A method and system for component analysis

Abstract

A component analysis method and system. A sample is excited by a synchrotron radiation beamline to obtain sample charged ions; the sample charged ions are accelerated by an acceleration orbit to obtain sample to-be-tested waves; and the components of the to-be-tested sample are determined by analyzing the sample to-be-tested waves. The synchrotron radiation beamline has the characteristics of high intensity, high collimation, high monochromaticity, wide energy spectrum coverage and high polarization, and the trace and ultratrace components can be accurately detected by exciting the to-be-tested sample by the synchrotron radiation beamline, the detection limit can be reduced to the ppb level or even the ppt level, the high purity requirement of high-end semiconductor materials on materials can be met, and the synchrotron radiation beamline can be used for material component analysis, the sample loss can be avoided, the real component distribution can be restored, the synchronous detection of multi-element complex components can be realized, and the full component detection of matrix elements, doped elements and trace elements in the material can be realized synchronously.

Description

Technical Field

[0001] This invention relates to component analysis, and more particularly to a component analysis method and system. Background Technology

[0002] Semiconductor materials, as the core foundation of the information technology industry, the new energy industry, and the high-end manufacturing industry, are the core carriers supporting the research and development and industrialization of key products such as chips, integrated circuits, photovoltaic devices, semiconductor lighting, and sensors. Their performance directly determines the functional stability, operating efficiency, and service life of downstream devices, and they have become a strategic core material for measuring a country's scientific and technological strength, industrial level, and comprehensive national power.

[0003] As global information technology iterates and upgrades towards high integration, high speed, low power consumption, and miniaturization, and with the rapid rise of emerging fields such as new energy vehicles, artificial intelligence, quantum computing, and flexible electronics, the market's performance requirements for semiconductor materials are constantly increasing. These requirements not only demand precise and controllable electrical, optical, thermal, and mechanical properties, but also stringent standards for material purity, compositional uniformity, and micro-doping precision. Even trace amounts (ppm or ppb levels) of impurity elements, deviations in dopant elements, or uneven compositional distribution can lead to leakage current, threshold voltage drift, decreased reliability, or even direct failure in semiconductor devices. Therefore, the accuracy, sensitivity, speed, and comprehensiveness of semiconductor material composition analysis have become indispensable key links in the entire process of semiconductor material research and development, production preparation, quality control, and failure analysis, directly determining the development quality and core competitiveness of the semiconductor industry. Summary of the Invention

[0004] The problem addressed by this invention is how to improve the accuracy of semiconductor material composition analysis.

[0005] To address the above problems, the present invention provides a component analysis method, comprising: Provide a sample to be tested; excite the sample to be tested using a beamline of synchrotron radiation to obtain charged ions from the sample; accelerate the charged ions into an accelerating orbit to generate a sample test wave; receive and analyze the sample test wave to determine the composition of the sample to be tested.

[0006] Optionally, the step of receiving and analyzing the sample test wave to determine the composition of the sample test includes: receiving the sample test wave and obtaining the spectrum of the sample test wave; and determining the composition of the sample test based on the spectrum of the sample test wave.

[0007] Optionally, the step of determining the composition of the sample to be tested based on the spectrum of the sample test wave includes: analyzing the spectrum of the sample test wave using peak fitting to determine the composition of the sample to be tested.

[0008] Optionally, the step of analyzing the spectrum of the sample test wave to determine the composition of the sample by using peak fitting includes: separating at least one component peak from the spectrum of the sample test wave to determine the composition of the sample.

[0009] Optionally, it also includes: determining the content of the component corresponding to the component peak based on the area of ​​the component peak.

[0010] Optionally, the step of determining the composition of the sample to be tested based on the spectrum of the sample test wave includes: determining the mass of charged ions in the sample based on the spectrum of the sample test wave; and determining the composition of the sample to be tested based on the mass of charged ions in the sample.

[0011] Optionally, the step of determining the composition of the sample to be tested based on the spectrum of the sample to be tested includes: determining the composition of the sample to be tested based on the spectrum of the sample to be tested, combined with a pre-stored material gene library, wherein the material gene library includes the spectra of multiple standard samples.

