Radio frequency device, control method of radio frequency device, and semiconductor processing equipment

Abstract

This invention discloses a radio frequency (RF) device, a control method for the RF device, and semiconductor process equipment. The RF device includes: an RF power supply, a dual-output impedance matching unit, and a detection adjustable module. The RF power supply is used to input RF energy into a graphite boat. The input terminal of the dual-output impedance matching unit is electrically connected to the output terminal of the RF power supply; the first output terminal of the dual-output impedance matching unit is electrically connected to the input terminal of each inner boat leaf; the second output terminal of the dual-output impedance matching unit is electrically connected to the input terminal of each outer boat leaf; the RF signal output from the first output terminal of the dual-output impedance matching unit and the RF signal output from the second output terminal of the dual-output impedance matching unit have the same amplitude but opposite polarity. The detection adjustable module is used to adjust the voltage at the output terminals of each inner boat leaf and each outer boat leaf. This invention provides an RF device, a control method for the RF device, and semiconductor process equipment, which can improve the removal effect and efficiency of residues on a graphite boat.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a radio frequency (RF) device, a control method for the RF device, and semiconductor process equipment. Background Technology

[0002] In the photovoltaic cell manufacturing process, silicon wafers are coated with silicon nitride. Graphite boats are used as carriers for the silicon wafers during the coating process, supporting them for plasma-enhanced chemical vapor deposition (PECVD). PECVD is a thin-film growth technique that uses plasma to deposit silicon nitride at relatively low temperatures. The silicon wafer surface needs to be coated with silicon nitride to improve solar energy conversion efficiency.

[0003] As the film thickness accumulates on the silicon wafer surface, some silicon nitride will remain on the graphite boat. This residual silicon nitride will affect the electrical and thermal conductivity of the graphite boat, leading to uneven electric field distribution and unstable temperature control during the silicon wafer deposition process, thus impacting the quality and performance of the silicon nitride coating on the silicon wafer.

[0004] Cleaning residual silicon nitride from graphite boats is a crucial issue in solar cell manufacturing, leading the industry to transition from wet to dry cleaning methods. Traditional wet cleaning processes suffer from long cleaning times, high costs, and significant harm to human health and the environment. Existing dry cleaning methods suffer from low efficiency and incomplete cleaning. Summary of the Invention

[0005] This invention provides a radio frequency device, a control method for the radio frequency device, and semiconductor process equipment, which can improve the removal effect and efficiency of residues on graphite boats.

[0006] According to one aspect of the present invention, a radio frequency device is provided for inputting radio frequency energy into a graphite boat within a semiconductor process chamber; the graphite boat includes a plurality of inner boat sheets and a plurality of outer boat sheets, the inner boat sheets and the outer boat sheets being alternately distributed;

[0007] The radio frequency device includes: a radio frequency power supply, a dual output impedance matching circuit, and an adjustable detection module;

[0008] The radio frequency power supply is used to input radio frequency energy to the graphite boat through the dual output impedance matching circuit;

[0009] The input terminal of the dual-output impedance matching device is electrically connected to the output terminal of the RF power supply. The first output terminal of the dual-output impedance matching device is electrically connected to the input terminal of each inner slab. The second output terminal of the dual-output impedance matching device is electrically connected to the input terminal of each outer slab. The RF signal output from the first output terminal of the dual-output impedance matching device and the RF signal output from the second output terminal of the dual-output impedance matching device have the same amplitude but opposite polarity.

[0010] The adjustable detection module is connected to the circuit containing the graphite boat, and is used to adjust the voltage at the output terminals of each inner boat leaf and the voltage at the output terminals of each outer boat leaf.

[0011] Optionally, the first input terminal of the adjustable detection module is electrically connected to the first output terminal of the dual output impedance matching device, the first output terminal of the adjustable detection module is electrically connected to the input terminal of each of the inner pages, the second input terminal of the adjustable detection module is electrically connected to the second output terminal of the dual output impedance matching device, and the second output terminal of the adjustable detection module is electrically connected to the input terminal of each of the outer pages.

