A large-load-bearing full-permanent-magnet electrically-driven load-adjustable three-degree-of-freedom magnetic levitation vibration isolator

Abstract

The application discloses a large-load full-permanent-magnetic electric-driving load-adjustable three-freedom-degree magnetic suspension vibration isolator, which comprises a bottom plate, a plurality of vertically arranged columns symmetrically distributed in a circle on the bottom plate, a vibration isolation unit arranged in each column, a sliding connection between the vibration isolation unit and the column, a placing platform arranged above the bottom plate, a hinge connection between the end of the placing platform and the corresponding column through a plurality of parallel connecting rods, and a space coupling of the stator and the mover permanent-magnetic array of the vibration isolation unit, so that the positive and negative stiffness mechanisms cooperatively generate a static suspension force in the load direction at the balance position, and the load upper limit is significantly improved. An adjusting mechanism is arranged in the support shaft, and the non-contact follow-up adjustment of the magnetic gap and the load adjustment are realized by using the magnetic repulsion force between the stators without interfering with the completely suspended state of the mover. The maximum load weight of the application reaches 100 kg, and the initial vibration isolation frequency is as low as 0.7 Hz. The application has the advantages of large bearing capacity, no Joule heat interference, adjustable load, and excellent three-direction ultra-low-frequency vibration isolation performance.

Description

Technical Field

[0001] This invention belongs to the field of vibration protection technology for precision instruments, specifically relating to a high-load-bearing, fully permanent magnet electrically driven adjustable three-degree-of-freedom magnetic levitation vibration isolator. Background Technology

[0002] In the protection of precision instruments such as lithography machines, laser interferometers, and scanning tunneling microscopes, there are pain points such as limited load-bearing capacity, low vibration isolation initiation frequency, and significant electromagnetic thermal effects. Meanwhile, while existing electromagnetic quasi-zero stiffness solutions possess load adjustment potential, they are unsuitable for supporting heavy precision loads due to the limited magnetic field density of electromagnets and severe Joule thermal interference. This invention proposes a high-load-bearing, fully permanent magnet electrically driven, adjustable three-degree-of-freedom magnetic levitation vibration isolator. Summary of the Invention

[0003] In view of the problems existing in the prior art, the purpose of the present invention is to provide a high load-bearing, fully permanent magnet electrically driven adjustable three-degree-of-freedom magnetic levitation vibration isolator, which has high static load support capacity and online load adjustment function.

[0004] To achieve the above objectives, the technical solution of the present invention is as follows: A high-load, fully permanent magnet electrically driven adjustable three-degree-of-freedom magnetic levitation vibration isolator includes a base plate, on which a set of circumferentially symmetrically distributed columns are provided. Each column contains a vibration isolation unit, which is slidably connected to the column. A placement platform is provided above the base plate, and the end of the placement platform is hinged to its corresponding column through a set of parallel connecting rods.

[0005] Furthermore, the vibration isolation unit includes a stator assembly and a levitated mover. The levitated mover is sleeved outside the stator assembly in a non-contact state, and the permanent magnet array topology between the stator assembly and the levitated mover is configured with field strength optimization.

[0006] Furthermore, the stator assembly includes a hollow support shaft, on which a second permanent magnet and a fourth permanent magnet are sleeved from top to bottom, and an adjustment mechanism for driving the second permanent magnet to move up and down is provided inside the support shaft; The levitating actuator includes a combined frame structure, which is a five-layer combined frame structure consisting of a set of outer frames connected by bolts. The first layer is provided with a first permanent magnet, the third layer is provided with a third permanent magnet, and the fifth layer is provided with a fifth permanent magnet. The second permanent magnet and the fourth permanent magnet are respectively disposed in the second and fourth layers of the combined frame structure.

[0007] Furthermore, the first permanent magnet and the third permanent magnet have the same polarization direction, and the third permanent magnet and the fifth permanent magnet have opposite polarization directions; at the equilibrium position, the stator assembly and the permanent magnet corresponding to the levitation mover are in a state of magnetic repulsion.

