Load chamber and wafer carrier box

Abstract

The application provides a loading chamber and wafer bearing box, and relates to the technical field of semiconductor manufacturing. The application is designed to solve the problem that the existing loading chamber interacts with the outside world, which introduces dust particles and causes a large number of particulate matters on the wafer surface. The application comprises a cavity, a box, a shield, a locking assembly, a lifting mechanism and an unlocking assembly. The cavity is used for accommodating the box. The box is provided with a piece slot with an opening facing the side. The shield is provided with a top entrance for the box to enter and exit. The shield is used to cooperate with the box to form a closed space. The lifting mechanism is used to drive the box to lift. The unlocking assembly is arranged in the cavity and is used to cooperate with the locking assembly during the lifting of the box by the lifting mechanism. The locking assembly is used to unlock the shield and the box when cooperating with the unlocking assembly, and is used to lock the shield and the box when the cooperation with the unlocking assembly is removed. The application can avoid the direct exposure of the wafer in the box to the cavity in the atmospheric environment, and reduce the particulate matters on the wafer surface.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and more specifically, to a loading chamber and a wafer carrier. Background Technology

[0002] AlN magnetron sputtering equipment is a widely used thin-film fabrication device in the field of LEDs (Light Emitting Diodes). It uses physical vapor deposition to deposit an AlN thin film on the surface of a sapphire wafer. Due to the presence of the AlN thin film buffer layer, the brightness and yield of the wafer are significantly improved after subsequent coating processes.

[0003] Figure 1 An AlN magnetron sputtering apparatus provided for related technologies includes a process chamber 1', a preheating chamber 2', a transfer chamber 3', a loading chamber 5', and a cooling chamber 6', wherein the loading chamber 5' is provided with a tray for holding wafers; and the transfer chamber 3' is provided with a robotic arm 4' for transferring wafers. Specifically, the pallet transfer process is as follows: First, the operator loads the wafers onto the pallet as a carrier; second, the pallet, along with the wafers it carries, enters the loading chamber 5', which allows for atmospheric and vacuum interaction, and the loading chamber 5' is evacuated; then, the robotic arm 4' transfers the wafers from the loading chamber 5' to the vacuum-controlled transfer chamber 3'; next, the robotic arm 4' transfers the wafers from the transfer chamber 3' to the preheating chamber for pre-cleaning; after pre-cleaning, the robotic arm 4' transfers the wafers to the process chamber 1' for the coating process; after the coating process, the robotic arm 4' transfers the wafers to the cooling chamber 6' for cooling; finally, the robotic arm 4' transfers the wafers back to the loading chamber 5', inflates it to standard atmospheric pressure, and then performs the wafer removal operation.

[0004] Because the interaction between the loading cavity 5' and the outside world will introduce dust particles, resulting in the generation of particulate matter, and after the high temperature baking of the epitaxial process, the particulate matter will diffuse into large particles with a diameter between 1 and 10 mm, which will seriously affect the electrical performance and yield of the subsequent chips. Summary of the Invention

[0005] The first objective of this invention is to provide a loading chamber to solve the technical problem that existing loading chambers introduce dust particles through interaction with the outside world, resulting in a large amount of particulate matter on the wafer surface.

[0006] The loading chamber provided by the present invention includes: a cavity, a box, a protective cover, a locking component, a lifting mechanism, and an unlocking component;

[0007] The cavity is used to house the box body;

[0008] The box body is provided with a slot with an opening facing to the side;

[0009] The protective cover is provided with a top entrance for the box to enter and exit, and the protective cover is used to cooperate with the box to form a closed space;

[0010] The lifting mechanism is used to drive the box body to rise and fall;

[0011] The unlocking component is disposed in the cavity and is used to cooperate with the locking component during the process of the lifting mechanism driving the box to rise and fall;

[0012] The locking component is used to unlock the cover from the box when it cooperates with the unlocking component, and to lock the cover from the box when it is disengaged from the unlocking component.

[0013] Furthermore, a lock hole is provided on the bottom side of the box body, and the unlocking component is located below the protective cover;

[0014] The locking assembly is located below the housing. The locking assembly includes a driving component and a locking rod. The driving component is rotatably disposed relative to the protective cover. The locking rod is drively connected to the driving component and is movable relative to the protective cover.

[0015] The drive component is used to cooperate with the unlocking component to disengage the locking bar from the keyhole, and to disengage from the unlocking component to insert the locking bar into the keyhole;

[0016] The lifting mechanism passes through the cavity and the protective cover from bottom to top to support the box.

[0017] Furthermore, the locking assembly also includes a reset element configured to ensure that the locking lever always tends to insert into the keyhole.

[0018] Furthermore, the locking assembly also includes a guide post and a guide structure. The guide post is disposed on the driving component, and the guide structure is fixed relative to the protective cover. The guide post cooperates with the guide structure. The guide structure includes an unlocking path and a locking path that are interconnected. The unlocking path is configured to guide the driving component to move through the guide post during the descent of the housing to make the locking rod leave the lock hole. The locking path is configured to guide the driving component to move through the guide post and the reset element during the ascent of the housing to make the locking rod insert into the lock hole.

[0019] Furthermore, the guiding structure also includes a blocking surface, a first transition path, and a hovering position, which are sequentially arranged from the unlocking path to the locking path; the blocking surface is used to cooperate with the guide post to limit the maximum travel of the locking rod away from the keyhole; the first transition path is configured to guide the guide post into the hovering position during the initial rise of the housing; in the hovering position, the locking component remains in the unlocked position.

[0020] Furthermore, the guiding structure also includes a second transition path, which connects the first transition path and the locking path. The second transition path is configured to guide the guide post into the locking path during the final descent of the housing.

[0021] Furthermore, the guiding structure further includes a first step located between the unlocking path and the blocking surface, the first step being configured to prevent the guide post from reversing into the unlocking path; and / or, the guiding structure further includes a second step located between the first transition path and the hovering position, the second step being configured to prevent the guide post from reversing into the first transition path; and / or, the guiding structure further includes a third step located between the locking path and the unlocking path, the third step being configured to prevent the guide post from reversing into the locking path; and / or, a first guiding ramp is provided between the hovering position and the second transition path, the first guiding ramp being configured to guide the guide post into the second transition path; and / or, a second guiding ramp is provided between the locking path and the unlocking path, the second guiding ramp being configured to guide the guide post into the unlocking path.

[0022] Furthermore, the guide structure is in the form of a groove, and the guide post is inserted into the guide structure; and / or, the driving component is provided with a guide groove, the guide groove is parallel to the plane where the guide structure is located, the guide post is movably disposed in the guide groove, and the moving direction of the guide post is the extending direction of the guide groove.

[0023] Furthermore, the guide post includes a guide rod, a fixed post, an elastic sleeve, and a fixed sleeve. The driving component has a guide channel, the extension direction of which is the same as the extension direction of the guide groove. The guide rod is inserted into the guide channel. The fixed post is fixedly disposed on the guide rod. The fixed sleeve is movably disposed on one end of the fixed post facing the guide structure. The elastic sleeve is disposed on the fixed post. One end of the elastic sleeve is connected to the guide rod, and the other end of the elastic sleeve is connected to the fixed sleeve. The elastic sleeve is configured such that the fixed sleeve always has a tendency to abut against the guide structure.

[0024] Furthermore, the locking assembly also includes a guide seat and a support seat, both of which are fixedly disposed on the cover, and a receiving space is formed between the guide seat and the support seat. The driving component and the locking rod are both disposed in the receiving space, wherein the guiding structure is disposed on the guide seat; the driving component is rotatably connected to both the guide seat and the support seat, and the driving component is provided with a first tooth profile; the locking rod is movably disposed on the support seat, and the locking rod is provided with a second tooth profile that meshes with the first tooth profile for transmission.

[0025] Furthermore, the driving component is rotatably connected to the guide seat and the support seat via a rotating shaft, the reset element includes a torsion spring, the reset element is sleeved on the rotating shaft, one torsion arm of the reset element is fixedly connected to the driving component, and the other torsion arm of the reset element is fixedly connected to the guide seat or the support seat.

[0026] Furthermore, the protective cover includes a side wall, a bottom wall, and a partition wall. Along the lifting direction of the box body, the partition wall and the bottom wall are connected to the side wall at intervals. The partition wall divides the internal space of the protective cover into a supporting cavity and a mounting cavity. The box body and the supporting cavity cooperate to form the closed space, and the locking component is located in the mounting cavity. The partition wall has a clearance hole, and the box body has a boss extending from the clearance hole to the mounting cavity. The lock hole is opened in the boss.

[0027] Furthermore, a first driving hole is provided at the bottom of the cavity, and a second driving hole is provided on the bottom wall. The lifting end of the lifting mechanism passes through the first driving hole and the second driving hole in sequence. A positioning pin is provided on one of the boss and the lifting end, and a positioning hole is provided on the other of the boss and the lifting end. The positioning hole is engaged with the positioning pin.