[0012] Optionally, the first input terminal of the adjustable detection module is electrically connected to the output terminal of each of the inner slabs, the first output terminal of the adjustable detection module is grounded, the second input terminal of the adjustable detection module is electrically connected to the output terminal of each of the outer slabs, and the second output terminal of the adjustable detection module is grounded.

[0013] Optionally, the detection adjustable module includes a first adjustable unit and a second adjustable unit;

[0014] The first end of the first adjustable unit is electrically connected to the first input end of the detection adjustable module, and the second end of the first adjustable unit is electrically connected to the first output end of the detection adjustable module.

[0015] The first end of the second adjustable unit is electrically connected to the second input end of the detection adjustable module, and the second end of the second adjustable unit is electrically connected to the second output end of the detection adjustable module.

[0016] Optionally, the adjustable detection module further includes a first detection unit, a second detection unit, and a control unit;

[0017] The first detection unit is used to detect the first voltage and current information flowing through the first adjustable unit;

[0018] The second detection unit is used to detect the second voltage and current information flowing through the second adjustable unit;

[0019] The control unit is used to adjust the output impedance of the first adjustable unit according to the first voltage and current information, and to adjust the output impedance of the second adjustable unit according to the second voltage and current information.

[0020] Optionally, the first adjustable unit is a first adjustable capacitor;

[0021] The second adjustable unit is the second adjustable capacitor.

[0022] Optionally, the adjustable detection module is located outside the semiconductor process chamber;

[0023] The adjustable detection module also includes a metal housing;

[0024] Both the first adjustable unit and the second adjustable unit are located inside the metal housing, which is grounded.

[0025] Optionally, the dual-output impedance matching circuit includes a differential unit and an impedance matching unit;

[0026] The first input terminal of the differential unit is electrically connected to the output terminal of the radio frequency power supply, the first output terminal of the differential unit is electrically connected to the input terminal of each inner page, and the second output terminal of the differential unit is electrically connected to the input terminal of each outer page.

[0027] The impedance matching unit is electrically connected between the first output terminal and the second output terminal of the differential unit.

[0028] According to another aspect of the present invention, a control method for a radio frequency device is provided, the control method being applied to a radio frequency device provided in any embodiment of the present invention;

[0029] The control method includes:

[0030] The radio frequency (RF) power supply inputs RF energy to the graphite boat through the dual-output impedance matching device, and the detection adjustable module adjusts the voltage of the output terminals of each inner boat leaf and the output terminal of each outer boat leaf; wherein, the first output terminal of the dual-output impedance matching device outputs an RF signal to the input terminal of each inner boat leaf, and the second output terminal of the dual-output impedance matching device outputs an RF signal to the input terminal of each outer boat leaf; the RF signal output from the first output terminal of the dual-output impedance matching device and the RF signal output from the second output terminal of the dual-output impedance matching device have the same amplitude and opposite polarity.

[0031] According to another aspect of the present invention, a semiconductor process apparatus is provided, which includes the radio frequency device provided in any embodiment of the present invention.

[0032] This invention provides a radio frequency (RF) device incorporating a dual-output impedance matching unit. The first and second output terminals of this unit are electrically connected to the inner and outer planks of a graphite boat, respectively, allowing both planks to receive RF energy. Furthermore, the RF signals output from the first and second output terminals of the dual-output impedance matching unit have equal amplitudes but opposite polarities, resulting in a large voltage difference between adjacent inner and outer planks. This improves the ionization efficiency of the process gas, leading to better plasma density and uniformity, and thus enhancing the removal of residues from the graphite boat. Additionally, this invention includes an adjustable detection module to change the voltage on the graphite boat, allowing RF energy to be transmitted to the tail of the boat, further improving the removal of residues at the tail. In summary, the RF device provided by this invention can improve the removal effect and efficiency of residues from graphite boats.

