Multi-dimensional vibration platform with double sandwich type piezoelectric actuators arranged in same direction and excitation method of multi-dimensional vibration platform

Abstract

The invention discloses a multi-dimensional vibration platform with double sandwich type piezoelectric actuators arranged in the same direction and an excitation method of the multi-dimensional vibration platform, and relates to the field of high-frequency vibration engineering and micro-nano machining. Aiming at the problem that a traditional piezoelectric vibration platform is difficult to realize higher-dimension multi-degree-of-freedom operation capability, the piezoelectric vibration platform comprises an output platform, two piezoelectric actuators, two end covers and two bolts. The piezoelectric actuator is provided with a longitudinal vibration ceramic set and two bending vibration ceramic sets arranged in the orthogonal direction, and through excitation of voltage signals with the same phase or the phase difference of 180 degrees, rotation around the X axis, the Y axis and the Z axis and translation along the X axis and the Y axis are achieved. Due to structural symmetry and driver arrangement constraint, Z-direction translation is strongly coupled with an existing mode, so that high-practicability five-degree-of-freedom output is focused. The same-direction arrangement type design is adopted, the characteristic of low motion coupling is achieved, and displacement deformation of the piezoelectric actuator can be converted into different actions needed by multi-dimensional vibration of the tail end platform. The method is suitable for the fields of laser processing, vibration-assisted processing, micro-nano operation, active vibration suppression and the like.

Description

Technical Field

[0001] This invention relates to the fields of high-frequency vibration engineering and micro / nano fabrication technology, and in particular to a multidimensional vibration platform. Background Technology

[0002] In biomedical engineering and micro / nano vibration fabrication technology, it is necessary to manipulate end effectors or excitation targets to achieve high-frequency microscale vibrations with multiple degrees of freedom. Utilizing the inverse piezoelectric effect of piezoelectric materials, electrical energy can be converted into the mechanical energy of a platform, thereby driving the platform to perform high-frequency, fast-response vibrations. When the platform operates in resonant mode, it can achieve a large velocity output at low power. Traditional piezoelectric vibration platforms can achieve one-dimensional to three-dimensional resonant modes through a combination of longitudinal and bending vibrations, but they lack the ability to perform higher-dimensional, multi-degree-of-freedom manipulation. Summary of the Invention This invention addresses the problem of limited output degrees of freedom in traditional piezoelectric vibration platforms by proposing a dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform and its excitation method.

[0003] To achieve the above objectives, the present invention provides the following technical solution: This invention provides a dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform and its excitation method, the vibration platform comprising: Output platform, two piezoelectric actuators, two end caps, two bolts; The output platform is a composite component, which integrates multiple sub-parts. The multiple sub-parts include at least an end platform, two flexible hinges, and two amplitude rods. The end platform has a centrally symmetrical structure; The upper end faces of the two flexible hinges are symmetrically connected to the lower end faces of the end platform, and the lower end faces of the two flexible hinges are correspondingly connected to the upper end faces of the two amplitude rods, so that the two amplitude rods are arranged symmetrically about the geometric center of the end platform below the end platform. Both of the two amplitude rods have threaded holes on their end faces, both of the two piezoelectric actuators have through holes in the axial direction, and both of the two end caps have through holes. The two bolts are matched one-to-one with the two piezoelectric actuators and the two end caps. The threaded part of each bolt passes through the through hole of the corresponding end cap and the through hole of the corresponding piezoelectric actuator in sequence, and is fastened to the corresponding amplitude rod by threads. The nut part of each bolt is in close contact with the end face of the corresponding end cap. The two amplitude rods and the two piezoelectric actuators are all provided with brackets for fixed constraints in the circumferential direction. The vibration platform is arranged in a centrally symmetrical manner about the geometric center of the end platform.

[0004] Furthermore, a preferred embodiment is proposed, wherein the piezoelectric actuator is provided with any one of the following combinations: longitudinal vibration ceramic group, two orthogonally arranged bending vibration ceramic groups around the Y-axis and bending vibration ceramic groups around the Z-axis, either independently, in pairs, or in a fully inclusive manner. The longitudinal vibration ceramic assembly includes a driving electrode and a ground electrode. When a voltage is applied between the driving electrode and the ground electrode of the longitudinal vibration ceramic assembly, the piezoelectric actuator produces a telescopic motion. The Y-axis bending ceramic assembly includes a driving electrode and a ground electrode. When a voltage is applied between the driving electrode and the ground electrode of the Y-axis bending ceramic assembly, the piezoelectric actuator generates bending motion around the Y-axis. The Z-axis bending ceramic assembly includes a drive electrode and a ground electrode. When a voltage is applied between the drive electrode and the ground electrode of the Z-axis bending ceramic assembly, the piezoelectric actuator generates bending motion around the Z-axis.

[0005] Furthermore, a preferred embodiment is proposed, wherein the piezoelectric actuator is any one of a stacked structure, a patch structure, a piezoelectric tube structure, or a combination of the three structures, for achieving displacement deformation.

