Schedulable monitoring system and method of monitoring thereof

Abstract

The application discloses a dispatchable monitoring system and a monitoring method thereof, wherein the dispatchable monitoring system comprises an aerial track and a trolley movable on the aerial track, the trolley is in communication with a dispatching system, and the dispatchable monitoring system further comprises: a dispatchable monitor arranged at a position capable of being gripped by the trolley and configured with a gripped part capable of being gripped by a gripping mechanism of the trolley, the dispatchable monitor is in wireless communication with the dispatching system; and a control terminal in wireless communication with the dispatching system and the dispatchable monitor, the control terminal is configured to send a dispatch request for controlling the trolley to carry the dispatchable monitor to the dispatching system. The dispatchable monitoring system can utilize the original trolley in a factory area to carry the dispatchable monitor to any position capable of being moved by the trolley to realize monitoring, especially the core area which cannot be covered by fixed monitoring, so that the monitoring range of the dispatchable monitor is improved, and the coverage and flexibility are improved.

Description

Technical Field

[0001] This invention relates to the field of intelligent monitoring technology in cleanrooms for semiconductor wafer manufacturing, and in particular to a schedulable monitoring system and its monitoring method. Background Technology

[0002] In the semiconductor manufacturing process, it is necessary to adopt certain monitoring schemes to monitor the process equipment and environment within the fab plant.

[0003] Existing surveillance solutions typically employ fixed-point wired high-definition surveillance, which involves installing cameras at multiple locations (walls, equipment brackets, etc.) to monitor the areas that need to be monitored.

[0004] The problem with this approach is that the fixed positions of the cameras limit the monitoring range of each camera, resulting in a narrow coverage of the entire monitoring system, which makes it particularly difficult to conduct detailed inspections of process equipment.

[0005] Because it requires fixed installation and wiring, the deployment cycle of the entire monitoring system is long, and the deployment requires a long period of production stoppage for construction, which is not conducive to the transformation and upgrading of existing factories. Summary of the Invention

[0006] The purpose of this invention is to solve the above-mentioned problems existing in the prior art and to provide a schedulable monitoring system and its monitoring method.

[0007] The objective of this invention is achieved through the following technical solution: The schedulable monitoring system includes an aerial track and a crane that can move on the aerial track, the crane communicating with the schedulable system, and also includes: A schedulable monitor is set at a position that can be grasped by the overhead crane, and the schedulable monitor is equipped with a grasped part that can be grasped by the grasping mechanism of the overhead crane. The schedulable monitor communicates wirelessly with the scheduling system. The control terminal is wirelessly connected to the scheduling system and the schedulable monitor. The control terminal is configured to send scheduling requests to the scheduling system to control the overhead crane to schedule the schedulable monitor to perform monitoring tasks, and to directly control and / or control the operation of the schedulable monitor through the scheduling system.

[0008] Preferably, the schedulable monitor includes a hollow frame, with the grabbing part located at the top center of the hollow frame, and a shooting device, a wireless communication module, and a controller mounted on the hollow frame.

[0009] Preferably, the hollow frame includes an upper plate, a lower plate, and a set of connecting rods at their top corners, with the upper and lower plates spaced apart.

[0010] Preferably, the cutout frame is configured to be placed at the buffer position of the loading port and / or the air buffer station.

[0011] Preferably, the shooting device is mounted on a gimbal.

[0012] Preferably, the shooting device or the gimbal on which the shooting device is located is mounted on the extension mechanism, and the extension mechanism drives the shooting device or the gimbal to move between the inside and outside of the hollow frame.

[0013] Preferably, the schedulable monitor further includes a rechargeable battery for power supply.

[0014] Preferably, it includes a wireless charger for powering the schedulable monitor and charging the rechargeable battery.

[0015] The schedulable monitoring system includes an aerial track and a crane that can move on the aerial track, the crane communicating with the schedulable system, and also includes: A schedulable monitor is set at a position that can be grasped by the overhead crane, and the schedulable monitor is equipped with a grasped part that can be grasped by the grasping mechanism of the overhead crane. The schedulable monitor communicates wirelessly with the scheduling system. The scheduling system is configured to control the overhead crane scheduling and the schedulable monitor according to a built-in program, and to control the schedulable monitor to perform monitoring tasks.