[0028] Furthermore, the box body includes an upper cover plate, a lower cover plate, and multiple uprights connecting the upper cover plate and the lower cover plate, and the slot is formed in the multiple uprights; the box body forms the enclosed space by the cooperation between the upper cover plate and the top of the protective cover.

[0029] Furthermore, the locking components are provided in multiple sets, and the multiple sets of locking components are arranged at intervals around the boss. The position of the lock hole corresponds to the position of the lock rod of each set of locking components. The number of key pins is the same as the number of locking components, and the multiple sets of key pins are respectively arranged in a one-to-one correspondence with the multiple sets of locking components.

[0030] Furthermore, the unlocking component also includes a base and multiple buffer structures. The base is fixedly disposed in the cavity, and the multiple buffer structures are disposed in the base and are arranged at intervals along the circumference of the base. The buffer structures are used to contact the box body; the key pin is fixedly disposed in the base.

[0031] Furthermore, the buffer structure includes a buffer block, a connecting pin, and an elastic element. The base has a fixing hole. The connecting pin includes a fixing section, a buffer section, and a limiting section arranged sequentially along the axial direction. The buffer block has a countersunk hole. The fixing section passes through the countersunk hole and is fixedly disposed in the fixing hole. The buffer section passes through the small diameter section of the countersunk hole, and the limiting section is accommodated in the large diameter section of the countersunk hole. The limiting section can abut against the stepped surface of the countersunk hole. The elastic element is located between the buffer block and the base. The elastic element is configured to make the buffer block always have a tendency to move away from the base.

[0032] The beneficial effects of the loading chamber of this invention are:

[0033] Taking the initial state of the locking assembly locking the shield and the housing as an example, the operation process inside the loading chamber is explained. When wafer transfer is required, the lifting mechanism drives the housing to rise and fall. When the housing, along with the shield, moves the locking assembly to a position that engages with the unlocking assembly, the unlocking assembly releases the locking state between the shield and the housing. This allows the housing to rise and fall independently of the shield under the action of the lifting mechanism, exposing the wafer slot from the side. Once the housing reaches the required height, the wafer transfer is achieved. After the wafer transfer operation is completed, when the housing and shield need to be transferred out as a whole, the lifting mechanism lowers the housing, allowing it to enter the shield through the top inlet. After the housing reaches its position within the shield, the locking and unlocking assemblies disengage, locking the shield and housing together, completing the locking process. At this point, the loading chamber can be sent out as a whole under the action of the lifting mechanism.

[0034] The loading chamber, through the aforementioned design, allows for automatic unlocking of the protective cover and automatic separation of the cover from the housing after vacuuming or purging. This facilitates the loading and unloading of the wafers held in the housing, preventing direct exposure of the wafers to the atmosphere and thus avoiding contamination. It also effectively reduces particulate matter on the wafer surface, thereby ensuring wafer performance. Furthermore, this loading chamber allows for wafer transfer via a lifting mechanism that raises and lowers the housing while the protective cover remains stationary. After the lifting mechanism raises the housing, the wafer slots are automatically exposed. Compared to designs where the protective cover is located on top of the housing, this application eliminates the need for a lifting mechanism to open the protective cover and expose the wafer slots.

[0035] The second objective of this invention is to provide a wafer carrier box to solve the technical problem that existing loading cavities introduce dust particles through interaction with the outside world, resulting in a large amount of particulate matter on the wafer surface.

[0036] The wafer carrier provided by the present invention includes a housing, a protective cover, and a locking assembly. The housing is provided with a wafer slot with an opening facing to the side. The protective cover is provided with a top entrance for the housing to enter and exit, and the protective cover is used to cooperate with the housing to form a closed space.

[0037] The bottom side of the box body has a lock hole. The locking assembly is located below the box body. The locking assembly includes a driving component and a locking rod. The driving component is rotatably arranged relative to the protective cover. The locking rod is connected to the driving component and is movably arranged relative to the protective cover. The driving component is used to rotate to drive the locking rod to move into or away from the lock hole.

[0038] Furthermore, the locking assembly also includes a reset element configured to ensure that the locking lever always tends to insert into the keyhole.

[0039] Furthermore, the locking assembly also includes a guide post and a guide structure. The guide post is disposed on the driving component, and the guide structure is fixed relative to the protective cover. The guide post cooperates with the guide structure. The guide structure includes an unlocking path and a locking path that are interconnected. The unlocking path is configured to guide the locking rod away from the lock hole via the guide post and the driving component during the descent of the housing. The locking path is configured to guide the locking rod into the lock hole via the guide post and the reset element during the ascent of the housing.

[0040] Furthermore, the guiding structure also includes a blocking surface, a first transition path, and a hovering position, which are sequentially arranged from the unlocking path to the locking path; the blocking surface is used to cooperate with the guide post to limit the maximum travel of the locking rod away from the keyhole; the first transition path is configured to guide the guide post into the hovering position during the rising of the housing; in the hovering position, the locking rod is held at the position away from the keyhole.

[0041] Furthermore, the locking assembly also includes a guide seat and a support seat, both of which are fixedly disposed on the cover, and a receiving space is formed between the guide seat and the support seat. The driving component and the locking rod are both disposed in the receiving space, wherein the guiding structure is disposed on the guide seat; the driving component is rotatably connected to both the guide seat and the support seat, and the driving component is provided with a first tooth profile; the locking rod is movably disposed on the support seat, and the locking rod is provided with a second tooth profile that meshes with the first tooth profile for transmission.

[0042] Furthermore, the driving component is rotatably connected to the guide seat and the support seat via a rotating shaft, the reset element includes a torsion spring, the reset element is sleeved on the rotating shaft, one torsion arm of the reset element is fixedly connected to the driving component, and the other torsion arm of the reset element is fixedly connected to the guide seat or the support seat.

[0043] The beneficial effects of the wafer carrier of this invention are:

[0044] During wafer transport, the wafer carrier box, together with the wafers it carries, can be transported as a whole to the loading chamber. After the loading chamber is evacuated or purged, the protective cover is automatically unlocked by the locking component in the wafer carrier box, separating the cover from the box body to facilitate the loading and unloading of the wafers carried in the box. This design can prevent the wafers from being contaminated by being directly exposed to the atmospheric environment in the loading chamber, thereby effectively reducing particulate matter on the wafer surface and ensuring wafer performance. Attached Figure Description

[0045] To more clearly illustrate the technical solutions in the embodiments of the present invention or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0046] Figure 1 A schematic diagram of the structure of an AlN magnetron sputtering device provided for related technologies;

[0047] Figure 2 This is a schematic diagram of the internal structure of the loading chamber provided in Embodiment 1 of the present invention;

[0048] Figure 3 This is a simplified structural diagram of the loading chamber provided in Embodiment 1 of the present invention;

[0049] Figure 4 This is a partial front sectional view of the loading chamber provided in Embodiment 1 of the present invention;

[0050] Figure 5 This is a front structural cross-sectional view of the loading chamber housing, protective cover, and locking assembly provided in Embodiment 1 of the present invention;

[0051] Figure 6 This is a schematic diagram of the structure of the locking assembly of the loading chamber provided in Embodiment 1 of the present invention;

[0052] Figure 7 This is a partial structural diagram of the housing of the loading chamber provided in Embodiment 1 of the present invention;

[0053] Figure 8 This is a schematic diagram of the structure of the guide seat of the loading chamber provided in Embodiment 1 of the present invention;

[0054] Figure 9 This is a front view of the structure of the guide seat of the loading chamber provided in Embodiment 1 of the present invention;

[0055] Figure 10 This is a schematic diagram of the guide post of the loading chamber provided in Embodiment 1 of the present invention completing one action cycle in the guiding structure;

[0056] Figure 11 One of the cross-sectional views of the guide seat of the loading chamber provided in Embodiment 1 of the present invention;

[0057] Figure 12 This is a second cross-sectional view of the guide seat of the loading chamber provided in Embodiment 1 of the present invention;

[0058] Figure 13 This is a schematic diagram of the structure of the driving component of the loading chamber provided in Embodiment 1 of the present invention;

[0059] Figure 14 for Figure 13 AA section view in the middle;

[0060] Figure 15 for Figure 13 BB section view in the middle;

[0061] Figure 16 This is a schematic diagram of the structure of the unlocking assembly for the loading chamber provided in Embodiment 1 of the present invention;

[0062] Figure 17 This is a longitudinal section view of the unlocking component of the loading chamber provided in Embodiment 1 of the present invention at the location of the buffer structure;

[0063] Figure 18 This is a simplified diagram of the locking assembly of the loading chamber provided in Embodiment 2 of the present invention.