[0006] Furthermore, a preferred embodiment is proposed in which the flexible hinge is fixedly connected to the end platform and the amplitude rod by any one of the following methods: threaded connection, adhesive bonding, welding, or integral processing.

[0007] Furthermore, a preferred embodiment is proposed, wherein the flexible hinge is either biaxially symmetrical or omnidirectional, used to transmit linear and bending motion.

[0008] Furthermore, a preferred embodiment is proposed, wherein the vibration platform is fixed by any one of the following methods: fixing it with a bracket of an amplitude transformer or a bracket of a piezoelectric actuator, or a combination thereof, to fix the vibration platform and convert the displacement deformation of the piezoelectric actuator into different actions required for the multidimensional vibration of the end platform.

[0009] Furthermore, a preferred embodiment is proposed in which the axes of the two amplitude rods are parallel to each other or form an angle of less than 90 degrees; and the axes of the two piezoelectric drives are parallel to each other or form an angle of less than 90 degrees.

[0010] Based on the same inventive concept, this invention also proposes a vibration excitation method for a multidimensional vibration platform. The method is implemented based on the aforementioned dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform, and includes: When a positive and negative alternating voltage signal is connected to the bending ceramic group electrode and the ground electrode of two piezoelectric actuators in the Y-axis direction and the frequency matches the bending resonance mode, the end platform generates vibration around the Y-axis. When one positive and negative alternating voltage signal is connected to the bending ceramic group electrode and ground electrode of a piezoelectric actuator in the Y-axis direction, and another positive and negative alternating voltage signal is connected to the bending ceramic group electrode and ground electrode of another piezoelectric actuator in the Y-axis direction, and the two signals are 180 degrees out of phase and their frequencies match the bending resonance mode, the end platform will generate vibration around the X-axis. When a positive and negative alternating voltage signal is connected to the electrodes of the bending ceramic assembly of two piezoelectric actuators around the Z-axis and the ground electrode, and the signal frequency matches the bending resonant mode of the piezoelectric actuator, the drive end platform generates vibration; at the first resonant frequency, the vibration is mainly translational along the Y-axis; at the second resonant frequency, the vibration is mainly rotational around the Z-axis; the dominant vibration mode is switched by selecting the resonant frequency. When one positive and negative alternating voltage signal is connected to the bending ceramic group electrode and ground electrode of a piezoelectric actuator in the Z-axis direction, and another positive and negative alternating voltage signal is connected to the bending ceramic group electrode and ground electrode of another piezoelectric actuator in the Z-axis direction, and the two signals are 180 degrees out of phase and their frequencies match the bending resonance mode, the end platform will generate vibration along the X-axis. When a positive and negative alternating voltage signal is connected to the longitudinal vibration ceramic group electrodes and the ground electrode of two piezoelectric actuators and the frequency matches the longitudinal vibration resonant mode, the end platform generates vibration that moves along the X-axis. When one positive and negative alternating voltage signal is connected to the longitudinal vibration ceramic group electrode and the ground electrode of one piezoelectric actuator, and another positive and negative alternating voltage signal is connected to the longitudinal vibration ceramic group electrode and the ground electrode of another piezoelectric actuator, and the two signals are 180 degrees out of phase and their frequencies match the longitudinal vibration resonant mode, the end platform can generate vibration around the Z-axis.

[0011] The beneficial effects of this invention are as follows: 1. Traditional longitudinal bending piezoelectric actuators can only achieve a maximum of three degrees of freedom vibration output, limiting the development of multidimensional micro-nano manipulation. This invention proposes a dual-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform. Through the synergistic excitation of the two piezoelectric actuators, the platform can generate five degrees of freedom vibration modes: translation along the X and Y axes and rotation around the X, Y, and Z axes. Due to structural symmetry and actuator arrangement constraints, the Z-axis translation is strongly coupled with existing modes, thus focusing on highly practical five-degree-of-freedom output. This design allows for more flexible adjustment of the angle of the sandwich piezoelectric actuators, adapting to different spatial size and vibration dimension requirements.

[0012] 2. The end cap, piezoelectric actuator, and amplitude transformer are threaded together by bolts, which provides the initial preload of the piezoelectric actuator, preventing it from being damaged by tensile stress during operation. This effectively improves its service life and ensures the stability and reliability of its output characteristics.

[0013] 3. The present invention provides a dual-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform. The fixing method can be any combination of amplitude transformer or piezoelectric actuator. The design of multiple mechanical interfaces provides a more flexible fixing method, and the versatility of the fixing installation is applicable to a wider range of processing systems.

[0014] 4. The present invention provides a dual-sandwich piezoelectric actuator co-arranged multidimensional vibration platform, which uses piezoelectric actuators as actuation units and utilizes the inverse piezoelectric effect to achieve fast response and high-precision deformation control.

[0015] 5. The present invention provides a dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform. The piezoelectric actuators are arranged in the same direction and side by side, which effectively reduces the height of the vibration platform and is conducive to integration with the processing system.

