the settling characteristics of the toxic gases used in red LED epitaxial wafer production, the detection end is directly aimed at the low-lying areas where toxic gases tend to accumulate. This allows for faster and more accurate detection of the current toxic gas concentration, enabling real-time monitoring. When the concentration exceeds a set threshold, an alarm signal is promptly issued, providing sufficient evacuation time for personnel and effectively protecting their health and safety during operations. Furthermore, combining the detector with the cleanroom shoe does not interfere with normal operations. The detector can dynamically monitor different areas as personnel move, avoiding blind spots and improving the overall safety level of the red LED epitaxial wafer production workshop.
[0010] For further details, please refer to Figure 2 The toxic gas detector alarm 2 is equipped with an alarm response module 21, a toxic gas detection module 22 and an alarm signal output module 23. The alarm response module 21 is electrically connected to the toxic gas detection module 22 and the alarm signal output module 23 respectively.
[0011] As described above, the toxic gas detector alarm 2 is internally equipped with an alarm response module 21, a toxic gas detection module 22, and an alarm signal output module 23 that are electrically connected to each other. The toxic gas detection module 22 is responsible for collecting gas concentration signals, the alarm response module 21 processes and judges the signals, and the alarm signal output module 23 executes the alarm action. This modular design improves the stability and reliability of the detection alarm and ensures the timeliness of signal transmission and response.
[0012] For further details, please refer to Figure 3 The toxic gas detection module 22 includes a resistor R1, a capacitor C, and a gas-sensitive resistor sensor A, with the detection end of the gas-sensitive resistor sensor A facing the ground. One end of the capacitor C is electrically connected to the gas-sensitive resistor sensor A, one end of the resistor R1, the alarm response module 21, and the alarm signal output module 23, respectively. The other end of the capacitor C is electrically connected to the gas-sensitive resistor sensor A, the alarm response module 21, and the alarm signal output module 23, respectively. The other end of the resistor R1 is electrically connected to the gas-sensitive resistor sensor A.
[0013] As described above, the main function of the toxic gas detection module 22 is to detect the concentration of toxic gases in the current space and transmit it to the alarm response module 21 via electronic signals. The gas-sensitive resistor sensor A, as the core detection element of the module, can sense the concentration changes of toxic gases such as phosphine and arsine in the red LED epitaxial wafer production environment in real time and convert the gas concentration signal into an electrical signal to be transmitted to subsequent modules. Capacitor C is in a charging state when the toxic gas concentration reaches a threshold; when the toxic gas concentration decreases, it is in a discharging state, causing the potential of the toxic gas detection module 22 to decrease, the alarm circuit to be in a cut-off state, and the alarm to stop. Resistor R1 acts as a voltage divider, ensuring the voltage stability of the module circuit. This structural design can accurately capture changes in gas concentration, improving the sensitivity and accuracy of the detection module.
[0014] Furthermore, the gas-sensitive resistor sensor A is a semiconductor gas-sensitive element that is selectively sensitive to phosphine and arsine.
[0015] As can be seen from the above description, the gas-sensitive resistor sensor A uses a semiconductor gas-sensitive element that is selectively sensitive to phosphine and arsine. This element can specifically identify phosphine and arsine, reduce interference from other gases in the workshop, greatly improve the targeting and accuracy of toxic gas detection, and avoid invalid or false detection.
[0016] For further details, please refer to Figure 3 The alarm response module 21 includes a sliding rheostat RP, a transistor V1, a resistor R2, and a chip IC, wherein the chip IC is model KD9561. The second pin of the chip IC is electrically connected to one end of the resistor R2, the fourth pin of the chip IC is electrically connected to the alarm signal output module 23, the eighth pin of the chip IC is electrically connected to the toxic gas detection module 22 and the alarm signal output module 23 respectively, the other end of the resistor R2 is electrically connected to the collector of the transistor V1, the sliding end of the sliding rheostat RP is electrically connected to the base of the transistor V1, one fixed end of the sliding rheostat RP is electrically connected to the toxic gas detection module 22, and the other fixed end of the sliding rheostat RP is electrically connected to the toxic gas detection module 22, the emitter of the transistor V1 and the alarm signal output module 23 respectively.
[0017] As described above, the alarm response module 21 uses a sliding rheostat RP, a transistor V1, a resistor R2, and a KD9561 chip IC. The sensitivity of the alarm circuit can be adjusted by adjusting the value of the sliding rheostat RP to adapt to the environmental requirements of different production workshops. The transistor V1 amplifies the current to ensure stable signal transmission. The chip IC, as the core control component, can efficiently process the detection signal and trigger subsequent alarm actions, improving the timeliness and controllability of the alarm response.
