Four-degree-of-freedom compliant precision positioning platform

Abstract

This invention relates to a four-degree-of-freedom compliant precision positioning platform, comprising a base, a parallelogram mechanism, a first magnifying device, a second magnifying device, and a stage. The parallelogram mechanism is connected to the base via a first guiding mechanism, and its middle portion is connected to a motion platform. The first magnifying device includes a first magnifying mechanism, a connecting rod, and a rotating ring. The first magnifying mechanism is connected to the motion platform and also to the rotating ring via the connecting rod, which is inclined. The second magnifying device includes a second magnifying mechanism and a second guiding mechanism. The middle portion of the second magnifying mechanism is connected to the second guiding mechanism, and one end of the second magnifying mechanism and the second guiding mechanism are both connected to the rotating ring via a fixed rod. The other end of the second magnifying mechanism is connected to the stage. This application achieves four degrees of freedom of movement, providing great flexibility, significantly increasing the range of motion, and exhibiting good environmental interaction capabilities.

Description

Technical Field

[0001] This invention relates to the field of precision positioning technology, and in particular to a four-degree-of-freedom compliant precision positioning platform. Background Technology

[0002] As a core component in the field of micro-manipulation, precision positioning platforms play an irreplaceable role in advanced industries such as precision machining of vehicle components, optical engineering, measurement technology, and bioengineering. With the continuous advancement of technology and the ongoing enhancement of functions in these fields, more stringent requirements are being placed on the performance of precision positioning platforms. The accuracy needs to be improved to the micro-nano level or even higher, while the effective stroke needs to be increased, the structure optimized to achieve compactness, and the system stability and response rate need to be improved. Traditional positioning platforms are mostly built based on servo motors, ball screws, and rigid connecting rods, but they suffer from problems such as backlash, friction, and wear, making it difficult to achieve high-precision positioning. To overcome this limitation, compliant mechanisms are often used as transmission mechanisms in precision positioning platforms. Unlike traditional transmission devices, compliant mechanisms mainly rely on the deformation of compliant hinges within the mechanism to achieve micro-motion and the transmission and conversion of force and energy. This is the essential difference between compliant mechanisms and traditional rigid mechanisms. Because compliant mechanisms eliminate the relative motion between components connected by rigid kinematic pairs in traditional mechanisms, they can be assembled from very few compliant structures. This not only increases the reliability of the mechanism but also saves installation time and costs. It also largely solves many problems existing in traditional mechanisms, such as backlash, friction, wear, and lubrication, thereby effectively improving the accuracy and reliability of the mechanism. Currently, the design and research of precision positioning platforms still face significant bottlenecks. Much research focuses on issues such as limited motion range and high displacement coupling, making it difficult to simultaneously address motion transmission and decoupling functions. Ultimately, this fails to meet the comprehensive requirements of practical applications for precision positioning platforms. Therefore, to broaden the applicability, there is an urgent need to design a positioning platform with large stroke, large rotation angle, no coupling, and multiple degrees of freedom. Summary of the Invention

[0003] Therefore, the purpose of this invention is to provide a four-freedom compliance precision positioning platform to overcome the shortcomings of the prior art.

[0004] To achieve the above objectives, the present invention provides a four-degree-of-freedom compliant precision positioning platform, comprising a base, a parallelogram mechanism disposed on the base, a first magnification device, a second magnification device, and a stage; The parallelogram mechanism is connected to the base via a first guide mechanism, the ends of the parallelogram mechanism are connected to a voice coil motor, and the middle part of the parallelogram mechanism is connected to a motion platform. The first amplification device includes a first amplification mechanism, a connecting rod, and a circular rotating component. The first amplification mechanism is connected to the motion platform, and the first amplification mechanism is connected to the circular rotating component through the connecting rod. The connecting rod is inclined relative to the X-axis direction or the Y-axis direction. The second amplification device includes a second amplification mechanism and a second guiding mechanism. The middle part of the second amplification mechanism is connected to the second guiding mechanism. One end of the second amplification mechanism and the second guiding mechanism are both connected to the ring rotating component through a fixed rod. The other end of the second amplification mechanism is connected to the stage. The centers of the motion platform, the parallelogram mechanism, the first amplification device, the second amplification device, and the stage are all on the same vertical line. The parallelogram mechanism, the second amplification device, and the stage are all axisymmetric structures, while the first amplification device is a centrally symmetric structure. The parallelogram mechanism, the first amplification device, the second amplification device, and the stage are arranged sequentially from bottom to top. The first amplification device and the second amplification device are driven by different piezoelectric ceramic actuators.

