Vacuum cleaning device

Abstract

The present application relates to a vacuum cleaning device. The vacuum cleaning device is provided with a cleaning chamber, a distiller having an evaporation section and a condensation section, a hot water tank, and a heat source machine. The cleaning chamber cleans a workpiece inside in a reduced pressure state using cleaning liquid supplied from a cleaning liquid tank. The evaporation section is a container shape, stores dirty liquid of the cleaning liquid discharged from the cleaning chamber, and evaporates the stored dirty liquid. The condensation section is formed integrally with the evaporation section in a manner connected to an opening of a cylinder of the evaporation section, and condenses vapor of a component of the cleaning liquid included in the dirty liquid generated by the evaporation section to regenerate the cleaning liquid. The hot water tank stores hot water in a state in which at least a part of an outer surface of the evaporation section is soaked. The heat source machine adjusts the temperature of the hot water stored in the hot water tank.

Description

Technical Field

[0001] This invention relates to a vacuum cleaning apparatus having a cleaning chamber for cleaning workpieces under reduced pressure. Background Technology

[0002] Previously, a vacuum cleaning apparatus was known that had a cleaning chamber for cleaning workpieces under reduced pressure.

[0003] In response, Japanese Patent Application Publication No. 2011-32561 discloses a cleaning apparatus comprising: a cleaning tank for degreasing and cleaning an object using a stored cleaning agent; a distillation apparatus for distilling the contaminated cleaning agent; an oil concentration measuring unit; and a distillation apparatus control unit for controlling the distillation apparatus. The distillation apparatus control unit of the cleaning apparatus disclosed in Patent Document 1 controls the distillation apparatus based on the measurement result of the oil concentration contained in the contaminated cleaning agent as measured by the oil concentration measuring unit. Summary of the Invention

[0004] The problem that the invention aims to solve However, Japanese Patent Application Publication No. 2011-32561 does not describe the specific structure of a heater for heating the cleaning agent (cleaning liquid) stored in the still. As an example of a heating unit, a device structure is envisioned that combines the functions of heat medium flow and heating by attaching a pipe through which high-temperature grease flows to the outer surface of the bottom of the still. However, in the above-mentioned device structure, there is a possibility of uneven heat transfer due to the piping structure, temperature instability during the flow of the cleaning liquid, or easy temperature fluctuations due to the relatively low specific heat of the grease. In other words, in the above-mentioned device structure, if the temperature of the cleaning liquid stored in the still cannot be properly adjusted, there is a problem of reduced distillation efficiency of the cleaning liquid.

[0005] The present invention was made in view of such problems, and its object is to provide a vacuum cleaning apparatus that can more smoothly regulate the temperature of the cleaning solution stored in the distiller.

[0006] Methods for solving problems To address the aforementioned issues, the vacuum cleaning apparatus of the present invention comprises: a cleaning chamber that uses a cleaning liquid supplied from a cleaning liquid tank to clean a workpiece under reduced pressure; a distiller having an evaporation section and a condensation section, the evaporation section being container-shaped and used to store the waste liquid from the cleaning liquid discharged from the cleaning chamber and to evaporate the stored waste liquid, the condensation section being integrally formed with the evaporation section by connecting to the opening of the evaporation section, and condensing the vapor of the cleaning liquid components contained in the waste liquid generated by the evaporation section to regenerate the cleaning liquid; a warm water tank that stores warm water in a state where at least a portion of the outer surface of the evaporation section is immersed; and a heat source that regulates the temperature of the warm water stored in the warm water tank.

[0007] Furthermore, the vacuum cleaning apparatus of the present invention also includes: a first temperature measuring unit that measures the temperature of the warm water stored in the warm water tank and the temperature of the waste liquid stored in the evaporation unit; and a control device that controls the temperature adjustment operation of the heat source machine based on the measurement result of the first temperature measuring unit.

[0008] Furthermore, the vacuum cleaning apparatus of the present invention also includes an auxiliary heater, which is disposed in the warm water tank and heats the warm water stored in the warm water tank. The control device controls the execution and cessation of the heating of the warm water by the auxiliary heater based on the measurement results of the first temperature measuring unit.

[0009] Furthermore, the vacuum cleaning apparatus of the present invention also includes: a heating plate connected to a flow channel disposed within the evaporation section and for heating the evaporation section; a second temperature measuring unit for measuring the temperature of warm water passing before and after the heating plate; a heat source unit for adjusting the temperature of the warm water flowing in the flow channel of the heating plate; and a control device for controlling the temperature adjustment operation of the heat source unit based on the measurement results of the first temperature measuring unit and the second temperature measuring unit.

[0010] Furthermore, in the vacuum cleaning apparatus of the present invention, the condenser is a heat exchanger that condenses the vapor through a cooling component having a flow channel for cooling water. The vacuum cleaning apparatus also includes a third temperature measuring unit that measures the temperature of the cooling water after it passes through the condenser. The control device calculates a distillation speed, which represents the propulsion speed of the distillation of the waste liquid performed by the distiller, based on the measurement result of the third temperature measuring unit. Based on the calculated distillation speed, the control device controls the operation of discharging the waste liquid remaining after distillation from the distiller to the outside, the operation of discharging the waste liquid from the cleaning chamber to the distiller, and the operation of temperature regulation of the heat source.

[0011] Furthermore, the vacuum cleaning apparatus of the present invention also includes: a regeneration liquid tank for storing the cleaning liquid regenerated by the condenser; a liquid volume measuring unit for measuring the liquid volume of the cleaning liquid stored in the regeneration liquid tank, and the control device uses the increase rate of the liquid volume of the cleaning liquid measured by the liquid volume measuring unit for calculating the distillation rate.

[0012] Furthermore, in the vacuum cleaning apparatus of the present invention, the control device uses a simulation model, namely a distillation model, which takes the measurement result of the third temperature measuring unit as input and the distillation rate as output, to calculate the distillation rate.

[0013] Furthermore, the vacuum cleaning apparatus of the present invention also includes: a vacuum pump connected to the distiller via a valve; a pressure measuring unit for measuring the pressure inside the distiller; and a control device for controlling the opening and closing of the valve and the vacuum pump based on the measurement results of the pressure measuring unit, thereby regulating the pressure inside the distiller.

[0014] Invention Effects According to the present invention, the vacuum cleaning apparatus can more smoothly regulate the temperature of the cleaning solution stored in the distiller. Attached Figure Description

[0015] Figure 1 This diagram is a summary illustration of the overall structure of the vacuum cleaning apparatus according to this embodiment.

[0016] Figure 2 To indicate Figure 1 A diagram showing an example of the specific structure of the vacuum cleaning apparatus.

[0017] Figure 3 To be Figure 2 The diagram shows a portion of an example of the specific structure of the distiller and the warm water tank, presented in cross-section.

[0018] Figure 4 To indicate Figure 2 A diagram showing the functional structure of the control device.

[0019] Figure 5 To indicate Figure 2 An example flowchart of a series of processes in a vacuum cleaning apparatus is shown. Detailed Implementation

[0020] Hereinafter, embodiments of the present invention (hereinafter referred to as "this embodiment") will be described with reference to the accompanying drawings. To facilitate understanding, the same structural elements and steps will be labeled with the same symbols as much as possible in the drawings, and repeated descriptions will be omitted. Furthermore, the term "part" may be replaced by other terms such as unit, module, device, or element.

