Four-axis manipulator test board and test method

Abstract

The invention relates to the technical field of mechanical arm testing equipment, in particular to a four-axis mechanical arm testing table and a testing method, a four-axis transmission mechanical arm body comprises a TH1 axis, a TH2 axis, a TH3 axis, a Z axis and a hand fork used for clamping a mask plate, and the four-axis transmission mechanical arm body is installed on an optical platform; the simulation frame part encloses a simulation internal space for manipulator motion, and is used for testing the space design layout rationality of manipulator motion in advance; the four-axis transmission manipulator body is used for transferring a mask plate among the simulation outer plate library part, the simulation inner plate library part and the simulation control tower part, and the CCD measurement systems are respectively mounted on the simulation outer plate library part and the simulation control tower part and are used for measuring the plate taking and placing repeated positioning precision of the manipulator. The manipulator test bench can simulate an actual working scene, realizes multi-index comprehensive detection, completes comprehensive performance test before integration of a manipulator, and ensures that each index of the manipulator reaches the standard.

Description

Technical Field

[0001] This invention relates to the field of robotic arm testing equipment technology, and more specifically, to a four-axis robotic arm testing platform and testing method suitable for handling semiconductor devices. Background Technology

[0002] In modern industrial production, especially in semiconductor manufacturing, robotic arms are widely used for handling precision components such as wafers and photomasks. These operations place extremely high demands on the positioning accuracy, motion reliability, and repeatability of the robotic arms. Existing technologies have methods and equipment for testing the extension, translation, and lifting positioning accuracy of robotic arms through a combination of robotic arms, vision systems, and distance sensors. However, existing testing equipment and methods have significant limitations. They can only achieve single-dimensional positioning accuracy testing and cannot simulate the multi-station transfer scenarios of actual robotic arm operations. They also struggle to simultaneously perform comprehensive testing of multiple key indicators, such as repeatability, straightness in and out of workstations, differences in horizontal posture at each workstation, and adaptability to motion space. This makes it impossible to complete comprehensive performance verification before the robotic arm is integrated into actual production equipment, which can easily lead to problems such as positioning deviations, structural interference, and motion instability after integration, affecting production efficiency and product processing quality.

[0003] To address the aforementioned technical issues, there is an urgent need to design a robotic arm testing platform that can simulate actual working scenarios and perform comprehensive testing of multiple indicators. This platform should complete comprehensive performance testing before the robotic arm is integrated, ensuring that all its indicators meet the standards. Summary of the Invention

[0004] The purpose of this invention is to provide a four-axis robotic arm testing platform that can overcome the shortcomings of the prior art to a certain extent.

[0005] The technical solution of this invention is implemented as follows: This invention provides a four-axis robotic arm test platform, comprising an optical platform, a four-axis transport robotic arm body, a simulated outer plate library, a simulated inner plate library, a simulated tower, a simulated frame, and a CCD measurement system. The four-axis transport robotic arm body includes TH1, TH2, TH3, and Z axes, and a fork for gripping photomasks, and is mounted on the optical platform. The simulated outer plate library, simulated inner plate library, simulated tower, and simulated frame are all mounted on the optical platform. The simulated frame encloses a simulated internal space for the robotic arm's movement, used to test the rationality of the spatial design layout for the robotic arm's movement. The four-axis transport robotic arm body is used to transfer photomasks between the simulated outer plate library, simulated inner plate library, and simulated tower. The CCD measurement system is mounted on the simulated outer plate library and simulated tower respectively, used to measure the repeatability of the robotic arm's photomask placement and pickup, and the measurement accuracy of the CCD measurement system is 1 micrometer.

[0006] Furthermore, the simulated outer plate library section also includes a support block, which is connected to the simulated outer plate library section by screws and hex socket set screws. The simulated outer plate library section is provided with a mask support plate, and the Rx and Ry of the mask support plate can be adjusted by the screws and hex socket set screws to adapt to different testing requirements.

[0007] Furthermore, the simulated inner plate library section includes a simulated inner plate library support frame, four leveling pads, an inner plate library support plate, a first support plate, two mask support plates, and a calibration ruler. The inner plate library support plate is connected to the four leveling pads by screws and hex socket head cap set screws, used to adjust the Rx and Ry of the two mask support plates. The calibration ruler is connected to two calibration ruler fixing plates by screws and positioning pins. The Ry and Rz of the calibration ruler are adjustable, used to calibrate the Rz of the robot arm. The two mask support plates are correspondingly adapted to the inner plate library support plate, used to support the mask and cooperate with the robot arm to complete the picking and placing of the mask.