[0005] The beneficial effects of this invention are as follows: By connecting the output end of the voice coil motor to the parallelogram mechanism, and connecting the parallelogram mechanism to the motion platform, the voice coil motor drives the parallelogram mechanism to generate displacement, thereby causing the motion platform to generate linear displacement. The presence of the first guide mechanism reduces parasitic displacement during motion, allowing the platform to move along either the X-axis or Y-axis. Then, the motion platform is connected to the first amplification mechanism, and the input end of the first amplification mechanism is connected to a piezoelectric ceramic driver. The piezoelectric ceramic driver drives the first amplification mechanism to generate output displacement, which in turn causes the connecting rod to deflect, achieving circular rotation. The rotation of the rotating component drives the rotation of the fixed rod, which in turn drives the second amplification mechanism via the piezoelectric ceramic actuator. This causes the second amplification mechanism to generate displacement, which is then amplified to obtain the corresponding output displacement. This displacement drives the stage to move in the Z-axis direction. The presence of the second guiding mechanism reduces parasitic displacement when the stage moves in the Z-axis direction and also makes the overall mechanism more stable. Unlike existing technologies, the three-layer drive can operate independently without affecting each other, achieving single-degree-of-freedom movement or working together to achieve four-degree-of-freedom movement. This provides great flexibility, significantly increases the range of motion, and offers good environmental interaction capabilities.

[0006] Furthermore, the parallelogram mechanism includes four sets of compliant components, and the first guide mechanism includes four guide plates. Each compliant component corresponds to one guide plate. One end of the guide plate is connected to the base, and the other end of the guide plate is connected to the compliant component. The four guide plates and the four sets of compliant components are all evenly distributed at equal angles around the circumference of the motion platform, and the four sets of compliant components are respectively connected to different side walls of the motion platform.

[0007] Furthermore, the base has a first mounting groove and a second mounting groove that are perpendicular to each other. The depth direction of the first mounting groove is perpendicular to the depth direction of the second mounting groove. The compliant component and the motion platform are located in the first mounting groove, and the guide plate is located in the second mounting groove.

[0008] Furthermore, the compliant component includes four flexible plates, two L-shaped plates, a first crossbeam, and a second crossbeam. The two L-shaped plates are respectively connected to the opposite ends of the first crossbeam to form a semi-enclosed structure. The second crossbeam and the four flexible plates are all located in the semi-enclosed structure. The second crossbeam is connected to the L-shaped plates and the motion platform through the four flexible plates.

[0009] Furthermore, the first amplification mechanism includes a first lever amplification component and a first bridge amplification component. The first lever amplification component is connected to the first bridge amplification component through a flexible structure, and the first lever amplification component is connected to the corresponding piezoelectric ceramic driver through a first input block. The first bridge amplification component is connected to the connecting rod through a first output block.

[0010] Furthermore, the first lever amplification component includes four first levers and two first support beams. The two opposite ends of the first support beams are respectively connected to the two first levers. One first support beam and the two first levers are combined to form a first half-frame structure. There are two first input blocks. Both first input blocks are located between the two first half-frame structures and at opposite ends of the first half-frame structures. The two first levers on the same side of the two first half-frame structures are respectively connected to the first input blocks. The first input blocks and the first support beams do not interfere with each other.

[0011] Furthermore, the first bridge amplification component includes four first bridge arms, and the number of first output blocks is two. The two opposite ends of the first output blocks are respectively connected to the two first bridge arms to form a first output bridge. The two ends of the first output bridge are respectively connected to the two first levers in the first semi-frame structure. The first output bridge and the first input block are respectively located on opposite sides of the first support beam.

