Broadband phase-adjustable electromagnetic metasurface

Abstract

The invention provides a broadband phase-adjustable electromagnetic metasurface, a preparation method and a phase adjustment and control method, relates to the technical field of microstructures, and aims to solve the technical problem that the phase adjustment and control frequency band range of the electromagnetic metasurface is narrow. The broadband phase-adjustable electromagnetic metasurface is formed by module structures arranged in an array mode, and each module structure comprises a flexible dielectric layer, a driving control circuit and a sealing cover plate. The flexible dielectric layer comprises micro-channel structures which are formed on the upper surface and are arranged in an array at intervals and driving ports formed in the lower surface, and the driving ports are connected with fluids in the micro-channel structures through driving channels; the driving control circuit is located below the flexible dielectric layer, is connected with the driving port through a flexible microtube, and is used for controlling the flowing length of the liquid metal in the flow channel structure; and the sealing cover plate covers the upper surface of the flexible dielectric layer, and the sealing cover plate is an elastic sealing cover plate. The frequency response capability of the electromagnetic metasurface can be adjusted in a range of 3.5 GHz to 12 GHz.

Description

Technical Field

[0001] This invention relates to the field of microstructure technology, and in particular to a broadband phase-tunable electromagnetic metasurface, its preparation method, and its phase tuning method. Background Technology

[0002] Electromagnetic metasurfaces, as innovative artificial composite microstructures, exhibit extraordinary physical properties not found in naturally occurring materials. Thanks to the designability of their structure and material properties, the performance of the material and its response to electromagnetic waves can be flexibly controlled through the careful design of specific structures. This has enabled electromagnetic metasurfaces to rapidly develop and be widely applied in various fields such as camouflage, communication, and sensing technologies.

[0003] Phase modulation is a key technology for electromagnetic metasurfaces in realizing dynamic functions such as beamforming, polarization conversion, and reconfigurable communication. Although electromagnetic metasurfaces exhibit superior performance, once their structure is designed and fabricated, their material properties and phase response characteristics to electromagnetic waves are fixed, making it impossible to dynamically adjust material properties according to requirements, i.e., dynamic phase changes cannot be achieved. Therefore, how to fully utilize the performance of metasurfaces while achieving adjustability in their structural properties and performance response has become a core challenge and key task in promoting the further development, performance improvement, and expansion of application range of metasurface technology.

[0004] In recent years, methods have been developed to actively change the phase of electromagnetic metasurfaces using technologies such as conductive polymer materials, liquid crystal molecules, MEMS electrostatic structures, and diodes. However, these methods all suffer from problems such as narrow phase tunable bandwidth, high power consumption, and high cost. Summary of the Invention

[0005] The purpose of this invention is to provide a wideband phase-tunable electromagnetic metasurface, its preparation method, and its phase tuning method, so as to solve the technical problem of narrow frequency band range for phase tuning of electromagnetic metasurfaces.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] In a first aspect, the present invention provides a wideband phase-tunable electromagnetic metasurface, formed by an array of modular structures, the modular structure including a flexible dielectric layer, a drive control circuit and a sealing cover plate;

[0008] The flexible dielectric layer includes microchannel structures formed on the upper surface and arranged in an array at intervals, and a drive port formed on the lower surface. The drive port is connected to the fluid within the microchannel structure through the drive channel.

[0009] The drive control circuit is located below the flexible dielectric layer and is connected to the drive port through a flexible microtube. The drive control circuit is used to control the flow length of liquid metal in the flow channel structure.

[0010] The sealing cover is disposed on the upper surface of the flexible medium layer, and the sealing cover is an elastic sealing cover.

[0011] According to at least one embodiment of the present invention, the flexible dielectric layer is made of one of PMMA, silicone rubber, or polycarbonate; and / or,

[0012] The sealing cover is made of one of PMMA, silicone rubber or polycarbonate.

[0013] According to at least one embodiment of the present invention, the flexible dielectric layer is an integrally molded part prepared by injection molding or hot pressing.

[0014] According to at least one embodiment of the present invention, the shape of the flow channel structure includes one or more of the following: cross-shaped, star-shaped, or open ring.

[0015] According to at least one embodiment of the present invention, the drive control circuit controls the flow of the liquid metal through a control device, the control device including one of an electromagnetic device, a voltage device, or a pressure device.

