A developing apparatus digital control system

Abstract

This invention belongs to the field of semiconductor manufacturing technology, specifically a digital control system for developing equipment. It includes a process program management module, a multi-physical quantity sensing module, a parameter coupling constraint engine, an execution unit driving module, a trusted data encapsulation module, and a manufacturing execution system interface module. Through a design that separates formal program templates from coupling constraint declarations, combined with dynamic parameter verification and encrypted data encapsulation, it achieves verifiable, traceable, and parameter-coordinated operations under customer-selected processes. The separation of formal program templates and coupling constraint declarations prevents customer-defined operations from disrupting the system's verification state.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing technology, specifically a digital control system for developing equipment. Background Technology

[0002] In advanced manufacturing fields such as semiconductor manufacturing and precision optical processing, the developing process, as a key post-lithography processing step, directly determines product yield and performance consistency through its control precision and stability. Developing equipment is transforming from traditional analog control to fully digital, networked, and intelligent systems. Building a digital control system that enables high-precision sensing of multiple physical quantities, structured management of process parameters, and seamless integration with the Manufacturing Execution System (MES) has become a core requirement for improving process controllability and traceability.

[0003] Current mainstream developing equipment adopts a knife + ultrasonic composite structure. It sprays developing solution through a precision fluid nozzle array and generates cavitation effect through an ultrasonic module. Under immersion conditions, the fluid scouring and ultrasonic disturbance are superimposed to complete the development. The existing system has realized the sensing and monitoring of key physical quantities such as temperature, flow rate and ultrasonic parameters and local closed-loop regulation. Some high-end models can upload data to the MES system to meet the needs of production traceability and quality analysis, effectively improve the level of automation, reduce the fluctuation of human intervention, and have the rationality of phased engineering.

[0004] Existing technologies suffer from deep-seated structural contradictions: a conflict between process flexibility and system verifiability. The control logic of existing equipment relies on factory-fixed strategies, and the preset programs only encapsulate static parameter sets. When customers adjust process parameters beyond the adaptability range, the original manufacturer must modify the underlying logic, which is not only time-consuming and costly but also disrupts the system's verification status. This fails to meet the requirements of industries with stringent regulations. The core limitation lies in the lack of formal modeling of the dynamic coupling relationship between programs, parameters, and responses, which cannot guarantee the consistency and traceability of custom programs. Furthermore, there is no real-time reasoning capability across parameter impacts, resulting in abundant data but scarce knowledge, making it difficult to support the core requirements of process iteration and intelligent manufacturing.

[0005] Therefore, the present invention provides a digital control system for a developing equipment. Summary of the Invention

[0006] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0007] The technical solution adopted by the present invention to solve its technical problem is: a digital control system for developing equipment, comprising a process program management module, a multi-physical quantity sensing module, a parameter coupling constraint engine, an execution unit driving module, a trusted data encapsulation module, and a manufacturing execution system interface module; The process program management module is used to store and manage multiple formatted process programs. Each process program is defined in the form of a structured data object, including developer temperature setting, ambient humidity setting, fluid pressure setting, flow rate setting, ultrasonic amplitude setting, and ultrasonic frequency setting, and is further associated with the material type identifier, graphic density range identifier, and process window boundary conditions applicable to the program. The multi-physical quantity sensing module is configured inside the developing equipment and includes a temperature sensor, a humidity sensor, a pressure sensor, a flow meter, an ultrasonic amplitude detector, and a frequency detector. Each sensor is connected to the central controller via an industrial-grade communication bus to collect the actual operating values ​​of the corresponding physical quantities in real time. The parameter coupling constraint engine is built into the central controller, and its input terminals are connected to the process program management module and the multi-physical quantity sensing module, respectively. After the customer selects a formatted process program, it dynamically generates a set of coupling relationship rules between parameters based on the material type, pattern density, and process window boundary conditions associated with the program, and performs consistency verification on the current actual operating values ​​based on the rules. The execution unit drive module receives control commands verified by the parameter coupling constraint engine and drives the temperature control device, humidification device, fluid pump, proportional control valve, and ultrasonic generator respectively, so that each execution unit outputs a physical response that matches the target set value. The trusted data encapsulation module is bidirectionally connected to the execution unit drive module and the multi-physical quantity sensing module. It is used to encrypt and bind the selected program identifier, each set value, each actual operating value, verification result, timestamp, and unique equipment identifier in each process execution cycle to form an unalterable data packet. The manufacturing execution system interface module adopts the extended control specification conforming to the IEC 61850 standard and uploads the data packet to the manufacturing execution system in real time through a secure communication protocol. At the same time, it receives program call commands or audit query requests from the manufacturing execution system.