[0012] Furthermore, there are two connecting rods, which are symmetrically arranged around the center point of the circular rotating component. Each connecting rod corresponds to one of the first output blocks. One end of the connecting rod is connected to the first output block, and the other end of the connecting rod is connected to the circular rotating component.

[0013] Furthermore, the second amplification mechanism includes a second lever amplification component and a second bridge amplification component. The second lever amplification component is connected to the second guide mechanism, the second bridge amplification component is connected to the fixed rod through a connecting block, and the second bridge amplification component is connected to the stage through a second output block. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of a four-degree-of-freedom compliant precision positioning platform according to an embodiment of the present invention; Figure 2 This is a plan view of the base and parallelogram mechanism according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the base and parallelogram mechanism according to an embodiment of the present invention; Figure 4 This is a plan view of a first magnifying device according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of a first amplification device according to an embodiment of the present invention; Figure 6 This is a schematic diagram of the structure of the second amplification device according to an embodiment of the present invention.

[0015] Explanation of key component symbols: 10. Base; 11. First mounting slot; 12. Second mounting slot; 21. Compliant component; 211. Flexible plate; 212. L-shaped plate; 213. First crossbeam; 214. Second crossbeam; 311. First lever; 312. First support beam; 313. Flexible sheet; 321. First bridge arm; 33. Connecting rod; 34. Circular rotating component; 35. First input block; 36. First output block; 37. First semi-frame structure; 38. First output bridge; 411. Second lever; 412. Second support beam; 421. Second bridge arm; 43. Second input block; 44. Second output block; 45. Connecting block; 46. Fixed rod; 51. Guide plate; 60. Motion platform; 70. Loading platform; 81. L-shaped structure.

[0016] The following detailed description, in conjunction with the accompanying drawings, will further illustrate the present invention. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of this application clearer, the application is described and illustrated below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application. All other embodiments obtained by those skilled in the art based on the embodiments provided in this application without inventive effort are within the scope of protection of this application.

[0018] Obviously, the accompanying drawings described below are merely some examples or embodiments of this application. Those skilled in the art can apply this application to other similar scenarios based on these drawings without any inventive effort. Furthermore, it is understood that although the efforts made in this development process may be complex and lengthy, for those skilled in the art related to the content disclosed in this application, any changes to design, manufacturing, or production based on the technical content disclosed in this application are merely conventional technical means and should not be construed as insufficient disclosure of the content of this application.

[0019] In this application, the reference to "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0020] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms “a,” “an,” “an,” “the,” and similar words used in this application do not indicate quantity limitation and may indicate singular or plural. The terms “comprising,” “including,” “having,” and any variations thereof used in this application are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or device that includes a series of steps or modules (units) is not limited to the listed steps or units, but may also include steps or units not listed, or may include other steps or units inherent to these processes, methods, products, or devices. The terms “connected,” “linked,” “coupled,” and similar words used in this application are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. “Multiple” used in this application refers to two or more. “And / or” describes the relationship between related objects, indicating that three relationships may exist; for example, “A and / or B” can represent: A alone, A and B simultaneously, and B alone. The character " / " generally indicates that the preceding and following objects are in an "or" relationship. The terms "first," "second," and "third" used in this application are merely to distinguish similar objects and do not represent a specific ordering of the objects.

[0021] Example 1 Please see Figures 1-6 The four-degree-of-freedom compliant precision positioning platform in this embodiment of the invention includes a base 10, a parallelogram mechanism disposed on the base 10, a first magnification device, a second magnification device, and a stage 70.

[0022] The parallelogram mechanism is connected to the base 10 via a first guide mechanism. Specifically, the base 10 has a first mounting groove 11 and a second mounting groove 12. The depth direction of the first mounting groove 11 is perpendicular to the depth direction of the second mounting groove 12. The first mounting groove 11 and the second mounting groove 12 are interconnected. The inner cavity of the first mounting groove 11 has a cross-shaped structure, and the inner cavity of the second mounting groove 12 has a rectangular structure. The parallelogram mechanism is located in the first mounting groove 11, and the first guide mechanism is located in the second mounting groove 12.

