Method for detecting temperature of ion source grid based on acoustic measurement and detection module

Abstract

This application relates to the field of grid ion source technology, specifically providing a detection method and module for measuring the grid temperature of an ion source based on acoustic measurement. The detection method includes: confirming an acoustic temperature model based on the relationship between the response time of sound wave propagation along the grid in a vacuum environment, grid propagation scattering, and grid temperature; constructing at least one sound wave transmission path passing through the middle of the grid based on the outer edge of the grid, and confirming the current response time of the sound wave transmission path; and confirming the current temperature of the grid based on the current response time and the acoustic temperature model. This application characterizes the solid-phase propagation parameters of the grid in a vacuum environment through grid propagation scattering, enabling the application to confirm the relationship between the response time and the current temperature of the grid through the acoustic temperature model, thereby inverting the current temperature of the grid based on the response time to improve the accuracy of grid temperature detection.

Description

Technical Field

[0001] This application relates to the field of grid ion source technology, and more specifically, to a detection method and detection module based on acoustic measurement of ion source grid temperature. Background Technology

[0002] A grid ion source is a device used to extract an ion beam by screening and accelerating ions through a grid. A typical grid ion source has a three-layer structure, including a shielding grid, an accelerating grid, and a decelerating grid. Because the grid is affected by the accelerating electric field, thermal load, and mechanical stress, it is highly susceptible to phenomena such as grid arcing, erosion, deformation, and aperture mismatch, thus affecting the beam quality.

[0003] Existing technologies often use grid temperature detection to determine the working thermal load of the grid, thus avoiding the adverse effects of grid overload. Examples include thermocouple detection, infrared thermometry, probe detection, fiber optic sensing, and electrical simulation. However, thermocouple detection requires direct contact with the object, i.e., attachment to the grid surface, making wiring difficult. Infrared thermometry, while non-contact, is susceptible to electromagnetic interference, resulting in low reliability. Probes are also limited by the grid structure and cannot be used in high-energy beam scenarios. Fiber optic sensing exhibits poor stability under long-term beam irradiation. While electrical simulation can achieve non-contact temperature measurement through current and resistance measurements, these measurements are subject to errors and delays, and the electrothermal coupling model is extremely complex, leading to low detection accuracy. Therefore, there is an urgent need for a technical solution for grid temperature detection that can comprehensively detect multi-layered grids without direct contact with the grid working surface, is unaffected by high radiation and high electric fields, and provides accurate and reliable temperature measurement results. Summary of the Invention

[0004] This application addresses the shortcomings of existing methods by proposing a detection method and module based on acoustic measurement of ion source grid temperature, thereby solving at least one technical problem in related technologies, such as incomplete detection of multi-layer working temperature grids, low detection accuracy, and complex implementation process.

[0005] First aspect This application provides a detection method based on acoustic measurement of ion source grid temperature, including: Based on the relationship between the response time of sound wave propagation along the grid in a vacuum environment, grid propagation scattering, and grid temperature, the acoustic temperature model is confirmed. Construct at least one acoustic wave transmission path passing through the middle of the grid based on the outer edge of the grid, and confirm the current response time of the acoustic wave transmission path; The current temperature of the grid is determined based on the current response time and the acoustic temperature model.

[0006] Specifically, the main technical concept of this application lies in characterizing the solid-state propagation parameters of a grid in a vacuum environment through grid propagation scattering. This allows the application to confirm the relationship between the response time and the current temperature of the grid using an acoustic temperature model, thereby inverting the current temperature of the grid based on the response time and improving the accuracy of grid temperature detection. Simultaneously, this application constructs an acoustic wave transmission path based on the outer edge of the grid, eliminating the need for direct contact with the working surface of the grid. This avoids the influence of high radiation and high electric fields, making this application highly adaptable to grid ion sources and facilitating the modification and implementation of grid ion sources.

[0007] Furthermore, before obtaining the current temperature, this application corrects the grid propagation scattering, including: Set a preset sampling temperature and confirm the sampling response time of the sound wave transmission path; Based on the acoustic temperature model, sampling temperature, and sampling response time, the grid propagation scattering used for correction is confirmed.

[0008] Furthermore, the detection method for measuring the temperature of an ion source grid based on acoustic measurement provided in this application further includes: integrating the excitation source and receiver of the acoustic wave transmission path, so that the excitation start point and the receiving end point of the acoustic wave transmission path are reciprocal.

[0009] Specifically, another technical concept of this application is that by setting reciprocity, the excitation start point and the receiving end point can be interchanged, so that the acquisition of the current response time is not constrained by the excitation start point. That is, theoretically, this application can improve the comprehensiveness of response time acquisition by setting the receiving end point at the outer edge of the grid, thereby improving the comprehensiveness and reliability of grid temperature detection.

[0010] Furthermore, the excitation start point and the receiving end point are arranged in a ring array on the outer edge of the grid.

[0011] Furthermore, the detection method for the temperature of the ion source grid based on acoustic measurement provided in this application also includes: Generate an incentive by specifying any of the aforementioned incentive starting points, and obtain the first response time of the other aforementioned receiving endpoints; And / or, generate an excitation through each of the said excitation starting points to obtain the second response time of the opposite receiving endpoint; A response time matrix is ​​formed based on each of the first response times and / or each of the second response times; The current temperature is confirmed based on the response time matrix and the acoustic temperature model.

[0012] Specifically, another technical concept of this application is to perform topological expansion on the acoustic wave transmission path on the outer edge of the grid, exhaust all possible acoustic wave transmission paths composed of the excitation start point and the receiving end point, and form a response time matrix, thereby improving the calculation accuracy of the acoustic temperature model through the mathematical matrix, and thus improving the detection accuracy of the current temperature.

