Method for preparing nitrided layer by ion implantation Fe-Ce alloy assisted plasma nitriding of H13 steel and application thereof

Abstract

The present application relates to the technical field of H13 steel chemical heat treatment, in particular to a method for preparing a diffusion layer by ion implantation Fe-Ce alloy assisted plasma nitriding of H13 steel and application thereof, first, the H13 steel is polished, then different doses of Fe-Ce elements are implanted on the surface of the H13 steel by ion implantation technology, and finally the implanted H13 steel is subjected to plasma nitriding. The purpose of the present application is to use high-energy ion implantation technology to preposition crystal defects such as vacancies and dislocations on the surface of H13 steel, promote the adsorption of nitrogen and facilitate solid solution strengthening, so as to improve the surface hardness; selecting Ce element implantation can reduce the energy barrier of N diffusion to the surface of iron, improve the thickness of the diffusion layer and accelerate the nitriding efficiency; therefore, under the same nitriding conditions, ion implantation Fe-Ce can realize thicker diffusion layer and higher surface hardness, which is helpful to improve the mechanical and friction and wear properties of H13 steel, and is applied to the mold of key parts in the production of automobile, aerospace and precision instrument field.

Description

Technical Field

[0001] This invention relates to the field of chemical heat treatment technology for H13 steel, specifically to a method for preparing a diffusion layer in H13 steel by plasma nitriding assisted by ion implantation of Fe-Ce alloy and its application. Background Technology

[0002] H13 hot work die steel is widely used in die casting, hot forging, and other die manufacturing due to its excellent high-temperature strength and thermal fatigue properties. However, under harsh working conditions of high temperature, high pressure, and intense friction, the die surface is prone to wear, corrosion, and thermal fatigue cracks, severely affecting its service life. Traditional plasma nitriding still suffers from problems such as shallow nitriding layers, steep hardness gradients, high brittleness, and low nitriding efficiency, making it particularly difficult to obtain a sufficiently deep and high-performance reinforced layer while maintaining the strength and toughness of the matrix.

[0003] In existing technologies, attempts have been made to improve nitriding effects by adding rare earth elements. Rare earth elements (such as Ce) can purify the surface, activate grain boundaries, and promote the adsorption and diffusion of nitrogen atoms. However, how to efficiently and uniformly introduce rare earth elements into the surface layer of H13 steel and effectively synergize with the nitriding process to improve both nitriding efficiency and surface properties remains a technical challenge.

[0004] In view of the above-mentioned defects, the inventors of this invention have finally obtained this invention after a long period of research and practice. Summary of the Invention

[0005] The purpose of this invention is to solve the problem of how to efficiently and uniformly introduce rare earth elements into the surface layer of H13 steel and effectively synergize with the nitriding process, thereby improving nitriding efficiency and surface properties, giving it higher surface hardness and a thicker nitrided layer, making its comprehensive performance far superior to that of plasma nitriding treatment alone, and enabling it to be better applied under harsh working conditions of high temperature, high pressure and severe friction. This invention provides a method for preparing a nitrided layer of H13 steel by ion implantation of Fe-Ce alloy assisted plasma nitriding and its application.

[0006] To achieve the above objectives, this invention discloses a method for preparing a nitrided layer in H13 steel using ion implantation of Fe-Ce alloy-assisted plasma nitriding, comprising the following steps:

[0007] S1, Pretreatment of the substrate: Grind and polish the surface of the H13 steel substrate to a mirror finish and clean it thoroughly;

[0008] S2, Fe-Ce composite element ion implantation: The H13 steel matrix pretreated in step S1 is placed into the ion implantation equipment, and Fe-Ce target material is selected for ion implantation pretreatment;

[0009] S3, Plasma Nitriding: The H13 steel matrix treated in step S2 is placed into a plasma nitriding system for nitriding treatment. Hydrogen and argon are introduced while the temperature is increased by adjusting the voltage and duty cycle. After the temperature reaches the nitriding temperature, the nitriding gas source NH3 is introduced. Nitriding and heat preservation are carried out by controlling the voltage and duty cycle. After nitriding is completed, the sample is taken out after the furnace temperature cools down to room temperature.