[0023] In this embodiment, the middle part of the parallelogram mechanism is connected to the motion platform 60, which is a rectangular structure. The parallelogram mechanism includes four compliant components 21, and the first guide mechanism includes four guide plates 51. The compliant components 21 and the guide plates 51 correspond one-to-one, that is, each compliant component 21 is connected to the base 10 through a guide plate 51. Specifically, one end of the guide plate 51 is connected to the base 10, and the other end of the guide plate 51 is connected to the corresponding compliant component 21. The four compliant components 21 are evenly distributed around the circumference of the motion platform 60 at equal angles, and the four compliant components 21 are respectively connected to the four side walls of the motion platform 60. That is, the motion platform 60 is located in the middle of the first mounting groove 11. It should be noted that the four guide plates 51 are evenly distributed around the circumference of the motion platform 60 at equal angles, and the two guide plates 51 with opposite positions are centrally symmetrical about the center point of the motion platform 60. There are four second mounting grooves 12, and the four second mounting grooves 12 correspond one-to-one with the four guide plates 51.

[0024] It should be noted that the two adjacent compliant components 21 are used to connect with the voice coil motor. By driving the voice coil motors in different directions, the voice coil motors provide force to drive the motion platform 60 to translate along the X-axis or Y-axis, thereby achieving centimeter-level displacement, that is, realizing large stroke displacement. It can be understood that the first mounting slot 11 has reserved displacement space for the movement of the motion platform 60 and the compliant components 21.

[0025] In this embodiment, the two central axes of symmetry of the parallelogram mechanism are defined as the X-axis and Y-axis, respectively. The intersection of the two central axes of symmetry, i.e. the center point of the motion platform 60, is taken as the origin, and the straight line perpendicular to the motion platform 60 and the origin is taken as the Z-axis.

[0026] In this embodiment, the first amplification device includes a first amplification mechanism, a connecting rod 33, and a circular rotating component 34. The first amplification mechanism is connected to the motion platform 60 and is connected to the circular rotating component 34 via the connecting rod 33. The first amplification mechanism is located above the motion platform 60. The first amplification mechanism, the connecting rod 33, and the circular rotating component 34 are all located on the same horizontal plane. The first amplification mechanism and the connecting rod 33 are both located within the circular rotating component 34. The connecting rod 33 is inclined relative to the X-axis or Y-axis direction. The first amplification mechanism is driven by a piezoelectric ceramic actuator. Specifically, the piezoelectric ceramic actuator provides force, which is amplified and transmitted by the first amplification mechanism. Due to the inclined arrangement of the connecting rod 33, the circular rotating component 34 can be rotated.

[0027] In this embodiment, the second amplification device includes a second amplification mechanism and a second guiding mechanism. The middle part of the second amplification mechanism is connected to the second guiding mechanism. One end of the second amplification mechanism and the second guiding mechanism are both connected to the ring rotating member 34 through a fixing rod 46. Specifically, the fixing rod 46 is located above the ring rotating member 34 and is connected to the ring rotating member 34 through a bolt structure. The center of the fixing rod 46 coincides with the center of the ring rotating member 34. The second amplification mechanism and the second guiding mechanism are both located above the fixing rod 46. One end of the second amplification mechanism and the second guiding mechanism are both connected to the fixing rod 46 through a bolt structure. The other end of the second amplification mechanism is connected to the stage 70, which is used to place the element to be positioned.

[0028] It should be noted that the second amplification mechanism is driven by a piezoelectric ceramic actuator, which in turn causes the stage 70 to translate in the Z-axis direction.

[0029] It should be noted that the centers of the motion platform 60, the parallelogram mechanism, the first magnifying device, the second magnifying device, and the stage 70 are all on the same vertical line. The parallelogram mechanism, the second magnifying device, and the stage 70 are all axisymmetric structures, while the first magnifying device is a centrally symmetric structure. The parallelogram mechanism, the first magnifying device, the second magnifying device, and the stage 70 are arranged sequentially from bottom to top.

