Continuous purification driving system and method for high-temperature-resistant flexible thermal insulation material

Abstract

The application provides a continuous purification driving system and method for high-temperature-resistant flexible thermal insulation materials, and belongs to the field of purification processing of third-generation semiconductor thermal insulation materials; solves the problem of low purification efficiency of existing purification devices; the system comprises a feeding system, a purification system and a discharging system which are sequentially connected; a first driving device is arranged in the purification system and is used for winding the flexible thermal insulation material; a second driving device is arranged in the feeding system; a first driving shaft is detachably arranged on the second driving device; a third driving device is arranged in the discharging system; a second driving shaft is detachably arranged on the third driving device; the first driving device, the second driving device and the third driving device are matched with each other, so that the flexible thermal insulation material to be purified is stored on the third driving device after being purified from the feeding system through the purification system; and the application is applied to a thermal insulation material purification system.

Description

Technical Field

[0001] This invention relates to the field of purification and processing technology for third-generation semiconductor insulation materials, specifically to a continuous purification drive system and method for high-temperature resistant flexible insulation materials. Background Technology

[0002] High-temperature resistant flexible insulation materials are important insulation materials in the third-generation semiconductor industry. They are characterized by high purity, lightweight, good thermal insulation, oxidation and corrosion resistance, and high-temperature resistance, and are widely used in related equipment in the third-generation semiconductor industry.

[0003] The high purity of high-temperature resistant flexible insulation materials is achieved through purification equipment. Currently, the purification of high-temperature resistant flexible insulation materials mainly uses intermittent purification equipment. During purification, the high-temperature resistant flexible insulation material is rolled up and placed inside the intermittent purification equipment. This purification method has the following drawbacks: 1. Due to the low thermal conductivity and good insulation effect of the insulation material, the core of the material heats up slowly.

[0004] 2. Rolled storage increases the path for removing impurities from the material, requiring impurities in the core to travel a longer radius to be discharged from the outside of the material, thus affecting the purification effect.

[0005] 3. Intermittent purification processes require multiple steps such as heating, purification, cooling, and discharge, resulting in low overall efficiency and high purification costs. Summary of the Invention

[0006] To address the technical problem of low purification efficiency in existing purification devices, this invention proposes a continuous purification drive system and method using high-temperature resistant flexible insulation materials.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is: a continuous purification drive system for high-temperature resistant flexible insulation material, comprising a feeding system, a purification system and a discharging system connected in sequence; The purification system is equipped with a first driving device, which is used to wind flexible insulation material. The flexible insulation material in the purification system winds around the guide shafts installed on the first driving device in a wavy path. The feeding system is equipped with a second drive device, on which a first drive shaft is detachably mounted, and a flexible heat-insulating material to be purified is wound around the first drive shaft. The discharge system is equipped with a third drive device, and a second drive shaft is detachably installed on the third drive device. The second drive shaft is used to collect the purified flexible insulation material. One end of the flexible insulation material in the purification system is connected to one end of the flexible insulation material to be purified on the first drive shaft, and the other end of the flexible insulation material in the purification system is fixed on the second drive shaft. The first drive unit, the second drive unit, and the third drive unit work together to purify the flexible thermal insulation material to be purified by the purification system and store it on the second drive shaft.

[0008] Furthermore, a first gate valve and a second air inlet valve are installed on the vacuum pipeline connecting the feeding system and the purification system. The first gate valve is located between the feeding system and the second air inlet valve. The first gate valve and the second air inlet valve cooperate with each other to control the flow of gas between the feeding system and the purification system. A second gate valve and a third inlet valve are installed on the vacuum pipeline connecting the purification system and the discharge system. The second gate valve is located between the discharge system and the third inlet valve. The second gate valve and the third inlet valve work together to control the flow of gas between the purification system and the discharge system.

[0009] Furthermore, the purification system has multiple air extraction ports, each corresponding to a first driving device located in the gas flow direction within the purification system.

[0010] Furthermore, the first drive device includes multiple upper-level booms fixedly connected to the top of the purification system and multiple lower-level support arms fixedly connected to the bottom of the purification system; A guide shaft is movably connected between every two oppositely arranged upper booms and between every two oppositely arranged lower support booms; multiple guide shafts on the upper booms are located in the same plane, multiple guide shafts on the lower support booms are located in the same plane, and all guide shafts are arranged in parallel. Each of the left and right ends of the guide shaft on the upper boom is coupled with a set of drive motors, and each of the left and right ends of the guide shaft on the lower support boom is also coupled with a set of drive motors. The two sets of drive motors on the left and right ends work together to drive the guide shaft by switching alternately.

