Flow channel structure, fluid measuring device, and fluid control device

Abstract

The present application provides a flow passage structure, a fluid measuring device and a fluid control device, which are fixed without exerting unnecessary force on a fluid resistance member and ensure sealing, and comprise a pipe member (11a, 11b) constituting a flow passage (R), a ceramic fluid resistance member (2) provided in the flow passage (R) and having one or more resistance flow passages (2a), and a fixing mechanism (3) fixing the fluid resistance member (2) in the flow passage (R) by being clamped by the pipe member (11a, 11b), the fixing mechanism (3) having a sealing portion (4) sealing an outer circumferential surface of the fluid resistance member (2) and a pressing and fixing portion (5) pressing and fixing the outer circumferential surface of the fluid resistance member (2), the sealing portion (4) and the pressing and fixing portion (5) being provided at least at different positions in the axial direction of the fluid resistance member (2).

Description

Technical Field

[0001] This invention relates to flow channel structures, fluid measurement devices, and fluid control devices. Background Technology

[0002] As shown in Patent Document 1, conventional fluid resistance elements sometimes have very fine multiple resistance channels formed on a cylindrical ceramic. Compared with conventional metal fluid resistance elements, such ceramic fluid resistance elements have physical properties such as near-zero thermal expansion coefficient, high hardness, and excellent heat resistance and corrosion resistance. In particular, they can measure flow rate with high precision when controlling small flow rates.

[0003] Furthermore, in Patent Document 1, in order to fix the ceramic fluid resistance member to the flow channel, a metal cover member is used to cover the outer peripheral surface of the fluid resistance member, and a force is applied to the cover member from the radial outside to perform riveting, thereby tightening the fluid resistance member from the radial outside, thus fixing the fluid resistance member and ensuring sealing. Existing technical documents

[0004] Patent Document 1: Japanese Patent Publication No. 2024-27783

[0005] However, in the structure of Patent Document 1, the fluid resistance member and the seal are fixed at the same location by riveting the covering member. Due to the stress applied to ensure the seal, the ceramic may crack. As a result, it is difficult to ensure the seal while fixing the fluid resistance member. Summary of the Invention

[0006] Therefore, in view of the above-mentioned issues, the main objective of the present invention is to fix the fluid resistance member and ensure a tight seal without applying unnecessary force to it.

[0007] That is, the flow channel structure of the present invention is characterized by comprising: a pipe member constituting a flow channel for fluid flow; a ceramic fluid resistance member disposed in the flow channel and having one or more resistance channels; and a fixing mechanism that fixes the fluid resistance member to the flow channel by being clamped by the pipe member, the fixing mechanism comprising: a sealing part that seals the outer peripheral surface of the fluid resistance member; and a pressing fixing part that presses and fixes the outer peripheral surface of the fluid resistance member, the sealing part and the pressing fixing part being disposed at different positions in the axial direction of the fluid resistance member.

[0008] According to this flow channel structure, the sealing part and the pressing and fixing part are arranged at different positions in the axial direction of the fluid resistance member. Therefore, it is not necessary to ensure sealing through the pressing and fixing part, thereby reducing the stress applied to the fluid resistance member. Furthermore, by separating the sealing part from the pressing and fixing part, it is not necessary to deform the sealing part through riveting or other means of metal components. This allows for the use of components with excellent sealing properties, such as resin parts, thereby ensuring sealing. As a result, it is possible to fix and ensure sealing without applying unnecessary force to the fluid resistance member.

[0009] Preferably, the fixing mechanism further comprises: an annular washer disposed on the outer peripheral surface of the fluid resistance member and held by the pipe member; and a cylindrical fixing member disposed on one or the other side of the washer on the outer peripheral surface of the fluid resistance member, the sealing portion being disposed between the outer peripheral surface of the fluid resistance member and the inner peripheral surface of the fixing member to seal between the outer peripheral surface of the fluid resistance member and the inner peripheral surface of the fixing member, and the pressing fixing portion being formed by the fixing member. According to this structure, a fluid resistance component can be placed in the flow channel by clamping an annular gasket with a pair of pipe components. Since the force clamping the pair of pipe components does not act on the fluid resistance component, damage such as breakage of the fluid resistance component can be prevented.

[0010] Preferably, the fixing members are respectively disposed on one side and the other side of the washer, and clamp and fix the washer. According to this structure, two fixed members and a fluid resistance member are fixed relative to the gasket, which ensures that the fluid resistance member will not shift regardless of the direction of the fluid flowing in the fluid resistance member.