[0016] 6. Due to the vibration output of up to five degrees of freedom, the dual-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform proposed in this invention is not only suitable for high-frequency, high-dimensional vibration control required in laser or vibration-assisted processing, but can also be applied to active vibration suppression applications to cancel or suppress high-frequency vibration interference. The high-dimensional vibration makes it have broad application prospects in both processing and vibration suppression applications.

[0017] 7. This invention provides a dual-sandwich piezoelectric actuator co-arranged multidimensional vibration platform. By independently exciting ceramics in different working modes within the piezoelectric actuator, one-dimensional to five-dimensional vibration output is achieved. The vibration amplitude and resonant frequency can be adjusted by adjusting the stiffness of the flexible hinge without affecting the overall height of the vibration platform.

[0018] This invention is applicable to laser processing, vibration-assisted processing, micro-nano manipulation, and active vibration suppression. Attached Figure Description

[0019] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of the dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform described in Embodiment 1. Figure 2 This is an exploded schematic diagram of the multidimensional vibration platform with unidirectional arrangement of dual sandwich piezoelectric actuators as described in Embodiment 1. Figure 3This is a full cross-sectional schematic diagram of the unidirectional arrangement type multidimensional vibration platform with dual sandwich piezoelectric actuators as described in Embodiment 1. Figure 4 This is a schematic diagram of the structure of the dual-sandwich piezoelectric actuator co-arranged multidimensional vibration platform described in Embodiment 8, where the end platform rotates around the Y-axis when the two piezoelectric actuators are connected to the bending vibration ceramic group electrodes and the ground electrode in the Y-axis direction by a positive and negative alternating voltage signal. Figure 5 The diagram illustrates the structure of the dual-sandwich piezoelectric actuator co-arranged multidimensional vibration platform described in Embodiment 8, where one positive and negative alternating voltage signal is connected to the bending vibration ceramic group electrode and ground electrode of one piezoelectric actuator in the Y-axis direction, and another positive and negative alternating voltage signal is connected to the bending vibration ceramic group electrode and ground electrode of another piezoelectric actuator in the Y-axis direction. The two signals are 180 degrees out of phase and their frequencies match the bending vibration resonance mode. Figure 6 This is a schematic diagram of the structure of the dual-sandwich piezoelectric actuator co-arranged multidimensional vibration platform described in Embodiment 8, where two bending ceramic group electrodes and a ground electrode are connected by a positive and negative alternating voltage signal in the Z-axis direction and the frequencies match the bending resonance mode, and the vibration platform moves along the Y-axis and rotates around the Z-axis. Figure 7 This is a schematic diagram of the structure of the dual-sandwich piezoelectric actuator co-arranged multidimensional vibration platform described in Embodiment 8. One positive and negative alternating voltage signal is connected to the bending vibration ceramic group electrode and ground electrode of one piezoelectric actuator in the Z-axis direction, and another positive and negative alternating voltage signal is connected to the bending vibration ceramic group electrode and ground electrode of another piezoelectric actuator in the Z-axis direction. The two signals are 180 degrees out of phase and their frequencies match the bending vibration resonance mode. The diagram shows the structure of the end platform moving along the X-axis. Figure 8 This is a schematic diagram of the structure of the dual-sandwich piezoelectric actuator co-arranged multidimensional vibration platform described in Embodiment 8, in which the end platform moves along the X-axis when the longitudinal vibration ceramic group electrodes and the ground electrode of the two piezoelectric actuators are connected by a positive and negative alternating voltage signal and the frequency matches the longitudinal vibration resonant mode. Figure 9 The diagram shows the structure of the dual-sandwich piezoelectric actuator co-arranged multidimensional vibration platform described in Embodiment 8, where one positive and negative alternating voltage signal is connected to the longitudinal vibration ceramic group electrode and ground electrode of one piezoelectric actuator, and another positive and negative alternating voltage signal is connected to the longitudinal vibration ceramic group electrode and ground electrode of another piezoelectric actuator. The two signals are 180 degrees out of phase and their frequencies match the longitudinal vibration resonant mode. Among them, 1-output platform; 2-piezoelectric actuator; 3-end cover; 4-bolt; 1-output platform includes 1-1-end platform, 1-2-flexible hinge, 1-3-amplitude rod. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0022] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "X-axis," "Y-axis," and "Z-axis," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this invention is in use. These terms are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0023] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0024] In the description of this invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0025] Coordinate system definition: The origin is the geometric center of the end platform. The Y-axis and Z-axis are located in the plane of the end platform and are perpendicular to each other. The X-axis is perpendicular to the plane of the end platform and points upward.

[0026] Implementation Method 1, see [link] Figure 1 , Figure 2 and Figure 3This embodiment describes a dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform, the vibration platform comprising: Output platform 1, two piezoelectric actuators 2, two end caps 3, two bolts 4; The output platform 1 is a composite component, which integrates multiple sub-parts, including an end platform 1-1, two flexible hinges 1-2 and two amplitude rods 1-3. The end platform 1-1 is characterized by central symmetry. The upper end face of the amplitude rod 1-3 is connected to the lower end face of the flexible hinge 1-2, and the upper end face of the flexible hinge 1-2 is connected to the lower end face of the end platform 1-1. The end face of the amplitude rod 1-3 is provided with a threaded hole, the piezoelectric actuator 2 is provided with a through hole in the axial direction, the end cover 3 is provided with a through hole, the screw part of the bolt 4 passes through the through hole of the end cover 3 and the through hole of the piezoelectric actuator 2, and is fastened to the amplitude rod 1-3 by threads, and the nut part of the bolt 4 is in close contact with the end face of the end cover 3. The amplitude rod 1-3 and the piezoelectric actuator 2 are provided with brackets in the circumferential direction for fixed constraints; The vibration platform is arranged in a centrally symmetrical manner about the geometric center of the end platform 1-1.