[0008] Furthermore, the simulated tower section includes a simulated tower profile support frame, four leveling pads, a second support plate, a mask Y-axis adjustment plate, a mask X-axis adjustment plate, a mask support plate, and three angle adjustment seats. The four leveling pads are connected to the support plate by screws and hex socket head cap screws, used to adjust the Rx and Ry of the mask support plate. The mask X-axis adjustment plate has an adjustment block in the X-axis direction, which adjusts the X-axis position of the mask support plate by pushing and dragging with screws. The mask Y-axis adjustment plate has an adjustment block in the Y-axis direction, which adjusts the Y-axis position of the mask support plate by pushing and dragging with screws. The three angle adjustment seats are a first angle adjustment seat, a second angle adjustment seat, and a third angle adjustment seat, used to assist in adjusting the installation posture of the mask support plate.

[0009] Furthermore, the CCD measurement system includes a lens adjustment bracket pad and a CCD lens. The height of the lens adjustment bracket pad and its X and Y positions are designed to be adapted to the working distance of the CCD lens, ensuring the measurement accuracy and stability of the CCD measurement system.

[0010] Furthermore, the simulated frame section includes a simulated frame profile support and baffles at three workstations. The three workstations correspond to the plate picking and placing workstations of the simulated outer plate library section, the simulated inner plate library section, and the simulated tower section, respectively, accurately simulating the spatial constraints of the robot arm's actual work.

[0011] Furthermore, the test bench is also equipped with a laser tracker interface for connecting an external laser tracker to dynamically acquire the motion trajectory, velocity curve and acceleration characteristics of the end effector fork of the four-axis robot in three-dimensional space, thereby evaluating its straightness in entering and leaving the workstation, start-stop smoothness and multi-axis collaborative control accuracy.

[0012] This invention also discloses a testing method based on the aforementioned four-axis robot test bench, comprising the following steps: S1: The four-axis robot to be tested is mounted on an optical platform, allowing its fork to enter the corresponding workstations of the simulated outer plate library, simulated inner plate library, and simulated tower; S2: Through the multi-degree-of-freedom adjustment mechanisms of each module, the mask support plates of the three workstations are leveled and aligned to the theoretical attitude reference under a unified coordinate system; S3: A standard mask is placed at the simulated outer plate library workstation, and the robot is started to perform N pick-and-place cycles. The CCD measurement system records the center coordinates of the mask each time and calculates the weight. S4: Repeat step S3 at the simulated tower station to obtain the repeatability accuracy of the other station, and perform difference analysis with the result of S3 to obtain the attitude difference ΔRx and ΔRy between the two stations; S5: Start the laser tracker to track the complete motion process of the robot arm from the simulated outer plate library to the simulated tower, and extract the trajectory straightness error, maximum offset and Rz axis rotational stability parameters; S6: Under the constraints of the simulated frame, run the full stroke motion at the rated speed, monitor whether there is structural interference, abnormal vibration or limit triggering, and output a space adaptability assessment report.

[0013] Compared with the prior art, the beneficial effects of the present invention are: 1. The test platform of the present invention has a compact and reasonable structure, which can simulate the transfer scenario of the mask plate between the simulated outer plate library, the simulated inner plate library and the simulated tower in the actual work of the four-axis robot, which fits the actual application needs of semiconductor manufacturing and realizes the comprehensive performance test of the robot in the actual working scenario. 2. The design includes a simulation frame section, which can simulate the internal space of the robot arm's movement in actual equipment. This allows for the testing of the rationality of the movement space design layout before the robot arm is integrated, effectively avoiding problems such as structural interference and limit triggering after integration. 3. This solution can complete comprehensive testing of various performance indicators before the robot is integrated into the actual production equipment, which facilitates the debugging of the robot system, greatly improves testing efficiency, effectively detects the feasibility, stability and reliability of the four-axis robot, and thus improves the quality of products processed by the robot. Moreover, this solution can be widely used in the testing process of repeatability accuracy of various transfer robots, and has a wide range of applications. 4. This test bench can simulate the multi-station transfer scenario of the robot arm in actual work, and realize comprehensive testing of multiple indicators such as pick-and-place plate repeatability, straightness of entering and leaving the station, differences in horizontal posture of each station, and adaptability of motion space. It can complete comprehensive performance verification before the robot arm is integrated into the equipment, improve testing efficiency, and ensure the feasibility, stability and reliability of the robot arm. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the structure of the simulated external library part of the present invention; Figure 2 This is a schematic diagram of the structure of the simulated internal version library part of the present invention; Figure 3 This is a schematic diagram of the structure of the simulated control tower section of the present invention.

