Fast reflector with Z-axis function and control method

Abstract

The invention discloses a fast reflecting mirror with a Z-axis function, which relates to the technical field of optics and comprises a lens, a swinging body, a metal conductor sheet, an eddy current sensor, a spiral diaphragm flexible supporting piece, a driving assembly and a fast reflecting mirror main body, three specified degrees of freedom of X-axis deflection, Y-axis deflection and Z-axis translation are provided for the swing body through the spiral diaphragm flexible supporting piece and the four sets of voice coil motors, meanwhile, the other redundant degrees of freedom are strictly limited, independence and coaxiality of three-axis motion are ensured, and when the position of a light path focus needs to be adjusted or a compensation system drifts, the three-axis motion can be adjusted. The swing body can be driven to drive the lens to accurately move back and forth along the Z axis only by controlling the four groups of voice coil motors to synchronously output thrust or tension in the same direction, so that the requirements on the flatness and parallelism of a mechanical mounting plane of the fast reflector are reduced, the assembly difficulty and the assembly process of the fast reflector in an optical system are simplified, and the assembly efficiency is improved. And the overall assembly efficiency of the optical system is improved.

Description

Technical Field

[0001] This invention relates to the field of optical technology, specifically to a fast reflector with Z-axis function and its control method. Background Technology

[0002] A fast reflector is an optical component based on flexible support and precision drive technology that can quickly adjust the lens attitude and achieve precise control of beam direction. It is widely used in high-end fields such as adaptive optics systems, laser communication, lithography equipment, aerospace optoelectronic platforms, and astronomical observation.

[0003] Current fast reflectors, in order to improve the accuracy of deflection angle feedback measurement and simplify the design of closed-loop controllers, mostly adopt a two-degree-of-freedom deflection and multi-directional rigid constraint design. That is, they only have two orthogonal deflection degrees of freedom, the X and Y axes, and try to increase constraints in the Z-axis translation and other rotational directions. Since the Z-axis direction is rigidly constrained, it is inconvenient to realize axial translation adjustment. When installing it into the optical path, the mounting surface must be repeatedly calibrated, adjusted and corrected to ensure the coaxial accuracy of the incident optical axis and the reflected optical axis to meet the optical path control requirements. This is not only time-consuming and labor-intensive, but also has low assembly efficiency. At the same time, when it is necessary to correct the focusing characteristics of the beam and adjust the focal position, a separate focusing mechanism must be introduced to achieve the adjustment of the focal position. This not only greatly increases the size and weight of the entire optical path system, but also introduces new assembly errors, making it difficult to guarantee the coaxiality of the optical path. Therefore, a fast reflector with Z-axis function and control method are proposed to solve the problems mentioned above. Summary of the Invention

[0004] To address the aforementioned technical problems, this paper provides a fast reflector with Z-axis functionality and its control method. This solution overcomes the limitations of current fast reflectors described in the background. To improve the accuracy of deflection angle feedback measurement and simplify the closed-loop controller design, most employ a two-degree-of-freedom deflection and multi-directional rigid constraint design. This means they only have two orthogonal deflection degrees of freedom (X and Y axes), while maximizing constraints in Z-axis translation and other rotational directions. Because the Z-axis is rigidly constrained, axial translation adjustment is difficult. When installed in the optical path, repeated calibration, adjustment, and correction of the mounting surface are necessary to ensure coaxial accuracy between the incident and reflected optical axes and meet optical path control requirements. This process is time-consuming, labor-intensive, and inefficient. Furthermore, when it is necessary to correct the beam's focusing characteristics or adjust the focal point, a separate focusing mechanism must be introduced. This significantly increases the size and weight of the entire optical system and introduces new assembly errors, making it difficult to guarantee optical path coaxiality.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is as follows: A fast reflector with Z-axis functionality includes: Lenses are used to reflect incident light beams and adjust the direction of light propagation. A swinging body is used to drive the lens to complete the deflection and translation movements synchronously, and the lens is fixedly installed at the front end of the swinging body; Four metal conductor plates, all of which are fixedly connected to the rear end of the swing body; Four eddy current sensors are used in conjunction with the metal conductor sheet to collect the real-time motion position signal of the oscillating body. All four eddy current sensors are located at the rear end of the metal conductor sheet and their measuring ends are respectively facing the rear end of the four metal conductor sheets. A spiral diaphragm flexible support is used to provide a specified degree of freedom of motion for the swinging body and restrict excess degrees of freedom. The outer edge of the spiral diaphragm flexible support is fixedly connected to the rear end of the swinging body. A flexible support base is used to provide an installation support foundation for the spiral diaphragm flexible support component. The front end of the flexible support base is fixedly connected to the center of the rear end of the spiral diaphragm flexible support component. A drive assembly is used to provide driving force for the movement of the oscillating body. The drive assembly includes four sets of voice coil motors evenly distributed in the circumferential direction. All four sets of voice coil motors are located at the rear end of the oscillating body. The fast-reflecting mirror body, including the drive assembly, flexible support base, and eddy current sensor, is located inside the fast-reflecting mirror body.

