Wrist joint module and robot arm device

Abstract

The application relates to the technical field of semiconductor wafer conveying equipment, in particular to a wrist joint module and a mechanical arm device, the fixed unit is used for fixed connection with a mechanical arm module, the movable unit is used for separable cooperation with an external interfacing unit, the movable unit is used for separable installation on the fixed unit, so that the movable unit is separated from the fixed unit when the movable unit cooperates with the external interfacing unit, and the movable unit is connected with the fixed unit when the movable unit is separated from the external interfacing unit. The purpose of the application is to solve at least one technical problem in the background art, and provide a wrist joint module and a mechanical arm device.

Description

Technical Field

[0001] This application relates to the field of semiconductor wafer transport equipment technology, and more specifically, to a wrist joint module and a robotic arm device. Background Technology

[0002] Current wrist joint designs commonly suffer from a deep coupling between transmission accuracy and the accuracy of the robotic arm itself. Specifically, the positioning and handover accuracy of workpieces such as wafers is directly limited by the absolute motion accuracy of the robotic arm's end effector. Therefore, in applications with high precision requirements, such as semiconductor processing and assembly, achieving high-precision transmission generally involves improving the mechanical manufacturing precision of the robotic arm itself (e.g., using higher-grade guide rails, bearings, and transmission components) and equipping it with a higher-performance motion control system. This leads to increased complexity in the equipment structure, a significant increase in material and processing costs, and further costs associated with improving the motion control system. Summary of the Invention

[0003] The purpose of this application is to provide a wrist joint module and a robotic arm device to address at least one of the technical problems mentioned in the background art.

[0004] To achieve the above objectives, this application adopts the following technical solution: One aspect of this application provides a wrist joint module, including a fixed unit and a movable unit. The fixed unit is fixedly connected to a robotic arm module, and the movable unit is detachably coupled to an external docking unit. The movable unit is detachably mounted on the fixed unit so that when the movable unit is coupled to the external docking unit, the movable unit is separated from the fixed unit, and when the movable unit is separated from the external docking unit, the movable unit is connected to the fixed unit.

[0005] Optionally, the fixing unit includes a mounting top plate and a first internal connecting member mounted on the mounting top plate, and the movable unit includes a spring, a mounting base plate, and a second internal connecting member mounted on the mounting base plate. The mounting top plate and the mounting base plate are arranged parallel to each other. One end of the spring is fixed to the mounting top plate, and the other end of the spring is fixed to the mounting base plate. The length direction of the spring is parallel to the Y direction. The second internal connecting member and the first internal connecting member are arranged in the Y direction. The second internal connecting member is used to abut against the first internal connecting member to put the spring in a stretched state.

[0006] The beneficial effect of this technical solution is that when the second internal mating part and the first internal mating part abut in the Y direction, the spring is in a controlled tension state, which provides a stable reset preload force for the moving unit and can effectively maintain the structural stability of the moving unit in the internal mating position.

[0007] Optionally, the movable unit further includes a spring hook and a spring sleeve, both fixed to the mounting base plate. The spring is hung on the spring hook, and the spring sleeve is fitted onto the spring. The inner diameter of the spring sleeve is larger than the diameter of the spring.

[0008] The beneficial effects of this technical solution are as follows: by setting spring hooks and spring sleeves on the mounting base plate, a stable and reliable installation and guiding structure is provided for the tension spring. The inner diameter of the spring sleeve is larger than the diameter of the spring, so that a radial gap is formed between the spring sleeve and the spring. This allows the spring to provide axial preload to maintain the internal docking state while the spring itself is not rigidly constrained in radial swing, thereby reducing interference and friction when the moving unit is floated and adjusted in the XY plane.

[0009] Optionally, a mating hole is provided on the mounting base plate. The fixing unit further includes a Z-direction limiting post, which is perpendicular to the mounting top plate. One end of the Z-direction limiting post is fixed to the mounting top plate, and the other end of the Z-direction limiting post passes through the mating hole. The diameter of the mating hole is larger than the diameter of the Z-direction limiting post. The spring is located on the side of the mounting base plate away from the mounting top plate. One end of the spring is fixed to the Z-direction limiting post, and the other end of the spring is fixed to the mounting base plate. The Z-direction limiting post is used to limit the distance between the mounting top plate and the mounting base plate in the Z direction.

