Asymmetric response superconducting resonator loaded with vertical through hole and interdigital capacitor and superconducting filter based on resonator
By loading a vertical through-hole and interdigitated capacitors into an asymmetric response superconducting resonator, the problems of low design freedom, large size and insufficient performance of traditional high-temperature superconducting filters are solved. It realizes controllable transmission zero point, independent control of odd and even modes and miniaturization of filters, which is suitable for the three-dimensional integration development of high-temperature superconducting circuits.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- YANGTZE RIVER DELTA RES INST OF NPU TAICANG
- Filing Date
- 2026-03-06
- Publication Date
- 2026-05-12
AI Technical Summary
Traditional high-temperature superconducting filters suffer from limitations in the introduction of transmission zeros, resulting in low design freedom, increased size, insufficient selectivity and out-of-band suppression, difficulty in independently controlling odd and even mode frequencies, contradictions between structural integration and miniaturization, and poor process compatibility.
An asymmetric response superconducting resonator with a loaded vertical via and interpolated capacitors is designed. By adjusting the position of the interpolated capacitors and structural parameters, a transmission zero is introduced and zero-point controllable is achieved. Combined with a folded microstrip structure and a ground via, an asymmetric response superconducting resonator is designed to achieve independent control of odd and even mode frequencies and miniaturization of the filter.
It achieves flexible and controllable transmission zero point, significantly improved filtering performance, compact and miniaturized structure, and independently adjustable odd and even mode frequencies. It is suitable for the three-dimensional integrated development of high-temperature superconducting circuits, has good process compatibility, and is suitable for the fabrication of high-quality high-temperature superconducting thin films.
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Figure CN122026048A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the fields of high-temperature superconducting circuits and microwave communication technology, specifically to an asymmetric response superconducting resonator with a vertical via and interdigitated capacitance, and a superconducting filter based on the resonator. Background Technology
[0002] Modern wireless communication and radar equipment continue to evolve towards miniaturization, placing increasingly stringent demands on front-end filtering devices. High-temperature superconducting filters, due to their excellent characteristics such as low insertion loss and high quality factor, have been widely used in high-performance filter design. To keep pace with the trend of system miniaturization, researchers are constantly optimizing various resonator topologies, maintaining excellent electrical performance while significantly compressing geometric dimensions, thus enabling the widespread deployment of these filters in platforms such as miniature radars.
[0003] Traditional filter design primarily employs two methods to introduce transmission zeros: the first is through cross-coupling, and the second is by loading a quarter-wavelength branch. Introducing cross-coupling in a filter requires arranging the resonators in a specific layout, which limits the design freedom. Loading a quarter-wavelength branch inevitably introduces additional topology, increasing design complexity and size. Therefore, there is an urgent need to propose novel methods and structures for introducing transmission zeros.
[0004] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of the present invention, and therefore may include information that does not constitute prior art known to those skilled in the art. Summary of the Invention
[0005] To address the limitations of traditional high-temperature superconducting filters, such as restricted transmission zero-point introduction methods (relying on specific cross-coupling layouts or additional branches leading to low design freedom and increased size), insufficient selectivity and out-of-band suppression performance, difficulty in independently controlling odd and even mode frequencies, contradictions between structural integration and miniaturization, and poor process compatibility, this invention provides an asymmetric response superconducting resonator based on loaded vertical vias and interpolated capacitors, and a superconducting filter based on this resonator.
[0006] Other features and advantages of the invention will become apparent from the following detailed description, or may be learned in part by practice of the invention.
[0007] According to a first aspect of the present invention, an asymmetric-response superconducting resonator with loaded vertical vias and interdigitated capacitances is provided, comprising: The system includes a dielectric substrate and a high-temperature superconducting thin film layer located on the dielectric substrate. A resonator structure is constructed on the high-temperature superconducting thin film layer. The resonator structure includes a single-ended grounded folded microstrip structure, interdigitated capacitors, a rectangular microstrip block grounding structure, and a grounding via, wherein: The single-ended grounded folded microstrip structure integrates the interdigitated capacitor and connects to the grounding via through the rectangular microstrip block grounding structure to achieve the grounding function.