[0016] In the picture: 1-Support block; 2-Simulated outer template support plate; 3-Optical platform; 4-CCD measurement system; 5-Mask support plate; 6-Mask; 7-Simulated internal template library support profile frame; 8-Leveling pad; 9-First support plate; 10-Inner plate support plate; 11-First calibration plate; 12-Second calibration plate; 13-Calibration Scale; 14-First Angle Adjustment Seat; 15 - Mask X-axis adjustment plate; 16 - Mask Y-axis adjustment plate; 17 - Second angle adjustment seat; 18 - Third angle adjustment seat; 20 - Simulated tower profile support frame; 21 - Second support plate. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0018] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0019] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0020] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0021] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0022] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0023] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0024] Example 1 Reference Figures 1-3 A four-axis robotic arm test stand is composed of an optical platform 3, a four-axis transmission robotic arm body, a simulated outer plate library, a simulated inner plate library, a simulated tower, a simulated frame, and a CCD measurement system 4. All functional modules are installed on the optical platform 3 to ensure the overall stability and benchmark uniformity of the test stand.

[0025] The four-axis transfer robot body is a mask 6 transfer robot commonly used in semiconductor manufacturing. It includes TH1 axis, TH2 axis, TH3 axis, Z axis and hand fork for gripping the mask 6. It can realize the precise transfer of the mask 6 between three workstations: the simulated outer plate library, the simulated inner plate library, and the simulated tower. Its installation position matches the design requirements of the actual equipment with the relative position of each simulated workstation.

[0026] The simulated outer template library section serves as the initial workstation for the robotic arm to pick up and place the mask 6. Its structure includes a support block 1, a simulated outer template library support plate 2, a mask support plate 5, and a CCD measurement system 4. The support block 1 and the simulated outer template library support plate 2 are connected by screws and hex socket head cap set screws. By adjusting these screws, the orientation of the mask support plate 5 in the Rx and Ry directions can be adjusted to ensure that the mask support plate 5 is in a horizontal reference orientation. The mask support plate 5 is used to support the standard mask 6. The CCD measurement system 4 is installed above the simulated outer template library workstation to collect the center coordinates of the mask 6 in real time and detect the repeatability of the robotic arm's pick-up and place at this workstation.

[0027] The simulated inner plate library section serves as the intermediate station for the robotic arm to transfer the mask plate 6. It includes a simulated inner plate library support frame 7, four leveling pads 8, an inner plate library support plate 10, a first support plate 9, two mask plate support plates 5, a calibration ruler 13, a first calibration ruler fixing plate 11, and a second calibration ruler fixing plate 12. The inner plate library support plate 10 is connected to the four leveling pads 8 by screws and hex socket head cap set screws. Adjusting these screws allows for leveling of the two mask plate support plates 5 in the Rx and Ry directions. The two mask plate support plates 5 are adapted to the inner plate library support plate 10 to stably support the mask plate 6. The calibration ruler 13 is connected to the two calibration ruler 13 fixing plates (the first calibration ruler fixing plate 11 and the second calibration ruler fixing plate 12) by screws and positioning pins. The orientation of the calibration ruler 13 in the Ry and Rz directions can be adjusted to complete the precise calibration of the robotic arm's Rz axis, ensuring that the robotic arm's rotation dimension matches the unified coordinate system of the test platform.

[0028] The simulated tower section serves as the target workstation for the robotic arm to place the mask, including a simulated tower profile support frame 20, four leveling pads 8, a second support plate 21, a mask Y-axis adjustment plate 16, a mask X-axis adjustment plate 15, a mask support plate 5, a CCD measurement system 4, and a first angle adjustment seat 14, a second angle adjustment seat 17, and a third angle adjustment seat 18. The four leveling pads 8 are connected to the second support plate 21 by screws and hex socket head cap set screws, achieving the R-axis adjustment of the mask support plate 5. The x and y directions are leveled, and three angle adjustment seats assist in adjusting the installation posture of the mask support plate 5 to ensure posture accuracy. The X-direction adjustment plate 15 and the Y-direction adjustment plate 16 of the mask are both designed with adjustment blocks. By pushing and dragging with screws, the X and Y-direction positions of the mask support plate 5 can be adjusted respectively, so that the position reference of this station is consistent with that of other stations. The CCD measurement system 4 is installed above this station to detect the repeatability of the robot's pick-up and place-up plate at this station.