[0033] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the structure of a graphite boat related to an embodiment of the present invention;

[0036] Figure 2 This is a schematic diagram of the structure of a radio frequency device related to the present invention;

[0037] Figure 3 This is a schematic diagram of a radio frequency device electrically connected to a graphite boat according to an embodiment of the present invention;

[0038] Figure 4 This is a schematic diagram of another radio frequency device electrically connected to a graphite boat according to an embodiment of the present invention;

[0039] Figure 5 This is a schematic diagram of the radio frequency signal output from the first output terminal and the radio frequency signal output from the second output terminal of a dual-output impedance matching device according to an embodiment of the present invention.

[0040] Figure 6This is a schematic diagram of another radio frequency device electrically connected to a graphite boat according to an embodiment of the present invention;

[0041] Figure 7 This is a schematic diagram of another radio frequency device electrically connected to a graphite boat according to an embodiment of the present invention;

[0042] Figure 8 This is a schematic diagram of another radio frequency device electrically connected to a graphite boat according to an embodiment of the present invention;

[0043] Figure 9 This is a schematic diagram of another radio frequency device electrically connected to a graphite boat according to an embodiment of the present invention;

[0044] Figure 10 This is a flowchart illustrating a control method for a radio frequency device according to an embodiment of the present invention. Detailed Implementation

[0045] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0046] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0047] Figure 1 This is a schematic diagram of the structure of a graphite boat related to an embodiment of the present invention, for reference. Figure 1The graphite boat 110 includes multiple inner boat sheets 111 and multiple outer boat sheets 112, with the inner boat sheets 111 and outer boat sheets 112 alternately distributed along a first direction Y; the input terminals of each inner boat sheet 111 are electrically connected to each other, and the output terminals of each inner boat sheet 111 are electrically connected to each other; the input terminals of each outer boat sheet 112 are electrically connected to each other, and the output terminals of each outer boat sheet 112 are electrically connected to each other; the inner boat sheets 111 and outer boat sheets 112 are insulated from each other and have a gap between them.

[0048] Figure 2 This is a schematic diagram of a radio frequency device related to the present invention, for reference. Figure 2 The radio frequency (RF) device includes a low-frequency power supply 310, a single-output impedance matching circuit 130, an upper electrode 140, and a lower electrode 150. The upper electrode 140 and lower electrode 150 are located within a semiconductor process chamber 120, and a graphite boat 110 is located between the upper electrode 140 and the lower electrode 150. To remove residues from the graphite boat 110, it is typically placed inside the semiconductor process chamber 120, filled with an ionizable process gas, and RF energy is applied to the upper electrode 140. The lower electrode 150 is grounded, allowing the plasma generated by the ionized process gas to remove residues from the graphite boat 110. However, because the power supply in this RF device is a low-frequency power supply 310 (20 kHz to 400 kHz), it suffers from problems such as long removal time and poor removal effect.

[0049] To address the issues of poor residue removal and long removal time on the graphite boat 110, this embodiment provides a radio frequency device that can be used to remove residues on the graphite boat 110, and can also improve the removal effect and efficiency. Figure 3 This is a schematic diagram of a radio frequency device electrically connected to a graphite boat according to an embodiment of the present invention. Figure 4 This is a schematic diagram of another radio frequency device electrically connected to a graphite boat according to an embodiment of the present invention. The radio frequency device 200 provided in this embodiment is used to input radio frequency energy to the graphite boat 110 in the semiconductor process chamber 120. (Refer to...) Figure 3 and Figure 4 The radio frequency (RF) device 200 provided in this embodiment includes: an RF power supply 210, a dual-output impedance matching device 220, and a detection adjustable module 230. The RF power supply 210 is used to input RF energy to the graphite boat 110 through the dual-output impedance matching device 220. The input terminal of the dual-output impedance matching device 220 is electrically connected to the output terminal of the RF power supply 210, the first output terminal of the dual-output impedance matching device 220 is electrically connected to the input terminal of each inner boat leaf 111, and the second output terminal of the dual-output impedance matching device 220 is electrically connected to the input terminal of each outer boat leaf 112. The RF signal output from the first output terminal of the dual-output impedance matching device 220 and the RF signal output from the second output terminal of the dual-output impedance matching device 220 have the same amplitude and opposite polarity (see reference). Figure 5The adjustable detection module 230 is connected in the circuit where the graphite boat 110 is located. The adjustable detection module 230 is used to adjust the voltage of the output terminal of each inner boat 111 and the voltage of the output terminal of each outer boat 112.