[0008] In some exemplary embodiments, the high-temperature superconducting thin film layer is made of yttrium barium copper oxide (YBCO) or bismuth strontium calcium copper oxide (BSCCO).
[0009] In some exemplary embodiments, the single-ended grounded folded microstrip structure employs a microstrip line bending design to reduce the resonator volume.
[0010] According to a second aspect of the present invention, a resonator-based superconducting filter is provided, comprising a dielectric substrate and a high-temperature superconducting thin film layer located on the dielectric substrate, wherein a filter circuit is constructed on the high-temperature superconducting thin film layer, the filter circuit comprising a plurality of resonators, a first feed line auxiliary line structure, a second feed line auxiliary line structure, and input and output 50 Microstrip feed; multiple resonators staggered, input 50 The microstrip feed line is located on one side of the resonator, with an output of 50. The microstrip feed line is located on the other side of the resonator, and the first feed line auxiliary line structure is connected to the input 50. Microstrip feeder connection, second feeder auxiliary line structure and output 50 Microstrip feeder connection.
[0011] In some exemplary embodiments, when the filter is a fourth-order transversely cross-coupled filter, it includes four resonators. These four resonators, from input to output, are a first grounded multimode resonator, a second grounded multimode resonator, a third grounded multimode resonator, and a fourth grounded multimode resonator, respectively. All four resonators are placed in parallel. The rectangular microstrip grounding structures of the first and third grounded multimode resonators are oriented in the same direction; the rectangular microstrip grounding structures of the second and fourth grounded multimode resonators are also oriented in the same direction. The four grounded multimode resonators collectively provide the filter's eight pole frequencies. The first feeder auxiliary line structure and input 50 The microstrip feed line is connected and located to the left of the first grounded multimode resonator; The second feeder auxiliary line structure and output 50 The microstrip feeder is connected and located to the right of the fourth grounded multimode resonator.
[0012] In some exemplary embodiments, the even-mode frequency positions of the first, second, third, and fourth grounding multimode resonators are controlled by adjusting the width of the rectangular microstrip block grounding structure and the radius of the grounding via in the first, second, third, and fourth grounding multimode resonators.
[0013] In some exemplary embodiments, the odd-mode frequency positions of the first, second, third, and fourth grounded multimode resonators are controlled by adjusting the lengths of the interdigitated capacitors included in the first, second, third, and fourth grounded multimode resonators.
[0014] In some exemplary embodiments, by adjusting the position of the interdigitated capacitors included in the first, second, third, and fourth grounded multimode resonators, cross-coupling is generated between the first, second, third, and fourth grounded multimode resonators, respectively, to provide and control the transmission zeros and their positions outside the filter passband.
[0015] In some exemplary embodiments, the first feeder auxiliary line structure is a bent line.
[0016] In some exemplary embodiments, the second feeder auxiliary line structure is a bent line.
[0017] The embodiments of this invention provide an asymmetric-response superconducting resonator with loaded vertical vias and interpolation capacitors, and a superconducting filter based on this resonator. The aim is to propose a resonator structure design method that alters the internal coupling of the resonator by adjusting the position of the interpolation capacitors, thereby generating asymmetric transmission zeros and achieving zero-point controllability. Based on this, this invention designs a novel superconducting multimode resonator with a grounded via on a superconducting substrate. By adjusting the resonator topology, the required cross-coupling is achieved, introducing transmission zeros and significantly improving the selectivity and out-of-band suppression performance of the filter without increasing device size. Furthermore, based on the aforementioned novel resonator, a fourth-order lateral cross-coupling topology is designed to realize a high-temperature superconducting microstrip filter with multiple transmission zeros. This device maintains low insertion loss while significantly reducing wafer footprint through a folded layout, exhibiting steep sideband suppression and excellent in-band consistency. Its design parameters are adjustable and fully compatible with existing thin-film processes, meeting both engineering fabrication requirements and providing a feasible technical route for the miniaturization and mass production of high-performance microwave front-ends, demonstrating high industrialization potential. Compared to existing technologies, it has the following beneficial effects: 1. Flexible and controllable transmission zeros, significantly improved filtering performance: This invention proposes a grounded multimode resonator for the first time. By adjusting the position of the interdigitated capacitors to change the internal cross-coupling of the resonator, the transmission zeros outside the filter passband and their positions can be provided and controlled.
