Machining apparatus, tool, article manufacturing method, control method, program product, and recording medium

Abstract

The invention provides a machining apparatus, a cutter, an article manufacturing method, a control method, a program product, and a recording medium. The machining apparatus includes a cutter configured to grind a workpiece, a rotation mechanism configured to be rotatable about a rotation axis, and a holding member. The cutter is mounted on the rotating mechanism in a state in which a portion of the cutter is partially sandwiched by the holding member. And the cutter is provided with a plurality of concave parts. Each of the plurality of recesses extends from the rotational axis side to the outer peripheral side. The liquid is supplied to a space at least partially surrounded by the holding member on a side closer to the rotation axis than a position where the portion of the blade is sandwiched. The liquid supplied to the space is ejected into each of the plurality of recesses on a side closer to the rotation axis than the portion of the blade.

Description

Technical Field

[0001] This disclosure relates to processing equipment for processing, for example, resin substrates, glass substrates, or silicon (Si) wafers. Background Technology

[0002] For example, there is a known processing apparatus that performs operations such as cutting, dicing, and groove formation by rotating a cutting tool (which is a bladed tool) in contact with a workpiece such as a resin substrate, glass substrate, or silicon (Si) wafer. Since the processing position is moved (scanned) by moving one or both of the cutting tool and the workpiece while the cutting tool is rotating, it is possible to cut the workpiece into a desired shape or to form grooves of a desired shape in the workpiece.

[0003] Japanese Patent Application Publication No. JP 2008-126369A describes the following: On the outer peripheral side of the abrasive layer of the cutting tool, a recess that does not penetrate the abrasive layer is provided at an angle relative to the radial direction, thereby preventing the formation of burrs on the metal material that serves as the workpiece.

[0004] Japanese Patent Application Publication No. JP 2016-43470A describes supplying grinding water to the grinding section to cool it, thereby preventing the formation of debris and burrs. In JP 2016-43470A, a slit is provided in the grinding tool, penetrating the front and rear surfaces of the grinding stone, and grinding water is supplied to the grinding section through the slit.

[0005] The goal is to reduce machining time while suppressing the formation of chips and burrs, as well as tool wear and damage. To this end, supplying a sufficient amount of fluid to the portion of the tool that is grinding the workpiece is effective.

[0006] However, Japanese Patent Application Publication No. JP 2008-126369A describes the shape of the abrasive layer used to suppress the formation of burrs, but does not describe a device capable of supplying liquid to the part of the workpiece that the tool is grinding.

[0007] The device described in Japanese Patent Application Publication No. JP 2016-43470A supplies grinding water to the grinding section through a slit penetrating the front and rear surfaces of the grinding stone. However, in this configuration, when the cutting tool rotates at high speed, an airflow accompanying the tool is generated around it. Most of the grinding water intended to be sprayed from the liquid supply path through the tool surface into the slit is blown away by the airflow on the tool surface before being sprayed into the slit. Therefore, a sufficient amount of grinding water cannot be sprayed into the slit, and only a small amount of grinding water reaches the grinding section through the slit. Summary of the Invention

[0008] Therefore, there is a need for technology that can supply a sufficient amount of liquid to the location where the cutting tool is machining the workpiece.

[0009] According to a first aspect of this disclosure, a processing apparatus includes a cutting tool configured to grind a workpiece, a rotating mechanism configured to rotate about a rotation axis, and a holding member. The cutting tool is mounted on the rotating mechanism with a portion of the cutting tool partially clamped by the holding member. The cutting tool is provided with a plurality of recesses having a depth less than the thickness of the cutting tool. Each of the plurality of recesses extends from the rotation axis side across the portion clamped by the holding member toward the outer periphery of the cutting tool. On a side closer to the rotation axis than the location where the portion of the cutting tool is clamped, liquid is supplied from the outside into a space at least partially surrounded by the holding member. The liquid supplied to the space is sprayed into each of the plurality of recesses on the side closer to the rotation axis than the portion of the cutting tool, and is supplied to the outer periphery of the cutting tool via the plurality of recesses.

