Surface topography detection probe device and method based on active deflection compensation

Abstract

The invention discloses a surface topography detection probe device and method based on active deflection compensation, and the device comprises an up-down displacement measurement module which is used for carrying out the measurement of the vertical displacement of a contact probe through a split type multi-polar-plate capacitive sensor structure; the up-and-down force balance control module and the up-and-down displacement measurement module form a second closed-loop control system and are used for controlling the contact force between the contact pin and the surface of the sample to be constant; the front and back deflection measurement module is used for detecting the deflection amount of the contact pin in the scanning direction; the front-back deflection control correction module and the front-back deflection measurement module form a first closed-loop control system and are used for calculating required correction torque through a closed-loop control algorithm and applying reverse driving force to counteract deflection caused by shearing force, and the two closed-loop systems work cooperatively to control the probe in the horizontal direction and the vertical direction. The problems that when an existing probe scans a complex shape, a track deviates due to shearing force, and the signal-to-noise ratio of displacement measurement is insufficient are solved.

Description

Technical Field

[0001] This invention relates to the field of surface morphology detection, and specifically to a surface morphology detection probe device and method based on active yaw compensation. Background Technology

[0002] In semiconductor manufacturing, precision machining, and materials science, high-precision measurement of surface morphology is crucial. Contact measurement devices such as profilometers scan the sample surface with a stylus to detect changes in surface height in real time, and are widely used in scenarios such as thin film thickness measurement, step height detection, and surface roughness assessment. The accuracy of these measurements directly affects the quality of process control: errors in step height measurement can lead to inaccurate judgments of thin film deposition processes; surface roughness deviations can affect device performance evaluation; and probe trajectory deviations can cause distortion in three-dimensional morphology reconstruction. Therefore, ensuring the trajectory accuracy and measurement stability of the probe during the scanning process is key to improving the reliability of surface morphology detection.

[0003] In actual measurement processes, the probe structure faces two major technological challenges: First, when the stylus scans complex topography with slopes or steps, it is subjected to tangential shear force applied by the sample surface, causing the probe to deflect unexpectedly in the scanning direction (front-back direction). This deflection causes the actual scanning trajectory of the stylus to deviate from the preset straight path, introducing a systematic horizontal position error, ultimately leading to distortion of the measured surface topography. Especially when measuring structures with high aspect ratios or steep steps, the deflection error caused by shear force can reach hundreds of nanometers or even micrometers, seriously affecting measurement accuracy.

[0004] Second, the accuracy of the probe's vertical displacement measurement directly determines the height resolution of the equipment. In nanometer-level measurement applications, the sensor's signal-to-noise ratio becomes a limiting factor. Environmental vibrations, electromagnetic interference, and thermal noise can introduce noise into weak displacement signals, reducing the repeatability and accuracy of the measurement.

[0005] Currently, existing surface morphology detection probes mainly employ the following technical solutions: In terms of yaw control, traditional probe structures typically rely on mechanical damping or passive elastic elements to suppress yaw, lacking active detection and real-time compensation mechanisms. While some high-end devices are equipped with yaw detection sensors, these are only used for post-measurement data correction and cannot dynamically eliminate the influence of shear forces during the measurement process. This passive approach exhibits lag in response to complex topography, has limited correction capabilities, and struggles to meet the requirements of high-precision linear scanning.