[0006] Preferably, a support base mounting groove is provided at the center of the front end of the fast-reflecting mirror body, four evenly distributed sensor mounting grooves are provided on the outer side of the support base mounting groove at the front end of the fast-reflecting mirror body, four evenly distributed drive component mounting grooves are provided on the outer side of the sensor mounting groove at the front end of the fast-reflecting mirror body, a flexible support base is fixedly connected to the inside of the support base mounting groove, and an eddy current sensor is fixedly installed inside the sensor mounting groove.

[0007] Preferably, each voice coil motor includes a permanent magnet and a coil. The four permanent magnets are fixedly connected to the rear end of the oscillating body, and the four coils are respectively fixedly connected to the interior of the four drive component mounting slots. The four permanent magnets are coaxially nested in the inner cavities of the four coils.

[0008] Preferably, the front end of the spiral diaphragm flexible support member has multiple hollowed-out slots, all of which are in the shape of an Archimedean spiral. A flexible support arm is formed between two adjacent hollowed-out slots, and the number of flexible support arms is at least three.

[0009] Preferably, the four sets of voice coil motors are arranged in pairs opposite each other along the circumference. The two sets of voice coil motors opposite each other drive the swing body to deflect around the X-axis or Y-axis through push-pull differential force. When the four sets of voice coil motors output push or pull force in the same direction at the same time, they drive the swing body to translate along the Z-axis.

[0010] Preferably, the four sets of eddy current sensors are arranged opposite each other in pairs. The output signals of the two opposing sets of eddy current sensors are used to calculate the difference to obtain the deflection angle signal of the X-axis or Y-axis, and the output signals of the four sets of eddy current sensors are used to sum to obtain the Z-axis displacement signal.

[0011] Furthermore, a control method is proposed for controlling a fast reflector with Z-axis function as described above, comprising the following steps: Obtain the X-axis deflection command, Y-axis deflection command, and Z-axis displacement command respectively; The X-axis deflection angle feedback signal, Y-axis deflection angle feedback signal, and Z-axis displacement feedback signal of the oscillating body are obtained by an eddy current sensor. The difference between the X-axis deflection command and the X-axis deflection angle feedback signal is input into the X-axis controller to obtain the X-axis control signal; The difference between the Y-axis deflection command and the Y-axis deflection angle feedback signal is input into the Y-axis controller to obtain the Y-axis control signal; The difference between the Z-axis displacement command and the Z-axis displacement feedback signal is input into the Z-axis controller to obtain the Z-axis control signal; The X-axis control signal, Y-axis control signal and Z-axis control signal are linearly superimposed to obtain the independent control quantities of four voice coil motors. The corresponding power amplifiers drive the four voice coil motors to independently control the X-axis deflection, Y-axis deflection and Z-axis translation of the oscillating body.

[0012] Preferably, the X-axis control signal is divided into two paths: one path is directly input to the corresponding power amplifier of a voice coil motor used to drive the X-axis deflection, and the other path is inverted and input to another power amplifier of a voice coil motor used to drive the X-axis deflection.

[0013] Preferably, the Y-axis control signal is divided into two paths: one path is directly input to the corresponding power amplifier of a voice coil motor used to drive the Y-axis deflection, and the other path is inverted and input to another power amplifier of a voice coil motor used to drive the Y-axis deflection.

[0014] Preferably, the Z-axis control signal is divided into four channels, which are respectively input to the power amplifiers of the four voice coil motors. The control channels for X-axis deflection, Y-axis deflection and Z-axis translation are independent of each other.

[0015] The beneficial effects of this invention compared to the prior art are: This design provides the oscillating body with three specified degrees of freedom: X-axis deflection, Y-axis deflection, and Z-axis translation, through a spiral diaphragm flexible support and four voice coil motors. At the same time, other redundant degrees of freedom are strictly restricted to ensure the independence and coaxiality of the three-axis motion. When it is necessary to adjust the focal position of the optical path or compensate for system drift, it is only necessary to control the four voice coil motors to output the same direction of thrust or pull, which can drive the oscillating body to move the lens precisely back and forth along the Z-axis. This reduces the flatness and parallelism requirements of the mechanical mounting plane of the fast reflector, simplifies the assembly difficulty and assembly process of the fast reflector in the optical system, and improves the overall assembly efficiency of the optical system.