[0018] 2. Compact and miniaturized structure with optimized space utilization: At the end of the single-ended grounded folded microstrip structure, the microstrip line is bent to reduce the volume of the resonator and achieve the miniaturization of the filter. The filter adopts a folded layout and a left-right symmetrical structure, which significantly reduces the wafer area occupied, providing key technical support for the miniaturization of microwave front-end systems and perfectly meeting the miniaturization development needs of modern wireless communication and radar equipment.
[0019] 3. Independent control of even and odd modes, high design freedom: By independently adjusting the relative width of the rectangular microstrip block grounding structure and the relative length of the interdigitated capacitors, the even-mode and odd-mode frequencies of the grounded multimode resonator can be precisely controlled separately; at the same time, the aperture adjustment of the grounding via can help optimize the even-mode frequency, realizing independent control of the even and odd-mode frequencies, providing a flexible means for frequency band adaptation and performance fine-tuning of the filter, and adapting to the frequency requirements of different application scenarios.
[0020] 4. An asymmetric response superconducting resonator is proposed, in which a single resonator controls the position of a transmission zero, significantly improving the selectivity and out-of-band suppression performance of the filter; 4. A method for realizing through holes in high-temperature superconducting substrates was proposed, which promoted the three-dimensional integration of high-temperature superconducting circuits; 5. It features flexible design, compact structure, and easy integration, making it suitable for the fabrication of high-quality high-temperature superconducting thin films.
[0021] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit the invention. Attached Figure Description
[0022] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention. It is obvious that the drawings described below are merely some embodiments of the invention, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.
[0023] Figure 1 This is an example of an asymmetric response superconducting resonator structure based on a loaded vertical via and interpolated capacitors in this invention embodiment; Figure 2 The above are simulation results of transmission zero control of an asymmetric response superconducting resonator structure based on loaded vertical vias and interpolated capacitors in an embodiment of the present invention. Figure 3 The odd-mode and even-mode resonant frequencies of the asymmetric response superconducting resonator structure based on loaded vertical vias and interpolated capacitors in this embodiment of the invention, as well as the frequency response at different widths w4; Figure 4 The odd-mode and even-mode resonant frequencies of the asymmetric response superconducting resonator structure based on loaded vertical vias and interpolated capacitors in this embodiment of the invention, as well as the frequency response at different widths w1; Figure 5 The odd-mode and even-mode resonant frequencies of the asymmetric response superconducting resonator structure based on loaded vertical through-holes and interpolated capacitors in the embodiments of the present invention, as well as the frequency response at different radii r; Figure 6 This is a schematic diagram of the structure of a high-temperature superconducting filter using four multimode resonators in an embodiment of the present invention; Figure 7 This is the topology of a superconducting filter structure based on two multimode resonators in an embodiment of the present invention; Figure 8 This is the superconducting filter structure based on two multimode resonators in this embodiment of the invention (corresponding to...). Figure 7 The response curve of ). Figure 9 This refers to the high-temperature superconducting filter based on four multimode resonators in this embodiment of the invention (corresponding to...). Figure 6 Response curve.