[0018] For further details, please refer to Figure 3 The alarm signal output module 23 includes a transistor V2 and a speaker B; The base of the transistor V2 is electrically connected to the alarm response module 21, the emitter of the transistor V2 is electrically connected to the toxic gas detection module 22 and the alarm response module 21 respectively, the collector of the transistor V2 is electrically connected to one end of the horn B, and the other end of the horn B is electrically connected to the toxic gas detection module 22 and the alarm response module 21 respectively.
[0019] As can be seen from the above description, the alarm signal output module 23 is composed of transistor V2 and speaker B. Transistor V2 can amplify the signal transmitted by alarm response module 21 to ensure sufficient driving capability to drive speaker B to sound. As a terminal execution element, speaker B can emit a clear alarm sound in a timely manner to ensure that personnel in the workshop can quickly detect danger and evacuate.
[0020] For further details, please refer to Figure 1 The toxic gas detector alarm 2 is also equipped with a power module 24, which is electrically connected to the alarm response module 21, the toxic gas detection module 22 and the alarm signal output module 23 respectively.
[0021] As can be seen from the above description, a power module 24 is added inside the toxic gas detector alarm 2 to supply power to the alarm response module 21, the toxic gas detection module 22 and the alarm signal output module 23; this design realizes the portability and mobility of the detector alarm, freeing it from the constraints of an external power cord, and enabling it to monitor the gas concentration in different areas in real time as staff move around, thereby improving the applicability and flexibility of the device.
[0022] For further details, please refer to Figure 3 The toxic gas detector 2 is also equipped with a display screen 3, which is electrically connected to the alarm response module 21.
[0023] As described above, a display screen 3 electrically connected to the alarm response module 21 is installed on the toxic gas detector alarm 2. The display screen 3 can display the concentration value of toxic gas in the current area in real time. The staff can intuitively grasp the gas safety status of the workshop, realize the prediction and control of danger, and further improve the safety of the production process.
[0024] For further details, please refer to Figure 1 The toxic gas detector 2 is mounted on the side of the cleanroom shoe body 1 via an adjustable fixing strap 4.
[0025] As can be seen from the above description, the toxic gas detector 2 is installed on the side of the cleanroom shoe body 1 via an adjustable fixing strap 4. The adjustable fixing strap 4 is adapted to cleanroom shoes of different sizes, improving the versatility of the device. Installing the toxic gas detector 2 on the side will not affect the normal walking and operation of the staff, and will also ensure that the detection probe faces the ground to ensure the detection effect.
[0026] Furthermore, the set thresholds include a concentration threshold of 200 ppm for phosphine and / or a concentration threshold of 250 ppm for arsine.
[0027] As can be seen from the above description, the set threshold precisely corresponds to the lethal concentration of the two gases. When the gas concentration reaches the critical value that threatens the safety of personnel, an alarm is triggered. This ensures that the alarm action is scientific and effective, without causing frequent alarms that affect production due to the threshold being set too low, or delaying evacuation due to the threshold being set too high.
[0028] Please refer to Figures 1 to 3 As shown, Embodiment 1 of the present invention is as follows: Please refer to Figure 1 A cleanroom shoe with a toxic gas detection and alarm function includes a cleanroom shoe body 1 and a toxic gas detection and alarm device 2, wherein the toxic gas detection and alarm device 2 is installed on the cleanroom shoe body 1. The detection end of the toxic gas detector 2 is set facing the ground to monitor the concentration of toxic gases used in the production of red LED epitaxial wafers in real time near the ground, and to issue an alarm signal when the concentration exceeds a set threshold.
[0029] Please refer to Figure 2 The toxic gas detector alarm 2 is equipped with an alarm response module 21, a toxic gas detection module 22 and an alarm signal output module 23. The alarm response module 21 is electrically connected to the toxic gas detection module 22 and the alarm signal output module 23 respectively.
[0030] Please refer to Figure 3 The toxic gas detection module 22 includes a resistor R1 (model: PTF561K5000FZEB, brand name: VISHAY, resistance value: 1.5kΩ), a capacitor C (model: GJM1555C1H1R2WB01D, brand name: muRata, capacitance value: 1.2pF) and a gas-sensitive resistor sensor A (model: ME3-AsH3, brand name: Winsen). The detection end of the gas-sensitive resistor sensor A is set facing the ground. One end of the capacitor C is electrically connected to the gas-sensitive resistor sensor A, one end of the resistor R1, the alarm response module 21, and the alarm signal output module 23, respectively. The other end of the capacitor C is electrically connected to the gas-sensitive resistor sensor A, the alarm response module 21, and the alarm signal output module 23, respectively. The other end of the resistor R1 is electrically connected to the gas-sensitive resistor sensor A.