[0013] Furthermore, the detection method for the temperature of the ion source grid based on acoustic measurement provided in this application also includes: The first time matrix and the second time matrix of the response time matrix are confirmed respectively by generating excitation through different excitation starting points or by generating excitation through the same excitation starting point at a preset time interval. Based on the first time matrix, the second time matrix, and the acoustic temperature model, the first propagation scattering and the second propagation scattering are confirmed respectively; The system noise of the grid propagation scattering is confirmed based on the first and second propagation scattering.

[0014] Specifically, another technical concept of this application is to compensate for the acoustic temperature model by system noise, thereby reducing the impact of system noise on the acoustic temperature model and further improving the detection accuracy of the current temperature output by the acoustic temperature model.

[0015] In some possible implementations, the coverage area and the area to be tested formed by each of the acoustic wave transmission paths on the grid are identified based on the coverage status of the grid by the acoustic wave transmission paths. Based on the current temperature of the covered area, the current temperature of the area to be measured is determined, and the current temperature distribution of the grid is formed.

[0016] Specifically, another technical concept of this application is to graphically display the temperature of the entire grid by means of the current temperature distribution, which makes it easy for the operator to have a comprehensive grasp of the working heat load of the grid.

[0017] Furthermore, the excitation source and receiver are integrated into one unit using a piezoelectric structure.

[0018] Specifically, another technical concept of this application is to utilize the characteristic of piezoelectric structures that can convert mechanical energy and electrical energy into one another, so that the excitation source and receiver can be configured with the same structure, thereby simplifying the structural design of the excitation source and receiver.

[0019] Furthermore, the piezoelectric structure is integrated into the grid using circuit integration technology.

[0020] Specifically, another technical concept of this application lies in modifying the original grid by integrating the piezoelectric structure and the grid body through circuit integration technology. This avoids interference from vibration of the connection structure between the piezoelectric structure and the grid on the excitation and response of the piezoelectric structure, thereby improving the accuracy of response time acquisition. Simultaneously, the integrated design of the piezoelectric structure allows it to be powered through the grid, solving the technical problems of difficult wiring and the impact of wiring on device function in vacuum high-voltage scenarios, which is beneficial for the mass application of this application.

[0021] Second aspect This application provides a detection module for acoustically measuring the temperature of an ion source grid. The detection module is used to assemble onto the grid and includes: A control component is configured to execute a detection method based on acoustic measurement of ion source grid temperature to confirm the current temperature of the grid; the detection method employs the detection method based on acoustic measurement of ion source grid temperature as described in any one of the first aspects. A sampling component is used to construct at least one acoustic wave transmission path passing through the middle of the grid based on the outer edge of the grid, in response to the instructions of the control component. The control component is connected to the sampling component.

[0022] Specifically, another technical concept of this application is to provide an assemblable detection module, which can be installed on the grid through assembly. That is, this application can modify the existing grid ion source, improving its applicability. Simultaneously, this application achieves the detection method based on acoustic measurement of the ion source grid temperature as described in any possible embodiment of the first aspect through the combination of control and sampling components. Therefore, the beneficial effects provided by any embodiment of the second aspect can be understood with reference to the beneficial effects provided by any embodiment of the first aspect.

[0023] The beneficial technical effects of the technical solutions provided in this application include: By characterizing the solid-phase propagation parameters of the grid under vacuum conditions through grid propagation scattering, this application enables the determination of the relationship between response time and the current grid temperature using an acoustic temperature model. This allows for the inversion of the current grid temperature based on the response time. Specifically, during the operation of the grid ion source, this application obtains the current response time of the sound wave propagating along the acoustic wave propagation path. This current response time is then input into the acoustic temperature model. The acoustic temperature model outputs the current temperature along the acoustic wave propagation path based on the relationship between the response time of the sound wave propagating along the grid under vacuum conditions, grid propagation scattering, and grid temperature. Since the current temperature output is achieved through the acoustic wave propagation path, there is no need to install detection components on the working surface of the grid, giving this application excellent resistance to high radiation and high electric fields. Furthermore, obtaining the current temperature through an acoustic temperature model also provides extremely high detection accuracy.

[0024] Additional aspects and advantages of this application will be set forth in part in the description which follows, and will become apparent from the description or may be learned by practice of this application. Attached Figure Description

[0025] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the following description of the embodiments taken in conjunction with the accompanying drawings, wherein: Figure 1 A schematic flowchart of a detection method based on acoustic measurement of ion source grid temperature provided in an embodiment of this application; Figure 2 This is a schematic diagram of the assembly of a sampling component and a grid according to an embodiment of this application; Figure 3 for Figure 2 The front view; Figure 4 This is a top view of the acceleration grid; Figure 5 A schematic diagram of the assembly of the sampling component and the acceleration gate provided in another embodiment of this application; Figure 6 A schematic diagram of the structure of a detection module based on acoustic measurement of ion source grid temperature is provided in an embodiment of this application; Figure 7 This is a schematic diagram illustrating the operation of acquiring the first response time of an acceleration gate according to an embodiment of this application; Figure 8 This is a schematic diagram illustrating the operation of acquiring the second response time of an accelerating gate according to an embodiment of this application; Figure label: 1. Grid; 2. Sampling component; 3. Connecting pin; 4. Vibration isolation pad; 5. Acoustic wave transmission path; 6. Coverage area; 7. Test area; 11. Shielding grid; 12. Acceleration grid; 13. Deceleration grid; 21. Excitation source; 22. Receiver; 31. Mounting slot; 101. Connecting hole; 102. Ion beam aperture. Detailed Implementation

[0026] The embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the embodiments described below with reference to the accompanying drawings are exemplary descriptions for explaining the technical solutions of the embodiments of this application, and do not constitute a limitation on the technical solutions of the embodiments of this application.