[0011] Furthermore, a purified flexible insulation material is provided between the flexible insulation material to be purified on the first drive shaft and the first drive shaft. A purified flexible insulation material is also provided on the side of the flexible insulation material to be purified on the first drive shaft away from the first drive shaft. The purified flexible insulation material on the side away from the first drive shaft is pre-wound onto the guide shaft of the first drive device when the purification operation is performed for the first time. The flexible insulation material to be purified and the purified flexible insulation material are fixedly connected by carbon rope; The lengths of the flexible insulation material to be purified on the first drive shaft and the purified flexible insulation material between the first drive shaft, the flexible insulation material to be purified on the first drive shaft and the purified flexible insulation material on the side away from the first drive shaft are all greater than the total length of the continuous purification drive system path.

[0012] Furthermore, a purified flexible insulation material is also provided between the flexible insulation material to be purified and the first drive shaft, and the flexible insulation material to be purified and the purified flexible insulation material are fixedly connected by carbon rope. The length of the flexible insulation material to be purified on the first drive shaft and the length of the purified flexible insulation material between the first drive shaft are greater than the total length of the continuous purification drive system path.

[0013] Furthermore, the connection points between the feeding system and the purification system, the connection points between the purification system and the discharge system, and the side of each air extraction port on the purification system away from the first driving device are all connected to the vacuum system via vacuum pipes. Gate valves are installed at the connection points between the feeding system and the purification system, the connection points between the purification system and the discharge system, and on the vacuum pipes connecting each air extraction port of the purification system to the vacuum system, to control the opening and closing of the air path.

[0014] Furthermore, both the feeding and discharging systems are equipped with rangefinders; The distance measuring device installed on the feeding system is used to measure the distance between itself and the first drive shaft or the outer surface of the flexible insulation material covering the first drive shaft; The distance measuring device installed on the discharge system is used to measure the distance between itself and the second drive shaft or the outer surface of the flexible insulation material covering the second drive shaft.

[0015] Furthermore, a tension controller is installed at the outlet of the purified flexible insulation material in the discharge system to monitor in real time the tension value borne by the flexible insulation material in the continuous purification drive system during the transmission process.

[0016] A continuous purification method for high-temperature resistant flexible thermal insulation materials, characterized by using the aforementioned system, includes the following steps: Step S1: Install the first drive shaft covered with the flexible insulation material to be purified on the second drive device in the feeding system, and connect one end of the purified flexible insulation material to one end of the flexible insulation material to be purified. Then, fix the other end of the purified flexible insulation material on the second drive shaft of the discharge system after passing through each guide shaft in the purification system in sequence. Step S2: Perform vacuuming and leak detection operations on the feeding system, purification system and discharge system in sequence. When the vacuum degree and leakage rate of the feeding system, purification system and discharge system all reach the preset value, perform heating operation. When the temperature in the purification system reaches the preset value, perform purification operation. Step S3: Drive the first drive device, the second drive device and the third drive device to operate, transfer the flexible insulation material to be purified on the second drive device to the purification system to perform the purification operation, and wind the purified flexible insulation material onto the second drive shaft. Step S4: Repeat step S3 until the first drive shaft is no longer covered with flexible insulation material, then control the first drive device, the second drive device and the third drive device to stop operating and perform a material replenishment operation. When the thickness of the purified flexible insulation material wrapped on the second drive shaft in the discharge system reaches the preset thickness value, the first drive device, the second drive device and the third drive device are controlled to stop operating and the material picking operation is performed. Step S5: Repeat steps S3-S4 above until the entire purification process is completed.

[0017] The advantages of this invention over the prior art are as follows: 1. The first driving device, the second driving device, and the third driving device of the present invention cooperate with each other to realize the continuous production of flexible thermal insulation materials. Moreover, the material replenishment and unloading operations can be completed without cooling during the purification process, which solves the problem of low production efficiency of existing intermittent purification equipment, effectively improves the purification efficiency of thermal insulation materials, and reduces purification costs.

