Large size glass sheet level tgv via pre-rub control system, method and apparatus

Abstract

The application relates to the technical field of TGV through-hole electroplating, and provides a large-size glass plate-level TGV through-hole pre-wetting control system, method and device.The pre-wetting control system comprises a vacuum degree control module, a liquid injection module and a liquid injection amount control module, the vacuum degree is lowered in advance after vacuumizing is completed, pure water can be first soaked into the through-hole in a large-aperture interval by lowering the vacuum degree, the through-hole is pre-wetted in stages, which is favorable for further wetting of small apertures in the later treatment, and different apertures and uneven holes can be effectively wetted; based on the change consideration of the liquid demand amount of the water inlet amount of the hole and the size distribution of the hole, the final liquid injection amount is determined according to the size (volume) of the aperture and the glass thickness, the liquid injection amount is quantitatively and adaptively controlled according to the characteristics such as the glass thickness and the volume of the hole, the overall full wetting of the glass plate substrate with different plate thicknesses is more favorable, and the soaking effect of the through-hole is further improved.

Description

Technical Field

[0001] This invention relates to the field of TGV through-hole electroplating technology, and provides a large-size glass plate-level TGV through-hole pre-wetting control system, method and apparatus. Background Technology

[0002] Currently available advanced coating vacuum tanks are generally manual vacuum tanks, which cannot meet the vacuuming requirements of glass substrates. Moreover, because TGV glass substrates are very fragile, excessive spray flow or excessive shaking during oscillation can cause the thin glass substrate to break. In addition, the TGV glass substrates are relatively large, and the through-hole sizes are inconsistent and unevenly distributed, which can easily lead to inconsistent wetting effects during the wetting process (e.g., some holes are completely wetted, while others are not). This can easily lead to problems such as core encapsulation, cracks, and long filling times during the later stages of the TGV glass substrate filling process, thus affecting the effect of the through-hole coating and consequently affecting product quality. Summary of the Invention

[0003] The purpose of this invention is to provide a pre-wetting control system, method, and apparatus for large-size glass plate-level TGV through-holes, so as to solve the problem of poor wetting effect in existing large-size TGV through-holes.

[0004] In a first aspect, embodiments of the present invention provide a large-size glass plate-level TGV through-hole pre-lubrication control system, comprising: A vacuum control module is used to control the vacuum level of the vacuum tank within the first preset vacuum level range during the vacuuming stage. The liquid injection module is used to provide pure water required for wetting the through holes of the vacuum tank. The liquid injection volume control module, electrically connected to the vacuum control module, vacuum detection module, and liquid injection module, is used to adjust the vacuum level in the vacuum tank to a second preset vacuum level range before liquid injection, and to determine the liquid injection volume based on the total volume of the TGV through-holes during the directional liquid injection stage. The liquid injection volume is related to the total volume of the TGV through-holes and the liquid injection coefficient; the total volume of the TGV through-holes is the product of the volume of a single hole and the number of through-holes. A temperature regulation module is used to heat and regulate the temperature of the pure water output from the liquid injection module. The liquid injection volume control module includes a pre-injection module, electrically connected to the temperature regulation module, used to control the temperature of the pure water at a first preset temperature during the pre-injection stage. The first preset temperature = room temperature + aspect ratio (1:1~300:1) × temperature change coefficient; where room temperature is generally 22℃; when the aspect ratio is greater than 1:1; the temperature change coefficient is 0.1~0.2℃.

[0005] Optionally, the injection volume control module is used to gradually restore the injection pressure of the injection module to the target injection pressure after the pre-injection stage and before the directional injection stage; the injection volume control module includes a directional injection module, which is used to determine the injection volume based on the total volume of the TGV through-hole during the directional injection stage.

[0006] Optionally, the large-size glass plate-level TGV through-hole pre-lubrication control system further includes a timing module, which is electrically connected to the vacuum control module and is used to start liquid injection after a first preset time delay to bring the vacuum level in the vacuum tank to a second preset vacuum level range.

[0007] Optionally, the large-size glass plate-level TGV through-hole pre-lubrication control system further includes a linkage control module and an injection pressure adjustment module. The linkage control module is electrically connected to the vacuum degree detection module and the injection pressure adjustment module, and is used to adjust the injection pressure according to the deviation between the actual vacuum degree and the target vacuum degree.

[0008] Optionally, the ratio of the second preset vacuum range to the first preset vacuum range is 70%.

[0009] Optionally, the injection volume control module further includes a circulating wetting module, which is used to start the reflux pump for circulation after the injection is completed, and the circulation flow rate is 50% of the injection volume.