[0027] Those skilled in the art will understand that, unless specifically stated otherwise, the terms "described" and "the" as used herein may also include plural forms. It should be further understood that the term "comprising" as used in the specification of this application means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude other features, information, data, steps, operations, elements, components, and / or combinations thereof supported by this art. The term "and / or" as used herein refers to at least one of the items defined by the term; for example, "A and / or B" can be implemented as "A," or as "B," or as "A and B."

[0028] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0029] This application mainly relates to a detection method and module for measuring the temperature of an ion source grid based on acoustic measurement. By constructing an acoustic wave transmission path at the outer edge of the grid, this application enables acoustic detection of the ion source grid temperature. Since the ion source grid temperature is currently obtained through an acoustic temperature model, it has high detection accuracy. Simultaneously, the acoustic wave transmission path is constructed through the outer edge of the grid, eliminating the need for direct contact with the middle part of the grid, thus exhibiting good resistance to high electric fields and high radiation, and is easy to implement.

[0030] The research and development approach of this application includes: utilizing the characteristic that sound waves mainly propagate through the solid metal phase in a vacuum environment, constructing an acoustic temperature model relating response time, grid propagation and scattering, and grid temperature, thereby enabling grid temperature detection via sound waves and improving the accuracy of grid temperature detection. Supported by the acoustic temperature model, a sound wave transmission path is constructed along the outer edge of the grid, allowing this application to detect each layer of a multi-layer grid ion source, suitable for comprehensive detection of multi-layer grids. Simultaneously, the start and end points of the sound wave transmission path are both located at the outer edge of the grid, effectively avoiding exposure of the sampling component to the high electric field and high radiation environment of the ion beam, making this application easy to implement and avoiding interference from high electric fields and high radiation, resulting in higher detection reliability.

[0031] The technical solution of this application and how it solves the above-mentioned technical problems are described in detail below with specific embodiments. It should be noted that the following embodiments can be referenced, borrowed, or combined with each other, and the same terms, similar features, and similar implementation steps in different embodiments will not be described again.

[0032] Optionally, this application combines Figure 2 , 3 Sections 4 and 5 describe the physical structure of a detection method for measuring the grid temperature of an ion source based on acoustic measurement. Among them, Figure 2 This is a schematic diagram of the assembly of the sampling component and the grid according to an embodiment of this application. Figure 3 for Figure 2 Front view, Figure 4 This is a top view of the acceleration gate 12.

[0033] First, the grid ion source refers to the device used to extract the ion beam by screening and accelerating ions through the grid 1. That is, the grid 1 is the original structure of the grid ion source. Since the technical concept of this application lies in detecting the operating temperature of the grid 1, only the grid 1 portion has been improved. Therefore, this application hides the other structures of the grid ion source, only showing the grid 1 portion for ease of explanation. It is understood that the other structures of the grid ion source, as well as the connection and interaction relationships between the grid 1 portion and other structures of the grid ion source, can be understood by referring to existing grid ion sources, such as high-energy radio frequency ion sources, Kaufman ion sources, or neutral beam injection ion sources, etc., and this application does not impose excessive limitations.

[0034] The grid 1 includes a shielding grid 11, an accelerating grid 12, and a decelerating grid 13 arranged sequentially. The shielding grid 11 is positioned close to the discharge chamber, followed by the accelerating grid 12, and finally the decelerating grid 13. Specifically, the accelerating grid 12 is located between the shielding grid 11 and the decelerating grid 13, and the decelerating grid 13 is positioned on the outermost layer of the discharge chamber. The shielding grid 11 prevents capacitive coupling between the grids and accelerates ions, allowing for the selection of ions that meet certain criteria. The accelerating grid 12 focuses and further accelerates ions. The decelerating grid 13 aids in ion focusing and protects the internal accelerating and decelerating grids 12 and 13. It is understood that the discharge chamber is a common structure in grid ion sources, used to provide an ionization environment to ionize the gas and generate plasma.

[0035] The shielding grid 11, accelerating grid 12, and decelerating grid 13 are each equipped with an ion beam aperture 102 located in the center and a connecting hole 101 located on the outer edge. The ion beam aperture 102 is used to screen ions that meet the criteria and accelerate the screened ions according to the bias electric field. The connecting hole 101 is used for connecting pins 3 to connect and align the ion beam apertures 102 of each grid layer 1.

[0036] Connecting pin 3 is used for connecting and aligning the shielding grid 11, the acceleration grid 12, and the deceleration grid 13.

[0037] therefore, Figures 2-4 The shielding grid 11, accelerating grid 12, decelerating grid 13, and connecting pin 3 shown are all existing structures of the grid ion source. To detect the working thermal load of the grid 1 in the grid ion source, it is necessary to monitor the working temperatures of the layered shielding grid 11, accelerating grid 12, and decelerating grid 13. This is to prevent problems such as arcing, erosion, deformation, and aperture mismatch caused by overloading of the grid 1, thereby ensuring beam quality and the service life of the grid 1. In particular, the accelerating grid 12, due to its ion acceleration function, often reaches temperatures of hundreds or even thousands of degrees Celsius. Real-time monitoring of the accelerating grid 12's working temperature plays a crucial role in preventing beam deviation, inter-grid short circuits, and overall system failure. However, the working surface of the accelerating grid 12 is blocked by the decelerating grid 13, making it virtually impossible to obtain the working temperature of the accelerating grid 12 through non-contact detection methods such as infrared detection. Contact-type thermocouple detection requires contact with the working surface of the accelerating grid 12 and the arrangement of electrical connection wires. This not only shields the ion beam aperture 102 of the accelerating grid 12 but also exposes the probe and electrical connection wires to ion beam irradiation and a high electric field environment, making it difficult to implement. Even if implemented, it cannot guarantee the long-term stable normal operation of the probe. Therefore, real-time and accurate detection of the working temperature of each layer of the grid 1, especially comprehensive detection of the accelerating grid 12, is crucial for the reliable operation of the grid ion source.