[0010] According to a second aspect of this disclosure, a processing apparatus includes a cutting tool configured to grind a workpiece, a rotating mechanism configured to rotate about a rotation axis, and a holding member, wherein the cutting tool is mounted on the rotating mechanism with a portion of the cutting tool partially clamped by the holding member. The cutting tool is provided with a plurality of recesses having a depth less than the thickness of the cutting tool. Each of the plurality of recesses extends from the rotation axis side across the portion clamped by the holding member toward the outer periphery of the cutting tool. A method for controlling the processing apparatus includes: controlling a processing unit to supply liquid from the outside into a space at least partially surrounded by the holding member on a side closer to the rotation axis than the location where the portion of the cutting tool is clamped; and controlling the processing unit to spray the liquid supplied to the space into each of the plurality of recesses on a side closer to the rotation axis than the portion of the cutting tool, and supplying liquid to the outer periphery of the cutting tool via the plurality of recesses.

[0011] The features of this disclosure will become apparent from the following description of embodiments with reference to the accompanying drawings. The following description of embodiments is given by way of example. Attached Figure Description

[0012] Figure 1 This is a schematic perspective view showing the overall structure of the processing equipment according to an embodiment.

[0013] Figure 2 This is a schematic perspective view showing a rotating cutter cutting a workpiece along the X direction.

[0014] Figure 3 This is a schematic exploded view showing the assembly mechanism for assembling the plate-shaped cutter into the equipment.

[0015] Figure 4 It is a schematic cross-sectional view showing a tool and its peripheral part taken along the rotational axis C of the tool.

[0016] Figure 5A It is a plan view of the tool when viewed in the direction of the rotational axis C.

[0017] Figure 5B It is a partial cross-sectional view of the tool taken along the line A-A' of Figure 5A .

[0018] Figure 6 It is an enlarged partial cross-sectional view near the location where the tool is machining a workpiece.

[0019] Figure 7 It is an enlarged partial cross-sectional view near the location where the tool is machining a workpiece.

[0020] Figure 8 It is an enlarged partial cross-sectional view near the location where a workpiece is machined using the tool according to the first modified example.

[0021] Figure 9 It is a view showing an example of a shape in which the tool in the second modified example has a relationship satisfying R1 < R2 and R5 = R6.

[0022] Figure 10 It is a view showing an example of a shape in which the tool in the second modified example has a relationship satisfying R1 = R2 and R5 < R6.

[0023] Figure 11 It is a view showing an example of a shape in which the tool in the second modified example has a relationship satisfying R1 = R2 and R5 = R6.

[0024] Figure 12A It is a plan view of the tool according to the third modified example when viewed in the direction of the rotational axis C.

[0025] Figure 12B It is a partial cross-sectional view of the tool taken along the line B-B' of Figure 12A .

[0026] Figure 13 It is a plan view of the tool according to the fourth modified example when viewed in the direction of the rotational axis C. Detailed implementation manners

[0027] Processing equipment and the like according to embodiments of the present disclosure will be described with reference to the accompanying drawings. The following embodiments are merely examples, and for example, those skilled in the art can appropriately change and implement the detailed configurations without departing from the gist of the present disclosure.

[0028] In the following embodiments and the accompanying drawings with reference to them, unless otherwise stated, elements indicated by the same reference numerals have similar functions. In the drawings, when multiple identical elements are arranged, reference numerals and their descriptions may be omitted.

[0029] Furthermore, for ease of illustration and description, the accompanying drawings may be schematic, and therefore, the shape, size, arrangement, etc., of the elements in the drawings may not strictly match the actual elements. Additionally, unless otherwise stated, "above XX and below YY" or "XX to YY" indicating a numerical range refers to a numerical range including endpoints XX (lower limit) and YY (upper limit). When describing numerical ranges in stages, the upper and lower limits of each numerical range can be arbitrarily combined.

[0030] In the following description, for example, the +X direction indicates the same direction as indicated by the X-axis arrow in the illustrated Cartesian coordinate system, while the -X direction indicates a direction 180 degrees opposite to the direction indicated by the X-axis arrow in the illustrated Cartesian coordinate system. Furthermore, the direction simply referred to as the X direction is parallel to the X-axis and is independent of the difference in direction indicated by the illustrated X-axis arrow. The same applies to directions other than the X direction. Additionally, unless otherwise stated, in the XYZ coordinate system, which is a Cartesian coordinate system, the XY plane is horizontal, and the -Z axis direction is vertical (the direction of gravity).

