Target exchange device and vacuum coating apparatus
By designing a target replacement device with a rotatable second storage component and a driving component, the problem of low target replacement efficiency was solved, the diversity of target selection and high efficiency of replacement were realized, and the equipment uptime and sample preparation efficiency were improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- CONTEMPORARY AMPEREX TECHNOLOGY CO LTD
- Filing Date
- 2024-11-27
- Publication Date
- 2026-05-29
AI Technical Summary
The target replacement efficiency is low. In the existing technology, the target replacement is cumbersome and inefficient, which affects the equipment uptime and sample preparation efficiency.
Design a target changing device, including a first storage component, a second storage component, and a transmission mechanism. The second storage component is rotatably configured. By rotating the second storage component, different second storage cavities are rotated to the material waiting position and connected to the transmission channel, thereby achieving diversification of target selection. The driving component improves the rotation accuracy and efficiency.
It has increased the target storage space and variety, simplified the target replacement process, reduced the frequency of vacuum chamber exposure, and improved equipment uptime and sample preparation efficiency.
Smart Images
Figure CN122105329A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of vacuum coating technology, and in particular to a target changing device and a vacuum coating equipment. Background Technology
[0002] In the vacuum coating industry, targets are widely used raw materials in physical vapor deposition (PVD). Using PVD techniques such as sputtering, evaporation, or laser melting, atoms or molecules from the target surface are deposited onto a substrate in a vacuum environment to form a thin film. Due to specific environmental requirements, replacing targets after use is cumbersome and inefficient. Summary of the Invention
[0003] In view of the above problems, this application provides a target replacement device and a vacuum coating equipment, which aims to improve the problem of low target replacement efficiency.
[0004] In a first aspect, this application provides a target material changing device, including a first storage component, a second storage component, and a transmission mechanism. The first storage component has a first storage cavity; the second storage component has multiple second storage cavities for storing target materials; the transmission mechanism is connected between the first storage component and the second storage component, and the transmission mechanism has a first transmission channel. The first storage component has a first waiting position, and the first storage cavity is connected to one end of the first transmission channel at the first waiting position. The second storage component has a second waiting position. The second storage component is rotatably configured, and the multiple second storage cavities are spaced apart around the rotation axis of the second storage component, so that at least one second storage cavity can rotate to the second waiting position and connect to the other end of the first transmission channel, and the target material can be moved from the first storage cavity to the second storage cavity along the first transmission channel.
[0005] In the technical solution of this application embodiment, the target changing device includes a first storage component, a second storage component, and a transmission mechanism. The second storage component is rotatably configured, and by rotating the second storage component, different second storage cavities can be rotated to a second waiting position and connected to the first transmission channel to receive and store the same or different types of targets from the first storage cavity. Targets from different second storage cavities within the second storage component can be supplied to the same production target position, achieving diversification of target type selection. This application embodiment increases the target storage space and the types of targets that can be stored, improving target changing efficiency.
[0006] In some embodiments, the first storage element is rotatably configured, and there are multiple first storage cavities. The multiple first storage elements are distributed at intervals around the rotation axis of the first storage element, so that at least one first storage cavity can be rotated to connect with one end of the first material waiting position and the first transmission channel.
[0007] In these embodiments, the rotational arrangement of the first storage component can, on the one hand, increase the number of first storage cavities, making it easier for multiple first storage cavities to move to the first waiting position; on the other hand, the rotation of the first storage component does not occupy additional space, thus expanding the target storage capacity without significantly increasing the volume of the target changing device.
[0008] In some embodiments, the target changing device further includes a first driving member and / or a second driving member; the output end of the first driving member is driven to the first storage member, and the first driving member is used to drive the first storage member to rotate around its own axis, so that the plurality of first storage cavities can be connected to the first transmission channel via the first waiting position; the second driving member is driven to the second storage member, and the second driving member is used to drive the second storage member to rotate around its own axis, so that the plurality of second storage cavities can be connected to the first transmission channel via the second waiting position.
[0009] In these embodiments, the first and second storage components are driven to rotate by the first and second driving components respectively, thereby improving the rotation accuracy and efficiency of the first and second storage components. This also improves the accuracy of the first storage cavity rotating to the first waiting position and the accuracy of the second storage cavity rotating to the second waiting position.
[0010] In some embodiments, the number of first storage cavities is greater than the number of second storage cavities; and / or, along the axial direction of the first storage element, the length of the first storage cavity is a first length, and along the axial direction of the second storage element, the length of the second storage cavity is a second length, the second length being greater than the first length.
[0011] In these embodiments, the rotation frequency of the second storage element is lower than that of the first storage element, so the number of second storage cavities can be reduced and their length increased, so that the second storage element can better supply material to the vacuum coating equipment.
[0012] In some embodiments, the first storage unit and the second storage unit are spaced apart along a first direction, and the first material waiting position is located on the side of the first transmission channel away from the second storage unit in the first direction, so that the target material can be moved from the first storage cavity to the first transmission channel along the first direction.
[0013] In these embodiments, by setting the first waiting position to be located on the side of the first transmission channel away from the second storage device in the first direction, the target material can be directly transported from the first storage cavity located at the first waiting position to the first transmission channel along the first direction, resulting in high transport efficiency.
[0014] In some embodiments, the target changing device further includes a third driving member located on the side of the first storage member away from the second storage member, and the third driving member is used to drive the target material to move along a first direction from the first storage cavity located at the first waiting position to the first transmission channel.
[0015] In these embodiments, by setting a third driving element to drive the target to move along the first direction, the accuracy and efficiency of the target moving from the first storage cavity to the first transmission channel are improved.