[0016] According to at least one embodiment of the present invention, the liquid metal comprises a gallium-based alloy.

[0017] According to at least one embodiment of the present invention, the module structure further includes an electromagnetic reflective base plate, which is located between the flexible dielectric layer and the drive control circuit, and the electromagnetic reflective base plate is made of a metal material.

[0018] According to at least one embodiment of the present invention, the metallic material includes one of aluminum alloy, silver alloy or copper alloy.

[0019] In a second aspect, the present invention also provides a method for preparing an electromagnetic metasurface, wherein the electromagnetic metasurface is the electromagnetic metasurface described in the first aspect, and the preparation method includes:

[0020] The microchannel structure, the driving channel, and the driving port are formed in an array on a flexible dielectric layer;

[0021] The liquid metal is injected into the microchannel structure, and the sealing cover is used to cover the upper surface of the flexible medium layer.

[0022] The drive control circuit is formed beneath the flexible dielectric layer and is connected to the drive port via the flexible microtube.

[0023] Thirdly, the present invention also provides a phase modulation method for an electromagnetic metasurface, applied to the electromagnetic metasurface described in the first aspect, the modulation method comprising:

[0024] Obtain the target electromagnetic response of the electromagnetic metasurface;

[0025] Based on the target electromagnetic response, the control state of the module structure is binary encoded;

[0026] Based on the binary code, each of the drive control circuits controls the length of the liquid metal in the flow channel structure to compensate for the phase of the reflected wave.

[0027] In one or more technical solutions provided in the exemplary embodiments of the present invention, at least one of the following beneficial effects can be achieved.

[0028] The broadband phase-tunable electromagnetic metasurface of an exemplary embodiment of the present invention is composed of multiple modular structures arranged in an array. Each modular structure includes a flexible dielectric layer, a drive control circuit, and a sealing cover. Microchannel structures arranged in an array at intervals are formed on the upper surface of the flexible dielectric layer, and a drive port is formed on the lower surface of the flexible dielectric layer. This drive port is connected to the microchannel structures via a drive channel. Under the drive control of the drive control circuit, the length of the liquid metal in the microchannel structures can be adjusted, that is, the phase of the electromagnetic response of the electromagnetic metasurface can be adjusted in the horizontal dimension of the horizontal plane.

[0029] Furthermore, each module structure also includes a micromotor, which can drive the drive control circuit, flexible dielectric layer, and sealing cover to rise and fall vertically. When the various module structures are spliced ​​and arrayed to form an electromagnetic metasurface, when a certain module structure rises, a height difference is formed with the adjacent module structure, which can cause a path difference in the incident wave in the region where the module structure is located, and thus a phase difference. Based on this, by simultaneously reconstructing the module structure of the electromagnetic metasurface in both the horizontal (flow control of the electric length of liquid metal) and vertical (continuous height adjustment) dimensions, the phase of the electromagnetic metasurface can be continuously and dynamically adjusted. The phase control range is greater than 180° in the range of 3.5 GHz to 12 GHz, that is, the reconstruction bandwidth reaches 8.5 GHz, and the phase control range increases with the frequency, exceeding 300° at high frequencies. Based on this, the broadband phase-tunable electromagnetic metasurface of the exemplary embodiment of the present invention can realize dynamic adjustment of the phase, change the phase response characteristics of the metasurface to electromagnetic waves, break through the limitation of the fixed physical structure of the metasurface, and achieve a control effect over a wider frequency range. Attached Figure Description

[0030] The accompanying drawings illustrate exemplary embodiments of the invention and, together with the description thereof, serve to explain the principles of the invention. These drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification.

[0031] Figure 1 This is a schematic cross-sectional view of an electromagnetic metasurface according to an embodiment of the present invention.

[0032] Figure 2 This is a cross-sectional structural diagram of a module structure according to an embodiment of the present invention;

[0033] Figure 3 This is a schematic diagram of phase modulation of an electromagnetic metasurface according to an embodiment of the present invention;

[0034] Figure 4 This is a schematic diagram of random coding of an electromagnetic metasurface according to an embodiment of the present invention;

[0035] Figure 5 This is a schematic diagram of the checkerboard coding of an electromagnetic metasurface according to an embodiment of the present invention.