[0011] Preferably, the sealing portion also seals between the opposing surfaces of the fixing member and the gasket. This structure prevents fluid from leaking through the gap between the gasket and the fluid resistance member and through the gap between the fixing member and the gasket.

[0012] Preferably, the opposing surface of the fixing member has an inclined pressing surface that presses the sealing portion against the outer peripheral surface of the fluid resistance member and the opposing surface of the gasket. According to this structure, by pressing the sealing part with the pressing surface, it is possible to simultaneously achieve both a seal between the outer peripheral surface of the fluid resistance member and the inner peripheral surface of the fixed member, and a seal between the opposing surfaces of the fixed member and the gasket.

[0013] Furthermore, the flow channel structure of the present invention is characterized by comprising: a pipe member constituting a flow channel for fluid flow; a ceramic fluid resistance member disposed in the flow channel and having one or more resistance channels; and a fixing mechanism that fixes the fluid resistance member to the flow channel by being clamped by the pipe member, the fixing mechanism comprising: a sealing portion made of an elastic material that seals the outer peripheral surface of the fluid resistance member; an annular gasket disposed on the outer peripheral surface of the fluid resistance member and clamped by the pipe member; a cylindrical fixing member disposed on one or the other side of the gasket on the outer peripheral surface of the fluid resistance member; a cylindrical intermediate support portion disposed between the outer peripheral surface of the fluid resistance member and the inner peripheral surface of the fixing member; and a pressing fixing portion that presses and fixes the outer peripheral surface of the fluid resistance member, wherein the sealing portion and the pressing fixing portion are disposed at different positions in the axial direction of the fluid resistance member, and the intermediate support portion extends outward beyond the end face opposite to the end face of the fixing member that contacts the gasket. According to this structure, the sealing area can be increased by the intermediate support, thereby improving the sealing performance. In addition, the intermediate support extends outward, thereby making the contact state of the sealing member in the end face of the fixed member reliable, thus maintaining a stable seal and maintaining high sealing reliability over a long period of time.

[0014] As a specific embodiment of the pressing and fixing part, it is preferable that the pressing and fixing part is formed on the opposite side of the end face that contacts the washer in the fixing member.

[0015] Preferably, an annular groove is formed on the end face opposite to the end face that contacts the washer in the fixing member, and the pressing fixing part is formed by riveting the inner part that is closer to the fluid resistance member than the groove. According to this structure, a groove is formed on the end face of the fixing member, and the inner part of the groove is riveted to form a pressing fixing part, thus making the pressing fixing part a simple structure. In addition, by forming a groove in the end face near the radial inner side, the riveted part (annular part) can be thinned, thereby facilitating the riveting operation, reducing the stress applied to the fluid resistance member, and fixing the fluid resistance member.

[0016] Preferably, the pressing and fixing part is formed by riveting the outer peripheral surface opposite to the end face that contacts the washer in the fixing member. According to this structure, the outer peripheral surface of the fixing member is riveted to form a pressing fixing part, so the riveting process is not limited to the end face, and the degree of freedom of processing is increased. In particular, when the sealing part has the above-mentioned tubular part, the pressing force generated by riveting is distributed by the tubular part and acts on the fluid resistance member, so stress concentration can be suppressed, thereby preventing damage or deformation of the fluid resistance member and achieving a stable seal.

[0017] Furthermore, the fluid measuring device of the present invention is characterized by comprising: the above-described flow channel structure; an upstream pressure sensor for measuring the upstream pressure of the fluid resistance member in the flow channel; and a downstream pressure sensor for measuring the downstream pressure of the fluid resistance member in the flow channel. According to this fluid measuring device, because the fluid resistance element uses a ceramic fluid resistance component, it is possible to measure the fluid with higher accuracy.

[0018] Furthermore, the fluid control device of the present invention is characterized by comprising: the above-described flow channel structure; an upstream pressure sensor for measuring the upstream pressure of the fluid resistance member in the flow channel; a downstream pressure sensor for measuring the downstream pressure of the fluid resistance member in the flow channel; and a fluid control valve disposed in the flow channel on the upstream or downstream side of the fluid resistance member.