[0021] <Overall Structure> Figure 1 This diagram illustrates the overall structure of the vacuum cleaning apparatus 1 according to this embodiment. The vacuum cleaning apparatus 1 includes, for example, an operating unit 10 and a control unit 20 as its main components. The operating unit 10 is a group of units that performs a series of operations, namely, in the vacuum cleaning apparatus 1, degreasing and cleaning the workpiece 2 under reduced pressure using a cleaning fluid, and distilling and regenerating the cleaning fluid contaminated by the dirt generated during cleaning. The operating unit 10 includes a cleaning chamber 110, a cleaning fluid tank 111, a distiller 120, a warm water tank 130, a heat source 140, a cooling unit 180, a waste liquid tank T1, and a regenerated liquid tank T2 as its main components.

[0022] The cleaning chamber 110 cleans the workpiece 2 housed inside under reduced pressure by using cleaning fluid supplied from the cleaning fluid tank 111. Reduced pressure refers to a pressure lower than atmospheric pressure, including a vacuum. The cleaning chamber 110 is supplied with cleaning fluid from the cleaning fluid tank 111 via valves or the like. The cleaning chamber 110 cleans the workpiece 2 by supplying cleaning fluid from the cleaning fluid tank 111 into the cleaning chamber 110 using sprayers or the like installed inside the cleaning chamber 110. The cleaning fluid remaining in the cleaning chamber after cleaning the workpiece 2 is discharged to the waste liquid tank T1 via valves or the like. Furthermore, the cleaning chamber 110 is also supplied with cleaning fluid from the regeneration liquid tank T2 via valves or the like. Additionally, the cleaning chamber 110 discharges any remaining cleaning fluid into the cleaning fluid tank 111 via valves or the like.

[0023] The cleaning fluid tank 111 stores cleaning fluid for cleaning the workpiece 2. The cleaning fluid tank 111 is supplied with cleaning fluid from the cleaning chamber 110 via valves or the like. In addition, the cleaning fluid tank 111 supplies cleaning fluid to the cleaning chamber 110 via valves or the like.

[0024] Waste liquid tank T1 is a tank for storing the cleaning fluid that has been used and contaminated during the cleaning of workpiece 2. Waste liquid tank T1 is supplied with contaminated cleaning fluid from cleaning chamber 110. Waste liquid tank T1 discharges the stored waste liquid to the evaporation section 121 of distiller 120 via valves or the like.

[0025] The distiller 120 regenerates the cleaning liquid by distilling the contaminated cleaning liquid, i.e., the sludge, supplied from the sludge tank T1. Specifically, the distiller 120 distills the sludge by evaporating it using heat supplied from the warm water tank 130 and then condensing the vapors of the cleaning liquid components contained in the sludge. Furthermore, the distiller 120 discharges the regenerated cleaning liquid to the regeneration tank T2 via valves or the like. The distiller 120 comprises an evaporation section 121 and a condensation section 122 as its main components.

[0026] The evaporation section 121 stores the waste liquid discharged from the cleaning chamber 110 via the waste liquid tank T1, and evaporates the stored waste liquid by heat supplied from the warm water tank 130. The evaporation section 121 is formed in the shape of a container and is provided at the bottom of the distiller 120. Furthermore, at least a portion of the outer surface of the evaporation section 121 is immersed in the warm water tank 130 and connected to the warm water tank 130.

[0027] The condenser 122 condenses the vapor of the cleaning liquid components contained in the sludge generated by the evaporator 121 to regenerate the cleaning liquid. The condenser 122 is integrally formed with the evaporator 121, connected to the opening of the cylinder of the evaporator 121, and is located at the top of the distiller 120. Furthermore, the condenser 122 has a cooling component internally with a flow channel for cooling water, and cools and condenses the vapor of the cleaning liquid components contained in the sludge by heat exchange with the cooling component. Then, the condenser 122 discharges the regenerated cleaning liquid to the regeneration tank T2 via a valve or the like.

[0028] The warm water tank 130 is a tank for storing warm water used to regulate the internal temperature of the evaporator 121. The warm water tank 130 is connected to the evaporator 121 such that at least a portion of the outer surface of the evaporator 121 is immersed in the warm water tank 130. Specifically, the warm water tank 130 is connected to the evaporator 121 such that the bottom of the container-shaped evaporator 121 is located inside the warm water tank 130 and covers the outer surface of the bottom of the evaporator 121. The warm water tank 130 regulates the internal temperature of the evaporator 121 by conducting the heat of the stored warm water to the outer surface of the distiller 120. Furthermore, the warm water tank 130 stores warm water supplied from the heat source 140 and then sends the stored warm water to the heat source 140. Thus, the warm water tank 130 maintains its internal temperature by circulating the warm water between itself and the heat source 140.

[0029] The heat source unit 140 is, for example, a heat pump type heat source unit that regulates the temperature of the warm water stored in the warm water tank 130. The heat source unit 140 heats the warm water delivered from the warm water tank 130 by circulating the warm water between itself and the warm water tank 130, and then delivers the heated warm water back to the warm water tank 130. The temperature of the warm water is, for example, adjusted to 75°C to 80°C, and is adjusted to at least not exceed 90°C. Furthermore, the heat source unit 140 heats the warm water to a temperature controlled by the control device 20.

[0030] The cooling unit 180 circulates cooling water between itself and the condenser section 122 via a cooling component, for example, and uses the cooling water to cool the condenser section 122. The cooling unit 180 cools the cooling water supplied from the condenser section 122 and then supplies the cooled water back to the condenser section 122. Furthermore, the cooling unit 180 cools the cooling water to a temperature controlled by the control device 20. The cooling component is, for example, a metal pipe formed to allow cooling water to flow internally, and is arranged to pass through the condenser section 122 from the cooling unit 180 and return to the cooling unit 180.

[0031] The regeneration liquid tank T2 is a tank for storing the cleaning liquid regenerated through the condenser 122. The stored cleaning liquid in the regeneration liquid tank T2 is discharged to the cleaning chamber 110 or the cleaning liquid tank 111 via valves or the like.

[0032] The control device 20 controls the degreasing and cleaning operation of the workpiece 2 performed by the actuating unit 10. Specifically, the control device 20 controls the valves, heat source 140, cooling unit 180, and other components located at various points on the actuating unit 10. Figure 1 The operation of the vacuum pump (not shown) and other components is controlled, as is the operation of the actuator 10. Furthermore, the control device 20 calculates various parameters for the degreasing and cleaning operation of the workpiece 2 performed by the actuator 10. In addition, the control device 20 acquires various information transmitted from the actuator 10. The control device 20 uses the information acquired from the actuator 10 when calculating the various parameters.

[0033] The control device 20 comprises, for example, a CPU (Central Processing Unit) 21, a memory 22, a storage device 23, a communication device 24, and an input / output device 25 as its main components. The CPU 21 functions as a functional unit by executing predetermined programs stored in the memory 22 or storage device 23. The memory 22 temporarily stores predetermined programs and data required by the CPU 21 when executing the predetermined programs. The storage device 23 stores various programs, information, and processing results required for the execution of processing in the CPU 21. The communication device 24 communicates with external devices. The input / output device 25 receives operations from the operator of the vacuum cleaning device 1 and outputs information such as screen display and sound to the operator. Furthermore, the control device 20 can be implemented using a dedicated or general-purpose computer or other information processing device; it can be composed of a single information processing device or multiple information processing devices.