[0064] Explanation of reference numerals in the attached figures:

[0065] 1'-Process chamber; 2'-Preheating chamber; 3'-Transfer chamber; 4'-Robot arm; 5'-Loading chamber; 6'-Cooling chamber;

[0066] 51'-Cavity; 52'-Plate holder; 521'-Main body; 522'-Protective cover; 53'-Lifting and unlocking system; 54'-Pull-up system;

[0067] 100 - Cavity; 200 - Box; 300 - Protective Cover; 400 - Locking Component; 500 - Lifting Mechanism; 600 - Unlocking Component;

[0068] 110 - First drive hole; 120 - Disc cassette transfer port;

[0069] 210 - Upper cover plate; 220 - Lower cover plate; 230 - Post; 240 - Plate groove; 250 - Boss; 251 - Lock hole; 252 - Positioning hole;

[0070] 310 - Top entrance / exit; 320 - Side wall; 330 - Bottom wall; 331 - Second drive hole; 340 - Partition wall; 341 - Clearance hole; 350 - Loading cavity; 360 - Mounting cavity;

[0071] 410 - Reset element; 420 - Rotating shaft; 430 - Drive component; 440 - Locking rod; 450 - Guide post; 460 - Guide structure; 470 - Guide seat; 471 - Second torsion arm hole; 472 - Rotating shaft hole; 480 - Support seat; 481 - Guide groove;

[0072] 431-Guide groove; 432-Guide channel; 433-First tooth profile; 434-First torsion arm hole;

[0073] 441 - Second tooth profile; 442 - Support rod; 443 - Locking part;

[0074] 451-Guide rod; 452-Fixing post; 453-Elastic sleeve; 454-Fixing sleeve;

[0075] 461 - Unlocking path; 462 - Locking path; 463 - Blocking surface; 464 - First transition path; 465 - Hovering position; 466 - Second transition path; 4671 - First step; 4672 - Second step; 4673 - Third step; 4681 - First guide ramp; 4682 - Second guide ramp; 469 - Limiting surface;

[0076] 610-Key pin; 620-Base; 621-Fixing hole; 630-Buffer structure; 631-Buffer block; 6311-Counterhead; 632-Connecting pin; 6321-Fixing section; 6322-Buffer section; 6323-Limiting section; 633-Elastic element;

[0077] 710 - First fixed hinge; 720 - Second fixed hinge; 730 - First movable hinge; 740 - Second movable hinge; 750 - Transmission connecting rod; 760 - Crank; 770 - First slider; 780 - Second slider. Detailed Implementation

[0078] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

[0079] Example 1

[0080] like Figures 2 to 4 As shown, this embodiment provides a loading chamber, including a cavity 100, a box 200, a protective cover 300, a locking component 400, a lifting mechanism 500, and an unlocking component 600. Specifically, the cavity 100 is used to accommodate the box 200, and the box 200 is provided with a slot 240 with an opening facing to the side; the protective cover 300 is provided with a top entrance / exit 310 for the box 200 to enter and exit, and the protective cover 300 is used to cooperate with the box 200 to form a closed space, such as... Figure 5 As shown.

[0081] Please continue to refer to Figure 4 The lifting structure is used to drive the box 200 to rise and fall; the unlocking component 600 is set in the cavity 100 and is used to cooperate with the locking component 400 during the process of the lifting mechanism 500 driving the box 200 to rise and fall.

[0082] Please continue to refer to Figure 4 and Figure 5 The locking component 400 is used to unlock the cover 300 from the housing 200 when it is engaged with the unlocking component 600, and to lock the cover 300 from the housing 200 when it is disengaged from the unlocking component 600.

[0083] Taking the initial state of the locking component 400 locking the shield 300 and the housing 200 together as an example, the operation process inside the loading chamber will be explained. When wafer transfer is required, the lifting mechanism 500 drives the housing 200 to rise and fall. When the housing 200, together with the shield 300, moves the locking component 400 to a position that engages with the unlocking component 600, the locking component 400 releases the locking state between the shield 300 and the housing 200 under the action of the unlocking component 600. This allows the housing 200 to rise and fall independently of the shield 300 under the action of the lifting mechanism 500, exposing the wafer slot 240 from the side. When the housing 200 rises and falls to the required height, the wafer transfer purpose can be achieved.

[0084] After the transfer operation is completed, when it is necessary to transfer the box 200 and the protective cover 300 as a whole, the lifting mechanism 500 can be used to drive the box 200 down, so that the box 200 enters the protective cover 300 through the top inlet 310. After the box 200 moves into place in the protective cover 300, the locking component 400 and the unlocking component 600 are disengaged, so that the protective cover 300 and the box 200 are locked, completing the locking process. At this time, under the action of the lifting mechanism 500, the loading chamber can be sent out as a whole.

[0085] The loading chamber, through the above-mentioned configuration, allows the protective cover 300 to be automatically unlocked and automatically driven to separate from the housing 200 after the cavity 100 is evacuated or purged. This facilitates the loading and unloading of the wafers carried in the housing 200, thereby preventing the wafers in the housing 200 from being directly exposed to the atmospheric environment and thus avoiding contamination. This effectively reduces particulate matter on the wafer surface and ensures wafer performance.

[0086] Moreover, the loading chamber allows the film transfer process to be carried out by the lifting mechanism 500 driving the box body 200 to rise and fall, while the protective cover 300 remains fixed. After the lifting mechanism 500 drives the box body 200 to rise, the film slot 240 is automatically exposed. There is no need to set an additional lifting mechanism for the protective cover 300 to open the protective cover 300 and expose the film slot 240.

[0087] like Figure 4 , Figure 5 and Figure 7 In this embodiment, a lock hole 251 is provided on the bottom side of the box body 200, and the unlocking component 600 is located below the protective cover 300. Please continue to refer to Figure 4 and Figure 5 and combined Figure 6The locking assembly 400 is located below the housing 200. The locking assembly 400 includes a drive component 430 and a locking lever 440. The drive component 430 is rotatably disposed relative to the cover 300. The locking lever 440 is drively connected to the drive component 430 and is movably disposed relative to the cover 300. The drive component 430 is used to cooperate with the unlocking assembly 600 to disengage the locking lever 440 from the lock hole 251, and to disengage from the unlocking assembly 600 to insert the locking lever 440 into the lock hole 251. Please continue to refer to... Figure 4 The lifting mechanism 500 passes through the cavity 100 and the protective cover 300 from bottom to top to support the box 200.

[0088] Please continue to refer to Figure 4 When it is necessary to release the locked state of the cover 300 and the box 200, the lifting mechanism 500 drives the box 200 to descend. Since the cover 300 and the box 200 are still locked at this time, the cover 300 descends synchronously with the box 200. When the box 200 descends to the position where the driving component 430 and the unlocking component 600 cooperate, the unlocking component 600 will apply a force to the driving component 430, causing the driving component 430 to rotate relative to the cover 300. Under the transmission connection between the driving component 430 and the locking rod 440, the rotational force of the driving component 430 will be converted into the movement of the locking rod 440 relative to the cover 300, so that the locking rod 440 moves away from the box 200 and leaves the lock hole 251 of the box 200, thereby achieving the purpose of unlocking the cover 300.

[0089] The locking component 400 is designed in such a way that the housing 200 can unlock the cover 300 by its own weight, eliminating the need for a separate power component for the unlocking process and effectively reducing costs. Moreover, the locking mechanism that uses the locking rod 440 and the lock hole 251 to lock the cover 300 and the housing 200 is reliable and ensures the connection reliability between the cover 300 and the housing 200.

[0090] like Figure 6 As shown, the locking assembly 400 also includes a reset element 410, which is configured to ensure that the locking lever 440 always tends to be inserted into the lock hole 251.

[0091] The reset element 410 is provided so that when the lifting mechanism 500 drives the box 200 to rise, the driving component 430 gradually disengages from the abutting engagement with the unlocking component 600. At this time, under the action of the reset element 410, the driving component 430 can rotate in the opposite direction, so that the locking rod 440 moves towards the box 200 to insert into the lock hole 251, thereby locking the cover 300 and the box 200.

[0092] Please continue to refer to Figures 4 to 6In this embodiment, the locking component 400 may further include a guide post 450 and a guide structure 460. Specifically, the guide post 450 is disposed on the driving component 430, and the guide structure 460 is fixed relative to the protective cover 300. The guide post 450 and the guide structure 460 cooperate with each other. Figure 8 and Figure 9 As shown, the guide structure 460 includes an unlocking path 461 and a locking path 462 that are interconnected. The unlocking path 461 is configured to guide the drive component 430 to move via the guide post 450 during the descent of the housing 200 so that the locking rod 440 leaves the lock hole 251. The locking path 462 is configured to guide the drive component 430 to move via the guide post 450 and the reset element 410 during the ascent of the housing 200 so that the locking rod 440 inserts into the lock hole 251.

[0093] It should be noted that, Figure 9 The arrows in the diagram indicate the movement trajectory of the guide post 450 within the guide structure 460.

[0094] Taking the initial state of the locking component 400 locking the cover 300 and the box 200 as an example, the explanation is as follows: When it is necessary to release the lock between the cover 300 and the box 200, the lifting mechanism 500 drives the box 200 to descend. During the descent of the box 200, the unlocking component 600 abuts against the driving component 430 and applies an upward force to the driving component 430, causing the driving component 430 to rotate clockwise. Figure 5 (From the perspective of the locking component 400 on the left side) During this process, the guide post 450 moves along the unlocking path 461 in the guide structure 460. The unlocking path 461 restricts the guide post 450, allowing the driving component 430 to drive the locking rod 440 to displace away from the housing 200, thus causing the locking rod 440 to leave the lock hole 251 of the housing 200, achieving the unlocking purpose. Specifically, at the instant the driving component 430 contacts the unlocking component 600, the guide post 450 is at position Z3.