[0010] Optionally, the injection volume control module further includes a degassing module and a gas content detection module, wherein the gas content detection module is used to detect the gas content in the pure water; The degassing module is electrically connected to the vacuum module and the vacuum degree detection module, and is used to control the degassing power according to the gas content in the pure water, so as to maintain the vacuum degree of the vacuum tank below the third preset vacuum degree range.

[0011] Secondly, embodiments of the present invention also provide a method for controlling the pre-wetting of large-size glass plate-level TGV through-holes, comprising: S100, during the vacuuming stage, the vacuum level of the vacuum tank is controlled within a first preset vacuum level range; S200, before liquid injection, adjust the vacuum level in the vacuum tank to the second preset vacuum level range; S300, adjusts the temperature of the pure water used for injection to the first preset temperature; S400, determine the injection volume based on the total volume of the TGV through holes; the injection volume is related to the total volume of the TGV through holes and the injection coefficient, and the total volume of the TGV through holes is the product of the volume of a single hole and the number of through holes.

[0012] Optionally, in S300, the first preset temperature is determined based on the actual aspect ratio of the through hole and the temperature change coefficient.

[0013] Optionally, in S400, before directional injection, the nozzle angle is adjusted according to the orifice size after aligning the sensor with the center of the TGV through-hole array.

[0014] Optionally, the large-size glass plate-level TGV through-hole pre-wetting control method further includes: a circulating liquid injection stage; the circulating liquid injection stage specifically includes: After the injection is completed, immediately start the reflux pump, and set the circulation flow rate to 30%~50% of the injection flow rate; The degassing device maintains a vacuum of ≤5Kpa3KP~5KP, continuously removes dissolved gases from the circulating pure water, and checks the water quality every 30s~60s. When the dissolved gas content exceeds the standard, the degassing power is automatically increased. During the circulation process, the nozzle maintains 30% to 50% of the injection flow rate to spray and remove residual air from the walls of the through holes; After cycling for 60s-120s, check the wetting status of the through holes. If the wetting coverage is not 90%~100%, extend the cycling time by 60s~120s.

[0015] Thirdly, embodiments of the present invention also provide a large-size glass plate-level TGV through-hole pre-lubrication device, comprising: a coating vacuum tank, an automatic cover opening system, a vacuum pumping pipeline, a vacuum breaking pipeline, a spraying system, a vacuum pump system, and a large-size glass plate-level TGV through-hole pre-lubrication control system as described in the first aspect.

[0016] This invention has at least the following technical effects: The large-size glass plate-level TGV through-hole pre-wetting control system and method provided by this invention, after vacuuming, pre-adjusts the vacuum level. Considering that there are pores of different sizes in TGV glass and that the through-holes are not uniformly distributed, it is necessary to reduce the vacuum level to ensure that pure water can first wet the through-holes in the large-pore range. Through staged pre-wetting, it is beneficial to further wet the small-pores in the later processing, so that different pore sizes and uneven pores can be effectively wetted. Based on the consideration of the changes in liquid demand caused by the water inflow and pore size distribution, this invention determines the final liquid injection volume according to the pore size (volume) and glass thickness. The liquid injection volume is quantitatively and adaptively controlled according to the glass thickness, pore volume and other characteristics, which is more conducive to the overall full wetting of glass plate substrates of different thicknesses and further improves the wetting effect of through-holes. Attached Figure Description

[0017] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the structure of a large-size glass plate-level TGV coating vacuum device provided in an embodiment of the present invention; Figure 2 A schematic diagram of the module connection of a large-size glass plate-level TGV through-hole pre-lubrication control system provided in an embodiment of the present invention; Figure 3 The flowchart illustrates a pre-wetting control method for large-size glass plate-level TGV through-holes, as provided in an embodiment of the present invention.

[0019] In the picture: 1-Coating vacuum tank; 2-Automatic lid opening system; 3-Vacuum extraction pipeline; 4-Vacuum breaking pipeline; 5-Spray system; 501-Spray tray; 502-Spray pipeline; 503-Manual valve; 504-Pneumatic valve; 505-Spray pump; 10 - Vacuuming module; 20 - Vacuum control module; 30 - Vacuum detection module; 40 - Temperature adjustment module; 50 - Liquid injection module; 60 - Liquid injection volume control module; 70 - Timing module. Detailed Implementation

[0020] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0021] It will be understood by those skilled in the art that, unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. It should also be understood that terms such as those defined in general dictionaries should be understood to have the meaning consistent with their meaning in the context of the prior art, and should not be interpreted in an idealized or overly formal sense unless specifically defined as herein. It will be understood by those skilled in the art that, unless specifically stated otherwise, the singular forms “a,” “an,” “the,” and “the” used herein may also include the plural forms.

