Multi-channel quantitative mixed liquid control integrated valve and control method thereof

Abstract

The present application belongs to the field of fluid control and mixing technology, and particularly relates to a multi-channel quantitative liquid mixing control integrated valve and a control method thereof. During operation, a controller first sets target flow rates of each liquid inlet branch, controls on-off control valves to open, and adjusts a first flow valve to a preset opening degree. Liquid flows along the liquid inlet branch. A flow meter continuously feeds measured flow rates to the controller, which adjusts the opening degree of the first flow valve in real time to perform closed-loop correction by comparing the target value with the measured value. The present application is highly integrated on a modular base and a liquid mixing bin, and combines closed-loop control based on flow meter feedback, effectively solving the problems of low proportioning accuracy, large flow fluctuation caused by valve action, and lack of active correction ability in the prior art, achieving high-precision and high-stability quantitative proportioning and mixing of multiple liquids, and greatly simplifying external pipelines, reducing the risk of leakage and liquid mixing.

Description

Technical Field

[0001] This invention belongs to the field of fluid control and mixing technology, and particularly relates to a multi-channel quantitative mixing control integrated valve and its control method. Background Technology

[0002] In precision manufacturing processes such as semiconductor wet processes and chemical cleaning, it is often necessary to mix various chemical liquids such as acids, alkalis, and organic solutions in strictly defined proportions. The accuracy and stability of these mixing proportions directly determine the reliability and consistency of the process results.

[0003] In existing technologies, the common "in-tank multi-path direct mixing" method, while structurally simple, involves the free convergence of fluids from each branch within the mixing tank, making precise control of the mixing ratio difficult. It also requires a long time to achieve uniform mixing and easily leads to complex piping within the tank, occupying valuable space and causing significant inconvenience for layout and maintenance. Secondly, while online proportional control using "flow meters and regulating valves" can theoretically achieve precise mixing, in actual operation, the instantaneous changes in pressure and resistance in the piping system caused by valve opening and closing directly lead to drastic fluctuations in the flow rate of each branch, resulting in instantaneous deviations in the mixing ratio and affecting the stability of the final mixture concentration. Furthermore, open-loop control modes relying on the repeatability of metering pumps or step-by-step injection are not only limited in accuracy by the pump's performance but also lack effective diagnosis and automatic correction capabilities for abnormal operating conditions such as pump or valve failures. They often only trigger alarms after mixing failures and cannot actively restore the target mixing ratio, resulting in high process risks.

[0004] To address this, a multi-channel quantitative mixing control integrated valve and its control method are proposed. Summary of the Invention

[0005] The purpose of this invention is to provide a multi-channel quantitative mixing control integrated valve and its control method to solve the above-mentioned problems.

[0006] To achieve the above objectives, the present invention provides the following solution: A multi-channel quantitative mixing control integrated valve includes: multiple parallel inlet branches, a mixing chamber, and a controller; The liquid inlet branch includes a first base, a first flow channel structure is provided inside the first base, and an on / off control valve, a first check valve and a first flow valve for controlling the liquid flow are sequentially arranged on the first base along the liquid flow direction. The first base is connected to a flow meter, and the flow meter is connected to a second base, a second flow channel structure is provided inside the second base, and a second check valve for controlling the liquid flow is provided on the second base. The mixing chamber is equipped with a third flow channel structure and a mixing structure that are connected to multiple second bases. The on / off control valve, the first flow valve, and the flow meter are all electrically connected to the controller.

[0007] Preferably, a first channel is provided at one end of the first base, the first channel is connected to a first valve chamber, a second channel is connected to the side wall of the first valve chamber, the second channel is connected to the bottom end of a third channel, the third channel is connected to the bottom end of the second valve chamber, a fourth channel is connected to the side wall of the second valve chamber, the fourth channel is connected to the bottom end of a fifth channel, the fifth channel is connected to the bottom end of the third valve chamber, a sixth channel is connected to the side wall of the third valve chamber, the sixth channel is connected to a seventh channel, and the seventh channel is connected to the flow meter.

[0008] Preferably, the on / off control valve includes a lower housing fixed to the top of the first base, an upper housing at the top of the lower housing, a second interface on one side of the lower housing, a first interface on one side of the upper housing, a pneumatic drive assembly inside the upper housing, a first valve core inside the lower housing, a first spring at the top of the first valve core abutting against the top wall of the upper housing, and a diaphragm assembly at the bottom of the first valve core, the diaphragm assembly being disposed within the first valve cavity.