[0019] According to the present invention, it is possible to fix and ensure sealing without applying unnecessary force to the fluid resistance member. Attached Figure Description

[0020] Figure 1 This is a schematic diagram illustrating the structure of a fluid measuring device according to one embodiment of the present invention. Figure 2 This is a partially enlarged cross-sectional view of the flow channel structure in the same embodiment. Figure 3 This is a schematic diagram showing a clamp joint, which is a connection mechanism in the same embodiment. Figure 4 This is an enlarged cross-sectional view showing the fluid resistance member and fixing mechanism of the same embodiment. Figure 5 This is a schematic diagram illustrating the mechanism of fixing the fluid resistance member of the pressing and fixing part based on the same embodiment. Figure 6 This is a cross-sectional view showing the assembly method of the fixing mechanism in the same embodiment. Figure 7 This is an enlarged cross-sectional view showing the fluid resistance member and fixing mechanism in a modified embodiment. Figure 8 This is a schematic diagram illustrating the fixing mechanism of the fluid resistance member of the pressing and fixing part based on a modified embodiment. Figure 9 This is a cross-sectional view showing the assembly method of the fixing mechanism in the same embodiment. Figure 10 This is an enlarged cross-sectional view showing the peripheral structure of the fluid resistance member in a modified embodiment. Detailed Implementation

[0021] <Embodiments of the Invention> The fluid measuring apparatus according to one embodiment of the present invention will now be described using the accompanying drawings. Furthermore, for ease of understanding, some figures shown below may be appropriately omitted or depicted schematically with exaggerated details. The same reference numerals are used to label the same components, and descriptions are appropriately omitted.

[0022] <Device Structure> The fluid measurement device 100 of this embodiment is used for various processes such as semiconductor manufacturing processes. For example, it is installed in one or more gas supply pipes connected to a semiconductor processing chamber to measure the flow rate of process gas flowing in each gas supply pipe.

[0023] Specifically, the fluid measuring device 100 includes: a flow channel structure 10, forming a flow channel R for the flow of fluids such as gas and having a fluid resistance member 2 provided thereon; an upstream pressure sensor 20, which measures the upstream pressure of the fluid resistance member 2 in the flow channel R; a downstream pressure sensor 30, which measures the downstream pressure of the fluid resistance member 2 in the flow channel R; and a flow calculation unit 50, which measures the flow rate of the fluid based on the measured upstream and downstream pressures.

[0024] The flow channel structure 10 includes: a pair of pipe members 11a and 11b constituting the flow channel R; a ceramic fluid resistance member 2 disposed in the flow channel R; and a connecting mechanism 12 connecting the pair of pipe members 11a and 11b.

[0025] A fluid inlet P1 is provided at the upstream end of one pipe member 11a, and a fluid outlet P2 is provided at the downstream end of another pipe member 11b. Furthermore, a flange portion 111 is formed at the downstream end of one pipe member 11a and connected to another pipe member 11b via a connecting mechanism 12, and a flange portion 111 is formed at the upstream end of another pipe member 11b and connected to one pipe member 11a via a connecting mechanism 12.

[0026] like Figure 2As shown, an annular protrusion 112 is formed on the front end face of each flange portion 111, which is recessed into the washer described later. Furthermore, an inclined surface 113, whose diameter increases with approach to the front end, is formed on the back side of each flange portion 111 on the axially opposite side to the front end face. Moreover, a stepped portion 114, whose diameter is reduced, is formed on the outer peripheral surface of each flange portion 111. Additionally, a positioning retainer described later is mounted on the stepped portion 114.

[0027] Moreover, such as Figure 1 As shown, an upstream branch pipe section 13 is connected to a pipe member 11a, which forms an upstream measuring flow channel R1 for measuring the upstream pressure of the fluid resistance member 2. Furthermore, a downstream branch pipe section 14 is connected to another pipe member 11b, which forms a downstream measuring flow channel R2 for measuring the downstream pressure of the fluid resistance member 2.

[0028] Upstream pressure sensor 20 and downstream pressure sensor 30 are respectively connected to these upstream branch pipe sections 13 and downstream branch pipe sections 14 via connecting plate 15. An upstream connecting channel 151 is formed on the connecting plate 15, connecting the upstream measuring flow channel R1 to the upstream pressure sensor 20, and a downstream connecting channel 152 is formed, connecting the downstream measuring flow channel R2 to the downstream pressure sensor 30. Furthermore, the upstream pressure sensor 20 and downstream pressure sensor 30 are fixed to the connecting plate 15, and a housing 16 housing the upstream pressure sensor 20 and downstream pressure sensor 30 is fixed to the connecting plate 15. Additionally, a circuit board 17 is fixed to the connecting plate 15 or the housing 16, and this circuit board 17 functions as a flow calculation unit 50 that measures the flow rate of the fluid based on the upstream and downstream pressures.