[0031] Example

[0032] Overall structure

[0033] Figure 1 This is a schematic perspective view showing the overall structure of a processing apparatus (cutting apparatus) according to an embodiment. The processing apparatus includes a cutting tool 1 for cutting or grinding a workpiece 17 disposed on a chuck table 10, and the cutting tool 1 is driven to rotate about a spindle 15. The spindle 15 is a rotating mechanism capable of rotating about a rotation axis, supported for example by an air bearing or a hydrostatic bearing, and driven by a direct drive motor or the like. The chuck table 10 is a rotating axis with an indexing function and includes a holding mechanism (e.g., a suction mechanism) for holding the workpiece 17.

[0034] By changing the relative position of the chuck table 10 holding the workpiece 17 and the tool 1 in the XYZ directions, the workpiece can be cut or ground into any shape. For example, when changing the relative position, the position of the tool 1 can be fixed, while the chuck table 10 can move in the XYZ directions; or conversely, the position of the chuck table 10 can be fixed, while the tool 1 can move in the XYZ directions. Alternatively, the chuck table 10 can move in at least one of the XYZ directions, while the tool 1 can move in the remaining directions.

[0035] In the illustrated machining apparatus, the chuck table 10 is movable in the X direction, while the cutting tool 1 is movable in the Y and Z directions. Specifically, the X-axis platform 8 and the Y-axis platform 11 are arranged on the base 28 so as to be orthogonal to each other. The X-axis platform 8 supports the X-axis table 9, which is movable in the X direction, and the chuck table 10 is mounted on the X-axis table 9. The Y-axis platform 11 supports the Y-axis table 12, which is movable in the Y direction, and the Z-axis platform 13 is arranged on the Y-axis table 12. The Z-axis table 14, which is movable in the Z direction, is arranged on the Z-axis platform 13. The spindle 15 for rotary driving the cutting tool 1 is arranged on the Z-axis table 14. Each of the X-axis table 9, Y-axis table 12, and Z-axis table 14 is guided on the platform by air bearings or linear guides and driven by linear motors or ball screws.

[0036] In this embodiment, to achieve effects such as reducing friction between the tool and the workpiece and cooling both the tool and the workpiece, a liquid is supplied from the tool side to the location where the workpiece is being ground. In the following description, for convenience, this liquid will be referred to as a machining fluid. For example, water is used as the machining fluid. However, another liquid, such as a flame-retardant oil, can also be used as the machining fluid.

[0037] For the processing fluid supply mechanism described below, such as Figure 1 As shown, the fluid supply nozzle 7 for supplying machining fluid to the tool 1 is arranged on the distal side of the spindle 15. Additionally, a tool cover 6 for preventing machining fluid from splashing from the tool 1 into the surrounding area is arranged around the tool 1. The tool cover 6 not only prevents the splashing of machining fluid but also prevents operator contact and serves as a safety shield in case of tool damage.

[0038] Processing fluid supply mechanism

[0039] Figure 2 This is a schematic perspective view showing the rotating cutter 1 cutting the workpiece 17 along the X direction. Figure 3 This is a schematic exploded view showing an assembly mechanism that is broken down into multiple parts for the purpose of assembling the plate-shaped cutter 1 into a machining equipment. Figure 4 This is a schematic cross-sectional view showing a section of the tool 1 assembled to the machining equipment and its surrounding portion, taken parallel to the ZY plane along the rotation axis C of the tool 1.

[0040] The first retaining fixture 4, a component of the assembly mechanism, is mounted on the spindle 15. Figure 1 The far end of the rotor section. For example... Figure 3As shown, the first retainer fixing clamp 4 includes a protrusion 30, the inner surface of the first retainer 2 is guided by the protrusion 30, and the end surface of the first retainer 2 on the spindle side contacts the first retainer fixing clamp 4. The first retainer 2 is fixed to the first retainer fixing clamp 4 by tightening the first retainer fixing screw 5.

[0041] The first retainer 2 includes a tool guide protrusion 31, and the inner surface of the tool 1, which has an annular shape (ring shape), is guided by the tool guide protrusion 31, so that the tool 1 is attached to the first retainer 2.