[0009] Preferably, the first check valve includes a valve cover fixedly installed above the first base, a second spring is provided inside the valve cover, a second valve core is provided at the bottom end of the second spring, the second valve core is vertically slidably connected in the second valve cavity, and the second check valve has the same structure as the first check valve.

[0010] Preferably, the first flow valve includes a base fixed to the top of the first base, a guide member is provided on the top surface of the base, a transmission member is provided at the top of the guide member, a needle valve core is connected to the output end of the transmission member, the bottom end of the needle valve core is disposed in the third valve cavity, the needle valve core is connected to the movable end of the guide member, a third spring is sleeved on the outside of the needle valve core, the bottom end of the third spring abuts against the base, and the top end of the third spring abuts against the movable end of the guide member.

[0011] Preferably, the second flow channel structure includes an eleventh channel formed in the second base, the eleventh channel being connected to the flow meter, the eleventh channel being connected to the bottom end of the fourth valve chamber, the side wall of the fourth valve chamber being connected to a twelfth channel, and the second check valve being disposed in the fourth valve chamber.

[0012] Preferably, the third flow channel structure includes a plurality of eighth channels formed on one side of the mixing chamber, the plurality of eighth channels being connected to a plurality of eleventh channels respectively, the plurality of eighth channels being connected to a ninth channel, the ninth channel being connected to the mixing structure, the mixing structure being connected to an outlet cavity, and the side wall of the outlet cavity being connected to an outlet channel.

[0013] Preferably, the mixing structure includes a first mixing channel, which is connected to the ninth channel. A first spiral blade is disposed in the first mixing channel and is arranged along the length direction of the first mixing channel. The first mixing channel is connected to a second mixing channel, which is disposed in the second mixing channel and is arranged along the length direction of the second mixing channel. The second mixing channel is connected to the bottom wall of the outflow cavity through a tenth channel.

[0014] Preferably, the flow meter is a venturi tube flow meter.

[0015] A control method for a multi-channel quantitative mixing control integrated valve, based on the aforementioned multi-channel quantitative mixing control integrated valve, comprises the following steps: The controller sets the target flow rate for each inlet branch, controls the on / off control valve to open, controls the first flow valve to open to the set opening degree, the flow meter measures the actual flow rate and feeds the actual flow rate back to the controller, the controller compares the target flow rate with the actual flow rate, and when the actual flow rate is less than the target flow rate, the controller controls the opening degree and / or opening time of the first flow valve to correct the liquid flow rate of the target inlet branch.

[0016] Compared with the prior art, the present invention has the following advantages and technical effects: During operation, the controller first sets the target flow rate for each inlet branch and controls the on / off control valve to open, while simultaneously adjusting the first flow valve to the preset opening degree. The liquid flows sequentially through the flow channel in the first base, passing through the first check valve and the first flow valve for fine adjustment and unidirectional flow. After being measured in real time by the flow meter, it flows into the mixing chamber through the second base and the second check valve. The liquids in each branch are fully mixed in the mixing structure formed by the flow channel and the spiral blades in the mixing chamber before being output. At the same time, the flow meter continuously feeds back the measured flow rate to the controller. The controller compares the target value with the measured value and finely adjusts the opening degree of the first flow valve in real time to perform closed-loop correction.

