Conveying device for inhibiting warping of material

Abstract

The present invention relates to a material warping prevention conveying device, which comprises a conveying unit and at least one warping prevention assembly. The conveying unit comprises a conveying area for placing and conveying at least one material. The at least one warping prevention assembly is arranged adjacent to the conveying unit. The at least one warping prevention assembly comprises a blowing head with at least one air outlet higher than the conveying area and facing the conveying area. The air flow blown from the at least one air outlet generates pressure on the at least one material to prevent the at least one material from warping, so that the at least one material can be kept flat during conveying to ensure smooth subsequent operations.

Description

Technical Field

[0001] This invention relates to conveying devices, and more particularly to a conveying device capable of suppressing material warping. Background Technology

[0002] Conveying devices emerged during the Industrial Revolution. Their ability to transport large quantities of materials quickly made production processes more efficient and scalable. It can be said that conveying devices created and promoted the assembly line production architecture. The conveying devices disclosed in Taiwan patents M656584, I691693, and I688536 belong to this category.

[0003] The conveying devices disclosed in the aforementioned patents mostly focus on improving their own conveying mechanisms to enhance conveying stability, speed, and durability. However, they neglect the impact of the conveyed materials during the conveying process, especially in the semiconductor industry, where material curling, material positioning, etc., can all affect the accuracy of subsequent steps and product quality.

[0004] Therefore, it is necessary to provide a novel and advanced conveying device that can suppress material warping in order to solve the above-mentioned problems. Summary of the Invention

[0005] The main objective of this invention is to provide a conveying device that can suppress material warping, which can apply pressure to the material through the gas ejected from the air nozzle, thereby suppressing and preventing material warping.

[0006] To achieve the above objectives, the present invention provides a conveying device capable of suppressing material warping, comprising: a conveying unit and at least one anti-warping component. The conveying unit includes a transport area for placing and transporting at least one material; the at least one anti-warping component is disposed adjacent to the conveying unit, and includes an air blowing nozzle, at least one air outlet of the air blowing nozzle being higher than and facing the transport area, thereby the airflow ejected from the at least one air outlet exerts pressure on the at least one material to suppress the warping of the at least one material.

[0007] The conveying device for suppressing material warping further includes an antistatic ion gun, which is disposed adjacent to the conveying unit and points towards the transport area, and is used to eliminate static electricity from the at least one material.

[0008] The conveying device capable of suppressing material warping further includes a stop member, which is movable between a first position and a second position at a specific location in the conveying unit; wherein, when the stop member is in the first position, the stop member protrudes from the transport area to block the at least one material, and the at least one material cannot move forward; when the stop member is in the second position, the stop member does not protrude from the transport area, and the at least one material can move forward.

[0009] The conveying device capable of suppressing material warping further includes a vision judgment mechanism, which includes a light-emitting unit and a CCD module. The light-emitting unit and the CCD module are respectively disposed on opposite sides perpendicular to the conveying area. The light-emitting unit is used to illuminate the at least one material, and the CCD module is used to identify the feature points of the at least one material.

[0010] The at least one anti-warping component further includes a base positioned on the conveying device, and the air nozzle is rotatably mounted on the base about a pivot axis.

[0011] The at least one anti-warping component further includes a base positioned on the conveying device, and the air nozzle is vertically and flexibly mounted on the base relative to the transport area.

[0012] The conveying unit further includes two side frames and two conveyor bars. The two side frames are spaced apart to jointly define the transport area. Each side frame extends along a transport direction. The two conveyor bars are rotatably mounted on the two side frames to transport at least one material along the transport direction. The two conveyor bars are used to abut against the opposite sides of the at least one material, and the middle section of the at least one material is suspended.

[0013] The conveying device for suppressing material warping further includes two rolling assemblies, which are respectively disposed on the two side frames. Each rolling assembly includes a roller, which is located above the conveyor bar. The roller and the conveyor bar are used to clamp and abut the at least one material.

[0014] Each of the rolling components further includes a base, which is disposed on the side frame, and the roller is disposed on the base and can move relative to the side frame; wherein, the movement of the roller into the transport area is defined as a working position, and the movement of the roller out of the transport area is defined as a dodging position.