[0010] The beneficial effect of this technical solution is that, through the clearance fit between the Z-direction limiting post and the mating hole, while ensuring that the relative position between the moving unit and the fixed unit in the Z-direction is strictly limited, the moving unit and the fixed unit are allowed to have the necessary floating clearance in the XY plane.

[0011] Optionally, the length direction of the first internal docking member is parallel to the X direction, and the movable unit includes two second internal docking members arranged in the X direction.

[0012] The beneficial effect of this technical solution is that by setting the length direction of the first internal docking member to be parallel to the X direction and configuring two second internal docking members arranged in the X direction, a linear constraint along the X direction is provided for the internal docking between the moving unit and the fixed unit. This helps to limit the rotational degree of freedom of the moving unit around the Z axis (Rz direction) in the internal docking state and enhances the guiding stability in the XY plane.

[0013] Optionally, the second internal mating member is a bearing with its axial direction parallel to the Z-direction.

[0014] The beneficial effect of this technical solution is that it changes the contact between the second internal docking member and the first internal docking member from sliding friction to rolling friction. This reduces the frictional resistance between the second internal docking member and the first internal docking member in the internal docking state of the moving unit, and helps to achieve a smoother state switching.

[0015] Optionally, the wrist joint module provided in this application further includes a plurality of spring steel wires, one end of which is fixed to the mounting top plate and the other end of which is fixed to the mounting bottom plate, and each of the spring steel wires is distributed along the outer edge of the mounting top plate.

[0016] The beneficial effects of this technical solution are as follows: by fixing multiple spring steel wires between the mounting top plate and the mounting bottom plate, and distributing each spring steel wire along the outer edge of the mounting top plate, it helps the moving unit to obtain balanced flexible support and constraint in multiple directions, thereby improving the motion smoothness and attitude stability of the moving unit when it floats in the XY plane.

[0017] Optionally, the active unit further includes an external docking assembly mounted on the mounting base plate. The external docking assembly includes an external docking member, which is a bearing with its axial direction parallel to the Z-direction. The external docking member is used to detachably engage with the external docking unit to increase the elastic deformation of the spring.

[0018] The beneficial effect of this technical solution is that it changes the contact between the moving unit and the external docking unit from sliding friction to rolling friction, which helps to reduce motion resistance and wear during the docking process.

[0019] Optionally, the external docking assembly further includes a mounting platform and an external spring. The mounting platform protrudes from the mounting base plate. Both the external docking component and the external spring are mounted on the mounting platform. In the Y direction, both the external docking component and the external spring are located at the end of the mounting platform away from the spring. The external spring is used to make elastic contact with the external docking unit before the external docking component.

[0020] The beneficial effects of this technical solution are as follows: the external spring contacts the external docking unit before the external docking component, which is a rolling element, during the docking process. This allows the elastic deformation of the external spring to absorb part of the contact impact in advance and achieve preliminary flexible guidance and pre-positioning. This helps the external docking component to enter the guide structure (such as the V-groove) of the external docking unit more smoothly, thereby reducing the impact and wear during the docking process and improving the smoothness of the contact guidance and the reliability of the final docking positioning.

[0021] Another aspect of this application provides a robotic arm device, including an external docking unit and a wrist joint module provided in this application, wherein the movable unit is used to cooperate with the external docking unit.

[0022] The technical solution provided in this application can achieve at least one of the following beneficial effects: The wrist joint module and robotic arm device provided in this application, during use, have a movable unit for gripping wafers. In the internal docking state, the movable unit remains connected to the fixed unit, and the robotic arm module drives the wrist joint module and the wafer to move, ensuring the stability of the wafer transportation process. In the external docking state, the movable unit cooperates with the external docking unit and temporarily separates from the fixed unit, ensuring that the relative position of the wafer and the external docking unit remains unchanged. This makes the final wafer handover accuracy determined by the high-precision external docking unit, rather than relying on the manufacturing accuracy and motion accuracy of the robotic arm module itself. This effectively reduces the dependence on the absolute positioning accuracy of the robotic arm, helps to reduce the requirements for the hardware performance of the robotic arm and related manufacturing costs while ensuring high-precision wafer handover, and reduces the cost of improving the motion control system.