[0024] Explanation of reference numerals in the attached figures: 1-Dielectric substrate, 2-Input 50 3-First feeder auxiliary line structure, 4-First rectangular microstrip block grounding structure, 5-First interdigital capacitor structure, 6-First single-ended grounded folded microstrip structure, 7-Second rectangular microstrip block grounding structure, 8-Second interdigital capacitor structure, 9-Second single-ended grounded folded microstrip structure, 10-Third rectangular microstrip block grounding structure, 11-Third interdigital capacitor structure, 12-Third single-ended grounded folded microstrip structure, 13-Fourth rectangular microstrip block grounding structure, 14-Fourth interdigital capacitor structure, 15-Fourth single-ended grounded folded microstrip structure, 16-Second feeder auxiliary line structure, 17-Output 50 Microstrip feeder, 18-first grounding via, 19-second grounding via, 20-third grounding via, 21-fourth grounding via. Detailed Implementation
[0025] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the examples set forth herein; rather, they are provided so that the invention will be more comprehensive and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
[0026] Furthermore, the accompanying drawings are merely illustrative of the invention and are not necessarily drawn to scale. The same reference numerals in the drawings denote the same or similar parts, and therefore repeated descriptions of them will be omitted. Some block diagrams shown in the drawings are functional entities and do not necessarily correspond to physically or logically independent entities. These functional entities can be implemented in software, in one or more hardware modules or integrated circuits, or in different network and / or processor devices and / or microcontroller devices.
[0027] The following technical challenges exist in the field of high-temperature superconducting filters under the trend of miniaturization in modern wireless communication and radar equipment: 1. Limitations of traditional transmission zero introduction methods: Existing methods for introducing transmission zeros in filters mainly rely on cross-coupling with a specific layout or loading a quarter-wavelength branch. The former restricts the design freedom of the filter, while the latter requires additional topology, which increases design complexity and device size, making it impossible to balance flexibility and miniaturization requirements.
[0028] 2. Bottleneck issues in improving filter selectivity and out-of-band suppression performance: As communication systems demand higher levels of signal anti-interference capabilities, traditional filters struggle to achieve steep attenuation at the passband edge and strong out-of-band suppression over a wide frequency range without increasing their size. This makes them unable to effectively block out-of-band interference signals and affects communication quality.
[0029] 3. Insufficient flexibility in resonator frequency control: The odd-mode and even-mode frequencies of existing multimode resonators are strongly correlated, making it difficult to achieve independent and precise adjustment. This results in poor filter frequency band adaptability and an inability to flexibly meet the frequency requirements of different application scenarios.
[0030] 4. The contradiction between integration and miniaturization of high-temperature superconducting circuits: Although high-temperature superconducting filters have the advantages of low insertion loss and high quality factor, the traditional structure layout is loose, the wafer area is large, and there is a lack of efficient three-dimensional interconnection technology, which restricts the miniaturization and integration of microwave front-end systems.
[0031] 5. Process compatibility and engineering mass production adaptation issues: Some new filter structures are complex in design, have poor compatibility with existing thin film processes, are difficult to process, and cannot meet the requirements of engineering fabrication, thus limiting their industrial application.
[0032] To address the shortcomings and deficiencies of existing technologies, this example embodiment provides an asymmetric response superconducting resonator with a vertical via and interpolated capacitors, and a superconducting filter based on the resonator. Through the interpolation coupling effect of the internal structure of the resonator, a transmission zero is introduced and the zero is controllable. By adjusting structural parameters such as the position of the interpolation fingers, the transmission zero can appear at the low end or the high end of the passband, greatly improving the design freedom of the transmission zero.
[0033] In a first aspect, the present invention provides an asymmetric-response superconducting resonator with loaded vertical vias and interdigitated capacitors, such as... Figure 1 As shown, the device includes a dielectric substrate and a high-temperature superconducting thin film layer located on the dielectric substrate. A resonator structure is constructed on the high-temperature superconducting thin film layer. The resonator structure includes a single-end grounded folded microstrip structure, interdigitated capacitors, a rectangular microstrip block grounding structure, and a grounding via. The interdigitated capacitors are integrated inside the single-end grounded folded microstrip structure and are connected to the grounding via through the rectangular microstrip block grounding structure to achieve the grounding function.
