Hot wire coating apparatus

Abstract

This invention provides a hot-wire coating equipment, belonging to the technical field of photovoltaic cell coating. The hot-wire coating equipment includes a deposition chamber, a first fixing component, a second fixing component, and a claw plate assembly. The first fixing component is fixedly disposed on the inner wall of the deposition chamber. The second fixing component is disposed within the deposition chamber and detachably connected to the first fixing component; the second fixing component is used to fix the hot wire. The claw plate assembly is disposed within the deposition chamber and is used to grasp the second fixing component and detachably install it onto the first fixing component. The claw plate assembly is also used to detach the second fixing component from the first fixing component. The hot-wire coating equipment provided by this invention eliminates the need to stop the machine to open the deposition chamber during hot wire replacement and eliminates the need to perform a vacuuming operation on the chamber after replacement, directly saving time and labor costs and improving coating production efficiency.

Description

Technical Field

[0001] This invention belongs to the technical field of photovoltaic cell coating, and more specifically, relates to a hot wire coating device. Background Technology

[0002] In the manufacturing process of solar cells, silicon wafers need to undergo processes such as cleaning, diffusion, annealing, coating, and screen printing. Hot Wire Chemical Vapor Deposition (HWCVD) equipment is a commonly used coating equipment.

[0003] The heating wires in hot-wire CVD equipment have a short lifespan and are difficult to replace. Replacement typically requires shutting down the machine, opening the chamber, and then vacuuming the chamber again, wasting time and labor costs and reducing coating production efficiency. Summary of the Invention

[0004] The purpose of this invention is to provide a hot wire coating equipment to solve the technical problems in the prior art that require stopping the machine to open the chamber to replace the hot wire, and then vacuuming the chamber again after installing the hot wire, which wastes time and labor costs and reduces the production efficiency of coating.

[0005] To achieve the above objectives, the technical solution adopted by the present invention is: to provide a hot wire coating apparatus, comprising:

[0006] Evaporation chamber;

[0007] A first fixing component is fixedly disposed on the inner wall of the vapor deposition chamber;

[0008] A second fixing component is disposed within the vapor deposition chamber and is detachably connected to the first fixing component. The second fixing component is used to fix the hot wire.

[0009] A claw disk assembly is disposed in the vapor deposition chamber. The claw disk assembly is used to grasp the second fixing component and detachably install the second fixing component onto the first fixing component. The claw disk assembly is also used to detach the second fixing component from the first fixing component.

[0010] Furthermore, the hot wire coating equipment includes a connector, a first driving member, and a second driving member. The connector is provided with a roller, and the roller is provided with the claw disk assembly. The first driving member is connected to the roller and is used to drive the roller to rotate so that the roller drives the claw disk assembly to move along a first direction.

[0011] The second driving member is connected to the connecting member, and the second driving member is used to drive the connecting member to move along the second direction, so that the claw disk assembly moves along the second direction, thereby enabling the claw disk assembly to move toward or away from the second fixed component; wherein the first direction and the second direction intersect.

[0012] Furthermore, the connector, the first driving member, and the second driving member form a driving assembly, and two driving assemblies are provided, with the two driving assemblies respectively located at both ends of the claw disk assembly in the vertical direction.

[0013] Furthermore, the hot wire coating equipment also includes a drive shaft, which extends along the first direction and is connected to the first driving member;

[0014] The rollers are provided in multiple ways, and the multiple rollers are spaced apart along the first direction. All of the multiple rollers are connected to the transmission shaft. The first driving member can drive the transmission shaft to rotate, so that the transmission shaft drives the multiple rollers to rotate synchronously.

[0015] Furthermore, the first fixing component has a fixing post on its side facing the second fixing component, and the second fixing component has a clamp on its side facing the first fixing component, the clamp being engaged with the fixing post.

[0016] Furthermore, the first fixing component is provided with a limiting member, an elastic member and a fixing seat. The fixing seat is connected to the first fixing component. The limiting member is sleeved in the fixing seat and can extend and retract relative to the fixing seat. One end of the elastic member is connected to the fixing seat and the other end is connected to the limiting member.

[0017] When the claw disk assembly approaches the first fixing assembly, the outer edge of the claw disk assembly abuts against the limiting member, so that the limiting member is compressed against the fixing seat, thereby causing the elastic member to undergo elastic deformation;

[0018] When the second fixing component is detachably connected to the first fixing component, the elastic element provides an elastic force to the limiting component that abuts against the outer edge of the second fixing component.

[0019] Furthermore, the side of the limiting member facing the second fixing component is a first inclined surface and a plane, the first inclined surface smoothly transitions to the plane, and the first inclined surface is away from the first fixing component relative to the plane.

[0020] Furthermore, the claw disk assembly has a fixing pin sleeve on the side facing the second fixing component, and the second fixing component has a fixing pin on the side facing the claw disk assembly, with the fixing pin sleeve sleeved on the fixing pin.