[0016] In this scheme, four sets of eddy current sensors work in conjunction with metal conductor sheets. Through signal processing methods of relative difference and overall summation, the X-axis deflection angle, Y-axis deflection angle, and Z-axis displacement signals can be accurately separated and independently detected. The X-axis, Y-axis, and Z-axis controllers are independent of each other. After the three-axis control signals are linearly superimposed, they drive four sets of voice coil motors respectively. This decoupled closed-loop control ensures accurate positioning of Z-axis translation without affecting the independence and response speed of X and Y-axis deflection motion, thus achieving independent, accurate, and controllable three-axis motion.

[0017] This device integrates the Z-axis translation function into the fast reflector body. When used in the converging optical path, there is no need to add a complex focusing lens group or translation mechanism. The focusing characteristics of the optical path can be flexibly adjusted directly by controlling the movement of the lens along the Z-axis, thereby accurately changing the beam divergence angle or focal position. The integrated structure greatly simplifies the mechanical design of the entire optical path system, reduces the overall size and weight of the system, and eliminates secondary errors caused by the assembly of an additional focusing mechanism, ensuring the accuracy and stability of the optical path system. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is an exploded view of the present invention; Figure 3 This is a cross-sectional view of the present invention; Figure 4 This is a schematic diagram of the structure of the spiral diaphragm flexible support in this invention; Figure 5 This is a schematic diagram of the voice coil motor in this invention; Figure 6 This is a schematic diagram of the structure of the fast-reflecting mirror body in this invention; Figure 7 This is a block diagram illustrating the principle of X-axis feedback signal extraction in this invention. Figure 8 This is a block diagram illustrating the principle of Y-axis feedback signal extraction in this invention. Figure 9This is a block diagram illustrating the principle of Z-axis feedback signal extraction in this invention. Figure 10 This is a block diagram illustrating the principle of the control method in this invention.

[0019] The numbers on the map are: 1. Lens; 2. Swinging body; 3. Metal conductor sheet; 4. Eddy current sensor; 5. Spiral diaphragm flexible support; 501. Hollow through slot; 502. Flexible support arm; 6. Flexible support base; 7. Drive assembly; 701. Voice coil motor; 7011. Permanent magnet; 7012. Coil; 8. Quick-reflecting mirror body; 801. Support base mounting slot; 802. Sensor mounting slot; 803. Drive assembly mounting slot. Detailed Implementation

[0020] The following description is intended to disclose the invention and enable those skilled in the art to implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art.

[0021] Reference Figures 1-6 As shown, a fast reflector with Z-axis function includes: Lens 1 is used to reflect the incident light beam and adjust the propagation direction of the light path; The swing body 2 is used to drive the lens 1 to complete the deflection and translation movements synchronously. The lens 1 is fixedly installed at the front end of the swing body 2. Four metal conductor plates 3 are fixedly connected to the rear end of the swing body 2, and the circumferential interval between two adjacent metal conductor plates 3 is 90°. Four eddy current sensors 4 are used in conjunction with the metal conductor sheet 3 to collect the real-time motion position signal of the swing body 2. All four eddy current sensors 4 are set at the rear end of the metal conductor sheet 3, and the measuring ends of the four eddy current sensors 4 are respectively facing the rear end of the four metal conductor sheets 3. The spiral diaphragm flexible support 5 is used to provide a specified degree of freedom of motion for the swing body 2 and restrict excess degrees of freedom. The outer edge of the spiral diaphragm flexible support 5 is fixedly connected to the rear end of the swing body 2. The flexible support base 6 is used to provide an installation support foundation for the spiral diaphragm flexible support 5. The front end of the flexible support base 6 is fixedly connected to the center of the rear end of the spiral diaphragm flexible support 5. The drive assembly 7 is used to provide driving force for the movement of the swing body 2. The drive assembly 7 includes four voice coil motors 701 that are evenly distributed in the circumferential direction. All four voice coil motors 701 are located at the rear end of the swing body 2. The fast-reflecting mirror body 8 is located at the rear end of the swing body 2. The drive component 7, the flexible support base 6, and the eddy current sensor 4 are all located inside the fast-reflecting mirror body 8.

[0022] Specifically, the oscillating body 2 is an integrated mounting carrier for the moving parts. The front end of the oscillating body is fixed with the lens 1, and the rear end is uniformly fixed with four metal conductor plates 3 and four permanent magnets 7011 of the voice coil motor 701 along the circumferential 90°. The center of the rear end is fixedly connected to the outer edge of the spiral diaphragm flexible support 5. The driving force of the voice coil motor 701 can be synchronously converted into its own deflection and translation motion, which synchronously drives the lens 1 to complete two-dimensional deflection in the X-axis and Y-axis directions and translation in the Z-axis direction, so as to realize synchronous and precise control of the beam pointing and focusing position.