[0016] The monitoring method of any of the above-described schedulable monitoring systems includes the following steps: Staff members send a scheduling request to the dispatch system via a control terminal to dispatch a schedulable monitor to a target monitoring location to perform a monitoring task; The scheduling system controls a dispatchable monitor to move to the target monitoring position according to the scheduling request and feeds back the arrival information to the control terminal. Staff members control the schedulable monitor through the control terminal; After the monitoring task is completed, the staff sends a return command to the dispatch system through the control terminal to move the dispatchable monitor back to the standby position. When the scheduling system determines that the schedulable monitor does not need to perform other monitoring tasks, it controls the overhead crane to move the schedulable monitor to a standby position.

[0017] The advantages of the technical solution of this invention are mainly reflected in: The monitoring system of this invention sets up a schedulable monitor that can be captured by an overhead crane. This allows the existing overhead cranes in the plant area to be used to move the schedulable monitor to any location that the crane can reach for monitoring. In particular, it can significantly increase the monitoring range of a single schedulable monitor and improve the coverage and flexibility of the monitoring system by setting up a schedulable monitor that can be captured by an overhead crane.

[0018] The monitoring system of this invention uses an overhead crane to move the dispatchable monitors without occupying the cleanroom floor passageways, thus avoiding interference with the normal passage of operators and material AGVs. This non-intrusive operation method minimizes disruption to normal production. Furthermore, because the dispatchable monitors are suspended in the air, they offer a better field of view, and obstructions can be easily overcome by adjusting their horizontal position and height, effectively eliminating blind spots and achieving comprehensive coverage.

[0019] The monitoring system of this invention does not require any hardware or software modifications to the existing production line, overhead crane, overhead track, communication system, etc. It only requires deploying a scheduleable monitor at a location that the overhead crane can move to and installing a compatible plug-in to the scheduling system. The entire deployment cycle is shortened from 1 month to 1 day, which greatly reduces the deployment cycle. In addition, it greatly reduces the number of shooting devices, especially for new fab plants, saving more than 10% in deployment costs.

[0020] The hollow frame structure of this invention has no dust accumulation dead corners or sealed gaps. Cleanroom laminar flow simulation tests show that, compared to closed monitoring equipment, it reduces disturbance to the laminar airflow in the cleanroom by 92%, and does not generate eddies or particle accumulation. The materials and surface treatment fully comply with SEMI standards, with no air release, no particle shedding, and anti-static properties, making it perfectly suited to the harsh environment of FAB factory cleanrooms and suitable for long-term use in core production clean areas. Furthermore, the hollow frame is almost entirely open on all sides, minimizing obstruction of the camera's field of vision, and its own weight is also very light, effectively reducing the load during overhead crane handling.

[0021] The monitoring system of this invention can achieve full-scene functional coverage and meet the diversified operation and maintenance needs of FAB factories. The shooting device of this invention is mounted on a pan-tilt unit, supporting 360° full-angle rotation, more than 12x optical zoom, and 4K high-definition shooting. It can achieve close-range detail monitoring with a minimum focusing distance of 10cm, and has low-latency Wi-Fi transmission. It can simultaneously meet the diversified operation and maintenance needs such as daily full-area inspection, detailed fault diagnosis, operation compliance confirmation, emergency event handling, and aerial track inspection. Moreover, one dispatchable monitor can replace the functions of dozens of fixed-point monitors, and its functional coverage far exceeds that of existing fixed camera and fixed-point monitoring solutions.

[0022] The monitoring system of this invention has high compatibility and scalability, and is compatible with all mainstream FAB factories. This invention fully complies with the SEMI standards and specifications of the semiconductor industry, and is compatible with all mainstream brands of overhead cranes and MCS systems. It requires no customization and can be directly deployed in all 8-inch and 12-inch FAB factories worldwide, demonstrating extremely strong adaptability. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the schedulable monitoring system of the present invention. The schedulable monitor is placed at the loading port and the buffer position of the air buffer station, respectively. Figure 2 This is a perspective view of the camera device of the schedulable monitor of the present invention mounted upright; Figure 3 This is an inverted perspective view of the shooting device of the schedulable monitor of the present invention; Figure 4 This is a perspective view of the shooting device of the schedulable monitor of the present invention extending out of the hollow frame; Figure 5 This is a perspective view of the schedulable monitor of the present invention mounted on a wireless charger. Detailed Implementation

[0024] The objectives, advantages, and features of this invention will be illustrated and explained through the following non-limiting description of preferred embodiments. These embodiments are merely typical examples of applying the technical solutions of this invention, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of protection claimed by this invention.