[0012] Optionally, it also includes obtaining the spectrum of the standard sample.

[0013] Optionally, the step of obtaining the spectrum of the standard sample includes: providing the standard sample; irradiating the standard sample with a beamline of synchrotron radiation to obtain charged ions of the standard sample; accelerating the charged ions of the standard sample into an acceleration orbit to generate a test wave of the standard sample; and obtaining the spectrum of the test wave of the standard sample to determine the spectrum of the standard sample.

[0014] Optionally, the steps for providing standards include: the chemical purity of the standards being greater than 99.9999%.

[0015] Accordingly, the present invention also provides a component analysis system, comprising: A synchrotron radiation source is configured to generate a beamline; the synchrotron radiation beamline is used to excite the sample to obtain charged ions from the sample; an acceleration orbit is configured to accelerate the charged ions from the sample to generate a wave to be measured; and a receiving and analyzing device is configured to receive and analyze the wave to be measured to determine the composition of the sample.

[0016] Optionally, the receiving and analyzing device includes: a receiver configured to receive the sample test wave and obtain the spectrum of the sample test wave; and a component analyzer configured to determine the composition of the test sample based on the spectrum of the sample test wave.

[0017] Optionally, the component analyzer includes a fitting element configured to analyze the spectrum of the sample test wave using peak fitting to determine the composition of the test sample.

[0018] Optionally, the fitting element separates at least one component peak from the spectrum of the sample test wave to determine the composition of the test sample.

[0019] Optionally, it may also include: a content analyzer configured to determine the content of the component corresponding to the component peak based on the area of ​​the component peak.

[0020] Optionally, the component analyzer includes: a conversion element configured to determine the mass of charged ions in the sample based on the spectrum of the sample analyte; and a component element configured to determine the composition of the sample based on the mass of charged ions in the sample.

[0021] Optionally, the component analyzer includes: a storage element pre-stored with a material gene library, the material gene library including the spectra of multiple standard samples; the component analyzer determines the composition of the sample to be tested based on the spectrum of the sample to be tested and the material gene library.

[0022] Compared with the prior art, the technical solution of the present invention has the following advantages: In this invention, the sample is excited using a synchrotron radiation beamline to obtain charged ions; these charged ions are then accelerated using an accelerating orbit to obtain a test wave; and the composition of the sample is determined by analyzing this test wave. Synchrotron radiation beamlines possess characteristics such as high intensity, high collimation, high monochromaticity, wide energy spectrum coverage, and high polarization. Exciting the sample using a synchrotron radiation beamline enables precise detection of trace and ultra-trace components, reducing the detection limit to the ppb or even ppt level. This aligns with the high purity requirements of advanced semiconductor materials. Furthermore, synchrotron radiation beamline analysis avoids sample loss and restores the true component distribution, enabling simultaneous detection of complex multi-component elements, including matrix elements, dopant elements, and trace elements. Attached Figure Description

[0023] Figure 1 This is a schematic flowchart of a component analysis method consistent with some embodiments of the present invention.

[0024] Figure 2 This is a flowchart illustrating the steps of receiving and analyzing the sample wave to determine the composition of the sample in a component analysis method consistent with some embodiments of the present invention.

[0025] Figure 3 This is a schematic flowchart of a component analysis system consistent with some embodiments of the present invention. Detailed Implementation

[0026] As can be seen from the background technology, the accuracy of material composition analysis in the existing technology needs to be further improved.

[0027] Inductively coupled plasma mass spectrometry (ICP-MS) is widely used in semiconductor manufacturing to detect material composition. However, ICP-MS has relatively low energy, making it very difficult to detect trace amounts of metal ions.

[0028] To solve the aforementioned technical problem, the present invention provides a component analysis method, comprising: Provide a sample to be tested; excite the sample to be tested using a beamline of synchrotron radiation to obtain charged ions from the sample; accelerate the charged ions into an accelerating orbit to generate a sample test wave; receive and analyze the sample test wave to determine the composition of the sample to be tested.