[0017] The advantages of this invention are as follows: by highly integrating the on / off control valve, the first check valve, the first flow valve, the flow meter, and the second check valve onto a modular base and mixing chamber, and combining it with closed-loop control based on flow meter feedback, the invention effectively solves the problems of low proportioning accuracy, large flow fluctuations caused by valve action, and lack of active correction capability in the prior art. It achieves high-precision and high-stability quantitative proportioning and mixing of multiple liquids, while greatly simplifying external pipelines and reducing the risk of leakage and cross-contamination. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort: Figure 1 A schematic diagram of the overall structure of the present invention; Figure 2 This is a top view of the present invention; Figure 3 for Figure 2 Sectional view along direction AA in the middle; Figure 4 This is a schematic diagram of the on / off control valve in this invention; Figure 5 This is a schematic diagram of the structure of the first check valve in this invention; Figure 6 This is a schematic diagram of the structure of the first flow valve in this invention; Figure 7 This is a schematic diagram of the mixing chamber in this invention; Figure 8 for Figure 7 BB direction section view; The components are as follows: 1. First base; 2. Inlet connector; 3. On / off control valve; 4. First check valve; 5. First flow valve; 6. Flow meter; 7. Second check valve; 8. Second base; 9. Mixing chamber; 10. Outlet connector; 101. First channel; 102. First valve chamber; 103. Second channel; 104. Third channel; 105. Fourth channel; 106. Fifth channel; 107. Sixth channel; 108. Seventh channel; 109. Second valve chamber; 110. Third valve chamber; 301. Upper housing; 302. Lower housing; 303. First interface; 304. Second interface; 305. First valve core; 306. First spring; 307. Pneumatic drive assembly; 308. Diaphragm assembly; 401. Valve cover; 402. Second spring; 403. Second valve core; 501. Base; 502. Guide; 503. Transmission component; 504. Third spring; 505. Needle valve core; 801. Eleventh channel; 802. Fourth valve chamber; 803. Twelfth channel; 901. Eighth channel; 902. Ninth channel; 903. Outlet channel; 904. First mixing channel; 905. First spiral blade; 906. Second mixing channel; 907. Second spiral blade; 908. Tenth channel; 909. Outlet chamber. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] Reference Figures 1 to 8 The present invention discloses a multi-channel quantitative mixing control integrated valve, comprising: multiple parallel inlet branches, a mixing chamber 9, and a controller; The liquid inlet branch includes a first base 1, a first flow channel structure is provided inside the first base 1, and an on / off control valve 3, a first check valve 4 and a first flow valve 5 for controlling the liquid flow are arranged sequentially on the first base 1 along the liquid flow direction. The first base 1 is connected to a flow meter 6, and the flow meter 6 is connected to a second base 8. The second base 8 is provided with a second flow channel structure, and a second check valve 7 for controlling the liquid flow is provided on the second base 8. The mixing chamber 9 is equipped with a third flow channel structure and a mixing structure that are connected to multiple second bases 8; The on / off control valve 3, the first flow valve 5, and the flow meter 6 are all electrically connected to the controller.

[0022] During operation, the controller first sets the target flow rate for each inlet branch. Then, the controller opens the on / off control valve 3 and simultaneously controls the first flow valve 5 of that branch to a preset opening degree. Liquid flows in unidirectionally through the first check valve 4 on the first base 1, undergoes fine flow regulation by the first flow valve 5, and then flows through the flow meter 6 for real-time measurement. The measured liquid passes through the second base 8 and, under the unidirectional guidance of the second check valve 7, flows into the mixing chamber 9. The liquids from each branch are fully mixed in the mixing structure of the mixing chamber 9 before being output. During this process, the flow meter 6 continuously feeds back the actual flow rate value of each branch to the controller, which compares this measured value with the target value. If the actual flow rate of a branch is found to be too low, the controller will immediately send a correction command to the first flow valve 5 of that branch. By fine-tuning its opening degree or extending the opening time, the actual flow rate will be made to accurately approach the target value. This invention highly integrates on / off control, flow regulation, real-time metering, backflow prevention and mixing functions into the modular first base 1, second base 8 and mixing chamber 9, and combines them with closed-loop feedback control to achieve high precision, high stability and high reliability of multi-channel liquid ratio, while greatly simplifying the external pipeline structure and reducing the risk of leakage and cross-contamination.

[0023] In a further optimized design, a first channel 101 is provided at one end of the first base 1. The first channel 101 is connected to a first valve chamber 102. A second channel 103 is connected to the side wall of the first valve chamber 102. The second channel 103 is connected to the bottom end of a third channel 104. The third channel 104 is connected to the bottom end of a second valve chamber 109. A fourth channel 105 is connected to the side wall of the second valve chamber 109. The fourth channel 105 is connected to the bottom end of a fifth channel 106. The fifth channel 106 is connected to the bottom end of a third valve chamber 110. A sixth channel 107 is connected to the side wall of the third valve chamber 110. The sixth channel 107 is connected to a seventh channel 108. The seventh channel 108 is connected to the flow meter 6.

[0024] The first channel 101 is connected to the liquid inlet connector 2.

[0025] The liquid enters the first valve chamber 102 through the first channel 101, then flows into the second valve chamber 109 through the second channel 103 and the third channel 104, then enters the third valve chamber 110 through the fourth channel 105 and the fifth channel 106, and finally flows to the flow meter 6 through the sixth channel 107 and the seventh channel 108, thus realizing the orderly and stable delivery of fluid inside the first base 1.