[0029] The CCD measurement system 4 is a high-precision optical measurement component, including a lens adjustment bracket pad and a CCD lens. The height of the lens adjustment bracket pad and its X and Y positions are designed to be adapted to the working distance of the CCD lens, ensuring the image clarity and measurement accuracy of the CCD lens. The measurement accuracy of the CCD measurement system 4 can reach 1 micrometer, and it can accurately collect the center coordinate changes of the mask 6.

[0030] The simulation frame consists of a simulation frame profile support and baffles at three workstations. The three baffles correspond to the plate picking and placing workstations of the simulated outer plate library, simulated inner plate library, and simulated tower, respectively. The simulation frame profile support and the baffles enclose the simulated internal space for the robot's movement. The size of this space is consistent with the internal space of the actual working equipment of the robot, which can simulate the actual spatial constraints and test the rationality of the spatial design layout for the robot's movement.

[0031] This test bench is also equipped with a laser tracker interface, which is compatible with the signal end of the laser tracker. After connecting the external laser tracker, the motion trajectory, velocity curve and acceleration characteristics of the end effector of the four-axis robot in three-dimensional space can be dynamically acquired. This allows for the evaluation of the robot's straightness in entering and leaving the workstation, its start-stop stability and multi-axis collaborative control accuracy, thus enabling the detection of the robot's dynamic motion indicators.

[0032] Example 2 Based on the four-axis robot test stand described in Embodiment 1, this embodiment discloses its specific testing method, including the following steps: S1: Install the four-axis transfer robot under test in the preset installation position of the optical platform 3, and debug the motion functions of each axis of the robot to ensure that its fork can smoothly enter the corresponding pick-up and put-down station of the simulated outer plate library, simulated inner plate library and simulated tower without initial motion interference. S2: The station calibration is completed through the multi-degree-of-freedom adjustment mechanism of each module. The screws of the simulated outer plate library are adjusted to achieve the leveling of the mask support plate 5 and Ry. The leveling pads 8 of the simulated inner plate library are adjusted to achieve the leveling of the mask support plate 5 and Ry. The Rz axis of the robot is calibrated by the calibration ruler 13. The leveling pads 8, angle adjustment seats and X and Y direction adjustment blocks of the simulated tower are adjusted to complete the attitude and position calibration of the mask support plate 5. Finally, the mask support plates 5 of the three stations are leveled and aligned to the theoretical attitude reference under the unified coordinate system. S3: Place a standard mask 6 on the mask support plate 5 of the simulated outer mask library station, start the robot arm, and control it to perform N pick-up and place cycles (e.g., N≥50, to ensure the statistical significance of the test results). After each pick-up and place cycle is completed, the CCD measurement system 4 records the center coordinates of the mask 6, and calculates the pick-up and place repeatability accuracy σ of the robot arm at this station based on the collected coordinate data. S4: Transfer the standard mask 6 to the mask support plate 5 of the simulated tower station, repeat the pick-and-place cycle test and data acquisition in step S3, obtain the repeatability positioning accuracy of the robot at the simulated tower station, perform difference analysis between the result and the test result of the simulated outer plate library station, and calculate the attitude difference ΔRx and ΔRy between the two stations. S5: Connect an external laser tracker via the laser tracker interface, start the laser tracker and set the acquisition parameters to control the robot arm to complete the complete transfer motion process from the simulated outer plate library to the simulated tower. The laser tracker dynamically acquires the three-dimensional motion trajectory, velocity curve and acceleration characteristics of the robot arm's end fork. Based on the acquired data, extract the trajectory straightness error, maximum offset and Rz axis rotational stability parameters to evaluate the robot arm's dynamic motion performance. S6: Under the spatial constraints of the simulated frame, control the robot to complete the multi-station transfer motion of the entire stroke at the rated working speed, continuously monitor whether there is structural interference with the simulated frame during the robot's movement, whether there is abnormal vibration or limit triggering, and output a spatial adaptability assessment report of the robot based on the monitoring results.