[0029] Synchrotron radiation beamlines possess characteristics such as high intensity, high collimation, high monochromaticity, wide energy spectrum coverage, and high polarization. By using synchrotron radiation beamlines to excite samples, it is possible to achieve precise detection of trace and ultra-trace components, reducing the detection limit to the ppb or even ppt level. This is suitable for the high purity requirements of high-end semiconductor materials. Furthermore, synchrotron radiation beamlines for material composition analysis can avoid sample loss and restore the true component distribution. They can also achieve simultaneous detection of multiple complex components, enabling the simultaneous detection of matrix elements, dopants, and trace elements in materials.

[0030] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0031] refer to Figure 1 The diagram shows a flowchart of a component analysis method consistent with some embodiments of the present invention.

[0032] The component analysis method includes: Step S110: Provide the sample to be tested; Step S120: Excite the sample under test using a beamline of synchrotron radiation to obtain charged ions from the sample; Step S130: The charged ions of the sample are accelerated into the acceleration orbit to generate the sample test wave. Step S140: Receive and analyze the sample test wave to determine the composition of the sample.

[0033] Synchrotron radiation beamlines are characterized by high intensity, high collimation, high monochromaticity, wide energy spectrum coverage, and high polarization. By using synchrotron radiation beamlines to excite the sample to generate the test beam, and by analyzing the spectrum of the test beam, the composition of the sample can be determined. This can effectively improve the accuracy of component detection, avoid sample loss and restore the true component distribution; it can also realize the synchronous detection of multiple complex components.

[0034] First, perform step S110, providing the sample to be tested.

[0035] Specifically, the sample to be tested can be a semiconductor material. The sample to be tested can also be other materials.

[0036] Next, step S120 is performed to excite the sample under test using a beamline of synchrotron radiation to obtain charged ions from the sample.

[0037] The high energy of the beam of synchrotron radiation can excite the atoms of the sample to lose their outer electrons, thereby forming charged ions in the sample.

[0038] Synchrotron radiation, as a light source, produces beamlines with advantages such as a wide continuous energy spectrum, ultra-high brightness, high collimation and focusing, and controllable polarization / temporal resolution. It can excite trace and even ultra-trace components in samples, greatly improving the accuracy of component detection. Furthermore, component analysis can be achieved through beamlines. Then, step S130 is executed to cause the charged ions of the sample to enter the acceleration orbit for acceleration, thereby generating the sample test wave.

[0039] Based on the wave-particle duality principle, when particles are accelerated to near the speed of light, they will form a matter wave, which is the wave to be measured in the sample.

[0040] Specifically, the steps of accelerating the charged ions of the sample into the acceleration orbit to generate the sample test wave include: placing a reagent bottle containing the excited test sample in the sample chamber; opening the reagent bottle using a robotic arm; the sample in the reagent bottle being drawn into the acceleration orbit under the effect of vacuum, and accelerating to near the speed of light in the acceleration orbit to generate the sample test wave.

[0041] In some embodiments, the acceleration orbit is a high-energy particle acceleration orbit. This acceleration orbit can accelerate charged ions in the sample to near the speed of light.

[0042] Then, step S140 is executed to receive and analyze the sample test wave to determine the composition of the sample.

[0043] Specifically, the wave to be measured in the sample is a matter wave. Based on the matter wave formula: Where λ is the wavelength of the matter wave, h is Planck's constant, p is the particle momentum, m is the particle mass, and v is the particle velocity. It can be seen that the particle mass of the sample can be determined by the sample wave to be tested.

[0044] like Figure 2 As shown, in some embodiments of the present invention, step S140, receiving and analyzing the sample test wave to determine the composition of the sample to be tested, includes: step S141, receiving the sample test wave and obtaining the spectrum of the sample test wave; step S142, determining the composition of the sample to be tested based on the spectrum of the sample test wave.