[0030] In this embodiment, the compliant component 21 has a symmetrical structure, comprising four flexible plates 211, two L-shaped plates 212, a first crossbeam 213, and a second crossbeam 214. The first crossbeam 213 and the second crossbeam 214 are parallel. The two L-shaped plates 212 are respectively connected to the opposite ends of the first crossbeam 213 to form a semi-enclosed structure. The four flexible plates 211 are arranged in parallel, and the second crossbeam 214 and the four flexible plates 211 are both located in the semi-enclosed structure. The two flexible plates 211... The same end of the two flexible plates 211 is connected to the two ends opposite to the second crossbeam 214, and the other ends of the two flexible plates 211 are connected to the ends of the two L-shaped plates 212 away from the first crossbeam 213. In addition, the same end of the other two flexible plates 211 is connected to the middle of the second crossbeam 214 through the receiving block, and the other ends of the two flexible plates 211 are connected to the motion platform 60. It should be noted that the guide plate 51 is connected to the L-shaped plate 212, and the guide plate 51 is perpendicular to the L-shaped plate 212.

[0031] It should be noted that parallelogram mechanisms have low stiffness, allowing for large-angle deformation, which in turn facilitates large-stroke displacement. They are also symmetrically distributed and have a compact structure.

[0032] In this embodiment, the first amplification mechanism is an axisymmetric structure. The first amplification mechanism includes a first lever amplification component and a first bridge amplification component. The first lever amplification component is connected to the first bridge amplification component through a flexible structure. The first lever amplification component is connected to the corresponding piezoelectric ceramic driver through the first output block 36. The first bridge amplification component is connected to the connecting rod 33 through the first output block 36.

[0033] Specifically, the first lever amplification component includes four first levers 311 and two first support beams 312. Each first support beam 312 corresponds to two first levers 311, and both ends of the first support beam 312 are connected to the corresponding two first levers 311 through flexible structures. The first support beams 312 and the corresponding two first levers 311 combine to form a first semi-frame structure 37. Two second semi-frame structures are located on the same horizontal plane, that is, the first lever amplification component contains two first semi-frame structures 37. The first input block 35 is located between the two first semi-frame structures 37. The two first levers 311 on the same side of the first semi-frame structure 37 are connected to the first input block 35 through flexible structures. The first input block 35 and the first support beams 312 do not interfere with each other. The first bridge amplification component is located at the opening of the first semi-frame structure 37. The first bridge amplification component is connected to the first levers 311 in the first semi-frame structure 37 to realize the connection between the first bridge amplification component and the first lever amplification component.

[0034] Furthermore, the first bridge amplification component includes four first bridge arms 321, and the number of first output blocks 36 is two. Each first output block 36 corresponds to two first bridge arms 321, and the two ends of the first output block 36 are connected to the corresponding two first bridge arms 321 through flexible structures to form a first output bridge 38. That is, the first bridge amplification component and the two first output blocks 36 can obtain two first output bridges 38. The two first output bridges 38 correspond one-to-one with the two first half-frame structures 37. The two ends of the first output bridge 38 are connected to the two first levers 311 in the corresponding first half-frame structure 37 through flexible structures to block the opening of the first half-frame structure 37. The first output bridge 38 and the first input block 35 are located on opposite sides of the first support beam 312.

[0035] It should be noted that there are two first input blocks 35. Both first input blocks 35 are located between the first half-frame structure 37, and the two first input blocks 35 are located at opposite ends of the first half-frame structure 37. One of the first input blocks 35 is connected to two first levers 311 on one side of the two first half-frame structure 37 through a flexible structure, and the other first input block 35 is connected to two first levers 311 on the other side of the two first half-frame structure 37 through a flexible structure.

[0036] In this embodiment, there are two connecting rods 33. The two connecting rods 33 are arranged symmetrically about the center point of the annular rotating member 34. Each connecting rod 33 corresponds to a first output block 36. One end of the connecting rod 33 is connected to the corresponding first output block 36 through a flexible structure, and the other end of the connecting rod 33 is connected to the inner wall of the annular rotating member 34 through a flexible structure.