[0036] Reference numerals: 10, Module structure; 11, Sealing cover; 12, Flexible dielectric layer; 121, Microchannel structure; 13, Drive control circuit; 131, Drive port; 14, Micro motor; 15, Liquid metal. Detailed Implementation

[0037] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0038] Phase modulation is a prerequisite for electromagnetic metasurfaces to achieve dynamic functions such as beam manipulation, polarization conversion, and reconfigurable communication. This has enabled electromagnetic metasurfaces to achieve rapid development and application in fields such as camouflage and stealth technology, communication technology, and sensing technology.

[0039] How to leverage the superior properties of electromagnetic metasurfaces while ensuring the adjustability of their structural properties and performance response is the core and key to further expanding and improving their performance and application scope. Related technologies for the dynamic control of electromagnetic metasurfaces suffer from limitations such as limited bandwidth and insufficient multi-bit encoding capabilities.

[0040] To address the aforementioned issues, the electromagnetic metasurface of the exemplary embodiment of this invention comprises an array of multiple modular structures that can be spliced ​​together. By combining the continuous flow control of liquid metal in the microfluidic structure of the modular structure with the continuous adjustment of the height of the modular structure, and integrating the two methods of adjusting the electrical length of liquid metal in the microfluidic structure of the electromagnetic metasurface and changing the distance of electromagnetic wave transmission, the phase of the electromagnetic response characteristics can be continuously tunable in the ultra-wideband range of 3.5GHz-12GHz, with a phase tuning range greater than 180°. It also possesses multi-bit electromagnetic coding capability, enabling fine-tuning of the material properties and electromagnetic response characteristics of the electromagnetic metasurface.

[0041] It should be noted that in fields such as wireless communication and antenna design, electrical length is an important parameter that affects signal transmission efficiency and antenna radiation mode. Its unit is usually wavelength (λ) or radians (rad), which reflects the influence of the conductor on the phase of the electromagnetic wave.

[0042] Figure 1 This is a schematic cross-sectional view of an electromagnetic metasurface according to an embodiment of the present invention. (Refer to...) Figure 1 As shown, the broadband phase-tunable electromagnetic metasurface provided in the exemplary embodiment of the present invention is formed by an array of module structures 10.

[0043] Figure 4 This is a schematic diagram of random coding of an electromagnetic metasurface according to an embodiment of the present invention. (Refer to...) Figure 1 and Figure 4 As shown, the multi-row, multi-column modular structures 10 are arranged and spliced ​​in an array to form a coded metasurface. Based on the flow control of the liquid metal 15 in the multiple microchannel structures 121 within each modular structure 10, different reflection phases can be generated. Furthermore, each modular structure 10 can be encoded according to actual needs, for example, using binary numbers to represent different control states. This results in different electrical lengths for each modular structure 10 under different control states, thus producing different reflection phases. Therefore, the electromagnetic metasurface formed by the arrayed modular structures 10 has the effect of flexibly adjusting reflected waves.

[0044] Figure 2 This is a cross-sectional structural diagram of a module structure according to an embodiment of the present invention. (Refer to...) Figure 2As shown, the module structure 10 provided in the exemplary embodiment of the present invention includes a flexible dielectric layer 12, a drive control circuit 13, and a sealing cover plate 11. The flexible dielectric layer 12 includes microchannel structures 121 arranged in an array at intervals on the upper surface and a drive port formed on the lower surface. The drive port is connected to the fluid in the microchannel structure 121 through a drive channel. The drive control circuit 13 is located below the flexible dielectric layer 12 and is connected to the drive port through a flexible microtube. The drive control circuit 13 is used to control the flow length of liquid metal 15 in the microchannel structure 121. The sealing cover plate 11 is covered on the upper surface of the flexible dielectric layer 12. The sealing cover plate 11 is an elastic sealing cover plate 11.

[0045] Continue as Figure 2 As shown, the module structure 10 provided in the exemplary embodiment of the present invention further includes a micro motor 14, which is disposed below the drive control circuit 13. The micro motor 14 is electrically connected to the drive control circuit 13. Under the control of the drive control circuit 13, the micro motor 14 can push the structure formed by the flexible dielectric layer 12, the drive control circuit 13, and the sealing cover plate 11 to rise and fall, thereby creating a height difference between the various module structures 10 of the electromagnetic metasurface. The height difference between the module structures 10 can cause a path difference in the incident electromagnetic wave, thereby generating a phase difference.