[0018] 2. The arrangement of the first driving device structure in the purification device of the present invention makes the flexible insulation material wrapped around the first driving device wavy, which saves purification space and reduces the discharge path of impurities in the flexible insulation material to be purified. The maximum discharge path of impurities is half the thickness of the flexible insulation material to be purified, which effectively improves the purification efficiency. Attached Figure Description

[0019] The present invention will be further described below with reference to the accompanying drawings: Figure 1 This is the front view of the system of the present invention; Figure 2 This is a schematic diagram of the structure of the first driving device of the present invention; Figure 3 for Figure 2 An enlarged schematic diagram of part A in the middle; Figure 4 This is a left view of the first driving device of the present invention; Figure 5 This is a top view of the first driving device of the present invention; Figure 6 This is a schematic diagram of the structure of the pressure plate and the first drive shaft of the present invention in cooperation. Figure 7 This is a schematic diagram of the structure of the substrate of the present invention; Figure 8 This is a schematic diagram of the feeding assembly of the present invention; Figure 9 This is a schematic diagram of the structure of the rangefinder and the first drive shaft working together. Figure 10 This is a schematic diagram of the structure of the flexible thermal insulation material in the system of the present invention; In the diagram: 1 is the physical purification system, 2 is the chemical purification system, 3 is the upper boom, 4 is the lower support boom, 5 is the first guide shaft, 6 is the second guide shaft, 7 is the synchronous belt, 8 is the sprocket, 9 is the first drive motor, 10 is the second drive motor, 11 is the first rotary motor, 12 is the first lifting motor, 13 is the first magnetofluid assembly, 14 is the first insulation assembly, 15 is the carbon rope, 16 is the second rotary motor, 17 is the second lifting motor, 18 is the second magnetofluid assembly, 19 is the second insulation assembly, 20 is the coupling, 21 is the connecting flange, 22 is the exhaust port, 23 is the heater, 24 is the insulation felt, 25 is the upper feed bin, 26 is the lower feed bin, 27 is the third 28 is the fourth drive motor, 29 is the first drive shaft, 30 is the first intake valve, 31 is the second intake valve, 32 is the third intake valve, 33 is the gate valve, 34 is the first gate valve, 35 is the second gate valve, 36 is the vacuum system, 37 is the rangefinder, 38 is the vacuum gauge, 39 is the observation port, 40 is the tension controller, 41 is the PLC controller, 42 is the heating module, 43 is the human-machine interaction platform, 44 is the pressure plate, 45 is the purified flexible insulation material, 46 is the flexible insulation material to be purified, 47 is the vacuum pipeline, 48 is the discharge system, 49 is the temperature detection device, 50 is the flexible insulation material, 51 is the conveyor belt, and 52 is the fourth intake valve. Detailed Implementation

[0020] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate relative orientations or positional relationships and are used only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0021] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable arrangement, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0022] like Figures 1 to 10 As shown, the present invention provides a continuous purification drive system for high-temperature resistant flexible insulation materials, including a feeding system, a purification system and a discharging system 48 connected in sequence; The purification system includes a furnace body, and a first driving device is installed inside the furnace body. The first driving device is used to wind flexible insulation material 50. The flexible insulation material 50 inside the furnace body winds around each guide shaft installed on the first driving device in a wave-shaped path.

[0023] Specifically, the first driving device includes multiple upper-level lifting arms 3 fixedly connected to the top of the furnace body and multiple lower-level support arms 4 fixedly connected to the bottom of the furnace body. A guide shaft is movably connected between every two opposing upper-level lifting arms 3 and between every two opposing lower-level support arms 4. The multiple guide shafts connected to the upper-level lifting arms 3 are located in the same plane and are situated in the upper layer of the first driving device. The multiple guide shafts connected to the lower-level support arms 4 are also located in the same plane and are situated in the lower layer of the first driving device. All guide shafts in the upper and lower layers are arranged parallel to each other. A set of drive motors is coupled to each end of the guide shafts on the upper-level lifting arms 3; these drive motors are referred to as first drive motors 9. A set of drive motors is also coupled to each end of the guide shafts on the lower-level support arms; these drive motors are referred to as second drive motors 10. The two sets of drive motors at the left and right ends cooperate to drive the guide shafts by alternating switching. For ease of description, the guide shaft located in the upper layer of the first driving device is referred to as the first guide shaft 5, and the guide shaft located in the lower layer of the first driving device is referred to as the second guide shaft 6.

[0024] More specifically, the upper boom 3 has a first through hole at the end away from the top of the furnace body, and a first guide shaft 5 is fitted between each pair of opposite upper booms 3 with the first through hole; the first guide shaft 5 can rotate within the first through hole along its own geometric central axis. A set of first drive motors 9 are coupled to the left and right ends of one of the first guide shafts 5.