[0010] In step S1, the H13 steel substrate is cleaned with deionized water and alcohol.

[0011] In step S2, the proportion of Ce in the Fe-Ce target is 1 wt.%.

[0012] In step S2, the dose of Fe-Ce composite element ion implantation is 1×10⁻⁶. 15 ~1×10 17 ions / cm -2 .

[0013] In step S2, the ion implantation equipment is evacuated before Fe-Ce composite element ion implantation, and the gas pressure during Fe-Ce composite element ion implantation is 1~5×10⁻⁶. -4 Pa, voltage is 30~50kV.

[0014] In step S3, the nitriding temperature is 500~550℃.

[0015] In step S3, the nitriding and heat preservation time is 4~12h.

[0016] In step S3, the nitriding insulation atmosphere is an NH3 atmosphere.

[0017] The present invention also discloses a nitrided layer prepared by plasma nitriding of H13 steel using the above-mentioned method of ion implantation of Fe-Ce alloy to prepare a nitrided layer, and the application of such a nitrided layer in molds for producing key components in the fields of automobiles, aerospace and precision instruments.

[0018] Compared with existing technologies, the advantages of this invention are as follows: This invention utilizes high-energy ion implantation, accelerating the formation of a high-energy ion beam through a high-voltage electric field, which bombards and implants into the surface of H13 steel, introducing a large number of lattice defects such as vacancies and dislocations into the surface layer of H13 steel. This reduces the diffusion activation energy, promotes nitrogen adsorption and solid solution strengthening, improves the mechanical properties of the sample, and simultaneously promotes the rapid inward migration of nitrogen atoms, significantly improving nitriding efficiency. The selection of Ce element implantation lowers the energy barrier for nitrogen atom diffusion to the iron surface, allowing the nitriding process to reach a stable nitriding flux in a shorter time, resulting in increased nitrided layer thickness. This helps improve the mechanical, tribological, and fatigue properties of H13 steel, and allows it to be applied in molds for producing key components in the automotive, aerospace, and precision instrument industries. Attached Figure Description

[0019] Figure 1 The results of the Vickers hardness test on the cross sections of Examples 1, 2, and 3 and Comparative Examples 1 and 2 are shown.

[0020] Figure 2 The results of the Vickers hardness test of the cross sections of Examples 3 and 5 and Comparative Examples 1 and 5 are shown.

[0021] Figure 3 The results of the Vickers hardness test on the cross sections of Examples 3, 6, 7 and Comparative Example 4 are shown.

[0022] Figure 4 The results of GDOES tests for Examples 1, 2, 3 and Comparative Example 1 are shown.

[0023] Figure 5 The test results are for the nitrided layer thickness OM of the cross sections in Examples 1, 2 and Comparative Example 2;

[0024] Figure 6 The test results are for the cross-sectional nitriding layer thickness OM of Examples 3, 4 and Comparative Example 3;

[0025] Figure 7 The test results are for the nitrided layer thickness OM of the cross sections in Examples 6, 7 and Comparative Example 4;

[0026] Figure 8 The results are the surface friction coefficient test results for Examples 1 and 2 and Comparative Examples 1 and 2;

[0027] Figure 9 The surface friction coefficient test results are for Examples 3, 4, 5 and Comparative Example 3;

[0028] Figure 10 The surface wear rate test results are for Examples 1 and 2 and Comparative Examples 1 and 2;

[0029] Figure 11 The surface wear rate test results are for Examples 3, 4, 5 and Comparative Example 3; Detailed Implementation

[0030] The above-mentioned and other technical features and advantages of the present invention will be described in more detail below with reference to the accompanying drawings.

[0031] Example 1

[0032] This embodiment uses an ion implantation pretreatment with an implantation volume of 1×10⁻⁶. 15 ions / cm -2 Fe-Ce ions were nitrided by plasma at 500℃ for 8 hours, denoted as IMP15-PN8-T500. The specific preparation method is as follows:

[0033] The surface of the H13 steel was polished to a mirror finish with sandpaper, cleaned, and then placed in an ion implanter for ion implantation. The ion implanter was equipped with an Fe-Ce target, and the voltage was controlled at 30-50 kV, with controlled beam current density, until the implantation dose reached 1 × 10⁻⁶. 15 ions / cm -2 Conduct the sampling process.