[0021] Furthermore, the claw plate assembly is provided with a first feeding claw, which includes a first housing, a first plate and a first spring post. The first plate is disposed inside the first housing and is movable relative to the first housing. The first plate is provided with a second inclined surface. One end of the first spring post is connected to the first housing and the other end is connected to the first plate.

[0022] The second fixing component is provided with a second feeding claw, the second feeding claw is provided with a third inclined surface and a first vertical surface, the bottom of the third inclined surface is connected to the bottom of the first vertical surface, the third inclined surface and the first vertical surface form a first slot, and the third inclined surface is away from the second fixing component relative to the first vertical surface;

[0023] When the claw plate assembly is detachably connected to the second fixing assembly, the first plate is engaged in the first slot, and the first spring post provides an elastic force to the first plate toward the first slot.

[0024] Furthermore, the first feeding claw also includes a sliding block, which is connected to the first plate. A sliding groove is provided on the side of the first housing, and the sliding block passes through the sliding groove and can slide relative to the sliding groove to drive the first plate to move relative to the first housing.

[0025] The first feeding claw also includes a pin, and the first spring post is provided with a pin hole. The pin is inserted into the pin hole to restrict the sliding block from sliding relative to the sliding groove.

[0026] Furthermore, the claw disk assembly is provided with a first unloading claw, the first unloading claw including a second housing, a second plate and a second spring post, the second plate is disposed inside the second housing and the second plate is movable relative to the second housing, one end of the second spring post is connected to the second housing and the other end is connected to the second plate, and a fourth inclined surface is provided on the second plate;

[0027] The second fixing component is provided with a second unloading claw, the second unloading claw is provided with a fifth inclined surface and a second vertical surface, the bottom of the fifth inclined surface is connected to the bottom of the second vertical surface, the fifth inclined surface and the second vertical surface form a second slot, and the second vertical surface is away from the second fixing component relative to the fifth inclined surface;

[0028] Once the second plate is engaged in the second slot, the claw plate assembly is driven to move away from the first fixing component, so as to separate the second fixing component from the first fixing component.

[0029] Compared with the prior art, the beneficial effects of the hot filament coating equipment provided by the present invention are as follows: The hot filament coating equipment of the present invention includes a evaporation chamber, a first fixing component, a second fixing component, and a claw plate assembly. The first fixing component is fixedly disposed on the inner side wall of the evaporation chamber. The second fixing component is disposed within the evaporation chamber and is detachably connected to the first fixing component, and the second fixing component is used to fix the hot filament. The claw plate assembly is disposed within the evaporation chamber and is used to grasp the second fixing component and detachably install the second fixing component onto the first fixing component. The claw plate assembly is also used to detach the second fixing component from the first fixing component.

[0030] When the hot wire needs to be replaced, the claw plate assembly moves within the vapor deposition chamber to the position corresponding to the second fixing component. The claw plate assembly can then detach the second fixing component from the first fixing component, allowing for the unloading of both the second fixing component and the hot wire. After unloading the second fixing component and the hot wire, the claw plate assembly grips the second fixing component, which secures the hot wire, and then detachably installs the second fixing component onto the first fixing component. Once secured, the claw plate assembly releases its grip on the second fixing component, completing the loading of both the second fixing component and the hot wire, thus completing the hot wire replacement. The operation of the claw plate assembly, the first fixing component, and the second fixing component is all completed within the closed vapor deposition chamber. During hot wire replacement, there is no need to stop the machine to open the vapor deposition chamber, nor is it necessary to perform a vacuuming operation after replacement. This directly eliminates the time-consuming steps of opening the chamber and vacuuming, saving time and labor costs and improving coating production efficiency. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 This is a schematic diagram of the structure of a hot wire coating device provided in a preferred embodiment of the present invention.

[0033] Figure 2 This is a structural schematic diagram of the hot wire coating equipment provided in a preferred embodiment of the present invention from another angle.

[0034] Figure 3 This is a schematic diagram of the vapor deposition chamber provided in a preferred embodiment of the present invention.

[0035] Figure 4 This is a side view of a hot wire coating apparatus provided in a preferred embodiment of the present invention.

[0036] Figure 5 This is a partial structural diagram of a hot wire coating apparatus provided in a preferred embodiment of the present invention.

[0037] Figure 6 This is a schematic diagram of the structure of the first fixing component provided in a preferred embodiment of the present invention.

[0038] Figure 7 for Figure 6 Enlarged view of point A in the middle.

[0039] Figure 8 This is a schematic diagram of the structure of the second fixing component provided in a preferred embodiment of the present invention.

[0040] Figure 9 A side view of the second fixing component provided in a preferred embodiment of the present invention.

[0041] Figure 10 This is a schematic diagram of the claw disk assembly provided in a preferred embodiment of the present invention.

[0042] Figure 11 This is a side view of the claw disk assembly provided in a preferred embodiment of the present invention.