[0022] Combination Figure 1 and Figure 2As shown, the large-size glass plate-level TGV through-hole pre-lubrication device provided in this embodiment of the invention includes: a coating vacuum tank 1, an automatic cover opening system 2, a vacuum pumping pipeline 3, a vacuum breaking pipeline 4, a spraying system 5, a vacuum pump system, and a large-size glass plate-level TGV through-hole pre-lubrication control system.

[0023] Specifically, the automatic opening system 2 is installed on the coating vacuum tank 1, and the vacuum pumping line 3 and the vacuum breaking line 4 are respectively connected to the coating vacuum tank 1. The spraying system 5 includes a spraying plate 501, a spraying line 502, and a spraying pump 505 installed on the spraying line 502. The coating vacuum tank 1 is equipped with a spraying plate 501, and the spraying line 502 is connected to the spraying plate 501. The spraying is controlled by a control valve (including a manual valve 503 and a pneumatic valve 504) installed on the spraying line 502, and the wetting of the through holes is achieved through the spraying control.

[0024] It should be noted that the dimensions of large-size glass panels in the TGV can include an area of ​​0.04m². 2 Preferably, the substrate area (size) of the above-mentioned substrate is 0.04m². 2 ~4m 2 Preferably, 0.26m 2 ~0.81m 2 Preferably, 0.67m 2 Based on the above area, the length of at least one side of the substrate is 200mm or more, preferably 200mm to 2000mm; specific models may include (length × width) for example: 510mm × 515mm to 850mm × 950mm; typically, the size of a 4.5 generation glass product is 730mm × 920mm.

[0025] To ensure the filling quality of large-size glass substrates using the aforementioned TGV coating vacuum device, this invention provides a large-size glass-plate-level TGV via pre-lubrication control system, comprising: a vacuum pumping module 10, a vacuum degree detection module 30, a vacuum degree control module 20, a liquid injection module 50, and a liquid injection volume control module 60. The large-size glass-plate-level TGV vias can include dimensions of 730×920mm and above, with an aspect ratio (also known as depth-to-diameter ratio) of 11:1-60:1. Large-size glass-grade TGV glass, with its larger dimensions and higher aspect ratio, features deeper holes. This makes cleaning and copper plating more difficult, and the deeper holes mean more defects are generated during laser processing (e.g., microcracks invisible to the naked eye are easily created during processing (laser drilling) and transport, significantly reducing the glass's strength). This increases the likelihood of initial breakage. The pressure difference between the inside and outside of the hole exerts additional tensile stress on the hole walls, making it more prone to cracking if the glass already has microcracks or stress concentration points. Furthermore, the larger the substrate size (e.g., 730×920mm), the more uneven the overall deformation and stress distribution during vacuuming, making edges or areas with many holes more susceptible to cracking due to stress concentration.

[0026] The vacuum module 10 is used to connect to a vacuum pump (e.g., a vacuum pump) and to control the start / stop and power of the vacuum pump, thereby adjusting the vacuum level in the coating vacuum tank.

[0027] The vacuum degree detection module 30 is installed inside the coating vacuum tank to detect the vacuum degree inside the tank, providing a reference for vacuum control. Optionally, in order to achieve a two-stage vacuuming process of pretreatment vacuuming and deep vacuuming, a primary vacuum pump and a secondary vacuum pump are provided in this embodiment of the invention.

[0028] The vacuum control module 20 is electrically connected to the vacuum pumping module 10 and the vacuum detection module 30, and is used to adjust or control the vacuum level of the vacuum tank. For example, during the vacuum pumping stage, the vacuum level of the vacuum tank is controlled within the first preset vacuum level range. The first preset vacuum level range can be -60KPa±1KPa, or 80KPa~85KPa, etc., determined according to different thicknesses.

[0029] Optionally, the vacuum control module 20, during the process of controlling the vacuum pumping module 10 to evacuate the vacuum tank, includes a pre-treatment vacuuming stage and a deep vacuuming stage. The pre-treatment vacuuming stage includes opening the primary vacuum pump inlet valve, closing the secondary vacuum pump inlet valve, and reducing the vacuum level in the coating vacuum tank from atmospheric pressure to -60 kPa within 60 seconds at a pressure drop rate of 1 kPa / s. When the vacuum level in the coating vacuum tank is detected to be stable within the range of -60 kPa ± 1 kPa, a timing mechanism is triggered and maintained for a first preset processing time. This first preset processing time is determined based on the actual size of the glass plate, the base area, and the pre-treatment increment time per unit area. The deep vacuuming stage includes initiating deep vacuuming after the pre-treatment vacuuming is completed and the temperature inside the coating vacuum tank is detected to be stable within the range of 25℃±1℃. The secondary vacuum pump inlet valve is opened to form a series working mode with the primary vacuum pump, and the vacuum regulating valve is activated for gradient pressure increase. The target vacuum level and vacuum level adjustment rate are determined according to the TGV aperture, and the target vacuum level is maintained for a second preset time after it is reached. The second preset time is determined based on the aspect ratio of the TGV. The vacuum level range for deep vacuuming is 80KPa~85KPa. It is known that for conventional ordinary TGV substrates, a deep vacuuming stage is not required; simply stabilizing the vacuum level inside the coating vacuum tank within the range of -60KPa±1KPa is sufficient.