[0025] The structure of the first drive motor 9 is the same as that of the second drive motor 10. A second through hole is provided at the end of the lower support arm 4 away from the bottom of the furnace body. A second guide shaft 6 is fitted with each of the two oppositely arranged lower support arms 4 through holes. The second guide shaft 6 can rotate along its own geometric center axis within the second through hole. A set of second drive motors 10 is coupled to each of the left and right ends of one of the second guide shafts 6.

[0026] Multiple first guide shafts 5 are located in the same plane, with each pair of first guide shafts 5 arranged in parallel. Adjacent first guide shafts 5 are connected by a synchronous belt 7, and a sprocket 8 connects each first guide shaft 5 to its connected synchronous belt 7. Multiple second guide shafts 6 are located in the same plane, with each pair of second guide shafts 6 arranged in parallel. Adjacent second guide shafts 6 are connected by a synchronous belt 7, and a sprocket 8 connects each second guide shaft 6 to its connected synchronous belt 7. The first guide shafts 5 and second guide shafts 6 are arranged in parallel, and the multiple first guide shafts 5 and multiple second guide shafts 6 are staggered, meaning that a second guide shaft 6 is placed in the middle of every two first guide shafts 5, so that the flexible insulation material 50 inside the furnace forms a wave shape as it passes through each guide shaft from the feeding system end to the discharging system 48 end. In this embodiment, a second guide shaft 6 is placed between every two first guide shafts 5 at an equidistant position.

[0027] Two adjacent first guide shafts 5 are connected by a sprocket 8 and a synchronous belt 7, so that each first guide shaft 5 can be actively driven by a set of drive motors; two adjacent second guide shafts 6 are connected by a sprocket 8 and a synchronous belt 7, so that each second guide shaft 6 can be actively driven by a set of drive motors.

[0028] In one embodiment, eight upper-level lifting arms 3 are fixedly connected to the top of the furnace body, with each pair of upper-level lifting arms 3 forming a group. Each group of upper-level lifting arms 3 is fitted with a first guide shaft 5 with a gap. Six lower-level support arms 4 are fixedly connected to the bottom of the furnace body, with each pair of lower-level support arms 4 forming a group. Each group of lower-level support arms 4 is fitted with a second guide shaft 6 with a gap. The first guide shaft 5 and the second guide shaft 6 cooperate with each other to make the flexible insulation material 50 inside the furnace body form three consecutive "V" shapes. The two ends of the first guide shaft 5 located in the middle position (i.e., the second or third first guide shaft 5) are respectively coupled to the output shaft of a first drive motor 9; the two ends of the second guide shaft 6 located in the middle position (i.e., the second second guide shaft 6) are respectively coupled to the output shaft of a second drive motor 10.

[0029] Both ends of the first guide shaft 5, coupled to the output shaft of the first drive motor 9, are fixedly connected to the first insulation component 14 after passing through the first through hole. The end of the coupling 20 on the first insulation component 14 away from the first guide shaft 5 is fixedly connected to the rotating shaft of the first magnetic fluid component 13. The rotating shaft of the first magnetic fluid component 13 is clearance-fitted with the connection port reserved on the side wall of the furnace body. The rotating shaft of the first magnetic fluid component 13 can extend and retract along the axial direction of the connection port reserved on the side wall of the furnace body. The axis of the connection port reserved on the side wall of the furnace body is collinear with the axis of the first guide shaft 5. A connecting flange 21 is sealed at the connection port between the furnace body and the first magnetic fluid component 13 to ensure the sealing of the furnace body.

[0030] More specifically, the first drive motor 9 includes a first rotary motor 11 and a first lifting motor 12. The output shaft of the first rotary motor 11 is connected to the rotating shaft of the internal screw nut of the first magnetic fluid assembly 13 via a transmission belt 51. The first rotary motor 11 drives the rotating shaft of the first magnetic fluid assembly 13 to rotate, thereby causing the first guide shaft 5 to rotate along its own axis. The rotating shaft of the first magnetic fluid assembly 13 is also fixedly connected to the output shaft of the first lifting motor 12 via a screw nut, which is used to control the rotating shaft inside the first magnetic fluid assembly 13 to move along the axial direction of the first guide shaft 5. This causes the rotating shaft of the first magnetic fluid assembly 13 to move away from or engage with the coupling 20 on the first heat insulation assembly 14, thereby realizing that the left and right first drive motors 9 alternately drive the first guide shaft 5 to rotate continuously. This avoids the problem of the first guide shaft 5 being damaged due to continuous overheating and contact of either first drive motor 9 caused by heat conduction from being in a high-temperature environment for a long time. At the same time, it also avoids the impact of long-term high temperature on the stability of the operation of the left and right first magnetic fluid assemblies 13.