[0034] Furthermore, in this embodiment, the control device 20 continuously performs calculations of various parameters for determining the content of motion control for the motion unit 10 and performs motion control for the motion unit 10, but it is not limited to this. For example, the control device 20 may also perform calculations of various parameters for motion control for the motion unit 10 and perform motion control for the motion unit 10 separately using different information processing devices. Specifically, the control device 20 may also perform calculations of various parameters using a personal computer or the like, and transmit the determined conditions from the personal computer to a dedicated control panel for actually moving the motion unit 10.

[0035] The above provides a general overview of the overall structure of the vacuum cleaning apparatus 1. Next, referring to... Figure 2 At the same time, an example of the specific structure of the vacuum cleaning device 1 will be described. Figure 2 To indicate Figure 1 A diagram showing an example of the specific structure of the vacuum cleaning apparatus 1. Figure 2 In addition to the aforementioned components, the vacuum cleaning device 1 also includes an auxiliary heater 131, a heating plate 132, a heat exchanger 150, condensers 151 and 152, an aftercooler 153, vacuum pumps 161 and 162, and mist eliminators 171 and 172. Furthermore, the vacuum cleaning device 1 also includes pumps P1 to P3, a tank D, containers T3 to T5, valves A0 to A8, B0 to B13, and C1 to C3, temperature measuring units TH1 to TH5, pressure measuring unit VG, flow measuring units S1 to S4, and liquid volume measuring unit LS.

[0036] First, the valves and measuring units will be described. Valves A0 to A8 are installed at various points in the gas flow channel of the actuating unit 10, and their opening and closing regulates the gas flow within the channel. Similarly, valves B0 to B13 are installed at various points in the cleaning fluid flow channel of the actuating unit 10, and their opening and closing regulates the cleaning fluid flow within the channel. Furthermore, valves C1 to C3 are installed at various points in the flow channel supplying warm water from the heat source unit 140, and their opening and closing regulates the warm water flow within the channel.

[0037] Flow measurement units S1 to S4 are, for example, flow sensors, and measure the flow rate of warm water or cooling water flowing in the flow channel. Flow measurement units S1 to S4 are installed at various points within the flow channel through which the cleaning fluid flows. Flow measurement units S1 to S4 transmit the measurement results to the control device 20. Flow measurement unit S1 is installed on the flow channel at the outlet side of pump P3 and measures the flow rate of warm water flowing in the flow channel. Flow measurement unit S2 is installed on the flow channel at the inlet side of heating plate 132 and measures the flow rate of warm water passing before heating plate 132. Flow measurement unit S3 is installed on the flow channel at the outlet side of pump P2 and measures the flow rate of warm water returning to heat source 140. Flow measurement unit S4 is installed on the flow channel at the inlet side of cooling component 123 and measures the flow rate of cooling water passing before the condenser 122 of distiller 120.

[0038] The pressure measuring unit VG, for example, is a vacuum gauge and is installed inside the distiller 120. The pressure measuring unit VG measures the pressure of the gas inside the distiller 120. The pressure measuring unit VG transmits the measured pressure value to the control device 20.

[0039] Temperature measuring units TH1 to TH5 are, for example, thermocouples, and measure the temperature of warm water or cooling water. Temperature measuring units TH1 to TH5 transmit the temperature measurement results to the control device 20. Temperature measuring unit TH1 measures the temperature of the waste liquid stored in the evaporation unit 121. Furthermore, temperature measuring unit TH1 measures the temperature of the warm water stored in the warm water tank 130. Temperature measuring unit TH2 consists of a pair of thermocouples, one at the inlet and one at the outlet of the flow channel of warm water passing through the heating plate 132. Temperature measuring unit TH2 measures the temperature of the warm water before and after passing through the heating plate 132. Temperature measuring unit TH3 consists of a pair of thermocouples, one at the inlet and one at the outlet of the flow channel of cooling water passing through the condenser 122. Temperature measuring unit TH3 measures the temperature of the cooling water before and after passing through the cooling component 123 of the condenser 122. Temperature measuring unit TH4 measures the temperature of the warm water just delivered from heat source 140. Temperature measuring unit TH5 consists of a pair of thermocouples, one at the inlet and one at the outlet of the flow path of the warm water passing through heat exchanger 150. Temperature measuring unit TH5 measures the temperature of the warm water before passing through heat exchanger 150 and the temperature of the warm water after passing through heat exchanger 150.

[0040] The liquid level measuring unit LS is a radar-type liquid level sensor that measures the volume of cleaning fluid stored in the regeneration liquid tank T2. The liquid level measuring unit LS is, for example, installed on the upper surface inside the regeneration liquid tank T2, and emits radar signals towards the bottom surface of the regeneration liquid tank T2. The liquid level measuring unit LS receives reflected light from the surface of the cleaning fluid stored in the regeneration liquid tank T2. Based on the received light, the liquid level measuring unit LS calculates the distance from the radar outlet to the surface of the cleaning fluid, and measures the volume of the cleaning fluid based on the calculation result.

[0041] Next, the flow of the cleaning fluid and the components related to the flow of the cleaning fluid will be explained. The cleaning fluid tank 111 discharges the stored cleaning fluid into the cleaning chamber 110 via valve B2. Furthermore, the cleaning fluid tank 111 also discharges the stored cleaning fluid into the cleaning chamber 110 in a path that sequentially passes through valve B5, pump P1, heat exchanger 150, and valve B1. Additionally, the cleaning fluid discharged from the cleaning chamber 110 is sequentially fed into the cleaning fluid tank 111 via tank T4 and valve B3. Furthermore, the temperature of the stored cleaning fluid in the cleaning fluid tank 111 is raised by circulating the stored cleaning fluid in a manner that sequentially passes from the cleaning fluid tank 111 through valve B5, pump P1, heat exchanger 150, and valve B0, and then returns to the cleaning fluid tank 111.

[0042] As described above, the cleaning fluid is fed from the cleaning fluid tank 111 into the cleaning chamber 110 via valve B2. Additionally, the cleaning fluid is also fed from the heat exchanger 150 into the cleaning chamber 110 via valve B1. The cleaning chamber 110 allows the waste liquid from the cleaning fluid used to clean the workpiece 2 to be discharged sequentially into the waste liquid tank T1 via tank T4 and valve B4.

[0043] The heat exchanger 150 is a component that exchanges heat between the cleaning fluid and warm water, and the pipes supplying the cleaning fluid and the warm water are positioned close together. Both the cleaning fluid and warm water pipes are made of a material with high thermal conductivity. The heat exchanger 150 transfers heat from the warm water to the cleaning fluid via the pipes, thereby raising the temperature of the cleaning fluid. After being heated, the cleaning fluid delivered from pump P1 is discharged from the heat exchanger 150 into the cleaning fluid tank 111 via valve B0. Furthermore, the heat exchanger 150 also discharges the heated cleaning fluid delivered from pump P1 into the cleaning chamber 110 via valve B1.

[0044] Pump P1 is a liquid pump and is installed in the flow channel for the cleaning fluid. Pump P1 delivers the incoming cleaning fluid to the heat exchanger 150 in a manner that achieves a predetermined flow rate, pressure, and velocity. The cleaning fluid is fed into pump P1 from the cleaning fluid tank 111 via valve B5.

[0045] Waste liquid tank T1 is a tank for storing the waste liquid from the cleaning fluid discharged from the cleaning chamber 110 after cleaning the workpiece 2. Waste liquid tank T1 discharges the stored waste liquid to the evaporation section 121 of the distiller 120 via valve B6.