[0008] Furthermore, the inner wall of the column is provided with a longitudinal groove, and the levitation mover is provided with a guide slider that cooperates with the longitudinal groove. The guide slider is embedded in the longitudinal groove to form a sliding pair, which is used to constrain the displacement of the levitation mover in the radial and torsional degrees of freedom.

[0009] Furthermore, the adjustment mechanism includes a micro stepper motor, the output shaft of which is connected to a lead screw, and a slider is sleeved on the lead screw. The second permanent magnet is always in close contact with the transmission key of the slider and moves accordingly. The support shaft is provided with a longitudinally penetrating limiting hole, through which the transmission key of the slider passes and interacts with the second permanent magnet outside the shaft. The effective stroke range of load adjustment is determined by the length of the limiting hole. There is a magnetic repulsion between the second permanent magnet and the fourth permanent magnet.

[0010] Furthermore, the outer wall of the support shaft is provided with an annular shoulder for axial positioning and locking of the fourth permanent magnet.

[0011] Furthermore, the end of the placement platform is connected to its corresponding parallel link via a ball joint, and the parallel link is fixedly connected to its corresponding levitation actuator.

[0012] Furthermore, a top plate is provided above the column, and the top plate is fixedly connected to the top of the stator assembly.

[0013] Furthermore, the magnetic coupling modes between the stator assembly and the levitated mover include: one is the relative axial movement of the first and fifth permanent magnets with the second and fourth permanent magnets, defined as "embedded"; the second is the relative movement of the second and fourth permanent magnets with the third permanent magnet, defined as "parallel". The positive stiffness mechanism is constructed from the lower fifth permanent magnet, the first permanent magnet, the third permanent magnet, and the second permanent magnet in between; the negative stiffness mechanism is constructed from the upper first permanent magnet, the third permanent magnet, the fifth permanent magnet, and the fourth permanent magnet in between.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: 1) This invention optimizes the spatial coupling of the permanent magnet array, enabling both positive and negative stiffness mechanisms to provide load-bearing capacity. The two mechanisms work together to generate static levitation force at their equilibrium positions. This mechanism overcomes the limitation of negative stiffness not bearing weight in traditional quasi-zero stiffness mechanisms, significantly improving the static load-bearing density per unit volume, and achieving support for heavy precision loads while maintaining ultra-low dynamic stiffness. This invention innovatively integrates a lead screw-slider-transmission key mechanism within the hollow stator shaft. While maintaining the complete magnetic levitation of the mover, it utilizes the magnetic repulsion between the internal stators to achieve non-contact follow-up adjustment of the magnetic gap, ensuring the system's adjustability to varying loads. Furthermore, by combining the spatial motion constraints of the Delta parallel configuration, the complex vibration of three translational degrees of freedom is efficiently decoupled and transformed into axial quasi-zero stiffness motion of a single-enclosed unit, ultimately achieving three-degree-of-freedom, ultra-low-frequency, high-performance vibration isolation and protection under heavy load conditions. 2) Extremely high load-bearing capacity: By replacing the traditional electromagnetic coil with a full permanent magnet design, the high magnetic energy product permanent magnet generates a huge static levitation force, which greatly improves the basic load-bearing capacity of the system; at the same time, this configuration enables both positive and negative stiffness mechanisms to provide load-bearing capacity, greatly improving the static load-bearing density per unit volume, enabling it to support heavier and more precise equipment. 3) Zero Joule thermal interference and thermal stability: Since the active electromagnetic coil is eliminated, the system does not require continuous current during operation, which completely eliminates the Joule thermal interference generated by the coil, avoids the impact of thermal expansion on vibration isolation accuracy and the working environment of precision instruments, and significantly improves the thermal stability of the system. 4) Non-contact load adaptive adjustment utilizes a screw-slider mechanism built into the hollow stator shaft to achieve load matching by mechanically changing the internal stator magnetic gap without disturbing the complete suspension state of the mover; combined with the repulsive force following characteristics between permanent magnets, it ensures that the system can automatically translate to find the optimal position and relock at the quasi-zero stiffness balance point under variable load conditions. 5) The Delta parallel configuration, which combines spatial decoupling with high-performance vibration isolation, successfully decouples the complex three-dimensional translational vibration in space and transforms it into the vertical axial motion of each branch single-package unit; by utilizing the quasi-zero stiffness characteristics, it achieves efficient isolation of multi-directional low-frequency vibration under large load and large amplitude conditions. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of a three-degree-of-freedom magnetically levitated quasi-zero stiffness vibration isolator with adjustable all-permanent magnet load according to the present invention. Figure 2 A cross-sectional view of the magnetic coupling structure inside a fully magnetic quasi-zero stiffness vibration isolation unit; Figure 3 is a schematic diagram of the overall structure of the all-magnetic quasi-zero stiffness vibration isolation unit; Figure 4 is a schematic diagram of the moving part assembly in the all-magnetic quasi-zero stiffness vibration isolation unit; Figure 5 is a schematic diagram of the stator assembly in the all-magnetic quasi-zero stiffness vibration isolation unit; Figure 6 is a cross-sectional view of the support shaft in the all-magnetic quasi-zero stiffness vibration isolation unit; Figure 7 is a structural schematic diagram showing the connection relationship between the all-magnetic quasi-zero stiffness vibration isolation unit and the column; Figure 8 shows the force-displacement curves of a single quasi-zero stiffness vibration isolation unit under different loads, as simulated by finite element numerical simulation. Figure 9 shows the transfer rate curve.