[0038] Furthermore, this application utilizes the existing grid 1 and connecting pin 3 of the grid ion source to set up a detection module based on acoustic measurement of the temperature of the ion source grid 1.

[0039] The detection module includes a control component and a sampling component 2. The control component is used to provide electronic control support, and the sampling component 2 is used to obtain the current response time of the acoustic temperature model.

[0040] The control component, configured as a microcontroller, MCU, or electrical control cabinet, is used to connect to sampling component 2 respectively. Please refer to [reference needed]. Figure 6 This is a schematic diagram of a detection module for measuring the temperature of an ion source grid 1 based on acoustic measurement, according to an embodiment of this application. The control component is equipped with an acoustic temperature model to determine the current temperature of the grid 1 based on the current response time obtained by each sampling component 2.

[0041] The sampling component 2 includes an excitation source 21 and a receiver 22. The excitation source 21 is used to generate sound waves that propagate through the grid 1, and the receiver 22 is used to respond to the sound waves and provide timing information of the response.

[0042] The excitation source 21 and receiver 22 are integrated into one unit through a piezoelectric structure. A piezoelectric structure refers to an electromechanical coupling effect possessed by certain anisotropic dielectrics. Piezoelectric structures can be used for the mutual conversion between mechanical energy and electrical energy, encompassing both direct and inverse piezoelectric effects. The direct piezoelectric effect is used to generate equal and opposite charges on the surface of a polarized piezoelectric material based on the mechanical stress applied to it, thereby achieving the conversion of sound waves into electrical signals. The inverse piezoelectric effect is used to induce periodic mechanical deformation in the material based on an alternating electric field applied to it, thereby achieving the conversion of electrical signals into sound waves. In other words, this application integrates the excitation source 21 and receiver 22 into one unit through a piezoelectric structure. The inverse piezoelectric effect enables the excitation source 21 to generate sound waves that propagate along the grid 1, thus exciting the receiver 22. The direct piezoelectric effect enables the receiver 22 to respond to the sound waves generated by it. It is understood that this application mainly utilizes the direct and inverse piezoelectric effects inherent in the piezoelectric structure itself, enabling the excitation source 21 and receiver 22 to multiplex the conversion structure between sound waves and electrical signals, reducing the size of the sampling component 2, and allowing it to be placed between each grid 1. In other words, any integrated structure that can realize the functions of both the exciter and receiver 22 can be used as the piezoelectric structure of this application.

[0043] Furthermore, the sampling components 2 of this application are evenly distributed in a ring along the central axis of the grid 1 and are disposed on the surface of the grid 1. Please refer to [reference needed]. Figure 2 and Figure 3 Meanwhile, since the sampling component 2 integrates the excitation source 21 and the receiver 22, any two sampling components 2 can form a combination of excitation source 21 and receiver 22. The line connecting any two sampling components 2 is the sound wave transmission path 5, which connects to the outer edge of the grid 1 and passes through the middle of the grid 1. It can be understood that when a sampling component 2 is used as an excitation source 21, its position is the excitation start point, and the other sampling component 2 paired with it is the receiver 22, meaning its position is the receiving end point. Conversely, when a sampling component 2 is used as a receiver 22, its position is the receiving end point, and the other sampling component 2 paired with it is the excitation source 21, meaning its position is the excitation start point. In other words, between any two sampling components 2, the path can be multiplexed through the interchange between the excitation start point and the receiving end point, forming two sound wave transmission paths 5 with opposite directions and overlapping paths.

[0044] Optionally, the sampling component 2 can achieve mechanical coupling with the surface of the grid 1 through methods such as metal contact, high-temperature ceramic pad, and interlocking.

[0045] Optionally, the sampling component 2 can also be integrated onto the surface of the gate 1 using circuit integration technology. That is, the sampling component 2 can use the surface of the gate 1 as a substrate to sequentially integrate piezoelectric structures, and the gate 1 can supply power to the sampling component 2. Circuit integration technology can reduce the size occupied by the sampling component 2 and also solve the wiring problem through the gate 1. It is understood that the electrical connection lines of the sampling component 2 can be built into the gate 1 or deposited on the surface of the gate 1. Furthermore, the electrical connection lines can be wired using independent wiring or using a bus and branch wiring method; this application does not impose excessive restrictions.

[0046] In some possible embodiments, please refer to Figure 5 This is a schematic diagram illustrating the assembly of the sampling component 2 and the acceleration grid 12 according to another embodiment. Since the sampling component 2, disposed on the surface of the grid 1, occupies the layered space of the grid 1, its size is limited by the size of the layered space of the grid 1. This application also provides another implementation of the sampling component 2, including: The mounting groove 31 is located in the middle of the connecting pin 3 and is accommodated in the connecting hole 101 of the acceleration grid 12 for connecting the sampling component 2. The sampling component 2 is accommodated in the mounting groove 31 and abuts against the inner wall of the connecting hole 101 of the grid 1. Simultaneously, this application also provides a vibration isolation pad 4, in which the sampling component 2 is partially embedded to prevent sound waves from causing interlayer interference through the connecting pin 3. Figure 5 The proposed implementation method solves the problem of limited installation of the sampling component 2, facilitates the modification of existing grid ion sources, and makes this application compatible with already manufactured grid ion sources. It is understood that due to the extremely short interlayer distance between each grid 1, the installation space for the sampling component 2 is very limited. When the sampling component 2 comes into contact with another grid 1, it is easily affected by other grids 1, leading to distorted detection results. Therefore, installing the sampling component 2 through the connecting pin 3 solves the problem of limited installation caused by the extremely short interlayer distance between each grid 1, and is suitable for the modification of existing grid ion sources.

