Process tube detection apparatus and method

Abstract

The application discloses a kind of process pipe detection device and detection method, it is related to process pipe detection technical field, including operation platform and fixed seat, first sealing ring and second sealing ring fixed in the top of operation platform, annular groove is provided in the bottom of fixed seat inboard, multiple circumferentially uniform distribution of baffle is equipped in annular groove, multiple baffle separates annular groove into multiple independent air cavity, sliding cavity is opened in the top of each air cavity, detection unit for detecting air leakage point position is installed in sliding cavity, one sealing strip is installed between second sealing ring and each baffle, clamping ring assembly is detachably arranged in the inboard of fixed seat. By setting first sealing ring, second sealing ring, multiple independent air cavity and detection unit, the position of air leakage can be judged, the defect position can be processed and repaired in later period, the entire end face need not be reprocessed, time can be saved, repair efficiency is improved, and damage to process pipe is reduced.

Description

Technical Field

[0001] This invention relates to the field of process tube testing technology, and more specifically, to a process tube testing device and testing method. Background Technology

[0002] In semiconductor manufacturing and other fields, process tubes are core components in chemical vapor deposition (CVD) processes, and the flatness of their bottom end face directly affects sealing performance and equipment reliability. If the bottom end face of the process tube is not flat enough or has defects such as scratches or dents, air or liquid leakage is likely to occur after assembly, leading to decreased production efficiency, substandard product quality, and even safety hazards.

[0003] Existing devices for detecting the flatness of the bottom end face of process pipes are mostly designed based on the principle of air pressure detection. The core structure typically involves setting multiple concentric sealing rings of different diameters at the detection station, with an air inlet at the center of the station connected to a bottom air pump. The flatness or scratches on the end face are determined by the change in air pressure in the air path after air extraction. However, in practical applications, these traditional devices can only determine whether there is a leak by the overall air pressure change in the air path, and cannot locate the leaking area, which is not conducive to subsequent defect repair. Summary of the Invention

[0004] To solve the above-mentioned technical problems, the present invention provides the following technical solution:

[0005] This invention provides a process pipe detection device, including an operating table and a fixed base, a first sealing ring, and a second sealing ring fixed on the top of the operating table. An annular groove is provided on the bottom inner side of the fixed base. Multiple partitions are provided in the annular groove, which divides the annular groove into multiple independent air chambers. Each air chamber has a sliding cavity at its top. A detection unit for detecting air leakage points is installed in the sliding cavity. A sealing strip is installed between the second sealing ring and each partition. A retaining ring assembly is detachably provided on the inner side of the fixed base. The retaining ring assembly is provided with a sealing element that cooperates with the bottom of the process pipe. The bottom of the sealing element is provided with a receiving groove corresponding to the sealing strip.

[0006] The control panel has a first air hole, a second air hole, and an air inlet. The first air hole is located inside the first sealing ring, and the second air hole and the air inlet are located between the first and second sealing rings. The bottom of the first air hole and the second air hole are connected to the air pump through a distribution pipe. Both distribution pipes are equipped with air pressure sensors and solenoid valves. A valve is installed at the bottom of the air inlet.

[0007] Preferably, the detection unit includes a transparent chuck disposed at the top of the sliding cavity and a bracket disposed at the bottom of the sliding cavity. A sliding column is fixedly installed at the center of the bracket, and a piston disc is slidably disposed on the sliding column. A pressure sensor is installed at the top of the bracket, and a first spring is installed between the pressure sensor and the piston disc. The first spring is used to support the piston disc. The piston disc contacts and seals with the inner wall of the sliding cavity. The pressure sensor, air pump, air pressure sensor and solenoid valve are all electrically connected to an external controller.

[0008] Preferably, the retaining ring assembly also includes an annular mating part, the bottom of the seal and the mating part are engaged, the seal is annular, the outer diameter of the seal is corresponding to the fixed seat, the depth of the receiving groove at the bottom of the seal is smaller than the height of the sealing strip, multiple positioning blocks are fixedly provided on the inner side of the fixed seat, and a positioning groove is provided on the outer side of the seal to engage with the positioning blocks.