[0016] In some embodiments, the second waiting position is located on the side of the first transmission channel opposite to the first storage device in a first direction.
[0017] In these embodiments, the first storage unit and the second storage unit are located on both sides of the transmission mechanism in the first direction. After the target material is filled into the first storage cavity, it will not change its position or orientation during the process of being transported to the second storage cavity. This makes the setup convenient and provides better controllability.
[0018] In some embodiments, the target changing device further includes a fourth driving member located on the side of the first transmission channel away from the second waiting position. The fourth driving member is used to drive the target to move along the first direction from the first transmission channel to the second storage cavity located at the second waiting position.
[0019] In these embodiments, by providing a fourth driving element to drive the target to move along the first direction, the accuracy and efficiency of moving the target from the first transmission channel to the second storage cavity are improved.
[0020] In some embodiments, the first transmission channel extends along a second direction, which intersects with the first direction.
[0021] In these embodiments, the first transmission channel extends along the second direction, which allows the travel distance of the target material from the first storage cavity to the first transmission channel to be staggered from the travel distance of the target material from the first transmission channel to the second storage cavity, which is beneficial for the arrangement of the third and fourth driving members.
[0022] In some embodiments, the target changing device further includes a fifth driving member, which is located on one side of the first transmission channel in the second direction. The fifth driving member is used to drive the target to move along the second direction from one end of the first transmission channel to the other end of the first transmission channel.
[0023] In these embodiments, by setting a fifth driving member to drive the target to move along the second direction, the accuracy and efficiency of moving the target from one end of the first transmission channel to the other end of the first transmission channel are improved.
[0024] In some embodiments, each second storage cavity is provided with a corresponding feeding opening, which is located at the end of the second storage cavity away from the first transmission channel.
[0025] In these embodiments, the target material transported from the first transmission channel to the second storage cavity can be fed to the target material inlet of the vacuum coating equipment through the feeding opening, thereby enabling the selection of multiple types of target materials for vacuum coating.
[0026] In some embodiments, the target changing device further includes a blocking part for blocking the feeding opening. The blocking part is disposed on the side of the second storage member away from the first storage member. The blocking part has an avoidance hole for communicating with a feeding opening.
[0027] In these embodiments, by providing a shielding part, the target material in the second storage cavity can be reduced from being contaminated by the atmosphere inside the vacuum coating cavity, and the target material can be effectively protected.
[0028] In some embodiments, the clearance hole is located on the side of the second waiting position away from the first storage member, so that the target material can be moved from the second storage cavity located in the second waiting position to the clearance hole.
[0029] In these embodiments, the target material can sequentially pass through the second storage cavity located at the second waiting position, the feeding opening, and the target material inlet of the vacuum coating equipment from the first transmission channel along the first direction. When the target materials used are the same, the second storage unit does not need to rotate to realize the receiving of the target material and the coating production, which simplifies the operation process of the second storage unit and improves the work efficiency.
[0030] In some embodiments, a sealing valve is provided in the first transmission channel to open or close the first transmission channel.
[0031] In these embodiments, when the target material is used up and a new target material is replenished, the second storage chamber and the vacuum coating chamber do not need to be broken. The new target material can be added to the first storage chamber, which can effectively save replacement time and improve equipment uptime.
[0032] Secondly, this application provides a vacuum coating apparatus, including the target changing device of any of the first aspects of the above, and further including a vacuum coating chamber, wherein a second storage unit is at least partially located inside the vacuum coating chamber, and a first storage unit is located outside the vacuum coating chamber.
[0033] In some embodiments, the vacuum coating apparatus further includes a deposition process component located within the vacuum coating chamber, the deposition process component having an inlet for communicating with a second storage chamber, so that the target material can be moved from the second storage chamber to the inlet.
[0034] In these embodiments, the inlet of the deposition process part is used to dock with the feed opening of the second storage cavity so that the target material in the second storage cavity can be fed to the vacuum coating station.
[0035] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description
[0036] The features, advantages, and technical effects of exemplary embodiments of this application will now be described with reference to the accompanying drawings.
[0037] Figure 1 This is one of the three-dimensional structural schematic diagrams of the target replacement device and deposition process components provided in an embodiment of this application;
[0038] Figure 2 This is a partial exploded three-dimensional structural diagram of the target replacement device and deposition process component provided in an embodiment of this application;
[0039] Figure 3 This is a second three-dimensional structural schematic diagram of the target replacement device and deposition process component provided in an embodiment of this application;
[0040] Figure 4 This is a three-dimensional structural schematic diagram of the target changing device, deposition process component, and vacuum coating chamber provided in an embodiment of this application;
[0041] Figure 5 This is one of the cross-sectional views of the target changing device and deposition process components provided in an embodiment of this application (the target is located in the first storage cavity of the first waiting position);
[0042] Figure 6 This is a second cross-sectional view of the target changing device and deposition process component provided in an embodiment of this application (the target is located at one end of the first transmission channel);
[0043] Figure 7 This is the third cross-sectional view of the target changing device and deposition process provided in an embodiment of this application (the target is located at the other end of the first transmission channel);
[0044] Figure 8 This is the fourth cross-sectional view of the target replacement device and deposition process provided in an embodiment of this application (the target is replenished to the second storage cavity of the second waiting position).
[0045] The accompanying drawings may not be drawn to scale.