[0047] In some embodiments, combined with Figures 2-6 Please refer to Figure 1 This is a schematic diagram of the operation for acquiring the first response time of the accelerating gate 12 according to an embodiment, which illustrates the detection method for the temperature of the ion source grid 1 based on acoustic measurement provided in this application.

[0048] The detection method for the temperature of the ion source grid 1 based on acoustic measurement provided in this application includes the following steps: This application first confirms the acoustic temperature model based on the relationship between the response time of sound wave propagation along grid 1 in a vacuum environment, grid propagation scattering, and grid 1 temperature: ; in, This refers to response time; This refers to scattering propagated through a grid. This refers to the temperature of grid 1; This refers to the common-mode drift between the sampling component and the grid; This refers to system noise.

[0049] According to the acoustic temperature model, the temperature rise of grid 1 can be calculated using the following formula: ; in, This refers to the temperature change of grid 1; , This refers to the temperature of the grid 1 to be solved. This refers to the known temperature of grid 1, including the initial temperature and the temperature obtained from the last measurement; It refers to changes over time. , This refers to the temperature of grid 1 being The time point of the time, This refers to the temperature of grid 1 being The time point in time. That is, the configuration. When the current response time is... This refers to the current temperature change of the grid 1 along the sound wave transmission path 5. This is the current temperature of grid 1.

[0050] It is understood that the grid 1 of this application is set in a vacuum environment, where sound waves cannot propagate. Therefore, the sound waves generated by the excitation source 21 of this application mainly propagate in the solid—the grid 1. The propagation speed of sound waves in a solid is related to the elastic modulus and density of the material, and the elastic modulus and density change with temperature. Therefore, the propagation speed of sound waves in a solid is temperature-dependent.

[0051] Comparative Example 1 In the prior art, the propagation speed of sound waves in solids and temperature exhibit the following relationship: .in, This refers to a temperature of The speed at which sound waves propagate in a solid; This refers to a temperature of The speed at which sound waves propagate in a solid; This refers to the temperature coefficient of a solid, which is generally negative. The temperature of grid 1 is calculated using the formula for the propagation of sound waves in a solid, while the distance between sampling components 2 is known (the distance between any two sampling components 2 can be obtained based on their positions on grid 1). ;in, This refers to the solid temperature being The time point of the time, This refers to the distance along the sound wave transmission path 5. That is... ;in, It means The temperature change of grid 1 over time; This refers to the temperature of grid 1 from arrive The time interval, , This refers to the temperature of grid 1 being The time point of the time, It means The temperature change of grid 1 over time. That is, Comparative Example 1 can obtain the temperature change of the solid using the above formula.

[0052] Based on the comparison between this application and Comparative Example 1, this application does not utilize the propagation speed and temperature changes of sound waves in a solid, but rather relies on scattering propagation through a grid. Constructing an acoustic temperature model. The technical concept of this application lies in: propagating scattering through a grid. This invention replaces the existing acoustic wave solid-phase propagation formula to characterize the acoustic wave propagation characteristics of a grid 1 with numerous ion beam apertures 102 in the center. This allows the acoustic temperature model to accurately characterize the relationship between the response time and temperature of the grid 1 when acoustic waves propagate along it in a vacuum environment, thus improving the accuracy of temperature detection in the working part of the grid 1 under vacuum conditions. It is understood that due to the presence of numerous ion beam apertures 102, reflection and scattering occur between the aperture walls of each ion beam, and the supporting structures of each aperture wall also generate reflections. Therefore, the acoustic wave propagation speed of the grid 1 is not only constrained by the elastic model and density but also affected by the reflection and scattering of the ion beam apertures 102. If the existing formula for acoustic wave propagation along the solid phase is still used, the temperature detection of the grid 1 will deviate. Therefore, this application characterizes the structural scattering characteristics of the grid 1 with numerous ion beam apertures 102 in the center through grid propagation scattering, thereby improving the accuracy of acoustic temperature detection of the grid 1.

[0053] Furthermore, grid propagation scattering This refers to the parameter characterizing the diffusion of sound waves off their original path when propagating through the aperture array of ion beam apertures 102 in the grid 1. It can be understood that because the grid 1 has an array of ion beam apertures 102 in its center, the sound waves no longer propagate in a straight line within the grid 1, but instead form multipath propagation. That is, grid propagation scattering is essentially a coupled scattering of multiple scattering, Bragg scattering, and anisotropic equivalent propagation. Multiple scattering refers to the sound waves being scattered multiple times within the aperture array, forming complex multipath propagation; Bragg scattering refers to strong-frequency scattering where the wavelength of the sound wave is significantly suppressed or strongly reflected in certain frequency bands under certain conditions due to differences in the aperture array period; anisotropic equivalent propagation refers to the propagation of sound wave phase velocity changes caused by differences in aperture array quality and stiffness, commonly seen after aperture array deformation, erosion, and arcing.

[0054] Furthermore, due to grid propagation scattering Since the parameters are not known, this application also uses the following steps to analyze the scattering propagated by the grid. To solve, including: Preset sampling temperature ,For example: At the preset sampling temperature Next, confirm the sampling response time of the sound wave transmission path 5. Then, based on the acoustic temperature model Scattering of the grid Solving for the scattering of the grid is performed. It is known. It is understood that this application can pre-set the factory parameters for grid propagation and scattering in the acoustic temperature model based on the parameters of the newly constructed grid 1. This allows the application to be used during the deployment process. Furthermore, the control component of this application can also have a built-in calibration program, which is activated before each power-on or after a preset interval, to propagate scattering through the grid. The solution steps for grid propagation scattering Calibration is performed to ensure the detection accuracy of the grid ion source during use. Because the grid 1 undergoes deformation and erosion of the ion beam aperture 102 during use, the propagation and scattering of the grid are affected. Compared to unused grid 1, grid propagation scattering Changes occur, affecting the detection accuracy of the acoustic temperature model. Therefore, this application can ensure the propagation of scattering through the grid via a calibration procedure. This improves the preparedness of the application and thus enhances its reliability.