[0034] Secondly, the present invention also provides a superconducting filter based on the above-mentioned resonators, comprising a dielectric substrate and a high-temperature superconducting thin film layer located on the dielectric substrate, wherein a filter circuit is constructed on the high-temperature superconducting thin film layer, the filter circuit comprising a plurality of the resonators, a first feed line auxiliary line structure, a second feed line auxiliary line structure, and input and output 50 Microstrip feed. The number of resonators is determined by the filter order. Multiple resonators are staggered, with an input of 50... The microstrip feed line is located on one side of the resonator, with an output of 50. The microstrip feed line is located on the other side of the resonator, and the first feed line auxiliary line structure is connected to the input 50. Microstrip feeder connection, second feeder auxiliary line structure and output 50 Microstrip feeder connection.
[0035] For example, such as Figure 6 As shown, this is a fourth-order transverse cross-coupled filter, comprising a dielectric substrate 1 and a high-temperature superconducting thin film layer located on the dielectric substrate 1. A filter circuit is constructed on the high-temperature superconducting thin film layer. The filter circuit includes: four resonators, a first feed line auxiliary line structure, a second feed line auxiliary line structure, and input and output 50... Microstrip feeder.
[0036] The four resonators, from input to output, are a first grounded multimode resonator, a second grounded multimode resonator, a third grounded multimode resonator, and a fourth grounded multimode resonator, respectively. All four resonators are placed in parallel. The rectangular microstrip grounding structures of the first and third grounded multimode resonators face the same direction; the rectangular microstrip grounding structures of the second and fourth grounded multimode resonators also face the same direction. These four grounded multimode resonators collectively provide the eight pole frequencies of the filter.
[0037] Specifically, the first grounded multimode resonator includes a first single-ended grounded folded microstrip structure 6, a first interdigitated capacitor structure 5, a first rectangular microstrip block grounding structure 4, and a first grounding via 18; the first single-ended grounded folded microstrip structure 6 has a first feeder auxiliary line structure 3 on its left side and an input terminal 50 connected thereto. The microstrip feeder 2 has a first interdigitated capacitor structure 5 inside, and its upper side is connected to the first grounding through hole 18 through the first rectangular microstrip block grounding structure 4.
[0038] The second grounded multimode resonator includes a second single-ended grounded folded microstrip structure 9, a second interdigitated capacitor structure 8, a second rectangular microstrip block grounding structure 7, and a second grounding via 19; the second single-ended grounded folded microstrip structure 9 has a second interdigitated capacitor structure 8 inside, and its upper side is connected to the second grounding via 19 through the second rectangular microstrip block grounding structure 7.
[0039] The third grounded multimode resonator includes a third single-ended grounded folded microstrip structure 12, a third interdigitated capacitor structure 11, a third rectangular microstrip block grounding structure 10, and a third grounding via 20. The third single-ended grounded folded microstrip structure 12 has a third interdigitated capacitor structure 11 inside, and its upper side is connected to the third grounding via 20 through the third rectangular microstrip block grounding structure 10.
[0040] The fourth grounded multimode resonator includes a fourth single-ended grounded folded microstrip structure 15, a fourth interdigital capacitor structure 14, a fourth rectangular microstrip block grounding structure 13, and a fourth grounding via 21. The fourth single-ended grounded folded microstrip structure 15 contains the fourth interdigital capacitor structure 14, and its upper side is connected to the fourth grounding via 21 through the fourth rectangular microstrip block grounding structure 13. To its right is a second feeder auxiliary line structure 16 and an output 50... Microstrip feeder 17.
[0041] By adjusting the width w4 of the first rectangular microstrip grounding structure 4, the second rectangular microstrip grounding structure 7, the third rectangular microstrip grounding structure 10, and the fourth rectangular microstrip grounding structure 13, and the radius r of the grounding via located above, the even-mode frequency positions of the first, second, third, and fourth grounding multimode resonators are controlled.