[0046] Explanation of reference numerals in the attached figures:
[0047] 200. Vacuum coating chamber; 300. Deposited part; 310. Feed inlet;
[0048] 1. First storage component; 10. First storage cavity; 11. First waiting position;
[0049] 2. Second storage component; 20. Second storage cavity; 202. Feeding opening; 21. Second waiting position;
[0050] 3. Transmission mechanism; 30. First transmission channel; 31. Sealing valve;
[0051] 41. First drive component; 42. Second drive component; 43. Third drive component; 44. Fourth drive component; 45. Fifth drive component;
[0052] 51. Shielding part; 511. Clearance hole;
[0053] X, the first direction; Y, the second direction. Detailed Implementation
[0054] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0055] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used in the description of this application is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms "comprising" and "having" and any variations thereof in the description, claims and foregoing drawings of this application are intended to cover non-exclusive inclusion.
[0056] In the description of the embodiments of this application, the technical terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.
[0057] Furthermore, technical terms such as "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. In the description of the embodiments of this application, "a plurality of" means two or more, unless otherwise explicitly defined.
[0058] In this application, the reference to "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments.
[0059] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "attachment" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0060] In this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, in this application, the character " / " generally indicates that the preceding and following related objects have an "or" relationship.
[0061] In the embodiments of this application, the same reference numerals denote the same components, and for the sake of brevity, detailed descriptions of the same components are omitted in different embodiments. It should be understood that the thickness, length, width, and other dimensions of various components in the embodiments of this application shown in the accompanying drawings, as well as the overall thickness, length, width, and other dimensions of the integrated device, are merely illustrative and should not constitute any limitation on this application.
[0062] In related technologies, large-sized targets are typically fixed at their positions, requiring the vacuum chamber to be opened for replacement each time. While smaller targets (such as the target tail) do not require opening the chamber each time, the old target still needs to be cleaned before replacing it with a new material system, resulting in low efficiency. Furthermore, due to limited target storage in the equipment, only a few targets can be placed in the equipment at a time, leading to frequent target replenishment and impacting equipment uptime. Therefore, the following problems exist: 1. The selection of material systems is limited in a single experiment. 2. Replacing targets requires opening the vacuum chamber, exposing both the target and the vacuum chamber to the atmosphere, leading to varying degrees of contamination. 3. Target replacement is usually done manually; frequent replacements increase personnel loading time and reduce equipment utilization, consequently affecting sample preparation efficiency and experimental development progress.
[0063] To alleviate at least one of the aforementioned problems, this application provides a target changing device. The device includes a first storage component, a second storage component, and a transmission mechanism. The second storage component is rotatably configured, allowing different second storage cavities to be rotated to a second waiting position and connected to a first transmission channel. This allows for the reception and storage of the same or different types of targets from the first storage cavity. Targets from different second storage cavities within the second storage component can be supplied to the same production target position, thus diversifying the selection of target types. This application increases the target storage space and the types of targets that can be stored, improving target changing efficiency.
[0064] Please refer to the following: Figures 1 to 5 In a first aspect, this application provides a target material changing device, including a first storage component 1, a second storage component 2, and a transmission mechanism 3. The first storage component 1 is provided with a first storage cavity 10; the second storage component 2 is provided with a plurality of second storage cavities 20, which are used to store target materials; the transmission mechanism 3 is connected between the first storage component 1 and the second storage component 2, and the transmission mechanism 3 is provided with a first transmission channel 30. The first storage component 1 has a first waiting position 11, and the first storage cavity 10 is connected to one end of the first waiting position 11 and the first transmission channel 30. The second storage component 2 has a second waiting position 21. The second storage component 2 is rotatably arranged, and the plurality of second storage cavities 20 are distributed at intervals around the rotation axis of the second storage component 2, so that at least one second storage cavity 20 can be rotated to the second waiting position 21 and connected to the other end of the first transmission channel 30, and the target material can be moved from the first storage cavity 10 to the second storage cavity 20 along the first transmission channel 30.
[0065] The first storage cavity 10 is used to store the target material. The target material in the first storage cavity 10 can enter the second storage cavity 20 for storage through the first transmission channel 30. Furthermore, by rotating the second storage component 2, different second storage cavities 20 can be rotated to the second waiting position 21 and connected to the first transmission channel 30, thereby enabling classified feeding to different second storage cavities 20.
[0066] The target material within the second storage cavity 20 can be fed to a vacuum deposition station, where it can then be bombarded with an ion beam to prepare a thin film. For example, deposition can be performed using RPD (Reactive Plasma Deposition) technology, where reactive gases are excited by an electron beam to form an ion beam, which then bombards the target material. During the bombardment, a chemical reaction occurs on the target surface, generating a solid compound film. The reactants are transported by the ion beam and react on the substrate surface, ultimately generating the desired compound film.
[0067] Optionally, the second storage cavity 20 can be connected to the target inlet 310 of the vacuum coating equipment through the feeding opening 202. The number of feeding openings 202 can be the same as the number of second storage cavities 20, and they can rotate together with the second storage component 2. When the second storage component 2 rotates to a designated position, the feeding opening 202 of the second storage cavity 20 is opposite to the target inlet 310 of the vacuum coating equipment. Then the target can be moved from the first storage cavity 10 to the inlet 310 through the feeding opening 202 to achieve feeding.
[0068] The first storage chamber 10 and the second storage chamber 20 can be located in different vacuum environments. When the target material in the second storage chamber 20 is used up or needs to be replenished, the vacuum in the first storage chamber 10 can be broken only. After the target material is added, the vacuum in the first storage chamber 10 can be evacuated to restore the vacuum state of the first storage chamber 10, thereby enabling more target material storage and rapid replacement.