[0034] After cleaning following injection, the sample was placed in a plasma nitriding furnace for nitriding treatment. NH3 was introduced as the ambient atmosphere, and the voltage was set. The nitriding temperature was set to 500℃, and the temperature was maintained for 8 hours. After the holding time was completed, the sample was allowed to cool to room temperature with the furnace before being removed for relevant characterization tests.

[0035] Example 2

[0036] This embodiment uses an ion implantation pretreatment with an implantation volume of 1×10⁻⁶. 16 ions / cm -2 Fe-Ce ions were nitrided using plasma at 500℃ for 8 hours, denoted as IMP16-PN8-T500. The specific preparation method is as follows:

[0037] The surface of the H13 steel was polished to a mirror finish with sandpaper, cleaned, and then placed in an ion implanter for ion implantation. The ion implanter was equipped with an Fe-Ce target, and the voltage was controlled at 30-50 kV, with controlled beam current density, until the implantation dose reached 1 × 10⁻⁶. 16 ions / cm -2 Conduct the sampling process.

[0038] After cleaning following injection, the sample was placed in a plasma nitriding furnace for nitriding treatment. NH3 was introduced as the ambient atmosphere, and the voltage was set. The nitriding temperature was set to 500℃, and the temperature was maintained for 8 hours. After the holding time was completed, the sample was allowed to cool to room temperature with the furnace before being removed for relevant characterization tests.

[0039] Example 3

[0040] This embodiment uses an ion implantation pretreatment with an implantation volume of 1×10⁻⁶. 17 ions / cm -2 Fe-Ce ions were nitrided using plasma at 500℃ for 8 hours, denoted as IMP17-PN8-T500. The specific preparation method is as follows:

[0041] The surface of the H13 steel was polished to a mirror finish with sandpaper, cleaned, and then placed in an ion implanter for ion implantation. The ion implanter was equipped with an Fe-Ce target, and the voltage was controlled at 30-50 kV, with controlled beam current density, until the implantation dose reached 1 × 10⁻⁶. 17 ions / cm -2 Conduct the sampling process.

[0042] After cleaning following injection, the sample was placed in a plasma nitriding furnace for nitriding treatment. NH3 was introduced as the ambient atmosphere, and the voltage was set. The nitriding temperature was set to 500℃, and the temperature was maintained for 8 hours. After the holding time was completed, the sample was allowed to cool to room temperature with the furnace before being removed for relevant characterization tests.

[0043] Example 4

[0044] This embodiment uses an ion implantation pretreatment with an implantation volume of 1×10⁻⁶. 17 ions / cm -2 Fe-Ce ions were nitrided by plasma at 530℃ for 8 hours, denoted as IMP17-PN8-T530. The specific preparation method is as follows:

[0045] The surface of the H13 steel was polished to a mirror finish with sandpaper, cleaned, and then placed in an ion implanter for ion implantation. The ion implanter was equipped with an Fe-Ce target, and the voltage was controlled at 30-50 kV, with controlled beam current density, until the implantation dose reached 1 × 10⁻⁶. 17 ions / cm -2 Conduct the sampling process.

[0046] After cleaning following injection, the sample was placed in a plasma nitriding furnace for nitriding treatment. NH3 was introduced as the ambient atmosphere, and the voltage was set. The nitriding temperature was set to 530℃, and the temperature was maintained for 8 hours. After the holding time was completed, the sample was allowed to cool to room temperature with the furnace before being removed for relevant characterization tests.