[0029] Fluid resistance component 2 is a component that creates resistance to fluid flow, such as... Figure 2 and Figure 4 As shown, the fluid resistance member 2 has one or more resistance channels 2a. This fluid resistance member 2 is formed, for example, from ceramics such as quartz, alumina, zirconium oxide, or silicon nitride; specifically, it is cylindrical and has one or more resistance channels 2a formed along its axial direction. The diameter (outer diameter) of the fluid resistance member 2 is, for example, about several millimeters (e.g., 1.5 mm), and the length (dimension along the axial direction) is about several millimeters to tens of millimeters (e.g., 7 mm), but these dimensions can be appropriately varied.

[0030] In this embodiment, the aspect ratio (length to diameter) of the resistance channel 2a is 200 or more, preferably 300 or more. Furthermore, the resistance value of the fluid resistance member 2 is determined based on this aspect ratio and the number of resistance channels 2a.

[0031] like Figure 1 and Figure 2 As shown, the connecting mechanism 12 connects a pair of pipe members 11a and 11b with their flange portions 111 facing each other. Specifically, the connecting mechanism 12 is composed of a clamp joint.

[0032] The clamp connector 12 is externally fitted into the opposing flange portion 111 and securely fastens them together. Specifically, as Figure 2 and Figure 3 As shown, the clamp connector 12 has: a clamp body 121, a groove 121m provided on the inner circumferential surface in a manner extending in the circumferential direction; and a fastening part 122, which fastens the clamp body 121 in a manner that reduces its inner diameter.

[0033] The clamp body 121 has a series of clamp components (here, three clamp components) 121a to 121c, and adjacent clamp components are connected to each other in a manner that allows them to rotate relative to each other. Each clamp component 121a to 121c is made of stainless steel, for example, SUS316. Furthermore, a groove 121m is formed on the inner circumferential surface of each clamp component 121a to 121c in a circumferentially extending manner. The groove 121m has a width that allows it to be fitted into the outer circumferential edge of a pair of opposing flange portions 111. An inclined surface 1211 corresponding to the inclined surface 113 of the flange portion 111 is formed on the inner surface of the pair of sidewall portions forming the groove 121m.

[0034] The fastening part 122 fastens the free ends of a pair of outer clamping parts 121a and 121b to each other. Specifically, as shown in the figure... Figure 3 As shown, the fastening part 122 includes: a bolt member 122a, rotatably disposed in a through hole formed at the free end of one outer clamp member 121a; and an internally threaded hole 122b, formed at the free end of another outer clamp member 121b. Furthermore, the bolt member 122a is made of stainless steel, for example, SUS316. Moreover, by threading the bolt member 122a to the internally threaded hole 122b, a pair of outer clamp members 121a and 121b can be connected, and the inner circumferential diameter of the clamp body 121 can be enlarged or reduced. By reducing the inner circumferential diameter of the clamp body 121, the inclined surfaces 1211 of each clamp member 121a to 121c press against the inclined surfaces 113 of the flange portion 111, and the flange portions 111 are pressed together by the axial force generated at this time.

[0035] <Fixing mechanism 3 for fluid resistance component 2 in flow channel structure 10> like Figure 2 and Figure 4 As shown, the flow channel structure 10 of this embodiment includes a fixing mechanism 3, which fixes the fluid resistance member 2 to the flow channel by being clamped by a pair of pipe members 11a and 11b.

[0036] The fixing mechanism 3 has: a sealing part 4, made of elastic material, which seals the outer peripheral surface of the fluid resistance member 2; and a pressing fixing part 5, which presses and fixes the outer peripheral surface of the fluid resistance member 2. The sealing part 4 and the pressing fixing part 5 are arranged at different positions in the axial direction of the fluid resistance member 2.

[0037] Specifically, the fixing mechanism 3 also includes: an annular washer 6, disposed on the outer peripheral surface of the fluid resistance member 2, and held by a pair of pipe members 11a and 11b; and a pair of fixing members 7a and 7b, respectively disposed on both sides of the washer 6 on the outer peripheral surface of the fluid resistance member 2.

[0038] The gasket 6 is sandwiched between the flanges 111 of a pair of pipe members 11a and 11b, sealing the pair of pipe members 11a and 11b. Specifically, the pair of pipe members 11a and 11b are connected by a clamp joint, which serves as a connecting mechanism 12, whereby the protrusion 112 of the flange 111 engages with the gasket 6, thereby sealing the pair of pipe members 11a and 11b. Furthermore, the gasket 6 in this embodiment is annular, with a fluid resistance member 2 disposed in a through hole at its center. In addition, the gasket 6 is made of stainless steel, for example, SUS316.