[0046] In some embodiments, the micro motor 14 described above may also be replaced by an electric cylinder, a pneumatic cylinder, or a hydraulic cylinder.

[0047] In some embodiments, the shape of the microchannel structure 121 includes a multi-directional continuous flow center-symmetric structure such as a cross or a star shape, or a unidirectional flow structure such as an open ring, or other complex configurations.

[0048] The following description uses a cross-shaped microchannel structure 121 as an example. (Refer to...) Figure 4 As shown, each module structure 10 includes 3×3 spaced and periodically arranged microchannel structures 121. Due to the mutual coupling effect between the microchannel structures 121, deviations can occur between the actual boundary conditions and the simulated structure. Therefore, multiple spaced and periodically arranged microchannel structures 121 are needed to reduce this deviation. The module structure 10 includes multiple microchannel structures 121, which can reduce the coupling effect between microchannel structures 121 and adjacent microchannel structures 121. Simultaneously, it can concentrate microchannel structures 121 with similar phases, which helps to simulate the electromagnetic metasurface scenario, making it as close as possible to the simulated phase of a single microchannel structure 121 under periodic boundary conditions. Furthermore, by splicing together module structures 10 containing arrays of multiple microchannel structures 121, the encoding length can be increased, making the reflected electromagnetic waves more stable.

[0049] In practical applications, the cross-shaped microfluidic structure 121 consists of a central liquid reservoir and four intersecting cross arms. A thinner driving channel connects to the end of each cross arm. The driving solution is injected into the end of the cross arm through the driving channel, causing a change in the length of the liquid metal 15 within the cross arm. When the length shortens, the excess liquid metal 15 is stored in the liquid reservoir. As the length of the liquid metal 15 in the cross-shaped microfluidic structure 121 changes, the electrical length of its resonant structure changes, thereby adjusting the reflection phase.

[0050] The dimensions of the cross-shaped unit structure can range from half-wavelength to subwavelength. The specific dimensions of the cross-shaped microchannel structure 121 are designed according to the actual required operating frequency.

[0051] In some implementations, such as Figure 4 As shown, in the same module structure 10, the arrayed microchannel structures 121 can be adjusted synchronously, that is, each microchannel structure 121 is controlled by the same drive control circuit 13, and the microchannel structures 121 in the same module structure 10 are not independent of each other, but are interconnected through microchannels.

[0052] For the same module structure 10, a drive port is provided on the lower surface of the flexible dielectric layer 12. The drive control circuit 13 can control the liquid metal 15 to flow in each microchannel structure 121 through the drive port and the drive channel connected to the drive port, thereby changing the electric length of its resonant structure and thus adjusting the reflection phase.

[0053] Specifically, the drive control circuit 13 controls the liquid metal 15 through a control device, which includes one of an electromagnetic device, a voltage device, or a pressure device.

[0054] For example, under the control of the drive control circuit 13, the liquid metal 15 flows continuously in the microfluidic structure 121, and its flow position and fixed position are controllable. Different flow positions represent different working states, and each module structure 10 achieves multiple different working states under the reconfiguration of the liquid metal 15 flow. The module structures 10 with different liquid metal 15 flow states are co-coded to achieve the regulation of electromagnetic waves. The drive control circuit 13 only needs one drive port 131 to connect to the control device circuit, while the control device can be connected to the drive port through a flexible microtube, and can independently control the flow of liquid metal 15 in the microfluidic structure 121 of each module structure 10.

[0055] For example, the liquid metal 15 described above includes a gallium-based alloy.

[0056] Gallium-based alloy liquid metal 15, as a metal that can flow continuously at room temperature, combines the excellent properties of traditional rigid and flexible materials. For example, 1) it has a very low melting point and is liquid at room temperature; 2) it has low viscosity, which makes it easy to inject into the microfluidic structure 121; 3) it has high electrical conductivity, although it is lower than that of copper, it is much higher than that of other conductive liquids; 4) it is not easily evaporated and has stable performance.

[0057] By utilizing the arbitrary flowability of the gallium-based alloy liquid metal 15, especially by microfluidizing the liquid metal 15 and combining it with the microchannel structure 121, flow control can be achieved in the module structure 10. This can be applied to the reconstruction of electromagnetic metasurface parameters and structural morphology, which has the ability to control conventional metasurfaces and overcome the limitations of fixed metasurface physical structures to achieve broadband control effects.