[0031] Both ends of the second guide shaft 6, coupled to the output shaft of the second drive motor 10, are fixedly connected to the second insulation assembly 19 after passing through the second through hole. The end of the coupling 20 on the second insulation assembly 19 away from the second guide shaft 6 is fixedly connected to the rotating shaft of the second magnetic fluid assembly 18. The rotating shaft of the second magnetic fluid assembly 18 is clearance-fitted with the connection port reserved on the side wall of the furnace body. The rotating shaft of the second magnetic fluid assembly 18 can extend and retract along the axial direction of the connection port reserved on the side wall of the furnace body. The axis of the connection port reserved on the side wall of the furnace body is collinear with the axis of the second guide shaft 6. A connecting flange 21 is also sealed at the connection port between the furnace body and the second magnetic fluid assembly 18 to ensure the sealing of the furnace body.

[0032] The second drive motor 10 includes a second rotary motor 16 and a second lifting motor 17. The output shaft of the second rotary motor 16 is connected to the rotating shaft of the internal screw nut of the second magnetic fluid assembly 18 via a transmission belt 51. At the same time, the rotating shaft of the second magnetic fluid assembly 18 is also fixedly connected to the output shaft of the second lifting motor 17 via a screw nut. This is used to control the rotating shaft inside the second magnetic fluid assembly 18 to move along the axial direction of the second guide shaft 6, thereby driving the rotating shaft of the second magnetic fluid assembly 18 away from or into contact with the coupling of the second heat insulation assembly 19. This enables the two second drive motors 10 to alternately drive the second guide shaft 6 to rotate continuously, thus avoiding the problem of the second guide shaft 6 being damaged due to continuous overheating and contact caused by heat conduction due to long-term exposure to high temperature. At the same time, it also avoids the impact of long-term high temperature on the stability of the operation of the two second magnetic fluid assemblies 18.

[0033] like Figure 4-5As shown, during operation, when the first drive motor 9 and the second drive motor 10 located on the same side (such as the left side) of the flexible insulation material 50 drive the flexible insulation material 50 to be transported towards the discharge system 48, the first lifting motor 12 and the second lifting motor 17 on that side are controlled to operate, so that the rotating shafts of the first magnetic fluid assembly 13 and the second magnetic fluid assembly 18 on that side are respectively engaged with the first guide shaft 5 and the second guide shaft 6.

[0034] Throughout the purification process, the rotation speeds of all the first rotary motors 11 and all the second rotary motors 16 are controlled to be the same. This ensures that the flexible insulation material 50 is transported at a uniform speed. It also ensures that when the first drive motor 9 and the second drive motor 10 located on one side (such as the left side) of the flexible insulation material 50 are switched to the operation of the first drive motor 9 and the second drive motor 10 on the other side (such as the right side) of the flexible insulation material 50, the rotating shafts of the first magnetic fluid assembly 13 and the second magnetic fluid assembly 18 can be aligned with their respective guide shafts.

[0035] Multiple air extraction ports 22 are provided on the top side wall of the furnace body. The air extraction ports 22 are funnel-shaped. Each air extraction port 22 corresponds to a first driving device located in the gas flow direction inside the furnace body. The devices are used to extract the impurity gas generated in the area corresponding to each air extraction port 22, and prevent the impurity gas from spreading to the flexible insulation material 50 in other areas and causing secondary pollution. Figure 1 The vertical arrow pointing upwards indicates the direction of gas flow, while the other arrows indicate the transmission direction of the flexible insulation material 50.

[0036] Heaters 23 are fixedly installed on both sides of each exhaust port 22 on the furnace body. The heaters 23 are fixed to the top of the furnace body and extend towards the bottom of the furnace body. To make the internal structure of the furnace compact and to avoid interference between the wavy flexible insulation material 50 inside the furnace body and the heaters 23, the heaters 23 are set perpendicular to the top of the furnace body. The end of the heater 23 away from the top of the furnace body is located at the bottom of the wavy flexible material and corresponds to the second guide shaft 6. To improve the heating efficiency inside the furnace and avoid heat loss, insulation felt 24 is also laid on the side walls inside the furnace body.

[0037] In one embodiment, the purification system includes a physical purification system 1 and a chemical purification system 2, with a fourth inlet valve 52 installed between the two systems. The physical purification system and the chemical purification system 2 are interconnected; the physical purification system is also interconnected with a feeding system, and the chemical purification system 2 is interconnected with a discharge system 48. Since the physical purification system 1 and the chemical purification system 2 are separate, the physical purification system 1 can be manufactured without the use of corrosion-resistant materials, significantly reducing the overall manufacturing cost of the system.