[0006] In displacement measurement, existing technologies mostly employ an integrated differential capacitance sensor structure. Mainstream commercial equipment typically uses an integrated plate arranged vertically to form a differential capacitance pair, detecting the vertical displacement of the probe by measuring the capacitance change between the plates. While this structure can achieve basic differential measurement functions, it has the following drawbacks: First, the integrated plate area is large, resulting in significant edge effects and parasitic capacitance, reducing measurement sensitivity. Second, the redundancy of a single differential pair is low, leading to weak anti-interference capabilities and decreased measurement stability when environmental interference or circuit noise increases. Third, it lacks an effective geometric amplification mechanism, limiting the capacitance change when the probe undergoes minute displacements, thus restricting the potential for improving the signal-to-noise ratio and making it difficult to meet the requirements of nanometer-level resolution. Summary of the Invention

[0007] To address the aforementioned problems, this invention provides a surface topography detection probe device and method based on active yaw compensation, aiming to fundamentally solve the trajectory deviation problem caused by shear force and the signal-to-noise ratio bottleneck of displacement measurement, so as to meet the increasing accuracy requirements of advanced manufacturing for nanoscale surface topography detection.

[0008] According to a first aspect of the present disclosure, a surface topography detection probe device based on active yaw compensation is provided, including a cantilever rod and a rotating shaft mounted on the cantilever rod, wherein the cantilever rod and the rotating shaft are synchronously rotatable, a stylus is mounted on one end of the cantilever rod near the rotating shaft, and the other end of the cantilever rod is provided with an up-down displacement measurement module, an up-down force balance control module, a front-back yaw measurement module, and a front-back yaw control correction module; The front and rear yaw measurement module is used to detect the amount of yaw of the stylus in the scanning direction; The front and rear yaw control and correction module receives the signal output by the front and rear yaw measurement module, calculates the required correction torque through a closed-loop control algorithm, and applies a reverse driving force to counteract the yaw caused by the shear force. The vertical displacement measurement module uses a split multi-plate capacitive sensor structure to measure the vertical displacement of the stylus. The upper and lower force balance control module receives the signal output by the upper and lower displacement measurement module and controls the contact force between the stylus and the sample surface to be constant. The front and rear yaw measurement module and the front and rear yaw control and correction module constitute the first closed-loop control system, and the upper and lower displacement measurement module and the upper and lower force balance control module constitute the second closed-loop control system. The two closed-loop systems work together to realize the control of the probe in both horizontal and vertical directions.

[0009] A further technical solution of the present invention is as follows: the front and rear sway measurement module adopts a differential capacitive sensor structure, including a cantilever rod and an intermediate electrode plate and two fixed electrode plates fixed on the cantilever rod.

[0010] A further technical solution of the present invention is as follows: When the stylus is scanned, it is subjected to tangential shear force, and the cantilever rod swings slightly in the scanning direction, which causes the gap between the middle electrode plate and the fixed electrode plate on one side to decrease and the gap between the middle electrode plate and the fixed electrode plate on the other side to increase. This differential change causes the two sets of capacitance values ​​to change in opposite directions. The capacitance measurement circuit converts the capacitance change into a voltage or current signal output, and the signal is proportional to the swing amount.

[0011] A further technical solution of the present invention is as follows: the split-type multi-plate capacitive sensor structure includes a middle plate and multiple independent plates on both sides, with an insulating layer between each plate; when the middle plate deflects with the rotation axis, it forms two sets of similar triangular geometric relationships with the two side plates; by measuring multiple sets of capacitance changes and using the proportional relationship of the similar triangles for calculation, a high signal-to-noise ratio measurement of the vertical displacement of the stylus can be achieved.

[0012] A further technical solution of the present invention is that the actuator of the front and rear yaw control correction module is a piezoelectric ceramic driver or a voice coil motor.

[0013] A further technical solution of the present invention is that the insulating layer is made of ceramic, polymer or air gap.

[0014] According to a first aspect of the present disclosure, a method for surface topography detection using the above-described surface topography detection probe device based on active yaw compensation is provided, the method comprising the following steps: Step 1: Place the sample to be tested on the measurement platform and adjust the probe to the initial position so that the stylus makes light contact with the sample surface; Step 2: Start the front and rear yaw measurement module and the vertical displacement measurement module to establish the initial benchmark; Step 3: Start the rear yaw control correction module and the upper and lower force balance control module. The front and rear yaw control correction module corrects the offset of the scanning direction in real time according to the yaw measurement signal, and the upper and lower force balance control module maintains a constant contact force. Step 4: Drive the sample platform or probe to perform scanning motion, and the vertical displacement measurement module continuously collects the vertical displacement data of the stylus. Step 5: After scanning, the morphology information of the sample surface is obtained through data processing.