[0046] The distiller 120 sprays out the waste liquid discharged from the waste liquid tank T1 through an internal sprayer, which is then stored in the evaporation section 121. The distiller 120 evaporates the waste liquid through the evaporation section 121. The distiller 120 condenses the vapor of the cleaning liquid components contained in the waste liquid through a cooling component 123 passing through the condensation section 122. The cleaning liquid regenerated by the distiller 120 flows into a side channel and is discharged from the channel to the regeneration liquid tank T2 via valve B9. Furthermore, the distiller 120 has a discharge port at the bottom of the evaporation section 121. The distiller 120 discharges the waste liquid remaining at the bottom of the evaporation section 121 after distillation from the discharge port to the tank T3 via valve B7.

[0047] Tank T3 is a waste liquid tank, temporarily used to store waste cleaning solution. Waste liquid is fed into tank T3 from distiller 120 via valve B7. Furthermore, tank T3 discharges the stored waste liquid to container D via valve B9.

[0048] Tank D is used to store waste liquid, specifically the waste liquid from the cleaning solution. The waste liquid is fed from tank T3 into tank D via valve B9.

[0049] The regeneration tank T2 stores the cleaning solution regenerated and discharged through the distiller 120. Additionally, the regeneration tank T2 also stores the cleaning solution discharged from the condenser 151 (described later) via valve B10. As described above, the regeneration tank T2 discharges the stored cleaning solution sequentially through valve B8, pump P1, heat exchanger 150, and valve B1 into the cleaning chamber 110. Furthermore, the regeneration tank T2 discharges the stored cleaning solution sequentially through valve B8, pump P1, heat exchanger 150, and valve B0 into the cleaning solution tank 111.

[0050] Next, the flow of warm water from the heat source 140 and the components related to the flow of warm water will be explained. The heat source 140 heats the warm water according to the control of the control device 20 and discharges the heated warm water into the warm water tank 130. In addition, warm water is fed into the warm water tank 130 from the heat source 140 via pump P2.

[0051] The auxiliary heater 131 is a heater installed in the warm water tank 130, which heats the warm water in the warm water tank 130. The auxiliary heater 131 performs heating and stopping actions according to the control device 20.

[0052] The warm water tank 130 maintains the temperature of the stored warm water by receiving warm water from the heat source unit 140. Furthermore, the warm water tank 130 releases any overflowing warm water due to volume increases caused by temperature changes into the tank T5. Additionally, the warm water tank 130 heats the stored warm water via an auxiliary heater 131. The warm water tank 130 circulates the stored warm water by returning it to the tank via pump P3 and valve C2. Furthermore, the warm water tank 130 circulates the stored warm water by returning it to the tank via pump P3, valve C1, and heat exchanger 150 in sequence. Furthermore, the warm water tank 130 circulates the stored warm water by returning it to the tank via pump P3, valve C3, and heating plate 132 in sequence. Finally, the warm water tank 130 discharges the stored warm water to the heat source unit 140 via pump P2.

[0053] Pump P2 is a liquid pump and is located in the flow channel between the warm water tank 130 and the heat source unit 140. Warm water is supplied to pump P2 from the warm water tank 130. Pump P2 delivers the warm water supplied from the warm water tank 130 to the heat source unit 140 in a manner that conforms to the flow rate, pressure, and flow velocity controlled by the control device 20.

[0054] Pump P3 is a liquid pump and is installed in the flow channel between the warm water tank 130 and valves C1 to C3. Warm water is introduced into the warm water tank 130 by pump P3. Pump P3 delivers the warm water to valves C1 to C3 in a manner that conforms to the flow rate, pressure, and velocity controlled by the control device 20.

[0055] Furthermore, regarding the flow path of the cooling water supplied from the cooling unit 180, apart from the flow measurement unit S4 and the temperature measurement unit TH3, all other components use... Figure 1 As explained, its description is omitted. Next, the elements related to the flow of gas will be described. The cleaning fluid tank 111 discharges the gas inside the cleaning fluid tank 111 to the mist eliminator 171 via valve A2.

[0056] The cleaning chamber 110 is supplied with nitrogen gas via valve A1 from a gas tank (not shown). Furthermore, the gas inside the cleaning chamber 110 is exhausted to the outside of the vacuum cleaning apparatus 1 via valve A0. Additionally, the gas inside the cleaning chamber 110 is exhausted to the mist eliminator 171 via valve A3. Furthermore, the gas inside the cleaning chamber 110 is exhausted to the condenser 151 via valve A4.

[0057] The distiller 120 discharges the gas remaining after the vapor generated by evaporation in the evaporation section 121 is condensed in the condensation section 122 through valve A5 to the condenser 151.

[0058] The condenser 151, for example a capacitor, condenses the introduced gas by cooling, thereby liquefying it. The condenser 151 receives gas containing cleaning liquid vapor from the cleaning chamber 110 via valve A4. Furthermore, the condenser 151 receives gas containing components of the cleaning liquid vapor from the distiller 120 via valve A5. The condenser 151 condenses the vapor of the introduced cleaning liquid components to regenerate the cleaning liquid. The condenser 151 discharges the regenerated cleaning liquid to the regeneration tank T2 via valve B10. Additionally, the condenser 151 exhausts residual gas after condensation to the vacuum pump 161 via valve A6.

[0059] Vacuum pump 161 is a gas pump that discharges gas at a pressure controlled by control device 20. Vacuum pump 161 draws in gas from condenser 151 via valve A6. Vacuum pump 161 discharges the drawn-in gas into condenser 152.

[0060] The condenser 152, for example a capacitor, condenses the introduced gas by cooling, thus liquefying it. The condenser 152 receives a vapor containing components of the cleaning fluid from the vacuum pump 161. Additionally, the condenser 152 also receives gas from tank T3 via valve A8. The condenser 152 condenses the vapor of the introduced cleaning fluid components to regenerate the cleaning fluid. The condenser 152 discharges the regenerated cleaning fluid to the cleaning fluid tank 111 via valve B11 and heat exchanger 150. Furthermore, the condenser 152 exhausts any remaining gas after condensation to the vacuum pump 162.

[0061] Vacuum pump 162 is a gas pump that discharges gas at a pressure controlled by control device 20. Vacuum pump 162 draws in gas from condenser 152. Vacuum pump 162 discharges the drawn-in gas to aftercooler 153.

[0062] Aftercooler 153 is a component used to recover components of the cleaning fluid contained in the exhaust gas of vacuum cleaning device 1. Aftercooler 153 regenerates the components of the cleaning fluid from the introduced gas through condensation or the like achieved by cooling. Aftercooler 153 discharges the regenerated cleaning fluid to cleaning fluid tank 111 via valve B12 and heat exchanger 150. In addition, aftercooler 153 recovers oil contained in the gas remaining after the regeneration of cleaning fluid via mist eliminator 172.

[0063] Mist eliminators 171 and 172 condense the cleaning fluid in the gas discharged from the outside of the vacuum cleaning device 1 while recovering excess oil, mist, etc. Mist eliminator 171 receives gas from the cleaning chamber 110 via valve A3. Additionally, mist eliminator 171 receives gas from the cleaning fluid tank 111 via valve A2. The condensed cleaning fluid is discharged from mist eliminator 171 to the aftercooler 153 via valve A7.