[0047] Example 5

[0048] This embodiment uses an ion implantation pretreatment with an implantation volume of 1×10⁻⁶. 17 ions / cm -2 Fe-Ce ions were nitrided using plasma at 550℃ for 8 hours, denoted as IMP17-PN8-T550. The specific preparation method is as follows:

[0049] The surface of the H13 steel was polished to a mirror finish with sandpaper, cleaned, and then placed in an ion implanter for ion implantation. The ion implanter was equipped with an Fe-Ce target, and the voltage was controlled at 30-50 kV, with controlled beam current density, until the implantation dose reached 1 × 10⁻⁶. 17 ions / cm -2 Conduct the sampling process.

[0050] After cleaning following injection, the sample was placed in a plasma nitriding furnace for nitriding treatment. NH3 was introduced as the ambient atmosphere, and the voltage was set. The nitriding temperature was set to 550℃, and the temperature was maintained for 10 hours. After the holding time was completed, the sample was allowed to cool to room temperature with the furnace before being removed for relevant characterization tests.

[0051] Example 6

[0052] This embodiment uses an ion implantation pretreatment with an implantation volume of 1×10⁻⁶. 17 ions / cm -2 Fe-Ce ions were nitrided using plasma at 700℃ for 4 hours, and the resulting product was designated as IMP17-PN4-T500. The specific preparation method is as follows:

[0053] The surface of the H13 steel was polished to a mirror finish with sandpaper, cleaned, and then placed in an ion implanter for ion implantation. The ion implanter was equipped with an Fe-Ce target, and the voltage was controlled at 30-50 kV, with controlled beam current density, until the implantation dose reached 1 × 10⁻⁶. 17 ions / cm -2 Conduct the sampling process.

[0054] After cleaning following injection, the sample was placed in a plasma nitriding furnace for nitriding treatment. NH3 was introduced as the ambient atmosphere, and the voltage was set. The nitriding temperature was set to 500℃, and the temperature was maintained for 4 hours. After the holding time was completed, the sample was allowed to cool to room temperature with the furnace before being removed for relevant characterization tests.

[0055] Example 7

[0056] This embodiment uses an ion implantation pretreatment with an implantation volume of 1×10⁻⁶. 17 ions / cm -2 Fe-Ce ions were nitrided with plasma at 500℃ for 12 hours, denoted as IMP17-PN12-T500. The specific preparation method is as follows:

[0057] The surface of the H13 steel was polished to a mirror finish with sandpaper, cleaned, and then placed in an ion implanter for ion implantation. The ion implanter was equipped with an Fe-Ce target, and the voltage was controlled at 30-50 kV, with controlled beam current density, until the implantation dose reached 1 × 10⁻⁶. 17 ions / cm -2 Conduct the sampling process.

[0058] After cleaning following injection, the sample was placed in a plasma nitriding furnace for nitriding treatment. NH3 was introduced as the ambient atmosphere, and the voltage was set. The nitriding temperature was set to 500℃, and the temperature was maintained for 12 hours. After the holding time was completed, the sample was allowed to cool to room temperature with the furnace before being removed for relevant characterization tests.

[0059] Comparative Example 1

[0060] The comparative example was plasma nitriding at 500℃ for 8 hours, denoted as PN8-T500. The specific preparation method is as follows:

[0061] The surface of the H13 steel was polished to a mirror finish with sandpaper, cleaned, and then placed in a plasma nitriding furnace for nitriding treatment. NH3 was introduced as the ambient atmosphere, and the voltage was set. The nitriding temperature was set to 500℃, and the temperature was maintained for 8 hours. After the holding time was completed, the sample was allowed to cool to room temperature with the furnace before being removed for relevant characterization tests.

[0062] Comparative Example 2

[0063] This comparative example uses an ion implantation pretreatment implantation volume of 1×10⁻⁶. 14 ions / cm -2 Fe-Ce ions were nitrided by plasma at 500℃ for 8 hours, denoted as IMP14-PN8-T500. The specific preparation method is as follows:

[0064] The surface of the H13 steel was polished to a mirror finish with sandpaper, cleaned, and then placed in an ion implanter for ion implantation. The ion implanter was equipped with an Fe-Ce target, and the voltage was controlled at 30-50 kV, with controlled beam current density, until the implantation dose reached 1 × 10⁻⁶. 14 ions / cm -2 Conduct the sampling process.