[0037] It should be noted that the displacement or force is transmitted to the first input block 35 by the piezoelectric ceramic actuator, thereby driving the first lever amplification component to achieve the amplification function; then the first lever amplification component drives the first bridge amplification component, and the connecting rod 33 deflects to drive the ring rotating component 34, so that the ring rotating component 34 achieves rotational motion; since each level of the mechanism is tightly connected and drives each other, and the rods and beams at each level are connected by a flexible structure, the mechanism itself has a compact structure. The first amplification mechanism, as a compliant amplification actuator, can achieve a large-angle rotation function through the drive of the piezoelectric ceramic actuator.

[0038] In this embodiment, the second amplification mechanism includes a second lever amplification component and a second bridge amplification component. The second lever amplification component has a similar structure to the first lever amplification component, and the second bridge amplification component has a similar structure to the first bridge amplification component.

[0039] Specifically, the second lever amplification component includes four second levers 411 and two second support beams 412. Each second support beam 412 corresponds to two second levers 411, and both ends of the second support beam 412 are connected to the corresponding two second levers 411 through flexible structures. The second support beams 412 and the corresponding two second levers 411 combine to form a second half-frame structure. That is, the second lever amplification component contains two second half-frame structures, wherein one second half-frame structure is located above the other second half-frame structure, that is, the two second half-frame structures are located on the same vertical plane. The second input block 43 is located between the two second half-frame structures. The two second levers 411 on the same side of the second half-frame structure are connected to the second input block 43 through flexible structures. The second input block 43 and the second support beams 412 do not interfere with each other. The second bridge amplification component is located at the opening of the second half-frame structure. The second bridge amplification component is connected to the second levers 411 in the second half-frame structure to realize the connection between the second bridge amplification component and the second lever amplification component.

[0040] Furthermore, the second bridge amplification component includes four second bridge arms 421, and one second output block 44. The two opposite ends of the second output block 44 are connected to two corresponding second bridge arms 421 via flexible structures to form a second output bridge. A connecting block 45 is provided between the other two second bridge arms 421. The two opposite ends of the connecting block 45 are connected to the other two second bridge arms 421 via flexible structures to form a connecting bridge. The second output bridge is located above the connecting bridge; that is, the second output bridge and the connecting bridge are both located on the same vertical plane. Each of the two output bridges corresponds to one of the two second half-frame structures. Both ends of the output bridge are connected to the two second levers 411 in the corresponding second half-frame structure through flexible structures to block the openings of the second half-frame structure. The output bridge and the input block 43 are located on opposite sides of the corresponding second support beam 412. Similarly, both ends of the connecting bridge are connected to the two second levers 411 in the corresponding second half-frame structure through flexible structures to block the openings of the second half-frame structure. The connecting bridge and the connecting block 45 are located on opposite sides of the corresponding second support beam 412.

[0041] It should be noted that the second output block 44 is connected to the center of the stage 70, and the connecting block 45 is connected to the center of the fixing rod 46.

[0042] It should be noted that there are two second input blocks 43. Both second input blocks 43 are located between the second half-frame structures and at opposite ends of the second half-frame structures. One of the second input blocks 43 is connected to two second levers 411 on one side of the two second half-frame structures through a flexible structure, and the other second input block 43 is connected to two second levers 411 on the other side of the two second half-frame structures through a flexible structure.

[0043] In this embodiment, the second guiding mechanism includes two L-shaped structures 81, which are located on opposite sides of the second amplification mechanism. Each L-shaped structure 81 is connected to the middle of the second amplification mechanism through a corresponding flexible structure. Specifically, one end of the L-shaped structure 81 is connected to the second support beam 412 in the upper half-frame structure through a flexible structure, the middle of the L-shaped structure 81 is connected to the second support beam 412 in the lower half-frame structure through a flexible structure, and the other end of the L-shaped structure 81 is connected to the fixing rod 46 through a bolt structure. The two L-shaped structures 81 are symmetrically arranged about one axis of symmetry of the second amplification mechanism.