[0064] The above has described an example of the specific structure of the vacuum cleaning apparatus 1. Next, referring to... Figure 3 At the same time, the structure of the distiller 120 will be explained. Figure 3 To be Figure 2 The figure shows a portion of an example of the specific structure of the distiller 120 and the warm water tank 130, presented in cross-section. Figure 3 The image shows a cross-section of the distiller 120 and the warm water bath 130 viewed from the front side. Figure 3 The cut-off line of the cross-section is an imaginary line (not shown) extending laterally when viewed from above over the distiller 120. Additionally, in Figure 3 In the figure, the exhaust port, inlet port, and various measuring parts are not shown and are omitted.

[0065] As described above, the distiller 120 has an evaporation section 121 and a condensation section 122. Figure 3As shown, the evaporation section 121 is a container-shaped structure with an open top, which evaporates the waste liquid of the stored cleaning fluid and sends the vapor of the cleaning fluid components to the condensation section 122. The evaporation section 121 is connected to the warm water tank 130 such that at least a portion of its bottom outer surface is immersed in the warm water tank 130. Specifically, the evaporation section 121 is positioned so that a portion of its bottom outer surface is covered by the warm water tank 130. Furthermore, the evaporation section 121 has a drain hole 1212 at its bottom. The drain hole 1212 is connected to a flow channel that extends from the bottom side through the warm water tank 130 to the valve B7. In addition, the evaporation section 121 has a spray section 1213 inside. The spray section 1213 is connected to the flow channel 1211 through which the cleaning fluid flows, and stores the cleaning fluid inside the evaporation section 121 by spraying the cleaning fluid supplied from the flow channel 1211 toward the bottom surface of the interior of the evaporation section 121. The flow channel 1211 is provided to penetrate the outer wall of the evaporation section 121 from the outside of the evaporation section 121 and enter the evaporation section 121, connecting with the spray section 1213. Cleaning liquid is fed into the flow channel 1211 from the waste liquid tank T1 via valve B6. Furthermore, the evaporation section 121 is configured such that the upper opening is located inside the condensation section 122, and the area around the upper opening is covered by the outer wall of the condensation section 122.

[0066] Furthermore, multiple heating plates 132 are provided inside the evaporation section 121. These heating plates 132 are heat dissipation plates made of a metal with high thermal conductivity, and are arranged horizontally relative to the bottom surface. The heating plates 132 heat the interior of the evaporation section 121 by dissipating heat conducted from the warm water flow channel 1321. Moreover, the warm water flow channel 1321 is provided inside the evaporation section 121, extending through the multiple heating plates 132. Specifically, in Figure 3 In this configuration, the warm water flow channel 1321 is arranged such that it penetrates and enters the evaporation section 121 from the back side, passes through multiple heating plates 132, and then penetrates the back side again to reach the outside of the evaporation section 121. The warm water flow channel 1321 is formed into a pipe from a metal with high thermal conductivity, thereby conducting the heat of the warm water to the heating plates 132. Furthermore, the arrangement of the heating plates 132 and the flow channel 1321 within the evaporation section 121 is merely an example; any arrangement is acceptable as long as the flow channel 1321 extends from the outside of the evaporation section 121 to the inside of the evaporation section 121, passes through the heating plates 132, and then extends back to the outside of the evaporation section 121. Moreover, although in Figure 3 In this process, four heating plates 132 are provided in the evaporation section 121, but it is not limited to this. The number of plates can be any number, as long as they are housed in the evaporation section 121 and can ensure that the evaporation section 121 can store the volume of cleaning liquid.

[0067] The condenser 122 is a container with a central opening on the bottom side, which is provided to cover the opening above the evaporator 121. As described above, it condenses the vapor of the cleaning fluid components rising from the evaporator 121. A cooling member 123 is provided inside the condenser 122, surrounding the opening above the evaporator 121. Specifically, the cooling member 123 is provided such that it penetrates into the condenser 122 from the side, spirals around the opening above the evaporator 121, and then penetrates the side to reach the outside of the condenser 122. The cooling member 123 is a tube made of a metal with high thermal conductivity, and cooling water flows inside it. The cooling member 123 cools and condenses the vapor of the cleaning fluid components inside the condenser 122 by exchanging heat with the interior of the condenser 122, thereby regenerating the cleaning fluid. Furthermore, in the condenser section 122, a spiral flow channel is formed on the outer side and bottom side of the opening above the evaporator section 121. This spiral flow channel functions as both a receiving tray and a channel for the cleaning fluid regenerated by the cooling component 123. Specifically, at the top of the spiral flow channel surrounding the opening above the evaporator section 121, it connects to a flow channel outside the condenser section 122 equipped with a valve B9. The spiral flow channel discharges the regenerated cleaning fluid to the regeneration tank T2 via the valve B9.

[0068] As described above, the warm water tank 130 is a tank for storing warm water supplied from the heat source 140 and using the stored warm water to regulate the internal temperature of the evaporation section 121. The warm water tank 130 is connected in such a way that the bottom of the evaporation section 121 is recessed into the surface above it. The warm water tank 130 covers the bottom of the evaporation section 121 of the distiller 120 and heats the evaporation section 121 with the stored warm water. In addition, the warm water tank 130 has an auxiliary heater 131 installed inside, which also heats the stored warm water. Furthermore, the warm water tank 130 is connected to flow channels 1301 to 1306. Flow channel 1301 is for supplying warm water from the heat source 140 to the warm water tank 130. Flow channel 1302 is for supplying warm water from the warm water tank 130 to the heat source 140 via pump P2. Flow channel 1303 is used to allow warm water to flow between the tank T5 and the pump P3. Flow channel 1304 is used to feed warm water into the pump P3. Flow channel 1305 is used to feed the warm water that has passed through the heating plate 132 back into the warm water tank 130. Flow channel 1306 is used to feed the warm water that has passed through the heat exchanger 150 back into the warm water tank 130.

[0069] <Functional Structure> The specific structure of the distiller 120 has been described above. Next, the functional structure of the control device 20 in the vacuum cleaning apparatus 1 will be described. Figure 4 To indicate Figure 2 A diagram showing the functional structure of the control device 20. (See diagram for reference.) Figure 2 As shown, as a functional structure, the control device 20 includes, for example, a storage unit 290, an acquisition unit 210, a calculation unit 220, and an action control unit 230 to form the main part. The functional units other than the storage unit 290 are implemented by the CPU 21 executing programs stored in the storage device 23, etc.

[0070] The storage unit 290 stores the measurement data 291, the distillation model 292, and the control program 293. The storage unit 290 also stores various values ​​and information that the control device 20 needs to store in advance.

[0071] Measurement data 291 is data related to the measurement results transmitted from each measuring unit of the actuation unit 10. Specifically, measurement data 291 includes temperature measurement results obtained from temperature measuring units TH1 to TH5, flow rate measurement results obtained from flow rate measuring units S1 to S4, gas pressure measurement results obtained from pressure measuring unit VG, and liquid volume measurement results of the cleaning liquid volume in regeneration liquid tank T2 obtained from liquid volume measuring unit LS.