[0023] The additional technical features and advantages of this application will become more apparent from the following description or from practical application. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the specific embodiments of this application, the accompanying drawings used in the description of the specific embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0025] Figure 1 A schematic diagram of a state portion structure of an embodiment of the robotic arm device provided in this application; Figure 2 A schematic diagram of another state portion structure of an embodiment of the robotic arm device provided in this application; Figure 3 This is a schematic diagram of one embodiment of the wrist joint module provided in this application.

[0026] Figure label: 01. Install the top plate; 02. Spring steel wire; 03. Z-axis limiting post; 04. Mating hole; 05. Spring; 06. Mounting platform; 07. Install base plate; 08. External docking unit; 09. Second internal mating component; 10. First internal mating component; 11. External docking parts; 12. Vacuum suction cup; 13. Fork; 14. Vacuum suction cup. Detailed Implementation

[0027] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0028] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0030] like Figures 1 to 3 As shown, one aspect of this application provides a wrist joint module, including a fixed unit and a movable unit. The fixed unit is used to be fixedly connected to a robotic arm module, and the movable unit is used to be detachably engaged with an external docking unit 08. The movable unit is detachably mounted on the fixed unit so that when the movable unit is engaged with the external docking unit 08, the movable unit is separated from the fixed unit, and when the movable unit is separated from the external docking unit 08, the movable unit is connected to the fixed unit.

[0031] The wrist joint module provided in this application, during use, has an active unit for gripping wafers. In the internal docking state, the active unit remains connected to the fixed unit, and the robotic arm module drives the wrist joint module and the wafer to move, ensuring the stability of the wafer transportation process. In the external docking state, the active unit cooperates with the external docking unit 08 and temporarily separates from the fixed unit, ensuring that the relative position between the wafer and the external docking unit 08 remains unchanged. This makes the final wafer handover accuracy determined by the high-precision external docking unit 08, rather than relying on the manufacturing accuracy and motion accuracy of the robotic arm module itself. This effectively reduces the dependence on the absolute positioning accuracy of the robotic arm, helps to ensure high-precision wafer handover while reducing the requirements for the hardware performance of the robotic arm and related manufacturing costs, and reduces the cost of improving the motion control system.

[0032] Optionally, the fixing unit includes a mounting top plate 01 and a first internal connecting member 10 mounted on the mounting top plate 01. The movable unit includes a spring 05, a mounting base plate 07, and a second internal connecting member 09 mounted on the mounting base plate 07. The mounting top plate 01 and the mounting base plate 07 are arranged parallel to each other. One end of the spring 05 is fixed to the mounting top plate 01, and the other end of the spring 05 is fixed to the mounting base plate 07. The length direction of the spring 05 is parallel to the Y-direction. The second internal connecting member 09 and the first internal connecting member 10 are arranged in the Y-direction. The second internal connecting member 09 is used to abut against the first internal connecting member 10 to put the spring 05 in a stretched state. When the second internal connecting member 09 abuts against the first internal connecting member 10 in the Y-direction, the spring 05 is in a controlled stretched state, so that the spring 05 provides a stable reset preload force for the movable unit, which can effectively maintain the structural stability of the movable unit in the internal docking position.

[0033] Optionally, the movable unit further includes a spring hook and a spring sleeve, both fixed to the mounting base plate 07. The spring 05 is hung on the spring hook, and the spring sleeve is fitted onto the spring 05. The inner diameter of the spring sleeve is larger than the diameter of the spring 05. By providing the spring hook and spring sleeve on the mounting base plate 07, a stable and reliable mounting and guiding structure is provided for the tension spring 05. The inner diameter of the spring sleeve is larger than the diameter of the spring 05, creating a radial gap between the spring sleeve and the spring 05. This ensures that while the spring 05 provides axial preload to maintain the internal docking state, its radial swing is not rigidly constrained, thereby reducing interference and friction when the movable unit is adjusted in the XY plane.