[0043] Figure 12 This is a schematic diagram of the first stage of the feeding process of the first and second feeding claws provided in a preferred embodiment of the present invention.

[0044] Figure 13 This is a schematic diagram of the second stage of the feeding process of the first and second feeding claws provided in a preferred embodiment of the present invention.

[0045] Figure 14 This is a schematic diagram of the third stage of the feeding process of the first and second feeding claws, which is provided in a preferred embodiment of the present invention.

[0046] Figure 15 This is a schematic diagram of the first stage of the feeding process of the first and second feeding claws provided in a preferred embodiment of the present invention.

[0047] Figure 16 This is a schematic diagram of the second stage of the feeding process of the first and second feeding claws provided in a preferred embodiment of the present invention.

[0048] Figure 17 This is a schematic diagram of the third stage of the feeding process of the first and second feeding claws provided in a preferred embodiment of the present invention.

[0049] The main markings in the attached figures are as follows:

[0050] 100. Evaporation chamber; 110. Vacuum valve; 120. Atmospheric valve; 130. Loading chamber; 140. Heating chamber; 150. Process chamber; 160. Discharge chamber; 170. Top cover; 180. Inlet / outlet; 190. Support feet;

[0051] 200, First fixing component; 210, Fixing post; 220, Limiting component; 230, First inclined surface; 240, Fixing base; 250, Hot wire power inlet; 260, Air inlet; 270, Sealing ring;

[0052] 300. Second fixing component; 310. Hot wire; 320. Clamp; 330. Hot wire connector; 340. Hot wire fixing block; 350. Conductive wire; 360. Fixing pin; 370. Second loading claw; 371. Third inclined plane; 372. First vertical plane; 380. Second unloading claw; 381. Fifth inclined plane; 382. Second vertical plane;

[0053] 400. Claw plate assembly; 410. Fixing pin sleeve 410; 420. First feeding claw; 421. First housing; 422. First plate; 423. Second inclined surface; 424. First spring post; 425. Sliding block; 430. First unloading claw; 431. Second plate; 432. Fourth inclined surface; 440. Guide plate;

[0054] 510. Connector; 520. First drive component; 530. Second drive component; 540. Roller; 550. Drive shaft; 560. Reducer; 570. Bellows. Detailed Implementation

[0055] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0056] like Figures 1 to 5 and Figure 8As shown, in some embodiments, a hot-wire coating apparatus includes a deposition chamber 100, a first fixing component 200, a second fixing component 300, and a claw plate assembly 400. The first fixing component 200 is fixedly disposed on the inner wall of the deposition chamber 100. The second fixing component 300 is disposed within the deposition chamber 100 and detachably connected to the first fixing component 200; the second fixing component 300 is used to fix the hot wire 310. The claw plate assembly 400 is disposed within the deposition chamber 100 and is used to grasp the second fixing component 300 and detachably install the second fixing component 300 onto the first fixing component 200. The claw plate assembly 400 is also used to detach the second fixing component 300 from the first fixing component 200.

[0057] When the heating element 310 needs to be replaced, the claw plate assembly 400 moves within the vapor deposition chamber 100 to a position corresponding to the second fixing component 300. The claw plate assembly 400 can detach the second fixing component 300 from the first fixing component 200, and unload the entire second fixing component 300 and the heating element 310. After unloading the second fixing component 300 and the heating element 310, the claw plate assembly 400 can grasp the second fixing component 300, which secures the heating element 310, and detachably install the second fixing component 300 onto the first fixing component 200. After securing, the claw plate assembly 400 releases its grip on the second fixing component 300, completing the loading of the second fixing component 300 and the heating element 310, thereby completing the replacement of the heating element 310. The operation of the claw plate assembly 400, the first fixing assembly 200 and the second fixing assembly 300 is completed within the closed vapor deposition chamber 100. During the replacement of the hot wire 310, there is no need to stop the machine to open the vapor deposition chamber 100, nor is there a need to perform a vacuuming operation on the chamber again after the replacement is completed. This directly eliminates the time-consuming steps of opening the chamber and vacuuming, saving time and labor costs and improving the production efficiency of coating.

[0058] It should be noted that the vapor deposition chamber 100 is the core process chamber 150 of the hot wire coating equipment. The vapor deposition chamber 100 is a sealed operating space for silicon wafer coating. Specifically, the vapor deposition chamber 100 is a vacuum chamber.

[0059] Please refer to the following: Figure 3 Specifically, the hot-wire deposition equipment consists of multiple vacuum-sealed chambers with different functions. Each deposition chamber 100 is connected via a vacuum valve 110 or an atmospheric valve 120. Each deposition chamber 100 may include a loading chamber 130, a heating chamber 140, a process chamber 150, and a discharge chamber 160. The process chamber 150 includes a cover 170 and a chamber itself. Inlet and outlet ports 180 are provided on both sides of the chamber. The inlet and outlet ports 180 can be elongated to accommodate the shape of the silicon wafer.