[0033] The above testing methods can be used to comprehensively test several key indicators of the four-axis robot, such as the repeatability of plate picking and placing, the difference in workstation posture, the straightness of motion trajectory, and spatial adaptability. Based on the test results, the structure and control parameters of the robot can be adjusted in a targeted manner to ensure that all indicators meet the standards before it is integrated into the actual production equipment.

[0034] The four-axis robot test stand of the present invention has a compact structure and comprehensive functions, which meets the actual application needs of robots in the semiconductor manufacturing field. It can complete comprehensive performance verification before robot integration, effectively improving testing efficiency and robot application reliability. Moreover, the design concept of the test stand can be extended to the testing of transfer robots in other industrial fields, and has broad application prospects.

[0035] The beneficial effects of the technical solution of the present invention are: 1. The test platform of the present invention has a compact and reasonable structure, which can simulate the transfer scenario of the mask plate 6 between the simulated outer plate library, the simulated inner plate library and the simulated tower in the actual work of the four-axis robot, which fits the actual application needs of semiconductor manufacturing and realizes the comprehensive performance test of the robot in the actual working scenario. 2. It integrates a CCD measurement system 4 and a laser tracker external interface. The CCD measurement system 4 achieves high precision of 1 micrometer to detect the repeatability of the robot's pick-up and place plate and the difference in horizontal posture at each workstation. The laser tracker can dynamically collect parameters such as the robot's motion trajectory and speed curve to evaluate indicators such as the straightness of entering and leaving the workstation and the accuracy of multi-axis collaborative control. It breaks through the limitations of the single-dimensional detection of existing equipment and completes comprehensive detection of multiple indicators. 3. The simulated outer plate library, simulated inner plate library, and simulated tower are all equipped with multi-degree-of-freedom adjustment mechanisms, which can realize precise adjustment of the Rx, Ry, X, and Y positions of the mask support plate 5, and can also complete the calibration of the robot arm's Rz axis, so that each station is aligned to a unified theoretical attitude benchmark, ensuring the accuracy and standardization of the test. 4. The design includes a simulation frame section, which can simulate the internal space of the robot arm's movement in actual equipment. This allows for testing the rationality of the movement space design and layout before the robot arm is integrated, effectively avoiding problems such as structural interference and limit triggering after integration. 5. This invention can complete comprehensive testing of various performance indicators before the robot is integrated into actual production equipment, which facilitates the debugging of the robot system, greatly improves testing efficiency, effectively detects the feasibility, stability and reliability of the four-axis robot, and thus improves the quality of products processed by the robot. Moreover, this invention can be widely used in the testing process of repeatability positioning accuracy of various transmission robots, and has a wide range of applications. 6. This test bench can simulate the multi-station transfer scenario of the robot arm in actual work, and realize comprehensive testing of multiple indicators such as pick-and-place plate repeatability, straightness of entering and leaving the station, differences in horizontal posture of each station, and adaptability of motion space. It can complete comprehensive performance verification before the robot arm is integrated into the equipment, improve testing efficiency, and ensure the feasibility, stability and reliability of the robot arm.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A four-axis robotic arm testing platform, characterized in that, It includes an optical platform (3), a four-axis transmission robot body, a simulated outer plate library, a simulated inner plate library, a simulated tower, a simulated frame, and a CCD measurement system (4). The four-axis transfer robot body includes TH1 axis, TH2 axis, TH3 axis, Z axis and a fork for gripping the mask plate (6), and is mounted on the optical platform (3); the simulated outer plate library, simulated inner plate library, simulated tower and simulated frame are all mounted on the optical platform (3), and the simulated frame encloses the simulated internal space for the robot's movement, which is used to test the rationality of the spatial design layout of the robot's movement in advance; the four-axis transfer robot body is used to transfer the mask plate (6) between the simulated outer plate library, simulated inner plate library and simulated tower, and the CCD measurement system (4) is installed on the simulated outer plate library and simulated tower respectively, and is used to measure the repeatability of the robot's pick-up and put-down positioning.

2. The four-axis robotic arm testing platform according to claim 1, characterized in that, The simulated external plate library section also includes a support block (1), which is connected to the simulated external plate library section by screws and hex socket set screws. The simulated external plate library section is provided with a mask support plate (5), and the Rx and Ry of the mask support plate (5) can be adjusted by the screws and hex socket set screws.