[0095] When the locking rod 440 leaves the lock hole 251 of the housing 200, the guide post 450 is at the upper end of the unlocking path 461. When the guide post 450 is at the upper end of the locking path 462, the lifting mechanism 500 drives the housing 200 to rise, causing the driving component 430 to gradually disengage from the abutment of the unlocking component 600. After the driving component 430 completely disengages from the abutment of the unlocking component 600, under the action of the reset element 410, the guide post 450 moves along the locking path 462 in the guide structure 460. The locking path 462 restricts the guide post 450, allowing the driving component 430 to drive the locking rod 440 to move closer to the housing 200, thereby inserting the locking rod 440 into the lock hole 251 of the housing 200 to achieve the locking purpose.

[0096] By setting the unlocking path 461 and the locking path 462 in the guide structure 460 to realize the unlocking and locking process, the path planning of the guide post 450 is realized, thereby realizing the displacement control of the locking rod 440, ensuring the movement accuracy of the locking rod 440, and thus improving the reliability of the locking rod 440 leaving the lock hole 251 and inserting into the lock hole 251.

[0097] Please continue to refer to Figure 8 and Figure 9 In this embodiment, the locking path 462 is roughly vertically downward.

[0098] Please continue to refer to Figure 8 and Figure 9 In this embodiment, the guide structure 460 may further include a blocking surface 463, a first transition path 464, and a hovering position 465. The blocking surface 463, the first transition path 464, and the hovering position 465 are arranged sequentially from the unlocking path 461 to the upper locking path 462. The blocking surface 463 is used to block and cooperate with the guide post 450 to limit the maximum travel of the locking rod 440 away from the lock hole 251. The first transition path 464 is configured to guide the guide post 450 into the hovering position 465 during the initial rise of the housing 200. In the hovering position 465, the locking rod 440 remains in the position away from the lock hole 251.

[0099] by Figure 4 and Figure 5 Locking component 400 on the left and Figure 8 and Figure 9 Taking the perspective of the location as an example, during the initial descent of the housing 200 by the lifting mechanism 500 to unlock the protective cover 300, when the guide post 450 moves to the end of the unlocking path 461, that is, when the guide post 450 is in position Z1, it will engage with the blocking surface 463, which restricts the guide post 450 from continuing to move clockwise. At this time, the locking rod 440 leaves the lock hole 251, and the protective cover 300 is in the unlocked state. Then, the lifting mechanism 500 drives the housing 200 to rise for the first time, causing the driving component 430 to disengage from the abutment of the unlocking component 600. At this time, the reset element... Under the action of 410, the driving component 430 will rotate counterclockwise a certain distance, so that the guide post 450 moves to the hovering position 465 along the first transition path 464 in the guiding structure 460. Due to the blocking effect of the blocking surface 463, the movement of the guide post 450 in the first transition path 464 is a vertical downward movement, so that the driving component 430 will not drive the locking rod 440 to move. The cover 300 remains in the unlocked state. In this state, the lifting mechanism 500 is used to lift and drive the housing 200, so that the wafer in the housing 200 can reach the required height position to realize wafer transfer.

[0100] By making the above-mentioned arrangement in the guide structure 460, the loading chamber can be kept in the unlocked state by using the guide post 450 to stay at the hovering position 465 during the process. On the one hand, this avoids collision and interference between the box 200 and the locking rod 440 during the independent rise of the box 200, thus providing a certain degree of protection for the box 200 and the wafer inside. On the other hand, it also allows the box 200 to be placed in the protective cover 300 without having to perform the unlocking action again after the wafer transfer is completed.

[0101] It should be noted that in this embodiment, the housing 200 and the shield 300 move downwards as a whole until they move upwards again as a whole, which constitutes one action cycle. After the housing 200 and the shield 300 descend for the first time as a whole, there are also separate rising and falling processes for the housing 200. These separate rising and falling processes are used to allow the wafer to be placed or removed from the wafer slot 240.

[0102] Please continue to refer to Figure 8 and Figure 9 In this embodiment, the guide path may further include a second transition path 466, wherein the second transition path 466 connects the first transition path 464 and the locking path 462, and the second transition path 466 is configured to guide the guide post 450 into the locking path 462 during the final descent of the housing 200.

[0103] During the process of lifting the box 200 while the protective cover 300 remains stationary for transferring the film, the guide post 450 is in the hovering position 465, i.e., position Z2. After the film transfer operation is completed, as the lifting mechanism 500 lowers the box 200, i.e., the lifting mechanism 500 lowers the box 200 for the second time, due to the setting of the second transition path 466, under the abutting action of the drive component 430 and the unlocking component 600, the guide post 450 will enter the second transition path 466 from the hovering position 465. Then, the lifting mechanism 500 drives the box 200 to rise for the last time, causing the drive component 430 to disengage from the unlocking component 600. At this time, under the action of the reset element 410, the guide post 450 will move in the locking path 462, thereby driving the locking rod 440 to insert into the lock hole 251 and complete the locking.

[0104] By setting the second transition path 466, the connection between the first transition path 464 and the locking path 462 is realized, so that when locking the cover 300, the drive component 430 needs to be triggered first, to avoid the locking failure caused by the lock rod 440 extending prematurely due to the malfunction of the drive component 430.

[0105] Figure 10This illustrates one action cycle of the guide post 450 within the guide structure 460. (As shown...) Figure 10 As shown, in the 0-t1 stage, the lifting mechanism 500 drives the box 200 to descend for the first time. At this time, the locking component 400 is in the locked position, the protective cover 300 descends with the box 200, and the guide post 450 moves along the unlocking path 461 to unlock. In the t1-t2 stage, the lifting mechanism 500 drives the box 200 to rise for the first time. At this time, the locking component 400 is in the unlocked position, and the lifting mechanism 500 only drives the box 200 to rise, causing the driving component 430 to disengage from the unlocking component 600. The guide post 450 moves along the first transition path 464 to the hovering position 465. In the t2-t3 stage, the lifting mechanism 500 continues to rise. During the process of continuously raising the box 200, the locking rod 440 remains in the unlocked state, and the guide post 450 is in the hovering position 465. During the t3 to t4 stage, the lifting mechanism 500 lowers the box 200 for the last time. During this time, the driving component 430 cooperates with the unlocking component 600, and the guide post 450 moves along the second transition path 466 in the guide structure 460. After the t4 stage, the lifting mechanism 500 raises the box 200 for the last time. During this time, the driving component 430 gradually disengages from the unlocking component 600. Under the action of the reset element 410, the guide post 450 moves along the locking path 462 in the guide structure 460 to achieve locking.

[0106] like Figure 11 As shown, in this embodiment, the guide structure 460 may further include a first step 4671. Specifically, the first step 4671 is located between the unlocking path 461 and the blocking surface 463. The first step 4671 is configured to prevent the guide post 450 from entering the unlocking path 461 in the opposite direction.

[0107] The aforementioned first step 4671 limits the guide post 450 in the first transition path 464, effectively preventing the guide post 450 from retracting to the unlocking path 461 after entering the first transition path 464, thus ensuring the reliability of unlocking.

[0108] Please continue to refer to Figure 11 In this embodiment, the guide structure 460 may further include a second step 4672. Specifically, the second step 4672 is located between the first transition path 464 and the hover position 465. The second step 4672 is configured to prevent the guide post 450 from entering the first transition path 464 in the opposite direction.

[0109] The aforementioned second step 4672 limits the guide post 450 in the hovering position 465, effectively preventing the guide post 450 from returning to the first transition path 464 after entering the hovering position 465, thus ensuring the reliability of the guide post 450 entering the second transition path 466 during the final descent of the box 200.

[0110] like Figure 12 As shown, in this embodiment, the guide structure 460 may further include a third step 4673. Specifically, the third step 4673 is located between the locking path 462 and the unlocking path 461, and the third step 4673 is configured to prevent the guide post 450 from reversing into the locking path 462.

[0111] The aforementioned third step 4673 is designed to prevent the guide post 450 from reversing and entering the locking path 462.

[0112] Please continue to refer to Figure 12 In this embodiment, a first guide ramp 4681 is provided between the hover position 465 and the second transition path 466. The first guide ramp 4681 is configured to guide the guide post 450 into the second transition path 466.

[0113] The first guide slope 4681 is set to guide the guide post 450 during its movement to the second transition path 466, reduce the jamming of the guide post 450 during its entry into the second transition path 466, and ensure the smoothness of the guide post 450 entering the second transition path 466.

[0114] Please continue to refer to Figure 12 In this embodiment, a second guide ramp 4682 is provided between the locking path 462 and the unlocking path 461. The second guide ramp 4682 is configured to guide the guide post 450 into the unlocking path 461.

[0115] The second guide slope 4682 guides the guide post 450 as it moves toward the unlocking path 461, reduces jamming of the guide post 450 as it enters the unlocking path 461, and ensures the smoothness of the guide post 450 entering the unlocking path 461, thereby improving the unlocking reliability.