[0050] Specifically, in this embodiment, the output frequency of the RF power supply 210 can be 13.56MHz. Both the inner spool 111 and the outer spool 112 extend along the second direction X, which can be perpendicular to the first direction Y. The second direction X can be understood as the direction from the input terminal of the inner spool 111 to the output terminal of the inner spool 111, or it can be understood as the direction from the input terminal of the outer spool 112 to the output terminal of the outer spool 112.

[0051] The dual-output impedance matching circuit 220 is used to match the impedance of the RF power supply 210 with the impedance within the semiconductor process chamber 120, reducing reflected power and thus ensuring efficient utilization of RF energy. In this embodiment, there is one dual-output impedance matching circuit 220, which includes two output terminals: a first output terminal and a second output terminal. Both output terminals output RF signals to the inner and outer pages 111 and 112, respectively. Figure 5 This is a schematic diagram illustrating the radio frequency (RF) signal output from the first output terminal and the RF signal output from the second output terminal of a dual-output impedance matching circuit according to an embodiment of the present invention. (Refer to...) Figure 5 The radio frequency signal output from the first output terminal of the dual output impedance matching device 220 is denoted as S1, and the radio frequency signal output from the second output terminal of the dual output impedance matching device 220 is denoted as S2. The radio frequency signal output from the first output terminal of the dual output impedance matching device 220 and the radio frequency signal output from the second output terminal of the dual output impedance matching device 220 are 180° out of phase, and their amplitudes are equal.

[0052] The radio frequency device provided in this embodiment enables both the inner boat leaf 111 and the outer boat leaf 112 in the graphite boat 110 to receive radio frequency energy. Adjacent inner boat leaves 111 and outer boat leaves 112 can be considered as a capacitor structure. The radio frequency signals received by the inner boat leaves 111 and outer boat leaves 112 have opposite polarities, increasing the potential difference within the capacitor structure and improving the ionization efficiency of the process gas between the inner boat leaves 111 and outer boat leaves 112. This allows more plasma to adhere to the inner boat leaves 111 and outer boat leaves 112 and react with residues, thereby improving the residue removal effect on the inner boat leaves 111 and outer boat leaves 112.

[0053] In this embodiment, the adjustable detection module 230 is located in the circuit where the graphite boat 110 is located, for reference. Figure 3 The adjustable detection module 230 can be located between the dual output impedance matching circuit 220 and the graphite boat 110, for reference. Figure 4The adjustable detection module 230 can also be located at the tail of the graphite boat 110. The impedance in the adjustable detection module 230 is adjustable, thereby changing the voltage in the circuit where the graphite boat 110 is located, so that radio frequency energy can be transmitted to the output terminal of the inner boat 111 and the output terminal of the outer boat 112, improving the ionization effect of the process gas between the inner boat 111 and the outer boat 112 at the tail of the graphite boat 110, thereby ensuring the removal effect of residues on the tail of the graphite boat 110.

[0054] This embodiment provides a radio frequency (RF) device incorporating a dual-output impedance matching unit. The first and second output terminals of this unit are electrically connected to the inner and outer planks of a graphite boat, respectively, allowing both planks to receive RF energy. Furthermore, the RF signals output from the first and second output terminals of the dual-output impedance matching unit have equal amplitudes but opposite polarities, resulting in a large voltage difference between adjacent inner and outer planks. This improves the ionization efficiency of the process gas, leading to better plasma density and uniformity, and thus enhancing the removal of residues from the graphite boat. Additionally, this embodiment includes an adjustable detection module to change the voltage on the graphite boat, allowing RF energy to be transmitted to the tail of the boat, further improving the removal of residues at the tail. In summary, the RF device provided in this embodiment can improve the removal effect and efficiency of residues from graphite boats.