[0039] A pair of fixing members 7a and 7b are provided on both sides to clamp and fix the washer 6. In this embodiment, the fixing members 7a and 7b have through holes with a circular cross-section for the fluid resistance member 2 to be inserted. Furthermore, the fixing members 7a and 7b are fixed to the fluid resistance member 2 by the pressing and fixing part 5 described later. With the pair of fixing members 7a and 7b fixed to the fluid resistance member 2, the washer 6, the fluid resistance member 2, and the pair of fixing members 7a and 7b are thus modularized into a single structure. Additionally, the pair of fixing members 7a and 7b are made of, for example, stainless steel such as SUS316.

[0040] Furthermore, in the fixing mechanism 3 of this embodiment, the sealing part 4 is provided between the outer peripheral surface of the fluid resistance member 2 and the inner peripheral surfaces of the fixing members 7a and 7b, and seals them together. The sealing part 4 of this embodiment is composed of an annular sealing member, which is formed of a resin with excellent durability and chemical resistance, such as PFA or other fluoropolymers.

[0041] In this embodiment, the sealing portion 4 also seals between the opposing surfaces of the fixing members 7a and 7b and the gasket 6. Specifically, the opposing surfaces of the fixing members 7a and 7b have inclined pressing surfaces 71, which press the sealing portion 4 against the outer peripheral surface of the fluid resistance member 2 and the opposing surface of the gasket 6. The pressing surface 71 is formed in the gasket-side opening in the through hole of the fixing members 7a and 7b. According to this structure, by pressing the fixing members 7a and 7b towards the gasket 6, the pressing surfaces 71 of the fixing members 7a and 7b press the sealing portion 4 against the outer peripheral surface of the fluid resistance member 2 and against the opposing surface of the gasket 6, thereby sealing them together. That is, in this embodiment, the sealing portion 4 is provided at the gasket-side end of the fixing members 7a and 7b. Furthermore, a flange portion 72 is formed at the gasket-side end of the fixing members 7a and 7b.

[0042] The pressing and fixing portions 5 are formed on a pair of fixing members 7a and 7b, respectively. In this embodiment, they are formed on the end faces of the fixing members 7a and 7b opposite to the opposing end faces (washer-side ends) that have end faces that contact the washer 6. Specifically, the pressing and fixing portions 5 are formed by deforming the annular portions 73 formed on the end faces of the fixing members 7a and 7b toward the fluid resistance member 2, thereby contacting the fluid resistance member 2. An annular groove 74 is formed on the opposing end faces of each fixing member 7a and 7b, and the inner portion closer to the fluid resistance member 2 than the groove 74 becomes the annular portion 73. Moreover, as Figure 5 As shown, by riveting the annular portion 73, the annular portion 73 presses against the outer peripheral surface of the fluid resistance member 2, thereby forming the pressing and fixing portion 5.

[0043] <Assembly method of fixed mechanism 3> Here, refer to Figure 6 The assembly method of the fixing mechanism 3 is explained.

[0044] A washer 6 is installed on the fluid resistance member 2, and fixing members 7a and 7b are installed on both sides of the washer 6 in a manner that clamps the sealing portion 4. In this state, one end of the fluid resistance member 2 is inserted into the through portion 81 formed in the lower mold 8. When one end of the fluid resistance member 2 is inserted into the through portion 81, the support surface 811 formed in the through portion 81 supports the flange portion 72 of the fixing member 7a at one end. Furthermore, a positioning pin 82 is provided in the through portion 81, which supports the fluid resistance member 2 and positions the fluid resistance member 2 relative to the fixing member 7a at one end. In addition, the positioning pin 82 can be attached to and detached from the lower mold 8.

[0045] Next, the upper mold 9 is fixed to the lower mold 8 by inserting the other end of the fluid resistance member 2 into the through portion 91 formed in the upper mold 9. Specifically, it is fixed by threading the threaded portions 8n and 9n formed in the upper mold 9 and the lower mold 8 together. If the other end of the fluid resistance member 2 is inserted into the through portion 91 and the upper mold 9 and the lower mold 8 are threaded together, the pressing surface 911 formed in the through portion 91 of the upper mold 9 presses the flange portion 72 of the fixing member 7b on the other end side. As a result, the sealing portion 4 provided between the washer 6 and the fixing members 7a and 7b is pressed against the fixing members 7a and 7b, the washer 6 and the fluid resistance member 2.

[0046] Then, the rivet pin KP is inserted into the through portion 91 provided on the upper mold 9, and the annular portion 73 is riveted to the fluid resistance member 2 side by means of the groove 74 formed on the fixing member 7b at the other end side. Thus, the fixing member 7b at the other end side is fixed to the fluid resistance member 2.