[0034] Optionally, a mating hole 04 is provided on the mounting base plate 07. The fixing unit further includes a Z-direction limiting post 03, which is perpendicular to the mounting top plate 01. One end of the Z-direction limiting post 03 is fixed to the mounting top plate 01, and the other end of the Z-direction limiting post 03 passes through the mating hole 04. The diameter of the mating hole 04 is larger than the diameter of the Z-direction limiting post 03. The spring 05 is located on the side of the mounting base plate 07 away from the mounting top plate 01. One end of the spring 05 is fixed to the Z-direction limiting post 03, and the other end of the spring 05 is fixed to the mounting base plate 07. The Z-direction limiting post 03 is used to limit the distance between the mounting top plate 01 and the mounting base plate 07 in the Z direction. By using the clearance fit between the Z-direction limiting post 03 and the mating hole 04, the relative position of the moving unit and the fixed unit in the Z direction is strictly limited, while allowing necessary floating clearance between the moving unit and the fixed unit in the XY plane. The spring 05 is set on the side of the mounting base plate 07 away from the mounting top plate 01 and fixed to the Z-direction limiting post 03, which optimizes the use of structural space and makes the transmission path of the preload of the spring 05 more direct. This helps to ensure that after the moving unit is disengaged from the external docking unit 08, it can more accurately return to the docking position between the first internal docking part 10 and the second internal docking part 09 by means of the preload of the spring 05. This improves the repeatability and positioning consistency of the wrist joint module provided in this application in the resetting action during continuous operation. Preferably, two annular flanges are provided on the Z-direction limiting post 03. The annular flanges are coaxial with the Z-direction limiting post 03, and the diameter of the annular flanges is larger than the diameter of the mating hole 04. The mounting base plate 07 is restricted between the two annular flanges in the Z-direction, thereby limiting the distance between the mounting top plate 01 and the mounting base plate 07 in the Z-direction. Alternatively, one annular flange is provided on the Z-direction limiting post 03, and a limiting block is provided on the mounting base plate 07. Both the annular flange and the limiting block are located on the side of the mounting base plate 07 away from the mounting top plate 01. The annular flange is located between the limiting block and the mounting base plate 07, and the annular flange contacts the mounting base plate 07. The end of the Z-direction limiting post 03 contacts the limiting block, thereby limiting the distance between the mounting top plate 01 and the mounting base plate 07 in the Z-direction. Preferably, the fixing unit includes two Z-direction limiting posts 03, which are arranged in the X direction. Two mating holes 04 arranged in the X direction are provided on the mounting base plate 07, and the two Z-direction limiting posts 03 and the two mating holes 04 are mated in a one-to-one correspondence.

[0035] Optionally, the length direction of the first internal docking member 10 is parallel to the X-direction, and the active unit includes two second internal docking members 09 arranged in the X-direction. Understandably, the X, Y, and Z directions are mutually perpendicular. By setting the length direction of the first internal docking member 10 to be parallel to the X-direction and configuring two second internal docking members 09 arranged in the X-direction, a linear constraint along the X-direction is provided for the internal docking between the active unit and the fixed unit. This helps limit the rotational freedom of the active unit around the Z-axis (Rz direction) in the internal docking state, enhancing the guiding stability in the XY plane. Furthermore, the arrangement of the two second internal docking members 09 makes the docking contact force between the first internal docking member 10 and the second internal docking member 09 more evenly distributed in the X-direction, thereby improving the anti-interference capability of the internal docking state and helping to maintain the stability of the wafer during inaccurate transfer processes.

[0036] Optionally, the second internal mating member 09 is a bearing with its axial direction parallel to the Z-direction. This changes the contact between the second internal mating member 09 and the first internal mating member 10 from sliding friction to rolling friction. This reduces the frictional resistance between the second internal mating member 09 and the first internal mating member 10 in the internal mating state of the moving unit, facilitating smoother state switching. Simultaneously, as a high-precision component, the bearing's dimensional accuracy and rotational consistency improve the repeatability of positioning between the second internal mating member 09 and the first internal mating member 10 and reduce wear caused by friction, thereby extending service life and improving the long-term operational reliability of the module.

[0037] Optionally, the wrist joint module provided in this application embodiment further includes multiple spring steel wires 02. One end of each spring steel wire 02 is fixed to the mounting top plate 01, and the other end is fixed to the mounting bottom plate 07. Each spring steel wire 02 is distributed along the outer edge of the mounting top plate 01. Preferably, the wrist joint module provided in this application includes four spring steel wires 02. By fixing multiple spring steel wires 02 between the mounting top plate 01 and the mounting bottom plate 07, and distributing each spring steel wire 02 along the outer edge of the mounting top plate 01, it helps the movable unit to obtain balanced flexible support and constraint in multiple directions, thereby improving the motion smoothness and posture stability of the movable unit when floating in the XY plane. At the same time, the multiple spring steel wires 02 work together to effectively share the load, enhance the overall rigidity of the connection structure between the movable unit and the fixed unit, and enable the wrist joint module to stably maintain its internal docking state.