[0055] Optional, continue to refer to Figure 3 The first input terminal of the adjustable detection module 230 is electrically connected to the first output terminal of the dual output impedance matching device 220, the first output terminal of the adjustable detection module 230 is electrically connected to the input terminal of each inner page 111, the second input terminal of the adjustable detection module 230 is electrically connected to the second output terminal of the dual output impedance matching device 220, and the second output terminal of the adjustable detection module 230 is electrically connected to the input terminal of each outer page 112.

[0056] Specifically, the output terminals of each inner spool 111 are grounded, and the output terminals of each outer spool 112 are grounded.

[0057] In this embodiment, the adjustable detection module 230 is connected between the dual output impedance matching unit 220 and the graphite boat 110. It can change the voltage on the inner boat 111 and the voltage on the outer boat 112, so that there is radio frequency energy at the output terminals of both the inner boat 111 and the outer boat 112, ensuring the ionization effect of the process gas between the inner boat 111 and the outer boat 112, thereby ensuring the removal effect of residues on the inner boat 111 and the outer boat 112.

[0058] Optional, continue to refer to Figure 4The first input terminal of the detection adjustable module 230 is electrically connected to the output terminal of each inner page 111, the first output terminal of the detection adjustable module 230 is grounded, the second input terminal of the detection adjustable module 230 is electrically connected to the output terminal of each outer page 112, and the second output terminal of the detection adjustable module 230 is grounded.

[0059] Specifically, in this embodiment, the first output terminal of the dual output impedance matching device 220 is directly electrically connected to the input terminal of each inner leaf 111, and the second output terminal of the dual output impedance matching device 220 is directly electrically connected to the input terminal of each outer leaf 112.

[0060] In this embodiment, the adjustable detection module 230 is connected to the tail of the graphite boat 110. Research has shown that connecting the adjustable detection module 230 to the tail of the graphite boat 110 ensures that the radio frequency energy on the inner boat 111 is continuously transmitted from its input to its output, and that the radio frequency energy on the outer boat 112 is continuously transmitted from its input to its output. This ensures effective ionization of the process gas between the tails of the inner and outer boats 111 and 112, resulting in plasma at both tails and ensuring effective removal of residues from both the inner and outer boats 111 and 112.

[0061] Optional, Figure 6 This is a schematic diagram of another radio frequency device electrically connected to a graphite boat according to an embodiment of the present invention, with reference to... Figure 6 The detection adjustable module 230 includes a first adjustable unit 231 and a second adjustable unit 232; the first end of the first adjustable unit 231 is electrically connected to the first input end of the detection adjustable module 230, and the second end of the first adjustable unit 231 is electrically connected to the first output end of the detection adjustable module 230; the first end of the second adjustable unit 232 is electrically connected to the second input end of the detection adjustable module 230, and the second end of the second adjustable unit 232 is electrically connected to the second output end of the detection adjustable module 230.

[0062] Specifically, each inner leaf 111 in the graphite boat 110 corresponds to the same first adjustable unit 231, and the first adjustable unit 231 is electrically connected to the output terminal of each inner leaf 111. Each outer leaf 112 in the graphite boat 110 corresponds to the same second adjustable unit 232, and the second adjustable unit 232 is electrically connected to the output terminal of each outer leaf 112. The first adjustable unit 231 may include an adjustable capacitor and / or an adjustable inductor. The second adjustable unit 232 may include an adjustable capacitor and / or an adjustable inductor.

[0063] The first adjustable unit 231 can change the magnitude of the radio frequency signal on each inner boat 111, and the second adjustable unit 232 can change the magnitude of the radio frequency signal on each outer boat 112. The detection adjustable module 230 provided in this embodiment can adjust the voltage on the inner boat 111 and the voltage on the outer boat 112 separately, thereby further ensuring the ionization efficiency of the process gas.