[0047] Next, remove the locating pin 82 from the lower mold 8 and flip the upper mold 9 and lower mold 8 over. Then, insert the riveting pin KP into the through portion 81 of the lower mold 8 after the locating pin 82 has been removed, and rivet the annular portion 73 to the fluid resistance member 2 side by means of the groove 74 formed in the fixing member 7a at one end. Alternatively, at this time, a locating pin can also be provided in the through portion 91 of the upper mold 9 to prevent the fluid resistance member 2 from shifting. Thus, the fixing member 7a at one end is fixed to the fluid resistance member 2. In the above manner, the fluid resistance member 2, the sealing portion 4, and the pair of fixing members 7a, 7b are positioned relative to the washer 6 to form an integral structure (fluid resistance unit 2U) (see reference). Figure 4 ).

[0048] <Method for fixing fluid resistance component 2 to flow channel R> Next, the method for fixing the fluid resistance component 2 to the flow channel R will be explained.

[0049] The fluid resistance unit 2U formed in the above manner (refer to) Figure 4 The fluid resistance unit 2U is configured to be sandwiched between a pair of pipe members 11a and 11b before connection. In this embodiment, a positioning retainer 18 (see reference 11b) is used to position the fluid resistance unit 2U on the other pipe member 11b. Figure 2 The positioning retainer 18 is a cylindrical component that is mounted on the outer periphery of the washer 6 and on the stepped portion 114 of another pipe member 11b. With the positioning retainer 18 in the position of the fluid resistance unit 2U and the other pipe member 11b, the fluid resistance unit 2U is configured to be held by a pair of pipe members 11a and 11b.

[0050] Then, a pair of pipe members 11a and 11b are connected by a clamp joint serving as the connecting mechanism 12, thereby fixing the fluid resistance unit 2U to the flow channel R. At this time, the protrusion 112 of the flange portion 111 is inserted into the washer 6, thereby sealing the pair of pipe members 11a and 11b. Furthermore, the fixing members 7a and 7b and the washer 6, as well as the fixing members 7a and 7b and the fluid resistance member 2, are sealed by the sealing portion 4, thereby allowing fluid to flow in the resistance flow channel 2a of the fluid resistance member 2.

[0051] <Effects of this implementation method> According to the fluid measuring device 100 in this embodiment, since the fluid resistance element uses a ceramic fluid resistance member 2, fluid measurement can be performed with higher accuracy. In particular, in this embodiment, the sealing part 4 and the pressing and fixing part 5 are provided at different positions along the axial direction of the fluid resistance member 2, so it is not necessary to ensure sealing through the pressing and fixing part 5, thereby reducing the stress applied to the fluid resistance member 2. Furthermore, by separating the sealing part 4 from the pressing and fixing part 5, it is not necessary to deform the sealing part 4 by riveting or otherwise using metal components; components with excellent sealing properties, such as resin components, can be used, thereby ensuring sealing. As a result, it is possible to fix and ensure sealing without applying unnecessary force to the fluid resistance member 2.

[0052] <Other Implementation Methods> Furthermore, the present invention is not limited to the embodiments described herein.

[0053] For example, in the embodiment described above, sealing portions 4 and fixing members 7a and 7b are provided on both sides of the gasket 6, but it is also possible to have a structure in which sealing portions 4 and fixing members 7a are provided only on the upstream side of the gasket 6.

[0054] Furthermore, in the embodiment described above, an annular groove 74 is formed on the opposite face (end face) of the fixing members 7a and 7b and the inner part is riveted to form the pressing and fixing part 5. Alternatively, a cylindrical thin-walled part can be formed on the end face of the fixing members 7a and 7b and the thin-walled part can be riveted to form the pressing and fixing part 5.

[0055] Furthermore, the sealing portion 4 in the aforementioned embodiment seals not only the outer peripheral surface of the fluid resistance member 2 and the inner peripheral surfaces of the fixing members 7a and 7b, but also the opposing surfaces of the fixing members 7a and 7b and the gasket 6. However, it is also possible to seal only the outer peripheral surface of the fluid resistance member 2 and the inner peripheral surfaces of the fixing members 7a and 7b. In this case, it is advisable to consider providing a sealing member in addition to the sealing portion 4 to seal the opposing surfaces of the fixing members 7a and 7b and the gasket 6.

[0056] Furthermore, the fixed mechanism 3 can also be Figure 7 The structure shown. Figure 7 In addition to the sealing part 4 and the pressing and fixing part 5, the fixing mechanism 3 shown also has a cylindrical intermediate support part 40 disposed between the outer peripheral surface of the fluid resistance member 2 and the inner peripheral surface of the fixing members 7a and 7b. This intermediate support part 40 is a circular tube with a uniform cross-sectional shape. The inner peripheral surface of the intermediate support part 40 contacts the outer peripheral surface of the fluid resistance member 2, and the outer peripheral surface of the intermediate support part 40 contacts the inner peripheral surface of the fixing members 7a and 7b.