[0055] Furthermore, based on the established acoustic temperature model, at least one acoustic wave transmission path 5 passing through the middle of the grid 1 is constructed according to the outer edge of the grid 1, i.e., an excitation start point and a receiving end point are respectively set on both sides of the acoustic wave transmission path 5. Since the sampling component 2 of this application integrates the excitation source 21 and the receiver 22 through a piezoelectric structure, an acoustic wave transmission path 5 is formed between any two sampling components 2. The propagation transmission path is constructed by using the setting position of one sampling component 2 as the excitation start point and the setting position of the other sampling component 2 as the receiving end point. Then, by generating an acoustic wave excitation through one sampling component 2 and responding to the acoustic wave excitation through the other sampling component 2, the current response time of the acoustic wave transmission path 5 can be obtained.

[0056] Alternatively, please refer to Figure 7 and Figure 8 , Figure 7 This is a schematic diagram illustrating the operation of acquiring the first response time of the acceleration gate 12 according to one embodiment. Figure 8 This is a schematic diagram illustrating the operation of acquiring the second response time of the acceleration gate 12 according to an embodiment of this application. The current response time can be acquired in the following manner to form a response time matrix.

[0057] Please refer to Figure 7 This application forms a sound wave transmission path 5 by using two opposing sampling components 2 symmetrically arranged along the central axis of the grid 1. For example, this application arranges 30 sets of sampling components 2 in a ring along the outer edge of the grid 1, and according to the sound wave transmission path 5 formed by the opposing components, according to... Figure 7 The arrangement allows for the acquisition of 15 acoustic wave transmission paths 5. Furthermore, due to the integration of the excitation source 21 and receiver 22 in the sampling component 2, the excitation start point and receiving end point can be interchanged, effectively allowing for the acquisition of 30 acoustic wave transmission paths 5. Therefore, the grid propagation scattering of this application... A grid-based propagation scattering matrix can be formed. , It refers to the first Using sampling component 2 as the excitation starting point, and the first sampling component 2 as the excitation starting point. Each sampling component 2 receives the grid propagation scattering at the endpoint, thereby enabling the grid propagation scattering matrix to be processed. Current temperature matrix of grid 1 Solve the problem. It refers to the first Using the second sampling component as the excitation starting point, and the first sampling component as the excitation starting point. Each sampling component 2 receives the current temperature change at the endpoint, thereby enabling the monitoring of the current temperature. Solve for it.

[0058] Optionally, this application can also improve the detection accuracy of the current temperature by simultaneously detecting the opposite directions of the sound wave transmission path 5 and calculating the current temperature of the sound wave transmission path 5 by averaging. For example: .

[0059] Optionally, with Figure 7 The bottommost sampling component 2 serves as the excitation source 21, and the topmost sampling component 2 serves as the receiver 22, forming a sound wave transmission path 5 between them, connected by a dotted line. This application defines the area covered by the sound wave transmission path 5 as the coverage area 6, as indicated by the markings within the dotted line area. The area not covered by the sound wave transmission path 5 is defined as the test area 7, as indicated by the markings outside the dotted line area. If two opposing sampling components 2 are used to construct the sound wave transmission path 5, the angled area between the two sound wave transmission paths 5 is the test area 7. This application can use the average of the known current temperatures of two adjacent sound wave transmission paths 5 as the current temperature of the test area 7. Thus, by displaying the current temperatures of the coverage area 6 and the test area 7 in a plane, the current temperature distribution is formed, achieving comprehensive monitoring of the current temperature of the working surface of the grid 1. It is understood that the denser the sampling components 2 are, the smaller the test area 7 is, and the higher the monitoring accuracy. However, the denser the sampling components 2 are, the greater the load on the control components. This application can balance detection accuracy and workload by optimizing the ratio of the coverage area 6 and the test area 7 of the sampling component 2. For example, the ratio of the coverage area 6 to the test area 7 can be configured as 9:1.

[0060] Alternatively, please refer to Figure 8 Using the bottommost sampling component 2 as the excitation source 21 and the other sampling components 2 as receivers 22, a signal can be generated. The coverage area 6 of the non-opposite acoustic wave transmission path 5 will be offset, thus affecting the acoustic wave transmission path 5. Figure 7 The test region 7 in the middle is complemented, which further reduces the size of the test region 7. Therefore, this application can be achieved by... Figure 7 and Figure 8 The combination of the first and second response times forms the current response time matrix, thereby reducing the proportion of the area to be measured 7 and further improving the detection accuracy of the current temperature of the grid 1.

[0061] Therefore, the response time matrix of this application can be a time matrix formed by each first response time and / or each second response time, thereby realizing comprehensive detection of the temperature of the grid 1.

[0062] refer to Figure 7 and Figure 8 The process of establishing the acoustic propagation model in this application is as follows: First, define the frequency domain transfer function: ; in, It refers to the first The sampling component 2 is the excitation starting point and the first sampling component 2 is used as the excitation starting point. Each sampling component 2 is the frequency domain transfer function of the acoustic wave transmission path 55 at the receiving endpoint; This refers to the acoustic signal observed along the acoustic transmission path 5. This refers to the acoustic wave signal generated at the excitation starting point. It is understandable that, for the sake of convenience in explaining the acoustic propagation model, the following formulas will all use the first... The sampling component 2 is the excitation starting point and the first sampling component 2 is used as the excitation starting point. Sampling component 2 serves as an example for the acoustic wave transmission path 5 at the receiving endpoint, referred to as the first sampling component 2. 5. Sound wave transmission path.