[0116] Please continue to refer to Figure 11 In this embodiment, the guide structure 460 may further include a limiting surface 469, wherein the limiting surface 469 is used to prevent the guide post 450 from entering the unlocking path 461 from the hovering position 465 in the opposite direction.

[0117] Please continue to refer to Figure 8 , Figure 9 , Figure 11 and Figure 12 In this embodiment, the guide structure 460 can be in the form of a groove, wherein the guide post 450 is inserted into the guide structure 460.

[0118] By setting the guide structure 460 in the form of a groove that is inserted into the guide post 450, the guide post 450 can be limited in the side, so that the guide post 450 can move along the guide structure 460 without deviating from the guide structure 460.

[0119] It is understood that in other embodiments, the guide structure 460 may also be disposed on the outer contour of the component, which can also guide the movement path by cooperating with the guide post 450.

[0120] like Figure 13 As shown, in this embodiment, a guide groove 431 can be provided in the driving component 430, wherein the guide groove 431 is parallel to the plane where the guide structure 460 is located, and the guide post 450 is movably disposed in the guide groove 431, and the moving direction of the guide post 450 is the extending direction of the guide groove 431.

[0121] The aforementioned guide groove 431 can guide the movement of the guide post in the guide structure 460, thereby reducing jamming during the movement of the guide post 450 and ensuring the reliability of unlocking and locking.

[0122] Please continue to refer to Figure 13 and combined Figure 14 and Figure 15 In this embodiment, the guide post 450 may include a guide rod 451, a fixed post 452, an elastic sleeve 453, and a fixed sleeve 454. Specifically, the drive component 430 has a guide channel 432, the extension direction of the guide channel 432 is the same as the extension direction of the guide groove 431, and the guide rod 451 is inserted into the guide channel 432; the fixed post 452 is fixedly disposed on the guide rod 451, the fixed sleeve 454 is movably disposed on one end of the fixed post 452 facing the guide structure 460, the elastic sleeve 453 is disposed on the fixed post 452, one end of the elastic sleeve 453 is connected to the guide rod 451, and the other end of the elastic sleeve 453 is connected to the fixed sleeve 454. The elastic sleeve 453 is configured such that the fixed sleeve 454 always has a tendency to abut against the guide structure 460.

[0123] When the guide post 450 moves within the guide structure 460, the fixed sleeve 454 remains in contact with the guide structure 460 under the elastic restoring force of the elastic sleeve 453. That is, the guide structure 460 always applies a preload to the guide post 450, preventing the guide post 450 from wobbling. As the fixed sleeve 454 moves within the guide structure 460, the guide rod 451 moves within the guide channel 432 of the drive component 430, thereby guiding the movement of the fixed sleeve 454.

[0124] In this embodiment, the elastic sleeve 453 can be a helical spring.

[0125] Please continue to refer to Figure 6 In this embodiment, the locking assembly 400 may further include a guide seat 470 and a support seat 480. Specifically, the guide seat 470 and the support seat 480 are both fixedly disposed on the cover 300, and a receiving space is formed between the guide seat 470 and the support seat 480. The driving component 430 and the locking rod 440 are both disposed in the receiving space. The guide structure 460 is disposed on the guide seat 470. The driving component 430 is rotatably connected to both the guide seat 470 and the support seat 480. The driving component 430 is provided with a first tooth profile 433. The locking rod 440 is movably disposed on the support seat 480. The locking rod 440 is provided with a second tooth profile 441 that meshes with the first tooth profile 433.

[0126] When the drive component 430 rotates, under the meshing transmission of the first tooth profile 433 and the second tooth profile 441, the rotational displacement of the drive component 430 will be converted into the moving displacement of the locking rod 440, so that the locking rod 440 moves away from or closer to the lock hole 251, thereby realizing the unlocking and locking process.

[0127] This method of transmitting power from the drive component 430 to the locking rod 440 by utilizing the meshing between the teeth has two advantages: firstly, it ensures high transmission accuracy and reliability of unlocking and locking; secondly, it reduces space occupation and contributes to the compact structure of the loading chamber in this embodiment.

[0128] In addition, the guide seat 470 provides a base for the guide structure 460 and a mounting base for the drive component 430. Similarly, the support seat 480 provides a mounting base for the locking rod 440. This means that the guide structure 460, drive component 430 and support seat 480 do not need to be directly mounted on the cover 300, which not only reduces the processing difficulty but also ensures the structural strength of the cover 300.

[0129] Please continue to refer to Figure 6 In this embodiment, the locking rod 440 may further include a support rod 442 and a locking part 443, wherein the second tooth 441 is disposed on the support rod 442, and the locking part 443 is used to engage with the lock hole 251; the support base 480 is also provided with a guide groove 481 for guiding the movement of the locking part 443.

[0130] Please continue to refer to Figure 6 In this embodiment, the locking rod 440 is provided with two locking parts 443, and correspondingly, the support base 480 is provided with two guide grooves 481, with the two locking parts 443 respectively disposed in the two guide grooves 481; please continue to refer to Figure 7 The housing 200 is provided with lock holes 251 that correspond in number and position to the locking parts 443. This design improves the reliability of locking the protective cover 300.

[0131] Please continue to refer to Figure 6 In this embodiment, the drive component 430 is rotatably connected to the guide seat 470 and the support seat 480 via the rotating shaft 420. The reset element 410 includes a torsion spring. The reset element 410 is sleeved on the rotating shaft 420. One torsion arm of the reset element 410 is fixedly connected to the drive component 430, and the other torsion arm of the torsion spring is fixedly connected to the guide seat 470.

[0132] This method of using a torsion spring to reset the drive component 430 is not only simple in structure and occupies little space, but also reliable in resetting.

[0133] Please continue to refer to Figure 8 and Figure 9 In this embodiment, the guide seat 470 is also provided with a pivot hole 472 for mounting the rotating shaft 420.

[0134] Please continue to refer to Figure 13 In this embodiment, the drive component 430 has a first torsion arm hole 434. Please refer to [the documentation / reference]. Figure 8 and Figure 9 The guide seat 470 has a second torsion arm hole 471, wherein the two torsion arms of the reset element 410 are respectively inserted into the first torsion arm hole 434 and the second torsion arm hole 471.

[0135] It should be noted that in other embodiments, the reset element 410 may also be a spiral spring.

[0136] It should also be noted that in other embodiments, one torsion arm of the reset element 410 may be fixedly connected to the drive component 430, while the other torsion arm of the reset element 410 may be fixedly connected to the support base 480.

[0137] Please continue to refer to Figure 4 and Figure 5 In this embodiment, the protective cover 300 may include a side wall 320, a bottom wall 330, and a partition wall 340. Specifically, the partition wall 340 and the bottom wall 330 are connected to the side wall 320 at intervals in the vertical direction. The partition wall 340 divides the internal space of the protective cover 300 into a bearing cavity 350 and a mounting cavity 360 arranged in the vertical direction. The box body 200 and the bearing cavity 350 cooperate to form a closed space, and the locking component 400 is located in the mounting cavity 360. The partition wall 340 is provided with a clearance hole 341, and the box body 200 is provided with a boss 250 extending from the clearance hole 341 to the mounting cavity 360. The locking hole 251 is provided in the boss 250.

[0138] By setting two independent chambers in the protective cover 300, the housing 200 and the locking component 400 are respectively accommodated, reducing the mutual influence between the housing 200 and the locking component 400.

[0139] Please continue to refer to Figure 4 In this embodiment, a first driving hole 110 is provided at the bottom of the cavity 100, and a second driving hole 331 is provided on the bottom wall 330 of the protective cover 300. The lifting end of the lifting mechanism 500 passes through the first driving hole 110 and the second driving hole 331 in sequence and is connected to the boss 250. That is to say, in this embodiment, the lifting mechanism 500 is located below the box 200.

[0140] By placing the lifting mechanism 500 below the box body 200, the lifting process of the lifting mechanism 500 can be used to lift the box body 200 and the protective cover 300. When the protective cover 300 lifts and lowers together with the box body 200, it does not rely on the protective cover 300 for load-bearing, which reduces the force on the protective cover 300 and thus extends the service life of the protective cover 300.

[0141] In this embodiment, the lifting mechanism 500 can be connected to the boss 250 by a positioning pin, wherein the positioning pin is fixedly connected to the lifting end of the lifting mechanism 500; the boss 250 is provided with a positioning hole 252 that engages with the positioning pin, and the positioning pin plays a positioning role for the box 200.

[0142] With the above settings, when it is necessary to transfer the box 200 together with the protective cover 300 to the outside of the cavity 100, the box 200 can be directly removed from the positioning pin, making the separation process of the box 200 from the lifting mechanism 500 simple.

[0143] Moreover, this configuration allows the lifting mechanism 500 to continue moving downwards when the box 200 is blocked by the unlocking component 600, while the box 200 separates from the lifting mechanism 500 under the resistance of the unlocking component 600. This allows the box 200 to use its own gravity as a driving force to switch the locking component 400 between the locked and unlocked positions, reducing the load on the power components in the lifting mechanism 500.