[0023] Furthermore, a support base mounting groove 801 is provided at the center of the front end of the fast-reflecting mirror body 8, and four evenly distributed sensor mounting grooves 802 are provided on the outer side of the support base mounting groove 801 on the front end of the fast-reflecting mirror body 8. Four evenly distributed drive component mounting grooves 803 are provided on the outer side of the sensor mounting groove 802 on the front end of the fast-reflecting mirror body 8. The flexible support base 6 is fixedly connected to the inside of the support base mounting groove 801, and the eddy current sensor 4 is fixedly installed inside the sensor mounting groove 802.

[0024] Specifically, the fast reflector body 8 serves as the mounting reference for the entire reflector. The support base mounting slot 801 is located at the front center of the fast reflector body 8 and is used to install the flexible support base 6. This ensures that the flexible support base 6 is coaxial with the fast reflector body 8, the spiral diaphragm flexible support 5, the swing body 2, and the lens 1. The sensor mounting slot 802 and the drive mounting slot 803 are evenly distributed along the circumference at 90° and correspond one-to-one with the four eddy current sensors 4 and the four voice coil motors 701, respectively, to provide mounting space for the eddy current sensors 4 and the voice coil motors 701.

[0025] It should be noted that the fast-reflecting mirror body 8 has a reserved electrical wiring groove inside, which can make the wiring of the sensor and coil 7012 neat and avoid the wiring from interfering with the optical path and moving parts. At the same time, the fast-reflecting mirror body 8 can be equipped with a sealing end cap as needed to achieve sealing protection of the internal cavity and adapt to harsh environments such as vacuum and humidity.

[0026] Furthermore, each voice coil motor 701 includes a permanent magnet 7011 and a coil 7012. The four permanent magnets 7011 are fixedly connected to the rear end of the swing body 2, and the four coils 7012 are fixedly connected to the inside of the four drive component mounting slots 803 respectively. The four permanent magnets 7011 are coaxially nested in the inner cavity of the four coils 7012 respectively.

[0027] Specifically, the voice coil motor 701 is the power actuator for the two-dimensional deflection of the lens 1 in the X and Y axes and the translation in the Z axis. Through the cooperation of four sets of voice coil motors 701, the independent and precise drive of the three-axis motion of the oscillating body 2 can be achieved. The voice coil motor 701 adopts a moving magnet design, with the permanent magnet 7011 as the mover and rigidly fixed to the oscillating body 2, and the coil 7012 as the stator fixed in the drive component mounting slot 803 of the quick-reflecting mirror body 8. The permanent magnet 7011 is coaxially nested within the coil 701. In the inner cavity of 2, a uniform air gap is reserved between the two. When the driving current is applied to the coil 7012, the magnetic field generated by the coil 7012 interacts with the constant magnetic field of the permanent magnet 7011, generating an Ampere force along the axis of the coil 7012, which in turn drives the permanent magnet 7011 and the swing body 2 to complete the axial push-pull motion. When the current direction is reversed, the pushing force direction is reversed synchronously. The moving magnet structure can prevent the heat of the coil 7012 from being transferred to the swing body 2 and the lens 1, which would cause thermal deformation of the optical components and ensure the beam quality.

[0028] Furthermore, four sets of voice coil motors 701 are arranged in pairs opposite each other along the circumference. The two sets of voice coil motors 701 opposite each other drive the swing body 2 to deflect around the X-axis or Y-axis through push-pull differential power. When the four sets of voice coil motors 701 synchronously output push or pull in the same direction, they drive the swing body 2 to translate along the Z-axis.

[0029] Specifically, four sets of voice coil motors 701 are evenly distributed along the circumference at 90°, facing each other in pairs. The two sets of voice coil motors 701 facing each other correspond to the drive of the X-axis and Y-axis, respectively. When it is necessary to deflect around the X-axis, the first set of X-axis voice coil motors 701 outputs a positive thrust, and the second set of X-axis voice coil motors 701 outputs a reverse pull, forming a pair of force couples, which drive the oscillating body 2 to deflect around the X-axis. When it is necessary to deflect around the Y-axis, the first set of Y-axis voice coil motors 701 outputs a positive thrust, and the second set of Y-axis voice coil motors 701 outputs a reverse pull, forming a pair of force couples, which drive the oscillating body 2 to deflect around the Y-axis. When it is necessary to translate along the Z-axis, the four sets of voice coil motors 701 synchronously output thrust or pull in the same direction, and the combined force drives the oscillating body 2 to make axial translational movement along the Z-axis, so as to realize the focusing adjustment of the lens 1.

[0030] It should be noted that the control quantities of the four voice coil motors 701 are the linear superposition of the X-axis, Y-axis and Z-axis control signals, which can realize independent control of the three motion dimensions without cross coupling, and are suitable for decoupled closed-loop control requirements.

[0031] Furthermore, the front end of the spiral diaphragm flexible support 5 has multiple hollowed-out slots 501, all of which are in the shape of an Archimedean spiral. A flexible support arm 502 is formed between two adjacent hollowed-out slots 501, and the number of flexible support arms 502 is at least three.