[0042] The first retainer 2 also includes a second retainer guide protrusion 32, the inner surface of the second retainer 3 is guided by the second retainer guide protrusion 32, and the second retainer 3 is assembled to the first retainer 2.

[0043] An external thread is provided on the outer surface of the second retainer guide protrusion 32 on its distal side, and an internal thread capable of threaded engagement with the external thread is provided on the inner surface of the second retainer fixing member 6. The second retainer 3 and the first retainer 2 are fastened together by engaging the external thread of the second retainer guide protrusion 32 with the internal thread of the second retainer fixing member 6 and tightening it, thereby clamping the tool 1 between them. Figure 4 In the diagram, the portion of the first retainer 2 that contacts the tool 1 is shown as contact portion 33, while the portion of the second retainer 3 that contacts the tool 1 is shown as contact portion 34.

[0044] The openings penetrating the front and rear sides of the second retaining member 6 are located at positions such that the rotation axis C of the tool 1 is... Figure 4 The liquid passes through the second retaining member 6, and a supply nozzle 7, serving as an external liquid supply unit, is connected to the opening. Liquid is supplied from a liquid tank (not shown) to the supply nozzle 7.

[0045] exist Figure 4 In the diagram, the flow F of the machining fluid supplied from the supply nozzle 7 is schematically indicated by arrows. The machining fluid is sprayed from the supply nozzle 7 into the assembly mechanism through the opening of the second retainer fixing member 6. That is, the machining fluid is sprayed into the flow path defined by the second retainer fixing member 6, the first retainer fixing screw 5, the first retainer 2, and the second retainer 3. In other words, liquid is supplied from the supply nozzle 7 into a space at least partially surrounded by the first retainer 2 (first retaining member) and the second retainer 3 (second retaining member). In this embodiment, an example is described where the retaining member for holding the tool 1 is divided into two members, but one member can be used, or two or more members can be used, as long as the retaining member can hold the tool 1.

[0046] As the assembly mechanism rotates during processing, centrifugal force acts on the processing fluid, and the processing fluid flows in space away from the axis of rotation C, that is, towards the tool 1. As described below, the tool 1 is formed with a recess that serves as a flow path for the processing fluid, and the processing fluid is supplied via the recess to the location (position) where the tool 1 is processing the workpiece 17.

[0047] Here, tool 1 will be described. Figure 5A This is a planar view of the tool 1 when viewed along the direction of the rotation axis C. Figure 5B It is along Figure 5A A partial cross-sectional view of tool 1 taken by line A-A'.

[0048] In the following description, when describing the various components, the side closer to the axis of rotation C (the axis of rotation side) can be referred to as the inner side or the center side, while the side farther from the axis of rotation C can be referred to as the outer side or the outer periphery side. Furthermore, the direction of the axis of rotation C can be referred to as the axial direction, and the direction of the radius of the circle centered on the axis of rotation C can be referred to as the radial direction. The radial distance from the axis of rotation C to each part can be referred to as the radial distance.

[0049] First, the shape of the plate-shaped cutter 1 in the plan view is as follows: Figure 5A The circular shape shown (ring shape) has an inner surface that is a circle with a radial distance of R1 and an outer surface that is a circle with a radial distance of R6. For the tool 1, a material such as resin or Ni formed by electroforming can be used, and for example, the plate thickness can be 0.1 mm and the outer diameter can be R6 = 30 mm.

[0050] Multiple recesses 29 are provided on each of the front and rear surfaces of the tool 1. Figure 5A In the middle, the recess 29 provided on the front surface side is indicated by a solid line, while the recess 29 provided on the rear surface side is indicated by a dashed line.

[0051] Each recess 29 is a groove having a depth less than the thickness of the tool 1 and extending linearly in the radial direction. Multiple recesses 29 are arranged radially at equal angular intervals around the axis of rotation C. In the example shown, eight groove-shaped recesses 29 are arranged on each of the front and rear surface sides, and when viewed in axial projection, the recesses 29 on the front and rear surfaces alternate at angular intervals of 22.5 degrees.