[0072] Distillation model 292 is a database representing the correspondence between the measurement results of each measuring unit of the operating unit 10 and the degree of distillation progress. For example, distillation model 292 establishes a relationship between the measurement results of the cooling water temperature obtained by the temperature measuring unit TH3 and the degree of distillation progress. The measurement result of the cooling water temperature obtained by the temperature measuring unit TH3 is, for example, the temperature difference representing the difference between the measured value of the cooling water temperature after passing through the cooling component 123 and the measured value of the cooling water temperature before passing through the cooling component 123. Furthermore, the degree of distillation progress is expressed, for example, as a percentage where the value at the complete end of distillation is set to 100. Here, the relationship between the measurement results of the cooling water temperature and the degree of distillation progress will be explained. When the still 120 distills the cleaning liquid, the vapor of the cleaning liquid components is condensed in the condenser 122 using cooling water, thereby regenerating the cleaning liquid. As a result, the temperature of the cooling water passing through the condenser 122 increases, representing the amount of energy used to cool the cleaning liquid. That is, the degree of distillation progress is related to the temperature of the cooling water.

[0073] Specific examples related to distillation model 292 are given below. Distillation model 292, for example, establishes a relationship between the delay time from the start of distillation to the start of the temperature difference as a measurement result and the degree of distillation progress. Furthermore, distillation model 292 may also establish a relationship between the increase in temperature difference per unit time during distillation and the distillation rate, which represents the speed of distillation progress. Here, the distillation rate is an index representing the speed of distillation progress when the sludge from the cleaning liquid is distilled through the distiller 120. The distillation rate is, for example, expressed as the increase in the volume of the regenerated cleaning liquid stored in the regeneration tank T2 per unit time. Distillation model 292 calculates the degree of distillation progress by multiplying the distillation rate by a predetermined unit time, etc., when expressing the relationship between the measurement result and the distillation rate.

[0074] Furthermore, the distillation model 292 can also be, for example, a simulation model capable of reinforcement learning formed by a neural network. Reinforcement learning can be implemented, for example, through AI (Artificial Intelligence). The distillation model 292 takes the measurement results from temperature measuring units TH1 to TH5, flow measuring units S1 to S4, liquid volume measuring unit LS, pressure measuring unit VG, etc., as inputs, and outputs the progress of distillation, distillation rate, etc. Based on the input of the measurement results from each measuring unit, the distillation model 292 outputs the progress of distillation and distillation rate as expected values.

[0075] Control program 293 is a program for operating the various components of the vacuum cleaning apparatus 1. Specifically, control program 293 is a program for controlling the operation of vacuum pumps 161 and 162, heat source 140, auxiliary heater 131, pumps P1 to P3, valves A0 to A8, B0 to B13, and C1 to C3.

[0076] The acquisition unit 210 acquires measurement results from each measuring unit within the operating unit 10. Specifically, the acquisition unit 210 acquires the temperature measurement results of warm water and cooling water from temperature measuring units TH1 to TH5. Furthermore, the acquisition unit 210 acquires the flow rate measurement results of warm water and cooling water from flow rate measuring units S1 to S4. Additionally, the acquisition unit 210 acquires the pressure measurement results of the gas within the distiller 120 from the pressure measuring unit VG. Furthermore, the acquisition unit 210 acquires the flow rate measurement results of the cleaning fluid in the regeneration tank T2 from the liquid volume measuring unit LS.

[0077] The calculation unit 220 calculates the progress of distillation of the cleaning fluid. When calculating the progress of distillation, the calculation unit 220 also calculates the distillation rate, which represents the rate of distillation. Specifically, the calculation unit 220 refers to the measurement results of the temperature measurement unit TH3 obtained by the acquisition unit 210 and the distillation model 292 stored in the storage unit 290. The calculation unit 220 sets the distillation rate, which corresponds to the measurement results of the temperature measurement unit TH3 in the distillation model 292, as the calculation result. Next, the calculation unit 220 calculates the progress of distillation of the waste liquid by multiplying the calculated distillation rate by a fixed time, such as the period during which the acquisition unit 210 obtains the measurement results.

[0078] Furthermore, if the distillation model 292 directly specifies the correspondence between the measurement results and the degree of distillation progress, the calculation unit 220 can also set the degree of distillation progress, which corresponds to the measurement results of the temperature measurement unit TH3, as the calculation result. Additionally, if the distillation model 292 is a simulation model formed by a neural network, the calculation unit 220 can also input the measurement results of each measurement unit specified as input to the distillation model 292. The calculation unit 220 can also set the predicted value of distillation rate, the predicted value of the degree of distillation progress, etc., output from the simulation of the distillation model 292, as the calculation result.

[0079] The motion control unit 230 operates each component of the vacuum cleaning apparatus 1 according to the control program 293. Specifically, the motion control unit 230 obtains the temperature measurement results of the warm water in the flow channels after being delivered from the warm water tank 130, the heat source 140, the flow channels before and after the heating plate 132, and the flow channels before and after the heat exchanger 150 from the temperature measuring units TH1, TH2, TH4, and TH5. Based on the obtained temperature measurement results and the control program 293, the motion control unit 230 controls the execution and cessation of the heating of the warm water performed by the heat source 140 and the auxiliary heater 131 during distillation. In addition, the motion control unit 230 controls the operation of the vacuum pumps 161 and 162 and the related valves according to the measurement results of the pressure measuring unit VG obtained by the acquisition unit 210 and the control program 293 to regulate the pressure in the distiller 120. Furthermore, the motion control unit 230 obtains the calculation results of the progress of the distillation of the sludge obtained by the calculation unit 220. The motion control unit 230 controls the actions of the components of the control program 293, which are controlled objects, based on the progress of the distillation of the waste liquid and the control program. The motion control unit 230 controls the actions of discharging the residual waste liquid from the distiller 120 to the outside (bucket D), discharging the waste liquid from the cleaning chamber 110 to the distiller 120, and adjusting the temperature of the warm water implemented by the heat source 140 and the auxiliary heater 131. For example, if the progress of distillation is delayed, the motion control unit 230 temporarily stops the discharge of waste liquid from the cleaning chamber 110, or extends the evaporation of the waste liquid implemented by the evaporation unit 121 for a longer period than usual. Furthermore, if the progress of distillation is accelerated, the motion control unit 230 speeds up the discharge of waste liquid from the cleaning chamber 110, or shortens the evaporation of the waste liquid implemented by the evaporation unit 121 for a shorter period than usual.

[0080] The functional structure of the control device 20 has been described above. Next, the process flow of a series of treatments in the vacuum cleaning device 1 will be described in detail. Figure 5 To indicate Figure 1 An example of a flowchart of a series of processes in the vacuum cleaning apparatus 1 shown.

[0081] Regarding the processing of step SP10 The vacuum cleaning apparatus 1 obtains the temperature of the warm water flowing through the flow channels in the heat source 140, the warm water tank 130, and the heating plate 132 from the temperature measuring units TH1, TH2, TH4, and TH5 via the acquisition unit 210, and uses this as the measurement result. Then, the process is transferred to step SP12.

[0082] Regarding the processing of step SP12 The vacuum cleaning apparatus 1 obtains the temperature of the cooling water before and after passing through the condenser 122 from the temperature measuring unit TH3 via the acquisition unit 210, and uses this as the measurement result. Then, the process is transferred to step SP14.

[0083] Regarding the processing of step SP14 The vacuum cleaning apparatus 1 obtains a measurement result related to the volume of cleaning liquid in the regeneration liquid tank T2 from the liquid volume measurement unit LS via the acquisition unit 210. Then, the process is transferred to step SP16.

[0084] Regarding the processing of step SP16 The vacuum cleaning apparatus 1 obtains a measurement result related to the pressure of the gas inside the distiller 120 from the pressure measuring unit VG via the acquisition unit 210. Then, the processing is transferred to step SP18.