[0057] Furthermore, the intermediate support portion 40 has an extension portion 40x that extends further outward than the end face opposite to the end face of the washer 6 in the fixing members 7a and 7b.

[0058] Furthermore, the sealing portion 4 is integrally formed with the intermediate support portion 40. The sealing portion 4 is pressed against the outer peripheral surface of the fluid resistance member 2 by the pressing surfaces 71 of the fixing members 7a and 7b, and also against the opposing surface of the gasket 6, thereby sealing them together. Additionally, the sealing portion 4 and the intermediate support portion 40 are formed, for example, of a resin with excellent durability and chemical resistance, such as a fluoropolymer like PFA.

[0059] The pressing and fixing parts 5 are formed by a pair of fixing members 7a and 7b, which are formed by riveting the outer peripheral surfaces of the ends of the fixing members 7a and 7b opposite to the opposite face (washer-side end) of the end face that contacts the washer 6. Figure 8 As shown, by riveting the outer peripheral surfaces of the ends of the fixing members 7a and 7b, they are deformed radially inward, thereby deforming the intermediate support portion 40. This intermediate support portion 40 presses against the outer peripheral surface of the fluid resistance member 2, thereby forming the pressing fixing portion 5. Specifically, as... Figure 9 As shown, it is possible to rivet the outer peripheral surfaces of the ends of the fixing members 7a and 7b by pressing the rivet pin KP against the corner of the ends of the fixing members 7a and 7b. In this case, the entire end face of the fixing members 7a and 7b is riveted. The rivet pin KP has a tapered pressing surface KP1 that contacts the outer peripheral corner of the ends of the fixing members 7a and 7b.

[0060] With this structure, the sealing area can be increased by the intermediate support portion 40, thereby improving the sealing performance. In addition, the intermediate support portion 40 extends outward, thereby making the contact state of the sealing portion in the end faces of the fixing members 7a and 7b reliable, thus maintaining a stable seal and maintaining high sealing reliability for a long time.

[0061] Furthermore, by riveting the outer peripheral surfaces of the fixing members 7a and 7b to form the pressing and fixing part 5, the riveting process is not limited to the end face, increasing the degree of freedom in processing. In particular, the pressing force generated by riveting is dispersed by the intermediate support part 40 and acts on the fluid resistance member 2, thus suppressing stress concentration, preventing damage or deformation of the fluid resistance member 2, and achieving a stable seal. Additionally, in Figure 7 In the fixing mechanism 3, similar to the embodiment described above, it can also be a structure in which the annular portion 73 formed on the end faces of the fixing members 7a and 7b is riveted. In this case, by riveting the annular portion 73, the intermediate support portion 40 is deformed, and the intermediate support portion 40 presses against the outer peripheral surface of the fluid resistance member 2, thereby forming the pressing fixing portion 5.

[0062] Furthermore, the connecting mechanism 12 in the described embodiment uses a clamp joint, but it can also be as follows: Figure 10 The device includes: a first nut member 123, which is embedded in the outer periphery of a pipe member 11a and has an external thread on its outer peripheral surface; and a second nut member 124, which is embedded in the outer periphery of another pipe member 11b and has an internal thread on its inner peripheral surface that is threaded to the external thread. By threading the external thread of the first nut member 123 to the internal thread of the second nut member 124, a pair of pipe members 11a and 11b are connected.

[0063] More specifically, the front end 123a of the first nut member 123 pushes the flange 111 of one pipe member 11a from the back side. Furthermore, the second nut member 124 is provided with a receiving recess 124a that accommodates the flange 111 of each of the pair of pipe members 11a and 11b, and is configured to receive the flange 111 of the other pipe member 11b from the back side through the bottom surface of the receiving recess 124a. According to the above structure, by threading the external thread of the first nut member 123 to the internal thread of the second nut member 124, the first nut member 123 pushes the flange 111 of one pipe member 11a from the back side, and the second nut member 124 receives the flange 111 of the other pipe member 11b from the back side, thereby connecting the pair of pipe members 11a and 11b.

[0064] Furthermore, while the described embodiment illustrates an example applied to a fluid measuring device, it can also be applied to fluid control devices that further include a fluid control valve disposed upstream or downstream of a fluid resistance member within the flow channel. Additionally, a flow channel structure may exist where no fluid measuring device is used, but only a ceramic fluid resistance member is provided within the flow channel.