[0052] like Figure 5B As shown, GW indicates the width of the recess 29 (width in the direction orthogonal to the radial direction), while GD indicates the depth of the recess. For example, GW is preferably set in the range of 0.5 mm to 1.0 mm, and GD is preferably set in the range of 5 μm to 50 μm.

[0053] In view of ensuring the amount of the machining fluid supplied to the machining unit, ensuring the conductivity when the machining fluid flows in the recessed portion 29, the machining accuracy when forming the recessed portion 29, ensuring the mechanical strength of the cutting tool 1, etc., the number and position of the recessed portions 29 and the GD and GW of each recessed portion 29 can be set as appropriate.

[0054] Figure 6 and Figure 7 is an enlarged partial cross-sectional view of the portion (i.e., near the location where the cutting tool 1 is machining the workpiece 17) surrounded by the dashed circle in Figure 4 . Figure 6 Shows the timing when the recessed portion 29 arranged on the front surface side of the cutting tool 1 is positioned at the location where the cutting tool 1 is machining the workpiece 17. Figure 7 Shows the timing when the recessed portion 29 arranged on the rear surface side of the cutting tool 1 is positioned at the location where the cutting tool 1 is machining the workpiece 17.

[0055] As Figure 4 shown, the machining fluid flows toward the cutting tool 1 through the flow path defined by the second holding member fixing member 6, the first holding member fixing screw 5, the first holding member 2, and the second holding member 3.

[0056] Here, as Figure 4 , Figure 6 and Figure 7 shown, the recessed portion 29 of the cutting tool 1 is a groove formed in the radial direction within the radial distance range from R2 to R5. Within the radial distance range from R3 to R4, the cutting tool 1 is clamped by the contact portion 33 of the first holding member 2 and the contact portion 34 of the second holding member 3, and R2 < R3 and R4 < R5. That is, each of the plurality of recessed portions 29 extends from the rotation axis C side to the outer peripheral side across the portion sandwiched between the first holding member 2 (the first holding member) and the second holding member 3 (the second holding member). Therefore, as Figure 6 and Figure 7 [[ID=3,2]]shown, a flow F of the machining fluid from the space surrounded by the first holding member 2, the second holding member 3, etc. to the location where the cutting tool 1 is machining the workpiece 17 via the recessed portion 29 is formed. For example, R3 - R2 = 1.0 mm.

[0057] During machining, an airflow can be generated in the space AFS near the tool 1, which rotates along with it. However, in this embodiment, since the machining fluid is sprayed into the recess 29 at a position within a radial distance range from R2 to R3 (i.e., in the space surrounded by the first retainer 2, the second retainer 3, etc.), the spraying is unaffected by the airflow. Therefore, the machining fluid can be sprayed into the recess 29 very effectively. In addition, since the sprayed machining fluid does not flow along the main surface of the tool 1 but in the recess 29, the machining fluid is almost unaffected by the airflow even at a position facing the space AFS, and the amount of machining fluid blown away is small. Therefore, a sufficient amount of machining fluid can be supplied to the location (position) where the tool 1 is machining the workpiece 17.

[0058] In the example shown, since the recess 29 formed within a radial distance range from R2 to R5 extends over a range wider than the thickness of the workpiece 17, machining fluid can be supplied to the entire thickness region of the workpiece during cutting. Furthermore, since the radially distal edge of the recess 29 lies below the lower surface of the workpiece 17, this edge does not collide with the workpiece 17, and therefore, the formation of debris in the workpiece 17 due to impact can be prevented, and the distal end of the recess 29 can be prevented from being easily worn. For example, R5 is preferably set to be 100 μm larger than the radial distance from the lower surface of the workpiece 17, and R6 is preferably set to be 150 μm or greater than the radial distance from the lower surface of the workpiece 17.

[0059] As described above, according to this embodiment, a sufficient amount of liquid can be supplied to the location (position) where the tool is processing the workpiece, and the processing time can be shortened while suppressing tool wear and damage.

[0060] The embodiments disclosed herein are not limited to the examples described above. Variations of the embodiments will be described below. Descriptions of matters common to the embodiments described above will be simplified or omitted.