[0064] Optional, Figure 7 This is a schematic diagram of another radio frequency device electrically connected to a graphite boat according to an embodiment of the present invention, with reference to... Figure 7 The adjustable detection module 230 further includes a first detection unit 233, a second detection unit 234, and a control unit 235; the first detection unit 233 is used to detect first voltage and current information flowing through the first adjustable unit 231; the second detection unit 234 is used to detect second voltage and current information flowing through the second adjustable unit 232; the control unit 235 is used to adjust the output impedance of the first adjustable unit 231 according to the first voltage and current information, and to adjust the output impedance of the second adjustable unit 232 according to the second voltage and current information.

[0065] Specifically, both the first detection unit 233 and the second detection unit 234 can be voltage and current sensors. The first detection unit 233 can be electrically connected between the output terminal of each inner leaf 111 and the first adjustable unit 231, and the second detection unit 234 can be electrically connected between the output terminal of each outer leaf 112 and the second adjustable unit 232.

[0066] The control unit 235, upon receiving the first voltage and current information transmitted by the first detection unit 233, adjusts the output impedance of the first adjustable unit 231 in conjunction with the first preset voltage and current information, so that the adjusted first adjustable unit 231 can transmit radio frequency energy to the output terminals of each inner leaf 111. The control unit 235 is also used to, upon receiving the second voltage and current information transmitted by the second detection unit 234, adjust the output impedance of the second adjustable unit 232 in conjunction with the second preset voltage and current information, so that the adjusted second adjustable unit 232 can transmit radio frequency energy to the output terminals of each outer leaf 112, thereby improving the removal efficiency of residues at the tail of the graphite boat 110. This embodiment, by setting the first detection unit 233, the second detection unit 234, and the control unit 235, can achieve dynamic automatic adjustment of the voltage at the output terminals of the inner leaf 111 and the outer leaf 112, further improving the removal efficiency of residues from the graphite boat 110.

[0067] Optional, continue to refer to Figure 7 The first adjustable unit is the first adjustable capacitor C1; the second adjustable unit is the second adjustable capacitor C2.

[0068] Specifically, the control unit 235 can be used to adjust the voltage of the output terminal of each inner leaf 111 by adjusting the capacitance value of the first adjustable capacitor C1, and also to adjust the voltage of the output terminal of each outer leaf 112 by adjusting the capacitance value of the second adjustable capacitor C2. The radio frequency device provided in this embodiment has a simple structure, low cost, and is easy to install.

[0069] Optional, continue to refer to Figure 7 The detection adjustable module 230 is located outside the semiconductor process chamber 120; the detection adjustable module 230 also includes a metal housing; the first adjustable unit and the second adjustable unit are both located inside the metal housing, and the metal housing is grounded.

[0070] Specifically, the adjustable detection module 230 is located outside the semiconductor process chamber 120, which facilitates installation and prevents plasma corrosion, thus extending its service life. The output terminals of both the first and second adjustable units can be electrically connected to the metal housing. The first detection unit 233, the second detection unit 234, and the control unit 235 can also be located inside the metal housing, which protects the internal unit structures from contamination and impact. The metal housing also facilitates the movement and installation of the adjustable detection module 230.

[0071] Optional, Figure 8 This is a schematic diagram of another radio frequency device electrically connected to a graphite boat according to an embodiment of the present invention, with reference to... Figure 8 The dual-output impedance matching unit 220 includes a differential unit 221 and an impedance matching unit 222. The first input terminal of the differential unit 221 is electrically connected to the output terminal of the RF power supply 210, the first output terminal of the differential unit 221 is electrically connected to the input terminal of each inner page 111, and the second output terminal of the differential unit 221 is electrically connected to the input terminal of each outer page 112. The impedance matching unit 222 is electrically connected between the first output terminal and the second output terminal of the differential unit 221.

[0072] Specifically, the differential unit 221 can convert the radio frequency signal output by the radio frequency power supply 210 into two radio frequency signals with equal amplitude and opposite polarity. The output impedance of the impedance matching unit 222 is adjustable. The impedance matching unit 222 can be an L-type impedance matching unit or a π-type impedance matching unit.