[0027] In this embodiment, by arranging the two piezoelectric actuators 2 in the same direction, the two piezoelectric actuators 2 are coordinated to excite the end platform 1-1 to generate five degrees of freedom vibration modes, including translation along the X and Y axes and rotation around the X, Y, and Z axes. This design allows for more flexible adjustment of the angle of the piezoelectric actuators 2 to adapt to different spatial size requirements and vibration dimension requirements.

[0028] In this embodiment, the end cap 3, the piezoelectric actuator 2, and the amplitude rod 1-3 are fastened together by bolt 4 through a threaded connection, which provides the initial preload required by the piezoelectric actuator 2, preventing it from being damaged by tensile stress during operation, and can effectively improve its service life and ensure the stability and reliability of the output characteristics.

[0029] The fixing method can be any combination of the amplitude rod 1-3 or the piezoelectric actuator 2. The design of multiple mechanical interfaces provides a more flexible fixing method, and the versatility of the fixed installation is suitable for a wider range of processing systems.

[0030] By arranging the two piezoelectric actuators in the same direction side by side, the height of the vibration platform is effectively reduced, which is beneficial for integration with the processing system.

[0031] It is not only suitable for high-frequency, high-dimensional vibration control in laser or vibration-assisted processing, but also for active vibration suppression to cancel or suppress high-frequency vibration interference. High-dimensional vibration makes it a promising technology for both processing and vibration suppression.

[0032] By exciting the ceramics in two piezoelectric actuators 2 with different operating modes, one-dimensional to five-dimensional vibration output was achieved. The vibration amplitude and resonant frequency can be adjusted by adjusting the stiffness of the flexible hinge without affecting the overall height of the vibration platform.

[0033] Implementation Method 2: This implementation method is a further definition of the dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform described in Implementation Method 1. The piezoelectric actuator 2 is provided with any one of the following combinations: longitudinal vibration ceramic group, two orthogonally arranged bending vibration ceramic groups around the Y-axis and bending vibration ceramic groups around the Z-axis, either independent, paired, or fully inclusive. The longitudinal vibration ceramic assembly includes a driving electrode and a ground electrode. When a voltage is applied between the driving electrode and the ground electrode of the longitudinal vibration ceramic assembly, the piezoelectric actuator 2 generates a telescopic action. The Y-axis bending ceramic assembly includes a driving electrode and a ground electrode. When a voltage is applied between the driving electrode and the ground electrode of the Y-axis bending ceramic assembly, the piezoelectric actuator 2 generates a bending motion around the Y-axis. The Z-axis bending ceramic assembly includes a driving electrode and a ground electrode. When a voltage is applied between the driving electrode and the ground electrode of the Z-axis bending ceramic assembly, the piezoelectric actuator 2 generates a bending motion around the Z-axis.

[0034] The piezoelectric actuator 2 described in this embodiment has high stiffness characteristics, making it suitable for high-frequency vibration applications. Its longitudinal and flexural ceramic assemblies can respond quickly under voltage excitation, and compared to traditional motors or mechanical transmission mechanisms, it can withstand higher frequencies and generally has lower power consumption. The high stiffness characteristic enables higher frequency vibrations and allows for ultrasonic excitation, which is particularly important for scenarios requiring low environmental noise.

[0035] By arranging the two piezoelectric actuators 2 in the same direction in this embodiment, the longitudinal bending three-degree-of-freedom vibration output of a single piezoelectric actuator 2 can be extended into two-axis linear movement and three-axis rotational motion of the end platform 1-1, thereby realizing five-degree-of-freedom vibration output.

[0036] Implementation Method 3: This implementation method further defines the dual-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform described in Implementation Method 2. The piezoelectric actuator 2 can be any one of a stacked structure, a patch structure, a piezoelectric tube structure, or a combination of the three structures, and is used to achieve displacement deformation.

[0037] The piezoelectric actuator 2 can be configured in stacked, patch, or piezoelectric tube structures, or a combination of these three structures, depending on the specific application requirements. This versatility allows designers to comprehensively consider space constraints, mechanical characteristics, and performance indicators, thereby optimizing actuator selection and effectively improving the performance and efficiency of the vibration platform.

[0038] Different types of piezoelectric actuators 2 vary in displacement output, stiffness, and power consumption, and can meet the needs of various application scenarios. For example, surface-mount structures are suitable for applications with low power consumption, while stacked structures can output higher displacement and have higher stiffness, which can meet the needs of high-frequency and high-power applications. Therefore, they can be selected, combined, and optimized according to specific needs.