[0144] In this embodiment, the lifting power of the lifting mechanism 500 can be provided by a motor or a swing cylinder, which can be obtained by those skilled in the art based on existing technology. It is not the focus of this application's improvement, so it will not be described in detail here.

[0145] Please continue to refer to Figure 5 In this embodiment, the box body 200 may include an upper cover plate 210, a lower cover plate 220, and multiple columns 230 connected between the upper cover plate 210 and the lower cover plate 220, wherein the plate groove 240 is formed on the multiple columns 230; the box body 200 forms a closed space by the upper cover plate 210 cooperating with the top of the protective cover 300.

[0146] The aforementioned configuration of the housing 200 ensures that both the top and bottom of the wafer are open when it is placed in the wafer tray 240, facilitating wafer picking operations by the robotic arm. By utilizing the upper cover 210 of the housing 200 to form a closed space with the top of the shield 300, the shield 300 utilizes its side walls 320 to support the housing 200, resulting in good structural stability. Furthermore, it eliminates the need for additional structures inside or outside the shield 300 to form a closed space with the housing 200, reducing manufacturing costs and minimizing space occupation inside and outside the shield 300.

[0147] Please continue to refer to Figure 4 and Figure 5 In this embodiment, the locking components 400 are provided in two sets, and the two sets of locking components 400 are arranged at intervals around the boss 250. The position of the lock hole 251 corresponds to the position of the lock rod 440 of the two sets of locking components 400. The unlocking component 600 includes key pins 610 that are fixed relative to the cavity 100. The number of key pins 610 is the same as the number of locking components 400, which is also two sets. The two sets of key pins 610 are respectively arranged in a one-to-one correspondence with the two sets of locking components 400.

[0148] By setting two sets of locking components 400 spaced apart around the boss 250, the box 200 is locked to the cover 300 at multiple positions in its circumference. This not only improves the locking reliability, but also ensures the uniformity of force on the cover 300 during the synchronous lifting and lowering of the cover 300 along with the box 200.

[0149] Understandably, the locking component 400 can also be set to other quantities, such as three groups.

[0150] Please continue to refer to Figure 4 and combined Figure 16 In this embodiment, the unlocking component 600 may further include a base 620 and a plurality of buffer structures 630. Specifically, the base 620 is fixedly disposed in the cavity 100, the plurality of buffer structures 630 are disposed in the base 620, and the plurality of buffer structures 630 are arranged at intervals along the circumference of the base 620. The buffer structures 630 are used to contact the box 200; the key pin 610 is fixedly disposed in the base 620.

[0151] The aforementioned base 620 not only provides an installation foundation for the key pin 610, but also, by setting multiple buffer structures 630 arranged circumferentially on the base 620, when the lifting mechanism 500 drives the box 200 to descend, as the box 200 descends and gradually comes into contact with the buffer structure 630, the buffer structure 630 will buffer the box 200, changing the original rigid contact into a flexible contact, thus playing a certain protective role for the box 200.

[0152] like Figure 17 As shown, the buffer structure 630 may include a buffer block 631, a connecting pin 632, and an elastic element 633. Specifically, the base 620 has a fixing hole 621, and the connecting pin 632 includes a fixing section 6321, a buffer section 6322, and a limiting section 6323 arranged sequentially along the axial direction. The buffer section 6322 has a countersunk hole 6311, wherein the fixing section 6321 passes through the countersunk hole 6311 and is fixedly installed in the fixing hole 621; the buffer section 6322 passes through the small diameter section of the countersunk hole 6311, and the limiting section 6323 is accommodated in the large diameter section of the countersunk hole 6311, and the limiting section 6323 can abut against the stepped surface of the countersunk hole 6311; the elastic element 633 is located between the buffer block 631 and the base 620, and the elastic element 633 is configured to make the buffer block 631 always have a tendency to move away from the base 620.

[0153] When the housing 200 comes into contact with the buffer block 631 and gradually applies force to the buffer block 631, the elastic element 633 will be compressed to cushion the weight of the housing 200. During this process, the limiting section 6323 and the small-diameter section of the countersunk hole 6311 slide together, guiding the downward movement of the buffer block 631. After the housing 200 rises and disengages from the buffer block 631, the buffer block 631 will reset under the elastic restoring force of the elastic element 633, ready to cushion the housing 200 again.

[0154] Please continue to refer to Figure 17 In this embodiment, the elastic element 633 can be a helical buffer spring, wherein the elastic element 633 is sleeved on the buffer section 6322, one end of the elastic element 633 abuts against the upper surface of the base 620, and the other end of the elastic element 633 abuts against the lower surface of the buffer block 631.

[0155] Please continue to refer to Figure 17 In this embodiment, the connecting pin 632 can be a connecting bolt, and the fixing hole 621 can be a threaded hole. The threaded section of the connecting pin 632 is screwed into the fixing hole 621, the smooth section of the connecting pin 632 forms a buffer section 6322, and the nut of the connecting pin 632 forms a limiting section 6323. By controlling the screwing depth of the connecting pin 632 in the fixing hole 621, the preload of the elastic element 633 can be adjusted, thereby allowing the buffer block 631 to have different buffering forces.

[0156] It should be noted that in this embodiment, the maximum elastic force of the elastic element 633 is greater than the total weight of the box 200 and the protective cover 300.

[0157] It should also be noted that, in this embodiment, the total weight of the box 200 and the protective cover 300 is greater than the sum of the maximum elastic force of the elastic element 633, the maximum torque of the reset element 410, and the maximum frictional force of the fixed sleeve 454 moving along the guide mechanism during the unlocking process.

[0158] Please continue to refer to Figure 2 In this embodiment, the loading chamber is also provided with a cartridge transfer port 120. Through the cartridge transfer port 120, the closed space formed by locking the cartridge 200 and the protective cover 300 can be transferred to the outside of the cavity 100. The cartridge transfer port 120 and the aforementioned transfer port are respectively located on two opposite sides of the cavity 100.

[0159] Example 2

[0160] This embodiment provides another loading chamber, which differs from the loading chamber of Embodiment 1 as described below.

[0161] like Figure 18 As shown, in this embodiment, the locking assembly 400 includes a driving component 430, a transmission link 750, a crank 760, a first slider 770, a second slider 780, and a locking rod 440. Specifically, the driving component 430 is generally L-shaped. The angled position of the driving component 430 is rotatably connected to the protective cover 300 through a first fixed hinge 710. One end of the driving component 430 and the transmission link 750 are hinged to each other through a first movable hinge 730. The other end of the transmission link 750 and the crank 760 are hinged to each other through a second movable hinge 740. The crank 760 is rotatably connected to the protective cover 300 through a second fixed hinge 720. The first slider 770 is fixedly disposed at one end of the locking rod 440 near the crank 760. The second slider 780 is fixedly disposed relative to the protective cover 300. The locking rod 440 and the second slider 780 are slidably connected. The relative sliding direction between the locking rod 440 and the second slider 780 is the direction in which the locking rod 440 approaches or moves away from the lock hole 251, and the relative sliding direction between the crank 760 and the first slider 770 is perpendicular to the relative sliding direction between the locking rod 440 and the second slider 780.

[0162] In use Figure 18 When the locking assembly 400 is shown, and it is necessary to release the locked state between the cover 300 and the housing 200, the housing 200 descends. Through the cooperation of the drive component 430 and the key pin 610, the drive component 430 rotates around the first fixed hinge 710. Then, through the first movable hinge 730, the transmission connecting rod 750, and the second movable hinge 740, the power is transmitted to the crank 760, causing the crank 760 to rotate around the second fixed hinge 720. During the rotation of the crank 760, through the sliding cooperation between the crank 760 and the first slider 770 and the sliding cooperation between the locking rod 440 and the second slider 780, the locking rod 440 moves away from the lock hole 251, thereby achieving the purpose of unlocking.

[0163] When locking is required, the housing 200 is raised so that the drive component 430 disengages from the key pin 610. Under the action of the reset component, the drive component 430 rotates in the opposite direction to the unlocking process, so that the lock rod 440 moves closer to the lock hole 251, thereby achieving the purpose of locking.

[0164] Example 3

[0165] Please continue to refer to Figure 5 This embodiment provides a wafer loading cassette, including a cassette body 200, a protective cover 300, and a locking assembly 400. The cassette body 200 is provided with a wafer slot 240 with an opening facing to the side; the protective cover 300 is provided with a top entrance / exit 310 for the cassette body 200 to enter and exit, and the protective cover 300 is used to cooperate with the cassette body 200 to form a closed space; please continue to refer to Figure 7 A lock hole 251 is provided on the bottom side of the box body 200.

[0166] Please continue to refer to Figure 5 and Figure 6 The locking assembly 400 is located below the housing 200. The locking assembly 400 includes a driving component 430 and a locking rod 440. The driving component 430 is rotatably disposed relative to the cover 300. The locking rod 440 is connected to the driving component 430 and is movably disposed relative to the cover 300. The driving component 430 is used to rotate to drive the locking rod 440 to move into or out of the lock hole 251.