[0065] After cleaning following injection, the sample was placed in a plasma nitriding furnace for nitriding treatment. NH3 was introduced as the ambient atmosphere, and the voltage was set. The nitriding temperature was set to 500℃, and the temperature was maintained for 8 hours. After the maintenance period, the sample was cooled to room temperature along with the furnace, and then removed for relevant characterization tests.

[0066] Comparative Example 3

[0067] This comparative example uses an ion implantation pretreatment implantation volume of 1×10⁻⁶. 17 ions / cm -2 Fe-Ce ions were nitrided by plasma at 480℃ for 8 hours, denoted as IMP17-PN8-T480. The specific preparation method is as follows:

[0068] The surface of the H13 steel was polished to a mirror finish with sandpaper, cleaned, and then placed in an ion implanter for ion implantation. The ion implanter was equipped with an Fe-Ce target, and the voltage was controlled at 30-50 kV, with controlled beam current density, until the implantation dose reached 1 × 10⁻⁶. 17 ions / cm -2 Conduct the sampling process.

[0069] After cleaning following injection, the sample was placed in a plasma nitriding furnace for nitriding treatment. NH3 was introduced as the ambient atmosphere, and the voltage was set. The nitriding temperature was set to 480℃, and the temperature was maintained for 8 hours. After the holding time was completed, the sample was allowed to cool to room temperature with the furnace before being removed for relevant characterization tests.

[0070] Comparative Example 4

[0071] This comparative example uses an ion implantation pretreatment implantation volume of 1×10⁻⁶. 17 ions / cm -2 Fe-Ce ions were nitrided using plasma at 500℃ for 2 hours, denoted as IMP17-PN2-T500. The specific preparation method is as follows:

[0072] The surface of the H13 steel was polished to a mirror finish with sandpaper, cleaned, and then placed in an ion implanter for ion implantation. The ion implanter was equipped with an Fe-Ce target, and the voltage was controlled at 30-50 kV, with controlled beam current density, until the implantation dose reached 1 × 10⁻⁶. 17 ions / cm -2 Conduct the sampling process.

[0073] After cleaning following injection, the sample was placed in a plasma nitriding furnace for nitriding treatment. NH3 was introduced as the ambient atmosphere, and the voltage was set. The nitriding temperature was set to 500℃ and held for 2 hours. After the holding time was completed, the sample was allowed to cool to room temperature with the furnace before being removed for relevant characterization tests.

[0074] Comparative Example 5

[0075] This comparative example involved plasma nitriding at 550℃ for 8 hours, denoted as PN8-T550. The specific preparation method is as follows:

[0076] After cleaning following injection, the sample was placed in a plasma nitriding furnace for nitriding treatment. NH3 was introduced as the ambient atmosphere, and the voltage was set. The nitriding temperature was set to 550℃, and the temperature was maintained for 8 hours. After the holding time was completed, the sample was allowed to cool to room temperature with the furnace before being removed for relevant characterization tests.