[0015] The conveying device for suppressing material warping further includes a stop and a vision judgment mechanism. The stop is movable to a first position and a second position at a specific location on the conveying unit. When the stop is in the first position, it protrudes from the transport area to block at least one piece of material, preventing it from moving forward. When the stop is in the second position, it does not protrude from the transport area, allowing the at least one piece of material to move forward. The vision judgment mechanism includes a light-emitting unit and a CCD module, which are respectively positioned perpendicular to the transport area. On opposite sides, the light-emitting unit illuminates the at least one material, and the CCD module identifies the feature points of the at least one material. The at least one anti-warping assembly further includes a base positioned on the conveying device. The air nozzle is rotatably mounted on the base with a rotating axis. The air nozzle is vertically mounted on the base relative to the transport area. The conveying unit further includes two side frames and two transport bars. The two side frames are spaced apart to define the transport area. Each side frame extends along a transport direction, and the two transport bars are rotatably mounted on the two side frames to transport the at least one material along the transport bar. The conveying mechanism is configured to transport materials in the following direction: two conveyor bars are used to abut against opposite sides of at least one material, with the middle section of the material suspended; two rolling assemblies are respectively disposed on the two side frames, each including a roller located above the conveyor bars, the roller and the conveyor bars jointly clamping the at least one material; the protrusion of the stop member beyond the at least one material is at least three times the thickness of the at least one material; the visual judgment mechanism further includes two light-transmitting supports disposed on the two side frames, positioned between the two conveyor bars and the material in the conveying direction. Between the stop members, the two light-transmitting supports allow the at least one material to rest against each other on opposite sides, and the light-emitting unit illuminates the two light-transmitting supports; the number of the at least one anti-warping component is multiple, and the multiple anti-warping components are symmetrically arranged on the two side frames; in the transmission direction, the rolling component is located between the two anti-warping components; the roller can move obliquely in the transmission direction, and the direction of movement of the roller is at a 45-degree angle to the plane where the transmission strip is located; the stop member extends and retracts perpendicular to the transmission direction; when the stop member is in the first position, the vision judgment mechanism is activated to determine the front and back sides of the at least one material.

[0016] The beneficial effects of the present invention are as follows: The present invention can generate pressure on the material by blowing gas through the air nozzle, thereby inhibiting and preventing the material from warping. Attached Figure Description

[0017] Figure 1 This is a perspective view of an embodiment of the present invention.

[0018] Figure 2 This is a partial enlarged view of an embodiment of the present invention.

[0019] Figure 3 and Figure 4 This is a schematic diagram of the material conveying operation according to an embodiment of the present invention.

[0020] Figure 5 This is a schematic diagram of a visual judgment mechanism according to an embodiment of the present invention.

[0021] Figure 6 and Figure 7 This is a schematic diagram of the operation of an anti-warping component according to an embodiment of the present invention.

[0022] 1: Conveying Unit 11: Transportation Area 12: Side frame 13: Transmission bar 14: Transmission direction 2: Anti-warping components 21: Air nozzle 211: Air inlet 22: base body 23: Rotating shaft 3: Static electricity removal ion gun 4: Stopping parts 5: Visual Judgment Mechanism 51: Light-emitting unit 52: CCD module 53: Translucent support platform 6: Roller assembly 61: Roller 62: Base 7: Materials Detailed Implementation

[0023] The following examples illustrate possible implementations of the present invention, but are not intended to limit the scope of protection of the present invention. The use of "a" or "at least one" before the terms mentioned herein is not a limitation on the quantity, and may also be "multiple" depending on the requirements. Such variations in quantity are also within the scope of protection, and are therefore stated in advance.

[0024] Please refer to Figures 1 to 7 This illustrates an embodiment of the present invention, in which the conveying device of the present invention capable of suppressing material warping includes: a conveying unit 1 and at least one anti-warping component 2.

[0025] The conveying unit 1 includes a conveying area 11 for placing and conveying at least one material 7 (such as a semiconductor substrate, film, or wafer). At least one anti-warping component 2 is disposed adjacent to the conveying unit 1. The anti-warping component 2 includes an air nozzle 21, with at least one air outlet 211 of the air nozzle 21 being higher than and facing the conveying area 11. The airflow ejected from the at least one air outlet 211 exerts pressure on the at least one material 7 to suppress warping, ensuring that the at least one material 7 remains flat during conveying and facilitating subsequent production processes such as inspection and processing accuracy, thereby improving yield and production quality.

[0026] The at least one anti-warping component 2 further includes a base 22, which is positioned on the conveying device. The air nozzle 21 is rotatably mounted on the base 22 with a rotating shaft 23 as its axis, so as to adjust the angle and position of the sprayed gas according to the size, material, etc. of the at least one material 7. Furthermore, the air nozzle 21 is vertically mounted on the base 22 relative to the transport area 11 to adjust the range and intensity of the sprayed gas. In this embodiment, the number of the at least one anti-warping component 2 is multiple.