[0008] As a preferred approach, each formatted process program stored in the process program management module adopts a unified program template structure, which consists of four parts: a program header information area, a parameter setting area, a coupling constraint declaration area, and an applicable condition declaration area. The program header information area includes a unique program identifier, version number, and creator's digital signature; the parameter setting area lists the target settings of all adjustable physical quantities in key-value pairs; the coupling constraint declaration area defines the dynamic dependencies between parameters in the form of logical expressions, for example, when the ultrasonic frequency setting is higher than a preset safety threshold, the fluid pressure setting must not be lower than the minimum compensation value required to maintain the stability of the developer concentration; the applicable conditions declaration area clearly defines the set of preconditions for the program to be legally invoked, including substrate material code, photoresist type code, pattern linewidth range, and front-end exposure dose range.

[0009] As a preferred embodiment, the parameter coupling constraint engine includes a rule parsing submodule, a real-time state evaluation submodule, and a conflict arbitration submodule; after receiving a program call instruction, the rule parsing submodule extracts the coupling constraint declaration area content of the corresponding program from the process program management module and converts it into an executable decision logic tree; The real-time status assessment submodule continuously receives the actual running values ​​uploaded by the multi-physical quantity sensing module and compares them with the parameter settings of the current program to generate a deviation vector. The conflict arbitration submodule then determines whether there is a violation of coupling constraints based on the decision logic tree and the deviation vector. If there is, it immediately interrupts the output of the execution unit drive module, sends a conflict alarm signal to the human-machine interface, and records the conflict event log to the trusted data encapsulation module.

[0010] As a preferred approach, each sensor in the multi-physical quantity sensing module integrates a local security element chip. The chip has a built-in unique device certificate and time synchronization unit, which are used to digitally sign and timestamp the original sensing data to ensure the authenticity of the data source and the non-repudiation of the time series. Each sensor is connected to the isolated analog input port of the central controller via a twisted-pair shielded cable. The temperature and humidity sensors use platinum resistance and capacitive sensing principles, the pressure and flow sensors use piezoresistive and turbine measurement structures, and the ultrasonic amplitude and frequency detectors achieve non-invasive monitoring through embedded current transformers and phase-locked loops.

[0011] In a preferred embodiment, the execution unit drive module includes multiple independent drive sub-units, each drive sub-unit corresponding to a physical execution mechanism and equipped with a local feedback loop; Specifically, the temperature control device drive subunit is connected to the heating rod and the cooling solenoid valve. Its output is regulated by a PID controller, and the setpoint of the PID controller is dynamically provided by a parameter coupling constraint engine. The fluid pump drive subunit is controlled by a frequency converter. Its speed command is proportional to the flow rate setpoint and is dynamically corrected through the closed-loop feedback of the flow meter. The proportional control valve drive subunit receives the pressure setpoint and adjusts the opening based on the valve position feedback signal to maintain stable pipeline pressure; the ultrasonic generator drive subunit includes a power amplifier circuit and a frequency synthesizer, whose output frequency and amplitude strictly follow the setpoint, and has overload protection and automatic resonance point tracking function.

[0012] As a preferred approach, the trusted data encapsulation module uses a security chip as the core processing unit. The chip supports the national cryptographic SM2 / SM3 algorithm for signing and hashing data packets. The data packets are generated according to a fixed frame structure, which includes a program identifier field, parameter setting field, actual running field, verification status field, timestamp field, and device identity field in sequence. All fields are verified for integrity before being written. The data packet is immediately stored in the read-only memory area after it is generated, and then pushed to the manufacturing execution system interface module via the dual-port RAM shared buffer through the DMA controller, ensuring the atomicity and uninterruptibility of data transmission.