[0009] Preferably, it also includes a locking component, which includes a mounting cavity on the outer side of the top of the fixed base and an insertion hole on the outer side of the mating part. The position of the insertion hole corresponds to the position of the positioning groove. A locking element is slidably disposed in the mounting cavity. One end of the locking element near the mating part passes through the fixed base and is inserted into the insertion hole. The other end of the locking element extends to the outer side of the fixed base and is connected to a pull handle. A second spring is installed between the locking element and the mounting cavity.

[0010] Preferably, a first sealing ring is provided on the outer side of the mating part.

[0011] Preferably, the retaining ring assembly further includes a retaining ring member located inside the mating member. The retaining ring member includes two semicircular rings that are snapped together. A second sealing ring is provided at the bottom of each of the two semicircular rings. A rotating member for vertically limiting the retaining ring member is rotatably provided at the top of the mating member.

[0012] The present invention also provides a method for inspecting process tubes, using the process tube inspection device described above, comprising the following steps:

[0013] Step 1: Secure the seal and mating parts by snapping them together. Then, insert the positioning groove and positioning block into the positioning hole and use the locking part to insert into the hole to complete the assembly between the seal, mating parts and the fixed seat. Then, insert the process tube and place it inside the seal so that the bottom end face of the process tube fits and seals with the first sealing ring, the second sealing ring and the sealing strip.

[0014] Step 2: First, open the air pump, the valve at the bottom of the air inlet, and the solenoid valve on the air distribution pipe connected to the first air inlet. Use the air pump to draw air while simultaneously using a pressure sensor to detect the air pressure value. When the air pressure value drops to the set value, close the air pump and the solenoid valve, and monitor the air pressure value again using the pressure sensor. If the air pressure value remains unchanged or the rate of change is within the specified range, the airtightness is considered qualified, and there is no air leakage point at the position of the process pipe corresponding to the first sealing ring. If the rate of change of the air pressure value exceeds the specified range, it indicates that there is an air leakage point at the position of the process pipe corresponding to the first sealing ring, that is, the flatness of the bottom end face of the process pipe is insufficient or there are scratches.

[0015] Step 3: Close the valve at the bottom of the air inlet, open the air pump and the solenoid valves on the two air distribution pipes, and use the air pump to evacuate air. When the air pressure in both air distribution pipes drops to the set value, close the air pump and the two solenoid valves. During the evacuation process, if there is a leak at the location of the process pipe corresponding to the second sealing ring, the gas in the air chamber corresponding to the leak will also enter the space between the first and second sealing rings and be drawn away, causing the corresponding piston disc to move downward and compress the first spring. After the pressure sensor detects the change in spring force, it sends a signal to the external controller, which can determine that there is a leak in the area corresponding to the downward-moving piston disc. If there is no leak at the location of the process pipe corresponding to the second sealing ring, none of the piston discs will move downward, and the pressure sensor will not send a signal to the external controller.

[0016] Based on the above, the beneficial effects of the present invention are as follows:

[0017] This invention, by incorporating a first sealing ring, a second sealing ring, multiple independent air chambers, and a detection unit, not only reflects the flatness and presence of defects on the process tube end face during detection by checking for leaks, but also identifies the location of leaks. This allows for targeted repair of defective areas later, eliminating the need to rework the entire end face, saving time, improving repair efficiency, and reducing damage to the process tube. The detection unit can detect leaks by sending signals to an external controller via a pressure sensor, or by having operators directly observe the downward movement of the piston disc to determine the location of leaks. Combining these two methods makes the detection results more reliable. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 This is a schematic diagram of the structure of the retaining ring, mating parts, and sealing parts of the present invention;

[0020] Figure 3 This is a cross-sectional structural diagram of the present invention;

[0021] Figure 4 for Figure 3 Enlarged view of point A in the middle;

[0022] Figure 5 This is a schematic diagram of the structure of the first sealing ring, the second sealing ring, and the positioning block of the present invention;

[0023] Figure 6 This is a schematic diagram of the positioning block and fixing base of the present invention;

[0024] Figure 7 for Figure 6 Enlarged view of point B in the middle;

[0025] Figure 8 This is a schematic diagram of the structure of the partition and positioning block of the present invention;

[0026] Figure 9 This is a schematic diagram of the positioning groove, insertion hole, and rotating component of the present invention.

