Peak signal repositioning based scanning electron microscope image profile extraction method, system, medium, program product and terminal
By adopting a peak signal-based relocation method, the problem of contour extraction affected by the initial position of the layout is solved, achieving high-precision and robust image contour extraction, which is suitable for semiconductor process inspection.
CN122115487BActive Publication Date: 2026-07-24HUAXINCHENG (HANGZHOU) TECH CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- HUAXINCHENG (HANGZHOU) TECH CO LTD
- Filing Date
- 2026-04-23
- Publication Date
- 2026-07-24
AI Technical Summary
Technical Problem
In existing scanning electron microscope image contour extraction methods, the accuracy of the initial position of the layout is affected, resulting in low image quality.
Method used
A peak signal-based relocation method is adopted, which performs coarse alignment through image similarity matching, rounds corner points, and combines brightness signal distribution for preliminary and relocation to generate the final contour map.
Benefits of technology
It significantly improves the robustness and accuracy of contour extraction, enabling stable extraction of complete and smooth sample contours even when there are deviations in the initial position of the layout, thereby improving the quality of semiconductor process inspection.
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Smart Images
Figure CN122115487B_ABST
Abstract
The application provides a scanning electron microscope image contour extraction method, system, medium, program product and terminal based on peak signal relocation. The method obtains corresponding brightness signal distribution on the boundary line of a layout, preliminarily locates the layout according to the brightness signal; obtains corresponding brightness signal distribution on the boundary line of the preliminarily located layout again to perform relocation search to obtain corresponding image edge points, generates a preliminary contour map of the SEM image based on a plurality of image edge points, and performs smoothing processing on the preliminary contour map to obtain a final contour map. The precision interference problem of the layout during scanning electron microscope image contour extraction is effectively solved.
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