[0039] Implementation Method 4: This implementation method further defines the dual-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform described in Implementation Method 1. The fixed connection between the flexible hinge 1-2 and the end platform 1-1 and the amplitude rod 1-3 can be any one of threaded connection, adhesive bonding, welding or integral processing.

[0040] The method of fixing directly affects the stability and long-term reliability of the system. By correctly selecting an appropriate fixing method, the connection structure between the flexible hinge 1-2 and the end platform 1-1 and the amplitude rod 1-3 can be ensured to be firm, thereby reducing loosening or damage caused by vibration or deformation during operation and improving the stability of the system.

[0041] Different fastening methods (such as threaded connections, adhesive bonding, welding, or one-piece machining) are suitable for different design requirements and material properties. For example, threaded connections may be more suitable for components that require frequent adjustments or replacements; while for applications requiring higher structural strength and tightness, adhesive bonding or welding may be better choices; and for applications with less stringent machining requirements, one-piece machining, which is more difficult to manufacture, can be chosen as it offers the best structural strength. Therefore, selecting the appropriate fastening method can allow for adjustments and optimization of the design based on specific application requirements.

[0042] Implementation Method 5: This implementation method further defines the dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform described in Implementation Method 1. The flexible hinges 1-2 are either biaxially symmetrical or universal, and are used to transmit linear and bending motion.

[0043] Different types of flexible hinges (such as biaxially symmetrical or universal joints) have different motion characteristics and transmission effects. For example, biaxially symmetrical flexible hinges may be more suitable for manufacturing, while universal joints, which mimic the structure of traditional mechanical universal joints, are better suited for transmitting a wide range of bending motions. This diversity allows the selection of the most suitable flexible hinge shape based on the specific motion requirements of the vibration platform, thereby optimizing the platform's motion performance and accuracy.

[0044] Choosing the right structural type for flexible hinges helps reduce energy dissipation during transmission and effectively suppresses vibration propagation. By optimizing their shape, driving forces can be guided along a more efficient path, allowing the flexible hinge to bend or deflect as expected under excitation. This significantly reduces stray vibrations generated by the vibration platform during operation, improving overall motion stability and control accuracy.

[0045] Implementation Method Six: This implementation method further defines the dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform described in Implementation Method One. The vibration platform is fixed by any one of the following methods: fixing it with the bracket of the amplitude transformer 1-3 or the bracket of the piezoelectric actuator 2, or a combination thereof. This method is used to fix the vibration platform and convert the displacement deformation of the piezoelectric actuator 2 into different actions required for the multidimensional vibration of the end platform 1-1.

[0046] Multiple fixed supports of the vibration platform can effectively limit the unexpected displacement or deformation of internal components, enhance the mechanical stability of the vibration platform, and prevent structural loosening or instability under high-frequency or high-power vibration conditions. By reasonably selecting the fixing method, harmful parasitic modes can be suppressed and electromechanical conversion efficiency can be improved.

[0047] Implementation Method Seven: This implementation method further defines the dual-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform described in Implementation Method One. The axes of the two amplitude rods 1-3 are parallel to each other or form an angle of less than 90 degrees; the axes of the two piezoelectric actuators 2 are parallel to each other or form an angle of less than 90 degrees.

[0048] The included angle between the two piezoelectric actuators 2 affects the multidimensional vibration amplitude and motion coupling of the end platform 1-1, and also affects the height of the vibration platform. The smaller the included angle, the greater the motion coupling of the end platform 1-1, and the higher the vibration platform, which is more suitable for applications where the height dimension is strictly limited; when the included angle is 0 degrees, the motion coupling of the end platform is minimal, which is suitable for high-precision vibration requirements.