[0031] The gas-sensitive resistor sensor A is a semiconductor gas-sensitive element that is selectively sensitive to phosphine and arsine.
[0032] Please refer to Figure 3 The alarm response module 21 includes a sliding rheostat RP (model: 3299W-1-501LF, brand name: BOURNS, resistance value: 500Ω±10%), a transistor V1 (model: MMBT3904LT1G), a resistor R2 (model: MF1W; brand name: Risyn; resistance value: 10Ω±1%) and a chip IC, wherein the chip IC is model KD9561; The second pin of the chip IC is electrically connected to one end of the resistor R2, the fourth pin of the chip IC is electrically connected to the alarm signal output module 23, the eighth pin of the chip IC is electrically connected to the toxic gas detection module 22 and the alarm signal output module 23 respectively, the other end of the resistor R2 is electrically connected to the collector of the transistor V1, the sliding end of the sliding rheostat RP is electrically connected to the base of the transistor V1, one fixed end of the sliding rheostat RP is electrically connected to the toxic gas detection module 22, and the other fixed end of the sliding rheostat RP is electrically connected to the toxic gas detection module 22, the emitter of the transistor V1 and the alarm signal output module 23 respectively.
[0033] Please refer to Figure 3 The alarm signal output module 23 includes a transistor V2 (model: DMN3404L-7) and a speaker B (model: MLT-5030). The base of the transistor V2 is electrically connected to the alarm response module 21, the emitter of the transistor V2 is electrically connected to the toxic gas detection module 22 and the alarm response module 21 respectively, the collector of the transistor V2 is electrically connected to one end of the horn B, and the other end of the horn B is electrically connected to the toxic gas detection module 22 and the alarm response module 21 respectively.
[0034] Please refer to Figure 1 The toxic gas detector alarm 2 is also equipped with a power module 24, which is electrically connected to the alarm response module 21, the toxic gas detection module 22 and the alarm signal output module 23 respectively.
[0035] Please refer to Figure 3The power module 24 includes a battery GB (using AA batteries) and a switch S (model: JS102011SAQN). The positive terminal of the battery GB is electrically connected to one end of the switch S, and the negative terminal of the battery GB is electrically connected to the alarm response module 21, the toxic gas detection module 22, and the alarm signal output module 23. The other end of the switch S is electrically connected to the alarm response module 21, the toxic gas detection module 22, and the alarm signal output module 23.
[0036] Please refer to Figure 1 and Figure 2 The toxic gas detector alarm 2 is also equipped with a display screen 3 (model: SSD1306), which is electrically connected to the alarm response module 21.
[0037] Please refer to Figure 1 The toxic gas detector 2 is mounted on the side of the cleanroom shoe body 1 via an adjustable fixing strap 4.
[0038] The set thresholds include a concentration threshold of 200 ppm for phosphine and / or a concentration threshold of 250 ppm for arsine.
[0039] The circuit of the toxic gas detector alarm 2 in this solution includes a power supply module 24, a toxic gas detection module 22, an alarm response module 21, and an alarm signal output module 23. Its specific working principle is as follows: When there is no toxic gas in the air or the concentration of toxic gas is extremely low, the gas-sensitive resistor sensor A is in a high-resistance state; at this time, the current flowing through the sliding rheostat RP is extremely small, the voltage at the RP terminal is low, the resistor R2 is not conducting, the chip IC is in the cut-off state, the entire alarm circuit does not start, the speaker B does not emit an alarm sound, and the display screen 3 displays the current low concentration value in real time.
[0040] When the concentration of phosphine or arsine in the air reaches a set threshold, the toxic gas adheres to the surface of the gas-sensitive resistor sensor A, causing the conductivity of sensor A to increase and the resistance to decrease. This change increases the current flowing through the sliding rheostat RP, and the voltage at the RP terminal rises accordingly, causing the resistor R2 to conduct, thus activating the IC chip. The activated IC chip transmits a signal to the alarm signal output module 23. After the signal is amplified by the transistor V2, it drives the speaker B to emit an alarm sound. At the same time, the display screen 3 displays the current gas concentration value exceeding the threshold, reminding personnel to evacuate in time.
[0041] When the concentration of toxic gas drops below the threshold, the gas-sensitive resistor sensor A returns to a high-resistance state, the capacitor C enters a discharge state, causing the potential of the toxic gas detection module 22 to decrease, the entire alarm circuit returns to the cut-off state, the horn B stops alarming, and the display screen 3 displays the gas concentration value that has returned to a safe level.