[0015] The surface topography detection probe device and method based on active yaw compensation provided in this disclosure have the following advantages compared with the prior art: 1. The present invention uses an active closed-loop system consisting of a front and rear yaw measurement module and a control correction module to detect and dynamically compensate for probe yaw caused by shear force in real time. Compared with the traditional passive damping scheme, it can effectively reduce the straightness error of the scanning trajectory and eliminate the systematic horizontal position error in complex morphology measurement. 2. This invention adopts a split multi-plate capacitive sensor structure, which utilizes the geometric relationship of similar triangles to achieve geometric amplification of the measurement signal and multi-path redundancy verification. Compared with the traditional integral plate scheme, it significantly improves the system signal-to-noise ratio and significantly improves the measurement accuracy and stability of nanometer-level micro-displacements. 3. This invention divides the electrode plate into multiple independent units through an insulating layer, which effectively reduces the area of ​​a single electrode plate, reduces the impact of edge effects and parasitic capacitance, and provides multiple independent measurement channels, thereby enhancing the system's anti-interference capability and fault diagnosis capability. 4. This invention designs the front and rear yaw control and the vertical displacement measurement as a dual closed-loop system that works in coordination. Compared with the traditional independent subsystem architecture, it reduces the coupling interference between the two dimensions of measurement, improves the overall control bandwidth and dynamic response speed of the system, and realizes true high-speed and high-precision synchronous measurement. 5. The probe device of the present invention has a compact structure and high integration, and is easy to integrate with existing profilometers, contour analyzers and other equipment. It can be widely used in semiconductor thin film measurement, precision machining surface inspection, material surface analysis and other fields, and has good engineering application value.

[0016] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this disclosure. Attached Figure Description

[0017] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0018] Figure 1 This is a side view of the overall structure of the probe device according to an embodiment of the present invention; Figure 2 This is a top view of the overall structure of the probe device according to an embodiment of the present invention; Figure 3 This is a partially enlarged view of the front and rear yaw measurement and control module according to an embodiment of the present invention; Figure 4 This is a structural diagram of a split-type multi-plate capacitive sensor according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the geometric relationship when the electrode plates deflect according to an embodiment of the present invention; Figure 6 This is a force analysis diagram of the probe scanning the step according to an embodiment of the present invention; In the diagram: 1. Stylus; 2. Rotating shaft; 3. Forward and backward yaw control and correction module; 4. Forward and backward yaw measurement module; 5. Upward and downward force balance control module; 6. Upward and downward displacement measurement module; 7. Cantilever rod; 8. Capacitive sensor; 9. Insulation layer. Detailed Implementation

[0019] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the invention. Furthermore, it should be noted that, for ease of description, only the parts relevant to the present invention are shown in the drawings, not the entire structure.

[0020] Before discussing the exemplary embodiments in more detail, it should be noted that some exemplary embodiments are described as processes or methods depicted as flowcharts. Although the flowcharts describe the steps as sequential processes, many of these steps can be performed in parallel, concurrently, or simultaneously. Furthermore, the order of the steps can be rearranged. The process can be terminated when its operation is complete, but may also have additional steps not included in the figures. The process can correspond to a method, function, procedure, subroutine, subroutine, etc.

[0021] This invention relates to the field of surface topography inspection technology, and particularly to a surface topography inspection probe device with active yaw compensation, applicable to contact surface topography measurement equipment such as profilometers, contour meters, and roughness meters. Addressing the current urgent need for a probe device with active yaw compensation capability and high signal-to-noise ratio displacement measurement capability, this invention fundamentally solves the trajectory deviation problem caused by shear force and the signal-to-noise ratio bottleneck of displacement measurement through a dual closed-loop collaborative control system and innovative sensor structure design, thereby meeting the increasing precision requirements for nanoscale surface topography inspection in advanced manufacturing fields.