[0061] First variant example

[0062] In the above embodiments, such as Figure 5A As shown, the recesses 29 are arranged on the front and rear surfaces of the tool 1 so as not to overlap in a plan view. However, the embodiments of this disclosure are not limited thereto, and the recesses 29 may be arranged on both the front and rear surfaces of the tool 1 so as to overlap in a plan view when viewed in projection.

[0063] Figure 8It is an enlarged partial cross-sectional view near the location where the workpiece 17 is being machined by the cutting tool 1 constructed as described above. When a cutting tool with such a structure is used within the allowable range of mechanical strength, liquid can be supplied to the machining location from both the front surface and the rear surface. Therefore, there is a possibility of shortening the machining time by further increasing the rotational speed and the scanning speed.

[0064] Second modification example

[0065] In the above embodiment, as Figure 5A shown, when the radial distance of the inner surface of the annular shape of the cutting tool 1 is R1, the radial distance of its outer surface is R6, and the recess 29 extends radially within the radial distance range from R2 to R5, where R1 < R2 and R5 < R6. However, the embodiments of the present disclosure are not limited to this, and the recess 29 may be formed such that R1 = R2 and / or R5 = R6.

[0066] In the case of R1 = R2, there is a possibility that machining fluid can be effectively ejected into the recess 29 in the space surrounded by the first holding member 2, the second holding member 3, etc. In the case of R5 = R6, there is a possibility that the machining fluid ejected into the recess 29 can be effectively distributed near the location where the cutting tool is machining the workpiece. Additionally, since there is no edge at the end of the recess 29, the edge does not collide with the workpiece 17. Therefore, it is possible to prevent the formation of debris in the workpiece 17 due to the impact of the collision, and it is possible to prevent the distal end of the recess 29 from being easily worn.

[0067] Figures 9 to 11 is a plan view of the cutting tool 1 when viewed in the direction of the rotation axis C according to such a modification example. Figure 9 Shows an example in which the cutting tool 1 has a shape satisfying the relationship of R1 < R2 and R5 = R6. Figure 10 Shows an example in which the cutting tool 1 has a shape satisfying the relationship of R1 = R2 and R5 < R6. Figure 11 Shows an example satisfying the relationship of R1 = R2 and R5 = R6, and the recess 29 extends from the inner circumference to the outer circumference of the annular cutting tool 1.

[0068] Third modification example

[0069] In the above embodiment, as Figure 5A and Figure 5B shown, the width GW of the recess 29 in the direction orthogonal to the radial direction is uniform in the radial direction. As Figure 5B and Figure 6 shown, the depth GD of the recess 29 is uniform in the radial direction. However, the embodiments of the present disclosure are not limited to this.

[0070] Figure 12AThis is a plan view of the tool 1 when viewed along the direction of the rotation axis C according to the third variant example. Figure 12B It is along Figure 12A A partial cross-sectional view of tool 1 taken by line B-B'.

[0071] like Figure 12A As shown, in the tool 1 according to the third variant, the width of the recess 29 increases radially outward in a direction orthogonal to the radial direction. For example... Figure 12B As shown, the depth of the recess 29 increases radially inward.

[0072] When the depth of the recess 29 increases radially inward, it is possible that the machining fluid can be effectively sprayed into the recess 29 within the space surrounded by the first retainer 2, the second retainer 3, etc. Furthermore, when the width of the recess 29 increases radially outward, it is possible to supply the machining fluid more evenly along the outer periphery of the tool 1.

[0073] Fourth variant example

[0074] In the above embodiments, such as Figure 5B As shown, each of the plurality of recesses 29 is a groove extending in a radial straight line, and the extension line of the recess 29 intersects the rotation axis C. However, the embodiments of this disclosure are not limited thereto.

[0075] Figure 13 This is a plan view of the tool 1 according to the fourth variant, viewed along the direction of the rotation axis C. In the fourth variant, each of the plurality of recesses 29 is formed as a groove extending along a straight line having an inclination angle θ (0° < θ < 90°) relative to the radial direction. Figure 13 In the example shown, each of the recesses 29 is a straight groove. However, each of the recesses 29 could also be a curved groove where θ varies with position in the range of 0° < θ < 90°.