[0030] The liquid injection module 50 includes a circulation pump that supplies pure water to the vacuum tank for wetting the through-holes, thereby wetting the walls of the through-holes under a certain vacuum. The liquid injection volume control module 60 is electrically connected to the vacuum control module 20, the vacuum detection module 30, and the liquid injection module 50. It is used to adjust the vacuum level in the vacuum tank to a second preset vacuum level range before liquid injection, and to determine the liquid injection volume based on the total volume of the TGV through-holes during the directional liquid injection stage. The liquid injection volume is related to the total volume of the TGV through-holes and the liquid injection coefficient. The total volume of the TGV through-holes is the product of the volume of a single hole and the number of through-holes, i.e., liquid injection volume = total volume of through-holes × liquid injection coefficient, total volume of through-holes = volume of a single hole × number of through-holes, and volume of a single hole = π × (hole diameter / 2)² × glass plate thickness. Optionally, the liquid injection coefficient is 1.0~2.0, preferably 1.5.

[0031] Optionally, the ratio of the second preset vacuum range to the first preset vacuum range is 70%.

[0032] Optionally, the injection volume control module 60 includes a directional injection module 50, which determines the injection volume based on the total volume of the TGV orifice during the directional injection stage. Optionally, the directional injection module 50 is a component such as a flow control valve or a flow meter, which pre-calculates the total volume of the TGV orifice using a controller or processor, and determines the injection volume in conjunction with the injection coefficient.

[0033] The large-size glass plate-level TGV through-hole pre-wetting control system provided in this embodiment lowers the vacuum level before vacuuming. Considering that there are pores of different sizes in TGV glass and that the through-holes are not uniformly distributed, it is necessary to reduce the vacuum level to ensure that pure water can first wet the through-holes in the large-pore range. This staged pre-wetting facilitates further wetting of small-pores in the later processing, ensuring that different pore sizes and uneven pores are effectively wetted. Based on the changes in liquid demand caused by the water inflow and pore size distribution, and considering that when the thickness is small (e.g., 0.15mm), large sizes result in large deformation and substrate shaking, leading to poor wetting, this invention determines the final liquid injection volume based on the pore size (volume) and glass thickness. The liquid injection volume is quantitatively and adaptively controlled according to the glass thickness, pore volume, and other characteristics, which is more conducive to the overall full wetting of glass plate substrates of different thicknesses and further improves the wetting effect of through-holes.

[0034] Furthermore, the large-size glass plate-level TGV through-hole pre-lubrication control system also includes a temperature regulation module 40, used to regulate the heating temperature of the pure water output by the injection module 50. The injection volume control module 60 includes a pre-injection module 50, which is electrically connected to the temperature regulation module 40, and is used to control the temperature of the pure water at a first preset temperature during the pre-injection stage. The first preset temperature = room temperature + aspect ratio (1:1~300:1) × temperature change coefficient; where room temperature is generally 22℃; when the aspect ratio is greater than 1:1; the temperature change coefficient is 0.1~0.2℃.

[0035] Optionally, the first preset temperature is 25℃±1℃, at which the surface tension of pure water is 20~mN / m to 37mN / m, which is beneficial to the wetting of the pore wall.

[0036] In this embodiment, the pure water is preheated before injection, and its tension is controlled within a preset range. For TGV glass, especially 4.5 generation TGV glass, this tension range is beneficial for adapting to through holes with a smaller diameter range. The surface tension of pure water is negatively correlated with temperature, and the increase in temperature is beneficial for wetting the through holes. However, it should be noted that the heating temperature of pure water should not be too high. For through-hole wetting with a depth-to-width ratio, the higher the temperature, the more exponentially the evaporation rate increases. At the orifice, excessively rapid evaporation may cause the liquid to retreat prematurely or form a meniscus, trapping air bubbles inside the hole. It may even cause stress due to uneven capillary force, resulting in high temperature non-uniformity between the inside and outside, leading to local gas accumulation in the depths of the hole. In deeper through-holes, tiny air bubbles are easily precipitated, forming gas plugs that block the channel, resulting in "core clogging" or incomplete filling. This is not conducive to the wetting of the hole wall by pure water, especially the deep hole wall, and increases the risk of breakage. Furthermore, by controlling the temperature of pure water during the pre-filling stage to a first preset temperature, the first preset temperature = room temperature + depth-to-width ratio (1:1~300:1) × temperature change coefficient, where room temperature is generally 22℃; when the depth-to-width ratio is greater than 1:1, the temperature change coefficient is 0.1~0.2℃. This facilitates precise control of the surface tension of pure water based on the TGV depth-to-width ratio, improving the wetting effect.