[0032] Specifically, the flexible support arm 502 adopts a cantilevered flexible support structure with a fixed center and a moving outer edge, providing the swing body 2 with three specified degrees of freedom: X-axis deflection, Y-axis deflection, and Z-axis translation, while completely restricting the other three redundant degrees of freedom. The Archimedean spiral-shaped perforated slots 501 on the spiral diaphragm flexible support 5 are formed by precision laser cutting. Unlike traditional perforated shapes such as circles and squares, the polar diameter of the Archimedean spiral increases uniformly and linearly with the polar angle. That is, from the center of the spiral outward, the increase in polar diameter is constant for each rotation. The flexible support arm 502 formed between adjacent perforated slots 501 also follows the geometric trajectory of the Archimedean spiral, making the flexible support arm 502 more flexible and stable. The moment of inertia of the cross section of the support arm 502 changes uniformly and linearly from the center to the outer edge. That is, the elastic stiffness of the flexible support arm 502 increases synchronously and linearly with the increase of the extreme diameter, and the deformation stiffness of the support arm at any angle in the circumference is completely consistent. This uniform stiffness distribution can ensure that the motion trajectory of the swing body 2 is always coaxial and without eccentric offset when it deflects along the X-axis, Y-axis and Z-axis, eliminating the cross coupling between different motion dimensions and ensuring the independent controllability of the three-axis motion. At the same time, the smooth and continuous curve shape of the Archimedean spiral can make the deformation stress of the flexible support arm 502 continuously and uniformly distributed along the spiral trajectory when the swing body 2 moves, which improves the fatigue strength of the spiral diaphragm flexible support 5.

[0033] It should be noted that at least three evenly distributed flexible support arms 502 can ensure that the support stiffness is uniform in the circumferential direction, avoiding eccentricity or swaying when the swing body 2 deflects. When the voice coil motor 701 outputs driving force, the flexible support arm 502 undergoes elastic deformation, driving the swing body 2 on the outer edge to complete the deflection or translation movement. After the driving force disappears, the elastic restoring force of the flexible support arm 502 can drive the swing body 2 to reset to zero point, while providing stable damping for the movement and avoiding oscillation.

[0034] Furthermore, the four sets of eddy current sensors 4 are arranged in pairs facing each other. The output signals of the two opposing sets of eddy current sensors 4 are used to calculate the difference to obtain the deflection angle signal of the X-axis or Y-axis, and the output signals of the four sets of eddy current sensors 4 are used to sum to obtain the Z-axis displacement signal.

[0035] Specifically, four metal conductor plates 3 are evenly distributed at 90° circumference along the rear end of the swing body 2, each directly opposite the measuring end of one of the four eddy current sensors 4, forming four independent displacement detection units. The eddy current sensors 4 operate based on the high-frequency eddy current effect, providing non-contact displacement detection without mechanical friction. The four sets of eddy current sensors 4 are arranged in pairs, with the opposing pairs of sensors 4 used to obtain the deflection angle signal along the X-axis or Y-axis, respectively. The first X-axis eddy current sensor 4 and the second X-axis eddy current sensor 4 are arranged opposite each other along the X-axis, and the first Y-axis eddy current sensor 4 and the second Y-axis eddy current sensor 4 are arranged opposite each other along the Y-axis. When the swing body 2 deflects around the X-axis, the distance between the X-axis eddy current sensor 4 on one side and the corresponding metal conductor plate 3 increases, and the output voltage decreases; conversely, the distance between the X-axis eddy current sensor 4 on the other side and the corresponding metal conductor plate 3 decreases. As the output voltage increases, the two signal input difference module calculates the X-axis deflection angle through the difference, which also cancels the common-mode error caused by the translation of the oscillating body 2 along the Z-axis, ensuring that the deflection angle detection is not affected by the Z-axis movement. The distance between the Y-axis eddy current sensor 4 on one side and the corresponding metal conductor plate 3 increases, and the output voltage decreases. The distance between the Y-axis eddy current sensor 4 on the other side and the corresponding metal conductor plate 3 decreases, and the output voltage increases. The Y-axis deflection angle is calculated after the difference between the two signals, which can also cancel the common-mode interference of the Z-axis translation, realizing independent detection of the Y-axis deflection. When the oscillating body 2 translates along the Z-axis, the distance between the four sensors and the corresponding metal conductor plate 3 increases or decreases synchronously. The absolute displacement of the Z-axis can be accurately calculated after the sum of the four signals, which can also cancel the differential-mode error caused by the X-axis deflection and Y-axis deflection, realizing independent detection of the Z-axis translation.