[0026] Further optimization of the scheme: the on / off control valve 3 includes a lower housing 302 fixed to the top of the first base 1, an upper housing 301 provided at the top of the lower housing 302, a second interface 304 connected to one side of the lower housing 302, a first interface 303 connected to one side of the upper housing 301, a pneumatic drive assembly 307 provided inside the upper housing 301, a first valve core 305 provided inside the lower housing 302, a first spring 306 provided at the top of the first valve core 305, the first spring 306 abutting against the top wall of the upper housing 301, and a diaphragm assembly 308 provided at the bottom of the first valve core 305, the diaphragm assembly 308 being provided inside the first valve cavity 102.

[0027] When compressed gas enters the pneumatic drive assembly 307 from the first port 303, it pushes the first valve core 305 upward against the elastic force of the first spring 306, causing the diaphragm assembly 308 to disengage from the valve seat of the first valve chamber 102, opening the valve and allowing fluid to pass through. When depressurization occurs, the first spring 306 pushes the first valve core 305 back to its original position, and the diaphragm assembly 308 seals the valve seat, cutting off the flow path.

[0028] Further optimization of the scheme: the first check valve 4 includes a valve cover 401 fixedly installed above the first base 1, a second spring 402 is provided inside the valve cover 401, a second valve core 403 is provided at the bottom end of the second spring 402, and the second valve core 403 is vertically slidably connected in the second valve cavity 109. The second check valve 7 has the same structure as the first check valve 4.

[0029] When the forward flow pressure pushes the second valve core 403 to compress the second spring 402 and move it upward, the valve opens; when there is no forward pressure difference or when a reverse pressure difference occurs, the second spring 402 pushes the second valve core 403 to move downward and seal the valve seat to prevent backflow.

[0030] In a further optimized design, the first flow valve 5 includes a base 501 fixed to the top of the first base 1. A guide 502 is provided on the top surface of the base 501. A transmission 503 is provided at the top of the guide 502. A needle valve core 505 is connected to the output end of the transmission 503. The bottom end of the needle valve core 505 is located in the third valve cavity 110. The needle valve core 505 is connected to the movable end of the guide 502. A third spring 504 is sleeved on the outside of the needle valve core 505. The bottom end of the third spring 504 abuts against the base 501, and the top end of the third spring 504 abuts against the movable end of the guide 502.

[0031] The transmission component 503 receives the drive signal and pushes the needle valve core 505 to move axially against the force of the third spring 504 under the guidance of the guide component 502, thereby changing its throttling gap in the third valve chamber 110 and thus precisely regulating the flow rate.

[0032] Further optimization of the scheme: the second flow channel structure includes an eleventh channel 801 opened in the second base 8, the eleventh channel 801 is connected to the flow meter 6, the eleventh channel 801 is connected to the bottom end of the fourth valve chamber 802, the side wall of the fourth valve chamber 802 is connected to the twelfth channel 803, and the second check valve 7 is set in the fourth valve chamber 802.

[0033] The liquid measured by the flow meter 6 enters the second base 8 through the eleventh channel 801, flows through the second check valve 7 in the fourth valve chamber 802, and then flows out through the twelfth channel 803 and merges into the mixing chamber 9.

[0034] Further optimizing the design, the third flow channel structure includes multiple eighth channels 901 located on one side of the mixing chamber 9. These eighth channels 901 are connected to multiple eleventh channels 801, and each eighth channel 901 is connected to a ninth channel 902. The ninth channel 902 is connected to the mixing structure, which is connected to an outlet chamber 909. The side wall of the outlet chamber 909 is connected to an outlet channel 903. The outlet channel 903 is connected to an outlet connector 10.

[0035] The outlet connector 10 also includes an outlet female end, which is connected to the outlet channel 903 of the mixing chamber 9 by means of threads, and forms an axial limiting fit with the outlet channel 903 through its steps. Since the outlet channel 903 is the main output channel after the convergence of multiple branch fluids, its interface bears a large flow rate and external pipeline connection load at the same time, and the sealing and positioning consistency requirements of the outflow cavity 909 are high. Therefore, a structure in which the outlet female end and the outlet connector 10 are connected separately is adopted.

[0036] The liquids from each branch enter the mixing chamber 9 through their respective eighth channel 901. After initial convergence in the ninth channel 902, they enter the mixing structure for enhanced mixing. The mixed liquids are collected in the outflow chamber 909 and finally stably output through the outlet channel 903.