[0060] Please refer to the following: Figure 1 and Figure 2 Specifically, the hot-wire coating equipment includes support feet 190. Support feet 190 are connected to the bottom of the evaporation chamber 100. Support feet 190 are used to support the evaporation chamber 100. More specifically, two support feet 190 may be provided. The two support feet 190 are arranged opposite each other and located at both ends of the bottom of the evaporation chamber 100, thereby enhancing the support stability of the evaporation chamber 100.

[0061] In some embodiments, the first fixing component 200 is rigidly fixed to the inner wall of the vapor deposition chamber 100. The first fixing component 200 serves as the basic connection end for mounting the hot wire 310. The first fixing component 200 provides precise mounting positioning and stable connection support for the second fixing component 300.

[0062] Please refer to the following: Figure 6 and Figure 9 Specifically, the first fixing component 200 has a fixing post 210 on its side facing the second fixing component 300. The second fixing component 300 has a clamp 320 on its side facing the first fixing component 200, and the clamp 320 is engaged with the fixing post 210. This arrangement enables a detachable connection between the first fixing component 200 and the second fixing component 300. The clamp 320 can open through its own elastic deformation and fit over the outside of the fixing post 210, and then tighten itself by elastically returning to its original position, thus forming a stable mechanical connection between the clamp 320 and the fixing post 210, thereby achieving detachable fixing of the first fixing component 200 and the second fixing component 300. When disassembly is required, an external force (such as the operating force of the claw disk assembly 400) can cause the clamp 320 to undergo elastic deformation again, causing the clamp 320 to separate from the fixing post 210 and releasing the connection between the two. The entire snap-fit ​​process requires no additional fasteners; connection and disassembly are accomplished solely through the structural fit and elasticity of the clamp 320 and the fixing post 210, thereby reducing material costs.

[0063] Specifically, the fixing post 210 can be extended along the length or width of the first fixing component 200.

[0064] Please refer to the following: Figure 6 and Figure 7In some embodiments, the first fixing component 200 is provided with a limiting member 220, an elastic member, and a fixing seat 240. The fixing seat 240 is connected to the first fixing component 200. The limiting member 220 is sleeved within the fixing seat 240 and is telescopic relative to the fixing seat 240. One end of the elastic member is connected to the fixing seat 240, and the other end is connected to the limiting member 220. When the claw disk assembly 400 approaches the first fixing component 200, the claw disk assembly 400 abuts against the limiting member 220, causing the limiting member 220 to compress against the fixing seat 240, thereby causing the elastic member to undergo elastic deformation. When the second fixing component 300 is detachably connected to the first fixing component 200, the elastic member provides an elastic force to the limiting member 220, abutting against the outer edge of the second fixing component 300.

[0065] During operation, when the second fixing component 300 approaches the first fixing component 200 and completes docking, the outer edge of the second fixing component 300 abuts against the contact end of the limiting member 220. The pressing force of the abutment will push the limiting member 220 to contract into the fixing seat 240, simultaneously compressing the elastic member, causing the elastic member to undergo elastic deformation and store elastic potential energy.

[0066] When the second fixing component 300 and the first fixing component 200 are detachably connected, that is, after the clamp 320 is engaged with the fixing post 210, the elastic element storing elastic potential energy releases its potential energy, pushing the limiting component 220 to extend outward along the fixing seat 240 and reset. After reset, the limiting component 220 will tightly abut against the outer edge of the second fixing component 300, forming a limiting constraint on the second fixing component 300 through continuous elastic force, thus completing the automatic locking of the second fixing component 300.

[0067] Specifically, the claw disk assembly 400 is provided with a guide plate 440. When the claw disk assembly 400 approaches the first fixing assembly 200, the guide plate 440 abuts against the limiting member 220, so that the limiting member 220 is compressed against the fixing seat 240, thereby causing the elastic member to undergo elastic deformation.

[0068] Specifically, the limiting member 220, the elastic member, and the fixing base 240 form a limiting assembly. Multiple limiting assemblies can be provided. Multiple limiting assemblies are respectively provided at opposite corners of the square first fixing assembly 200, thereby enhancing the locking of the second fixing assembly 300.

[0069] More specifically, eight limiting components can be provided. Two limiting components are provided at each opposite corner of the square first fixing component 200.

[0070] Specifically, the limiting element 220 can be a limiting block.

[0071] Specifically, the side of the limiting member 220 facing the second fixing component 300 is a first inclined surface 230 and a plane. The first inclined surface 230 smoothly transitions to the plane, and the first inclined surface 230 is far away from the first fixing component 200 relative to the plane.