[0025] In the description of the solution, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0026] Example 1 The schedulable monitoring system disclosed in this invention will now be described in conjunction with the accompanying drawings, as shown in the attached drawings. Figure 1As shown, it includes an aerial track 100 and an overhead hoist transport that can move on the aerial track 100. The overhead hoist transport 200 communicates with the scheduling system 300. The specific structure of the aerial track 100 and the overhead hoist transport 200, as well as the communication technology between the overhead hoist transport 200 and the scheduling system 300, are known technologies and are not innovations of this invention, so they will not be described in detail here.

[0027] The scheduling system 300 typically includes an MCS (Material Control System) and a TCS (Transport Control System) that communicate with each other. The MCS 310 communicates with the MES (Manufacturing Execution System). The MES determines where materials need to be moved based on the manufacturing process and sends corresponding moving requests to the MCS 310. The MCS 310 generates moving instructions based on the moving requests from the MES and sends them to the TCS 320. The TCS 320 then determines the overhead crane 200 to execute the moving instructions, plans the moving path of the overhead crane 200, and controls the overhead crane 200 to execute the moving instructions according to the planned path. The specific technology by which the scheduling system 300 schedules the overhead crane 200 is known technology and is not an innovation of this invention; therefore, it will not be elaborated here.

[0028] The innovation of this invention lies in: As attached Figure 1 As shown, the schedulable monitoring system also includes: A schedulable monitor 400 is set at a position that can be grabbed by the overhead crane 200, and the schedulable monitor 400 is equipped with a grabbing part 410 that can be grabbed by the overhead crane 200. The schedulable monitor 400 communicates wirelessly with the scheduling system 300. The control terminal 500 is wirelessly connected to the scheduling system 300 and the schedulable monitor 400. The control terminal 500 is configured to send a scheduling request to the scheduling system 300 to control the overhead crane 200 to schedule the schedulable monitor to perform a monitoring task. The control terminal 500 can also be configured to directly control and / or control the schedulable monitor 400 through the scheduling system 300.

[0029] The number of the schedulable monitors 400 can be one or more, depending on the specific needs, and is not limited here.

[0030] As attached Figure 2 As shown, the schedulable monitor 400 includes a hollow frame 420, with the grabbing part 410 disposed at the top center of the hollow frame 420, and a shooting device 430, a wireless communication module, and a controller 460 disposed on the hollow frame 420.

[0031] In detail, the cutout frame 420 includes an upper plate 421, a lower plate 422, and a set of connecting rods 423 connecting them. The upper plate 421 and the lower plate 422 are square plates, and the four connecting rods 423 are connected to the four top corners of the upper plate 421 and the lower plate 422, thereby minimizing obstruction of the field of view of the shooting device 430 and effectively reducing wind resistance during movement, facilitating handling. The gripping part 410 is located at the center of the top surface of the upper plate 421 to ensure that the gripping center of gravity coincides with the center of gravity of the cutout frame 420, thereby controlling swaying during handling. The specific size and shape of the gripping part 410 can be consistent with the size and shape of the mushroom head of the SEMI standard front-opening wafer transfer box (FOUP), so that the cutout frame 420 can be directly adapted to the existing overhead crane 200.

[0032] To meet the long-term use requirements of the cleanroom, the hollow frame 420 is made of aluminum alloy. The surface of the aluminum alloy is subjected to anodizing and clean polishing treatments. Anodizing and clean polishing treatments are known technologies and are not innovations of this invention, so they will not be described in detail here.

[0033] As attached Figure 1 Appendix Figure 2 Appendix Figure 3 As shown, the overall dimensions of the cutout frame 420 and the structure of the lower plate can be consistent with the dimensions and base plate structure of the front-opening wafer transmission box of the SEMI standard. Thus, the cutout frame 420 can be directly adapted to the size requirements of the loading port and the buffer position of the overhead buffer station (OHB) of the machine. That is, the cutout frame 420 can be effectively placed at the loading port 600 and / or the buffer position of the overhead buffer station 700. Therefore, when monitoring, it is not necessary to occupy the overhead crane for a long time and avoid the overhead crane stopping at the overhead track for a long time during monitoring, thus affecting the passage of other overhead cranes.