[0063] Therefore, the first Phase of the acoustic signal in acoustic transmission path 5 That is, the first Group delay of acoustic wave propagation path 5 .

[0064] At the same time, by cross-correlation delay along the first The transmission time of acoustic wave transmission path 5 is defined as follows: ; in, It refers to the first The transmission time of acoustic wave transmission path 5; This refers to the speed at which the sound wave travels along the sound wave transmission path 5. This refers to the reference function, which characterizes the first function at the initial temperature. The current response time function of acoustic wave transmission path 5, initially The function can obtain the sampled temperature based on a preset temperature, for example: when At that time, obtain and the Physical length of the acoustic wave transmission path 5 It can be clearly stated that That is, the first The straight-line distance from the excitation start point to the receiving end point of the acoustic wave transmission path 5.

[0065] Furthermore, according to The expression, through equivalent integration using the equivalent sound velocity field and equivalent length, is the th... The time function of the acoustic wave transmission path 5 is: ; ; in, It can be obtained through the frequency domain transfer function. It refers to the first The equivalent sound velocity field of sound wave transmission path 5, that is, the equivalent propagation speed of sound waves calculated by grid 1 after coupled scattering. It refers to the equivalent propagation path, that is, the effective propagation path of the sound wave after the coupling scattering of the grid 1.

[0066] Therefore, ignoring higher-order terms, the presupposed... The relationship between the current temperature change and the current response time can be linearized as follows: ; in, It refers to the first The temperature-sensitive core of the acoustic wave transmission path 5 can be calculated based on the material temperature coefficient and frequency band weighting. It refers to the first The current response time of acoustic wave transmission path 5; It refers to the first The co-film drift of the acoustic wave transmission path 5 and the grid.

[0067] Therefore, according to the first The linear formula for each sound wave transmission path 5 is generalized to apply to the current response time of each sound wave transmission path 5. The extracted expression is as follows: .in, It refers to the first The current response time of acoustic wave transmission path 5; This refers to the total number of sound wave transmission paths 5. Simultaneously, the surface of the grid 1 is divided into several grid cells, and the current temperature change of each grid cell is expressed as... ;x refers to the first The current temperature change of each grid cell. Furthermore, this application addresses the temperature change of each grid cell. 5 and the sound wave transmission path Solving for grid 1 with 1 grid cell, a linear model is established, which is: ; in, This refers to the sound wave transmission and scattering matrix. ; used to indicate The sound wave transmission path 5 passes through The equivalent scattering of each grid cell. That is... It is a single sound wave transmission model Matrixing, used for having 5 and the sound wave transmission path The current temperature distribution of grid 1 in each grid cell is used to solve the problem. It is understandable that when grid 1 has only one acoustic wave transmission path 5... Degenerate into .

[0068] Optionally, The connections between the sampling components can be used as nominal acoustic wave transmission paths 5, and each nominal acoustic wave transmission path 5 can be traversed... The traversal length of each grid cell is determined, and the traversed grid cells are weighted according to the amplitude or frequency band distribution of the phase under the frequency domain transfer function, thus representing the acoustic wave transmission and scattering matrix of grid 1. Simultaneously, Data-driven calibration can be used by presetting multiple sampling temperatures. To acquire and achieve overall scale and directional correction.

[0069] Furthermore, this application also regularizes the acoustic wave transmission scattering matrix. Optimizations include: ; in, This refers to weighting based on the channel signal-to-noise ratio; This refers to the discrete gradient / Laplacian operator; This refers to the regularity strength.

[0070] or, ; in, It refers to the total change in x.

[0071] Optionally, for common-mode drift between the sampling component and the grid 1 Because of the assembly contact between sampling component 2 and grid 1, and the piezoelectric response changes caused by temperature variations in the internal structure, the received response may shift or the phase may shift over time. To correct this drift error, this application eliminates common-mode drift by differentially dividing the current response time that has the same excitation start point or the same receiving end point. This includes: ; in, and This refers to different current response times that have the same excitation start point or the same receiving end point. By differentiating between the two, common-mode drift can be controlled. This offsets the effect, thereby improving the accuracy of current temperature detection.

[0072] Optionally, this application further generates excitation through different excitation starting points or through the same excitation starting point at a preset time interval, and confirms the first time matrix and the second time matrix of the response time matrix respectively; then, based on the first time matrix, the second time matrix, and the acoustic temperature model, confirms the first propagation scattering and the second propagation scattering respectively; finally, based on the first propagation scattering and the second propagation scattering, confirms the system noise of the grid propagation scattering. It is understood that in some possible embodiments, the grid 1 is mechanically coupled to the grid 2 via attachment or connection. Due to factors such as vibration of the connection structure and different vacuum levels, the acoustic temperature model may contain systematic errors. Therefore, this application can correct grid propagation scattering. At the same time, system noise This verification process eliminates systematic errors in this application and further improves the detection accuracy of this application.

[0073] Alternatively, this application can be based on Figure 7 The first and second time matrices are obtained in a manner that, for example, firstly, the first time matrix is ​​obtained at a preset temperature by opposing excitation, and then, after a certain interval, the second time matrix is ​​obtained again at the same preset temperature.

[0074] Alternatively, this application may also be based on Figure 8 The first and second time matrices are obtained in the following ways: for example, the bottom sampling component 2 is used as the excitation source 21, and the other sampling components 2 are used to obtain the first response time of the sampling component 2 to obtain the first time matrix; then, the leftmost sample is used as the excitation source 21, and the other sampling components 2 are used to obtain the second response time of the sampling component 2 to obtain the second time matrix.

[0075] Alternatively, this application can be based on Figure 7 and Figure 8 The combination of these elements is used to obtain the first and second time matrices through interval sampling.