[0058] like Figure 2 As shown, the flexible dielectric layer 12 is made of one of PMMA, silicone rubber or polycarbonate; the sealing cover 11 is made of one of PMMA, silicone rubber or polycarbonate.

[0059] In some embodiments, the flexible dielectric layer 12 is an integrally molded part prepared by injection molding or hot pressing.

[0060] Both the flexible dielectric layer 12 and the sealing cover plate 11 are made of materials with a certain degree of elasticity. For example, low-cost processes such as injection molding and hot pressing can be used to prepare the microfluidic structure 121 and the driving channel in the flexible dielectric layer 12. Liquid metal 15 and driving solution are filled in the microfluidic structure 121 and the driving channel. The flexible material can prevent leakage of liquid metal 15 when the local volume increases, thereby maintaining the sealing of the module structure 10.

[0061] Compared to conventional welding methods for controlling electronic components, the flexible dielectric layer 12 and the sealing cover 11 are made using processes such as injection molding and hot pressing to form a microfluidic structure 121 and a driving channel, which are filled with liquid metal 15 and driving liquid. This method has the characteristics of low cost, continuously variable control state, and control that can be maintained even when power is off.

[0062] The module structure 10 also includes a reflective base plate, which is located between the flexible dielectric layer 12 and the drive control circuit 13. The reflective base plate is made of metal.

[0063] For example, the metallic material includes one of aluminum film, aluminum alloy, silver alloy, or copper alloy. The reflective base plate is used to reflect electromagnetic waves.

[0064] Figure 3 This is a schematic diagram of phase modulation of an electromagnetic metasurface according to an embodiment of the present invention. Figure 3As shown, the liquid metal 15 is driven by a control algorithm to be independently regulated in each module structure 10, and the height of the telescopic end of the micromotor 14 below the drive control circuit 13 is adjusted. Through horizontal and vertical driving force control, the flow of liquid metal 15 in the microchannel structure 121 and the height of the module structure 10 can be continuously adjusted synchronously. When the height of the module structure 10 changes by 1 / 4λ, where λ is the working wavelength of the metasurface, a phase difference of 180° can be generated.

[0065] Depend on Figure 3 It can be seen that l0 represents the length of liquid metal 15 in microfluidic structure 121. The electromagnetic metasurface can achieve a wide bandwidth response capability of 3.5GHz to 12GHz, a reconstruction bandwidth of 8.5GHz, and a phase modulation range of more than 180°. Moreover, as the frequency increases, the phase modulation range of the electromagnetic metasurface increases, and the phase modulation range exceeds 300° at high frequencies.

[0066] An exemplary embodiment of the present invention also provides a method for preparing an electromagnetic metasurface, wherein the electromagnetic metasurface is the electromagnetic metasurface of the above embodiments, and the preparation method includes:

[0067] Multiple microchannel structures 121, driving channels, and driving ports are formed in an array on the flexible dielectric layer 12; wherein, the microchannel structures 121 are formed on the upper surface of the flexible dielectric layer 12, the driving channels are located inside the flexible dielectric layer 12, and the driving ports are formed on the lower surface of the flexible dielectric layer 12. The microchannel structures 121 are integrally formed with the flexible dielectric layer 12 through injection molding and hot pressing processes.

[0068] Liquid metal 15 and conductive liquid are injected into the drive port of each module structure 10, and a sealing cover plate 11 is used to cover the upper surface of the flexible dielectric layer 12.

[0069] A drive control circuit 13 is formed beneath the flexible dielectric layer 12, and the drive control circuit 13 is connected to the drive port through a flexible microtube. Each drive control circuit 13 independently controls the corresponding module structure 10, that is, all microchannel structures 121 in the same module structure 10 will undergo synchronous changes in electrical length.

[0070] Figure 5 This is a schematic diagram of a checkerboard coding of an electromagnetic metasurface according to an embodiment of the present invention. An exemplary embodiment of the present invention also provides a phase modulation method for an electromagnetic metasurface, applied to the electromagnetic metasurface of the above embodiment. The modulation method includes:

[0071] The target electromagnetic response of the electromagnetic metasurface is obtained; based on the target electromagnetic response, the control state of the periodically arranged module structure 10 is binary encoded; based on the binary encoding, each drive control circuit 13 controls the length of the liquid metal 15 in the microfluidic structure 121, and at the same time, each drive control circuit 13 synchronously controls the height of the module structure 10 to compensate for the phase of the reflected wave.