[0022] The following embodiments are provided for the proposed surface topography detection probe device and method based on active yaw compensation: like Figure 1 As shown, a surface topography detection probe device based on active yaw compensation includes a cantilever rod 7 and a rotating shaft 2 mounted on the cantilever rod 7. The cantilever rod 7 and the rotating shaft 2 can rotate synchronously. A stylus 1 is mounted on one end of the cantilever rod 7 near the rotating shaft 2. The stylus 1 can rotate around the rotating shaft 2. The other end of the cantilever rod 7 is equipped with a vertical displacement measurement module 6, a vertical force balance control module 5, a front-to-back yaw measurement module 4, and a front-to-back yaw control correction module 3. The stylus 1 is used to contact the surface of the sample to sense changes in surface topography. The rotating shaft 2 connects to the stylus 1 and serves as the rotation hub of the probe system, supporting the stylus 1 to rotate around it to follow the undulations of the sample surface.

[0023] The front and rear yaw measurement module 4 is used to detect the amount of yaw of the stylus 1 in the scanning direction; The front and rear yaw control correction module 3 receives the signal output by the front and rear yaw measurement module 4, calculates the required correction torque through a closed-loop control algorithm, and actively applies a reverse driving force to counteract the yaw caused by the shear force, ensuring that the stylus 1 scans along a preset straight trajectory. The vertical displacement measurement module 6 uses a split multi-plate capacitive sensor structure to measure the vertical displacement of the stylus 1. The upper and lower force balance control module 5 receives the signal output by the upper and lower displacement measurement module 6 and is used to control the contact force between the stylus 1 and the sample surface to be constant, so as to avoid measurement errors or sample damage caused by changes in contact force. The front and rear yaw measurement module 4 and the front and rear yaw control correction module 3 constitute the first closed-loop control system, and the upper and lower displacement measurement module 6 and the upper and lower force balance control module 5 constitute the second closed-loop control system. The two closed-loop systems work together to achieve high-precision control of the probe in both horizontal and vertical directions.

[0024] In some embodiments, the structural relationship between the cantilever rod 7 and the rotating shaft 2 is as follows: the cantilever rod 7 is connected to the rotating shaft 2 by an interference fit. The rotating shaft 2 may employ a precision bearing or other rotary support structure. An appropriate interference fit is provided between the mounting hole of the cantilever rod 7 and the shaft diameter of the rotating shaft 2, achieving reliable fixation and synchronous rotation of both through static friction.

[0025] In some embodiments, the front and rear yaw measurement module 4 adopts a differential capacitance sensor structure, such as... Figure 1 , 2 As shown, the front-to-back yaw measurement module 4 includes a cantilever rod 7 and a middle electrode plate and two fixed electrode plates fixed on the cantilever rod. The front-to-back yaw measurement module 4 is used to detect the yaw amount of the stylus 1 in the scanning direction (front-to-back direction) in real time; when the stylus scans an inclined plane or step, it is subjected to shear force, the capacitance value of the differential capacitor changes, and an electrical signal proportional to the yaw amount is output.

[0026] In some embodiments, the split-type multi-plate capacitive sensor structure includes a middle plate and multiple independent plates on both sides, with an insulating layer between each plate; when the middle plate deflects with the rotation axis, it forms two sets of similar triangular geometric relationships with the two side plates. By measuring multiple sets of capacitance changes and using the proportional relationship of the similar triangles for calculation, a high signal-to-noise ratio measurement of the vertical displacement of the stylus can be achieved.