[0065] Furthermore, the present invention is not limited to the described embodiments, and various modifications can be made without departing from its spirit. Explanation of reference numerals in the attached figures

[0066] 100 Fluid Measurement Device R-channel 10. Flow channel structure 10a, 10b A pair of pipe components 2. Fluid resistance components 2a Resistance Flow Channel 20 Upstream pressure sensor 30 Downstream pressure sensor 3. Fixed mechanism 4. Sealing section 5 Press the fixing part 6 Washers 7a, 7b Fixed components 71 Pressing surface 73. Circular portion 74 slots.

Claims

1. A flow channel structure, characterized in that, have: Pipe components form the flow channels for fluid flow; A ceramic fluid resistance component is disposed in the flow channel and has one or more resistance channels; and The fixing mechanism, by being clamped by the pipe component, fixes the fluid resistance component to the flow channel. The fixing mechanism has: The sealing part, made of elastic material, seals the outer peripheral surface of the fluid resistance member; as well as Press and fix the outer peripheral surface of the fluid resistance component by pressing and fixing the fixing part. The sealing part and the pressing and fixing part are arranged at different positions in the axial direction of the fluid resistance member.

2. The flow channel structure according to claim 1, characterized in that, The fixing mechanism also has: An annular washer is disposed on the outer peripheral surface of the fluid resistance member and is held by the pipe member; and A cylindrical fixing member is disposed on one or the other side of the gasket on the outer peripheral surface of the fluid resistance member. The sealing part is disposed between the outer peripheral surface of the fluid resistance member and the inner peripheral surface of the fixing member, thereby sealing the area between the outer peripheral surface of the fluid resistance member and the inner peripheral surface of the fixing member. The pressing and fixing part is formed by the fixing member.

3. The flow channel structure according to claim 2, characterized in that, The fixing components are respectively disposed on one side and the other side of the washer, and clamp and fix the washer.

4. The flow channel structure according to claim 2 or 3, characterized in that, The sealing portion also seals between the opposing surfaces of the fixing member and the gasket.

5. The flow channel structure according to claim 4, characterized in that, The opposing surface of the fixing member has an inclined pressing surface that presses the sealing portion against the outer peripheral surface of the fluid resistance member and the opposing surface of the gasket.

6. A flow channel structure, characterized in that, have: Pipe components form the flow channels for fluid flow; A ceramic fluid resistance component is disposed in the flow channel and has one or more resistance channels; and The fixing mechanism, by being clamped by the pipe component, fixes the fluid resistance component to the flow channel. The fixing mechanism has: The sealing part, made of elastic material, seals the outer peripheral surface of the fluid resistance member; An annular washer is disposed on the outer peripheral surface of the fluid resistance member and is held by the pipe member; A cylindrical fixing member is disposed on one or the other side of the gasket on the outer peripheral surface of the fluid resistance member; A cylindrical intermediate support portion is disposed between the outer peripheral surface of the fluid resistance member and the inner peripheral surface of the fixing member; as well as Press and fix the outer peripheral surface of the fluid resistance component by pressing and fixing the fixing part. The sealing part and the pressing and fixing part are arranged at different positions in the axial direction of the fluid resistance member. The intermediate support extends further outward than the end face opposite to the end face that contacts the washer in the fixing member.

7. The flow channel structure according to any one of claims 2 to 6, characterized in that, In the fixing member, the pressing fixing part is formed on the opposite side of the end face that contacts the washer.

8. The flow channel structure according to claim 7, characterized in that, An annular groove is formed on the end face opposite to the end face that contacts the washer in the fixing member. The pressing and fixing part is formed by riveting the inner portion that is closer to the fluid resistance member than the groove.

9. The flow channel structure according to claim 7, characterized in that, The pressing and fixing part is formed by riveting the outer peripheral surface opposite to the end face that contacts the washer in the fixing member.

10. A fluid measuring device, characterized in that, have: The flow channel structure according to any one of claims 1 to 9; An upstream pressure sensor measures the upstream pressure of the fluid resistance member in the flow channel; and A downstream pressure sensor measures the downstream pressure of the fluid resistance member in the flow channel.

11. A fluid control device, characterized in that, have: The flow channel structure according to any one of claims 1 to 9; An upstream pressure sensor measures the upstream pressure of the fluid resistance member in the flow channel; A downstream pressure sensor measures the downstream pressure of the fluid resistance member in the flow channel; as well as A fluid control valve is disposed in the flow channel on the upstream or downstream side of the fluid resistance member.

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