[0072] In practical applications, see Figure 4 and Figure 5 The encoding diagram shown below, in which Figure 4 It is a random encoding state. Figure 5 This is a relatively common checkerboard arrangement. The height state of each module structure 10 of the electromagnetic metasurface, and the length state of the liquid metal 15 in the microchannel structure 121 within each module structure 10, can be encoded and represented using binary numbers, thus expressing the encoded states of the module structure 10 and the liquid metal 15. When the electromagnetic metasurface needs to compensate for reflected waves, the control system calculates the required control state (i.e., the encoding) for each module based on phase modulation, thereby driving the control circuit 13 to perform independent regulation according to this encoding.

[0073] After the modulation is completed, when an incident electromagnetic wave from the outside world irradiates the electromagnetic metasurface, the liquid metal 15 of the microfluidic structure 121 in the module structure 10 can generate a corresponding reflection phase response, thereby compensating for the phase of the reflected wave and changing its direction. Furthermore, the change in height of each module structure 10 can create a path difference in the incident wave, which in turn generates a phase difference, allowing for further adjustment of the direction of the reflected wave. Each coded sequence corresponds to a working state of the electromagnetic metasurface. By designing the coded sequences, the emission state of the reflected wave irradiated onto the electromagnetic metasurface can be flexibly controlled. Based on this, the electromagnetic metasurface can achieve capabilities such as electromagnetic scattering modulation, frequency selection, and dynamically reconfigurable communication.

[0074] The phase modulation method of the above-mentioned electromagnetic metasurface has the same other technical advantages as the electromagnetic metasurface itself, and will not be repeated here.

[0075] Those skilled in the art should understand that the above embodiments are merely for illustrating the present invention and are not intended to limit the scope of the invention. Those skilled in the art can make other changes or modifications based on the above disclosure, and these changes or modifications still fall within the scope of the present invention.

Claims

1. A broadband phase-tunable electromagnetic metasurface, characterized in that, The module structure is formed by an array of modules, and the module structure includes a flexible dielectric layer, a drive control circuit, and a sealing cover. The flexible dielectric layer includes a flow channel structure formed on the upper surface and arranged in an array at intervals, and a drive port formed on the lower surface. The drive port is connected to the fluid in the flow channel structure through a drive microchannel. The drive control circuit is located below the flexible dielectric layer and is connected to the drive port through a flexible microtube. The drive control circuit is used to control the flow length of liquid metal in the flow channel structure. The sealing cover is disposed on the upper surface of the flexible medium layer, and the sealing cover is an elastic sealing cover.

2. The electromagnetic metasurface according to claim 1, characterized in that, The flexible dielectric layer is made of one of PMMA, silicone rubber, or polycarbonate; and / or, The sealing cover is made of one of PMMA, silicone rubber or polycarbonate.

3. The electromagnetic metasurface according to claim 2, characterized in that, The flexible dielectric layer is an integrally molded part prepared by injection molding or hot pressing.

4. The electromagnetic metasurface according to any one of claims 1-3, characterized in that, The shape of the flow channel structure includes one or more of the following: cross-shaped, star-shaped, or open ring.

5. The electromagnetic metasurface according to claim 4, characterized in that, The drive control circuit controls the flow of the liquid metal through a control device, which includes one of an electromagnetic device, a voltage device, or a pressure device.

6. The electromagnetic metasurface according to claim 4, characterized in that, The liquid metal includes gallium-based alloys.

7. The electromagnetic metasurface according to claim 4, characterized in that, The module structure also includes an electromagnetic reflective base plate, which is located between the flexible dielectric layer and the drive control circuit, and the electromagnetic reflective base plate is made of metal.

8. The electromagnetic metasurface according to claim 7, characterized in that, The metallic material includes one of aluminum alloy, silver alloy or copper alloy.

9. A method for preparing an electromagnetic metasurface, characterized in that, The electromagnetic metasurface is the electromagnetic metasurface according to any one of claims 1-8.

10. A phase modulation method for an electromagnetic metasurface, characterized in that, The electromagnetic metasurface is the electromagnetic metasurface according to any one of claims 1-8.

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