[0069] The second storage unit 2 is rotatably configured. By rotating the second storage unit 2, different second storage chambers 20 can be rotated to the second waiting position 21, which connects to the first transmission channel 30, to receive and store the same or different types of target materials. Alternatively, by rotating the second storage unit 2, different second storage chambers 20 can be rotated to a designated position to supply material to the vacuum coating equipment. This designated position can be the same as or different from the second waiting position 21. This embodiment illustrates that the second storage chamber 20 can also supply material to the vacuum coating equipment when rotated to the second waiting position 21. This configuration simplifies the operation of the second storage unit 2 and improves operational efficiency.
[0070] In the multiple second storage cavities 20, different second storage cavities 20 can store different types of target materials, thereby enabling rapid replacement of different types of target materials during target coating without breaking the vacuum of the second storage cavity 20 and adding additional target materials to the second storage cavity 20. For example, the number of second storage cavities 20 can be three.
[0071] In the technical solution of this application embodiment, the target changing device includes a first storage component 1, a second storage component 2, and a transmission mechanism 3. The second storage component 2 is rotatably configured, and by rotating the second storage component 2, different second storage cavities 20 can be rotated to the second waiting position 21 and connected to the first transmission channel 30 to receive and store the same or different types of targets from the first storage cavity 10. Targets from different second storage cavities 20 within the second storage component 2 can be supplied to the same production target position, realizing a diversification of target type selection. This application embodiment increases the target storage space and the types of targets that can be stored, improving the target changing efficiency.
[0072] When changing to a new type of target material, targets from different second storage cavities 20 can be supplied to the same production target position. In the same production target position, there is no need to open the cavity to clean the old target or replenish the new target material in the middle. The coating operation of targets corresponding to multiple materials can be carried out in situ at the same time, which improves the coating efficiency and thus improves the production or experimental research and development efficiency accordingly.
[0073] In some embodiments, refer to Figure 2 The first storage component 1 is rotatably configured, and there are multiple first storage cavities 10. The multiple first storage components 1 are distributed at intervals around the rotation axis of the first storage component 1, so that at least one first storage cavity 10 can rotate to the first waiting position 11 and connect to one end of the first transmission channel 30.
[0074] The first storage component 1 is rotatably configured so that different first storage cavities 10 can be rotated to the first waiting position 11 and connected to the first transmission channel 30 by rotating the first storage component 1, so as to transport the same or different types of target materials to the second storage cavity 20.
[0075] In these embodiments, the rotational arrangement of the first storage component 1 can, on the one hand, increase the number of first storage cavities 10, making it easier for multiple first storage cavities 10 to move to the first waiting position 11. On the other hand, the rotation of the first storage component 1 does not occupy additional space, thus expanding the target storage capacity without significantly increasing the volume of the target changing device.
[0076] For example, the first storage device 1 may be disc-shaped, with the axis of rotation as its center, and each first storage cavity 10 is equidistant from the axis of rotation. There may be dozens of first storage cavities 10, and each first storage cavity 10 may be filled with one target material, so that the first storage device 1 can be filled with dozens of targets at the same time, which has high space utilization and does not require frequent replenishment of targets.
[0077] Alternatively, the first storage unit 1 can also be configured to be movable within the same plane. By translating, different first storage cavities 10 are located at the first waiting position 11 and connected to the first transmission channel 30. Accordingly, the space required for the first storage unit 1 to be translated is relatively large.
[0078] In some embodiments, the target changing device further includes a first driving member 41 and / or a second driving member 42; the output end of the first driving member 41 is connected to the first storage member 1 in a transmission manner, and the first driving member 41 is used to drive the first storage member 1 to rotate around its own axis, so that the plurality of first storage cavities 10 can be connected to the first transmission channel 30 via the first waiting position 11; the second driving member 42 is connected to the second storage member 2 in a transmission manner, and the second driving member 42 is used to drive the second storage member 2 to rotate around its own axis, so that the plurality of second storage cavities 20 can be connected to the first transmission channel 30 via the second waiting position 21.
[0079] The first driving component 41 and the second driving component 42 can be communicatively connected to a control system (e.g., an industrial computer, PLC, etc.). The control system can electrically or pneumatically control the operation of the first driving component 41 and the second driving component 42, resulting in higher precision and better controllability. Optionally, the first driving component 41 may include a drive motor, a lead screw, gears, or other transmission structures. By controlling the rotation of the drive motor, the lead screw is driven to rotate, which in turn drives the gear meshing with the lead screw to rotate, thereby rotating the first storage component 1, which is fixedly connected to the gear. The configuration and principle of the second driving component 42 can be the same as or similar to that of the first driving component 41, and will not be elaborated further here.
[0080] In these embodiments, the first storage unit 1 and the second storage unit 2 are driven to rotate by the first driving member 41 and the second driving member 42 respectively, thereby improving the rotation accuracy and efficiency of the first storage unit 1 and the second storage unit 2. That is, it improves the accuracy of the first storage cavity 10 rotating to the first waiting position 11 and the accuracy of the second storage cavity 20 rotating to the second waiting position 21.
[0081] In some embodiments, the number of first storage cavities 10 is greater than the number of second storage cavities 20; and / or, along the axial direction of the first storage element 1, the length of the first storage cavity 10 is a first length, and along the axial direction of the second storage element 2, the length of the second storage cavity 20 is a second length, the second length being greater than the first length.