[0037] Further optimization of the scheme: the mixing structure includes a first mixing channel 904, which is connected to a ninth channel 902. A first spiral blade 905 is provided in the first mixing channel 904, which is arranged along the length of the first mixing channel 904. The first mixing channel 904 is connected to a second mixing channel 906, which is provided in the second mixing channel 906, which is arranged along the length of the second mixing channel 906. The second mixing channel 906 is connected to the bottom wall of the outflow chamber 909 through a tenth channel 908.

[0038] The combined liquids enter the first mixing channel 904, where they generate a primary swirling flow under the action of the first spiral blade 905. They then enter the second mixing channel 906, where they are further sheared and disturbed by the second spiral blade 907 to achieve efficient and uniform mixing. Finally, they enter the outflow chamber 909 through the tenth channel 908.

[0039] The design was further optimized, and flow meter 6 was changed to a venturi tube type flow meter.

[0040] The flow meter 6 uses the Venturi tube principle. When the fluid flows through its constriction section, the flow velocity increases and the pressure decreases. The flow rate can be calculated by measuring the pressure difference at a specific location.

[0041] A control method for a multi-channel quantitative mixing control integrated valve, based on the multi-channel quantitative mixing control integrated valve, comprises the following steps: The controller sets the target flow rate for each inlet branch, controls the on / off control valve 3 to open, controls the first flow valve 5 to open to the set opening degree, the flow meter 6 measures the actual flow rate and feeds the actual flow rate back to the controller, the controller compares the target flow rate with the actual flow rate, when the actual flow rate is less than the target flow rate, the controller controls the opening degree and / or opening time of the first flow valve 5 to correct the liquid flow rate of the target inlet branch.

[0042] First, the target flow rate required for each inlet branch is preset by the controller. During operation, the controller issues a command to open the on / off control valve 3 of each branch, and at the same time drives the first flow valve 5 of each branch to a preset initial opening degree.

[0043] Each source liquid then enters its corresponding first base 1. The liquid flows along the first flow channel structure inside. During this process, the first check valve 4 ensures unidirectional flow of the liquid, preventing backflow or cross-contamination. Subsequently, the liquid flows through the first flow valve 5, and the needle valve core 505 adjusts its opening according to the control signal to perform preliminary fine control of the flow rate.

[0044] The regulated liquid enters the flow meter 6 for real-time and continuous flow measurement. The measured liquid passes through the second base 8, where the second check valve 7 provides unidirectional flow protection again, and finally flows out through its internal eleventh channel 801, fourth valve chamber 802, and twelfth channel 803.

[0045] Each branch liquid enters the mixing chamber 9 through an independent eighth channel 901 and initially converges at the ninth channel 902. Subsequently, the mixture flows sequentially through the first mixing channel 904, which contains a first helical blade 905, and the second mixing channel 906, which contains a second helical blade 907. Under the shearing, guiding, and turbulent action of the double helical blades, the multiple liquids are thoroughly and uniformly mixed. Finally, the mixture enters the outlet chamber 909 through the tenth channel 908, where it is collected and stably output through the outlet channel 903.

[0046] Throughout the entire workflow, the controller continuously receives the actual flow signals from the flow meters 6 of each branch and compares them with the preset target value in real time. If the actual flow of a certain branch deviates from the target value, the controller will immediately send a correction command to the first flow valve 5 of that branch, and change the flow resistance by finely adjusting its opening, so that the actual flow can be quickly and accurately stabilized near the target value, forming a high-precision closed-loop feedback control.

[0047] In the description of this invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this invention, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0048] The embodiments described above are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1. A multi-channel quantitative mixing control integrated valve, characterized in that, include: Multiple parallel-connected liquid inlet branches, mixing chamber (9), and controller; The liquid inlet branch includes a first base (1), a first flow channel structure is provided in the first base (1), and an on / off control valve (3), a first check valve (4) and a first flow valve (5) for controlling the liquid flow are arranged sequentially on the first base (1) along the liquid flow direction. The first base (1) is connected to a flow meter (6), and the flow meter (6) is connected to a second base (8). The second base (8) is provided with a second flow channel structure, and a second check valve (7) for controlling the liquid flow is provided on the second base (8). The mixing chamber (9) is provided with a third flow channel structure and a mixing structure that are connected to multiple second bases (8); The on / off control valve (3), the first flow valve (5), and the flow meter (6) are all electrically connected to the controller.