[0027] The conveying unit 1 further includes two side frames 12 and two conveyor bars 13. The two side frames 12 are spaced apart to jointly define the transport area 11. A plurality of anti-warping components 2 are symmetrically disposed on the two side frames 12 to blow air on both sides of the at least one material 7 to suppress warping. Each side frame 12 extends along a conveying direction 14. The two conveyor bars 13 are rotatably disposed on the two side frames 12 to convey the at least one material 7 along the conveying direction 14. The two conveyor bars 13 are used for the opposite two sides of the at least one material 7 to abut against, and the middle section of the at least one material 7 is suspended.

[0028] Preferably, the conveying device further includes two rolling assemblies 6, which are respectively disposed on the two side frames 12. Each rolling assembly 6 includes a roller 61, which is located above the conveyor bar 13. The roller 61 and the conveyor bar 13 are used to clamp the at least one material 7. The cooperation between the roller 61 and the conveyor bar 13 can stably drive the at least one material 7 to move along the conveying direction 14.

[0029] In this embodiment, each of the rolling components 6 further includes a base 62, which is disposed on the side frame 12, and the roller 61 is disposed on the base 62 and can move relative to the side frame 12; wherein, the movement of the roller 61 into the transport area 11 is defined as a working position, and the movement of the roller 61 away from the transport area 11 is defined as an avoidance position. Furthermore, in the transmission direction 14, the rolling assembly 6 is located between the two anti-warping assemblies 2, and the roller 61 can move obliquely in the transmission direction 14. For example, but not limited to, the moving direction of the roller 61 is at a 45-degree angle to the plane where the transmission bar 13 is located. In this way, when the roller 61 is in the avoidance position, the space of the transport area 11 can be released so that the at least one material 7 can enter the transport area 11 smoothly and without hindrance. After the at least one material 7 is placed on the two transmission bars 13, the roller 61 moves to the working position to prevent the at least one material 7 from arbitrarily leaving the transport area 11.

[0030] It is worth mentioning that, using the forward conveying direction 14 as the position determination reference, the anti-warping component 2 located in front of the roller 61 can ensure that at least one piece of material 7 can be output in a flat state along the conveying direction 14, so as to facilitate subsequent processing by the machine. When it is found that at least one piece of material 7 has a problem and needs to be reversed in the conveying direction 14, the anti-warping component 2 located behind the roller 61 can ensure that at least one piece of material 7 can maintain a flat state and move in the reverse conveying direction 14. In this way, it can be ensured that at least one piece of material 7 can move back and forth in a flat state stably along the conveying direction 14.

[0031] The conveying device further includes a stop 4, which is movable to a first position and a second position and is disposed at a specific position of the conveying unit 1, such as the stop 4 extending and retracting perpendicular to the conveying direction 14; wherein, when the stop 4 is in the first position, the stop 4 protrudes from the transport area 11 to stop the at least one material 7, and the at least one material 7 cannot move forward and can be maintained in a specific position for alignment, correction and detection; while when the stop 4 is in the second position, the stop 4 does not protrude from the transport area 11, and the at least one material 7 can move forward to the next process position.

[0032] Preferably, the stop 4 protrudes from the at least one material 7 by an amount at least three times the thickness of the at least one material 7, so as to reliably stop it.

[0033] The conveying device further includes a vision judgment mechanism 5, which includes a light-emitting unit 51 and a CCD module 52. The light-emitting unit 51 and the CCD module 52 are respectively disposed on opposite sides perpendicular to the conveying area 11. The light-emitting unit 51 illuminates the at least one material 7, and the CCD module 52 identifies the feature points of the at least one material 7. When the stop member 4 is in the first position, the vision judgment mechanism 5 is activated to determine the front and back of the at least one material 7. In this embodiment, the vision judgment mechanism 5 further includes two light-transmitting supports 53, which are disposed on the two side frames 12. The two light-transmitting supports 53 are located between the two conveying bars 13 and the stop member 4 in the conveying direction 14. The at least one material 7 is supported by opposite sides of the two light-transmitting supports 53, and the light-emitting unit 51 illuminates the two light-transmitting supports 53.

[0034] It is worth mentioning that the conveying device also includes an antistatic ion gun 3, which is located adjacent to the conveying unit 1 and points towards the transport area 11. The antistatic ion gun 3 is used to eliminate static electricity from the at least one material 7 to reduce other negative effects.

Claims

1. A conveying device capable of suppressing material warping, characterized in that: include: A conveying unit includes a transport area for placing and transporting at least one material; and At least one anti-warping component is disposed adjacent to the conveying unit and includes an air nozzle. At least one air outlet of the air nozzle is higher than and faces the conveying area, so that the airflow ejected from the at least one air outlet will exert pressure on the at least one material to suppress the warping of the at least one material.