[0167] During wafer transport, the wafer carrier box, together with the wafers it carries, can be transported as a whole to the loading chamber. After the loading chamber is evacuated or purged, the protective cover 300 is automatically unlocked by the locking component 400 in the wafer carrier box, separating the protective cover 300 from the box body 200 to facilitate the loading and unloading of the wafers carried by the box body 200. This design can prevent the wafers from being contaminated by being directly exposed to the atmospheric environment in the loading chamber, thereby effectively reducing particulate matter on the wafer surface and ensuring wafer performance.

[0168] like Figure 6 As shown, the locking assembly 400 also includes a reset element 410, which is configured to ensure that the locking lever 440 always tends to be inserted into the lock hole 251.

[0169] The reset element 410 is provided so that when the lifting mechanism 500 drives the box 200 to rise, the driving component 430 gradually disengages from the abutting engagement with the unlocking component 600. At this time, under the action of the reset element 410, the driving component 430 can rotate in the opposite direction, so that the locking rod 440 moves towards the box 200 to insert into the lock hole 251, thereby locking the cover 300 and the box 200.

[0170] Please continue to refer to Figures 4 to 6 In this embodiment, the locking component 400 may further include a guide post 450 and a guide structure 460. Specifically, the guide post 450 is disposed on the driving component 430, and the guide structure 460 is fixed relative to the protective cover 300. The guide post 450 and the guide structure 460 cooperate with each other. Figure 8 and Figure 9 As shown, the guide structure 460 includes an unlocking path 461 and a locking path 462 that are interconnected. The unlocking path 461 is configured to guide the drive component 430 to move via the guide post 450 during the descent of the housing 200 so that the locking rod 440 leaves the lock hole 251. The locking path 462 is configured to guide the drive component 430 to move via the guide post 450 and the reset element 410 during the ascent of the housing 200 so that the locking rod 440 inserts into the lock hole 251.

[0171] By setting the unlocking path 461 and the locking path 462 in the guide structure 460 to realize the unlocking and locking process, the path planning of the guide post 450 is realized, thereby realizing the displacement control of the locking rod 440, ensuring the movement accuracy of the locking rod 440, and thus improving the reliability of the locking rod 440 leaving the lock hole 251 and inserting into the lock hole 251.

[0172] Please continue to refer to Figure 8 and Figure 9 In this embodiment, the guide structure 460 may further include a blocking surface 463, a first transition path 464, and a hovering position 465. The blocking surface 463, the first transition path 464, and the hovering position 465 are arranged sequentially from the unlocking path 461 to the upper locking path 462. The blocking surface 463 is used to block and cooperate with the guide post 450 to limit the maximum travel of the locking rod 440 away from the lock hole 251. The first transition path 464 is configured to guide the guide post 450 into the hovering position 465 during the initial rise of the housing 200. In the hovering position 465, the locking rod 440 remains in the position away from the lock hole 251.

[0173] By making the above-mentioned arrangement in the guide structure 460, the loading chamber can be kept in the unlocked state by using the guide post 450 to stay at the hovering position 465 during the process. On the one hand, this avoids collision and interference between the box 200 and the locking rod 440 during the independent rise of the box 200, thus providing a certain degree of protection for the box 200 and the wafer inside. On the other hand, it also allows the box 200 to be placed in the protective cover 300 without having to perform the unlocking action again after the wafer transfer is completed.

[0174] Please continue to refer to Figure 6 In this embodiment, the locking assembly 400 may further include a guide seat 470 and a support seat 480. Specifically, the guide seat 470 and the support seat 480 are both fixedly disposed on the cover 300, and a receiving space is formed between the guide seat 470 and the support seat 480. The driving component 430 and the locking rod 440 are both disposed in the receiving space. The guide structure 460 is disposed on the guide seat 470. The driving component 430 is rotatably connected to both the guide seat 470 and the support seat 480. The driving component 430 is provided with a first tooth profile 433. The locking rod 440 is movably disposed on the support seat 480. The locking rod 440 is provided with a second tooth profile 441 that meshes with the first tooth profile 433.

[0175] This method of transmitting power from the drive component 430 to the locking rod 440 by utilizing the meshing between the teeth has two advantages: firstly, it ensures high transmission accuracy and reliability of unlocking and locking; secondly, it reduces space occupation and contributes to the compact structure of the loading chamber in this embodiment.

[0176] Please continue to refer to Figure 6 In this embodiment, the drive component 430 is rotatably connected to the guide seat 470 and the support seat 480 via the rotating shaft 420. The reset element 410 includes a torsion spring. The reset element 410 is sleeved on the rotating shaft 420. One torsion arm of the reset element 410 is fixedly connected to the drive component 430, and the other torsion arm of the torsion spring is fixedly connected to the guide seat 470.

[0177] This method of using a torsion spring to reset the drive component 430 is not only simple in structure and occupies little space, but also reliable in resetting.

[0178] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

[0179] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variations thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0180] In the above embodiments, descriptions of directions such as "up", "down", "clockwise", "counterclockwise", and "side" are all based on the accompanying drawings.

[0181] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A loading chamber, characterized in that, include: Cavity (100), box (200), protective cover (300), locking component (400), lifting mechanism (500) and unlocking component (600); The cavity (100) is used to house the box (200); The box body (200) is provided with a slot (240) with an opening facing to the side; The protective cover (300) is provided with a top entrance (310) for the box body (200) to enter and exit, and the protective cover (300) is used to cooperate with the box body (200) to form a closed space; The lifting mechanism (500) is used to drive the box (200) to rise and fall; The unlocking component (600) is disposed in the cavity (100) and is used to cooperate with the locking component (400) during the process of the lifting mechanism (500) driving the box (200) to rise and fall; The locking component (400) is used to unlock the cover (300) from the box (200) when it is engaged with the unlocking component (600), and to lock the cover (300) from the box (200) when it is disengaged from the unlocking component (600).

2. The loading chamber according to claim 1, characterized in that, The bottom side of the box (200) is provided with a lock hole (251), and the unlocking component (600) is located below the protective cover (300); The locking assembly (400) is located below the housing (200). The locking assembly (400) includes a driving component (430) and a locking rod (440). The driving component (430) is rotatably disposed relative to the protective cover (300). The locking rod (440) is convexly connected to the driving component (430) and movably disposed relative to the protective cover (300). The driving component (430) is used to cooperate with the unlocking assembly (600) to disengage the locking rod (440) from the lock hole (251) and to disengage from the unlocking assembly (600) to insert the locking rod (440) into the lock hole (251). The lifting mechanism (500) passes through the cavity (100) and the protective cover (300) from bottom to top to support the box (200).

3. The loading chamber according to claim 2, characterized in that, The locking assembly (400) further includes a reset element (410) configured to ensure that the locking lever (440) always tends to be inserted into the keyhole (251).

4. The loading chamber according to claim 3, characterized in that, The locking assembly (400) further includes a guide post (450) and a guide structure (460). The guide post (450) is disposed on the driving component (430), and the guide structure (460) is fixed relative to the cover (300). The guide post (450) cooperates with the guide structure (460). The guide structure (460) includes an unlocking path (461) and a locking path (462) that are interconnected. The unlocking path (461) is configured to guide the drive component (430) to move via the guide post (450) during the descent of the housing (200) so that the locking rod (440) leaves the keyhole (251). The locking path (462) is configured to guide the drive component (430) to move via the guide post (450) and the reset element (410) during the ascent of the housing (200) so that the locking rod (440) inserts into the keyhole (251).

5. The loading chamber according to claim 4, characterized in that, The guide structure (460) further includes a blocking surface (463), a first transition path (464), and a hovering position (465). The blocking surface (463), the first transition path (464), and the hovering position (465) are arranged sequentially from the unlocking path (461) to the locking path (462). The blocking surface (463) is used to cooperate with the guide post (450) to limit the maximum travel of the locking rod (440) away from the lock hole (251). The first transition path (464) is configured to guide the guide post (450) into the hovering position (465) during the rising of the housing (200). In the hovering position (465), the locking rod (440) is held in the position away from the lock hole (251).

6. The loading chamber according to claim 5, characterized in that, The guide structure (460) further includes a second transition path (466) that connects the first transition path (464) and the locking path (462). The second transition path (466) is configured to guide the guide post (450) into the locking path (462) during the descent of the housing (200).

7. The loading chamber according to claim 5, characterized in that, The guide structure (460) further includes a first step (4671) located between the unlocking path (461) and the blocking surface (463), and the first step (4671) is configured to prevent the guide post (450) from entering the unlocking path (461) in the opposite direction. And / or, the guide structure (460) further includes a second step (4672) located between the first transition path (464) and the hover position (465), the second step (4672) being configured to prevent the guide post (450) from reversing into the first transition path (464); And / or, the guide structure (460) further includes a third step (4673) located between the locking path (462) and the unlocking path (461), the third step (4673) being configured to prevent the guide post (450) from reversing into the locking path (462); And / or, a first guide ramp (4681) is provided between the hover position (465) and the second transition path (466), the first guide ramp (4681) being configured to guide the guide post (450) into the second transition path (466); and / or, a second guide ramp (4682) is provided between the locking path (462) and the unlocking path (461), the second guide ramp (4682) being configured to guide the guide post (450) into the unlocking path (461).