[0013] As a preferred approach, the manufacturing execution system interface module adopts a dual-channel redundancy design. The main channel achieves high-speed data upload based on the TCP / IP protocol stack, while the backup channel maintains basic communication capabilities when the main channel fails via power line carrier. The interface module has a built-in protocol conversion engine that can map local data packet formats to the XML or JSON Schema structure required by the manufacturing execution system, and attach a session key before uploading to achieve end-to-end encryption; The module supports reverse instruction parsing, and can receive program switching instructions, audit trigger instructions or remote locking instructions issued by the manufacturing execution system, and feed back the instruction legality verification results to the central controller.

[0014] As a preferred approach, the central controller adopts a multi-core heterogeneous architecture, in which the main core is responsible for running the parameter coupling constraint engine and the process program management module, while the co-core is dedicated to handling the high-frequency sampling tasks of the multi-physical quantity sensing module. The two cores exchange data through shared memory and message queue mechanisms to ensure the timing consistency between control logic and perception data; the central controller's operating system runs in a trusted execution environment, and all critical processes undergo integrity measurement at startup to prevent malicious code injection or logic tampering.

[0015] As a preferred embodiment, the human-machine interface module is connected to the central controller via a secure serial bus, and its displayed content is strictly limited to the applicable conditions declaration area of ​​the current program. When a customer attempts to select a program that exceeds their permissions or the current state of the device does not meet the prerequisites, the interface will automatically disable the option and indicate the reason. All program selection operations must pass two-factor authentication. The authentication information is jointly provided by the local biometric module and the dynamic token generator and recorded by the trusted data encapsulation module.

[0016] As a preferred approach, the system automatically performs a pre-charge calibration process before each process execution begins: first, the multi-physical quantity sensing module performs zero-point drift detection on all sensors; The execution unit driver module performs stroke tests on each actuator; The parameter coupling constraint engine dynamically fine-tunes the initial settings based on the calibration results to ensure that the system is in a benchmark-consistent state; the execution results of the calibration process are uploaded to the manufacturing execution system as part of the data packet, forming the basic evidence chain for process reproducibility.

[0017] As a preferred approach, the parameter coupling constraint engine supports an online learning mechanism. When the manufacturing execution system reports an anomaly in a batch of products, the system can automatically trace back the parameter combinations and running trajectories in the corresponding data packets and generate new coupling constraint rule suggestions based on a historical successful case library. These suggestions must be digitally signed by the original manufacturer before being written into the process program management module, thereby achieving compliant evolution of control logic without exposing the underlying code.

[0018] The beneficial effects of this invention are as follows: The digital control system for a developing equipment described in this invention, through a separate design of formal program templates and coupling constraint declarations, avoids customer-defined operations from disrupting the system's verification state; it utilizes the dual protection of a local secure element chip and a trusted execution environment to ensure end-to-end tamper-proof protection for sensor data and control commands; it achieves real-time inference and conflict interception of dynamic dependencies between parameters, preventing process deviations caused by parameter mismatches; it ensures that all operational behaviors are accompanied by a complete causal evidence chain, meeting the audit requirements of heavily regulated industries; and it maintains highly reliable data interaction with the manufacturing execution system through dual-channel redundant communication and protocol adaptive conversion mechanisms; simultaneously, through the closed-loop linkage of pre-charge calibration processes and online learning mechanisms, it ensures the continuous convergence of the process window and the compliant iteration of control logic. Attached Figure Description

[0019] The invention will now be further described with reference to the accompanying drawings.

[0020] Figure 1 This is a structural block diagram of a digital control system for a developing equipment according to the present invention. Detailed Implementation

[0021] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0022] like Figure 1As shown in the embodiment of the present invention, a digital control system for a developing equipment comprises a process program management module, a multi-physical quantity sensing module, a parameter coupling constraint engine, an execution unit driving module, a trusted data encapsulation module, and a manufacturing execution system interface module. Each module achieves information interaction and collaborative control through a central controller. Under the premise that the customer independently selects a preset program, the system ensures that all operations are in a verifiable, traceable, and dynamically coordinated state among parameters.