[0038] Optionally, the movable unit further includes an external docking assembly mounted on the mounting base plate 07. The external docking assembly includes an external docking member 11, which is a bearing with its axis parallel to the Z-direction. The external docking member 11 is used to detachably engage with the external docking unit 08 to increase the elastic deformation of the spring 05. This changes the contact between the movable unit and the external docking unit 08 from sliding friction to rolling friction, which helps reduce motion resistance and wear during docking. When the external docking unit 08 engages with the bearing and pushes the movable unit to move, it directly causes the spring 05 connecting the movable unit and the fixed unit to generate greater elastic deformation. This not only makes the transmission of docking force more direct and smooth, but also provides conditions for the movable unit to achieve faster and more accurate reset by relying on the greater elastic potential energy stored in the spring 05 after disengaging from the external docking. This helps to improve the reliability and efficiency of the entire wrist joint module in switching between high-precision external docking and internal stable state.

[0039] Optionally, the external docking assembly further includes a mounting platform 06 and an external spring. The mounting platform 06 protrudes from the mounting base plate 07. The external docking component 11 and the external spring are both mounted on the mounting platform 06. In the Y direction, the external docking component 11 and the external spring are both located at the end of the mounting platform 06 away from the spring 05. The external spring is used to elastically contact the external docking unit 08 before the external docking component 11, which acts as a rolling element, during the docking process. This allows the external spring to elastically contact the external docking unit 08 before the external docking component 11, which acts as a rolling element, during the initial contact. This enables the elastic deformation of the external spring to absorb some of the contact impact in advance and achieve preliminary flexible guidance and pre-positioning. This helps the external docking component 11 to enter the guide structure (such as a V-groove) of the external docking unit 08 more smoothly, thereby reducing the impact and wear during the docking process and improving the smoothness of the contact guidance and the reliability of the final docking positioning.

[0040] In this embodiment of the application, the active unit further includes a fork 13, a large vacuum suction cup 14, and a small vacuum suction cup 12. The fork 13 is mounted on the mounting base plate 07, and the large vacuum suction cup 14 and the small vacuum suction cup 12 are mounted on the fork 13.

[0041] Another aspect of this application provides a robotic arm device, including an external docking unit 08 and a wrist joint module provided in the embodiments of this application, wherein the movable unit is used to cooperate with the external docking unit 08.

[0042] The robotic arm device provided in this application uses the wrist joint module provided in this application. In use, the movable unit is used to grasp the wafer. In the internal docking state, the movable unit remains connected to the fixed unit, and the robotic arm module drives the wrist joint module and the wafer to move, ensuring the stability of the wafer transportation process. In the external docking state, the movable unit cooperates with the external docking unit 08 and is temporarily separated from the fixed unit, ensuring that the relative position of the wafer and the external docking unit 08 remains unchanged. This makes the final wafer handover accuracy determined by the high-precision external docking unit 08, rather than relying on the manufacturing accuracy and motion accuracy of the robotic arm module itself. This effectively reduces the dependence on the absolute positioning accuracy of the robotic arm, which helps to reduce the requirements for the hardware performance of the robotic arm and related manufacturing costs while ensuring high-precision wafer handover, and also reduces the cost of improving the motion control system. Preferably, the external docking unit 08 is provided with one or more V-shaped grooves, with the groove opening facing the external docking part 11. The two inclined surfaces of the V-shaped groove are ground with high precision, and the surface is usually hardened (such as hard chrome plating or ceramic coating) to increase wear resistance. When the external docking part 11 docks with the external docking unit 08, the external docking part 11 rolls into the V-shaped groove.

[0043] In one application example of this application, during normal operation, the first internal docking member 10 is held on the second internal docking member 09 by the preload generated by the spring 05, at which point the wrist joint is in an internal docking state. The wrist joint module includes a set of external docking members 11. When picking up or placing wafers from a device with an external docking unit, to ensure the accuracy of wafer handover, the moving unit is connected to the docking interface of the external docking unit through the external docking members 11, and the second internal docking member 09 can be released from the internal docking interface. In this case, the X, Y, and Rz directions of the wrist joint module are guided by the external docking unit 08, while the Z, Rx, and Ry directions are still guided by the robotic arm module, at which point the wrist joint module is in an external docking state.