[0049] Implementation Method 8, see below Figures 4 to 9This embodiment describes a dual-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform. The excitation method described in this embodiment is based on the dual-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform described in Embodiment 1. The excitation method includes: When a positive and negative alternating voltage signal is connected to the bending ceramic group electrodes and ground electrode of the two piezoelectric actuators 2 in the Y-axis direction and the frequency matches the bending resonance mode, the end platform 1-1 generates a vibration rotating around the Y-axis, such as... Figure 4 As shown; When one alternating positive and negative voltage signal is connected to the bending ceramic assembly electrode and ground electrode of one piezoelectric actuator 2 in the Y-axis direction, and another alternating positive and negative voltage signal is connected to the bending ceramic assembly electrode and ground electrode of another piezoelectric actuator 2 in the Y-axis direction, and the two signals are 180 degrees out of phase and their frequencies match the bending resonance mode, the end platform 1-1 will generate a vibration rotating around the X-axis, such as... Figure 5 As shown; When a positive and negative alternating voltage signal is connected to the electrodes of the bending ceramic assembly and the ground electrode of the two piezoelectric actuators 2 in the Z-axis direction, and the signal frequency matches the bending resonance mode of the piezoelectric actuators 2, the drive end platform 1-1 vibrates; at the first resonant frequency, the vibration is mainly translational along the Y-axis; at the second resonant frequency, the vibration is mainly rotational around the Z-axis; the dominant vibration mode is switched by selecting the resonant frequency, such as... Figure 6 As shown; When one alternating positive and negative voltage signal is connected to the bending ceramic assembly electrode and ground electrode of one piezoelectric actuator 2 in the Z-axis direction, and another alternating positive and negative voltage signal is connected to the bending ceramic assembly electrode and ground electrode of another piezoelectric actuator 2 in the Z-axis direction, and the two signals are 180 degrees out of phase and their frequencies match the bending resonance mode, the end platform 1-1 can generate vibration along the X-axis, such as... Figure 7 As shown; When a positive and negative alternating voltage signal is connected to the longitudinal vibration ceramic group electrodes and the ground electrode of the two piezoelectric actuators 2, and the frequency matches the longitudinal vibration resonant mode, the end platform 1-1 can generate vibration along the X-axis, such as... Figure 8 As shown; When one alternating positive and negative voltage signal is connected to the longitudinal vibration ceramic group electrode and ground electrode of one piezoelectric actuator 2, and another alternating positive and negative voltage signal is connected to the longitudinal vibration ceramic group electrode and ground electrode of another piezoelectric actuator 2, and the two signals are 180 degrees out of phase and their frequencies match the longitudinal vibration resonant mode, the end platform 1-1 will generate vibration around the Z-axis, such as... Figure 9 As shown.

[0050] The method described in this embodiment is based on a dual-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform as described in Embodiment 1. It utilizes the co-directional arrangement of two piezoelectric actuators 2 in space to achieve five-dimensional high-frequency vibration output of the end platform 1-1, including two degrees of freedom of movement and three degrees of freedom of rotation. This includes rotation around the X, Y, and Z axes, as well as movement along the X and Y axes. This five-degree-of-freedom control allows the end platform 1-1 to move rapidly in multiple directions, making it suitable for micro / nano fabrication and manipulation platforms requiring complex structures.

[0051] By using piezoelectric actuator 2 as the actuation unit, this method not only boasts high precision and long lifespan but also the high stiffness characteristic of the sandwich structure. The combination of the inverse piezoelectric effect and the sandwich structure enables rapid, precise, high-frequency vibration of the end platform 1-1 at the microscale, meeting the requirements of micro / nano fabrication systems and active vibration suppression systems.

[0052] Compared with traditional mechanical or electromagnetic transmission methods, the vibration method of this embodiment does not involve mechanical contact or friction, thus having a long service life and fewer maintenance requirements.

[0053] Implementation Method Nine: This implementation method provides a specific embodiment of the dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform described in Implementation Method One, and also serves to explain Implementation Methods Two to Eight. Specifically: A multidimensional vibration platform with a dual-sandwich piezoelectric actuator arranged in the same direction mainly includes: Output platform 1, two piezoelectric actuators 2, two end caps 3, two bolts 4; The output platform 1 is a composite component, which integrates multiple sub-parts, including an end platform 1-1, two flexible hinges 1-2 and two amplitude rods 1-3. The end platform 1-1 is characterized by central symmetry. The upper end face of the amplitude rod 1-3 is connected to the lower end face of the flexible hinge 1-2, and the upper end face of the flexible hinge 1-2 is connected to the lower end face of the end platform 1-1. The end face of the amplitude rod 1-3 is provided with a threaded hole, the piezoelectric actuator 2 is provided with a through hole in the axial direction, the end cover 3 is provided with a through hole, the screw part of the bolt 4 passes through the through hole of the end cover 3 and the through hole of the piezoelectric actuator 2, and is fastened to the amplitude rod 1-3 by threads, and the nut part of the bolt 4 is in close contact with the end face of the end cover 3. The amplitude rod 1-3 and the piezoelectric actuator 2 are provided with brackets in the circumferential direction for fixed constraints; The vibration platform is arranged in a centrally symmetrical manner about the geometric center of the end platform 1-1.

[0054] The piezoelectric actuator 2 is provided with a longitudinal vibration ceramic group and two orthogonally arranged bending vibration ceramic groups around the Y-axis and bending vibration ceramic groups around the Z-axis. The longitudinal vibration ceramic assembly includes a driving electrode and a ground electrode. When a voltage is applied between the driving electrode and the ground electrode of the longitudinal vibration ceramic assembly, the piezoelectric actuator 2 generates a telescopic action. The Y-axis bending ceramic assembly includes a driving electrode and a ground electrode. When a voltage is applied between the driving electrode and the ground electrode of the Y-axis bending ceramic assembly, the piezoelectric actuator 2 generates a bending motion around the Y-axis. The Z-axis bending ceramic assembly includes a driving electrode and a ground electrode. When a voltage is applied between the driving electrode and the ground electrode of the Z-axis bending ceramic assembly, the piezoelectric actuator 2 generates a bending motion around the Z-axis.

[0055] The piezoelectric actuator 2 has a stacked structure and is used to achieve displacement deformation.

[0056] The flexible hinge 1-2 is fixedly connected to the end platform 1-1 and the amplitude rod 1-3 by an integrated processing method.