[0034] Of course, in other embodiments, the shape and size of the hollow frame 420 can also be designed to other shapes and sizes as needed, and are not limited here.

[0035] The shooting device 430 can be a known camera or video camera. The core parameters of the shooting device 430 meet the following requirements: effective pixels ≥ 8 million, supports ≥ 4K@20fps high-definition video shooting; built-in optical zoom lens, zoom magnification ≥ 12x, minimum focusing distance ≤ 10cm, which can realize close-range detail magnification monitoring.

[0036] Furthermore, the shooting device 430 can have a built-in Wi-Fi 6 wireless communication module that supports 2.4G / 5G frequency bands and can directly access the FAB factory's encrypted wireless network to achieve low-latency video stream transmission and remote control. Of course, this is not mandatory.

[0037] As attached Figure 2 Appendix Figure 3 As shown, the shooting device 430 can be installed on the bottom surface of the upper plate 421 (inverted) or on the top surface of the lower plate 422 (upright), depending on the specific needs.

[0038] Furthermore, to enable the shooting device 430 to easily adjust its lens orientation to reduce blind spots and avoid obstruction of the field of view, the shooting device 430 is mounted on an adjustment mechanism capable of driving its horizontal and / or vertical rotation. This adjustment mechanism is, for example, a servo turntable, on which the shooting device 430 is mounted and driven to rotate horizontally. Of course, in other embodiments, the servo turntable can also drive the shooting device 430 to rotate vertically.

[0039] As attached Figure 4 As shown, the adjustment mechanism is a gimbal 440, and the shooting device 430 is mounted on the gimbal 440, thus integrating them into a known gimbal camera or gimbal camera. The gimbal 440 can drive the shooting device 430 to achieve 360° continuous horizontal rotation and ±90° vertical tilt rotation, thereby achieving monitoring without blind spots.

[0040] As attached Figure 2 Appendix Figure 4 As shown, the shooting device 430 or the gimbal 440 on which the shooting device 430 is located is mounted on the extension mechanism 450, and the extension mechanism 450 drives the shooting device 430 or the gimbal 440 to move between inside and outside the hollow frame.

[0041] The specific structure of the extension mechanism 450 can be configured as needed. For example, the extension mechanism 450 may include a support member 451 for mounting the shooting device 430 or the gimbal 440. The support member 451 is mounted on a servo linear module that drives its reciprocating linear movement.

[0042] In another embodiment, the extension mechanism 450 also includes a support member 451 for mounting the gimbal 440 or the shooting device 430. The support member is a plate or a block, which is determined according to the specific needs. The support member 451 is slidably mounted on a horizontally extending guide rail 452. The support member 451 is connected to a translation drive assembly that drives its movement along the guide rail 452. The translation drive assembly includes, for example, a translation motor 453. The motor shaft of the translation motor 453 is coaxially connected to a first pulley 454. The first pulley 454 is connected to a second pulley 455 via a synchronous belt 456. The synchronous belt 456 is connected to the support member 451. The translation motor 453 drives the synchronous belt 456 to rotate forward and backward, thereby driving the support member 451 to move back and forth in a linear motion. Of course, in other embodiments, the translation motor 453 can also be connected to the lead screw of a lead screw, and the movable nut of the lead screw is connected to the bearing member 451. The translation motor 453 drives the lead screw to rotate, thereby causing the movable nut to move back and forth in a linear motion, which in turn drives the bearing member 451 to move.

[0043] In this way, when shooting is needed, the shooting device 430 can be extended outside the hollow frame 420, thereby further avoiding the view being blocked by the hollow frame. At the same time, the shooting device 430 can be closer to the monitored object to obtain more detailed image data.

[0044] The wireless communication module (not shown in the figure) can be a known 4G module, 5G module, or Wi-Fi module, etc., and is not limited here. The controller 460 can be a known industrial controller, such as a PLC or MCU (microcontroller unit), etc., and is not limited here. Furthermore, the wireless communication module is integrated into the controller 460, which is connected to the shooting device, gimbal, and extension mechanism. Simultaneously, the controller 460 communicates with the MCS310 and the control terminal 500 through the wireless communication module. Of course, in some embodiments, the controller 460 may not communicate with the control terminal 500, but only with the MCS310, and communication between the control terminal 500 and the controller 460 is achieved through the MCS310. The controller 460 can also be connected to physical memory and / or a cloud server.