[0085] Regarding the processing of step SP18 The vacuum cleaning apparatus 1 calculates the progress of distillation of the contaminant in the cleaning solution using a calculation unit 220. Specifically, as shown in reference... Figure 4 As explained, the vacuum cleaning apparatus 1, via the calculation unit 220, references the measurement results obtained from each measuring unit in steps SP10 to SP16 to calculate the distillation rate. The vacuum cleaning apparatus 1, via the calculation unit 220, substitutes the measurement results into the distillation model 292 stored in the storage unit 290 to calculate the progress of distillation. Alternatively, the vacuum cleaning apparatus 1 can also, via the calculation unit 220, substitute the measurement results into the distillation model 292 stored in the storage unit 290 to calculate the distillation rate, and then calculate the progress of distillation based on the distillation rate. Then, the process proceeds to step SP20.

[0086] Regarding the processing of step SP20 The vacuum cleaning device 1 controls the operation of each part of the operating unit 10 according to the distillation progress calculated by the calculation unit 220 and the control program 293 via the operation control unit 230, thereby performing distillation of the cleaning fluid. Specifically, as shown in reference... Figure 4 As explained, the motion control unit 230 speeds up or delays the distillation-related actions based on the progress of the distillation of the cleaning fluid. Then, the process moves to step SP22.

[0087] Regarding the processing of step SP22 The vacuum cleaning device 1, via the operation control unit 230, determines whether the distillation of the cleaning fluid has been completely completed based on the measurement results from the liquid volume measurement unit LS. If the determination is negative, the process returns to step SP10. Conversely, if the determination is positive, Figure 5 The series of processes shown has ended.

[0088] <Effect> In this embodiment, the vacuum cleaning apparatus 1 includes a cleaning chamber 110, a distiller 120, a warm water tank 130, and a heat source 140. The evaporation section 121 of the distiller 120 is formed as a container for storing and evaporating the waste liquid discharged from the cleaning chamber 110. Furthermore, the condensation section 122 of the distiller 120 is integrally formed with the evaporation section 121, connected to the opening of the cylinder of the evaporation section 121, and condenses the vapor of the cleaning liquid components contained in the waste liquid to regenerate the cleaning liquid. Additionally, the warm water tank 130 stores warm water supplied from the heat source 140, with at least a portion of the outer surface of the evaporation section 121 immersed in it. Therefore, the vacuum cleaning device 1 regulates the temperature of the evaporation section 121 by storing warm water in a warm water tank 130, which has a higher specific heat (e.g., 4.2 kJ / kg·K) than conventional heat transfer oil (e.g., 2.3 kJ / kg·K). This makes it easy to maintain the temperature inside the distiller 120. Furthermore, since the vacuum cleaning device 1 is configured to immerse the evaporation section 121 of the distiller 120 in the warm water tank 130, it is also easy to maintain the temperature inside the distiller 120. By making it easy to maintain the temperature inside the distiller 120, the vacuum cleaning device 1 suppresses abrupt temperature changes, thus enabling smoother regulation of the temperature of the cleaning solution stored in the distiller 120. Furthermore, since the vacuum cleaning device 1 uses warm water instead of heat transfer oil that requires periodic replacement, operating costs can be reduced. Moreover, the vacuum cleaning device 1 uses warm water, which is more environmentally friendly than heat transfer oil, thus reducing the environmental impact.

[0089] Furthermore, in this embodiment, the vacuum cleaning apparatus 1 includes: a temperature measuring unit TH1 (first temperature measuring unit) that measures the temperature of the warm water stored in the warm water tank 130 and the temperature of the waste liquid stored in the evaporation unit 121; and a control device 20 that controls the operation of the heat source 140 based on the measurement results of the temperature measuring unit TH1. Therefore, by measuring the temperature of the warm water, which has a higher specific heat than the heat medium and is easy to maintain, the vacuum cleaning apparatus 1 controls the heat source 140, thus easily stabilizing the temperature inside the distiller 120 and enabling efficient evaporation of the cleaning liquid through the evaporation unit 121. Specifically, the vacuum cleaning apparatus 1 can shorten the distillation time, reduce the power consumption associated with distillation, or suppress the adhesion of residues in the waste liquid inside the distiller 120 caused by overheating.

[0090] Furthermore, in this embodiment, the vacuum cleaning apparatus 1 also includes an auxiliary heater 131 within the warm water tank 130 for heating the warm water in the warm water tank 130. Therefore, the vacuum cleaning apparatus 1 regulates the temperature of the warm water in the warm water tank 130 not only through the heat source 140 but also through the auxiliary heater 131, thus enabling more precise temperature regulation within the warm water tank 130 and smoother temperature regulation of the cleaning solution stored in the distiller 120.

[0091] Furthermore, in this embodiment, the vacuum cleaning apparatus 1 also includes a heating plate 132 for heating the evaporation section 121 within the distiller 120, and a temperature measuring unit TH2 (second temperature measuring unit) for measuring the temperature of the warm water before and after passing through the heating plate 132. Therefore, the vacuum cleaning apparatus 1 heats the waste liquid in the distiller 120 not only through the warm water tank 130 but also through the heating plate 132, thus enabling smoother temperature regulation of the cleaning liquid stored in the distiller 120.

[0092] Furthermore, in this embodiment, a temperature measuring unit TH3 (third temperature measuring unit) is provided to measure the temperature of the cooling water after it has passed through the condenser 122 of the distiller 120. The control device 20 calculates the distillation rate based on the measurement results from the temperature measuring unit TH3, and controls a series of distillation-related actions based on the calculated distillation rate. Therefore, by determining the distillation-related state based on the temperature measurement results of the cooling water and implementing distillation-related action control, the vacuum cleaning device 1 can more efficiently perform the distillation of the cleaning liquid from the distiller 120. Specifically, the vacuum cleaning device 1 can reduce the power consumption due to distillation or shorten the distillation time.

[0093] Furthermore, in this embodiment, the vacuum cleaning apparatus 1 also includes a regeneration tank T2 and a volume measuring unit LS for measuring the volume of the cleaning liquid stored in the regeneration tank T2. The control device 20 uses the rate of increase in the volume of the cleaning liquid in the regeneration tank T2 to calculate the distillation speed. Therefore, the vacuum cleaning apparatus 1 calculates the distillation propulsion speed based on the rate of increase in the volume, thus enabling high-precision judgment of the distillation propulsion state and more efficient distillation of the cleaning liquid contaminant achieved by the distiller 120.

[0094] Furthermore, in this embodiment, the control device 20 of the vacuum cleaning apparatus 1 uses a distillation model 292, which takes the measurement result of the temperature measuring unit TH3 as input and the distillation speed as output, to calculate the distillation speed. Therefore, by using a simulation model to calculate the distillation speed, the vacuum cleaning apparatus 1 can more accurately determine the progress of distillation and more efficiently perform the distillation of the cleaning liquid from the still 120.

[0095] Furthermore, this embodiment also includes a vacuum pump 161 connected to the distiller 120 and a pressure measuring unit VG that measures the pressure inside the distiller 120. Additionally, the control device 20 adjusts the pressure inside the distiller 120 based on the measurement results from the pressure measuring unit VG. Therefore, the vacuum cleaning device 1 can adjust the pressure inside the distiller 120 to a suitable state, thus enabling more efficient distillation of the cleaning solution from the distiller 120.