[0044] It should be noted that the amplification mechanism in the large-angle rotation section around the Z-axis is used, which reduces the complexity of the overall design. Furthermore, guide mechanisms are installed on both sides of the amplification mechanism to reduce parasitic displacement and enhance the stability of the mechanism.

[0045] In this embodiment, the flexible structure includes a flexible sheet 313 and a flexible hinge, which are movably connected. One end of the flexible sheet 313 is connected to a component, and the other end of the flexible sheet 313 is connected to another component through the flexible hinge, so as to realize the connection relationship between the two.

[0046] In specific implementation, the base 10 is first fixed to the experimental table through the fixing through hole of the base 10. Then, the output end of the voice coil motor is connected to the parallelogram mechanism, and the parallelogram mechanism is connected to the motion platform 60. The top of the parallelogram mechanism is used as the input end of the stroke. The voice coil motor drives the input end of the parallelogram mechanism to make the parallelogram mechanism displace, thereby driving the motion platform 60 to produce linear displacement. The existence of the first guide mechanism can reduce parasitic displacement when the motion platform 60 moves, that is, move along the X-axis or Y-axis direction. Then, the threaded hole on the motion platform 60 is connected to the mounting through hole on the first support beam 312. Both sides of the piezoelectric ceramic actuator are provided with first lever amplification components. The input end of the first lever amplification component is connected to the piezoelectric ceramic actuator through the first input block 35. The piezoelectric ceramic actuator is used to drive the first input block 35 so that the first input block 35 generates a horizontal displacement. The horizontal displacement is amplified by the first lever amplification component to obtain the first output displacement. The first output displacement is based on the first bridge amplification component to obtain a vertical and amplified second output displacement. The second output displacement drives the connecting rod 33 to deflect, realizing the rotation of the ring rotating part 34, thereby driving the rotation of the fixed rod 46. The deflection of the connecting rod 33 is due to the fact that its two ends are connected to the output end of the first bridge amplifier component and the ring rotating component 34 through the flexible sheet 313 and the flexible hinge. The second output displacement is vertically downward, while the connecting rod 33 is inclined. As a result, when the connecting rod 33 is pulled vertically downward, it deflects. Since the two connecting rods 33 are 180 degrees symmetrically arranged, the ring rotating component 34 can rotate around its center without any offset. The second input block 43 is then driven by the piezoelectric ceramic actuator to generate a horizontal displacement. This horizontal displacement is then amplified by the second lever amplification assembly to obtain a vertical and amplified output displacement at the output end of the second bridge amplification assembly, thereby driving the stage 70 to move in the Z-axis direction. The presence of the second guide mechanism can reduce parasitic displacement when the stage 70 moves in the Z-axis direction and also make the overall mechanism more stable. The three-layer drive can operate independently without affecting each other, achieving single-degree-of-freedom motion, or they can work together to achieve four-degree-of-freedom motion. Specifically, when the upper, middle, and lower layers are driven individually, the stage 70 has a single-layer motion degree of freedom. When two layers are driven in pairs, the stage 70 has the corresponding degrees of freedom of the two layers. When the three layers are driven together, the stage 70 has three-layer degrees of freedom, i.e., four degrees of freedom, which has great flexibility, greatly improves the range of motion, and has good environmental interaction capabilities.

[0047] In the description of this specification, references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0048] Without causing conflict, those skilled in the art can freely combine and use the above-mentioned additional technical features.