[0057] The flexible hinges 1-2 are omnidirectional and are used to transmit linear and bending motions.

[0058] The vibration platform is fixed by a bracket of the piezoelectric actuator 2, which is used to fix the vibration platform and convert the displacement deformation of the piezoelectric actuator 2 into different actions required for the multidimensional vibration of the end platform 1-1.

[0059] The axes of the two amplitude rods 1-3 are parallel, and the axes of the piezoelectric actuator 2 are also parallel, exhibiting minimal motion coupling.

[0060] Reference Figure 4 When a positive and negative alternating voltage signal is connected to the bending ceramic group electrode and the ground electrode of the two piezoelectric actuators 2 in the Y-axis direction and the frequency matches the bending resonance mode, the end platform 1-1 generates a vibration that rotates around the Y-axis. Reference Figure 5 When one positive and negative alternating voltage signal is connected to the bending ceramic group electrode and ground electrode of one piezoelectric actuator 2 in the Y-axis direction, and another positive and negative alternating voltage signal is connected to the bending ceramic group electrode and ground electrode of another piezoelectric actuator 2 in the Y-axis direction, and the two signals are 180 degrees out of phase and their frequencies match the bending resonance mode, the end platform 1-1 will generate a vibration around the X-axis. Reference Figure 6When a positive and negative alternating voltage signal is connected to the electrodes of the two piezoelectric actuators 2 bending ceramic groups around the Z-axis and the ground electrode, and the signal frequency matches the bending resonance mode of the piezoelectric actuators 2, the drive end platform 1-1 will vibrate; at the first resonance frequency, the vibration is mainly translational along the Y-axis; at the second resonance frequency, the vibration is mainly rotational around the Z-axis; the dominant vibration mode is switched by selecting the resonance frequency. Reference Figure 7 When one positive and negative alternating voltage signal is connected to the bending ceramic group electrode and ground electrode of one piezoelectric actuator 2 in the Z-axis direction, and another positive and negative alternating voltage signal is connected to the bending ceramic group electrode and ground electrode of another piezoelectric actuator 2 in the Z-axis direction, and the two signals are 180 degrees out of phase and their frequencies match the bending resonance mode, the end platform 1-1 will generate vibration along the X-axis. Reference Figure 8 When a positive and negative alternating voltage signal is connected to the longitudinal vibration ceramic group electrodes and the ground electrode of the two piezoelectric actuators 2 and the frequency matches the longitudinal vibration resonant mode, the end platform 1-1 can generate vibration along the X-axis. Reference Figure 9 When one positive and negative alternating voltage signal is connected to the longitudinal vibration ceramic group electrode and the ground electrode of one piezoelectric actuator 2, and another positive and negative alternating voltage signal is connected to the longitudinal vibration ceramic group electrode and the ground electrode of another piezoelectric actuator 2, and the two signals are 180 degrees out of phase and their frequencies match the longitudinal vibration resonant mode, the end platform 1-1 can generate vibration around the Z-axis.

[0061] The vibration platform of this invention can achieve five degrees of freedom motion output, including translation and deflection, making it suitable for laser processing, vibration-assisted processing, micro-nano manipulation, and active vibration suppression that require up to five degrees of freedom.

[0062] The technical solutions provided by the present invention have been described in further detail above with reference to the accompanying drawings in order to highlight their advantages and benefits, and are not intended to limit the present invention. Any modifications, combinations, improvements and equivalent substitutions of the present invention based on the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A multidimensional vibration platform with a dual-sandwich piezoelectric actuator arranged in the same direction, characterized in that, The multidimensional vibration platform includes an output platform (1), two piezoelectric actuators (2), two end caps (3), and two bolts (4). The output platform (1) is a composite component, which integrates multiple sub-parts. The multiple sub-parts include at least an end platform (1-1), two flexible hinges (1-2) and two amplitude rods (1-3). The end platform (1-1) has a centrally symmetrical structure; The upper end faces of the two flexible hinges (1-2) are symmetrically connected to the lower end faces of the end platform (1-1), and the lower end faces of the two flexible hinges (1-2) are correspondingly connected to the upper end faces of the two amplitude rods (1-3), so that the two amplitude rods (1-3) are symmetrically arranged below the end platform (1-1) about the geometric center of the end platform (1-1). The two amplitude rods (1-3) are provided with threaded holes on their end faces. The two piezoelectric actuators (2) are provided with through holes in the axial direction. The two end caps (3) are provided with through holes. The two bolts (4) are matched one-to-one with the two piezoelectric actuators (2) and the two end caps (3). The screw part of each bolt (4) passes through the through hole of the corresponding end cap (3) and the through hole of the corresponding piezoelectric actuator (2) in sequence, and is fastened to the corresponding amplitude rod (1-3) by threads. The nut part of each bolt (4) is close to the end face of the corresponding end cap (3). The two amplitude rods (1-3) and the two piezoelectric actuators (2) are all provided with brackets for fixed constraints in the circumferential direction; The vibration platform is arranged in a centrally symmetrical manner about the geometric center of the end platform (1-1).