[0082] To facilitate the precise storage and transport of the target material within the first storage cavity 10, different types of targets are stored in separate sections within the first storage unit 1. Each first storage cavity 10 can hold a relatively small number of targets, such as one or two. Therefore, the first length of the first storage cavity 10 is relatively short, but the number of targets can be set to be large to reduce the frequency of replacement. The second storage cavity 20 is relatively closer to the coating station. Its longer second length allows for the storage of a larger number of targets within a single second storage cavity 20. The relatively smaller number of targets reduces the space occupied by the target in the vacuum coating chamber 200, which is beneficial for its small size. For example, the ratio of the first length to the second length can be 1:3. For instance, the target material can be a cylinder with a diameter of approximately 30 mm and a height of approximately 40 mm. The first length can be approximately 40 mm, and the second length can be approximately 120 mm. The radial dimensions of the first storage cavity 10 and the second storage cavity 20 can be adaptively set according to the radial dimensions of the target material.
[0083] In these embodiments, the rotation frequency of the second storage unit 2 is lower than that of the first storage unit 1, so the number of second storage cavities 20 can be reduced and their length increased, so that the second storage unit 2 can better supply materials to the vacuum coating equipment.
[0084] Please refer to the following: Figures 5 to 8 , Figures 5 to 8The diagram shows cross-sectional views of the target material moving to different positions within the target material changing device.
[0085] Reference Figure 5 and Figure 6 In some embodiments, the first storage unit 1 and the second storage unit 2 are spaced apart along the first direction X, and the first material waiting position 11 is located on the side of the first transmission channel 30 away from the second storage unit 2 in the first direction X, so that the target material can be moved from the first storage cavity 10 to the first transmission channel 30 along the first direction X.
[0086] The first direction X can be referenced. Figure 5 The X-axis direction in, such as Figure 5 As shown, the first material waiting position 11 and the first transmission channel 30 are arranged opposite each other in the first direction X.
[0087] In these embodiments, by setting the first waiting position 11 to be located on the side of the first transmission channel 30 away from the second storage unit 2 in the first direction X, the target material can be directly transported from the first storage cavity 10 located at the first waiting position 11 to the first transmission channel 30 along the first direction X, resulting in high transport efficiency.
[0088] In some embodiments, the target changing device further includes a third driving member 43, which is located on the side of the first storage member 1 away from the second storage member 2. The third driving member 43 is used to drive the target material to move along the first direction X from the first storage cavity 10 located at the first waiting position 11 to the first transmission channel 30.
[0089] The third drive component 43 can communicate with the first drive component 41 and the control system. The control system can electrically or pneumatically control the operation of the third drive component 43, resulting in higher precision and better controllability. For example, the third drive component 43 may include a servo motor, a lead screw, and a push block. By controlling the rotation of the servo motor, the lead screw is driven to extend and retract. The extension and retraction of the lead screw causes the push block connected to it to move linearly. The push block can then contact and push the target material.
[0090] In these embodiments, by setting a third driving member 43 to drive the target to move along the first direction X, the accuracy and efficiency of the target moving from the first storage cavity 10 to the first transmission channel 30 are improved.
[0091] Reference Figure 7 and Figure 8 In some embodiments, the second waiting position 21 is located on the side of the first transmission channel 30 opposite to the first storage device 1 in the first direction X.
[0092] In these embodiments, the first storage unit 1 and the second storage unit 2 are located on both sides of the transmission mechanism 3 in the first direction X. After the target material is filled into the first storage cavity 10, it will not change its position or orientation during the process of being transported to the second storage cavity 20. This makes the setup convenient and more controllable.
[0093] In some embodiments, the target changing device further includes a fourth driving member 44, which is located on the side of the first transmission channel 30 away from the second waiting position 21. The fourth driving member 44 is used to drive the target to move along the first direction X from the first transmission channel 30 to the second storage cavity 20 located in the second waiting position 21.
[0094] The fourth drive unit 44 can communicate with the third drive unit 43 and the control system. The control system can electrically or pneumatically control the operation of the fourth drive unit 44, resulting in higher precision and better controllability. The configuration and principle of the fourth drive unit 44 can be the same as or similar to those of the third drive unit 43, and will not be elaborated here.
[0095] In these embodiments, by setting a fourth driving member 44 to drive the target to move along the first direction X, the accuracy and efficiency of the target moving from the first transmission channel 30 to the second storage cavity 20 are improved.
[0096] Reference Figure 6 and Figure 7 In some embodiments, the first transmission channel 30 extends along the second direction Y, which intersects with the first direction X.
[0097] The second direction Y can be referenced. Figure 1 The Y-axis direction is set at an angle to the X-axis direction. For example, the first direction X can be perpendicular to the second direction Y.
[0098] In these embodiments, the first transmission channel 30 extends along the second direction Y, which allows the travel distance of the target material from the first storage cavity 10 into the first transmission channel 30 to be staggered with the travel distance of the target material from the first transmission channel 30 to the second storage cavity 20. This facilitates the arrangement of the third driving member 43 and the fourth driving member 44. For example, the third driving member 43 and the fourth driving member 44 are spaced apart along the second direction Y.
[0099] In some embodiments, the target changing device further includes a fifth driving member 45, which is located on one side of the first transmission channel 30 in the second direction Y. The fifth driving member 45 is used to drive the target to move along the second direction Y from one end of the first transmission channel 30 to the other end of the first transmission channel 30.
[0100] The fifth drive component 45 can communicate with the third drive component 43 and the control system. The control system can electrically or pneumatically control the operation of the fifth drive component 45, resulting in higher precision and better controllability. The configuration and principle of the fifth drive component 45 can be the same as or similar to those of the third drive component 43. The difference lies in the driving direction of the fifth drive component 45, which is different from that of the third drive component 43.
[0101] In these embodiments, by setting the fifth driving member 45 to drive the target to move along the second direction Y, the accuracy and efficiency of moving the target from one end of the first transmission channel 30 to the other end of the first transmission channel 30 are improved.