[0027] In the picture:

[0028] 1. Control panel; 2. First air vent; 3. Second air vent; 4. First sealing ring; 5. Sealing strip; 6. Second sealing ring; 7. Air inlet; 8. Fixed base; 9. Partition; 10. Air chamber; 11. Sliding chamber; 12. Transparent chuck; 13. Positioning block; 14. Mounting chamber; 15. Mating part; 16. Rotating part; 17. Insertion hole; 18. First sealing ring; 19. Sealing element; 20. Positioning groove; 21. Snap ring; 22. Second sealing ring; 23. Air pump; 24. Air distribution pipe; 25. Bracket; 26. Sliding column; 27. Piston disc; 28. Pressure sensor; 29. ​​First spring; 30. Locking element; 31. Pull handle; 32. Second spring. Detailed Implementation

[0029] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0030] The embodiments provided by the present invention will be described in detail below:

[0031] like Figures 1 to 9As shown, a process pipe detection device includes an operating table 1 and a fixed base 8, a first sealing ring 4 and a second sealing ring 6 fixed on the top of the operating table 1. The fixed base 8 is annular. The first sealing ring 4 and the second sealing ring 6 have different diameters but the same cross-sectional dimensions (the diameter of the second sealing ring 6 is larger than the diameter of the first sealing ring 4). The first sealing ring 4, the second sealing ring 6 and the fixed base 8 are coaxially arranged. A recessed annular groove is provided at the bottom of the inner side of the fixed base 8. Multiple partitions 9 are provided in the annular groove and are evenly distributed in the circumferential direction. The multiple partitions 9 divide the annular groove into multiple independent air chambers 10. A sliding cavity 11 is provided at the top of each air chamber 10. A detection unit for detecting air leakage points is installed in the sliding cavity 11.

[0032] A sealing strip 5 is installed between the second sealing ring 6 and each partition 9. The sealing strip 5 is flush with the top of the second sealing ring 6. A retaining ring assembly that mates with the outer wall of the bottom flange of the process tube is detachably installed on the inner side of the fixing seat 8. The process tube is existing technology and will not be described in detail here.

[0033] The control panel 1 has a first air hole 2, a second air hole 3, and an air inlet 7. The first air hole 2 is located at the center of the first sealing ring 4. The second air hole 3 and the air inlet 7 are located between the first sealing ring 4 and the second sealing ring 6. The bottom of the first air hole 2 and the second air hole 3 are connected to a distribution pipe 24. Both distribution pipes 24 are connected to the air pump 23. Both distribution pipes 24 are equipped with air pressure sensors and solenoid valves. The bottom of the air inlet 7 is connected to the outside. A valve is installed at the bottom of the air inlet 7 to control whether the air inlet 7 is closed. The air pump 23, air pressure sensors, and solenoid valves are all electrically connected to an external controller. The air pump 23, air pressure sensors, solenoid valves, valves, and controllers are all existing technologies and will not be described in detail here.

[0034] like Figure 2 , Figures 4 to 9 As shown, the retaining ring assembly includes an annular mating part 15. The bottom of the mating part 15 is fitted with an annularly arranged sealing part 19 that mates with the outer wall of the bottom flange of the process tube. The outer diameter of the sealing part 19 corresponds to the fixed seat 8, and the inner diameter of the sealing part 19 corresponds to the process tube. Sealing parts 19 with different inner diameters can be replaced to adapt to process tubes within a certain size range. The bottom of the sealing part 19 is provided with multiple receiving grooves, which correspond to multiple sealing strips 5 respectively. The depth of the receiving groove is smaller than the height of the sealing strip 5. When the sealing strip 5 is inserted into the receiving groove of the sealing part 19 for sealing, there is still a gap between the bottom surface of the sealing part 19 and the top surface of the operating table 1.