[0072] When the second fixing component 300 approaches the first fixing component 200, the outer edge of the second fixing component 300 contacts the first inclined surface 230 of the limiting member 220. The pushing force of the second fixing component 300 is decomposed into an axial force that pushes the limiting member 220 to retract into the fixing seat 240 through the inclined force surface of the inclined surface. This causes the limiting member 220 to automatically compress the elastic member and retract into the fixing seat 240. After the second fixing component 300 and the first fixing component 200 are detachably connected, the elastic member pushes the limiting member 220 to reset. The plane of the limiting member 220 will achieve a close surface-to-surface fit with the outer edge of the second fixing component 300 during the reset action, forming a stable limiting constraint through the elastic force. The outer edge of the second fixing component 300 can slide smoothly into the inclined trajectory of the first inclined surface 230. Without the need for manual intervention or additional precise alignment force from the claw plate component 400, the limiting component 220 can be automatically compressed and contracted, thus avoiding jamming and collision caused by hard contact between the second fixing component 300 and the limiting component 220.

[0073] Please refer to the following: Figure 6 In some embodiments, the first fixing component 200 is provided with a hot wire power inlet 250. One end of the hot wire power inlet 250 is electrically connected to the hot wire 310, and the other end is electrically connected to an external power source. When the second fixing component 300 is docked and fixed to the first fixing component 200, a conductive path is formed between the hot wire 310 and the end of the hot wire power inlet 250. Electrical energy from the external power source can be directionally transmitted from the external terminal to the power inlet through the conductive structure of the hot wire power inlet 250, and then transferred to the hot wire 310, providing the hot wire 310 with the working power required for the coating process.

[0074] Please refer to the following: Figure 6 In some embodiments, the first fixing component 200 has an air inlet 260. The air inlet 260 is used to connect to an external process gas source. The process gas is delivered to the hot wire 310 through the air inlet 260. After being heated at high temperature by the hot wire 310, the process gas decomposes and reacts to form a vapor-phase deposition material that meets the requirements of the coating process, providing the necessary process medium for silicon wafer coating.

[0075] Please refer to the following: Figure 6In some embodiments, a sealing ring 270 is also provided on the outer periphery of the first fixing component 200. When the second fixing component 300 is detachably connected to the first fixing component 200, the mating surfaces of the second fixing component 300 and the first fixing component 200 will exert a compressive force on the sealing ring 270, causing the sealing ring 270 to undergo elastic deformation and fill the mating gap between the first fixing component 200 and the second fixing component 300. At the same time, the sealing ring 270 relies on its own elastic recovery force to continuously form a tight contact with the mating surfaces of the first fixing component 200 and the second fixing component 300, thereby improving the airtightness of the process gas decomposition reaction.

[0076] In some embodiments, the second fixing component 300 is a direct support structure for the hot wire 310, and it is integrally adapted and disposed within the process operation area of ​​the vapor deposition chamber 100. The hot wire 310 can be fixed to the second fixing component 300 by means of snap-fit, locking, etc., so that the hot wire 310 can be assembled and disassembled as a whole with the second fixing component 300.

[0077] Please refer to the following: Figure 6 and Figure 8 Specifically, the second fixing component 300 is provided with a hot wire terminal 330. The hot wire terminal 330 is connected to the hot wire power feed point 250.

[0078] Specifically, the second fixing component 300 is provided with a hot wire fixing block 340, a hot wire 310, and a conductive wire 350. The fixing block is used to fix the hot wire 310. The hot wire 310 is electrically connected to the conductive wire 350. The hot wire fixing block 340 is a support structure, serving as a fixing carrier for the hot wire 310, keeping the hot wire 310 in a preset installation shape and working position. The conductive wire 350 is a flexible conductive component, with one end forming a reliable electrical connection with the hot wire 310, and the other end electrically connected to the hot wire power inlet 250 of the first fixing component 200. When the second fixing component 300 and the first fixing component 200 are mechanically connected, the conductive wire 350 and the power inlet simultaneously form a conductive path, and the electrical energy from the external power source is directionally transmitted to the hot wire 310 through the power inlet and the conductive wire 350, providing electrical energy for heating the hot wire 310. The entire structure integrates the mechanical fixing and electrical connection of the hot wire 310 into an independent second fixing component 300 module. The installation and removal of the hot wire 310 are completed simultaneously with the overall installation and removal of the second fixing component 300, without the need for separate operations on the hot wire 310 and the conductive wire 350, making it easy to replace the hot wire 310.

[0079] The claw plate assembly 400 is an automated operation execution structure. It is adapted to be set on a preset moving path within the vapor deposition chamber 100. It can perform precise movement, gripping, and docking actions within the vapor deposition chamber 100. Its gripping end is adapted to the second fixed component 300, which can stably grip the second fixed component 300. At the same time, it can drive the second fixed component 300 to complete a precise detachable installation with the first fixed component 200. It can also smoothly disassemble the second fixed component 300 that is connected to the first fixed component 200. All components cooperate with each other to form the internal structure system of the vapor deposition chamber 100 that enables the automated replacement of the hot wire 310. Each component is adapted to the internal space and vacuum working environment of the vapor deposition chamber 100. The installation positions do not interfere with each other, and the action connection is precisely matched.