[0076] For reference Figure 6 As described, within a radial distance greater than R4, there exists a space AFS capable of generating an airflow that accompanies the rotation of the tool 1. To prevent this airflow from interfering with the flow of the machining fluid toward the outer periphery of the tool 1 within the recess 29, the radially outer portion of the recess 29 (further away from the rotation axis C) is further located on the opposite side of the rotation direction RD. As mentioned above, the extension lines of at least some of the recesses 29 do not need to intersect the rotation axis C.

[0077] Variation Example

[0078] This disclosure is not limited to the embodiments and variations described above, and many variations are possible within the technical concept of this disclosure. For example, all or some of the embodiments and variations described above can be combined and implemented.

[0079] Although a plate-shaped member having a ring shape (annular shape) in a plan view along the axis of rotation has been illustrated as an example of a cutting tool, the cutting tool can be, for example, disc-shaped, as long as the cutting tool has a recess (groove) that is recessed from the main surface and serves as a flow path for the machining fluid to flow to the outer periphery.

[0080] The cutting tool is a plate-shaped component with two main surfaces, but multiple recesses only need to be provided in at least one of the two main surfaces.

[0081] The recesses of different shapes described in the embodiments or variations can be arbitrarily combined and disposed in a tool.

[0082] The cutting tool itself, which has multiple recesses and can be mounted on the machining equipment described in the embodiments, is also included in the embodiments of this disclosure.

[0083] Article manufacturing methods for manufacturing articles by processing workpieces using processing equipment described in the embodiments are also included in the embodiments of this disclosure.

[0084] According to this disclosure, a technique can be provided that can supply a sufficient amount of liquid to the location where a cutting tool is machining a workpiece.

[0085] Other embodiments

[0086] The embodiments disclosed herein can also be implemented as follows: a computer of a system or apparatus that reads and executes computer-executable instructions (e.g., one or more programs) recorded on a storage medium (which may also be more fully referred to as a "non-transitory computer-readable storage medium") to perform one or more functions of the above-described embodiments, and / or, the computer of the system or apparatus includes one or more circuits (e.g., application-specific integrated circuits (ASICs)) for performing one or more functions of the above-described embodiments; and a method performed by the computer of the system or apparatus, for example, reading and executing the computer-executable instructions from the storage medium to perform one or more functions of the above-described embodiments, and / or, controlling the one or more circuits to perform one or more functions of the above-described embodiments. The computer may include one or more processors (e.g., a central processing unit (CPU), a microprocessor unit (MPU)) and may include separate computers or a network of separate processors to read and execute the computer-executable instructions. The computer-executable instructions may be provided to the computer, for example, from a network or a storage medium. The storage medium may include, for example, a hard disk, random access memory (RAM), read-only memory (ROM), the memory of a distributed computing system, or an optical disc (such as a compact disc (CD), a digital versatile optical disc (DVD), or a Blu-ray disc (BD)). TM One or more of the following: flash memory devices and memory cards.

[0087] Other embodiments

[0088] Embodiments of the present invention can also be implemented by providing software (including computer program products of computer programs) that performs the functions of the above embodiments to a system or device via a network or various storage media, and the computer (central processing unit (CPU) or microprocessor unit (MPU) of the system or device) reads and executes the computer program.

[0089] Although this disclosure has been described with reference to embodiments, it should be understood that this disclosure is not limited to the disclosed embodiments. The scope of the appended claims should be given the broadest interpretation to cover all such variations and equivalent structures and functions.

Claims

1. A processing apparatus, comprising: A cutting tool, which is constructed to grind a workpiece; A rotating mechanism, which is configured to rotate about an axis of rotation; as well as Retaining components, wherein, The cutting tool is mounted on the rotating mechanism with a portion of the cutting tool being partially clamped by the retaining member. The cutting tool is provided with multiple recesses, each recess having a depth smaller than the thickness of the cutting tool. Each of the plurality of recesses extends from the rotation axis side across the portion clamped by the retaining member toward the outer periphery of the tool. On the side closer to the axis of rotation than where the portion of the cutter is clamped, liquid is supplied from the outside into the space at least partially surrounded by the retaining member, and The liquid supplied to the space is sprayed into each of the plurality of recesses on a side closer to the axis of rotation than the portion of the cutter, and is supplied to the outer peripheral side of the cutter via the plurality of recesses.