[0023] The process program management module is used to store and manage multiple formatted process programs. Each process program is defined in the form of a structured data object, which includes the developer temperature setting, ambient humidity setting, fluid pressure setting, flow rate setting, ultrasonic amplitude setting, and ultrasonic frequency setting. It is further associated with the material type identifier, graphic density range identifier, and process window boundary conditions applicable to the program. Each formatted process program adopts a unified program template structure, which consists of four parts: a program header information area, a parameter setting area, a coupling constraint declaration area, and an applicable condition declaration area. The program header information area contains the program's unique identifier, version number, and the creator's digital signature; The parameter setting area lists the target settings of all adjustable physical quantities in key-value pairs; the coupling constraint declaration area defines the dynamic dependencies between parameters in the form of logical expressions. For example, when the ultrasonic frequency setting is higher than the preset safety threshold, the fluid pressure setting must not be lower than the minimum compensation value required to maintain the stability of the developer concentration. The applicable conditions declaration area clearly defines the set of prerequisites for the program to be legally invoked, including substrate material code, photoresist type code, pattern linewidth range, and front-end exposure dose range.

[0024] The multi-physical quantity sensing module is configured inside the developing equipment, including a temperature sensor, a humidity sensor, a pressure sensor, a flow meter, an ultrasonic amplitude detector, and a frequency detector. Each sensor is connected to the central controller via an industrial-grade communication bus to collect the actual operating values ​​of the corresponding physical quantities in real time. Each sensor integrates a local security element chip, which has a built-in unique device certificate and time synchronization unit for digitally signing and timestamping the original sensing data to ensure the authenticity of the data source and the non-repudiation of the time series. Each sensor is connected to the isolated analog input port of the central controller via a twisted-pair shielded cable. The temperature and humidity sensors use platinum resistance and capacitive sensing principles, the pressure and flow sensors use piezoresistive and turbine measurement structures, and the ultrasonic amplitude and frequency detectors achieve non-invasive monitoring through embedded current transformers and phase-locked loops.

[0025] The parameter coupling constraint engine is built into the central controller. Its input terminals are connected to the process program management module and the multi-physical quantity sensing module, respectively. After the customer selects a formatted process program, it dynamically generates a set of coupling relationship rules between parameters based on the material type, graphic density and process window boundary conditions associated with the program, and performs consistency verification on the current actual running value based on the rules. The parameter coupling constraint engine includes a rule parsing submodule, a real-time status evaluation submodule, and a conflict arbitration submodule. Upon receiving a program call instruction, the rule parsing submodule extracts the corresponding program's coupling constraint declaration area from the process program management module and converts it into an executable decision logic tree. The real-time status evaluation submodule continuously receives actual operating values ​​uploaded by the multi-physical quantity sensing module and compares them with the parameter settings of the current program to generate a deviation vector. The conflict arbitration submodule determines whether there is a violation of coupling constraints based on the decision logic tree and the deviation vector. If there is, it immediately interrupts the output of the execution unit driver module, sends a conflict alarm signal to the human-machine interface, and records the conflict event log to the trusted data encapsulation module.

[0026] The execution unit drive module receives control commands that have passed the parameter coupling constraint engine verification, and drives the temperature control device, humidification device, fluid pump, proportional control valve, and ultrasonic generator respectively, so that each execution unit outputs a physical response that matches the target set value. The execution unit drive module contains multiple independent drive sub-units, each drive sub-unit corresponding to a physical execution mechanism and equipped with a local feedback loop; The temperature control device drive subunit is connected to the heating rod and the cooling solenoid valve. Its output is regulated by a PID controller, and the set point of the PID controller is dynamically provided by the parameter coupling constraint engine. The fluid pump drive subunit is controlled by a frequency converter. Its speed command is proportional to the flow rate setpoint and is dynamically corrected through closed-loop feedback from the flow meter. The proportional control valve drive subunit receives the pressure setpoint and adjusts the opening based on the valve position feedback signal to maintain stable pipeline pressure; the ultrasonic generator drive subunit includes a power amplifier circuit and a frequency synthesizer, whose output frequency and amplitude strictly follow the setpoint, and has overload protection and automatic resonance point tracking function.