[0080] Please refer to the following: Figure 2 , Figure 4 and Figure 5 In some embodiments, the hot-wire coating apparatus includes a connector 510, a first drive member 520, and a second drive member 530. A roller 540 is mounted on the connector 510, and a claw disk assembly 400 is mounted on the roller 540. The first drive member 520 is connected to the roller 540 and drives the roller 540 to rotate, causing the roller 540 to move the claw disk assembly 400 along a first direction. The second drive member 530 is connected to the connector 510 and drives the connector 510 to move along a second direction, causing the claw disk assembly 400 to move along the second direction, thereby enabling the claw disk assembly 400 to move towards or away from the second fixed component 300. The first and second directions intersect. The first direction is the X-axis direction. The second direction is the Y-axis direction. Specifically, the first and second directions are perpendicular.

[0081] Specifically, the first driving component 520 can be an electric motor. The second driving component 530 can be a cylinder.

[0082] It should be noted that the first driving component 520 and the second driving component 530 respectively drive the claw plate assembly 400 to move along the first and second perpendicular directions, enabling the claw plate assembly 400 to move omnidirectionally within the vapor deposition chamber 100. This allows for precise adjustment to the docking position where the claw plate assembly 400 and the second fixing component 300 are perfectly matched. Whether gripping or installing close to the second fixing component 300 or disassembling or resetting away from it, precise alignment can be achieved through fine-tuning of movement in the first and second directions. This improves the fitting accuracy between the claw plate assembly 400 and the second fixing component 300, ensuring the smooth completion of disassembly and assembly operations.

[0083] Specifically, the connector 510, the first drive component 520, and the second drive component 530 form a drive assembly. Two drive assemblies are provided, each positioned at one end of the claw disk assembly 400 along the vertical direction. The two drive assemblies are symmetrically arranged vertically along the claw disk assembly 400. Through the synchronized power output and movement of the dual-end drive assemblies, the vertical ends of the claw disk assembly 400 receive a balanced and synchronized driving force, enabling precise movement of the entire claw disk assembly 400 and achieving smooth docking, gripping, and disassembly / removal of the second fixed component 300.

[0084] Please refer to the following: Figure 5 In some embodiments, the hot-wire coating apparatus further includes a drive shaft 550. The drive shaft 550 extends along a first direction and is connected to a first drive member 520. Multiple rollers 540 are provided, spaced apart along the first direction, and all are connected to the drive shaft 550. The first drive member 520 can drive the drive shaft 550 to rotate, causing the drive shaft 550 to drive the multiple rollers 540 to rotate synchronously. When the first drive member 520 is activated, its driving force is directly transmitted to the drive shaft 550, causing it to rotate around its own axis. The rotating drive shaft 550 synchronously drives all the rollers 540 to rotate coaxially, causing the multiple rollers 540 to move the claw disk assembly 400 along the first direction.

[0085] Specifically, a synchronous belt or a reducer 560 can be installed between the first driving member 520 and the transmission shaft 550 for transmission.

[0086] Please refer to the following: Figure 5 Specifically, the hot-wire coating equipment includes a bellows 570. The bellows 570 is disposed in the assembly of the connector 510 and the second drive member 530. The bellows 570 is a flexible, expandable, sealed tubular structure. Both ends of the bellows 570 are sealed and fixedly connected to the connector 510 and the second drive member 530, respectively, completely covering and sealing the connection between the connector 510 and the second drive member 530. When the second drive member 530 drives the connector 510 to move linearly in a second direction, a relative displacement occurs between the connector 510 and the second drive member 530. The bellows 570 undergoes synchronous axial expansion and contraction deformation with this relative displacement, and the bellows 570 remains sealed throughout the expansion and contraction process, ensuring the vacuum state of the vapor deposition chamber 100 of the connector 510.

[0087] like Figure 8 , Figure 10 and Figure 11As shown, in some embodiments, a fixing pin sleeve 410 is provided on the side of the claw disk assembly 400 facing the second fixing component 300, and a fixing pin 360 is provided on the side of the second fixing component 300 facing the claw disk assembly 400. The fixing pin sleeve 410 is fitted onto the fixing pin 360. After the fixing pin sleeve 410 is fitted onto the fixing pin 360, the fixing pin 360 and the side wall of the fixing pin sleeve 410 are tightly fitted to form an insertion structure, which can effectively limit the relative displacement between the claw disk assembly 400 and the second fixing component 300, so that the claw disk assembly 400 and the second fixing component 300 are connected.