[0044] The fixed unit is rigidly connected to the robotic arm module, while the movable unit can move in three degrees of freedom (X, Y, and Rz), and is rigidly connected to the fixed unit in Z, Rx, and Ry. An internal and external docking device is also provided. This device is achieved through the movement of the movable unit relative to the fixed unit. Without the external docking unit 08, the connection between the movable unit and the fixed unit ensures that the relative position of the wafer and the fixed unit remains unchanged, guaranteeing the stability of wafer transportation. With the external docking unit 08 present, the external docking assembly ensures that the movable unit and the external docking unit 08 are always in contact, maintaining the relative position of the wafer and the external docking unit 08, thereby achieving high-precision wafer handover.

[0045] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A wrist joint module, characterized in that, It includes a fixed unit and a movable unit. The fixed unit is used to be fixedly connected to the robotic arm module. The movable unit is used to be detachably engaged with an external docking unit. The movable unit is detachably installed on the fixed unit so that when the movable unit is engaged with the external docking unit, the movable unit can be separated from the fixed unit, and when the movable unit is separated from the external docking unit, the movable unit can be connected to the fixed unit.

2. The wrist joint module according to claim 1, characterized in that, The fixed unit includes a mounting top plate and a first internal connecting member mounted on the mounting top plate. The movable unit includes a spring, a mounting base plate, and a second internal connecting member mounted on the mounting base plate. The mounting top plate and the mounting base plate are arranged parallel to each other. One end of the spring is fixed to the mounting top plate, and the other end of the spring is fixed to the mounting base plate. The length direction of the spring is parallel to the Y direction. The second internal connecting member and the first internal connecting member are arranged in the Y direction. The second internal connecting member is used to abut against the first internal connecting member to put the spring in a stretched state.

3. The wrist joint module according to claim 2, characterized in that, The movable unit also includes a spring hook and a spring sleeve, both fixed to the mounting base plate. The spring is hung on the spring hook, and the spring sleeve is fitted onto the spring. The inner diameter of the spring sleeve is larger than the diameter of the spring.

4. The wrist joint module according to claim 2, characterized in that, A mating hole is provided on the mounting base plate. The fixing unit also includes a Z-direction limiting post, which is perpendicular to the mounting top plate. One end of the Z-direction limiting post is fixed to the mounting top plate, and the other end of the Z-direction limiting post passes through the mating hole. The diameter of the mating hole is larger than the diameter of the Z-direction limiting post. The spring is located on the side of the mounting base plate away from the mounting top plate. One end of the spring is fixed to the Z-direction limiting post, and the other end of the spring is fixed to the mounting base plate. The Z-direction limiting post is used to limit the distance between the mounting top plate and the mounting base plate in the Z direction.

5. The wrist joint module according to claim 2, characterized in that, The length direction of the first internal docking member is parallel to the X direction, and the movable unit includes two second internal docking members arranged in the X direction.

6. The wrist joint module according to claim 2, characterized in that, The second internal mating part is a bearing with its axial direction parallel to the Z-direction.

7. The wrist joint module according to claim 2, characterized in that, It also includes multiple spring steel wires, one end of which is fixed to the mounting top plate and the other end of which is fixed to the mounting bottom plate. Each spring steel wire is distributed along the outer edge of the mounting top plate.

8. The wrist joint module according to any one of claims 2 to 7, characterized in that, The active unit also includes an external docking assembly mounted on the mounting base plate. The external docking assembly includes an external docking member, which is a bearing with its axial direction parallel to the Z direction. The external docking member is used to detachably engage with the external docking unit to increase the elastic deformation of the spring.

9. The wrist joint module according to claim 8, characterized in that, The external docking assembly further includes a mounting platform and an external spring. The mounting platform protrudes from the mounting base plate. Both the external docking component and the external spring are mounted on the mounting platform. In the Y direction, both the external docking component and the external spring are located at the end of the mounting platform away from the spring. The external spring is used to make elastic contact with the external docking unit before the external docking component.

10. A robotic arm device, characterized in that, It includes an external docking unit and a wrist joint module as described in any one of claims 1 to 9, wherein the movable unit is used to cooperate with the external docking unit.

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