2. The multi-channel quantitative mixing control integrated valve according to claim 1, characterized in that: The first base (1) has a first channel (101) at one end, the first channel (101) is connected to the first valve chamber (102), the side wall of the first valve chamber (102) is connected to the second channel (103), the second channel (103) is connected to the bottom end of the third channel (104), the third channel (104) is connected to the bottom end of the second valve chamber (109), the side wall of the second valve chamber (109) is connected to the fourth channel (105), the fourth channel (105) is connected to the bottom end of the fifth channel (106), the fifth channel (106) is connected to the bottom end of the third valve chamber (110), the side wall of the third valve chamber (110) is connected to the sixth channel (107), the sixth channel (107) is connected to the seventh channel (108), and the seventh channel (108) is connected to the flow meter (6).

3. The multi-channel quantitative mixing control integrated valve according to claim 2, characterized in that: The on / off control valve (3) includes a lower housing (302) fixed to the top of the first base (1), an upper housing (301) is provided at the top of the lower housing (302), a second interface (304) is connected to one side of the lower housing (302), a first interface (303) is connected to one side of the upper housing (301), a pneumatic drive assembly (307) is provided inside the upper housing (301), a first valve core (305) is provided inside the lower housing (302), a first spring (306) is provided at the top of the first valve core (305), the first spring (306) abuts against the top wall of the upper housing (301), a diaphragm assembly (308) is provided at the bottom of the first valve core (305), and the diaphragm assembly (308) is provided inside the first valve cavity (102).

4. The multi-channel quantitative mixing control integrated valve according to claim 2, characterized in that: The first check valve (4) includes a valve cover (401) fixedly installed above the first base (1). A second spring (402) is provided inside the valve cover (401). A second valve core (403) is provided at the bottom end of the second spring (402). The second valve core (403) is vertically slidably connected in the second valve chamber (109). The second check valve (7) has the same structure as the first check valve (4).

5. The multi-channel quantitative mixing control integrated valve according to claim 2, characterized in that: The first flow valve (5) includes a base (501) fixed to the top of the first base (1). A guide (502) is provided on the top surface of the base (501). A transmission member (503) is provided at the top of the guide (502). A needle valve core (505) is connected to the output end of the transmission member (503). The bottom end of the needle valve core (505) is located in the third valve chamber (110). The needle valve core (505) is connected to the movable end of the guide (502). A third spring (504) is sleeved on the outside of the needle valve core (505). The bottom end of the third spring (504) abuts against the base (501), and the top end of the third spring (504) abuts against the movable end of the guide (502).

6. The multi-channel quantitative mixing control integrated valve according to claim 1, characterized in that: The second flow channel structure includes an eleventh channel (801) opened in the second base (8), the eleventh channel (801) is connected to the flow meter (6), the eleventh channel (801) is connected to the bottom end of the fourth valve chamber (802), the side wall of the fourth valve chamber (802) is connected to the twelfth channel (803), and the second check valve (7) is disposed in the fourth valve chamber (802).

7. The multi-channel quantitative mixing control integrated valve according to claim 6, characterized in that: The third flow channel structure includes multiple eighth channels (901) opened on one side of the mixing chamber (9). The multiple eighth channels (901) are respectively connected to multiple eleventh channels (801). The multiple eighth channels (901) are all connected to the ninth channel (902). The ninth channel (902) is connected to the mixing structure. The mixing structure is connected to an outlet cavity (909). The side wall of the outlet cavity (909) is connected to an outlet channel (903).

8. The multi-channel quantitative mixing control integrated valve according to claim 7, characterized in that: The mixing structure includes a first mixing channel (904), which is connected to the ninth channel (902). A first spiral blade (905) is provided in the first mixing channel (904), which is arranged along the length of the first mixing channel (904). The first mixing channel (904) is connected to a second mixing channel (906), which is provided with a second spiral blade (907), which is arranged along the length of the second mixing channel (906). The second mixing channel (906) is connected to the bottom wall of the outflow cavity (909) through a tenth channel (908).

9. The multi-channel quantitative mixing control integrated valve according to claim 1, characterized in that: The flow meter (6) is a Venturi tube type flow meter.

10. A control method for a multi-channel quantitative mixing control integrated valve, based on the multi-channel quantitative mixing control integrated valve according to any one of claims 1-9, characterized in that, The steps are as follows: The controller sets the target flow rate for each inlet branch, controls the on / off control valve (3) to open, controls the first flow valve (5) to open to the set opening degree, the flow meter (6) measures the actual flow rate and feeds the actual flow rate back to the controller, the controller compares the target flow rate with the actual flow rate, when the actual flow rate is less than the target flow rate, the controller controls the opening degree and / or opening time of the first flow valve (5) to correct the liquid flow rate of the target inlet branch.

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