[0035] Multiple positioning blocks 13 are fixedly installed on the inner side of the fixed base 8. The outer side of the sealing element 19 is provided with a positioning groove 20 that is inserted and matched with the positioning block 13, which facilitates positioning and installation. The outer side of the mating part 15 is provided with a first sealing ring 18, which can seal the contact part between the mating part 15 and the fixed base 8.

[0036] It also includes a locking assembly for limiting the position of the mating part 15. The locking assembly includes a mounting cavity 14 opened on the outer side of the top of the fixing base 8 and an insertion hole 17 opened on the outer side of the mating part 15. The position of the insertion hole 17 corresponds to the position of the positioning groove 20. A locking member 30 is slidably disposed in the mounting cavity 14. One end of the locking member 30 near the mating part 15 passes through the fixing base 8 and is inserted into the insertion hole 17. The other end of the locking member 30 extends to the outer side of the fixing base 8 and is connected to a pull handle 31. A second spring 32 is installed between the locking member 30 and the mounting cavity 14. The second spring 32 is used to push the locking member 30 into the insertion hole 17. By setting the locking assembly, the user can quickly complete the installation or removal of the mating part 15.

[0037] Understandably, by setting up a detachable seal 19, when testing process pipes of different diameters, the user can replace the seal 19 with one that matches the diameter, and the installation is simple and quick, thus improving the applicability of the device.

[0038] like Figure 4 As shown, the detection unit includes a transparent chuck 12 disposed at the top of the sliding cavity 11 and a bracket 25 disposed at the bottom of the sliding cavity 11. A sliding column 26 is fixedly installed at the center of the bracket 25, and a piston disc 27 is slidably disposed on the sliding column 26. A pressure sensor 28 is installed at the top of the bracket 25. A first spring 29 is installed between the pressure sensor 28 and the piston disc 27. The first spring 29 is used to support the piston disc 27 and position the piston disc 27 below the transparent chuck 12. The pressure sensor 28 is used to detect the elastic force of the first spring 29. The piston disc 27 is in contact and sealed with the inner wall of the sliding cavity 11. The pressure sensor 28 is electrically connected to an external controller. The pressure sensor 28 is prior art and will not be described in detail here.

[0039] like Figure 1 , Figure 4 , Figure 9 As shown, the retaining ring assembly also includes a retaining ring 21 located inside the mating part 15. The retaining ring 21 includes two semicircular rings that are snapped together. The bottom of each of the two semicircular rings is provided with a second sealing ring 22. The top of the mating part 15 is rotatably provided with a rotating part 16 for vertically limiting the retaining ring 21.

[0040] The working principle of the above embodiments is as follows:

[0041] Before inspecting the process tube, select a suitable sealing element 19 according to the size of the process tube, and fix the sealing element 19 and the mating part 15. After fixing, the position of the insertion hole 17 corresponds to the position of the positioning groove 20. Align the positioning groove 20 with the positioning block 13 and pull the handle 31. After the locking part 30 is retracted into the mounting cavity 14, the positioning groove 20 and the positioning block 13 are inserted and mated. Then release the handle 31. The second spring 32 pushes the locking part 30 into the insertion hole 17, completing the positioning and assembly between the sealing element 19, the mating part 15 and the fixed seat 8. At this time, multiple sealing strips 5 are embedded into multiple receiving grooves respectively. The sealing strips 5 and the receiving grooves of the sealing element 19 are fitted and sealed. The side of the sealing element 19 near the fixed seat 8 is fitted and sealed with the inner wall of the fixed seat 8 and the partition 9. The positioning groove 20 on the sealing element 19 is fitted and sealed with the positioning block 13. There is a gap between the bottom surface of the sealing element 19 and the top surface of the operating table 1.