[0045] Specifically, the steps of receiving the sample wave to be tested and obtaining the spectrum of the sample wave to be tested include: receiving the sample wave to be tested through a matter wave receiving device; and obtaining the spectrum of the sample wave to be tested based on the received sample wave to be tested.

[0046] Specifically, the step of receiving the sample test wave through the matter wave receiving device includes: receiving the sample test wave through the matter wave receiving device to obtain a detection pattern; and determining the spectrum of the sample test wave based on the detection pattern.

[0047] In some embodiments, in the step of receiving the sample wave to be measured by a matter wave receiving device, the matter wave receiving device receives the matter wave based on one of the phenomena of interference and diffraction, and the detection pattern is one of the matter wave interference pattern, diffraction pattern and particle momentum distribution pattern.

[0048] For example, matter wave receiving devices can be electron spectrometers, free electron shearing interferometers (FESSI), quantum beat spectrometers, triple-axis spectrometers, cold atom interferometers, optical lattices, etc.

[0049] In some embodiments, in the step of determining the spectrum of the sample wave to be tested based on the detection pattern, the spectrum of the sample wave to be tested is determined based on one of the interference pattern, diffraction pattern, and particle momentum distribution pattern of the matter wave.

[0050] In some embodiments, the step of determining the composition of the sample based on the spectrum of the test wave includes: analyzing the spectrum of the test wave using peak fitting to determine the composition of the test sample. Peak fitting can handle complex spectral lines with multiple superimposed "single peaks" that cannot be directly separated. Its core is to decompose smooth, broad overlapping peaks into several independent single peaks with physical or chemical significance.

[0051] Specifically, in the step of analyzing the spectrum of the sample's test wave using peak fitting to determine the composition of the sample, the spectrum of the sample's test wave is processed by peak fitting to determine the composition of the sample.

[0052] In some embodiments, the step of analyzing the spectrum of the sample test wave to determine the composition of the test sample by using peak fitting includes: separating at least one component peak from the spectrum of the sample test wave to determine the composition of the test sample.

[0053] Specifically, the step of separating at least one component peak from the spectrum of the sample wave to be tested includes: fitting and iterating the spectrum of the sample wave to be tested after data preprocessing according to the determined peak shape function and initial value to obtain at least one component peak.

[0054] The peak shape function can be one of Gaussian function, Lorentz function, Voigt function or pseudo Voigt function; the initial value can include at least one of peak position, peak height and full width at half maximum; the data preprocessing includes: denoising the spectrum of the sample wave to be tested to smooth the curve.

[0055] After obtaining the component peaks, the wavelength corresponding to the component peaks is determined based on their positions, thereby determining the composition of the sample to be tested.

[0056] In some embodiments, the step of determining the composition of the sample to be tested based on the spectrum of the sample test wave includes: determining the mass of charged ions in the sample based on the spectrum of the sample test wave; and determining the composition of the sample to be tested based on the mass of charged ions in the sample.

[0057] Specifically, in the step of determining the mass of charged ions in the sample based on the spectrum of the sample's test wave, the wavelength corresponding to the component peak is determined based on the peak position of the component peak in the spectrum of the sample's test wave; and the mass of charged ions in the sample is determined based on the wavelength corresponding to the component peak.

[0058] In the step of determining the mass of charged ions in the sample based on the wavelength corresponding to the component peak, the mass of charged ions in the sample is determined based on the matter wave formula and the wavelength corresponding to the component peak.

[0059] Specifically, in the step of determining the composition of the sample to be tested based on the mass of the charged ions in the sample, the composition of the sample to be tested is determined by combining the mass of the charged ions in the sample with the atomic masses of different elements in the periodic table.

[0060] Continue to refer to Figure 2In some embodiments of the present invention, step S140, receiving and analyzing the sample test wave and determining the composition of the test sample, further includes step S143, determining the content of the component corresponding to the component peak based on the area of ​​the component peak.

[0061] Specifically, the step of determining the content of the component corresponding to the component peak based on the area of ​​the component peak includes: determining the content of the component corresponding to different component peaks based on the ratio of the areas of different component peaks.