2. The dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to claim 1, characterized in that, The piezoelectric actuator (2) is provided with any one of the following combinations: longitudinal vibration ceramic group, two orthogonally arranged bending vibration ceramic groups around the Y-axis and bending vibration ceramic groups around the Z-axis, either independently, in pairs, or in a fully inclusive manner.

3. A dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to claim 2, characterized in that, The longitudinal vibration ceramic assembly includes a driving electrode and a ground electrode, and when a voltage is applied between the driving electrode and the ground electrode of the longitudinal vibration ceramic assembly, the piezoelectric actuator generates a telescopic action. The Y-axis bending ceramic assembly includes a driving electrode and a ground electrode, and when a voltage is applied between the driving electrode and the ground electrode of the Y-axis bending ceramic assembly, the piezoelectric actuator (2) generates a bending motion around the Y-axis. The Z-axis bending ceramic assembly includes a driving electrode and a ground electrode, and when a voltage is applied between the driving electrode and the ground electrode of the Z-axis bending ceramic assembly, the piezoelectric actuator (2) generates a bending motion around the Z-axis.

4. A multidimensional vibration platform with a dual-sandwich piezoelectric actuator arranged in the same direction according to claim 1, characterized in that, The piezoelectric actuator (2) is any one of the following: stacked structure, patch structure, piezoelectric tube structure, or a combination of the three structures, and is used to achieve displacement deformation.

5. A dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to claim 1, characterized in that, The flexible hinge (1-2) is fixedly connected to the end platform (1-1) and the amplitude rod (1-3) by any one of the following methods: threaded connection, adhesive bonding, welding, or integrated processing.

6. A dual-sandwich piezoelectric actuator co-directional arrangement multidimensional vibration platform according to claim 1, characterized in that, The flexible hinge (1-2) can be either biaxially symmetrical or omnidirectional, and is used to transmit linear and bending motion.

7. A dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to claim 1, characterized in that, The vibration platform is fixed by any one of the following methods: fixing it with the bracket of the amplitude rod (1-3), fixing it with the bracket of the piezoelectric actuator (2), or a combination thereof. This method is used to fix the vibration platform and convert the displacement deformation of the piezoelectric actuator (2) into different actions required for the multidimensional vibration of the end platform (1-1).

8. A dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to claim 1, characterized in that, The axes of the two amplitude rods (1-3) are parallel to each other or form an angle of less than 90 degrees.

9. A dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to claim 1, characterized in that, The axes of the two piezoelectric actuators (2) are parallel to each other or form an angle of less than 90 degrees.

10. An excitation method for a vibration platform, characterized in that, The method is based on a dual-sandwich piezoelectric actuator co-directional arrangement type multidimensional vibration platform according to any one of claims 1-9, and the method includes: When a positive and negative alternating voltage signal is connected to the bending ceramic group electrode and the ground electrode of the two piezoelectric actuators (2) in the Y-axis direction and the frequency matches the bending resonance mode, the end platform (1-1) generates a vibration that rotates around the Y-axis. When one positive and negative alternating voltage signal is connected to the bending ceramic group electrode and ground electrode of one piezoelectric actuator (2) in the Y-axis direction, and another positive and negative alternating voltage signal is connected to the bending ceramic group electrode and ground electrode of another piezoelectric actuator (2) in the Y-axis direction, and the two signals are 180 degrees out of phase and their frequencies match the bending resonance mode, the end platform (1-1) generates a vibration around the X-axis. When a positive and negative alternating voltage signal is connected to the electrodes of the bending ceramic group and the ground electrode of the two piezoelectric actuators (2) in the Z-axis direction, and the signal frequency matches the bending resonance mode of the piezoelectric actuator (2), the drive end platform (1-1) generates vibration; at the first resonance frequency, the vibration is mainly translational along the Y-axis; at the second resonance frequency, the vibration is mainly rotational around the Z-axis; the dominant vibration mode is switched by selecting the resonance frequency; When one positive and negative alternating voltage signal is connected to the bending ceramic group electrode and ground electrode of one piezoelectric actuator (2) in the Z-axis direction, and another positive and negative alternating voltage signal is connected to the bending ceramic group electrode and ground electrode of another piezoelectric actuator (2) in the Z-axis direction, and the two signals are 180 degrees out of phase and their frequencies match the bending resonance mode, the end platform (1-1) generates vibration along the X-axis. When a positive and negative alternating voltage signal is connected to the longitudinal vibration ceramic group electrode and the ground electrode of the two piezoelectric actuators (2) and the frequency matches the longitudinal vibration resonant mode, the end platform (1-1) generates vibration along the X-axis. When one positive and negative alternating voltage signal is connected to the longitudinal vibration ceramic group electrode and the ground electrode of one piezoelectric actuator (2), and another positive and negative alternating voltage signal is connected to the longitudinal vibration ceramic group electrode and the ground electrode of another piezoelectric actuator (2), and the two signals are 180 degrees out of phase and their frequencies match the longitudinal vibration resonant mode, the end platform (1-1) can generate vibration around the Z-axis.

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