3. The four-axis robotic arm testing platform according to claim 1, characterized in that, The simulated inner plate library section includes a simulated inner plate library support profile frame (7), four leveling pads (8), an inner plate library support plate (10), a first support plate (9), two mask support plates (5), and a calibration ruler (13). The inner plate support plate (10) and four leveling pads (8) are connected by screws and hex socket set screws to adjust the Rx and Ry of the two mask support plates (5); the calibration ruler (13) is connected to the two calibration ruler (13) fixing plates by screws and positioning pins. The Ry and Rz of the calibration ruler (13) are adjustable and used to calibrate the Rz of the robot arm.

4. The four-axis robotic arm testing platform according to claim 1, characterized in that, The simulated tower section includes a simulated tower profile support frame (20), four leveling pads (8), a second support plate (21), a mask Y-axis adjustment plate (16), a mask X-axis adjustment plate (15), and a mask support plate (5). The four leveling pads (8) are connected to the second support plate (21) by screws and hex socket set screws to adjust the Rx and Ry of the mask support plate (5); the X-axis adjustment plate (15) of the mask is provided with an adjustment block in the X-axis direction, and the X-axis position of the mask support plate (5) is adjusted by pushing and dragging the screws; the Y-axis adjustment plate of the mask (6) is provided with an adjustment block in the Y-axis direction, and the Y-axis position of the mask support plate (5) is adjusted by pushing and dragging the screws.

5. The four-axis robotic arm testing platform according to claim 1, characterized in that, The CCD measurement system (4) includes a matching lens adjustment bracket pad and a CCD lens. The height of the lens adjustment bracket pad and its X and Y positions are designed to adapt to the working distance of the CCD lens. The measurement accuracy of the CCD measurement system (4) is 1 micrometer.

6. The four-axis robotic arm testing platform according to claim 1, characterized in that, The simulated frame section includes a simulated frame profile support and baffles at three workstations. The three workstations correspond to the plate picking and placing workstations of the simulated outer plate library, the simulated inner plate library, and the simulated tower section, respectively.

7. The four-axis robotic arm testing platform according to claim 3, characterized in that, The two mask support plates (5) of the simulated inner plate library section are adapted to the inner plate library support plate (10) to support the mask (6) and cooperate with the robot arm to complete the picking and placing of the mask.

8. The four-axis robotic arm testing platform according to claim 4, characterized in that, The simulated tower section also includes three angle adjustment seats, namely the first angle adjustment seat (14), the second angle adjustment seat (17), and the third angle adjustment seat (18), which are used to assist in adjusting the installation posture of the mask support plate (5).

9. The four-axis robotic arm testing platform according to claim 1, characterized in that, The test bench is also equipped with a laser tracker interface, which is used to connect an external laser tracker to dynamically collect the motion trajectory, velocity curve and acceleration characteristics of the end effector of the four-axis robot in three-dimensional space, thereby evaluating its straightness in entering and leaving the workstation, start-stop stability and multi-axis collaborative control accuracy.

10. A testing method based on the four-axis robot testing platform according to any one of claims 1 to 9, characterized in that, Includes the following steps: S1: Install the four-axis robot under test on the optical platform (3) so that its fork can enter the corresponding workstations of the simulated outer plate library, the simulated inner plate library and the simulated tower; S2: Through the multi-degree-of-freedom adjustment mechanism of each module, the mask support plate (5) of the three stations is leveled and aligned to the theoretical attitude reference under the unified coordinate system; S3: Place a standard mask (6) at the simulated external version library station, start the robot to perform N pick-up and place cycles, and the CCD measurement system (4) records the center coordinates of the mask (6) each time and calculates the repeatability accuracy σ. S4: Repeat step S3 at the simulated tower workstation to obtain the repeat positioning accuracy of the other workstation, and perform a difference analysis with the result of S3 to obtain the attitude difference ΔRx and ΔRy between the two workstations. S5: Start the laser tracker to track the complete motion process of the robot arm from the simulated external plate library to the simulated tower, and extract the trajectory straightness error, maximum offset and Rz axis rotational stability parameters; S6: Under the constraints of the simulated frame, run the full-stroke motion at the rated speed, monitor for structural interference, abnormal vibration or limit triggering, and output a space adaptability assessment report.

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