[0088] In some embodiments, the claw assembly 400 is provided with a first loading claw 420. The first loading claw 420 includes a first housing 421, a first plate 422, and a first spring post 424. The first plate 422 is disposed within the first housing 421 and is movable relative to the first housing 421. A second inclined surface 423 is provided on the first plate 422. One end of the first spring post 424 is connected to the first housing 421, and the other end is connected to the first plate 422. The second fixing assembly 300 is provided with a second loading claw 370. The second loading claw 370 is provided with a third inclined surface 371 and a first vertical surface 372. The bottom of the third inclined surface 371 is connected to the bottom of the first vertical surface 372. The third inclined surface 371 and the first vertical surface 372 form a first slot. The third inclined surface 371 is away from the second fixing assembly 300 relative to the first vertical surface 372. When the claw plate assembly 400 is detachably connected to the second fixing assembly 300, the first plate 422 is engaged in the first slot, and the first spring post 424 provides an elastic force to the first plate 422 toward the first slot.

[0089] Specifically, the first loading claw 420 further includes a sliding block 425, which is connected to the first plate 422. A sliding groove is provided on the side of the first housing 421, and the sliding block 425 passes through the sliding groove and can slide relative to the sliding groove to drive the first plate 422 to move relative to the first housing 421. The first loading claw 420 also includes a pin, and the first spring post 424 is provided with a pin hole. The pin is inserted into the pin hole to restrict the sliding block 425 from sliding relative to the sliding groove.

[0090] Specifically, the claw assembly 400 is provided with a first unloading claw 430, which includes a second housing, a second plate 431, and a second spring post. The second plate 431 is disposed inside the second housing and is movable relative to the second housing. One end of the second spring post is connected to the second housing, and the other end is connected to the second plate 431. A fourth inclined surface 432 is provided on the second plate 431. The second fixing assembly 300 is provided with a second unloading claw 380, which is provided with a fifth inclined surface 381 and a second vertical surface 382. The bottom of the fifth inclined surface 381 is connected to the bottom of the second vertical surface 382, ​​and the fifth inclined surface 381 and the second vertical surface 382 form a second slot. The second vertical surface 382 is away from the second fixing assembly 300 relative to the fifth inclined surface 381. After the second plate 431 is engaged in the second slot, the drive claw assembly 400 moves away from the first fixing assembly 200 to separate the second fixing assembly 300 from the first fixing assembly 200. Specifically, the slope direction of the second inclined surface 423 of the first plate 422 is different from the slope direction of the fourth inclined surface 432 of the second plate 431.

[0091] Specifically, the first unloading claw 430 is also equipped with a sliding block, a sliding groove and a pin.

[0092] Please refer to the following: Figures 12 to 14 It should be noted that during feeding, the sliding block 425 is pushed to retract the first unloading claw 430 and fix it with a pin. The first driving component 520 and the second driving component 530 drive the clamp 320 of the push claw disk assembly 400 to engage with the fixing post 210 of the second fixing component 300. After the loading is completed, the second inclined surface 423 of the first plate 422 slides out. During the sliding process, the first plate 422 continuously retracts, and the locking force is greater than the sliding friction force. Because the contact surface between the second inclined surface 423 of the first loading claw 420 and the third inclined surface 371 of the second loading claw 370 is an inclined surface, the locking force is greater than the friction force between the second inclined surface 423 and the third inclined surface 371. At the same time, a limiting member 220 is provided for limiting and locking. When sliding to the top, the first plate 422 does not contact the third inclined surface 371, and the first plate 422 also disengages from the limiting member 220. Then, under the action of the first driving member 520 and the second driving member 530, the empty claw plate assembly 400 is pulled back to its original position and exits the vapor deposition chamber 100 under the drive of the roller 540.

[0093] Please refer to sections 15 through 16. Figure 17During unloading, the sliding block 425 is pushed to retract the first loading claw 420 and fix it with a pin. The fourth inclined surface 432 of the second plate 431 slides into contact with the second unloading claw 380. The second plate 431 of the first unloading claw 430 will rise until the top is completely retracted. The claw disk assembly 400 continues to move. The second plate 431 of the unloading claw extends and contacts the fifth inclined surface 381. At the same time, the limiting member 220 is released. At the same time, the second plate 431 of the first unloading claw 430 is in vertical contact with the second vertical surface 382. The clamping force of the clamp 320 is less than its friction force, which can fix the second fixing component 300 on the claw disk assembly 400. Under the action of the first driving member 520 and the second driving member 530, it is transported out of the coating chamber.

[0094] It should be noted that the terminology used above is for describing specific embodiments only and is not intended to limit the exemplary embodiments of the present invention. When the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof. The order of execution of actions, steps, etc., in the apparatus and methods shown in the specification and drawings can be implemented in any order unless a specific order is expressly specified, and as long as the output of a previous process is not used in a subsequent process. Similar sequential terms used for ease of description do not imply that such an order must be followed.

[0095] Techniques, methods, and apparatus known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and apparatus should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0096] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A hot-wire coating apparatus, characterized in that, include: Evaporation chamber; A first fixing component is fixedly disposed on the inner wall of the vapor deposition chamber; A second fixing component is disposed within the vapor deposition chamber and is detachably connected to the first fixing component. The second fixing component is used to fix the hot wire. A claw disk assembly is disposed in the vapor deposition chamber. The claw disk assembly is used to grasp the second fixing component and detachably install the second fixing component onto the first fixing component. The claw disk assembly is also used to detach the second fixing component from the first fixing component.