[0037] In some embodiments, the injection volume control module 60 is further configured to gradually restore the injection pressure of the injection module 50 to the target injection pressure after the pre-injection stage and before the directional injection stage.

[0038] Specifically, by activating the high-pressure pump and adjusting the pressure in a "gradient pressurization" mode, for example, starting from an initial spray pressure of 0.1 MPa, increasing by 0.1 MPa every 10 seconds until the target spray pressure is reached. The target spray pressure can be adjusted and set according to the different sizes of the TGV glass substrate and historical experience data, etc., and is not specifically limited here. This avoids liquid splashing caused by instantaneous high pressure, thereby avoiding the impact of splashed liquid on the TGV glass, reducing the problem of uneven local pressure, and thus helping to reduce the risk of breakage. In addition, by controlling the pressure during liquid injection, it is beneficial to control the impact force on glass substrates of different thicknesses during liquid injection, thereby facilitating the overall full wetting of glass substrates of different thicknesses. It should be noted that the liquid injection module 50 in this embodiment includes the spray plate in the previous embodiment, and the spray pressure of the spray plate is the liquid injection pressure.

[0039] Optionally, for TGV substrates with a thickness of 0.5mm or more, or for substrates that are not easily deformed (due to material properties), a nozzle with no angle can be used. Before adjusting the injection pressure, the nozzle orientation can be calibrated. For TGV substrates with a thickness of less than 0.2mm, an inclined spray angle is used to avoid direct frontal spraying that could cause substrate fragmentation. When spraying at an angle, the nozzle can generate a Venturi effect, creating a spiral liquid flow. The inclined angle causes the solution to spirally contact the substrate, thereby reducing substrate deformation. Specifically, when adjusting the spray angle, the sensor can first be aligned with the center of the TGV via array. Then, the nozzle angle is adjusted according to the TGV via diameter. Different via diameters correspond to different spray angles, determining the optimal injection process. That is, for TGV substrates with a thickness of less than 0.2mm, an inclined spray angle is used. As the TGV via diameter increases, the total injection pressure, total injection flow rate, and total injection circulation flow rate decrease, while the spray angle increases, thereby further reducing the risk of thin-plate fragmentation. Table 1 below shows the corresponding relationship between different through-hole diameter parameters, total injection pressure, injection angle and other parameters.

[0040] Table 1. Correspondence of parameters for different through-hole diameters

[0041] In some embodiments, the large-size glass plate-level TGV through-hole pre-wetting control system further includes a timing module 70, which is electrically connected to the vacuum control module 20 and is used to start liquid injection after a first preset time delay to bring the vacuum level in the vacuum tank to a second preset vacuum level range. By controlling the timing of the vacuum level being lowered to the second preset vacuum level range through the timing module 70, the vacuum level can be reduced in advance, which is beneficial to improving the subsequent through-hole wetting effect.

[0042] Optionally, the first preset time is 20S~30S. Setting the delay time within this range is beneficial to the stability of the vacuum environment after the deep vacuuming stage.

[0043] In some embodiments, the large-size glass plate-level TGV through-hole pre-lubrication control system further includes a linkage control module and an injection pressure adjustment module. The linkage control module is electrically connected to the vacuum degree detection module 30 and the injection pressure adjustment module, and is used to adjust the injection pressure according to the deviation between the actual vacuum degree and the target vacuum degree.

[0044] Optionally, the actual vacuum level of the vacuum tank is linked to the total injection pressure for control. When the actual vacuum level deviates from the target value by ±0.5 kPa (i.e., the deviation between the actual vacuum level and the target vacuum level exceeds 0.5 kPa), the total injection pressure is simultaneously adjusted by ±0.1 MPa (the total injection pressure and the deviation of the vacuum level are negatively correlated; that is, if the vacuum level is too high, the injection pressure decreases, and if the vacuum level is too low, the injection pressure increases; for example, if the vacuum level deviates from the target value by -0.5 kPa, the total injection pressure is simultaneously adjusted (decreased) by 0.1 MPa; if the vacuum level deviates from the target value by 0.5 kPa, the total injection pressure is simultaneously adjusted (increased) by 0.1 MPa). This allows for precise matching of the injection pressure when large-size glass plates are more sensitive to pressure fluctuations. When the vacuum level deviates (fluctuations during equipment control, abnormal fluctuations in equipment), the influence of vacuum level fluctuations can be compensated by adjusting the total injection pressure, thereby reducing changes in the pressure environment of large-size glass and reducing the risk of breakage.