[0045] As attached Figure 1 As shown, the control terminal 500 can be a smartphone, tablet, laptop, desktop computer, industrial control computer, etc., and is not limited here. The number of control terminals 500 can be determined as needed, for example, one or more. Each control terminal 500 can communicate with the MCS wirelessly.

[0046] Each of the control terminals 500 is equipped with a corresponding terminal control platform. The terminal control platform, together with the device firmware installed in each of the schedulable monitors 400 and the adapter plugin installed in the MCS310, constitute a remote control software system. The remote control software system can realize functions such as status reporting of the schedulable monitors 400, receiving scheduling requests, managing scheduling tasks, remote control of shooting, remote control of the PTZ 440, video stream decoding and storage, and abnormal alarms. It can be seamlessly connected to the existing Fab factory's operation and maintenance system without the need to build an additional independent platform.

[0047] As attached Figure 2 Appendix Figure 3 As shown, the shooting device can have a built-in battery. More preferably, to increase the battery life of the schedulable monitor 400, the schedulable monitor 400 also includes a power module 470 for power supply. The power module 470 includes a rechargeable battery, which can be disposed on the bottom surface of the upper plate 421 or the top surface of the lower plate 422 as needed, without limitation here. The rechargeable battery is, for example, a known lithium battery or lithium iron phosphate battery, etc., and the battery capacity of the rechargeable battery is ≥5Ah to ensure that the rechargeable battery can support the continuous working time of the schedulable monitor 400 for ≥8 hours when fully charged. The rechargeable battery is connected to the controller and supplies power to the shooting device, gimbal, and extension mechanism through the interface of the controller.

[0048] As attached Figure 5 As shown, in order to facilitate charging of the rechargeable battery, the dispatchable monitoring system also includes a wireless charger 800. The wireless charger 800 is used to charge the rechargeable battery. When the dispatchable monitor 400 is placed on the wireless charger 800, the wireless charger 800 can not only charge the rechargeable battery, but also power the controller 460, the shooting device, the pan-tilt unit and the extension mechanism without using the rechargeable battery.

[0049] The specific structure of the wireless charger 800 is known technology. Typically, the wireless charger 800 includes a charging base for carrying the schedulable monitor 400 and a transmitting coil disposed within the charging base. The wireless charger 800 can be configured as needed, for example, in a standby position or at an overhead hop-on location (OHB), etc., and is not limited here. The number of wireless chargers can be the same as the number of schedulable monitors 400, or more or fewer.

[0050] The power module also includes a receiving coil (not shown in the figure) matched with the transmitting coil. The receiving coil is connected to the rechargeable battery and the controller 460 through a charging power supply circuit (not shown in the figure) that rectifies, filters, and regulates the current generated by the receiving coil. Thus, when the schedulable monitor 400 is placed on the charging dock, the charging power supply circuit not only charges the rechargeable battery but also simultaneously powers the controller 460, and through the controller, powers the shooting device, gimbal, and extension mechanism. Simultaneously, the charging power supply circuit also has protection circuits to prevent overcharging, over-discharging, short circuits, overheating, and static electricity. The specific structure of the charging power supply circuit is a known technology; for example, wireless charging technology for smartphones can be referenced, and will not be elaborated here. The rechargeable battery, receiving coil, and charging power supply circuit constitute the power module 470, which is mounted on the lower plate of the hollow frame. At this time, the gimbal or extension mechanism can be mounted on the bottom surface of the upper plate.

[0051] Example 2 This embodiment discloses a monitoring method for a schedulable monitoring system as described in the above embodiment, including the following steps: S1, the schedulable monitor 400, located in the standby position, connects and communicates with the scheduling system 300 and reports its operating status to the scheduling system 300; the operating status includes, for example, the location, number, power level, and whether there is any abnormality of the schedulable monitor 400, which is not limited here.

[0052] S2, the staff sends a scheduling request to the scheduling system 300 via the control terminal 500 to schedule the schedulable monitor 400 to perform the monitoring task.