[0102] In some embodiments, each second storage cavity 20 is provided with a corresponding feeding opening 202, and the feeding opening 202 is located at one end of the second storage cavity 20 away from the first transmission channel 30.
[0103] The radial dimension of the feeding opening 202 can be the same as the radial dimension of the second storage cavity 20. The number of feeding openings 202 is the same as the number of second storage cavities 20, and they can rotate together with the second storage component 2. When the second storage component 2 rotates to a designated position, the feeding opening 202 of the second storage cavity 20 is opposite to the target material inlet 310 of the vacuum coating equipment. Then the target material can be moved from the first storage cavity 10 to the inlet 310 through the feeding opening 202 to achieve feeding.
[0104] In these embodiments, the target material transported from the first transmission channel 30 to the second storage cavity 20 can be fed to the target material inlet 310 of the vacuum coating equipment through the feeding opening 202, thereby enabling the selection of multiple types of target materials for vacuum coating.
[0105] Reference Figure 2 In some embodiments, the target changing device further includes a blocking part 51 for blocking the feeding opening 202. The blocking part 51 is disposed on the side of the second storage unit 2 away from the first storage unit 1. The blocking part 51 has an avoidance hole 511 for communicating with a feeding opening 202.
[0106] The shielding part 51 can shield the feed opening 202 that has not rotated to communicate with the feed inlet 310, thereby reducing contamination of the target material that has not participated in the coating process. When the second storage cavity 20 rotates with the second storage unit 2 to the designated position, it can communicate with the clearance hole 511, thereby communicating with the feed inlet 310, and thus realizing the feeding of the target material. For example, the shielding part 51 can be plate-shaped and is disposed between the deposition process unit 300 and the second storage unit 2. The deposition process unit 300 can be the coating station of a vacuum coating equipment, and the deposition process unit 300 has a feed inlet 310 as the target material feed inlet 310 communicating with the clearance hole 511.
[0107] In these embodiments, by providing a shielding part 51, the target material in the second storage cavity 20 can be reduced from being contaminated by the atmosphere inside the vacuum coating cavity, and the target material can be effectively protected.
[0108] In some embodiments, the clearance hole 511 is located on the side of the second waiting position 21 away from the first storage member 1, so that the target material can be moved from the second storage cavity 20 located in the second waiting position 21 to the clearance hole 511.
[0109] In these embodiments, the target material can pass through the second storage cavity 20 located at the second waiting position 21, the feeding opening 202, and the avoidance hole 511 from the first transmission channel 30 along the first direction X and enter the target material inlet 310 of the vacuum coating equipment. When the target materials used are the same, the second storage unit 2 does not need to be rotated to realize the receiving of the target material and the coating production, which simplifies the operation process of the second storage unit 2 and improves the work efficiency.
[0110] Reference Figure 2 and Figure 5 In some embodiments, a sealing valve 31 is provided in the first transmission channel 30 to open or close the first transmission channel 30.
[0111] The sealing valve 31 is used to adjust the opening of the first transmission channel 30. It can open the first transmission channel 30 to allow the target material to pass through, or it can seal the first transmission channel 30, allowing the first storage cavity 10 and the second storage cavity 20 to be located in two separate vacuum environments. This facilitates breaking the vacuum in the first storage cavity 10 without affecting the vacuum state of the second storage cavity 20. After the target material is loaded into the first storage cavity 10, the first storage cavity 10 and the first transmission channel 30 connected to it are evacuated to ensure that the states of the first storage cavity 10 and the second storage cavity 20 are consistent. Then, the sealing valve 31 can be opened to allow the target material from the first storage cavity 10 to be transferred to the second storage cavity 20.
[0112] In these embodiments, when the target material is used up and a new target material is replenished, the second storage chamber 20 and the vacuum coating chamber 200 do not need to be broken. The new target material can be replenished to the first storage chamber 10, which can effectively save replacement time and improve equipment uptime.
[0113] For example, the sealing valve 31 can be a cylinder valve, which includes a valve body, a valve core, and a valve seat. When the cylinder valve is in the closed state, the valve core is completely sealed to the valve seat, preventing fluid from passing through the valve. When it is necessary to open the valve, the valve core is removed from the valve seat by applying an external force or a control signal, thereby allowing fluid to pass through the valve.
[0114] Please see Figure 3 and Figure 4 Secondly, this application provides a vacuum coating apparatus, including the target changing device of any of the first aspects of the above embodiments, and further including a vacuum coating chamber 200, wherein the second storage member 2 is at least partially located inside the vacuum coating chamber 200, and the first storage member 1 is located outside the vacuum coating chamber 200.
[0115] Since the vacuum coating equipment provided in the second aspect of this application includes the target changing device provided in any of the embodiments of the first aspect, the vacuum coating equipment provided in the second aspect of this application has the beneficial effects of any of the embodiments of the target changing device in the first aspect, which will not be repeated here.
[0116] The vacuum coating chamber 200 is a process area for coating material surfaces in a vacuum environment. Physical or chemical methods can be used to evaporate or sputter a target material onto the substrate surface under vacuum conditions to form one or more thin films. The coating station of the vacuum coating equipment is located inside the vacuum coating chamber 200.
[0117] In the second aspect of this application, the first storage cavity 10 and the second storage cavity 20 can be located in two vacuum environments, which makes it easy to break the vacuum in the first storage cavity 10 without affecting the vacuum state of the second storage cavity 20. When the target material is used up and a new target material is added, the second storage cavity 20 and the vacuum coating chamber 200 do not need to be broken. The new target material can be added to the first storage cavity 10, which can effectively save replacement time and improve equipment uptime.