[0042] Next, insert the process tube inside the seal 19, ensuring that the outer bottom of the process tube (outer wall of the bottom flange of the process tube) is in contact with the inner wall of the seal 19 for sealing. The bottom end face of the process tube is also in contact with the first sealing ring 4, the second sealing ring 6, and multiple sealing strips 5 (a gap is left between the bottom end face of the process tube and the top surface of the operating table 1). Then, place the two semi-circular rings of the retaining ring 21 around the outside of the process tube. After the two semi-circular rings are locked in place, place them inside the mating part 15. Use the second sealing ring 22 to press down on the bottom flange of the process tube and the seal 19. Then, rotate the rotating part 16 at the top of the mating part 15 above the retaining ring 21, using the rotating part 16 to press down on the retaining ring 21, vertically limiting its position. Simultaneously, the second sealing ring 22 also helps to block the contact point between the seal 19 and the process tube. It should be noted that this device is used to inspect process tubes that are open at one end and closed at the other.

[0043] During testing, first open the air pump 23, the valve at the bottom of the air inlet 7, and the solenoid valve on the air distribution pipe 24 connected to the first air inlet 2. Use the air pump 23 to draw air, and simultaneously use the air pressure sensor on the air distribution pipe 24 to detect the air pressure value. When the air pressure value drops to the set value, close the air pump 23 and the solenoid valve, and monitor the air pressure value through the air pressure sensor. If the air pressure value remains unchanged, or the rate of change is within the specified range, the airtightness is considered qualified, and there is no air leakage point at the position of the process pipe corresponding to the first sealing ring 4. If the rate of change of the air pressure value exceeds the specified range (the speed at which external gas flows into the test area through the air inlet 7 exceeds the specified range), it indicates that there is an air leakage point at the position of the process pipe corresponding to the first sealing ring 4 (reflecting insufficient flatness or scratches on the bottom end face of the process pipe).

[0044] Then close the valve at the bottom of the air inlet 7, open the air pump 23 and the solenoid valves on the two air distribution pipes 24, use the air pump 23 to draw air, and use two air pressure sensors to detect the air pressure value. When the air pressure value in the two air distribution pipes 24 drops to the set value, close the air pump 23 and the two solenoid valves. During the evacuation process, if there is a leak at the location of the process pipe corresponding to the second sealing ring 6, the gas in the corresponding air chamber 10 will also enter the space between the first sealing ring 4 and the second sealing ring 6 and be drawn away. This causes the air pressure in the air chamber 10 to drop, making the air pressure below the piston disc 27 lower than the air pressure above the piston disc 27. This causes the piston disc 27 to move downwards and compress the first spring 29. The pressure sensor 28 can detect the elastic force of the first spring 29. When the piston disc 27 moves downwards, the elastic force of the first spring 29 increases. After detecting the change in elastic force, the pressure sensor 28 sends a signal to the external controller, which helps to determine whether there is a leak in the area corresponding to the piston disc 27. At the same time, the operator can also directly observe whether each piston disc 27 moves downwards to determine whether there is a leak. If there is no leak at the location of the process pipe corresponding to the second sealing ring 6, none of the piston discs 27 will move downwards.

[0045] By setting up a first sealing ring 4, a second sealing ring 6, multiple independent air chambers 10, and a detection unit, the detection system can not only reflect the flatness of the process tube end face and the presence of defects by checking for leaks, but also determine the location of the leak. This facilitates targeted processing and repair of the defective location later, eliminating the need to reprocess the entire end face, saving time, improving repair efficiency, and reducing damage to the process tube. The detection unit can send signals to an external controller via the pressure sensor 28 to indicate whether there is a leak and the location of the leak, or it can be determined by the operator directly observing whether the piston disc 27 moves downwards. Combining these two methods makes the detection results more reliable.

[0046] This embodiment also provides a method for detecting process tubes, using the process tube detection device described above, and includes the following steps:

[0047] Step 1: Secure the seal 19 and the mating part 15 by snapping them together. Then, insert the positioning groove 20 and the positioning block 13 into the positioning groove and use the locking part 30 to insert into the insertion hole 17 to complete the assembly between the seal 19, the mating part 15 and the fixed seat 8. Then, insert the process tube and place it inside the seal 19 so that the bottom end face of the process tube fits and seals with the first sealing ring 4, the second sealing ring 6 and the sealing strip 5.