[0038] The purification system is also equipped with a temperature detection device 49, which is used to detect the temperature within the purification system.

[0039] A second drive device is fixedly installed inside the feeding system. The second drive device includes a third drive motor 27. The output shaft of the third drive motor 27 is detachably and fixedly connected to the first drive shaft 29. The first drive shaft 29 is used to fix the flexible insulation material 46 to be purified.

[0040] Specifically, the feeding system includes an upper feeding chamber 25 and a lower feeding chamber 26 that are interconnected, and a second drive unit is installed in the lower feeding chamber 26.

[0041] In one embodiment, a purified flexible insulation material 45 is wound between the flexible insulation material 46 to be purified and the first drive shaft 29. The side of the flexible insulation material 46 to be purified on the first drive shaft 29 away from the first drive shaft 29 is also wound with the purified flexible insulation material 45. That is, the first drive shaft 29 is sequentially covered with the purified flexible insulation material 45, the flexible insulation material 46 to be purified, and the purified flexible insulation material 45. The purified flexible insulation material 45 on the side away from the first drive shaft 29 is pre-wound onto the guide shaft of the first drive device during the first purification operation. The lengths of the purified flexible insulation material 45 between the first drive shaft 29 and the first drive shaft 29, the purified flexible insulation material 46 on the first drive shaft 29, and the purified flexible insulation material 45 on the side away from the first drive shaft 29 are all greater than the total length of the continuous purification drive system path of the present invention, so as to ensure that the internal winding of the continuous purification drive system of the present invention before and after the purification operation is the purified flexible insulation material 45.

[0042] For ease of subsequent description, the first drive shaft 29 and the purified flexible insulation material 45, the flexible insulation material to be purified 46, and the purified flexible insulation material 45 wound around it from the inside to the outside are referred to as the base component.

[0043] In another embodiment, a purified flexible insulation material 45 is wound between the flexible insulation material 46 to be purified and the first drive shaft 29. The flexible insulation material 46 to be purified and the purified flexible insulation material 45 are fixedly connected by a carbon rope 15. The first drive shaft 29 in this structure is used for replenishing material during subsequent purification operations. The purified flexible insulation material 45 between the flexible insulation material 46 to be purified and the first drive shaft 29 is used to wind around the guide shaft in the purification system after the flexible insulation material 46 to be purified has completed the purification operation. Therefore, the length of the purified flexible insulation material 45 between the flexible insulation material 46 to be purified and the first drive shaft 29 is greater than the total length of the continuous purification drive system of the present invention, to ensure that after the purification operation, the continuous purification drive system of the present invention is wound with the purified flexible insulation material 50.

[0044] For ease of subsequent description, the first drive shaft 29 and the purified flexible insulation material 45 and the flexible insulation material 46 to be purified wound on it are referred to as the feeding assembly.

[0045] The feed lower compartment 26 of the feeding system is equipped with a first air inlet valve 30, which is connected to a gas storage tank and is used to fill the feeding system with argon gas.

[0046] A third drive device is fixedly installed inside the discharge system 48. A second drive shaft is detachably connected to the third drive device. The second drive shaft is used to collect the purified flexible insulation material 45.

[0047] The third drive unit includes a fourth drive motor 28, the output shaft of which is detachably and fixedly connected to the second drive shaft, which is used to fix the purified flexible insulation material 45 output from the purification system.

[0048] The first drive unit, the second drive unit, and the third drive unit cooperate with each other to purify the flexible thermal insulation material 46, which is then stored on the second drive shaft of the third drive unit after being purified by the purification system.

[0049] Pressure plates 44 are also rotatably and fixedly connected to the first drive shaft 29 and the second drive shaft for fixing the flexible insulation material 50.

[0050] A first gate valve 34 and a second air inlet valve 31 are fixedly installed on the vacuum pipeline 47 connecting the feeding system and the purification system. The first gate valve 34 is located between the feeding system and the second air inlet valve 31. The first gate valve 34 and the second air inlet valve 31 cooperate with each other to control the flow of gas between the feeding system and the purification system.