[0042] The odd-mode frequency positions of the first, second, third, and fourth grounded multimode resonators are controlled by adjusting the length w1 of the first interdigital capacitor 5, the second interdigital capacitor 8, the third interdigital capacitor 11, and the fourth interdigital capacitor 14, respectively.
[0043] By adjusting the positions d of the first interdigital capacitor structure 5, the second interdigital capacitor structure 8, the third interdigital capacitor structure 11, and the fourth interdigital capacitor structure 14, i.e., the vertical distance between the interdigital capacitor structure and the bend of the single-ended grounded folded microstrip structure, the transmission zero point outside the passband of the filter and its position are provided and controlled.
[0044] Furthermore, it consists of first, second, third, and fourth grounded multimode resonators, as well as input and output 50... The overall filter structure formed by the microstrip feed line is a left-right symmetrical structure.
[0045] Furthermore, the system comprises first, second, third, and fourth single-ended grounded folded microstrip structures, first, second, third, and fourth interdigital capacitors, high-resistivity microstrip lines, and grounding structures. In this example, the grounding fabrication method involves pre-reserving a large microstrip patch block on the upper layer of the dielectric substrate and then using a drilling process to create through-holes, thereby achieving interconnection between the upper and lower layers of the dielectric substrate.
[0046] Furthermore, cross-coupling is generated between the first, second, third, and fourth grounded multimode resonators to provide and control the transmission zeros and their locations outside the filter passband.
[0047] Furthermore, the main function of the first feeder auxiliary line structure 3 and the second feeder auxiliary line structure 16 is to cooperate with the input 50. Microstrip feeder 2, output 50 The microstrip feed line 17 provides a suitable coupling strength for the overall filter structure, mainly playing the role of enhancing coupling and excitation.
[0048] Furthermore, the high-temperature superconducting thin film layer can be made of yttrium barium copper oxide (YBCO) or bismuth strontium calcium copper oxide (BSCCO). High-temperature superconducting thin films generally refer to superconducting materials with a critical temperature above 77 K and near-zero electrical resistance. They are typically used in liquid nitrogen (77 K) cooling environments and are mainly divided into two types: yttrium barium copper oxide (YBCO) and bismuth strontium calcium copper oxide (BSCCO). Compared to conventional thin film materials (such as copper), high-temperature superconducting thin films exhibit zero resistance and diamagnetic properties in the superconducting state.
[0049] In this embodiment, the overall shape is rectangular, and the remaining dimensions can also form a corresponding filter circuit. It is worth noting that the simulation tool used in this invention is Sonnet EM, the superconducting substrate used is MgO / YBCO, and the dielectric constant of the substrate is 9.73. This embodiment is only one of the solutions.
[0050] The invention will be further explained below with reference to structural dimensions and simulation results: Figure 2 Simulation results of transmission zero control based on an asymmetric response superconducting resonator structure in this embodiment of the invention show that when l1=8.18mm, l2=0.66mm, w1=0.84mm, w2=0.06mm, w3=0.22mm, r=0.105mm, and s=0.16mm, the position of the transmission zero can be controlled by adjusting the distance d between the interdigital capacitor and the resonator. When the distance d between the interdigital capacitor and the resonator is reduced from 1.6mm to 0.2mm, the transmission zero can move from 2.8GHz to 3.9GHz, and from the lower end of the passband to the upper end of the passband.
[0051] Figure 3 The odd-mode and even-mode resonant frequencies of the asymmetric response superconducting resonator structure based on loaded vertical vias and interdigitated capacitors in embodiments of the present invention, as well as the frequency response at different widths w4, are given. When l1=8.18mm, l2=0.66mm, w1=0.84mm, w2=0.06mm, w3=0.22mm, r=0.105mm, and d=0.44mm, as the relative length w4 of the rectangular microstrip block to the resonator increases from 0.4mm to 0.8mm, the even-mode frequency feven of the asymmetric response superconducting resonator structure shifts from 3.32GHz to 3.2GHz, with the even-mode frequency feven shifting to lower frequencies, while the odd-mode frequency fodd remains almost unchanged.