[0045] Optionally, when a pressure deviation in a certain area of ​​the vacuum tank is detected to exceed 0.5 kPa, the flow rate of the nozzle in the corresponding area is automatically adjusted by ±5% (adjusted synchronously according to whether the deviation value is too large or too small) to maintain the uniformity of liquid injection and filling.

[0046] In some embodiments, the injection volume control module 60 further includes a circulating wetting module. This module is used to activate a reflux pump for circulation after injection (circulating wetting stage), with a circulation flow rate of 30% to 50% of the injection volume. This reduces the injection volume and pump power while ensuring the wetting effect. Especially for TGV thin plates (below 0.3 mm), which are more prone to deformation, a lower flow rate is used to reduce impact on the thin plate, ensuring effective hydrodynamic wetting while preventing plate fragmentation.

[0047] In some embodiments, the injection volume control module 60 further includes a degassing module and a gas content detection module, wherein the gas content detection module is used to detect the gas content in the pure water.

[0048] Specifically, the degassing module is electrically connected to the vacuum module 10 and the vacuum degree detection module 30, and is used to control the degassing power according to the gas content in the pure water, so as to maintain the vacuum degree of the vacuum tank below the third preset vacuum degree range.

[0049] Optionally, a degassing device is used to maintain the vacuum level in the vacuum tank at less than or equal to 5 kPa (i.e., the third preset vacuum level is 5 kPa, and experimental data shows that this pressure value of 5 kPa is the most effective for glass plates with a pore size of 0.05~0.1 mm), continuously removing dissolved gases from the circulating pure water. The water quality is checked every 30~60 seconds, and the degassing power is automatically increased when the dissolved gas content exceeds the standard.

[0050] Based on the same inventive concept, such as Figure 3 As shown, this embodiment of the invention also provides a method for controlling the pre-wetting of large-size glass plate-level TGV through-holes, including: S100, during the vacuuming stage, the vacuum level of the vacuum tank is controlled within a first preset vacuum level range.

[0051] S200, before liquid injection, adjust the vacuum level in the vacuum tank to the second preset vacuum level range.

[0052] Optionally, after pre-pressure adjustment, the high-pressure pump is turned on to pre-charge the pipeline and purge the air in the liquid supply pipeline. The pre-charge pressure is 0.1MPa and the pre-charge time is 30s until the flow controller displays a stable flow rate. The degassing device is started to reduce the dissolved gas content in the pure water to ≤5ppm. The online water quality monitor detects the gas content in real time. Once the standard is met, the system enters the liquid injection ready state.

[0053] S300, adjust the temperature of the pure water used for injection to the first preset temperature, which is determined according to the depth-to-width ratio of the through hole.

[0054] Specifically, the first preset temperature = room temperature + aspect ratio (1:1~300:1) × temperature change coefficient; where room temperature is generally 22℃; when the aspect ratio is greater than 1:1; the temperature change coefficient is 0.1~0.2℃.

[0055] S400, determine the injection volume based on the total volume of the TGV through holes; the injection volume is related to the total volume of the TGV through holes and the injection coefficient, and the total volume of the TGV through holes is the product of the volume of a single hole and the number of through holes.

[0056] Specifically, the injection volume = total volume of through holes × injection coefficient, the total volume of through holes = volume of a single hole × number of through holes, and the volume of a single hole = π × (hole diameter / 2)² × glass plate thickness. Here, hole diameter refers to the inner diameter of the through hole.

[0057] Optionally, during the directional injection stage, the center of the TGV through-hole array is aligned with the sensor beforehand, and the nozzle angle is adjusted according to the orifice size; the high-pressure pump is started to regulate the pressure, starting from an initial 0.1MPa and increasing by 0.1MPa every 10 seconds until the target pressure is reached.

[0058] Optionally, the nozzle rotates 30° to 60° in the horizontal direction every 10 to 30 seconds to form a spiral spray trajectory, ensuring that the liquid evenly covers all TGV through holes, and monitors the injection status in real time. If liquid splashing is detected, the injection pressure is automatically reduced by 0.1 MPa to 0.2 MPa and the rotation cycle is extended to 20 to 40 seconds.