[0051] Specifically, the end of the second inlet valve 31 furthest from its location on the vacuum pipe 47 is connected to the gas storage tank. The second inlet valve 31 controls the flow of argon gas into the feeding system. The second inlet valve 31 and the first gate valve 34 work together to prevent oxygen from entering the purification system during the replenishment operation, thus preventing oxidation of the insulation material and heater inside the purification system. More specifically, when the upper feed chamber 25 of the feeding system is opened to replace the first drive shaft 29 and perform the replenishment operation, the first gate valve 34 can be closed to bidirectionally press the flexible insulation component 50. However, since there is still a gap between the flexible insulation component 50 and the first gate valve 34 at this time, the second inlet valve 31 can be opened to blow argon gas into the feeding system, preventing oxygen from entering the feeding system through the vacuum pipe during the replenishment operation when the upper feed chamber 25 of the feeding system is opened. After completing the material replenishment operation, closing the upper feed hopper 25, and performing a vacuuming operation on the feeding system again, the purification operation can continue by opening the first gate valve 34 and closing the second air inlet valve 31.

[0052] A second gate valve 35 and a third inlet valve 32 are fixedly installed on the vacuum pipe 47 connecting the purification system and the discharge system 48. The second gate valve is located between the discharge system 48 and the third inlet valve 32. The second gate valve 35 and the third inlet valve 32 cooperate with each other to control the flow of gas between the purification system and the discharge system 48.

[0053] Specifically, the end of the third inlet valve 32 furthest from its location in the vacuum pipe 47 is connected to the gas storage tank. The third inlet valve 32 is used to control the introduction of argon gas into the discharge system 48 to prevent oxygen from entering the purification system during the material handling operation, which could cause oxidation of the insulation material and heater inside the purification system. More specifically, when opening the upper discharge chamber of the discharge system 48 and replacing the second drive shaft within the discharge system 48 to remove the purified flexible insulation material 45 for the material handling operation, the second gate valve 35 can be closed to bidirectionally press against the flexible insulation component 50. However, since there is still a gap between the flexible insulation component 50 and the second gate valve 35 at this time, the third inlet valve 32 can be opened to blow argon gas into the discharge system to prevent oxygen entering the discharge system through the vacuum pipe from entering the purification system during the material handling operation when the upper discharge chamber of the discharge system 48 is opened. After completing the material handling operation, closing the discharge hopper, and performing a vacuuming operation on the discharge system 48 again, the purification operation can continue by opening the second gate valve 35 and closing the third inlet valve 32. The connections between the feeding system and the purification system, between the purification system and the discharge system 48, and the side of each extraction port 22 on the purification system furthest from the first drive device are all connected to the vacuuming system 36 via vacuum pipes 47. Gate valves 33 are installed at the connections between the feeding system and the purification system, between the purification system and the discharge system 48, and on the vacuum pipes 47 connecting each extraction port 22 on the purification system to the vacuuming system 36 to control the opening and closing of the air path.

[0054] Both the feeding system and the discharging system 48 are equipped with a rangefinder 37. The rangefinder 37 on the feeding system is used to measure the distance between itself and the outer surface of the first drive shaft 29 or the flexible insulation material 50 (the flexible insulation material 46 to be purified and the purified flexible insulation material 45 covered on the first drive shaft 29 are collectively referred to as the flexible insulation material 50) and this distance is called the first distance. The rangefinder 37 on the discharging system 48 is used to measure the distance between itself and the outer surface of the second drive shaft or the purified flexible insulation material 45 covered on the second drive shaft and this distance is called the second distance.

[0055] Specifically, a first distance measuring instrument 37 is fixedly installed on the side wall of the feeding system away from the purification system. The measuring direction of the first distance measuring instrument 37 is perpendicular to the length direction of the first drive shaft 29, and the measuring direction of the first distance measuring instrument 37 is aligned with the first drive shaft 29. It is used to measure the distance between the first distance measuring instrument 37 itself and the first drive shaft 29 or the outer surface of the flexible insulation material 50 covering the first drive shaft 29, so as to determine the remaining amount of flexible insulation material 50 in the feeding system, and then determine whether the first drive shaft 29 needs to be replaced and perform a replenishment operation.

[0056] A second distance measuring instrument 37 is installed on the side wall of the discharge system 48 away from the purification system. The measuring direction of the second distance measuring instrument 37 is set perpendicular to the length direction of the second drive shaft, and the measuring direction of the second distance measuring instrument 37 is aligned with the second drive shaft. It is used to measure the distance between the second distance measuring instrument 37 itself and the second drive shaft or the outer surface of the flexible insulation material 50 covering the second drive shaft, so as to determine whether the purified flexible insulation material 45 in the discharge system 48 needs to be removed.