[0027] The trusted data encapsulation module is bidirectionally connected to the execution unit driver module and the multi-physical quantity sensing module. It is used to encrypt and bind the selected program identifier, each set value, each actual running value, verification result, timestamp and unique device identifier in each process execution cycle to form an unalterable data packet. The trusted data encapsulation module uses a security chip as the core processing unit. The chip supports the national cryptographic SM2 / SM3 algorithm and is used to perform signature and hash operations on data packets. The generation of data packets follows a fixed frame structure, which includes, in sequence, a program identifier field, a parameter setting field, an actual running field, a verification status field, a timestamp field, and a device identity field. All fields undergo integrity verification before being written. The data packet is immediately stored in the read-only memory area after it is generated, and then pushed to the manufacturing execution system interface module via the dual-port RAM shared buffer through the DMA controller, ensuring the atomicity and uninterruptibility of data transmission.

[0028] The manufacturing execution system interface module adopts an extended control specification compliant with IEC 61850, and uploads data packets to the manufacturing execution system in real time via a secure communication protocol, while simultaneously receiving program call instructions or audit query requests from the manufacturing execution system. The manufacturing execution system interface module employs a dual-channel redundancy design: the primary channel achieves high-speed data upload based on the TCP / IP protocol stack, while the backup channel maintains basic communication capabilities in the event of a primary channel failure via power line carrier communication. The interface module has a built-in protocol conversion engine that can map local data packet formats to the XML or JSON Schema structure required by the manufacturing execution system, and attach a session key before uploading to achieve end-to-end encryption; The module supports reverse instruction parsing, and can receive program switching instructions, audit trigger instructions or remote locking instructions issued by the manufacturing execution system, and feed back the instruction legality verification results to the central controller.

[0029] The central controller adopts a multi-core heterogeneous architecture, in which the main core is responsible for running the parameter coupling constraint engine and the process program management module, while the co-core is dedicated to handling the high-frequency sampling tasks of the multi-physical quantity sensing module. The two cores exchange data through shared memory and message queue mechanisms to ensure the timing consistency between control logic and perception data. The central controller's operating system runs in a trusted execution environment, and all critical processes undergo integrity measurement at startup to prevent malicious code injection or logic tampering.

[0030] The human-machine interface module is connected to the central controller via a secure serial bus, and its displayed content is strictly limited to the applicable conditions declaration area of ​​the current program; When a customer attempts to select a program that exceeds their permissions or the current state of the device does not meet the prerequisites, the interface will automatically disable the option and indicate the reason. All program selection operations must pass two-factor authentication. The authentication information is jointly provided by the local biometric module and the dynamic token generator and recorded by the trusted data encapsulation module.

[0031] Before each process execution begins, the system automatically performs a pre-charge calibration procedure: The multi-physical quantity sensing module performs zero-point drift detection on all sensors; The execution unit driver module performs stroke tests on each actuator; The parameter coupling constraint engine dynamically fine-tunes the initial settings based on the calibration results to ensure that the system is in a benchmark-consistent state. The execution results of the calibration process are uploaded to the manufacturing execution system as part of the data packet, forming a basic chain of evidence for process reproducibility.

[0032] The parameter coupling constraint engine supports an online learning mechanism. When the manufacturing execution system reports an anomaly in a batch of products, the system can automatically trace back the parameter combinations and running trajectory in the corresponding data packet and generate new coupling constraint rule suggestions based on the historical success case library. The recommendations must be digitally signed by the original manufacturer before being written into the process management module, thereby enabling compliant evolution of control logic without revealing the underlying code.

[0033] In one specific embodiment, the digital control system of the developing equipment of the present invention is applied to the semiconductor wafer developing process. The selected formatted process program is identified as DEV-087B, and its parameter setting area is defined as follows: The developer temperature setting is 23.5℃, the ambient humidity setting is 45%RH, the fluid pressure setting is 0.28MPa, the flow rate setting is 1.8 L / min, the ultrasonic amplitude setting is 35 μm, and the ultrasonic frequency setting is 42 kHz. The applicable conditions declaration section limits the program to silicon substrates (material code Si-01), positive photoresist (type code PR-03), pattern linewidths ranging from 45 to 90 nm, and front-end exposure dose ranges from 120 to 150 mJ / cm². The coupling constraint declaration section contains the following logical expression: in, This indicates the ultrasonic frequency setting value (unit: kHz). This indicates the fluid pressure setpoint (unit: MPa).