[0059] Optionally, the large-size glass plate-level TGV through-hole pre-wetting control method further includes: a circulating liquid injection stage; the circulating liquid injection stage specifically includes: After the injection is completed, immediately start the reflux pump, and set the circulation flow rate to 30%~50% of the injection flow rate; The degassing device maintains a vacuum of ≤3Kpa~5Kpa, continuously removes dissolved gases from the circulating pure water, and checks the water quality every 30s~60s. When the dissolved gas content exceeds the standard, the degassing power is automatically increased. During the circulation process, the nozzle maintains 10% to 30% of the injection flow rate to spray and remove residual air from the walls of the through holes; After cycling for 60s to 120s, check the wetting status of the through holes. If the wetting coverage is not 90% to 100%, extend the cycling time by 60s to 120s.

[0060] Optionally, the large-size glass plate-level TGV through-hole pre-lubrication control method further includes: fault linkage control. If a leak in the vacuum system causes a pressure drop of ≤10kPa (absolute), the water injection system should be stopped immediately, and the nitrogen replenishment device (replenishment pressure 12kPa) should be activated to prevent the glass from being deformed by pressure. If the water injection flow rate fluctuates by more than ±50 L / min, the vacuum system automatically increases the vacuum level by 0.5 kPa to help stabilize the injection state. Changes in the evaporation pressure of water will affect the internal pressure. Large pressure fluctuations and increased vacuum reduce the amount of gas in the system, thus reducing the impact of the water injection flow rate on the system pressure.

[0061] The large-size glass plate-level TGV through-hole pre-wetting control method provided in this invention reduces the vacuum level after vacuuming. Considering that there are pores of different sizes in TGV glass and that the through-holes are not uniformly distributed, it is necessary to reduce the vacuum level to ensure that pure water can first wet the through-holes in the large-pore range. This staged pre-wetting facilitates further wetting of the small-pores during subsequent processing, ensuring that different pore sizes and uneven pores are effectively wetted. Based on the changes in liquid demand caused by the water inflow rate and pore size distribution, this invention determines the final liquid injection volume according to the pore size (volume) and glass thickness. The liquid injection volume is quantitatively and adaptively controlled according to the glass thickness, pore volume, and other characteristics, which is more conducive to the overall full wetting of glass plate substrates of different thicknesses and further improves the wetting effect of through-holes.

[0062] Those skilled in the art will understand that the steps, measures, and schemes in the various operations, methods, and processes discussed in this invention can be alternated, modified, combined, or deleted. Furthermore, other steps, measures, and schemes in the various operations, methods, and processes discussed in this invention can also be alternated, modified, rearranged, decomposed, combined, or deleted. Furthermore, steps, measures, and schemes in the prior art that are similar to those disclosed in this invention can also be alternated, modified, rearranged, decomposed, combined, or deleted.

[0063] In the description of this invention, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0064] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0065] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0066] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0067] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A large-size glass plate-level TGV through-hole pre-lubrication control system, characterized in that, include: A vacuum control module is used to control the vacuum level of the vacuum tank within a first preset vacuum level range during the vacuuming stage. The liquid injection module is used to provide pure water required for wetting the through holes of the vacuum tank. The liquid injection volume control module is electrically connected to the vacuum control module, the vacuum detection module, and the liquid injection module. It is used to adjust the vacuum level in the vacuum tank to a second preset vacuum level range before liquid injection, and to determine the liquid injection volume based on the total volume of the TGV through-holes during the directional liquid injection stage. The liquid injection volume is related to the total volume of the TGV through-holes and the liquid injection coefficient. The total volume of the TGV through-holes is the product of the volume of a single hole and the number of through-holes. The temperature regulation module is used to heat and regulate the temperature of the pure water output by the injection module; the injection volume control module includes a pre-injection module, which is electrically connected to the temperature regulation module and is used to control the temperature of the pure water at a first preset temperature during the pre-injection stage.

2. The large-size glass plate-level TGV through-hole pre-lubrication control system according to claim 1, characterized in that, The first preset temperature = room temperature + aspect ratio (1:1~300:1) × temperature change coefficient; where room temperature is 22℃; when the aspect ratio is greater than 1:1; the temperature change coefficient is 0.1~0.2℃.

3. The large-size glass plate-level TGV through-hole pre-lubrication control system according to claim 2, characterized in that, The injection volume control module is used to gradually restore the injection pressure of the injection module to the target injection pressure after the pre-injection stage and before the directional injection stage. The injection volume control module includes a directional injection module, which is used to determine the injection volume based on the total volume of the TGV through-hole during the directional injection stage.