[0049] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A four-degree-of-freedom compliant precision positioning platform, characterized in that, It includes a base, a parallelogram mechanism disposed on the base, a first magnifying device, a second magnifying device, and a stage; The parallelogram mechanism is connected to the base via a first guide mechanism, the ends of the parallelogram mechanism are connected to a voice coil motor, and the middle part of the parallelogram mechanism is connected to a motion platform. The first amplification device includes a first amplification mechanism, a connecting rod, and a circular rotating component. The first amplification mechanism is connected to the motion platform, and the first amplification mechanism is connected to the circular rotating component through the connecting rod. The connecting rod is inclined relative to the X-axis direction or the Y-axis direction. The second amplification device includes a second amplification mechanism and a second guiding mechanism. The middle part of the second amplification mechanism is connected to the second guiding mechanism. One end of the second amplification mechanism and the second guiding mechanism are both connected to the ring rotating component through a fixed rod. The other end of the second amplification mechanism is connected to the stage. The centers of the motion platform, the parallelogram mechanism, the first amplification device, the second amplification device, and the stage are all on the same vertical line. The parallelogram mechanism, the second amplification device, and the stage are all axisymmetric structures, while the first amplification device is a centrally symmetric structure. The parallelogram mechanism, the first amplification device, the second amplification device, and the stage are arranged sequentially from bottom to top. The first amplification device and the second amplification device are driven by different piezoelectric ceramic actuators.

2. The four-degree-of-freedom compliant precision positioning platform according to claim 1, characterized in that, The parallelogram mechanism includes four sets of compliant components. The first guide mechanism includes four guide plates, with each compliant component corresponding to one guide plate. One end of each guide plate is connected to the base, and the other end of each guide plate is connected to the compliant component. The four guide plates and the four sets of compliant components are evenly distributed at equal angles around the circumference of the motion platform, and the four sets of compliant components are respectively connected to different side walls of the motion platform.

3. The four-degree-of-freedom compliant precision positioning platform according to claim 2, characterized in that, The base has a first mounting groove and a second mounting groove that are perpendicular to each other. The depth direction of the first mounting groove is perpendicular to the depth direction of the second mounting groove. The compliant component and the motion platform are located in the first mounting groove, and the guide plate is located in the second mounting groove.

4. The four-degree-of-freedom compliant precision positioning platform according to claim 2, characterized in that, The compliant component includes four flexible plates, two L-shaped plates, a first crossbeam, and a second crossbeam. The two L-shaped plates are respectively connected to the opposite ends of the first crossbeam to form a semi-enclosed structure. The second crossbeam and the four flexible plates are all located in the semi-enclosed structure. The second crossbeam is connected to the L-shaped plates and the motion platform through the four flexible plates.

5. The four-degree-of-freedom compliant precision positioning platform according to claim 1, characterized in that, The first amplification mechanism includes a first lever amplification component and a first bridge amplification component. The first lever amplification component is connected to the first bridge amplification component through a flexible structure, and the first lever amplification component is connected to the corresponding piezoelectric ceramic driver through a first input block. The first bridge amplification component is connected to the connecting rod through a first output block.

6. The four-degree-of-freedom compliant precision positioning platform according to claim 5, characterized in that, The first lever amplification component includes four first levers and two first support beams. The two opposite ends of the first support beams are respectively connected to the two first levers. One first support beam and two first levers are combined to form a first half-frame structure. There are two first input blocks. Both first input blocks are located between the two first half-frame structures and at opposite ends of the first half-frame structures. The two first levers on the same side of the two first half-frame structures are respectively connected to the first input blocks. The first input blocks and the first support beams do not interfere with each other.

7. The four-degree-of-freedom compliant precision positioning platform according to claim 6, characterized in that, The first bridge amplifier component includes four first bridge arms, and there are two first output blocks. The two ends of the first output blocks are respectively connected to the two first bridge arms to form a first output bridge. The two ends of the first output bridge are respectively connected to the two first levers in the first semi-frame structure. The first output bridge and the first input block are respectively located on opposite sides of the first support beam.

8. The four-degree-of-freedom compliant precision positioning platform according to claim 5, characterized in that, The number of connecting rods is two, and the two connecting rods are symmetrically arranged with respect to the center point of the ring rotating component. Each connecting rod corresponds to one of the first output blocks. One end of the connecting rod is connected to the first output block, and the other end of the connecting rod is connected to the ring rotating component.

9. The four-degree-of-freedom compliant precision positioning platform according to claim 1, characterized in that, The second amplification mechanism includes a second lever amplification component and a second bridge amplification component. The second lever amplification component is connected to the second guide mechanism. The second bridge amplification component is connected to the fixed rod through a connecting block. The second bridge amplification component is connected to the stage through a second output block.

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