[0027] In specific embodiments, such as Figure 1 , 2 As shown, the surface topography detection probe device includes, from left to right: a stylus 1, a rotating shaft 2, a front-to-back yaw correction module 3, a front-to-back yaw control and measurement module 4, a vertical force balance control module 5, and a vertical displacement measurement module 6. The stylus 1 is fixed to the front end of the rotating shaft 2 and is used to directly contact the surface of the sample being tested. The rotating shaft 2 serves as the rotational pivot of the entire probe system, supporting the stylus 1 to rotate around it to follow the undulations of the sample surface. The front-to-back yaw control and correction module 3 and the front-to-back yaw measurement module 4 are arranged sequentially in the middle position along the rotating shaft 2, while the vertical force balance control module 5 and the vertical displacement measurement module 6 are arranged at the rear of the rotating shaft 2.

[0028] like Figures 1-3 As shown, the front-to-back yaw measurement module 4 adopts a differential capacitance sensor structure, including a middle electrode plate fixed on the cantilever rod 7 and fixed electrode plates located on its front and rear sides. When the stylus 1 scans the inclined plane or step, it is subjected to tangential shear force, causing the cantilever rod 7 to yaw slightly in the front-to-back direction (scanning direction). This results in a decrease in the gap between the middle electrode plate and the front fixed electrode plate, and an increase in the gap between the middle electrode plate and the rear fixed electrode plate, or vice versa. This differential change causes the two sets of capacitance values ​​to change in opposite directions. The capacitance measurement circuit converts the capacitance change into a voltage or current signal output, which is proportional to the yaw amount. The front-to-back yaw control and correction module 3 receives the signal output from the front-to-back yaw measurement module 4, processes it through the controller, calculates the required correction torque, and drives the actuator (which can be a piezoelectric ceramic driver or a voice coil motor) in the front-to-back yaw control and correction module 3 to apply a reverse torque, actively counteracting the yaw caused by the shear force, and ensuring that the stylus 1 scans along a preset straight trajectory.

[0029] In some embodiments, the actuator of the forward and backward yaw control correction module 3 is a piezoelectric ceramic driver or a voice coil motor.

[0030] In some embodiments, the insulating layer is made of ceramic, polymer, or air gap.

[0031] In specific embodiments, such as Figure 4 As shown, the vertical displacement measurement module 6 employs a split-type multi-plate capacitive sensor. Unlike the traditional integrated three-plate design, this invention divides the rear measuring plate into multiple independent plate units. Specifically, the middle plate is fixed to the cantilever rod 7 and rotates with it, while multiple independent plate units 8 are arranged on the front and rear sides, with each plate isolated by an insulating layer 9. When the stylus 1 moves up and down due to the undulations of the sample surface, the rotating shaft 2 deflects around the fulcrum, and the middle plate deflects accordingly by a small angle. .like Figure 5 As shown, the gaps between the intermediate electrode plate and the front and rear electrode plate groups change, forming two sets of similar triangular geometric relationships. The intermediate electrode plate deflects with the cantilever rod 7. At that time, different vertical displacements occur at different locations. Location (distance from the fulcrum) The displacement at point () is Position (distance from the fulcrum) The displacement at point () is According to the geometric relations of similar triangles, the following condition is satisfied: The capacitance signal acquisition circuit measures the capacitance change of each independent plate unit and converts it into a displacement. , The signal processing unit uses the above geometric relationships to calculate the deflection angle. Then, the vertical displacement of the stylus can be calculated.

[0032] Compared with the traditional integral electrode scheme, this structure has the following advantages: First, the split electrode reduces the area of ​​a single electrode, thereby reducing the influence of edge effects and parasitic capacitance; second, multi-channel measurement provides redundant verification, and common-mode noise can be effectively suppressed through differential operation; third, the geometric relationship of similar triangles provides a natural signal amplification mechanism, improving the measurement sensitivity and signal-to-noise ratio under small displacements.