[0016] In the diagram: 1. Top plate; 2. Storage platform; 3. Parallel connecting rod; 4. Ball joint; 5. Base plate; 6. First permanent magnet; 7. Slider; 8. Third permanent magnet; 9. Middle second outer frame; 10. Annular shoulder; 11. Fifth permanent magnet; 12. Upper first outer frame; 13. Upper second outer frame; 14. Second permanent magnet; 15. Middle first outer frame; 16. Fourth permanent magnet; 17. Lower outer frame; 18. Lower second outer frame; 20. Lead screw; 21. Miniature stepper motor; 22. Longitudinal groove; 23. Guide slider; 102. Support shaft; 103. Vibration isolation unit; 104. Column; 105. Stator assembly; 106. Suspended mover. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings, but the scope of protection of the present invention is not limited to the scope described.

[0018] Please refer to Figure 1 A large-load, fully permanent magnet electrically driven adjustable three-degree-of-freedom magnetic levitation vibration isolator includes a base plate 5, on which a set of circumferentially symmetrically distributed columns 104 are provided. Each column 104 contains a vibration isolation unit 103, which is slidably connected to the column 104. A placement platform 2 is provided above the base plate 5, and the end of the placement platform 2 is hinged to its corresponding column 104 through a set of parallel connecting rods 3.

[0019] The vibration isolation unit 103 includes a stator assembly 105 and a levitation rotor 106. The levitation rotor 106 is sleeved on the stator assembly 105 in a non-contact state. The permanent magnet array topology between the stator assembly 105 and the levitation rotor 106 is configured with field strength optimization.

[0020] The stator assembly 105 includes a hollow support shaft 102. The support shaft 102 is fitted with a second permanent magnet 14 and a fourth permanent magnet 16 from top to bottom. The support shaft 102 is provided with an adjustment mechanism for driving the second permanent magnet 14 to move up and down. The levitation mover 106 includes a combined frame structure, which is a five-layer combined frame structure consisting of a set of outer frames connected by bolts. The first layer is provided with a first permanent magnet 6, the third layer is provided with a third permanent magnet 8, the fifth layer is provided with a fifth permanent magnet 11, and the second permanent magnet 14 and the fourth permanent magnet 16 are respectively provided in the second and fourth layers of the combined frame structure.

[0021] Please refer to Figure 3 and Figure 4 In this embodiment, the combined frame structure is composed of two lower outer frames 18, one lower outer frame 17, two middle outer frames 9, one middle outer frame 15, two upper outer frames 13, and one upper outer frame 12 connected by bolts.