[0062] It should be noted that, in the foregoing embodiments, the step of determining the composition of the sample to be tested involves determining the mass of charged ions in the sample to determine the composition of the sample to be tested. In other embodiments of the present invention, the composition of the sample to be tested can also be determined by querying a pre-stored material gene library.

[0063] In some embodiments of the present invention, the step of determining the composition of the sample to be tested based on the spectrum of the sample to be tested includes: determining the composition of the sample to be tested based on the spectrum of the sample to be tested, combined with a pre-stored material gene library, wherein the material gene library includes the spectra of multiple standard samples.

[0064] Specifically, the spectrum of the standard sample in the material gene library includes the wavelength of the component peak corresponding to the standard sample; the step of determining the composition of the sample to be tested based on the wavelength corresponding to the component peak includes: comparing the wavelength corresponding to the component peak separated from the spectrum of the sample to be tested with the wavelength corresponding to the component peak of the standard sample in the material gene library to determine the composition of the sample to be tested.

[0065] Continue to refer to Figure 1 In some embodiments of the present invention, the component analysis method further includes: step S250, obtaining the spectrum of the standard sample.

[0066] In some embodiments, the step of obtaining the spectrum of the standard sample includes obtaining the spectrum of the standard sample and the spectrum of the sample test wave in the same manner. Specifically, the step of obtaining the spectrum of the standard sample includes: providing the standard sample; irradiating the standard sample with a beamline of synchrotron radiation to obtain charged ions of the standard sample; accelerating the charged ions of the standard sample into an accelerating orbit to generate the sample test wave; and obtaining the spectrum of the sample test wave to determine the spectrum of the standard sample.

[0067] Specifically, the standard can be a gas, such as H2 or O2; a liquid, such as H2O; an elemental solid, such as Li, Na, Mg, Al, K, Ca, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Mo, Cd, Sb, Ba, or Pb; or an inorganic compound solid, such as quartz or Si.

[0068] Specifically, in the step of providing the standard sample, the standard sample is contained in a PTFE plastic bottle.

[0069] Specifically, in the step of providing the standard sample, the mass of the sample is 0.1 mg or 0.1 ml.

[0070] It should be noted that when the standard sample is H2O, the steps for providing the standard sample include: obtaining a water sphere by distillation of ultrapure water under a preset environment (e.g., microgravity or zero gravity); and obtaining the standard sample from the obtained water sphere. The ultrapure water is water with a resistivity of not less than 18 MΩ·cm at 25°C.

[0071] It should also be noted that the standard sample is a solid, such as an element or an inorganic compound, and the steps for providing the standard sample include cutting and weighing it under a preset environment (such as a microgravity environment or a zero gravity environment).

[0072] In some embodiments, the step of providing a standard sample includes: the standard sample having a chemical purity greater than 99.9999%.

[0073] Specifically, the spectrum of the standard sample and the spectrum of the test wave are obtained in the same way. A high-energy synchrotron radiation beam is used to excite the atoms of the standard sample, forming charged ions. These charged ions are then accelerated using an accelerating orbiter to generate a matter wave, i.e., the test wave. This test wave is then received by a matter wave receiving device to obtain the spectrum of the standard sample.

[0074] The spectrum of the standard sample in the material gene library includes the wavelengths corresponding to the component peaks in the spectrum of the standard sample's test wave. The step of receiving the standard sample's test wave using a matter wave receiving device to obtain the spectrum of the standard sample includes: analyzing the spectrum of the standard sample's test wave by peak fitting to obtain the wavelengths corresponding to the component peaks.

[0075] For example, the step of analyzing the spectrum of the standard sample test wave and obtaining the wavelengths corresponding to the component peaks by peak fitting includes: separating the component peaks corresponding to the standard sample from the spectrum of the standard sample test wave.

[0076] Specifically, the step of separating the component peaks corresponding to the standard sample from the spectrum of the standard sample test wave includes: fitting and iterating the spectrum of the standard sample test wave after data preprocessing according to the determined peak shape function and initial value to obtain the component peaks corresponding to the standard sample.