[0033] like Figure 6 As shown, when stylus 1 scans a sample surface with steps or slopes, it is subjected to the combined action of a normal force Fn and a tangential shear force Ft. The tangential shear force Ft generates a torque on the rotation axis 2, causing it to sway in the front-to-back direction. Without active compensation, this torque would cause the stylus's scanning trajectory to deviate from the preset straight line (as shown by the dashed line in the figure), or as shown by the solid line in the figure. However, under the active sway compensation system of this invention, the front-to-back sway control correction module 3 and the front-to-back sway measurement module 4 detect the sway in real time and apply a reverse correction torque, thereby maintaining the actual scanning trajectory of the stylus on the preset straight line. This active compensation mechanism significantly improves the trajectory accuracy of complex topography measurements.

[0034] Another embodiment illustrates a method for surface topography detection using the above-described surface topography detection probe device based on active yaw compensation, the method comprising the following steps: Step 1: Place the sample to be tested on the measurement platform and adjust the probe to the initial position so that the stylus makes light contact with the sample surface; Step 2: Start the front and rear yaw measurement module and the vertical displacement measurement module to establish the initial benchmark; Step 3: Start the rear yaw control correction module and the upper and lower force balance control module. The front and rear yaw control correction module corrects the offset of the scanning direction in real time according to the yaw measurement signal, and the upper and lower force balance control module maintains a constant contact force. Step 4: Drive the sample platform or probe to perform scanning motion, and the vertical displacement measurement module continuously collects the vertical displacement data of the stylus. Step 5: After scanning, the morphology information of the sample surface is obtained through data processing.

[0035] In the specific implementation process, the sample to be tested is first placed on the measurement platform, and the stylus 1 is brought close to the sample surface through coarse adjustment. After the system is started, the upper and lower force balance control module controls the stylus 1 to gently touch the sample surface with a constant contact force (usually in the milligram to millinewton range) to establish the initial measurement reference. The front-to-back yaw measurement module 4 and the upper and lower displacement measurement module 6 start working simultaneously, acquiring the front-to-back yaw signal and the vertical displacement signal, respectively. When the drive system moves the sample platform or probe to perform scanning motion, the stylus 1 follows the undulations of the sample surface, and the upper and lower displacement measurement module 6 continuously records the vertical displacement data. At the same time, the front-to-back yaw measurement module 4 monitors the yaw in the scanning direction in real time. Once a deviation is detected, the front-to-back yaw control correction module 3 immediately applies a correction torque to compensate. Throughout the scanning process, the dual closed-loop system works in concert to ensure that high-precision surface topography data is obtained while maintaining a straight scanning trajectory. After the scan is completed, the data processing system processes the acquired displacement data to finally obtain a high-precision three-dimensional topography map of the sample surface.

[0036] In practical implementation, the differential capacitance sensor in the front-to-back yaw measurement module 4 achieves nanometer-level sensitivity and a response bandwidth of several kilohertz, enabling rapid detection of minute yaws. The actuator in the front-to-back yaw control and correction module 3 can be a piezoelectric ceramic driver or a voice coil motor, both of which meet the requirements for real-time compensation in terms of response speed and control accuracy. The number of split-type electrodes in the vertical displacement measurement module 6 can be designed according to specific needs; typically, multiple independent electrode units on both the front and rear sides are sufficient to achieve good measurement results. The insulating layer 9 can be made of materials such as ceramic, polymer, or air gaps, with a thickness typically ranging from micrometers to millimeters. By optimizing the electrode size, spacing, and layout, the signal-to-noise ratio can be maximized while ensuring the measurement range.

[0037] In addition to the modules described above, the device may also include other components; however, since these components are not relevant to the embodiments of this disclosure, their illustrations and descriptions are omitted here.

[0038] In summary, the present invention, based on an active yaw compensation surface topography detection probe device and method, solves the problems of trajectory deviation caused by shear force when scanning complex topography by existing probes, as well as the problem of insufficient signal-to-noise ratio in displacement measurement.