[0036] It should be noted that all four eddy current sensors 4 are electrically connected to the external controller. The signal output terminal of each eddy current sensor 4 is independently connected to the signal acquisition interface of the external controller, synchronously transmitting the real-time detected voltage feedback signal to the signal processing module of the controller to ensure the independence and accuracy of the four detection signals. The external controller has a built-in instruction parsing module that can convert digital or analog instructions sent by the host computer into electrical signals that match its own control logic. At the same time, it filters the instruction signals to eliminate instruction noise caused by external electromagnetic interference, ensuring the stability and accuracy of the instructions.

[0037] Reference Figures 7-10 As shown, a control method for controlling a fast reflector with Z-axis function as described above includes the following steps: Obtain the X-axis deflection command, Y-axis deflection command, and Z-axis displacement command respectively; Specifically, the controller receives command signals from the external upper control system in real time through a preset communication interface. The accuracy of the command signals is preset by the upper system according to the actual application scenario and can be dynamically adjusted.

[0038] The X-axis deflection angle feedback signal, Y-axis deflection angle feedback signal, and Z-axis displacement feedback signal of the oscillating body are obtained by an eddy current sensor. Specifically, based on the non-contact detection principle of the eddy current effect, four eddy current sensors 4 emit high-frequency alternating magnetic fields to the corresponding metal conductor sheets 3 in real time. Under the action of the magnetic field, the metal conductor sheets 3 generate induced eddy currents. The intensity of the eddy current is linearly related to the distance between the sensor and the conductor sheet. That is, the smaller the distance, the greater the intensity of the eddy current and the higher the output voltage of the sensor, and vice versa. The sensor converts the eddy current intensity signal into a voltage feedback signal and transmits it to the signal processing module of the controller. The signal processing module performs differential summation on the four sensor signals and calculates the real-time feedback signals of the X-axis deflection angle, Y-axis deflection angle, and Z-axis displacement, respectively.

[0039] The difference between the X-axis deflection command and the X-axis deflection angle feedback signal is input into the X-axis controller to obtain the X-axis control signal; Specifically, the X-axis controller uses a PID control algorithm to calculate the difference between the command target value and the actual feedback value, and then uses the PID algorithm to calculate the deviation value, converting the angle deviation into a control signal that can drive the voice coil motor 701.

[0040] The difference between the Y-axis deflection command and the Y-axis deflection angle feedback signal is input into the Y-axis controller to obtain the Y-axis control signal; Specifically, the Y-axis controller also uses the PID control algorithm, which has the same function as the X-axis control signal, to convert the Y-axis angle deviation into a drive signal.

[0041] The difference between the Z-axis displacement command and the Z-axis displacement feedback signal is input into the Z-axis controller to obtain the Z-axis control signal; Specifically, the Z-axis controller also uses the PID control algorithm, and its control target is displacement, which is used to convert the Z displacement deviation into a drive signal.

[0042] It should be noted that the X-axis controller, Y-axis controller, and Z-axis controller are independent of each other.

[0043] The X-axis control signal, Y-axis control signal and Z-axis control signal are linearly superimposed to obtain the independent control quantities of four voice coil motors. The corresponding power amplifiers drive the four voice coil motors to independently control the X-axis deflection, Y-axis deflection and Z-axis translation of the oscillating body.

[0044] Specifically, the linear superposition of the three-axis control signals is adapted to the pairwise relative arrangement of the four voice coil motors 701, realizing the decoupled drive of the three-axis motion. The linear superposition ensures that the three-axis control signals do not interfere with each other. Since the superimposed control quantity is a low-voltage analog signal, it cannot directly drive the voice coil motor 701. It is necessary to amplify the control signal into a high-current drive signal through a power amplifier to match the drive requirements of the voice coil motor 701. The power amplifier adopts a linear amplification mode to ensure that the control quantity and the drive current are linearly correlated, realizing the precise control of the drive force of the voice coil motor 701. When the four voice coil motors 701 receive the amplified drive current, the coil 7012 generates an alternating magnetic field, which interacts with the constant magnetic field of the permanent magnet 7011 to generate an Ampere force, driving the oscillating body 2 to complete the corresponding motion.

[0045] Furthermore, the X-axis control signal is divided into two paths. One path is directly input to the corresponding power amplifier of the voice coil motor used to drive the X-axis deflection, and the other path is inverted and input to another power amplifier of the voice coil motor used to drive the X-axis deflection.

[0046] Specifically, the X-axis control signal is generated by the X-axis controller. One path is a positive voltage signal, and the other path is a reverse voltage signal formed by inverting the positive voltage signal. By inputting the positive voltage signal into the power amplifier of the first set of X-axis voice coil motors 701 and the reverse voltage signal into the power amplifier of the second set of X-axis voice coil motors 701, the two sets of X-axis voice coil motors 701 generate Ampere forces in opposite directions, forming a pair of force couples. This drives the oscillating body 2 to deflect around the X-axis. The magnitude of the force couple is proportional to the amplitude of the voltage signal. The larger the voltage signal, the larger the force couple and the faster the deflection angle is adjusted. Conversely, the smaller the voltage signal, the smaller the force couple and the smoother the deflection.