[0073] The differential unit 221 can be a transformer. The first end of the transformer's main side is electrically connected to the RF power supply 210, and the second end of the transformer's main side is grounded. The first end of the transformer's secondary side is electrically connected to the input terminal of each inner leaf 111, and the second end of the transformer's secondary side is electrically connected to the input terminal of each outer leaf 112. The ratio of the transformer's main side to its secondary side can be 1:1.

[0074] Optionally, the dual output impedance matching circuit is a balun circuit.

[0075] Optional, Figure 9 This is a schematic diagram of another radio frequency device electrically connected to a graphite boat according to an embodiment of the present invention, with reference to... Figure 9 The dual output impedance matching circuit 220 provided in this embodiment includes a first inductor L1, a second inductor L2, a third inductor L3, a third capacitor C3, a fourth capacitor C4, and a fifth capacitor C5. The first end of the first inductor L1 is grounded to the output end of the RF power supply 210 and the first end of the third capacitor C3. The second end of the first inductor L1 is electrically connected to the first end of the fourth capacitor C4 and the input end of each inner leaf 111. The second end of the third capacitor C3 is grounded, and the second end of the fourth capacitor C4 is grounded. The first end of the fifth capacitor C5 is electrically connected to the output end of the RF power supply 210 and the first end of the second inductor L2. The second end of the fifth capacitor C5 is electrically connected to the first end of the third inductor L3 and the input end of each outer leaf 112. The second end of the second inductor L2 is grounded, and the second end of the third inductor L3 is grounded.

[0076] This embodiment also provides a control method for a radio frequency device, which can be applied to any radio frequency device provided in any embodiment of the present invention. Figure 10 This is a flowchart illustrating a control method for a radio frequency device according to an embodiment of the present invention. (Refer to...) Figure 10 The control method for the radio frequency device provided in this embodiment includes the following steps:

[0077] S110, Start the RF power supply.

[0078] S120: The RF power supply inputs RF energy to the graphite boat through a dual output impedance matching circuit, and the adjustable detection module adjusts the voltage at the output terminals of each inner boat leaf and the voltage at the output terminals of each outer boat leaf.

[0079] Specifically, the first output terminal of the dual-output impedance matching device outputs a radio frequency (RF) signal to the input terminal of each inner spool, and the second output terminal of the dual-output impedance matching device outputs an RF signal to the input terminal of each outer spool; the RF signal output from the first output terminal of the dual-output impedance matching device and the RF signal output from the second output terminal of the dual-output impedance matching device have the same amplitude but opposite polarity.

[0080] The control method of the radio frequency device provided in the embodiments of the present invention has the same technical effect as the radio frequency device provided in any embodiment of the present invention. For details not described in the control method of the radio frequency device provided in the embodiments of the present invention, please refer to the content of the radio frequency device provided in any embodiment of the present invention.

[0081] This embodiment also provides a semiconductor process apparatus, which includes the radio frequency device provided in any embodiment of the present invention.

[0082] Specifically, the semiconductor process equipment provided in this embodiment also includes a semiconductor process chamber and a graphite boat.

[0083] The semiconductor process equipment provided in this embodiment includes a radio frequency (RF) device. Since the semiconductor process equipment provided in this embodiment includes the RF device provided in any embodiment of the present invention, it also includes the technical features and corresponding beneficial effects of the RF device.

[0084] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and no limitation is imposed herein.