4. The large-size glass plate-level TGV through-hole pre-lubrication control system according to claim 3, characterized in that, It also includes a timing module, which is electrically connected to the vacuum control module and is used to start liquid injection after a first preset time delay to bring the vacuum level in the vacuum tank to a second preset vacuum level range.

5. The large-size glass plate-level TGV through-hole pre-lubrication control system according to any one of claims 1-4, characterized in that, It also includes a linkage control module and a liquid injection pressure adjustment module. The linkage control module is electrically connected to the vacuum degree detection module and the liquid injection pressure adjustment module, and is used to adjust the liquid injection pressure according to the deviation between the actual vacuum degree and the target vacuum degree.

6. The large-size glass plate-level TGV through-hole pre-lubrication control system according to claim 4, characterized in that, The ratio of the second preset vacuum range to the first preset vacuum range is 50% to 70%.

7. The large-size glass plate-level TGV through-hole pre-lubrication control system according to claim 3, characterized in that, The injection volume control module also includes a circulation wetting module, which is used to start the reflux pump for circulation after the injection is completed, with a circulation flow rate of 30% to 50% of the injection volume.

8. The large-size glass plate-level TGV through-hole pre-lubrication control system according to claim 1, characterized in that, The liquid injection volume control module also includes a degassing module and a gas content detection module, wherein the gas content detection module is used to detect the gas content in the pure water; The degassing module is electrically connected to the vacuum module and the vacuum degree detection module, and is used to control the degassing power according to the gas content in the pure water, so as to maintain the vacuum degree of the vacuum tank below the third preset vacuum degree.

9. A method for controlling the pre-wetting of large-size glass plate-level TGV through-holes, characterized in that, include: S100, during the vacuuming stage, controls the vacuum level of the vacuum chamber within a first preset vacuum level range; S200, before liquid injection, adjust the vacuum level in the vacuum tank to the second preset vacuum level range; S300, adjusts the temperature of the pure water used for injection to the first preset temperature; S400, determine the injection volume based on the total volume of the TGV through holes; the injection volume is related to the total volume of the TGV through holes and the injection coefficient, and the total volume of the TGV through holes is the product of the volume of a single hole and the number of through holes.

10. The method for pre-wetting control of large-size glass plate-level TGV through-holes according to claim 9, characterized in that, In S300, the first preset temperature is determined based on the actual aspect ratio of the through hole and the temperature change coefficient.

11. The method for pre-wetting control of large-size glass plate-level TGV through-holes according to claim 9, characterized in that, Following S400, a circulating injection stage is further included; the circulating injection stage specifically includes: After the injection is completed, start the reflux pump and set the circulation flow rate to 30%~50% of the injection flow rate; The degassing device maintains a vacuum of ≤ (3Kpa~5Kpa) and continuously removes dissolved gases from the circulating pure water. The water quality is checked every 30s~60s, and the degassing power is automatically increased when the dissolved gas content exceeds the standard. During the circulation process, the nozzle maintains 30% to 50% of the injection flow rate to spray and remove residual air from the walls of the through holes; After cycling for 60s to 120s, check the wetting status of the through holes. If the wetting coverage is not 90% to 100%, extend the cycling time by 60s to 120s.

12. The method for pre-wetting control of large-size glass plate-level TGV through-holes according to claim 9, characterized in that, It also includes a linkage control module, which is used to realize the linkage control between the actual vacuum degree of the vacuum tank and the total injection pressure. When the actual vacuum degree deviates from the target value of ±0.5kPa, the total injection pressure is adjusted synchronously by ±0.1MPa; and there is a negative correlation.

13. The method for pre-wetting control of large-size glass plate-level TGV through-holes according to claim 9, characterized in that, It also includes fault linkage control: If a leak in the vacuum system causes an absolute pressure drop of ≤10kPa, the water injection system should be stopped immediately, and the nitrogen replenishment device should be started to replenish nitrogen at a pressure of 5kPa~12kPa. If the water injection flow rate fluctuates by more than ±50L / min, a vacuum will be drawn to increase the vacuum level by 0.5KPa.

14. The method for pre-wetting control of large-size glass plate-level TGV through-holes according to claim 9, characterized in that, It also includes a liquid injection control method. If the TGV thickness is less than 0.2mm, an inclined injection angle is adopted, the TGV through-hole diameter parameter increases, and the corresponding total injection pressure, total injection flow rate, and total injection circulation flow rate decrease, while the injection angle increases.

15. A pre-wetting device for large-size glass plate-grade TGV through-holes, characterized in that, include: The coating vacuum tank includes an automatic lid opening system, a vacuum pumping pipeline, a vacuum breaking pipeline, a spraying system, a vacuum pump system, and a large-size glass plate-level TGV through-hole pre-lubrication control system as described in any one of claims 1-8.

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