[0034] In the embodiment described, the actual operating values ​​collected in real time by the multi-physical quantity sensing module are: temperature 23.6℃, ​​humidity 44.8%RH, pressure 0.278 MPa, flow rate 1.81 L / min, ultrasonic amplitude 34.9 μm, and frequency 42.1 kHz. The deviation vector calculated by the real-time state evaluation submodule of the parameter coupling constraint engine is [+0.1℃, -0.2%RH, -0.002 MPa, +0.01 L / min, -0.1 μm, +0.1 kHz]. The rule parsing submodule converts the above coupling constraint expression into a decision logic tree. The conflict arbitration submodule determines that the current pressure setpoint 0.28 MPa ≥ 0.25 MPa, which meets the constraint condition. Therefore, the verification passes, and the execution unit drive module outputs control commands normally.

[0035] The data packet generated by the trusted data encapsulation module contains the following fields: program identifier DEV-087B, parameter setting value list, actual running value list, verification status PASS, timestamp 2024-06-15T14:23:07.128Z, and device identity DEV-SN2023087654; The data packet is hashed using SM3, signed with the SM2 private key, and uploaded to the MES system through the Manufacturing Execution System Interface Module.

[0036] In another embodiment, the customer attempts to invoke program DEV-092C, whose applicable conditions declaration area requires the substrate material to be GaAs (code GaAs-02), but the current device is equipped with a Si substrate; After receiving the selection instruction, the human-machine interface module automatically disables the program option according to the contents of the applicable conditions declaration area and displays a prompt message on the interface: The current substrate material is incompatible and DEV-092C cannot be called.

[0037] In the third embodiment, the system detects that the ultrasonic frequency setting has been temporarily modified to 45 kHz, while the fluid pressure setting remains at 0.22 MPa; Conflict arbitration submodule decision of parameter coupling constraint engine If the coupling constraint rules are violated, the drive output of the ultrasonic generator and the fluid pump will be immediately interrupted, and an alarm signal will be sent to the human-machine interface: parameter coupling conflict: ultrasonic frequency is too high, fluid pressure is insufficient. The conflict event will be recorded in the trusted data encapsulation module, and the verification status field in the data packet will be marked as FAIL-CONSTRAINT_VIOLATION.

[0038] Comparative Example 1 uses a traditional developing control system with no parameter coupling constraint mechanism, allowing customers to freely set each parameter; Under the same equipment conditions, the customer set the ultrasonic frequency to 45 kHz and the fluid pressure to 0.22 MPa, without any system intervention. The results showed that the local concentration of the developer fluctuated by ±12%, and the RMS value of the pattern edge roughness was 3.8 nm, exceeding the upper limit of the specification (≤2.5 nm).

[0039] Comparative Example 2 uses a control system that only has static parameter verification, that is, it checks whether the parameters are within the preset range when the program is loaded, but does not consider the dynamic dependencies between parameters. After loading program DEV-087B, the customer manually reduced the fluid pressure to 0.22 MPa, and the system did not stop because this value was still within the globally permissible range (0.20–0.40 MPa). Following process execution, uneven development still occurred, with a pattern defect density of 1.2 defects / cm².

[0040] Comparative Example 3 uses a sensor configuration without local security elements, and the sensing data is not digitally signed or timestamped. During the audit, it was impossible to confirm whether the data from a certain abnormal operation had been tampered with, which led to the failure of the root cause analysis and the inability to verify the reproducibility of the process.

[0041] The comparison data of Examples 1, 2, and 3 with Comparative Examples 1, 2, and 3 are shown in the table below: Furthermore, during the process execution of Example 1, the real-time verification logic executed by the parameter coupling constraint engine can be described by the following mathematical model; Let the system state vector be ,in Temperature (°C) Humidity (%RH) The fluid pressure is measured in MPa. Flow rate (L / min) The amplitude of the ultrasound is (μm). The ultrasonic frequency (kHz) is used. The setpoint vector is... Coupling constraint set Defined as: , The real-time state assessment submodule calculates the deviation vector. The conflict arbitration submodule executes the following decision function: in, and Taken from respectively The sixth and third components. If If this occurs, the conflict resolution process will be triggered.