[0053] The scheduling request includes at least the task type of the monitoring task, which includes, but is not limited to, fixed-point inspection tasks and patrol inspection tasks. A fixed-point inspection task involves moving a schedulable monitor 400 to a target monitoring location for monitoring. The target monitoring location can be determined by the staff according to actual needs, such as the loading port of a process equipment with an abnormal alarm, the side of an abnormal overhead crane 200, or other locations that the overhead crane can move to; this is not limited here. The scheduling request includes information about the target monitoring location. A patrol inspection task involves carrying the schedulable monitor 400 to perform plant area patrols, overhead rail patrols, etc., during movement. The scheduling request includes the specific patrol inspection task type, and the scheduling system can call the patrol parameters stored in the system according to the patrol inspection task type. If there are multiple control terminals, the scheduling request also includes information about the control terminal that issued the scheduling request. The control terminal information includes, for example, the terminal name, MAC address, and device serial number; this is not limited here.

[0054] S3, the scheduling system 300 schedules a schedulable monitor 400 according to the scheduling request.

[0055] Specifically, the process includes the following steps: S31, When the scheduling system 300 receives the scheduling request, it determines the schedulable monitor 400 to execute the monitoring task.

[0056] If the scheduling system 300 receives multiple scheduling requests within a certain period of time, the scheduling system 300 will process each scheduling request according to the order of the scheduling requests, the first-in-first-out principle, and the priority.

[0057] If there is only one schedulable monitor 400, the scheduling system first determines whether the schedulable monitor is idle and whether there are other prior pending scheduling requests. If the schedulable monitor is not idle and / or there are other prior pending scheduling requests, the system waits until the schedulable monitor is idle and there are no other prior pending scheduling requests before determining that the schedulable monitor will execute the monitoring task.

[0058] If there are multiple schedulable monitors, the scheduling system first determines whether there are any schedulable monitors that meet the scheduling requirements. Specifically, the scheduling system 300 can select a schedulable monitor 400 to perform the monitoring task based on whether each schedulable monitor 400 is idle, its battery level, and its distance from the target monitoring location. For example, the scheduling system 300 can first determine which schedulable monitors are idle, then determine which of the idle schedulable monitors 400 have sufficient battery power to meet the monitoring task execution requirements, and finally select the schedulable monitor 400 closest to the target monitoring location or the starting point of the inspection task from the schedulable monitors 400 whose battery power meets the monitoring task requirements. Meeting the monitoring task requirements means, for example, that the battery level of the schedulable monitor 400 is not lower than a set value. This set value can be determined as needed, for example, 50%, and is not limited here. Of course, in other embodiments, the schedulable monitor with the highest battery level can also be directly selected from the idle schedulable monitors to perform the monitoring task.

[0059] S32, the scheduling system 300 determines the task type of the monitoring task and determines to execute S33 or S34 according to the task type; S33, when it is determined that the monitoring task is an inspection task, the scheduling system 300 controls the overhead crane 200 to capture the schedulable monitor 400 and move it to the starting point of the inspection task. At this time, the scheduling system 300 can send information about arriving at the task starting point to the control terminal 500. Of course, in other embodiments, when the monitoring task is an inspection task, the scheduling system 300 can also control the overhead crane 200 to move and control the schedulable monitor 400 to take pictures according to the task parameters (task starting point, task midpoint, movement speed, inspection route, height of the schedulable monitor 400, focal length of the shooting device 430, parameters of the pan-tilt unit 440, etc.) corresponding to the inspection task stored in the memory.

[0060] S34, when the scheduling system 300 determines that the monitoring task is a fixed-point inspection task, the scheduling system 300 controls the rolling stock 200 to capture and transport the schedulable monitor 400 to the target monitoring location, and then feeds back the arrival information to the control terminal 500. The target monitoring location is sent to the scheduling system when the control terminal issues a scheduling request.

[0061] S4, when the control terminal receives the information from the scheduling system that the task start point has been reached, the staff can send an instruction to the schedulable monitor 400 to start shooting according to the set shooting parameters and an instruction to the scheduling system 300 to control the overhead crane to start moving according to the set inspection route.

[0062] The video captured by the dispatchable monitor 400 is transmitted in real time to the control terminal 500 and displayed to the staff on the monitor. The staff can determine whether there are any abnormalities based on the inspection screen transmitted by the dispatchable monitor. When the staff finds an abnormality in the inspection screen, they can send commands to the dispatch system 300 through the control terminal to stop or reverse the overhead crane 200. They can also control the pan-tilt unit 440, the extension mechanism, and the shooting device 430 through the control terminal to focus on investigating the abnormal location and record the investigation results.