2. The processing equipment according to claim 1, wherein, The cutting tool is a plate-shaped component having two main surfaces intersecting the axis of rotation, and The plurality of recesses are disposed on at least one of the two main surfaces.

3. The processing equipment according to claim 2, wherein, The plurality of recesses are disposed on two of the two main surfaces.

4. The processing equipment according to claim 3, wherein, When the tool is viewed in projection along the axis of rotation, at least some of the plurality of recesses disposed on each of the two main surfaces overlap each other.

5. The processing equipment according to claim 3, wherein, When the tool is viewed in projection along the axis of rotation, the plurality of recesses disposed on each of the two main surfaces do not overlap with each other.

6. The processing equipment according to any one of claims 1 to 5, wherein, The plurality of recesses include recesses arranged radially around the axis of rotation in a plan view of the cutting tool along the axis of rotation.

7. The processing equipment according to any one of claims 1 to 5, wherein, In a plan view along the axis of rotation, the cutting tool has an annular shape.

8. The processing equipment according to claim 7, wherein, The plurality of recesses include recesses extending from the inner periphery to the outer periphery of the annular shape.

9. The processing equipment according to claim 7, wherein, At the end of at least one of the plurality of recesses on the axis of rotation side, the recess is located further away from the axis of rotation than the inner circumference of the annular shape.

10. The processing equipment according to claim 7, wherein At the end of at least one of the plurality of recesses on the side opposite to the axis of rotation, the recesses are positioned closer to the axis of rotation than the outer periphery of the annular shape.

11. The processing equipment according to any one of claims 1 to 5, wherein, In a plan view of the cutting tool along the axis of rotation, the width of each of the plurality of recesses is the same.

12. The processing equipment according to any one of claims 1 to 5, wherein, In a plan view of the cutting tool along the axis of rotation, the width of the recess varies depending on the distance from the axis of rotation.

13. The processing equipment according to any one of claims 1 to 5, wherein, The depth of the recesses is consistent and is independent of the distance from the axis of rotation.

14. The processing equipment according to any one of claims 1 to 5, wherein, The depth of the recess varies depending on its distance from the axis of rotation.

15. The processing equipment according to any one of claims 1 to 5, wherein, In a plan view of the cutting tool along the axis of rotation, at least one of the plurality of recesses has a side along a straight line.

16. The processing equipment according to any one of claims 1 to 5, wherein, In a plan view of the cutting tool along the axis of rotation, at least some of the plurality of recesses have sides along a curve.

17. The processing equipment according to any one of claims 1 to 5, wherein, In a plan view of the cutting tool along the axis of rotation, the extension line of at least one of the plurality of recesses intersects the axis of rotation.

18. The processing equipment according to any one of claims 1 to 5, wherein, In a plan view of the cutting tool along the axis of rotation, the extension line of at least one of the plurality of recesses is configured not to intersect the axis of rotation.

19. A cutting tool for use in a machining apparatus according to any one of claims 1 to 18, the cutting tool comprising: The plurality of recesses.

20. A method for manufacturing an article, comprising: Prepare the processing equipment according to any one of claims 1 to 18; as well as The workpiece is processed using the processing equipment.

21. A method for controlling a processing apparatus, the processing apparatus comprising a cutting tool configured to grind a workpiece, a rotating mechanism configured to rotate about a rotation axis, and a holding member. The control method includes: Controlled by the processing unit, liquid is supplied from the outside to the space at least partially surrounded by the holding member, on the side closer to the axis of rotation than the position where the cutter is partially clamped. as well as Controlled by the processing unit, liquid supplied to the space is sprayed into each of the plurality of recesses on a side closer to the axis of rotation than the portion of the cutter, and liquid is supplied to the outer periphery of the cutter via the plurality of recesses. The cutting tool is mounted on the rotating mechanism with a portion of the cutting tool being partially clamped by the retaining member. The cutting tool is provided with the plurality of recesses, the plurality of recesses having a depth smaller than the thickness of the cutting tool, and Each of the plurality of recesses extends from the rotation axis side across the portion clamped by the retaining member toward the outer peripheral side.

22. A program product comprising a program for causing a processing unit of a processing apparatus to perform the control method according to claim 21.

23. A non-transitory computer-readable recording medium storing the program product according to claim 22.

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