[0022] Among them, the second permanent magnet 14 is located between the first permanent magnet 6 and the third permanent magnet 8, and the fourth permanent magnet 16 is located between the third permanent magnet 8 and the fifth permanent magnet 11; through polarity configuration, the adjacent fixed and moving permanent magnets are in a mutually exclusive state at the static equilibrium position.

[0023] The core mechanical feature of this invention lies in optimizing the spatial field strength of the permanent magnet array topology, so that both positive and negative stiffness units generate static component forces toward the load end near the quasi-zero stiffness equilibrium point. Through the unification of polarity and vector superposition of these static repulsive forces, the magnetic support density per unit volume is significantly improved, enabling the system to achieve high-level support for heavy precision loads while maintaining extremely low dynamic stiffness.

[0024] Furthermore, the magnetic coupling modes between the mover and the stator permanent magnets are divided into two types according to their spatial orientation: the first type is the relative axial movement of the first permanent magnet 6 and the fifth permanent magnet 11 with the second permanent magnet 14 and the fourth permanent magnet 16, which is defined as "embedded"; the second type is the relative movement of the second permanent magnet 14 and the fourth permanent magnet 16 with the third permanent magnet 8, which is defined as "parallel".

[0025] To construct a linearly optimized positive stiffness characteristic, this invention utilizes the fifth permanent magnet 11 located at the bottom, along with the first permanent magnet 6, the third permanent magnet 8, and the second permanent magnet 14 in between, to achieve a coordinated response. In this case, the force-displacement curve of the "embedded" combination exhibits a "convex" nonlinear positive stiffness during the downward movement of the permanent magnet ring, while the force-displacement curve of the "parallel" combination exhibits a "concave" nonlinear positive stiffness during the downward movement of the permanent magnet ring. The nonlinear force characteristics of both are linearized after being superimposed, jointly serving as the source of the system's positive stiffness support.

[0026] To construct a linearly optimized negative stiffness characteristic, this scheme utilizes the first permanent magnet 6, the third permanent magnet 8, the fifth permanent magnet 11 located at the top, and the fourth permanent magnet 16 in between for coordinated response. At this time, the force-displacement curve of the "embedded" combination exhibits a "convex" nonlinear negative stiffness during the downward movement of the permanent magnet ring, while the force-displacement curve of the "parallel" combination exhibits a "concave" nonlinear negative stiffness during the downward movement of the permanent magnet ring. The nonlinear force characteristics of the two are linearized after superposition, jointly serving as the source of the system's negative stiffness support.

[0027] Furthermore, by optimizing the parameters to obtain high linearity in positive and negative stiffness, the inner and outer diameters Φ5 and Φ6 of the first permanent magnet 6 and the fifth permanent magnet 11 are changed, according to the electromagnetic force formula. The linearity of positive and negative stiffness was optimized using the particleswarm function in MATLAB, and the distance l1 between the first permanent magnet 6, the fifth permanent magnet 11 and the third permanent magnet 8 was solved.

[0028] Furthermore, by spatially synthesizing the aforementioned positive and negative mechanical characteristics, this invention obtains a quasi-zero stiffness working platform with extremely low dynamic stiffness near the equilibrium position and a very wide load-bearing range. This enables the system to effectively block the transmission of ultra-low frequency micro-vibrations encountered by precision equipment such as lithography machines under heavy load conditions.

[0029] Please refer to Figure 7 The inner wall of the column 104 is provided with a longitudinal groove 22, and the levitation mover 106 is provided with a guide slider 23 that cooperates with the longitudinal groove 22. The guide slider 23 is embedded in the longitudinal groove 22 to form a sliding pair, which is used to constrain the displacement of the levitation mover 106 in the radial and torsional degrees of freedom.

[0030] Referring to Figure 3, the geometric parameters of each permanent magnet component are rigorously coupled: the first permanent magnet 6 and the fifth permanent magnet 11 adopt the same physical specifications (inner diameter Φ5, outer diameter Φ6, height h3), while the third permanent magnet 8 corresponds to specific dimensions (inner diameter Φ3, outer diameter Φ4, height h2). The geometric properties of the stator-side magnets, the second permanent magnet 14 and the fourth permanent magnet 16, are defined by parameters Φ1, Φ2, and h1. In terms of spatial arrangement, the magnetic gap spacing inside the mover is set to l1, while the height of the adjustment reference point—the fourth permanent magnet—relative to the base is set to l2.