[0047] Furthermore, the Y-axis control signal is divided into two paths. One path is directly input to the corresponding power amplifier of the voice coil motor used to drive the Y-axis deflection, and the other path is inverted and input to another power amplifier of the voice coil motor used to drive the Y-axis deflection.

[0048] Specifically, the Y-axis control signal is generated by the Y-axis controller, and the distribution principle is the same as that of the X-axis control signal. By inputting the positive voltage signal into the power amplifier of the first set of Y-axis voice coil motors 701 and the reverse voltage signal into the power amplifier of the second set of Y-axis voice coil motors 701, the two sets of Y-axis voice coil motors 701 generate Ampere forces in opposite directions, forming a pair of force couples, which drive the oscillating body 2 to deflect around the Y-axis.

[0049] Furthermore, the Z-axis control signal is divided into four channels, which are respectively input to the power amplifiers of the four voice coil motors. The control channels for X-axis deflection, Y-axis deflection, and Z-axis translation are independent of each other.

[0050] Specifically, the Z-axis control signal is generated by the Z-axis controller and is divided into four voltage signals. These signals are synchronously input into the power amplifiers of the four voice coil motors 701, causing the four voice coil motors 701 to generate Ampere forces in the same direction. The resultant force of the four motors drives the swing body 2 to move axially along the Z-axis. The translation speed and displacement are proportional to the amplitude of the voltage signal. The larger the voltage signal, the greater the resultant force, the faster the translation and the greater the displacement, and vice versa.

[0051] Working Principle: During use, the external controller receives X-axis deflection commands, Y-axis deflection commands, and Z-axis displacement commands from the upper control system in real time through a preset communication interface. The command accuracy can be dynamically adjusted according to the actual application scenario. The controller uses a built-in command parsing module to filter the received command signals, eliminating noise caused by external electromagnetic interference, and converting them into electrical signals that match its own control logic. These signals are then synchronously distributed to the independent X-axis, Y-axis, and Z-axis controllers. Simultaneously with command parsing, four eddy current sensors 4 are activated, emitting high-frequency alternating magnetic fields to the corresponding metal conductor plates 3. Under the action of the magnetic field, the metal conductor plates 3 generate induced eddy currents. The four sensors synchronously transmit the real-time detected voltage signals to the controller's signal processing module. The two sets of sensors calculate the difference between their signals to obtain the X-axis and Y-axis deflection angle feedback signals, respectively. The four sensor signals are summed to obtain the Z-axis displacement feedback signal. Subsequently, the X-axis, Y-axis, and Z-axis controllers receive the signals. The difference between the command signal and the feedback signal is calculated and PID operation is performed to convert the angle and displacement deviation into a control signal that can drive the voice coil motor 701. Then, the three-axis control signals are linearly superimposed to generate four sets of independent control quantities for the voice coil motor 701. After receiving the amplified drive current, the coil 7012 of the four voice coil motors 701 generates an alternating magnetic field, which interacts with the constant magnetic field of the permanent magnet 7011 to generate an Ampere force, driving the swing body 2 to complete the corresponding movement of the lens 1. The spiral diaphragm flexible support 5 works synchronously to achieve motion guidance and reset. During the movement of the swing body 2, the eddy current sensor 4 continuously collects its real-time position signal and synchronously feeds it back to the external controller. The controller compares the upper computer command signal with the sensor feedback signal in real time. If there is a deviation, it immediately adjusts the X, Y and Z axis control signals, redistributes the drive current of the voice coil motor 701, and fine-tunes the deflection angle or translation displacement of the swing body 2 until the feedback signal and the command signal are completely matched.

[0052] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention. The scope of protection claimed by the appended claims and their equivalents is defined.