[0077] In some examples, the peak shape function determined in the steps of separating the component peak corresponding to the standard sample from the spectrum of the test wave and separating at least one component peak from the spectrum of the test wave is the same peak shape function.

[0078] Accordingly, the present invention also provides a component analysis system.

[0079] refer to Figure 3 The diagram shows a functional block diagram of a component analysis system consistent with some embodiments of the present invention.

[0080] The component analysis system includes: a synchrotron radiation source 310 configured to generate a beamline; the beamline is used to excite the sample to obtain charged ions; an acceleration track 320 configured to accelerate the charged ions of the sample to generate a test wave; and a receiving and analyzing device 330 configured to receive and analyze the test wave to determine the composition of the sample.

[0081] It should be noted that, in some embodiments of the present invention, the component analysis system employs the component analysis method of the present invention for component analysis, and the component analysis system is used to execute the steps of the component analysis method of the present invention. The specific technical solution of the component analysis system can be found in the foregoing embodiments of the component analysis method.

[0082] The synchrotron radiation source 310 is used to excite the sample to obtain charged ions.

[0083] The synchrotron radiation source 310 generates a high-energy beamline capable of exciting atoms in the sample, causing them to lose outer electrons and form charged ions. The beamline generated by the synchrotron radiation source 310 possesses advantages such as a wide continuous energy spectrum, ultra-high brightness, high collimation and focusing, and controllable polarization / temporal resolution. It can excite trace and even ultra-trace components in the sample, greatly improving the accuracy of component detection. Furthermore, component analysis can be achieved through the beamline. It should be noted that the sample to be tested can be a semiconductor material. The sample to be tested can also be other materials.

[0084] Acceleration track 320 is used to accelerate charged ions in the sample to obtain the sample test wave.

[0085] Based on the wave-particle duality principle, the acceleration orbit 320 accelerates the charged ions in the sample to near the speed of light, which will form a matter wave, i.e., the sample test wave.

[0086] Specifically, the acceleration orbit 320 is a high-energy particle acceleration orbit. This acceleration orbit can accelerate charged ions in the sample to near the speed of light.

[0087] Specifically, the component analysis system further includes a robotic arm configured to open the reagent bottle containing the excited sample in the sample chamber, so that the sample in the reagent bottle is subjected to a vacuum and drawn into the acceleration track 320, where it is accelerated to near the speed of light to generate the sample test wave.

[0088] The receiving and analyzing device 330 is used to receive and analyze the sample test wave to determine the composition of the sample test.

[0089] Specifically, the wave to be measured in the sample is a matter wave. Based on the matter wave formula: Where λ is the wavelength of the matter wave, h is Planck's constant, p is the particle momentum, m is the particle mass, and v is the particle velocity; therefore, the receiving and analyzing device 330 can determine the particle mass of the sample through the sample test wave.

[0090] In some embodiments of the present invention, the receiving and analysis device 330 includes: a receiver 331 configured to receive the sample test wave and obtain the spectrum of the sample test wave; and a component analyzer 332 configured to determine the composition of the test sample based on the spectrum of the sample test wave.

[0091] Specifically, receiver 331 is a matter wave receiving device to receive the sample wave to be tested and obtain a detection pattern to determine the spectrum of the sample wave to be tested. The matter wave receiving device receives the matter wave based on one of the phenomena of interference and diffraction, and the detection pattern is one of the matter wave's interference pattern, diffraction pattern, and particle momentum distribution pattern. Receiver 331 determines the spectrum of the sample wave to be tested based on one of the matter wave's interference pattern, diffraction pattern, and particle momentum distribution pattern.

[0092] For example, receiver 331 can be an electron spectrometer, a free electron shearing interferometer (FESSI), a quantum beat spectrometer, a triple-axis spectrometer, a cold atom interferometer, an optical lattice, etc.