[0042] In summary, the cleanroom shoe with toxic gas detection and alarm function provided by this invention, by installing a toxic gas detection and alarm device on the cleanroom shoe body with the detection end facing the ground, utilizes the settling characteristics of toxic gases used in the production of red LED epitaxial wafers, allowing the detection end to be directly aimed at the low-lying space where toxic gases tend to accumulate. This enables faster and more accurate detection of the concentration of toxic gases in the current area, achieving real-time monitoring of toxic gas concentration. When the concentration exceeds a set threshold, an alarm signal is promptly issued, providing sufficient evacuation time for personnel in the workshop and effectively protecting their life, health, and safety during operations. Furthermore, combining the detection and alarm device with the cleanroom shoe does not interfere with the normal work of workshop personnel. It can dynamically monitor different areas as personnel move, avoiding blind spots and improving the overall safety protection level of the red LED epitaxial wafer production workshop.
[0043] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent modifications made based on the content of the present invention's specification and drawings, or direct or indirect applications in related technical fields, are similarly included within the patent protection scope of the present invention.
Claims
1. A cleanroom shoe with a toxic gas detection and alarm function, characterized in that, It includes a cleanroom shoe body and a toxic gas detection alarm, wherein the toxic gas detection alarm is installed on the cleanroom shoe body; The detection end of the toxic gas detector is set towards the ground to monitor the concentration of toxic gases used in the production of red LED epitaxial wafers in real time near the ground, and to issue an alarm signal when the concentration exceeds a set threshold.
2. The cleanroom shoe with toxic gas detection and alarm function according to claim 1, characterized in that, The toxic gas detector alarm is equipped with an alarm response module, a toxic gas detection module, and an alarm signal output module. The alarm response module is electrically connected to the toxic gas detection module and the alarm signal output module, respectively.
3. The cleanroom shoe with toxic gas detection and alarm function according to claim 2, characterized in that, The toxic gas detection module includes a resistor R1, a capacitor C, and a gas-sensitive resistor sensor A, with the detection end of the gas-sensitive resistor sensor A facing the ground. One end of the capacitor C is electrically connected to the gas-sensitive resistor sensor A, one end of the resistor R1, the alarm response module, and the alarm signal output module, respectively. The other end of the capacitor C is electrically connected to the gas-sensitive resistor sensor A, the alarm response module, and the alarm signal output module, respectively. The other end of the resistor R1 is electrically connected to the gas-sensitive resistor sensor A.
4. The cleanroom shoe with toxic gas detection and alarm function according to claim 3, characterized in that, The gas-sensitive resistor sensor A is a semiconductor gas-sensitive element that is selectively sensitive to phosphine and arsine.
5. The cleanroom shoe with toxic gas detection and alarm function according to claim 2, characterized in that, The alarm response module includes a sliding rheostat RP, a transistor V1, a resistor R2, and a chip IC, the model of which is KD9561; The second pin of the chip IC is electrically connected to one end of the resistor R2. The fourth pin of the chip IC is electrically connected to the alarm signal output module. The eighth pin of the chip IC is electrically connected to the toxic gas detection module and the alarm signal output module, respectively. The other end of the resistor R2 is electrically connected to the collector of the transistor V1. The sliding end of the sliding rheostat RP is electrically connected to the base of the transistor V1. One fixed end of the sliding rheostat RP is electrically connected to the toxic gas detection module. The other fixed end of the sliding rheostat RP is electrically connected to the toxic gas detection module, the emitter of the transistor V1, and the alarm signal output module, respectively.
6. The cleanroom shoe with toxic gas detection and alarm function according to claim 2, characterized in that, The alarm signal output module includes a transistor V2 and a speaker B; The base of transistor V2 is electrically connected to the alarm response module, the emitter of transistor V2 is electrically connected to both the toxic gas detection module and the alarm response module, the collector of transistor V2 is electrically connected to one end of horn B, and the other end of horn B is electrically connected to both the toxic gas detection module and the alarm response module.
7. The cleanroom shoe with toxic gas detection and alarm function according to claim 2, characterized in that, The toxic gas detector alarm also has a power module inside, which is electrically connected to the alarm response module, the toxic gas detection module and the alarm signal output module.
8. The cleanroom shoe with toxic gas detection and alarm function according to claim 2, characterized in that, The toxic gas detector is also equipped with a display screen, which is electrically connected to the alarm response module.
9. The cleanroom shoe with toxic gas detection and alarm function according to claim 1, characterized in that, The toxic gas detector is mounted on the side of the cleanroom shoe body via an adjustable fixing strap.
10. The cleanroom shoe with toxic gas detection and alarm function according to claim 1, characterized in that, The set thresholds include a concentration threshold of 200 ppm for phosphine and / or a concentration threshold of 250 ppm for arsine.