[0076] In summary, this application provides a detection method and module for measuring the temperature of an ion source grid 1 based on acoustic measurement. The working principle of this application is as follows: After the grid ion source is powered on, the initial temperature of each grid 1 is first determined. Then, through the control component, multiple acoustic wave transmission paths 5 are constructed according to preset acoustic wave transmission path 5 modes, such as: opposing excitation mode, single excitation and other receiving mode, and a mixed excitation mode formed by the first two. The current response time of each acoustic wave transmission path 5 is then obtained and input into the acoustic temperature model for solution, thereby obtaining the current temperature of each acoustic wave transmission path 5. Then, based on the coverage area 6 of the acoustic wave transmission path 5, the test area 7 is solved, thus forming the current temperature distribution of the working surface of the grid 1. Since this application characterizes the solid-phase propagation parameters of the grid 1 in a vacuum environment through grid propagation scattering, it can confirm the relationship between the response time and the current temperature of the grid 1 through the acoustic temperature model, thereby inverting the response time to obtain the current temperature of the grid 1, improving the accuracy of grid 1 temperature detection. Meanwhile, this application constructs an acoustic wave transmission path 5 based on the outer edge of the grid 1, which does not require direct contact with the working surface of the grid 1, thus avoiding the influence of high radiation and high electric field. This makes the application highly adaptable to the grid ion source and easy to modify and implement.

[0077] Those skilled in the art will understand that the steps, measures, and solutions in the various operations, methods, and processes discussed in this application can be alternated, modified, combined, or deleted. Furthermore, other steps, measures, and solutions in the various operations, methods, and processes discussed in this application can also be alternated, modified, rearranged, decomposed, combined, or deleted. Furthermore, steps, measures, and solutions in related technologies that are similar to those disclosed in this application can also be alternated, modified, rearranged, decomposed, combined, or deleted.

[0078] In the description of this application, the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate directions or positional relationships based on the exemplary directions or positional relationships shown in the accompanying drawings. They are used to facilitate the description or simplification of the embodiments of this application and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0079] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0080] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0081] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0082] The above description is only a partial implementation of this application. It should be noted that for those skilled in the art, other similar implementation methods based on the technical concept of this application, without departing from the technical concept of this application, also fall within the protection scope of the embodiments of this application.

Claims

1. A detection method based on acoustic measurement of ion source grid temperature, characterized in that, include: Based on the relationship between the response time of sound wave propagation along the grid in a vacuum environment, grid propagation scattering, and grid temperature, the acoustic temperature model is confirmed. Construct at least one acoustic wave transmission path passing through the middle of the grid based on the outer edge of the grid, and confirm the current response time of the acoustic wave transmission path; The current temperature of the grid is determined based on the current response time and the acoustic temperature model.

2. The detection method based on acoustic measurement of ion source grid temperature as described in claim 1, characterized in that, Before obtaining the current temperature, the grid propagation scattering is corrected, including: The sampling temperature is preset, and the sampling response time of the sound wave transmission path is confirmed. Based on the acoustic temperature model, sampling temperature, and sampling response time, the grid propagation scattering used for correction is confirmed.

3. The detection method based on acoustic measurement of ion source grid temperature as described in claim 1 or 2, characterized in that, The excitation source and receiver of the sound wave transmission path are integrated to make the excitation start point and the receiving end point of the sound wave transmission path reciprocal.

4. The detection method based on acoustic measurement of ion source grid temperature as described in claim 3, characterized in that, The excitation start point and the receiving end point are arranged in a ring array on the outer edge of the grid.

5. The detection method based on acoustic measurement of ion source grid temperature as described in claim 4, characterized in that, Also includes: Generate an incentive by specifying any of the aforementioned incentive starting points, and obtain the first response time of the other aforementioned receiving endpoints; And / or, generate an excitation through each of the said excitation starting points to obtain the second response time of the opposite receiving endpoint; A response time matrix is ​​formed based on each of the first response times and / or each of the second response times; The current temperature is confirmed based on the response time matrix and the acoustic temperature model.

6. The detection method based on acoustic measurement of ion source grid temperature as described in claim 5, characterized in that, Also includes: The first time matrix and the second time matrix of the response time matrix are confirmed respectively by generating excitation through different excitation starting points or by generating excitation through the same excitation starting point at a preset time interval. Based on the first time matrix, the second time matrix, and the acoustic temperature model, the first propagation scattering and the second propagation scattering are confirmed respectively; The system noise of the grid propagation scattering is confirmed based on the first and second propagation scattering.

7. The detection method based on acoustic measurement of ion source grid temperature as described in claim 5, characterized in that, Also includes: Based on the coverage status of the grid by the sound wave transmission path, the coverage area and the area to be tested formed by each sound wave transmission path on the grid are identified; Based on the current temperature of the covered area, the current temperature of the area to be measured is determined, and the current temperature distribution of the grid is formed.

8. The detection method based on acoustic measurement of ion source grid temperature as described in claim 3, characterized in that, The excitation source and receiver are integrated into one unit using a piezoelectric structure.

9. The detection method based on acoustic measurement of ion source grid temperature as described in claim 8, characterized in that, The piezoelectric structure is integrated into the grid using circuit integration technology.

10. A detection module based on acoustic measurement of ion source grid temperature, characterized in that, The detection module is used to assemble the grid, and the detection module includes: A control component is configured to execute a detection method based on acoustic measurement of ion source grid temperature to confirm the current temperature of the grid; the detection method employs the detection method based on acoustic measurement of ion source grid temperature as described in any one of claims 1 to 9. A sampling component is used to construct at least one acoustic wave transmission path passing through the middle of the grid based on the outer edge of the grid, in response to the instructions of the control component. The control component is connected to the sampling component.

Images