[0031] In terms of the adjustment mechanism, the physical dimensions of the lead screw 20 inside the support shaft 102 are determined by Φ7; the transmission key structural parameters of the slider 7 include l3, l4, and h4. The central shaft housing is provided with a longitudinally penetrating limiting hole, the width of which is adapted to the transmission key, and the stroke boundary is defined by l5 and l6. The length of the longitudinal groove 22 of the column 104 is set to l8, and the length of the guide slider is l7, where l7>l8. By constraining and tuning the above parameters Φ1-Φ6 and h1-h3, combined with the optimization of position parameters l1 and l2, the distribution characteristics of the quasi-zero stiffness force field are established; and through the stroke coupling design of l5-l8, the adaptive adjustment range and dynamic motion boundary of the system during the load compensation process are determined.

[0032] Furthermore, the load balance equations are satisfied at the static equilibrium position of the system: By optimizing the geometric parameters Φ1 to Φ6, the heights h1 to h3, and the internal spacing l1 of the mover, and by activating the micro stepper motor 21 to drive the lead screw 20, the stator adjustment parameter l2 is adjusted to the preset minimum magnetic gap position. Please refer to... Figure 8 Verified through finite element numerical simulation and theoretical formula derivation, the peak axial static magnetic levitation force generated by a single vibration isolation unit 103 at the equilibrium position can reach 330N-350N. Therefore, the Delta configuration platform composed of three sets of vibration isolation units can achieve a maximum static load capacity of 100kg; and under this heavy load condition, the system can still finely adjust the magnetic field distribution in real time through the electric drive mechanism to ensure that the dynamic stiffness approaches zero near the equilibrium point, thus achieving ultra-low frequency vibration isolation performance under heavy load.

[0033] According to the transfer rate formula The transfer rate curve can be obtained as follows: Figure 9 As shown.

[0034] The adjustment mechanism includes a micro stepper motor 21, the output shaft of which is connected to a lead screw 20. A slider 7 is sleeved on the lead screw 20. The second permanent magnet 14 is always in close contact with the transmission key of the slider 7 and moves accordingly. The support shaft 102 is provided with a longitudinal through-hole. The transmission key of the slider 7 passes through the through-hole and interacts with the second permanent magnet 14 outside the shaft. The effective stroke range of load adjustment is determined by the length of the through-hole.

[0035] There is a magnetic repulsion between the second permanent magnet 14 and the fourth permanent magnet 16.

[0036] When the external load mass fluctuates, the micro stepper motor 21 drives the lead screw 20 to rotate, forcing the slider 7 to displace the second permanent magnet 14. Due to the strong magnetic repulsion force inside the stator magnetic array (between the second permanent magnet 14 and the fourth permanent magnet 16), the second permanent magnet 14 always generates a thrust away from the fourth permanent magnet and stays close to the bottom of the transmission key, achieving precise position tracking. By changing the magnetic gap width, the levitating mover will automatically complete the optimal balance based on the drift of the potential energy trap center, allowing the system to relock in the quasi-zero stiffness balance region.

[0037] Furthermore, when the moving platform is subjected to multi-directional composite excitation and generates displacement, the Delta parallel mechanism decouples the spatial translation into the axial motion vectors of each column unit. Under the motion constraint of the column guide pair, the levitation mover 106 only performs reciprocating stroke within the axial quasi-zero stiffness range, and by utilizing the completely non-contact characteristics of magnetic levitation, it completely blocks the path transmission of foundation vibration to sensitive loads.

[0038] Please refer to Figure 5 , 6 The core support of the stator assembly 105 is provided by the hollow support shaft 102, which is rigidly fixed between the top plate 1 and the bottom plate 5. The second permanent magnet 14 can slide freely along the axial direction and is controlled by the transmission key, while the fourth permanent magnet 16 is precisely positioned and locked by the annular shoulder provided on the outer wall of the support shaft.