[0077] The performance of IMP15-PN8-T500, IMP16-PN8-T500, IMP17-PN8-T500, IMP17-PN8-T530, IMP17-PN8-T550, IMP17-PN8-T550, IMP17-PN4-T500, IMP17-PN12-T500, PN8-T500, IMP14-PN8-T500, IMP17-PN8-T480, IMP17-PN2-T500, and PN8-T550 prepared in Examples 1, 2, 3, 4, and 7 and Comparative Examples 1, 2, 3, 4, and 5 was characterized as follows: The microhardness distribution of the infiltrated layer was tested using an HV-1000 microhardness tester. Figures 1-3 As shown, Figure 1The results of the Vickers hardness test on the cross sections of Examples 1, 2, 3 and Comparative Examples 1, 2 show that Examples 1, 2, 3 have higher overall cross section hardness than Comparative Examples 1, 2, 3, especially the surface hardness, which is the most significantly improved. The surface microhardness of Examples 1, 2, 3 are 1059.3 HV, 1084.8 HV, and 1181.8 HV, respectively, while that of Comparative Examples 1 and 2 are 994.9 HV and 988 HV, respectively. Figure 2 The results of the Vickers hardness test of the cross sections of Examples 3 and 5 and Comparative Examples 1 and 5 are shown. The results show that Examples 3 and 5 and Comparative Examples 1 and 5 have higher cross section hardness. The surface hardness of Examples 3 and 5 is 1181.8 HV and 1157.7 HV, respectively, while the surface hardness of Comparative Examples 1 and 5 is 994.9 HV and 1003.3 HV, respectively. Figure 3 The Vickers hardness test results for the cross-sections of Examples 3, 6, 7, and Comparative Example 4 are shown. The results indicate that Examples 3, 6, 7, and Comparative Example 4 have higher cross-sectional hardness. Specifically, the surface hardnesses of Examples 3, 6, and 7 are 1181.8 HV, 1112.9 HV, and 1163 HV, respectively, while the surface hardness of Comparative Example 4 is 988 HV. The microhardness results show that the surface hardness of the comparative examples is lower than that of the examples. This can be improved by adjusting the ion implantation dose (>1×10⁻⁶). 14 ions / cm -2 The nitriding temperature (500-550℃) and nitriding time (4-12h) make ion implantation-assisted nitriding of H13 steel significantly improve the hardness of the effective hardened layer compared with traditional plasma nitriding. Figure 7 The GDOES test results for Examples 1, 2, 3, and Comparative Example 1 show that, compared to the 7.587 at% surface N concentration in Comparative Example 1, the surface N concentrations in Examples 1, 2, and 3 were significantly increased by 11.534, 11.126, and 11.87 at%, respectively. This indicates that ion implantation can significantly increase the surface N content. This enhancement effect is likely due to the large number of crystal defects (such as vacancies and dislocations) generated by ion implantation. These defects promote nitrogen adsorption and solid solution strengthening, thereby improving the mechanical properties of the samples.

[0078] The thickness of the infiltrated layer was tested using a ZEISS metallographic microscope, such as... Figures 5-7 As shown, Figure 5 a, b, and c are cross-sectional microstructure diagrams of Examples 1, 2, and Comparative Example 2, respectively. The infiltration depths of Examples 1, 2, and Comparative Example 2 are 92.07, 93.48, and 86.26 μm, respectively. Figure 6 a, b, and c are cross-sectional microstructure diagrams of Examples 3, 4, and Comparative Example 3, respectively. The nitriding layer depths of Examples 3, 4, and Comparative Example 3 are 97.18, 99.11, and 73.5 μm, respectively. The results show that the nitriding layer thickness of Examples 3 and 4 is significantly increased compared to Comparative Example 3. Figure 7a, b, and c are cross-sectional microstructure images of Examples 6, 7, and Comparative Example 4, respectively. The nitriding layer depths of Examples 6, 7, and Comparative Example 4 are 73.15, 115.84, and 59.77 μm, respectively. Analysis of the nitriding layer thickness shows that the nitriding layer thickness of FeCe-assisted ion implantation in H13 steel is significantly improved compared to traditional plasma nitriding. Ion implantation creates numerous defects on the surface, while Ce implantation lowers the energy barrier for nitrogen atom diffusion to the iron surface, allowing the nitriding process to reach a stable nitriding flux in a shorter time, thus increasing the nitriding layer thickness.

[0079] The tribological properties of the composite layer were tested using a ball-and-disc tribometer. The friction pair consisted of alumina balls (diameter Φ = 6.35 mm), the load was 5 N, the wear radius was 3 mm, the rotation speed was 314 r / min, the test time was 2000 s, and the test temperature was room temperature. Figure 8 , 9 As shown, Figure 8 The surface friction coefficient curves are for Examples 1 and 2 and Comparative Examples 1 and 2. Figure 9 The figures show the surface friction coefficient curves for Examples 3, 4, 5, and Comparative Example 3. The friction coefficients of Examples 1, 2, 3, 4, and 5 continuously increased during the initial sliding stage and eventually stabilized at 0.65, 0.55, 0.7, 0.7, and 0.55, respectively, while the friction coefficients of the Comparative Example all eventually stabilized at 0.8. Figures 10-11 As shown, Figure 10 The surface wear rate calculation results for Examples 1 and 2 and Comparative Examples 1 and 2 show that Examples 1 and 2 have lower wear rates than Comparative Examples 1 and 2. Figure 11 The surface wear rates of Examples 3, 4, and 5 and Comparative Example 3 are calculated. The results show that Examples 3, 4, and 5 have lower wear rates than Comparative Example 3. The combined friction coefficient and wear rate indicate that adjusting the ion implantation dose (>1×10⁻⁶) is effective. 14 ions / cm -2 By adjusting the nitriding temperature (500-550℃) and nitriding time (4-12h), a nitrided layer with high wear resistance can be prepared.