[0048] Step 2: First, open the air pump 23, the valve at the bottom of the air inlet 7, and the solenoid valve on the air distribution pipe 24 connected to the first air inlet 2. Use the air pump 23 to draw air, and at the same time use the air pressure sensor to detect the air pressure value. When the air pressure value drops to the set value, close the air pump 23 and the solenoid valve, and monitor the air pressure value through the air pressure sensor. If the air pressure value remains unchanged, or the rate of change is within the specified range, it is considered that the airtightness is qualified, and there is no air leakage point at the position of the process pipe corresponding to the first sealing ring 4. If the rate of change of the air pressure value exceeds the specified range, it indicates that there is an air leakage point at the position of the process pipe corresponding to the first sealing ring 4, that is, the flatness of the bottom end face of the process pipe is insufficient or there are scratches.

[0049] Step 3: Close the valve at the bottom of the air inlet 7, open the air pump 23 and the solenoid valves on the two air distribution pipes 24, and use the air pump 23 to evacuate air. When the air pressure in both air distribution pipes 24 drops to the set value, close the air pump 23 and the two solenoid valves. During the evacuation process, if there is a leak at the position of the process pipe corresponding to the second sealing ring 6, the gas in the air chamber 10 corresponding to the leak will also enter the space between the first sealing ring 4 and the second sealing ring 6 and be drawn away, thereby causing the corresponding piston disc 27 to move downward and compress the first spring 29. After the pressure sensor 28 detects the change in elasticity, it sends a signal to the external controller, which can determine that there is a leak in the area corresponding to the downwardly moving piston disc 27. If there is no leak at the position of the process pipe corresponding to the second sealing ring 6, none of the piston discs 27 will move downward, and the pressure sensor 28 will not send a signal to the external controller.

[0050] It is readily understood that those skilled in the art can combine, split, or reorganize the embodiments provided in this application to obtain other embodiments, all of which do not exceed the protection scope of this application.

[0051] The present invention and its embodiments have been described above illustratively. This description is not restrictive, and the embodiments shown are only part of the embodiments of the present invention. The actual structure is not limited thereto. Therefore, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the spirit of the present invention, they should all fall within the protection scope of the present invention.

Claims

1. A process tube testing device, characterized in that, The device includes an operating table (1) and a fixed seat (8) fixed on the top of the operating table (1), a first sealing ring (4) and a second sealing ring (6). The bottom of the inner side of the fixed seat (8) is provided with an annular groove. Multiple partitions (9) are evenly distributed in the annular groove. The multiple partitions (9) divide the annular groove into multiple independent air chambers (10). Each air chamber (10) has a sliding cavity (11) at the top. A detection unit for detecting air leakage points is installed in the sliding cavity (11). A sealing strip (5) is installed between the second sealing ring (6) and each partition (9). A retaining ring assembly is detachably provided on the inner side of the fixed seat (8). The retaining ring assembly is provided with a sealing element (19) that cooperates with the bottom of the process pipe. The bottom of the sealing element (19) is provided with a receiving groove corresponding to the sealing strip (5). The control panel (1) is provided with a first air hole (2), a second air hole (3) and an air inlet (7). The first air hole (2) is located inside the first sealing ring (4). The second air hole (3) and the air inlet (7) are located between the first sealing ring (4) and the second sealing ring (6). The bottom of the first air hole (2) and the second air hole (3) are connected to the air pump (23) through a split air pipe (24). Both split air pipes (24) are equipped with air pressure sensors and solenoid valves. The bottom of the air inlet (7) is equipped with a valve.

2. The process tube testing device according to claim 1, characterized in that, The detection unit includes a transparent chuck (12) set at the top of the sliding cavity (11) and a bracket (25) set at the bottom of the sliding cavity (11). A sliding column (26) is fixedly installed at the center of the bracket (25). A piston plate (27) is slidably set on the sliding column (26). A pressure sensor (28) is installed at the top of the bracket (25). A first spring (29) is installed between the pressure sensor (28) and the piston plate (27). The first spring (29) is used to support the piston plate (27). The piston plate (27) is in contact with and sealed to the inner wall of the sliding cavity (11). The pressure sensor (28), the air pump (23), the air pressure sensor and the solenoid valve are all electrically connected to an external controller.