[0042] In the pre-charge calibration process, the system executes the following algorithm for zero-point drift detection. For the first... One sensor, collecting data Output value in the sub-silent state , Calculate the mean ,like ,in This is the factory reference zero point. To allow drift thresholds (such as temperature sensors) If the value is ), then the sensor needs calibration. Calibration coefficient. It is written into the parameter coupling constraint engine for dynamic fine-tuning of subsequent settings.

[0043] During the actuator stroke test, the temperature control device drive subunit controlled the heating rod to heat up to 30°C and then shut it off, recording the time constant for cooling down to 20°C. ; The fluid pump drive subunit operates at 50% of its rated speed for 10 seconds, and the actual discharge is calculated by integrating the flow meter. ,like If this occurs, a maintenance alarm will be triggered. All the above calibration results are embedded as metadata in trusted data packets.

[0044] The online learning mechanism is implemented based on the following rule-based generation algorithm. Let the historical successful case database be... ,in Indicates the first The second process was successful. This indicates failure. When new abnormal batch data... When feedback is received, the system calculates its Mahalanobis distance from successful cases: , in This is the covariance matrix for successful cases. If... ( If the threshold is set (e.g., 3.0), then the parameter combination is considered abnormal. The system extracts... The combination of dimensions that violates physical laws generates new coupling constraint suggestions, for example, if kHz, then MPa. The proposed value can only be written into the coupling constraint declaration area of ​​the process program management module after being signed with the original manufacturer's private key.

[0045] In summary, this invention avoids customer-defined operations from disrupting the system verification state through a separate design of formal program templates and coupling constraint declarations; it ensures end-to-end tamper-proof protection of sensor data and control commands by utilizing the dual safeguards of local secure element chips and trusted execution environments; it achieves real-time inference and conflict interception of dynamic dependencies between parameters, preventing process deviations caused by parameter mismatches; it ensures that all operational behaviors are accompanied by a complete causal evidence chain, meeting the audit requirements of heavily regulated industries; and it maintains highly reliable data interaction with the manufacturing execution system through dual-channel redundant communication and protocol adaptive conversion mechanisms; simultaneously, it ensures continuous convergence of the process window and compliant iteration of control logic through the closed-loop linkage of pre-charge calibration processes and online learning mechanisms.

[0046] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A digital control system for a developing equipment, characterized in that, include: The process program management module is used to store and manage multiple formatted process programs. Each formatted process program is defined in the form of a structured data object, which includes developer temperature setting, ambient humidity setting, fluid pressure setting, flow rate setting, ultrasonic amplitude setting, and ultrasonic frequency setting, and is associated with the material type identifier, graphic density range identifier, and process window boundary conditions applicable to the formatted process program. A multi-physical quantity sensing module is configured inside the developing equipment, including a temperature sensor, a humidity sensor, a pressure sensor, a flow meter, an ultrasonic amplitude detector, and a frequency detector. The parameter coupling constraint engine, built into the central controller, has its input terminals connected to the process program management module and the multi-physical quantity sensing module, respectively. After the customer selects a formatted process program, it dynamically generates a set of coupling relationship rules between parameters based on the material type, graphic density and process window boundary conditions associated with the formatted process program, and performs consistency verification on the current actual operating values ​​based on the rules. The execution unit drive module receives control commands that have been verified by the parameter coupling constraint engine, and drives the temperature control device, humidification device, fluid pump, proportional control valve and ultrasonic generator respectively, so that each execution unit outputs a physical response that matches the target set value; The trusted data encapsulation module is bidirectionally connected to the execution unit driver module and the multi-physical quantity sensing module. It is used to encrypt and bind the selected program identifier, each set value, each actual running value, verification result, timestamp and unique device identifier in each process execution cycle to form an unalterable data packet. The Manufacturing Execution System (MES) interface module uploads the data packets to the MES in real time via a secure communication protocol, and simultaneously receives program call instructions or audit query requests from the MES.

2. The digital control system for a developing equipment according to claim 1, characterized in that, Each formatted process program stored in the process program management module adopts a unified program template structure, which consists of four parts: program header information area, parameter setting area, coupling constraint declaration area, and applicable condition declaration area; the program header information area contains a unique program identifier, version number, and creator's digital signature. The parameter setting area lists the target setting values ​​of all adjustable physical quantities in key-value pairs. The coupling constraint declaration area defines the dynamic dependencies between parameters in the form of logical expressions; The applicable conditions declaration area clearly defines the set of prerequisites for the formatted process procedure to be legally invoked, including substrate material code, photoresist type code, pattern linewidth range, and front-end exposure dose range.