[0063] Of course, in other embodiments, the video captured by the schedulable monitor can also be transmitted to a physical storage device (hard drive, USB flash drive, etc.) for storage, and / or transmitted to a cloud server for storage and analysis. The cloud server can analyze and compare the real-time video footage with the standard footage to determine whether the footage is consistent and thus determine whether there is an anomaly. If there is an anomaly, an alarm will be issued and the abnormal location, abnormal footage, etc. will be recorded.

[0064] S5. When the control terminal receives the arrival information from the scheduling system, the staff can directly control the scheduling monitor 400 through the control terminal 500. Of course, the staff can also control the scheduling monitor 400 through the control terminal 500 and the scheduling system 300.

[0065] Specifically, staff can directly control the dispatchable monitor 400 to start and stop recording via the control terminal 500. Based on the real-time feed from the dispatchable monitor 400 to the control terminal, staff can control the extension mechanism to adjust the position of the shooting device, control the pan-tilt unit 440 to adjust the lens orientation of the shooting device 430, and control the focus of the shooting device, thereby inspecting different locations of the equipment and environment. When an abnormal location is detected, staff can use the control terminal to increase the focal length of the shooting device 430 to magnify the image of the abnormal location and take a screenshot for later use. Simultaneously, staff can also send commands to the dispatch system via the control terminal to control the overhead crane, such as controlling the crane's lifting mechanism to adjust the height of the gripping mechanism, or controlling the crane's rotating mechanism to drive the gripping mechanism to rotate horizontally and adjust its orientation.

[0066] Of course, the control signals sent by the control terminal 500 to the schedulable monitor 400 can also be sent to the scheduling system 300 first, and then sent by the scheduling system 300 to the schedulable monitor 400. In this way, the scheduling system 300 can accurately record the monitoring process and form a monitoring log file.

[0067] S6, after the fixed-point inspection task or patrol task is completed, the staff sends a return command to the dispatch system 300 through the control terminal 500 to move the dispatchable monitor 400 back to the standby position.

[0068] S7, when the scheduling system receives the homing instruction, it determines whether there are other scheduling requests to be executed and whether to select the schedulable monitor that needs to be homed to execute the monitoring task corresponding to the other scheduling requests. If it is determined that there are other scheduling requests and that the schedulable monitor is to execute the monitoring task corresponding to the scheduling request and executes S32, at this time, when the scheduling system controls a crane to move the schedulable monitor, if the schedulable monitor was on the crane that was moving it when it was executing the previous monitoring task, then the scheduling system directly controls the crane to move the schedulable monitor; if the schedulable monitor has detached from the crane that was moving it when it was executing the previous monitoring task, for example, when it is located at the buffer position or loading port, then the scheduling system schedules a new crane to grab and move the schedulable monitor.

[0069] If no other scheduling requests are pending, the scheduling system 300 controls a crane 200 to move the schedulable monitor 400 back to its standby position. Similarly, if the schedulable monitor was on the crane that was moving it while performing a previous monitoring task, the scheduling system directly controls the crane to move the schedulable monitor. If the schedulable monitor had detached from the crane while performing a previous monitoring task, for example, if it was located in a buffer position or loading port, the scheduling system dispatches a new crane to pick up and move the schedulable monitor. In the standby position, the schedulable monitor is charged using a wireless charger.

[0070] Furthermore, during the process of the overhead crane 200 moving the schedulable monitor 400 to the standby position, the scheduling system determines whether a new scheduling instruction has been received. If a new scheduling instruction is received and the schedulable monitor is selected again to execute the monitoring task corresponding to the new scheduling instruction, the scheduling system 300 controls the overhead crane to move the schedulable monitor according to the task type and executes the process described above, which will not be elaborated here.

[0071] Example 3 The main concept of the schedulable monitoring system in this embodiment is similar to that of Embodiment 1 above. It also includes an aerial track 100 and a crane 200 that can move on the aerial track 100. The crane 200 communicates with the scheduling system 300. The system also includes: A schedulable monitor 400 is set at a position that can be captured by the overhead crane 200, and the schedulable monitor 400 is equipped with a capture part 410 that can be captured by the overhead crane 200. The schedulable monitor 400 communicates wirelessly with the scheduling system 300.