2. The conveying device for suppressing material warping as described in claim 1, characterized in that: It also includes an antistatic ion gun, which is disposed adjacent to the conveying unit and pointed towards the conveying area, and is used to eliminate static electricity from the at least one material.

3. The conveying device for suppressing material warping as described in claim 1, characterized in that: It also includes a stop member, which is movable to a first position and a second position at a specific location of the conveying unit; wherein, when the stop member is in the first position, the stop member protrudes from the transport area to block the at least one material, and the at least one material cannot move forward; when the stop member is in the second position, the stop member does not protrude from the transport area, and the at least one material can move forward.

4. The conveying device for suppressing material warping as described in claim 1, characterized in that: It also includes a vision judgment mechanism, which includes a light-emitting unit and a CCD module. The light-emitting unit and the CCD module are respectively located on opposite sides of the vertical transport area. The light-emitting unit is used to illuminate the at least one material, and the CCD module is used to identify the feature points of the at least one material.

5. The conveying device for suppressing material warping as described in claim 1, characterized in that: The at least one anti-warping component further includes a base positioned on the conveying device, and the air nozzle is rotatably mounted on the base about a pivot axis.

6. The conveying device for suppressing material warping as described in claim 1, characterized in that: The at least one anti-warping component further includes a base positioned on the conveying device, and the air nozzle is vertically and flexibly mounted on the base relative to the transport area.

7. The conveying device capable of suppressing material warping as described in any one of claims 1 to 6, characterized in that: The conveying unit further includes two side frames and two conveyor bars. The two side frames are spaced apart to jointly define the transport area. Each side frame extends along a transport direction. The two conveyor bars are rotatably mounted on the two side frames to transport at least one material along the transport direction. The two conveyor bars are used for the opposite sides of the at least one material to abut against each other, and the middle section of the at least one material is suspended.

8. The conveying device for suppressing material warping as described in claim 7, characterized in that: It also includes two rolling assemblies, which are respectively disposed on the two side frames. Each rolling assembly includes a roller, which is located above the conveyor bar. The roller and the conveyor bar are used to clamp and abut the at least one material.

9. The conveying device for suppressing material warping as described in claim 8, characterized in that: Each of the rolling components further includes a base, which is disposed on the side frame, and the roller is disposed on the base and can move relative to the side frame; wherein, the movement of the roller into the transport area is defined as a working position, and the movement of the roller out of the transport area is defined as a dodging position.

10. The conveying device for suppressing material warping as described in claim 2, characterized in that: The system also includes a stop and a vision judgment mechanism. The stop is movable to a first position and a second position at a specific location on the conveying unit. When the stop is in the first position, it protrudes from the conveying area to block at least one material, preventing it from advancing. When the stop is in the second position, it does not protrude from the conveying area, allowing the at least one material to advance. The vision judgment mechanism includes a light-emitting unit and a CCD module, respectively located on opposite sides perpendicular to the conveying area. The unit is used to irradiate the at least one material, and the CCD module is used to identify the feature points of the at least one material; the at least one anti-warping component further includes a base, the base being positioned on the conveying device, and the air nozzle being rotatably mounted on the base with a rotating axis as its axis; the air nozzle is vertically mounted on the base relative to the transport area; the conveying unit further includes two side frames and two transmission bars, the two side frames being spaced apart to jointly define the transport area, each side frame extending along a transport direction, and the two transmission bars being rotatably mounted on the two side frames to transport the at least one material along the transport direction; The two conveyor bars are used to abut against the opposite sides of the at least one material, with the middle section of the at least one material suspended in the air. Two rolling assemblies are respectively disposed on the two side frames, each of which includes a roller located above the conveyor bars. The roller and the conveyor bars together clamp the at least one material. The protrusion of the stop member beyond the at least one material is at least three times the thickness of the at least one material. The visual judgment mechanism further includes two light-transmitting supports disposed on the two side frames, positioned between the two conveyor bars and the stop member in the conveying direction. Between the two light-transmitting supports, the at least one material is placed against the opposite sides of the two light-transmitting supports, and the light-emitting unit illuminates the two light-transmitting supports; the number of the at least one anti-warping component is multiple, and the multiple anti-warping components are symmetrically arranged on the two side frames; in the transmission direction, the rolling component is located between the two anti-warping components; the roller can move obliquely in the transmission direction, and the direction of movement of the roller is at a 45-degree angle to the plane where the transmission strip is located; the stop member extends and retracts perpendicular to the transmission direction; when the stop member is in the first position, the vision judgment mechanism is activated to determine the front and back of the at least one material.

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