[0096] <Change Example> Furthermore, this invention is not limited to the embodiments described above. That is, any design modifications made to the above embodiments by those skilled in the art, provided they possess the features of this invention, are also included within the scope of this invention. Moreover, the elements of the above embodiments and the modifications described below can be combined to the extent technically possible, and any combination thereof that incorporates the features of this invention is also included within the scope of this invention. Alternatively, the presence or absence of execution of each step constituting the flowchart, or the execution order, can be changed to the extent that it does not create a technical contradiction.

[0097] For example, in this embodiment, the vacuum cleaning apparatus 1 calculates the progress and speed of distillation based on the temperature measurement results of the cooling water obtained by the temperature measurement unit TH3 using the calculation unit 220, but it is not limited to this. The vacuum cleaning apparatus 1 may also provide a water volume sensor for measuring the amount of cooling water at the outlet side of the condenser 122 in the cooling water flow channel. Furthermore, the vacuum cleaning apparatus 1 may obtain the measurement results of the water volume sensor through the acquisition unit 210 and calculate the progress and speed of distillation based on the obtained measurement results. Specifically, the control device 20 may also determine whether the measurement results of the water volume sensor during distillation are within a predetermined range including a predefined upper and lower limit value. The control device 20 may set distillation to proceed if the determination is positive, and set distillation to stop if the determination is negative. Moreover, the control device 20 may also reflect the progress and stop states of distillation in the distillation operation. According to this structure, the vacuum cleaning device 1 judges the distillation state based on the measurement result of the cooling water volume and can reflect it in the distillation operation. Therefore, it can obtain the distillation progress state more efficiently and thus can carry out the distillation of the cleaning liquid and the sludge liquid achieved by the distiller 120 more efficiently.

[0098] Furthermore, in this embodiment, temperature measuring units TH2, TH3, and TH5 are each provided in pairs on the inlet and outlet sides of the object through which the fluid passes, but this is not a limitation. Temperature measuring units TH2, TH3, and TH5 may also be provided only on either the inlet or outlet side of the object through which the fluid passes. In this case, the control device 20, in the calculation by the calculation unit 220 and the action control implemented by the action control unit 230, does not use the temperature difference before and after the object passes through, but instead uses either the temperature before or after the object passes through. According to this structure, the vacuum cleaning device 1 can reduce the number of measuring units, thereby reducing the cost of the measuring units or simplifying control.

[0099] Furthermore, in this embodiment, such as Figure 3As shown, the evaporation section 121 is formed in the shape of a container and a cup, but it is not limited to this. The evaporation section 121 can be of any shape as long as at least a portion of its bottom outer surface is immersed in the warm water tank 130 and the vapor of the cleaning liquid components contained in the cleaning liquid is directed toward the condenser section 122. For example, the evaporation section 121 can also be formed in the shape of a flask with a wider bottom than top, or conversely, in the shape of a cone with a narrower bottom than top. In addition, the evaporation section 121 can also be formed as a container with a pipe connected at the top for feeding vapor into the condenser section 122. Furthermore, the evaporation section 121 can be a container formed with an open top and a bottom with a large number of irregularities. According to this structure, the evaporation section 121 of the vacuum cleaning device 1 can be of various shapes. Therefore, by using a distiller 120 with an evaporation section 121 of a suitable shape, the heating efficiency of the warm water in the warm water tank 130 and the overall space efficiency of the vacuum cleaning device 1 can be improved.

[0100] Symbol Explanation 1…Vacuum cleaning device; 2…Workpiece; 20…Control device; 110…Cleaning chamber; 111…Cleaning liquid tank; 120…Dispenser; 121…Evaporation section; 122…Condensation section; 123…Cooling component; 130…Warm water tank; 131…Auxiliary heater; 132…Heating plate; 140…Heat source; 161…Vacuum pump; A5 to A6…Valve; LS…Liquid volume measuring section; T2…Regeneration liquid tank; TH1…First temperature measuring section; TH2…Second temperature measuring section; TH3…Third temperature measuring section; VG…Pressure measuring section.

Claims

1. A vacuum cleaning apparatus, comprising: The cleaning chamber uses cleaning fluid supplied from the cleaning fluid tank to clean the workpiece under reduced pressure. A distiller having an evaporation section and a condensation section, the evaporation section being container-shaped and used to store the waste liquid of the cleaning fluid discharged from the cleaning chamber and to evaporate the stored waste liquid, the condensation section being integrally formed with the evaporation section by connecting to the opening of the evaporation section, and condensing the vapor of the components of the cleaning fluid contained in the waste liquid generated by the evaporation section to regenerate the cleaning fluid; A warm water tank that stores warm water in a state in which at least a portion of the outer surface of the evaporation section is immersed; A heat source unit that regulates the temperature of the warm water stored in the warm water tank.

2. The vacuum cleaning apparatus as described in claim 1, wherein, It also has: The first temperature measuring unit measures the temperature of the warm water stored in the warm water tank and the temperature of the waste liquid stored in the evaporation unit; The control device controls the temperature regulation operation of the heat source machine based on the measurement results of the first temperature measuring unit.

3. The vacuum cleaning apparatus as described in claim 2, wherein, It also includes an auxiliary heater, which is installed inside the warm water tank and heats the warm water stored in the tank. The control device controls the heating of the water by the auxiliary heater and stops it based on the measurement results of the first temperature measuring unit.

4. The vacuum cleaning apparatus as described in claim 2, wherein, It also has: A heating plate is connected to a flow channel disposed within the evaporation section and heats the evaporation section. The second temperature measuring unit measures the temperature of the water before and after passing through the heating plate. The heat source unit regulates the temperature of the warm water flowing in the flow channel of the heating plate. The control device controls the temperature regulation of the heat source machine based on the measurement results of the first temperature measuring unit and the second temperature measuring unit.

5. The vacuum cleaning apparatus as described in claim 2, wherein, The condensation section is a heat exchanger that condenses the steam through a cooling component having a flow channel for cooling water. The vacuum cleaning device also includes a third temperature measuring unit, which measures the temperature of the cooling water after it passes through the condensation section. The control device calculates the distillation speed, which represents the propulsion speed of the distillation of the sludge performed by the distiller, based on the measurement results of the third temperature measuring unit, and controls the actions of discharging the residual waste liquid after distillation from the distiller to the outside, discharging the sludge liquid from the cleaning chamber to the distiller, and adjusting the temperature of the heat source machine based on the calculated distillation speed.

6. The vacuum cleaning apparatus as described in claim 5, wherein, It also has: A regeneration tank for storing the cleaning fluid regenerated through the condenser; The liquid volume measuring unit measures the volume of the cleaning liquid stored in the regeneration liquid tank. The control device uses the rate of increase of the cleaning fluid volume measured by the liquid volume measuring unit to calculate the distillation rate.

7. The vacuum cleaning apparatus as described in claim 5, wherein, The control device uses a simulation model, i.e., a distillation model, which takes the measurement result of the third temperature measuring unit as input and the distillation rate as output, to calculate the distillation rate.

8. The vacuum cleaning apparatus according to any one of claims 2 to 7, wherein, It also has: A vacuum pump is connected to the distiller via a valve; The pressure measuring unit measures the pressure inside the distiller. The control device controls the opening and closing of the valve and the vacuum pump based on the measurement results of the pressure measuring unit, thereby regulating the pressure inside the distiller.

Images