Optical path symmetrical differential multi-reflection laser displacement sensor

Abstract

The optical path symmetry type differential multi-reflection laser displacement sensor comprises a laser module, a mirror I, a lens group I, a lens group II, a mirror II, a lens group III, a mirror III, a diaphragm I, a diaphragm II and a photoelectric detector; the laser beam emitted by the laser module is shot to the mirror I, is collimated after being reflected through the lens group I, and is perpendicularly irradiated to a measured object; after being diffusely reflected by the measured object, one reflected laser beam is converged through the receiving lens group II to form reference light, and the other reflected laser beam is converged through the lens group III to form measurement light; the reference light is reflected by the mirror II, is focused and imaged on the photoelectric detector through the diaphragm I; the measurement light is reflected by the mirror III, is focused and imaged on the photoelectric detector through the diaphragm II; the mirror II and the mirror III are arranged in parallel and symmetry. The present application realizes high-precision displacement measurement by using the laser triangulation method, effectively suppresses the error caused by laser jitter, and improves the measurement stability.

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