[0085] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A radio frequency device, characterized in that, Used to input radio frequency energy into a graphite boat within a semiconductor process chamber; the graphite boat includes multiple inner boat sheets and multiple outer boat sheets, which are alternately distributed; The radio frequency device includes: a radio frequency power supply, a dual output impedance matching circuit, and an adjustable detection module; The radio frequency power supply is used to input radio frequency energy to the graphite boat through the dual output impedance matching circuit; The input terminal of the dual-output impedance matching device is electrically connected to the output terminal of the RF power supply. The first output terminal of the dual-output impedance matching device is electrically connected to the input terminal of each inner slab. The second output terminal of the dual-output impedance matching device is electrically connected to the input terminal of each outer slab. The RF signal output from the first output terminal of the dual-output impedance matching device and the RF signal output from the second output terminal of the dual-output impedance matching device have the same amplitude but opposite polarity. The adjustable detection module is connected to the circuit containing the graphite boat, and is used to adjust the voltage at the output terminals of each inner boat leaf and the voltage at the output terminals of each outer boat leaf.

2. The radio frequency device according to claim 1, characterized in that, The first input terminal of the adjustable detection module is electrically connected to the first output terminal of the dual-output impedance matching device, the first output terminal of the adjustable detection module is electrically connected to the input terminal of each inner slab, the second input terminal of the adjustable detection module is electrically connected to the second output terminal of the dual-output impedance matching device, and the second output terminal of the adjustable detection module is electrically connected to the input terminal of each outer slab.

3. The radio frequency device according to claim 1, characterized in that, The first input terminal of the adjustable detection module is electrically connected to the output terminal of each of the inner slabs, and the first output terminal of the adjustable detection module is grounded. The second input terminal of the adjustable detection module is electrically connected to the output terminal of each of the outer slabs, and the second output terminal of the adjustable detection module is grounded.

4. The radio frequency device according to claim 2 or 3, characterized in that, The adjustable detection module includes a first adjustable unit and a second adjustable unit; The first end of the first adjustable unit is electrically connected to the first input end of the detection adjustable module, and the second end of the first adjustable unit is electrically connected to the first output end of the detection adjustable module. The first end of the second adjustable unit is electrically connected to the second input end of the detection adjustable module, and the second end of the second adjustable unit is electrically connected to the second output end of the detection adjustable module.

5. The radio frequency device according to claim 4, characterized in that, The adjustable detection module further includes a first detection unit, a second detection unit, and a control unit; The first detection unit is used to detect the first voltage and current information flowing through the first adjustable unit; The second detection unit is used to detect the second voltage and current information flowing through the second adjustable unit; The control unit is used to adjust the output impedance of the first adjustable unit according to the first voltage and current information, and to adjust the output impedance of the second adjustable unit according to the second voltage and current information.

6. The radio frequency device according to claim 4, characterized in that, The first adjustable unit is a first adjustable capacitor; The second adjustable unit is a second adjustable capacitor.

7. The radio frequency device according to claim 4, characterized in that, The adjustable detection module is located outside the semiconductor process chamber; The adjustable detection module also includes a metal housing; Both the first adjustable unit and the second adjustable unit are located inside the metal housing, which is grounded.

8. The radio frequency device according to claim 5, characterized in that, The dual-output impedance matching circuit includes a differential unit and an impedance matching unit; The first input terminal of the differential unit is electrically connected to the output terminal of the radio frequency power supply, the first output terminal of the differential unit is electrically connected to the input terminal of each inner page, and the second output terminal of the differential unit is electrically connected to the input terminal of each outer page. The impedance matching unit is electrically connected between the first output terminal and the second output terminal of the differential unit.

9. A control method for a radio frequency device, characterized in that, The control method is applied to the radio frequency device according to any one of claims 1-8; The control method includes: The radio frequency (RF) power supply inputs RF energy to the graphite boat through the dual-output impedance matching device, and the detection adjustable module adjusts the voltage of the output terminals of each inner boat leaf and the output terminal of each outer boat leaf; wherein, the first output terminal of the dual-output impedance matching device outputs an RF signal to the input terminal of each inner boat leaf, and the second output terminal of the dual-output impedance matching device outputs an RF signal to the input terminal of each outer boat leaf; the RF signal output from the first output terminal of the dual-output impedance matching device and the RF signal output from the second output terminal of the dual-output impedance matching device have the same amplitude and opposite polarity.

10. A semiconductor process apparatus, characterized in that, Includes the radio frequency device according to any one of claims 1-8.

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