[0039] In this document, the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a step or method that comprises a list of elements includes not only those elements but also other elements not expressly listed or inherent to such a step or method.

[0040] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. A surface topography detection probe device based on active yaw compensation, characterized in that, It includes a cantilever rod and a rotating shaft mounted on the cantilever rod. The cantilever rod and the rotating shaft can rotate synchronously. A stylus is installed at one end of the cantilever rod near the rotating shaft. The other end of the cantilever rod is provided with an up-down displacement measurement module, an up-down force balance control module, a front-back sway measurement module, and a front-back sway control and correction module. The front and rear yaw measurement module is used to detect the amount of yaw of the stylus in the scanning direction; The front and rear yaw control and correction module receives the signal output by the front and rear yaw measurement module, calculates the required correction torque through a closed-loop control algorithm, and applies a reverse driving force to counteract the yaw caused by the shear force. The vertical displacement measurement module uses a split multi-plate capacitive sensor structure to measure the vertical displacement of the stylus. The upper and lower force balance control module receives the signal output by the upper and lower displacement measurement module and controls the contact force between the stylus and the sample surface to be constant. The front and rear yaw measurement module and the front and rear yaw control and correction module constitute the first closed-loop control system, and the upper and lower displacement measurement module and the upper and lower force balance control module constitute the second closed-loop control system. The two closed-loop systems work together to realize the control of the probe in both horizontal and vertical directions.

2. The surface topography detection probe device based on active yaw compensation according to claim 1, characterized in that, The front and rear yaw measurement module adopts a differential capacitive sensor structure, including a cantilever rod, an intermediate electrode plate fixed on the cantilever rod, and fixed electrode plates on both sides.

3. The surface topography detection probe device based on active yaw compensation according to claim 2, characterized in that, When the stylus is scanned, it is subjected to tangential shear force, and the cantilever rod swings slightly in the scanning direction. This causes the gap between the middle electrode plate and the fixed electrode plate on one side to decrease and the gap between the middle electrode plate and the fixed electrode plate on the other side to increase. This differential change causes the two sets of capacitance values ​​to change in opposite directions. The capacitance measurement circuit converts the capacitance change into a voltage or current signal output, and the signal is proportional to the swing amount.

4. The surface topography detection probe device based on active yaw compensation according to claim 1, characterized in that, The split-type multi-plate capacitive sensor structure includes a middle plate and multiple independent plates on both sides, with an insulating layer between each plate. When the middle plate deflects with the rotation axis, it forms two sets of similar triangular geometric relationships with the two side plates. By measuring the changes in capacitance of multiple sets and using the proportional relationship of the similar triangles for calculation, a high signal-to-noise ratio measurement of the vertical displacement of the stylus can be achieved.

5. The surface topography detection probe device based on active yaw compensation according to claim 1, characterized in that, The actuator of the forward and backward yaw control correction module is a piezoelectric ceramic driver or a voice coil motor.

6. The surface topography detection probe device based on active yaw compensation according to claim 4, characterized in that, The insulating layer is made of ceramic, polymer, or air gap.

7. A method for surface topography detection using the surface topography detection probe device based on active yaw compensation as described in any one of claims 1 to 6, characterized in that, The method includes the following steps: Step 1: Place the sample to be tested on the measurement platform and adjust the probe to the initial position so that the stylus makes light contact with the sample surface; Step 2: Start the front and rear yaw measurement module and the vertical displacement measurement module to establish the initial benchmark; Step 3: Start the rear yaw control correction module and the upper and lower force balance control module. The front and rear yaw control correction module corrects the offset of the scanning direction in real time according to the yaw measurement signal, and the upper and lower force balance control module maintains a constant contact force. Step 4: Drive the sample platform or probe to perform scanning motion, and the vertical displacement measurement module continuously collects the vertical displacement data of the stylus. Step 5: After scanning, the morphology information of the sample surface is obtained through data processing.

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