Claims

1. A fast-reflecting mirror with Z-axis function, characterized in that, include: The lens (1) is used to reflect the incident light beam and adjust the propagation direction of the light path; The swing body (2) is used to drive the lens (1) to complete the deflection and translation movements synchronously. The lens (1) is fixedly installed at the front end of the swing body (2). Four metal conductor plates (3) are fixedly connected to the rear end of the swing body (2); Four eddy current sensors (4) are used to cooperate with the metal conductor sheet (3) to collect the real-time motion position signal of the swing body (2). The four eddy current sensors (4) are all set at the rear end of the metal conductor sheet (3) and their measuring ends are respectively facing the rear end of the four metal conductor sheets (3). The four eddy current sensors (4) are all electrically connected to an external controller. The spiral diaphragm flexible support (5) is used to provide a specified degree of freedom of movement for the swing body (2) and restrict excess degrees of freedom. The outer edge of the spiral diaphragm flexible support (5) is fixedly connected to the rear end of the swing body (2). Multiple hollow slots (501) are opened through the front end of the spiral diaphragm flexible support (5), and a flexible support arm (502) is formed between two adjacent hollow slots (501). A flexible support base (6) is used to provide an installation support foundation for the spiral diaphragm flexible support (5). The front end of the flexible support base (6) is fixedly connected to the rear center of the spiral diaphragm flexible support (5). The drive assembly (7) is used to provide driving force for the movement of the swing body (2). The drive assembly (7) includes four voice coil motors (701) evenly distributed in the circumferential direction. All four voice coil motors (701) are located at the rear end of the swing body (2). The fast-reflecting mirror body (8), the drive assembly (7), the flexible support base (6) and the eddy current sensor (4) are all located inside the fast-reflecting mirror body (8).

2. A fast-reflecting mirror with Z-axis function according to claim 1, characterized in that: The fast-reflecting mirror body (8) has a support base mounting groove (801) at the center of its front end. The front end of the fast-reflecting mirror body (8) has four evenly distributed sensor mounting grooves (802) on the outside of the support base mounting groove (801). The front end of the fast-reflecting mirror body (8) has four evenly distributed drive component mounting grooves (803) on the outside of the sensor mounting groove (802). The flexible support base (6) is fixedly connected to the inside of the support base mounting groove (801), and the eddy current sensor (4) is fixedly installed inside the sensor mounting groove (802).

3. A fast-reflecting mirror with Z-axis function according to claim 1, characterized in that: Each voice coil motor (701) includes a permanent magnet (7011) and a coil (7012). The four permanent magnets (7011) are fixedly connected to the rear end of the swing body (2), and the four coils (7012) are respectively fixedly connected to the interior of the four drive component mounting slots (803). The four permanent magnets (7011) are coaxially nested in the inner cavity of the four coils (7012).

4. A fast reflector with Z-axis function according to claim 1, characterized in that: The multiple hollow through slots (501) are all in the shape of an Archimedean spiral, and the number of flexible support arms (502) is at least three.

5. A fast reflector with Z-axis function according to claim 1, characterized in that: The four sets of voice coil motors (701) are arranged in pairs opposite each other along the circumference. The two sets of voice coil motors (701) opposite each other drive the swing body (2) to deflect around the X-axis or Y-axis through push-pull differential power. When the four sets of voice coil motors (701) output push or pull in the same direction, they drive the swing body (2) to translate along the Z-axis.

6. A fast reflector with Z-axis function according to claim 1, characterized in that: The four sets of eddy current sensors (4) are arranged in pairs opposite each other. The output signals of the two sets of eddy current sensors (4) opposite each other are used to calculate the difference to obtain the deflection angle signal of the X-axis or Y-axis, and the output signals of the four sets of eddy current sensors (4) are used to sum to obtain the displacement signal of the Z-axis.

7. A control method for a fast-reflecting mirror with Z-axis function according to any one of claims 1-6, characterized in that, Includes the following steps: The X-axis deflection command, Y-axis deflection command, and Z-axis displacement command are obtained through an external controller. The X-axis deflection angle feedback signal, Y-axis deflection angle feedback signal, and Z-axis displacement feedback signal of the oscillating body are obtained by an eddy current sensor. The difference between the X-axis deflection command and the X-axis deflection angle feedback signal is input into the X-axis controller to obtain the X-axis control signal; The difference between the Y-axis deflection command and the Y-axis deflection angle feedback signal is input into the Y-axis controller to obtain the Y-axis control signal; The difference between the Z-axis displacement command and the Z-axis displacement feedback signal is input into the Z-axis controller to obtain the Z-axis control signal; The X-axis control signal, Y-axis control signal and Z-axis control signal are linearly superimposed to obtain the independent control quantities of four voice coil motors. The corresponding power amplifiers drive the four voice coil motors to independently control the X-axis deflection, Y-axis deflection and Z-axis translation of the oscillating body.

8. The control method according to claim 7, characterized in that: The X-axis control signal is divided into two paths. One path is directly input to the power amplifier of the corresponding set of voice coil motors used to drive the X-axis deflection, and the other path is inverted and input to another set of power amplifiers used to drive the X-axis deflection.

9. The control method according to claim 7, characterized in that: The Y-axis control signal is divided into two paths. One path is directly input to the power amplifier of the corresponding set of voice coil motors used to drive the Y-axis deflection, and the other path is inverted and input to another set of power amplifiers used to drive the Y-axis deflection.

10. The control method according to claim 7, characterized in that: The Z-axis control signal is divided into four channels, which are respectively input to the power amplifiers of the four voice coil motors. The control channels for X-axis deflection, Y-axis deflection and Z-axis translation are independent of each other.

Images