[0118] In some embodiments, the vacuum coating apparatus further includes a deposition process component 300 located in the vacuum coating chamber 200. The deposition process component 300 has an inlet 310 for communicating with the second storage chamber 20, so that the target material can be moved from the second storage chamber 20 to the inlet 310.
[0119] The deposition process component 300 is a deposition station of a vacuum coating equipment. The deposition process component 300 has a receiving tank. The inlet 310 can be located at the bottom of the receiving tank. The ion beam bombards the target material that extends into the receiving tank to prepare a thin film and coats it on the surface of the substrate located at the deposition station.
[0120] In these embodiments, the inlet 310 of the deposition process component 300 is used to dock with the feed opening 202 of the second storage cavity 20 so that the target material in the second storage cavity 20 is fed to the vacuum coating station.
[0121] According to some embodiments of this application, refer to Figures 1 to 8This application provides a target material changing device, including a first storage component 1, a second storage component 2, and a transmission mechanism 3. The first storage component 1 is provided with a first storage cavity 10; the second storage component 2 is provided with a plurality of second storage cavities 20, which are used to store target materials; the transmission mechanism 3 is connected between the first storage component 1 and the second storage component 2, and the transmission mechanism 3 is provided with a first transmission channel 30. The first storage component 1 has a first waiting position 11, and the first storage cavity 10 is connected to one end of the first waiting position 11 and the first transmission channel 30. The second storage component 2 has a second waiting position 21. The second storage component 2 is rotatably arranged, and the plurality of second storage cavities 20 are distributed at intervals around the rotation axis of the second storage component 2, so that at least one second storage cavity 20 can be rotated to the second waiting position 21 and connected to the other end of the first transmission channel 30, and the target material can be moved from the first storage cavity 10 to the second storage cavity 20 along the first transmission channel 30. The first storage component 1 is rotatably configured, and there are multiple first storage cavities 10. These multiple first storage components 1 are spaced apart around the rotation axis of the first storage component 1, so that at least one first storage cavity 10 can rotate to connect with one end of the first waiting position 11 and the first transmission channel 30. The target changing device also includes a first driving component 41 and a second driving component 42; the output end of the first driving component 41 is driven to the first storage component 1, and the first driving component 41 is used to drive the first storage component 1 to rotate around its own axis, so that all multiple first storage cavities 10 can connect with the first transmission channel 30 via the first waiting position 11; the second driving component 42 is driven to the second storage component 2, and the second driving component 42 is used to drive the second storage component 2 to rotate around its own axis, so that all multiple second storage cavities 20 can connect with the first transmission channel 30 via the second waiting position 21. The first storage unit 1 and the second storage unit 2 are spaced apart along the first direction X. The first waiting position 11 is located on the side of the first transmission channel 30 opposite to the second storage unit 2 in the first direction X, so that the target material can be moved from the first storage cavity 10 to the first transmission channel 30 along the first direction X. The target material changing device also includes a third driving member 43, which is located on the side of the first storage unit 1 opposite to the second storage unit 2. The third driving member 43 is used to drive the target material to move along the first direction X from the first storage cavity 10 located at the first waiting position 11 to the first transmission channel 30. The second waiting position 21 is located on the side of the first transmission channel 30 opposite to the first storage unit 1 in the first direction X. The target material changing device also includes a fourth driving member 44, which is located on the side of the first transmission channel 30 opposite to the second waiting position 21. The fourth driving member 44 is used to drive the target material to move along the first direction X from the first transmission channel 30 to the second storage cavity 20 located at the second waiting position 21. The first transmission channel 30 extends along the second direction Y, which intersects with the first direction X.The target changing device also includes a fifth driving member 45, which is located on one side of the first transmission channel 30 in the second direction Y. The fifth driving member 45 is used to drive the target material to move along the second direction Y from one end of the first transmission channel 30 to the other end of the first transmission channel 30. Each second storage cavity 20 is correspondingly provided with a feeding opening 202, which is located at the end of the second storage cavity 20 away from the first transmission channel 30. The target changing device also includes a blocking part 51 for blocking the feeding opening 202. The blocking part 51 is located on the side of the second storage unit 2 away from the first storage unit 1, and the blocking part 51 has a clearance hole 511 for communicating with a feeding opening 202. The clearance hole 511 is located on the side of the second waiting position 21 away from the first storage unit 1, so that the target material can move from the second storage cavity 20 located in the second waiting position 21 to the clearance hole 511. A sealing valve 31 is provided in the first transmission channel 30 to open or close the first transmission channel 30. The deposition process component 300 of the vacuum coating equipment has an inlet 310, which is used to communicate with the second storage cavity 20 so that the target material can be moved from the second storage cavity 20 to the inlet 310.
[0122] For example, the following describes an optional workflow of the target changing device of this application in conjunction with the above embodiments:
[0123] A1. Without opening the second storage cavity 20, the first storage component 1 is emptied and the first storage cavity 10 is exposed (at this time, the target material in the second storage cavity 20 can be normally fed to the inlet 310 for coating operation).
[0124] A2, manually fill the first storage cavity 10 of the first storage component 1 with the required type of target material (≥3 types).
[0125] A3, seal the first storage device 1 and evacuate its interior.
[0126] A4, the first driving component 41 is started, driving the first storage component 1 to rotate, and sending the required corresponding type of target material to the first waiting position 11.
[0127] A5, the third driving component 43 is activated, driving the target material from the first waiting position 11 along the first direction X to one end of the first transmission channel 30 (the rising position). Its operation flow can be referred to... Figure 5 and Figure 6 As shown.