[0080] The above description is merely a preferred embodiment of the present invention and is illustrative rather than restrictive. Those skilled in the art will understand that many changes, modifications, and even equivalents can be made within the spirit and scope defined by the claims of the present invention, all of which will fall within the protection scope of the present invention.

Claims

1. A method for preparing a nitrided layer in H13 steel by plasma nitriding assisted by ion implantation of Fe-Ce alloy, characterized in that, Includes the following steps: S1, Pretreatment of the substrate: Grind and polish the surface of the H13 steel substrate to a mirror finish and clean it thoroughly; S2, Fe-Ce composite element ion implantation: The H13 steel matrix pretreated in step S1 is placed into the ion implantation equipment, and Fe-Ce target material is selected for ion implantation pretreatment; S3, Plasma Nitriding: The H13 steel matrix treated in step S2 is placed into a plasma nitriding system for nitriding treatment. Hydrogen and argon are introduced while the temperature is increased by adjusting the voltage and duty cycle. After the temperature reaches the nitriding temperature, the nitriding gas source NH3 is introduced. Nitriding and heat preservation are carried out by controlling the voltage and duty cycle. After nitriding is completed, the sample is taken out after the furnace temperature cools down to room temperature.

2. The method for preparing a nitrided layer in H13 steel by plasma nitriding assisted by ion implantation of Fe-Ce alloy as described in claim 1, characterized in that, In step S1, the H13 steel substrate is cleaned with deionized water and alcohol.

3. The method for preparing a nitrided layer in H13 steel by plasma nitriding assisted by ion implantation of Fe-Ce alloy as described in claim 1, characterized in that, In step S2, the proportion of Ce in the Fe-Ce target is 1 wt.%.

4. The method for preparing a nitrided layer in H13 steel by plasma nitriding assisted by ion implantation of Fe-Ce alloy as described in claim 1, characterized in that, In step S2, the dose of Fe-Ce composite element ion implantation is 1×10⁻⁶. 15 ~1×10 17 ions / cm -2 .

5. The method for preparing a nitrided layer in H13 steel by plasma nitriding assisted by ion implantation of Fe-Ce alloy as described in claim 1, characterized in that, In step S2, the ion implantation equipment is evacuated before Fe-Ce composite element ion implantation, and the gas pressure during Fe-Ce composite element ion implantation is 1~5×10⁻⁶. -4 Pa, voltage is 30~50kV.

6. The method for preparing a nitrided layer in H13 steel by ion implantation of Fe-Ce alloy-assisted plasma nitriding as described in claim 1, characterized in that, In step S3, the nitriding temperature is 500~550℃.

7. The method for preparing a nitrided layer in H13 steel by plasma nitriding assisted by ion implantation of Fe-Ce alloy as described in claim 1, characterized in that, In step S3, the nitriding and heat preservation time is 4~12h.

8. The method for preparing a nitrided layer in H13 steel by plasma nitriding assisted by ion implantation of Fe-Ce alloy as described in claim 1, characterized in that, In step S3, the nitriding insulation atmosphere is an NH3 atmosphere.

9. A nitrided layer prepared by plasma nitriding of H13 steel using the method described in any one of claims 1 to 8.

10. The method for preparing a nitrided layer using ion implantation of Fe-Ce alloy assisted plasma nitriding of H13 steel as described in claim 9 is used in molds for producing key components in the automotive, aerospace, and precision instrument industries.

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