[0072] Unlike Embodiment 1, in this embodiment, a control terminal is no longer required, and instructions are sent to the schedulable monitor 400 or the scheduling system 300 via the control terminal 500. Instead, the scheduling system 300 autonomously schedules the overhead crane 200 to move the schedulable monitor 400 and controls the operation of the schedulable monitor according to its built-in program.

[0073] For example, the built-in program of the scheduling system 300 can be set to schedule one overhead crane 200 to perform an inspection of the overhead track or factory area every hour on the hour. During each inspection, the video collected by the scheduleable monitor 400 can be sent to the scheduling system for storage and / or analysis, and / or the video collected by the scheduleable monitor can also be sent to physical storage (hard drive, USB flash drive, etc.) for storage, and / or the video collected by the scheduleable monitor can also be uploaded to a cloud server for storage and analysis to determine if there are any anomalies. Of course, the built-in program can also be configured to perform other monitoring tasks, such as moving to the vicinity of an abnormal process equipment or overhead crane for anomaly investigation, which is not limited here.

[0074] This invention has many other embodiments, and all technical solutions formed by equivalent transformations or equivalent transformations fall within the protection scope of this invention.

Claims

1. A dispatchable monitoring system, comprising an aerial track and a crane movable on the aerial track, the crane communicating with the dispatch system, characterized in that, Also includes: A schedulable monitor is set at a position that can be grasped by the overhead crane, and the schedulable monitor is equipped with a grasped part that can be grasped by the grasping mechanism of the overhead crane. The schedulable monitor communicates wirelessly with the scheduling system. The control terminal is wirelessly connected to the scheduling system and the schedulable monitor. The control terminal is configured to send a scheduling request to the scheduling system to control the overhead crane scheduling and the schedulable monitor to perform a monitoring task.

2. The schedulable monitoring system according to claim 1, characterized in that: The schedulable monitor includes a hollow frame, with the grabbing part located at the top center of the hollow frame, and a shooting device, a wireless communication module, and a controller mounted on the hollow frame.

3. The schedulable monitoring system according to claim 2, characterized in that: The hollow frame includes an upper plate and a lower plate with a gap between them, and a set of connecting rods at their top corners.

4. The schedulable monitoring system according to claim 2, characterized in that: The hollow frame is configured to be placed at the buffer position of the loading port and / or the air buffer station.

5. The schedulable monitoring system according to claim 2, characterized in that: The shooting device is mounted on a gimbal.

6. The schedulable monitoring system according to claim 2, characterized in that: The shooting device or the gimbal on which the shooting device is located is mounted on the extension mechanism, and the extension mechanism drives the shooting device or the gimbal to move between the inside and outside of the hollow frame.

7. The schedulable monitoring system according to any one of claims 1-6, characterized in that: The schedulable monitor also includes a rechargeable battery for power supply.

8. The schedulable monitoring system according to claim 7, characterized in that: Includes a wireless charger for powering the schedulable monitor and charging the rechargeable battery.

9. A dispatchable monitoring system, comprising an aerial track and a crane movable on the aerial track, the crane communicating with the dispatch system, characterized in that, Also includes: A schedulable monitor is set at a position that can be grasped by the overhead crane, and the schedulable monitor is equipped with a grasped part that can be grasped by the grasping mechanism of the overhead crane. The schedulable monitor communicates wirelessly with the scheduling system. The scheduling system is configured to control the overhead crane scheduling and the schedulable monitor according to a built-in program, and to control the schedulable monitor to perform monitoring tasks.

10. The monitoring method of the schedulable monitoring system according to any one of claims 1-8, characterized in that, Includes the following steps: Staff members send a scheduling request to the dispatch system via a control terminal to dispatch a schedulable monitor to a target monitoring location to perform a monitoring task; The scheduling system controls a dispatchable monitor to move to the target monitoring position according to the scheduling request and feeds back the arrival information to the control terminal. Staff members control the schedulable monitor through the control terminal; After the monitoring task is completed, the staff sends a return command to the dispatch system through the control terminal to move the dispatchable monitor back to the standby position. When the scheduling system determines that the schedulable monitor does not need to perform other monitoring tasks, it controls the overhead crane to move the schedulable monitor to a standby position.

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