2. The hot-wire coating equipment as described in claim 1, characterized in that, The hot wire coating equipment includes a connector, a first driving member, and a second driving member. The connector is provided with a roller, and the roller is provided with the claw disk assembly. The first driving member is connected to the roller and is used to drive the roller to rotate so that the roller drives the claw disk assembly to move along a first direction. The second driving member is connected to the connecting member, and the second driving member is used to drive the connecting member to move along the second direction, so that the claw disk assembly moves along the second direction, thereby enabling the claw disk assembly to move toward or away from the second fixed component; wherein the first direction and the second direction intersect.

3. The hot-wire coating equipment as described in claim 2, characterized in that, The connector, the first driving member, and the second driving member form a driving assembly. There are two driving assemblies, which are respectively located at both ends of the claw disk assembly in the vertical direction.

4. The hot-wire coating equipment as described in claim 2, characterized in that, The hot wire coating equipment further includes a drive shaft, which extends along the first direction and is connected to the first driving component. The rollers are provided in multiple ways, and the multiple rollers are spaced apart along the first direction. All of the multiple rollers are connected to the transmission shaft. The first driving member can drive the transmission shaft to rotate, so that the transmission shaft drives the multiple rollers to rotate synchronously.

5. The hot-wire coating equipment as described in claim 1, characterized in that, The first fixing component has a fixing post on its side facing the second fixing component, and the second fixing component has a clamp on its side facing the first fixing component, the clamp being engaged with the fixing post.

6. The hot-wire coating equipment as described in claim 1, characterized in that, The first fixing component is provided with a limiting member, an elastic member and a fixing seat. The fixing seat is connected to the first fixing component. The limiting member is sleeved in the fixing seat and can extend and retract relative to the fixing seat. One end of the elastic member is connected to the fixing seat and the other end is connected to the limiting member. When the claw disk assembly approaches the first fixing assembly, the claw disk assembly abuts against the limiting member, so that the limiting member is compressed against the fixing seat, thereby causing the elastic member to undergo elastic deformation; When the second fixing component is detachably connected to the first fixing component, the elastic element provides an elastic force to the limiting component that abuts against the outer edge of the second fixing component.

7. The hot-wire coating equipment as described in claim 6, characterized in that, The side of the limiting member facing the second fixing component is a first inclined surface and a plane. The first inclined surface smoothly transitions to the plane, and the first inclined surface is away from the first fixing component relative to the plane.

8. The hot-wire coating equipment as described in claim 1, characterized in that, The claw plate assembly has a fixing pin sleeve on its side facing the second fixing component, and the second fixing component has a fixing pin on its side facing the claw plate assembly. The fixing pin sleeve is fitted onto the fixing pin.

9. The hot-wire coating equipment as described in claim 1, characterized in that, The claw plate assembly is provided with a first feeding claw, which includes a first housing, a first plate and a first spring post. The first plate is disposed inside the first housing and is movable relative to the first housing. The first plate is provided with a second inclined surface. One end of the first spring post is connected to the first housing and the other end is connected to the first plate. The second fixing component is provided with a second feeding claw, the second feeding claw is provided with a third inclined surface and a first vertical surface, the bottom of the third inclined surface is connected to the bottom of the first vertical surface, the third inclined surface and the first vertical surface form a first slot, and the third inclined surface is away from the second fixing component relative to the first vertical surface; When the claw plate assembly is detachably connected to the second fixing assembly, the first plate is engaged in the first slot, and the first spring post provides an elastic force to the first plate toward the first slot.

10. The hot-wire coating equipment as described in claim 9, characterized in that, The first feeding claw also includes a sliding block, which is connected to the first plate. A sliding groove is provided on the side of the first housing, and the sliding block passes through the sliding groove and can slide relative to the sliding groove to drive the first plate to move relative to the first housing. The first feeding claw also includes a pin, and the first spring post is provided with a pin hole. The pin is inserted into the pin hole to restrict the sliding block from sliding relative to the sliding groove.

11. The hot-wire coating equipment as described in claim 1, characterized in that, The claw plate assembly is provided with a first unloading claw, which includes a second housing, a second plate and a second spring post. The second plate is disposed inside the second housing and can move relative to the second housing. One end of the second spring post is connected to the second housing and the other end is connected to the second plate. A fourth inclined surface is provided on the second plate. The second fixing component is provided with a second unloading claw, the second unloading claw is provided with a fifth inclined surface and a second vertical surface, the bottom of the fifth inclined surface is connected to the bottom of the second vertical surface, the fifth inclined surface and the second vertical surface form a second slot, and the second vertical surface is away from the second fixing component relative to the fifth inclined surface; Once the second plate is engaged in the second slot, the claw plate assembly is driven to move away from the first fixing component, so as to separate the second fixing component from the first fixing component.

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