[0039] Please refer to Figure 7 The levitation mover 106 is fitted onto the support shaft in a non-contact state, forming a magnetic levitation interface. A guide slider 23 is fixed to the square side of the mover by bolts, embedding itself in a longitudinal groove 22 to form a sliding pair, used to eliminate lateral drift and torsional oscillation of the mover. Furthermore, the second outer frame 9 and the first outer frame 15 are connected to the placement platform 2 via a ball joint 4 and a parallel connecting rod 3, thereby efficiently introducing external multi-degree-of-freedom disturbances into the quasi-zero stiffness vibration isolation path.

[0040] Please refer to Figure 4. The combined frame structure is a five-layer combined frame structure consisting of the lower two outer frames 18, the next lower outer frame 17, the middle two outer frames 9, the middle one outer frame 15, the upper two outer frames 13, and the upper one outer frame 12 connected by bolts. The first permanent magnet 6, the third permanent magnet 8, and the fifth permanent magnet 11 are respectively encapsulated between the corresponding outer frame layers, ensuring the structural stability and motion consistency of the magnetic coupling structure.

[0041] Please refer to Figure 5 , 6 The core support of the stator assembly 105 is provided by the hollow support shaft 102, which is rigidly fixed between the top plate 1 and the bottom plate 5. The second permanent magnet 14 can slide freely along the axial direction and is controlled by the transmission key.

[0042] The outer wall of the support shaft 102 is provided with an annular shoulder 10 for axial positioning and locking of the fourth permanent magnet 16.

[0043] Please refer to Figure 7 The levitation mover 106 is mounted on the outside of the support shaft in a non-contact state, forming a magnetic levitation interface. A guide slider 23 is fixed to the square side of the mover by bolts, embedding itself in the longitudinal groove 22 to form a sliding pair, which eliminates the lateral drift and torsional oscillation of the mover. Furthermore, the end of the platform 2 is connected to its corresponding parallel link 3 via a ball joint 4, and the parallel link 3 is fixedly connected to its corresponding levitation mover 106, thereby efficiently introducing external multi-degree-of-freedom disturbances into a quasi-zero stiffness vibration isolation path.

[0044] The magnetic coupling modes between the stator assembly 105 and the levitation mover 106 include: the first type is the relative axial movement of the first permanent magnet 6 and the fifth permanent magnet 11 with the second permanent magnet 14 and the fourth permanent magnet 16, defined as "embedded"; the second type is the relative movement of the second permanent magnet 14 and the fourth permanent magnet 16 with the third permanent magnet 8, defined as "parallel".

[0045] The positive stiffness mechanism is constructed from the lower fifth permanent magnet 11, the first permanent magnet 6, the third permanent magnet 8, and the second permanent magnet 14 in between; the negative stiffness mechanism is constructed from the upper first permanent magnet 6, the third permanent magnet 8, the fifth permanent magnet 11, and the fourth permanent magnet 16 in between.

Claims

1. A high-load-bearing, fully permanent magnet electrically driven adjustable three-degree-of-freedom magnetic levitation vibration isolator, characterized in that... Includes a base plate (5), on which a set of columns (104) are arranged symmetrically in a circle. Each column (104) is provided with a vibration isolation unit (103). The vibration isolation unit (103) is slidably connected to the column (104). A storage platform (2) is provided above the base plate (5). The end of the storage platform (2) is hinged to its corresponding column (104) through a set of parallel connecting rods (3).

2. The adjustable three-degree-of-freedom magnetic levitation vibration isolator with a large load-bearing, fully permanent magnet electrically driven load as described in claim 1, characterized in that... The vibration isolation unit (103) includes a stator assembly (105) and a levitating mover (106). The levitating mover (106) is sleeved outside the stator assembly (105) in a non-contact state. The permanent magnet array topology between the stator assembly (105) and the levitating mover (106) is configured with field strength optimization.