[0093] In some embodiments, the component analyzer 332 includes a fitting element configured to analyze the spectrum of the sample analyte using peak-splitting fitting to determine the composition of the sample. Peak-splitting fitting can handle complex spectral lines with multiple superimposed "single peaks" that cannot be directly separated. Its core principle is to decompose smooth, broad overlapping peaks into several independent single peaks with physical or chemical significance. Specifically, the fitting element processes the spectrum of the sample analyte using peak-splitting fitting to determine the composition of the sample.

[0094] In some exemplary embodiments, the fitting element separates at least one component peak from the spectrum of the sample test wave to determine the composition of the test sample. Specifically, the fitting element iteratively fits the spectrum of the sample test wave after data preprocessing based on a determined peak shape function and initial values ​​to obtain at least one component peak.

[0095] The peak shape function can be one of Gaussian function, Lorentz function, Voigt function or pseudo Voigt function; the initial value can include at least one of peak position, peak height and full width at half maximum; the data preprocessing includes: denoising the spectrum of the sample wave to be tested to smooth the curve.

[0096] After obtaining the component peak, the component analyzer 332 determines the wavelength corresponding to the component peak based on the peak position, so as to determine the composition of the sample to be tested.

[0097] In some embodiments, the component analyzer includes: a conversion element configured to determine the mass of charged ions in the sample based on the spectrum of the sample analyte; and a component element configured to determine the composition of the sample analyte based on the mass of the charged ions in the sample.

[0098] Specifically, the conversion element determines the wavelength corresponding to the component peak based on the peak position of the component peak in the spectrum of the sample's test wave; the component element determines the mass of the charged ions in the sample based on the wavelength corresponding to the component peak.

[0099] The conversion element, based on the matter wave formula, determines the mass of the charged ions in the sample according to the wavelength corresponding to the component peak. The composition element, based on the mass of the charged ions in the sample and the atomic masses of different elements in the periodic table, determines the composition of the sample to be tested.

[0100] Continue to refer to Figure 3 In some embodiments of the present invention, the component analysis system further includes a content analyzer 340, which is configured to determine the content of the component corresponding to the component peak based on the area of ​​the component peak.

[0101] Specifically, the content analyzer 340 determines the content of the component corresponding to different component peaks based on the ratio of the peak areas of different components.

[0102] It should be noted that, in the foregoing embodiments, the component analyzer 332 determines the composition of the sample by determining the mass of charged ions in the sample. In other embodiments of the present invention, the component analyzer may also determine the composition of the sample by querying a pre-stored material gene library.

[0103] In some embodiments of the present invention, the component analyzer includes: a storage element, wherein the storage element pre-stores a material gene library, the material gene library including the spectra of multiple standard samples; the component analyzer determines the composition of the sample to be tested based on the spectrum of the sample to be tested and the material gene library.

[0104] Specifically, the spectrum of the standard sample in the material gene library includes: the wavelength of the component peak corresponding to the standard sample; the component analyzer compares the wavelength of the component peak separated by the spectrum of the sample to be tested with the wavelength of the component peak corresponding to the standard sample in the material gene library to determine the composition of the sample to be tested.

[0105] It should be noted that the material gene library can be obtained through the component analysis system. The determination of the material gene library can refer to the embodiments of the aforementioned component analysis method.

[0106] In summary, synchrotron radiation beamlines possess characteristics such as high intensity, high collimation, high monochromaticity, wide energy spectrum coverage, and high polarization. Utilizing synchrotron radiation beamlines to excite samples enables precise detection of trace and ultra-trace components, reducing the detection limit to the ppb or even ppt level. This aligns with the high purity requirements of advanced semiconductor materials. Furthermore, synchrotron radiation beamlines for material composition analysis avoid sample loss and accurately reproduce the true component distribution. They also enable simultaneous detection of complex, multi-component elements, including matrix elements, dopant elements, and trace elements.

[0107] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A method for component analysis, characterized in that, include: Provide the sample to be tested; The sample under test is excited by a beamline of synchrotron radiation to obtain charged ions from the sample; The sample's charged ions are accelerated into an acceleration orbit to generate the sample's test wave. The sample wave is received and analyzed to determine the composition of the sample.