8. The loading chamber according to claim 4, characterized in that, The guide structure (460) is in the form of a groove, and the guide post (450) is inserted into the guide structure (460); And / or, the driving component (430) is provided with a guide groove (431), the guide groove (431) is parallel to the plane of the guide structure (460), the guide post (450) is movably disposed in the guide groove (431), and the moving direction of the guide post (450) is the extending direction of the guide groove (431).

9. The loading chamber according to claim 8, characterized in that, The guide post (450) includes a guide rod (451), a fixed post (452), an elastic sleeve (453), and a fixed sleeve (454). The driving component (430) has a guide channel (432), the extension direction of which is the same as the extension direction of the guide groove (431). The guide rod (451) is inserted into the guide channel (432). The fixed post (452) is fixedly disposed on the guide rod (451), and the fixed sleeve (454) is fixedly disposed on the guide rod (451). 4) The movable sleeve is fitted onto one end of the fixed post (452) facing the guide structure (460), the elastic sleeve (453) is fitted onto the fixed post (452), one end of the elastic sleeve (453) is connected to the guide rod (451), and the other end of the elastic sleeve (453) is connected to the fixed sleeve (454). The elastic sleeve (453) is configured such that the fixed sleeve (454) always has a tendency to abut against the guide structure (460).

10. The loading chamber according to claim 4, characterized in that, The locking assembly (400) further includes a guide seat (470) and a support seat (480), both of which are fixedly disposed on the cover (300), and a receiving space is formed between the guide seat (470) and the support seat (480). The driving component (430) and the locking rod (440) are both disposed in the receiving space, wherein the guiding structure (460) is disposed on the guide seat (470); the driving component (430) is rotatably connected to both the guide seat (470) and the support seat (480), and the driving component (430) is provided with a first tooth profile (433); the locking rod (440) is movably disposed on the support seat (480), and the locking rod (440) is provided with a second tooth profile (441) that meshes with the first tooth profile (433).

11. The loading chamber according to claim 10, characterized in that, The drive component (430) is rotatably connected to the guide seat (470) and the support seat (480) via a rotating shaft (420). The reset element (410) includes a torsion spring. The reset element (410) is sleeved on the rotating shaft (420). One torsion arm of the reset element (410) is fixedly connected to the drive component (430), and the other torsion arm of the reset element (410) is fixedly connected to the guide seat (470) or the support seat (480).

12. The loading chamber according to claim 2, characterized in that, The protective cover (300) includes a side wall (320), a bottom wall (330), and a partition wall (340). The partition wall (340) and the bottom wall (330) are connected to the side wall (320) at intervals in the vertical direction. The partition wall (340) divides the internal space of the protective cover (300) into a support cavity (350) and a mounting cavity (360) arranged in the vertical direction. The box body (200) cooperates with the support cavity (350) to form the closed space. The locking component (400) is located in the mounting cavity (360). The partition wall (340) is provided with a clearance hole (341). The box body (200) is provided with a boss (250) extending from the clearance hole (341) to the mounting cavity (360). The lock hole (251) is provided on the boss (250).

13. The loading chamber according to claim 12, characterized in that, The bottom of the cavity (100) is provided with a first driving hole (110), and the bottom wall (330) is provided with a second driving hole (331). The lifting end of the lifting mechanism (500) passes through the first driving hole (110) and the second driving hole (331) in sequence. One of the boss (250) and the lifting end is provided with a positioning pin, and the other of the boss (250) and the lifting end is provided with a positioning hole (252). The positioning hole (252) is inserted and engaged with the positioning pin.

14. The loading chamber according to claim 12, characterized in that, The box body (200) includes an upper cover plate (210), a lower cover plate (220), and multiple columns (230) connecting the upper cover plate (210) and the lower cover plate (220). The slot (240) is formed on the multiple columns (230). The box body (200) forms the enclosed space by the upper cover plate (210) cooperating with the top of the protective cover (300).

15. The loading chamber according to claim 12, characterized in that, The locking components (400) are provided in multiple sets, and the multiple sets of locking components (400) are arranged at intervals around the boss (250). The position of the lock hole (251) corresponds to the position of the lock rod (440) of each set of locking components (400). The unlocking component (600) includes key pins (610) that are fixed relative to the cavity (100). The number of key pins (610) is the same as the number of locking components (400). The multiple sets of key pins (610) are respectively arranged in a one-to-one correspondence with the multiple sets of locking components (400).

16. The loading chamber according to claim 15, characterized in that, The unlocking component (600) further includes a base (620) and a plurality of buffer structures (630). The base (620) is fixedly disposed in the cavity (100), and the plurality of buffer structures (630) are disposed in the base (620) and are arranged at intervals along the circumference of the base (620). The buffer structures (630) are used to contact the box (200). The key pin (610) is fixedly disposed in the base (620).

17. The loading chamber according to claim 16, characterized in that, The buffer structure (630) includes a buffer block (631), a connecting pin (632), and an elastic element (633). The base (620) has a fixing hole (621). The connecting pin (632) includes a fixing section (6321), a buffer section (6322), and a limiting section (6323) arranged sequentially along the axial direction. The buffer block (631) has a countersunk hole (6311). The fixing section (6321) passes through the countersunk hole (6311) and is fixedly disposed in the fixing hole (621). The buffer section (6322) passes through the small diameter section of the countersunk hole (6311), the limiting section (6323) is accommodated in the large diameter section of the countersunk hole (6311), and the limiting section (6323) can abut against the stepped surface of the countersunk hole (6311); the elastic element (633) is located between the buffer block (631) and the base (620), and the elastic element (633) is configured to make the buffer block (631) always have a tendency to move away from the base (620).

18. A wafer carrier box, characterized in that, The device includes a housing (200), a protective cover (300), and a locking assembly (400). The housing (200) is provided with a slot (240) with an opening facing to the side. The protective cover (300) is provided with a top entrance (310) for the housing (200) to enter and exit. The protective cover (300) is used to cooperate with the housing (200) to form a closed space. The bottom side of the box body (200) is provided with a lock hole (251). The locking assembly (400) is located below the box body (200). The locking assembly (400) includes a driving component (430) and a locking rod (440). The driving component (430) is rotatably disposed relative to the protective cover (300). The locking rod (440) is drivenly connected to the driving component (430) and is movably disposed relative to the protective cover (300). The driving component (430) is used to rotate to drive the locking rod (440) to move into or out of the lock hole (251).

19. The wafer carrier according to claim 18, characterized in that, The locking assembly (400) further includes a reset element (410) configured to ensure that the locking lever (440) always tends to be inserted into the keyhole (251).

20. The wafer carrier according to claim 19, characterized in that, The locking assembly (400) further includes a guide post (450) and a guide structure (460). The guide post (450) is disposed on the drive component (430), and the guide structure (460) is fixed relative to the cover (300). The guide post (450) cooperates with the guide structure (460). The guide structure (460) includes an unlocking path (461) and a locking path (462) that are interconnected. The unlocking path (461) is configured to guide the locking rod (440) away from the lock hole (251) via the guide post (450) and the drive component (430) during the descent of the housing (200). The locking path (462) is configured to guide the locking rod (440) into the lock hole (251) via the guide post (450) and the reset element (410) during the ascent of the housing (200).

21. The wafer carrier according to claim 20, characterized in that, The guide structure (460) further includes a blocking surface (463), a first transition path (464), and a hovering position (465). The blocking surface (463), the first transition path (464), and the hovering position (465) are arranged sequentially from the unlocking path (461) to the locking path (462). The blocking surface (463) is used to cooperate with the guide post (450) to limit the maximum travel of the locking rod (440) away from the lock hole (251). The first transition path (464) is configured to guide the guide post (450) into the hovering position (465) during the rising of the housing (200). In the hovering position (465), the locking rod (440) is held in the position away from the lock hole (251).

22. The wafer carrier according to claim 20, characterized in that, The locking assembly (400) further includes a guide seat (470) and a support seat (480), both of which are fixedly disposed on the cover (300), and a receiving space is formed between the guide seat (470) and the support seat (480). The driving component (430) and the locking rod (440) are both disposed in the receiving space, wherein the guiding structure (460) is disposed on the guide seat (470); the driving component (430) is rotatably connected to both the guide seat (470) and the support seat (480), and the driving component (430) is provided with a first tooth profile (433); the locking rod (440) is movably disposed on the support seat (480), and the locking rod (440) is provided with a second tooth profile (441) that meshes with the first tooth profile (433).

23. The wafer carrier according to claim 22, characterized in that, The drive component (430) is rotatably connected to the guide seat (470) and the support seat (480) via a rotating shaft (420). The reset element (410) includes a torsion spring. The reset element (410) is sleeved on the rotating shaft (420). One torsion arm of the reset element (410) is fixedly connected to the drive component (430), and the other torsion arm of the reset element (410) is fixedly connected to the guide seat (470) or the support seat (480).

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