[0128] A6, the fifth driving component 45 is activated, driving the target material from one end of the first transmission channel 30 (the rising position) along the second direction Y to the other end of the first transmission channel 30 (the material waiting position in the transmission channel). Its operation flow can be referred to... Figure 6 and Figure 7 As shown.
[0129] A7, the fourth driving component 44 is activated, driving the target material from the other end of the first transmission channel 30 (the material waiting position of the transmission channel) along the first direction X to the second storage cavity 20 of the second storage component 2 located at the second material waiting position 21. Its operation flow can be referred to... Figure 7 and Figure 8 As shown.
[0130] A8. Repeat steps A1 to A7 until the second storage structure is filled with the corresponding target material.
[0131] A9, start the process and start production.
[0132] A10, when producing the second type of target material, the second drive unit 42 is activated to drive the second storage unit 2 to rotate, and the target material of the required type is rotated to the second waiting position 21.
[0133] A11, target replacement and replenishment, end.
[0134] Although this application has been described with reference to preferred embodiments, various modifications can be made thereto and components can be replaced with equivalents without departing from the scope of this application. In particular, the technical features mentioned in the various embodiments can be combined in any manner, provided there is no structural conflict. This application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.
Claims
1. A target changing device, characterized in that, include: The first storage component has a first storage cavity; The second storage device is provided with multiple second storage cavities, the second storage cavities being used to store the target material; A transmission mechanism is connected between the first storage device and the second storage device, and the transmission mechanism is provided with a first transmission channel. The first storage device has a first waiting position, and the first storage cavity is connected to one end of the first transmission channel at the first waiting position. The second storage device has a second waiting position. The second storage device is rotatably configured, and a plurality of second storage cavities are distributed at intervals around the rotation axis of the second storage device, so that at least one second storage cavity can rotate to the other end of the first transmission channel at the second waiting position, and the target material can be moved from the first storage cavity to the second storage cavity along the first transmission channel.
2. The target changing device according to claim 1, characterized in that, The first storage component is rotatably configured, and there are multiple first storage cavities. The multiple first storage components are distributed at intervals around the rotation axis of the first storage component, so that at least one first storage cavity can rotate to connect with one end of the first material waiting position and the first transmission channel.
3. The target changing device according to claim 2, characterized in that, The target replacement device further includes: A first driving element, the output end of which is connected to the first storage element in a transmission manner, is used to drive the first storage element to rotate around its own axis, so that all of the first storage cavities can be connected to the first transmission channel via the first material receiving position; and / or, The second driving member is connected to the second storage member in a transmission manner. The second driving member is used to drive the second storage member to rotate around its own axis so that the multiple second storage cavities can be connected to the first transmission channel via the second material waiting position.
4. The target changing device according to claim 2, characterized in that, The number of the first storage cavities is greater than the number of the second storage cavities; And / or, along the axial direction of the first storage device, the length of the first storage cavity is a first length, and along the axial direction of the second storage device, the length of the second storage cavity is a second length, the second length being greater than the first length.
5. The target changing device according to any one of claims 1 to 4, characterized in that, The first storage component and the second storage component are spaced apart along a first direction, and the first material waiting position is located on the side of the first transmission channel opposite to the second storage component in the first direction, so that the target material can be moved from the first storage cavity to the first transmission channel along the first direction.
6. The target changing device according to claim 5, characterized in that, The target changing device further includes a third driving component, which is located on the side of the first storage component away from the second storage component. The third driving component is used to drive the target material to move along the first direction from the first storage cavity located at the first waiting position to the first transmission channel.
7. The target changing device according to claim 5, characterized in that, The second waiting position is located on the side of the first transmission channel opposite to the first storage device in the first direction.
8. The target changing device according to claim 7, characterized in that, The target changing device further includes a fourth driving component, which is located on the side of the first transmission channel away from the second waiting position. The fourth driving component is used to drive the target material to move along the first direction from the first transmission channel to the second storage cavity located at the second waiting position.
9. The target changing device according to claim 5, characterized in that, The first transmission channel extends along a second direction, which intersects with the first direction.
10. The target changing device according to claim 9, characterized in that, The target changing device further includes a fifth driving member, which is located on one side of the first transmission channel in the second direction. The fifth driving member is used to drive the target to move along the second direction from one end of the first transmission channel to the other end of the first transmission channel.
11. The target changing device according to any one of claims 1 to 10, characterized in that, Each of the second storage cavities is provided with a corresponding feeding opening, which is located at the end of the second storage cavity away from the first transmission channel.
12. The target changing device according to claim 11, characterized in that, The target changing device further includes a blocking part for blocking the feeding opening. The blocking part is disposed on the side of the second storage unit away from the first storage unit. The blocking part has an avoidance hole for communicating with one of the feeding openings.
13. The target changing device according to claim 12, characterized in that, The clearance hole is located on the side of the second waiting position away from the first storage component, so that the target material can be moved from the second storage cavity located in the second waiting position to the clearance hole.
14. The target changing device according to any one of claims 1 to 13, characterized in that, A sealing valve is provided in the first transmission channel to open or close the first transmission channel.
15. A vacuum coating apparatus, characterized in that, The vacuum coating equipment includes a target changing device as described in any one of claims 1 to 13, and further includes a vacuum coating chamber, wherein the second storage unit is at least partially located inside the vacuum coating chamber, and the first storage unit is located outside the vacuum coating chamber.
16. The vacuum coating equipment according to claim 15, characterized in that, The vacuum coating equipment also includes a deposition process component located in the vacuum coating chamber. The deposition process component has an inlet for communicating with the second storage cavity, so that the target material can be moved from the second storage cavity to the inlet.