2. The component analysis method as described in claim 1, characterized in that, The steps of receiving and analyzing the sample wave to determine the composition of the sample include: Receive the test wave of the sample and obtain the spectrum of the test wave of the sample; The composition of the sample to be tested is determined based on the spectrum of the wave to be tested in the sample.

3. The component analysis method as described in claim 2, characterized in that, The step of determining the composition of the sample based on the spectrum of the wave to be tested includes: The composition of the sample is determined by analyzing the spectrum of the test wave using peak fitting.

4. The component analysis method as described in claim 3, characterized in that, The step of analyzing the spectrum of the sample test wave using peak fitting to determine the composition of the sample test wave includes: separating at least one component peak from the spectrum of the sample test wave to determine the composition of the sample test wave.

5. The component analysis method as described in claim 4, characterized in that, Also includes: The content of the component corresponding to the component peak is determined based on the area of ​​the component peak.

6. The component analysis method as described in claim 2, characterized in that, The step of determining the composition of the sample based on the spectrum of the wave to be tested includes: The mass of charged ions in the sample is determined based on the spectrum of the wave to be measured in the sample. The composition of the sample to be tested is determined based on the mass of charged ions in the sample.

7. The component analysis method as described in claim 2, characterized in that, The step of determining the composition of the sample to be tested based on the spectrum of the test wave of the sample includes: determining the composition of the sample to be tested based on the spectrum of the test wave of the sample and in conjunction with a pre-stored material gene library, wherein the material gene library includes the spectra of multiple standard samples.

8. The component analysis method as described in claim 7, characterized in that, Also includes: Obtain the spectrum of the standard sample.

9. The component analysis method as described in claim 8, characterized in that, The steps to obtain the spectrum of the standard sample include: Provide standard samples; The standard sample is irradiated with a beam of synchrotron radiation to obtain charged ions from the standard sample; The charged ions of the standard sample are accelerated into an acceleration orbit to generate the standard sample test wave; The spectrum of the test wave of the standard sample is obtained to determine the spectrum of the standard sample.

10. The component analysis method as described in claim 9, characterized in that, The steps for providing a standard sample include: the chemical purity of the standard sample is greater than 99.9999%.

11. A component analysis system, characterized in that, include: A synchrotron radiation source, the synchrotron radiation source being configured to generate a beamline; The sample to be tested is excited using the beamline to obtain charged ions from the sample; An acceleration orbit, configured to accelerate charged ions in the sample to generate a wave to be measured; A receiving and analyzing device configured to receive and analyze the wave to be tested, and determine the composition of the sample to be tested.

12. The component analysis system as described in claim 11, characterized in that, The receiving and analysis device includes: A receiver configured to receive the sample wave to be tested and obtain the spectrum of the sample wave to be tested; A component analyzer configured to determine the composition of the sample based on the spectrum of the wave to be measured.

13. The component analysis system as described in claim 12, characterized in that, The component analyzer includes a fitting element configured to analyze the spectrum of the sample test wave using peak fitting to determine the composition of the test sample.

14. The component analysis system as described in claim 13, characterized in that, The fitting element separates at least one component peak from the spectrum of the sample test wave to determine the composition of the test sample.

15. The component analysis system as described in claim 14, characterized in that, Also includes: A content analyzer configured to determine the content of a component corresponding to a component peak based on the area of ​​the component peak.

16. The component analysis system as described in claim 12, characterized in that, The component analyzer includes: A conversion element configured to determine the mass of charged ions in the sample based on the spectrum of the wave to be measured in the sample; A component element configured to determine the composition of the sample to be tested based on the mass of charged ions in the sample.

17. The component analysis system as described in claim 12, characterized in that, The component analyzer includes: a storage element pre-stored with a material gene library, the material gene library including the spectra of multiple standards; The component analyzer determines the composition of the sample based on the spectrum of the wave to be tested and the material gene library.

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