3. The process tube testing device according to claim 2, characterized in that, The retaining ring assembly also includes an annular mating part (15), and the bottom of the sealing part (19) is engaged with the mating part (15). The sealing part (19) is annular, and the outer diameter of the sealing part (19) is correspondingly set with the fixed seat (8). The depth of the receiving groove at the bottom of the sealing part (19) is smaller than the height of the sealing strip (5). Multiple positioning blocks (13) are fixedly set on the inner side of the fixed seat (8), and a positioning groove (20) is opened on the outer side of the sealing part (19) to engage with the positioning block (13).

4. The process tube testing device according to claim 3, characterized in that, It also includes a locking assembly, which includes a mounting cavity (14) opened on the outer side of the top of the fixed base (8) and an insertion hole (17) opened on the outer side of the mating part (15). The position of the insertion hole (17) corresponds to the position of the positioning groove (20). A locking member (30) is slidably arranged in the mounting cavity (14). One end of the locking member (30) near the mating part (15) passes through the fixed base (8) and is inserted into the insertion hole (17). The other end of the locking member (30) extends to the outer side of the fixed base (8) and is connected to a pull handle (31). A second spring (32) is installed between the locking member (30) and the mounting cavity (14).

5. The process tube testing device according to claim 4, characterized in that, A first sealing ring (18) is provided on the outside of the mating part (15).

6. The process tube testing device according to claim 5, characterized in that, The retaining ring assembly also includes a retaining ring (21) located inside the mating part (15). The retaining ring (21) includes two semicircular rings that are snapped together. The bottom of each semicircular ring is provided with a second sealing ring (22). The top of the mating part (15) is rotatably provided with a rotating part (16) for vertically limiting the retaining ring (21).

7. A method for detecting process tubes, characterized in that, The process tube testing device as described in claim 6 includes the following steps: Step 1: Secure the seal (19) and the mating part (15) by snapping them together. Then, insert the positioning groove (20) and the positioning block (13) together and use the locking part (30) to insert into the socket (17) to complete the assembly between the seal (19), the mating part (15) and the fixed seat (8). Then, insert the process tube and place it inside the seal (19) so that the bottom end face of the process tube fits and seals with the first sealing ring (4), the second sealing ring (6) and the sealing strip (5). Step 2: First, open the air pump (23), the valve at the bottom of the air inlet (7), and the solenoid valve on the air distribution pipe (24) connected to the first air inlet (2). Use the air pump (23) to pump air, and at the same time use the air pressure sensor to detect the air pressure value. When the air pressure value drops to the set value, close the air pump (23) and the solenoid valve, and monitor the air pressure value through the air pressure sensor. If the air pressure value remains unchanged, or the rate of change is within the specified range, it is considered that the air tightness is qualified, and there is no air leakage point at the position of the process pipe corresponding to the first sealing ring (4). If the rate of change of the air pressure value exceeds the specified range, it indicates that there is an air leakage point at the position of the process pipe corresponding to the first sealing ring (4), that is, the flatness of the bottom end face of the process pipe is insufficient or there are scratches. Step 3: Close the valve at the bottom of the air inlet (7), open the air pump (23) and the solenoid valves on the two air distribution pipes (24), and use the air pump (23) to pump air. When the air pressure in the two air distribution pipes (24) drops to the set value, close the air pump (23) and the two solenoid valves. During the pumping process, if there is a leak at the position of the process pipe corresponding to the second sealing ring (6), the gas in the air chamber (10) corresponding to the leak will also enter the space between the first sealing ring (4) and the second sealing ring (6) and be pumped away, thereby causing the corresponding piston disc (27) to move downward and compress the first spring (29). After the pressure sensor (28) detects the change in elasticity, it sends a signal to the external controller and can determine that there is a leak in the area corresponding to the downward moving piston disc (27). If there is no leak at the position of the process pipe corresponding to the second sealing ring (6), then each piston disc (27) will not move downward and the pressure sensor (28) will not send a signal to the external controller.

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