[0052] Figure 4 The odd-mode and even-mode resonant frequencies of the asymmetric response superconducting resonator structure based on loaded vertical vias and interdigitated capacitors in embodiments of the present invention, as well as the frequency response at different widths w1, are given. When the length w1 of the interdigitated capacitors decreases from 0.8 mm to 0.4 mm, the odd-mode frequency fodd of the multimode filter shifts from 3.43 GHz to 3.65 GHz, with the odd-mode frequency fodd shifting towards higher frequencies, while the even-mode frequency feven remains almost unchanged.
[0053] Figure 5 The odd-mode and even-mode resonant frequencies of the asymmetric response superconducting resonator structure based on a loaded vertical via and interdigitated capacitors in this embodiment of the invention are presented, along with the frequency response at different aperture sizes r. As the aperture size r of the grounding via increases from 0.075 mm to 0.15 mm, the even-mode frequency feven of the asymmetric response superconducting resonator structure shifts from 3.28 GHz to 3.34 GHz, indicating a shift towards higher frequencies, while the odd-mode frequency fodd remains almost unchanged.
[0054] By adjusting the corresponding structural parameters, the odd and even modes can be independently controlled.
[0055] Figure 9 The final response curve of the fourth-order multimode filter is shown. As can be seen from the figure, the passband range below -3dB of the filter of this invention is 3.38GHz-4.5GHz, with an absolute bandwidth of 0.92GHz and a center frequency of 3.9GHz. The ratio to the first octave is approximately 3.74. Furthermore, the highest S11 value within the overall passband is -18.4dB, with the rest being close to or less than -20dB. This indicates that the filter of this invention has excellent broadband performance and low return loss within the passband. S21 outperforms -43dB in the frequency range of 4.7GHz to 8.5GHz, and in the range of -3dB (4.5 GHz) to -68.2dB (4.79 GHz), the simulated attenuation slope at the higher frequency band edge is 284.7 dB / GHz, and at the lower limit edge is 396.3 dB / GHz, ranging from -3dB (3.38 GHz) to -56.5 dB (3.245 GHz). This demonstrates that the filter designed using the method of this invention has strong selectivity and out-of-band suppression performance, as well as practical engineering value.
[0056] In summary, this invention proposes an asymmetric-response superconducting resonator with vertical vias and interdigitated capacitors, and a superconducting filter based on this resonator. By adjusting the internal structural parameters of the resonator to introduce transmission zeros, single-ended zero control is achieved, resulting in high-order filters constructed from this resonator exhibiting good in-band and out-of-band performance. Miniaturization of the filter layout design is realized. Furthermore, using vertical via technology on a superconducting substrate, efficient interconnection of upper and lower layer circuits is achieved within a YBCO / MgO superconducting substrate, realizing three-dimensional integration of high-temperature superconducting circuits. The grounded multimode resonator designed based on this has a compact structure, and the odd and even mode frequencies can be flexibly adjusted by the width of the rectangular microstrip grounding structure within the resonator, the length of the interdigitated capacitors, and the aperture of the grounding via, providing a high degree of design freedom. This resonator can generate transmission zeros within its core structure without introducing additional open branches or complex structures, and the position of the transmission zeros can be controlled by adjusting the cross-coupling within the resonator, significantly improving the selectivity and out-of-band rejection performance of the filter. A fourth-order transversely cross-coupled filter constructed based on this resonator exhibits low insertion loss, excellent frequency response, and compact physical dimensions. Furthermore, this structure is highly compatible with various processes, easy to manufacture, and suitable for high-temperature superconducting thin film processes with high quality factors. It has good engineering practicality and broad application prospects.