3. The adjustable three-degree-of-freedom magnetic levitation vibration isolator with a large load-bearing, fully permanent magnet electrically driven load according to claim 2, characterized in that... The stator assembly (105) includes a hollow support shaft (102), on which a second permanent magnet (14) and a fourth permanent magnet (16) are sleeved from top to bottom. The support shaft (102) is provided with an adjustment mechanism for driving the second permanent magnet (14) to move up and down. The levitation mover (106) includes a combined frame structure, which is a five-layer combined frame structure consisting of a set of outer frames connected by bolts. The first layer is provided with a first permanent magnet (6), the third layer is provided with a third permanent magnet (8), and the fifth layer is provided with a fifth permanent magnet (11). The second permanent magnet (14) and the fourth permanent magnet (16) are respectively provided in the second and fourth layers of the combined frame structure.

4. The adjustable three-degree-of-freedom magnetic levitation vibration isolator with a large load-bearing, fully permanent magnet electrically driven load as described in claim 3, characterized in that... The first permanent magnet (6) and the third permanent magnet (8) have the same polarization direction, and the third permanent magnet (8) and the fifth permanent magnet (11) have opposite polarization directions; at the equilibrium position, the permanent magnets corresponding to the stator assembly (105) and the levitation mover (106) are in a state of magnetic repulsion.

5. A high-load-bearing, fully permanent magnet electrically driven adjustable three-degree-of-freedom magnetic levitation vibration isolator according to claim 2, characterized in that... The inner wall of the column (104) is provided with a longitudinal groove (22), and the levitation mover (106) is provided with a guide slider (23) that cooperates with the longitudinal groove (22). The guide slider (23) is embedded in the longitudinal groove (22) to form a sliding pair, which is used to constrain the displacement of the levitation mover (106) in the radial and torsional degrees of freedom.

6. A high-load-bearing, fully permanent magnet electrically driven adjustable three-degree-of-freedom magnetic levitation vibration isolator according to claim 3, characterized in that... The adjustment mechanism includes a micro stepper motor (21), the output shaft of which is connected to a lead screw (20), and a slider (7) is sleeved on the lead screw (20). The second permanent magnet (14) is always close to the transmission key of the slider (7) and moves accordingly. The support shaft (102) is provided with a longitudinal through-hole. The transmission key of the slider (7) passes through the through-hole and interacts with the second permanent magnet (14) outside the shaft. The effective stroke range of load adjustment is determined by the length of the through-hole. There is a magnetic repulsion between the second permanent magnet (14) and the fourth permanent magnet (16).

7. A high-load-bearing, fully permanent magnet electrically driven adjustable three-degree-of-freedom magnetic levitation vibration isolator according to claim 1, characterized in that... The outer wall of the support shaft (102) is provided with an annular shoulder (10) for axial positioning and locking of the fourth permanent magnet (16).

8. A high-load-bearing, fully permanent magnet electrically driven adjustable three-degree-of-freedom magnetic levitation vibration isolator according to claim 1, characterized in that... The end of the placement platform (2) is connected to its corresponding parallel link (3) by a ball joint, and the parallel link (3) is fixedly connected to its corresponding levitation mover (106).

9. A high-load-bearing, fully permanent magnet electrically driven adjustable three-degree-of-freedom magnetic levitation vibration isolator according to claim 1, characterized in that... A top plate (1) is provided above the column (104), and the top plate (1) is fixedly connected to the top of the stator assembly (105).

10. A high-load-bearing, fully permanent magnet electrically driven adjustable three-degree-of-freedom magnetic levitation vibration isolator according to claim 2, characterized in that... The magnetic coupling modes between the stator assembly (105) and the levitating mover (106) include: the relative axial movement of the first permanent magnet (6) and the fifth permanent magnet (11) with the second permanent magnet (14) and the fourth permanent magnet (16), which is defined as "embedded"; the relative movement of the second permanent magnet (14) and the fourth permanent magnet (16) with the third permanent magnet (8), which is defined as "parallel". The positive stiffness mechanism is constructed from the lower fifth permanent magnet (11), the first permanent magnet (6), the third permanent magnet (8), and the second permanent magnet (14) in between; the negative stiffness mechanism is constructed from the upper first permanent magnet (6), the third permanent magnet (8), the fifth permanent magnet (11), and the fourth permanent magnet (16) in between.

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