3. The digital control system for a developing equipment according to claim 1, characterized in that, The parameter coupling constraint engine includes a rule parsing submodule, a real-time state evaluation submodule, and a conflict arbitration submodule. After receiving the program call instruction, the rule parsing submodule extracts the content of the coupling constraint declaration area of ​​the corresponding program from the process program management module and converts it into an executable decision logic tree. The real-time status assessment submodule continuously receives the actual operating values ​​uploaded by the multi-physical quantity sensing module, compares them with the parameter settings of the current program, and generates a deviation vector. The conflict arbitration submodule determines whether there is a violation of coupling constraints based on the decision logic tree and the deviation vector. If there is, it immediately interrupts the output of the execution unit drive module, sends a conflict alarm signal to the human-machine interface, and records the conflict event log to the trusted data encapsulation module.

4. The digital control system for a developing equipment according to claim 1, characterized in that, Each sensor in the multi-physical quantity sensing module integrates a local security element chip. The local security element chip has a built-in unique device certificate and time synchronization unit, which is used to digitally sign and timestamp the original sensing data.

5. The digital control system for a developing equipment according to claim 1, characterized in that, The execution unit drive module includes multiple independent drive sub-units, each drive sub-unit corresponding to a physical execution mechanism and equipped with a local feedback loop; The temperature control device drive subunit is connected to the heating rod and the cooling solenoid valve. Its output is regulated by a PID controller, and the set point of the PID controller is dynamically provided by the parameter coupling constraint engine. The fluid pump drive subunit is dynamically corrected through closed-loop feedback from the flow meter; The proportional control valve drive subunit receives the pressure setpoint and adjusts the opening degree according to the valve position feedback signal; The ultrasonic generator driver subunit includes a power amplifier circuit and a frequency synthesizer.

6. The digital control system for a developing equipment according to claim 1, characterized in that, The trusted data encapsulation module includes a security chip; The generation of data packets follows a fixed frame structure, which includes, in sequence, a program identifier field, a parameter setting field, an actual running field, a verification status field, a timestamp field, and a device identity field. All fields undergo integrity verification before being written. The data packet is immediately stored in the read-only memory area after it is generated, and then pushed to the manufacturing execution system interface module via the dual-port RAM shared buffer through the DMA controller.

7. The digital control system for a developing equipment according to claim 1, characterized in that, The manufacturing execution system interface module supports reverse instruction parsing, receives program switching instructions, audit trigger instructions, or remote locking instructions issued by the manufacturing execution system, and feeds back the instruction validity verification results to the central controller.

8. The digital control system for a developing equipment according to claim 1, characterized in that, The central controller's operating system runs within a trusted execution environment, and all critical processes undergo boot-time integrity measurement.

9. A digital control system for a developing equipment according to claim 1, characterized in that, It also includes a human-machine interface module, which is connected to the central controller via a secure serial bus; When a customer attempts to select a program that exceeds their permissions or the current state of the device does not meet the prerequisites, the interface automatically disables the option and displays the reason. All program selection operations must pass two-factor authentication. The authentication information is jointly provided by the local biometric module and the dynamic token generator, and recorded by the trusted data encapsulation module.

10. A digital control system for a developing equipment according to claim 1, characterized in that, The system automatically performs a pre-charge calibration process before each process execution begins: The multi-physical quantity sensing module performs zero-point drift detection on all sensors; The execution unit driver module performs stroke tests on each actuator; The parameter coupling constraint engine dynamically fine-tunes the initial settings based on calibration results; The execution result of the pre-charge calibration process is uploaded to the manufacturing execution system as part of a data packet; The parameter coupling constraint engine supports an online learning mechanism. When the manufacturing execution system reports an anomaly in a batch of products, the system automatically traces back the parameter combinations and running trajectories in the corresponding data packets and generates new coupling constraint rule suggestions based on the historical success case library. These suggestions must be digitally signed by the original manufacturer before they can be written into the process program management module.

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