[0057] Other embodiments of the invention will readily occur to those skilled in the art upon consideration of the specification and practice of the invention herein. This application is intended to cover any variations, uses, or adaptations of the invention that follow the general principles of the invention and include common knowledge or customary techniques in the art not disclosed herein. The specification and embodiments are to be considered exemplary only, and the true scope and spirit of the invention are indicated by the claims.
[0058] It should be understood that the present invention is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of the invention is defined only by the appended claims.
Claims
1. An asymmetric-response superconducting resonator with a vertical via and interdigitated capacitance, characterized in that, The system includes a dielectric substrate and a high-temperature superconducting thin film layer located on the dielectric substrate. A resonator structure is constructed on the high-temperature superconducting thin film layer. The resonator structure includes a single-ended grounded folded microstrip structure, interdigitated capacitors, a rectangular microstrip block grounding structure, and a grounding via, wherein: The single-ended grounded folded microstrip structure integrates the interdigitated capacitor and connects to the grounding via through the rectangular microstrip block grounding structure to achieve the grounding function.
2. The asymmetric response superconducting resonator according to claim 1, characterized in that, The high-temperature superconducting thin film layer is made of yttrium barium copper oxide (YBCO) or bismuth strontium calcium copper oxide (BSCCO).
3. The asymmetric response superconducting resonator according to claim 1, characterized in that, The single-ended grounded folded microstrip structure employs a microstrip line bending design to reduce the resonator volume.
4. A superconducting filter based on the resonator of claim 1, characterized in that, The system includes a dielectric substrate and a high-temperature superconducting thin film layer on the dielectric substrate. A filter circuit is constructed on the high-temperature superconducting thin film layer. The filter circuit includes multiple resonators, a first feed line auxiliary line structure, a second feed line auxiliary line structure, and input and output 50°C / ... Microstrip feed; multiple resonators staggered, input 50 The microstrip feed line is located on one side of the resonator, with an output of 50. The microstrip feed line is located on the other side of the resonator, and the first feed line auxiliary line structure is connected to the input 50. Microstrip feeder connection, second feeder auxiliary line structure and output 50 Microstrip feeder connection.
5. A superconducting filter based on the resonator of claim 4, characterized in that, When the filter is a fourth-order transversely cross-coupled filter, it includes four resonators. From input to output, these four resonators are a first grounded multimode resonator, a second grounded multimode resonator, a third grounded multimode resonator, and a fourth grounded multimode resonator. All four resonators are placed in parallel. The rectangular microstrip grounding structures of the first and third grounded multimode resonators face the same direction; the rectangular microstrip grounding structures of the second and fourth grounded multimode resonators also face the same direction. These four grounded multimode resonators collectively provide the filter's eight pole frequencies. The first feeder auxiliary line structure and input 50 The microstrip feed line is connected and located to the left of the first grounded multimode resonator; The second feeder auxiliary line structure and output 50 The microstrip feeder is connected and located to the right of the fourth grounded multimode resonator.
6. The superconducting filter according to claim 5, characterized in that, By adjusting the width of the rectangular microstrip block grounding structure and the radius of the grounding via in the first, second, third, and fourth grounding multimode resonators, the even-mode frequency positions of the first, second, third, and fourth grounding multimode resonators can be controlled.
7. The superconducting filter according to claim 5, characterized in that, By adjusting the lengths of the interdigitated capacitors included in the first, second, third, and fourth grounded multimode resonators, the odd-mode frequency positions of the first, second, third, and fourth grounded multimode resonators are controlled respectively.
8. The superconducting filter according to claim 5, characterized in that, By adjusting the positions of the interdigitated capacitors included in the first, second, third, and fourth grounded multimode resonators, cross-coupling is generated between the first, second, third, and fourth grounded multimode resonators, respectively, to provide and control the transmission zeros outside the passband of the filter and their positions.
9. The superconducting filter according to claim 4, characterized in that, The first feeder auxiliary line structure is a bent line.
10. The superconducting filter according to claim 4, characterized in that, The second feeder auxiliary line structure is a bent line.