[0057] Both the feeding system and the discharging system 48 are equipped with observation ports 39 to facilitate observation of their internal conditions; both the feeding system and the discharging system 48 are equipped with vacuum gauges 38, which are used to monitor the air pressure in their respective systems in real time.

[0058] Furthermore, a tension controller 40 is installed at the purified flexible insulation material 45 in the discharge system 48 to monitor in real time the tension value borne by the flexible insulation material 50 during the transmission process of the system of the present invention.

[0059] The system of this invention also includes a control system, which includes a PLC controller 41 and a heating module 42. The heating module 42 is electrically connected to multiple heaters 23 installed in the purification system to control the temperature inside the furnace. The PLC controller 41 is electrically connected to a gate valve 33 to control the opening and closing of the gas path. The PLC controller 41 is also electrically connected to gate valves (the first gate valve 34 and the second gate valve 35 are collectively referred to as gate valves) to control their opening and closing. The PLC controller 41 is electrically connected to a vacuum gauge 38 to obtain the vacuum level of the corresponding system based on the real-time monitored gas pressure value in the system where the vacuum gauge 38 is located, and then controls the corresponding gate valve 33 to operate. The PLC controller 41 is also electrically connected to a tension controller 40 to control the operating status of the first drive device, the second drive device, and the third drive device based on the tension value monitored in real time. The PLC controller 41 is communicatively connected to a temperature detection device 49 to monitor the temperature value in the purification system in real time.

[0060] Both the PLC controller 41 and the heating module 42 are communicatively connected to the human-machine interaction platform 43 to realize human-machine interaction.

[0061] The first drive motor 9, the second drive motor 10, the third drive motor 27, and the fourth drive motor 28 are collectively referred to as drive motors.

[0062] A continuous purification method for high-temperature resistant flexible thermal insulation material, using the above-mentioned system, includes the following steps: Step S1: Install the first drive shaft 29, which is covered with the flexible insulation material 46 to be purified, on the second drive device in the feeding system, and connect one end of the purified flexible insulation material 45 to one end of the flexible insulation material 46 to be purified. Then, fix the other end of the purified flexible insulation material 45 on the second drive shaft of the discharge system 48 after passing through each guide shaft in the purification system in sequence. Specifically, before the first purification operation, the first drive shaft 29 of the substrate is installed on the second drive device. The operator places the purified flexible insulation material 45, which is away from the first drive shaft 29 on the substrate, around each guide shaft in the purification system from the feeding system side and then fixes it on the second drive shaft. The purified flexible insulation material 45 that is wrapped around the purification system is wavy. Then, the furnace door of the upper feed hopper of the feeding system, the furnace door of the purification system furnace, and the furnace door of the discharge system 48 are closed. Then, the first drive motor 9 and the second drive motor 10 of the first drive device, the third drive motor 27 of the second drive device, and the fourth drive motor 28 of the third drive device are controlled to operate. The tension controller 40 in the discharge system 48 controls the tension value of the flexible insulation material 50 in the system of the present invention during the transmission process to be within the preset tension threshold range.

[0063] Step S2: Vacuuming and leak detection operations are performed sequentially on the feeding system, purification system and discharge system 48. When the vacuum degree and leakage rate of the feeding system, purification system and discharge system 48 reach the corresponding preset values, heating operation is performed. When the temperature in the purification system reaches the preset value, purification operation is performed. Specifically, it includes the following steps: Step S21: Open the vacuum pipe 47 connecting the feed system and the purification system, the vacuum pipe 47 connecting the purification system and the discharge system 48, and the slide valve 33 on the vacuum pipe 47 connecting each air extraction port 22 of the purification system to the vacuum system 36, and perform vacuuming operation on the feed system, the purification system and the discharge system 48. Step S22: When the vacuum level in the feeding system, purification system and discharge system 48 reaches the preset value (e.g., <2pa), close all gate valves 33 to perform leak detection. Step S23: When the leakage rate reaches a preset value (e.g., <0.67pa / h), the signal that the leakage rate has reached the preset value is transmitted to the PLC controller 41. The PLC controller 41 controls the heater 23 in the purification system to work. The heater 23 performs the heating operation according to the preset heating module in the PLC controller 41. Step S24: When the temperature in the purification system reaches the set temperature, the purification operation is performed.

[0064] Step S3: Drive the first drive device, the second drive device and the third drive device to operate, transfer the flexible thermal insulation material 46 to be purified on the second drive device to the purification system to perform the purification operation, and wind the purified flexible thermal insulation material 45 onto the second drive shaft. Specifically, the signal that the temperature has reached the set temperature is transmitted to the PLC controller 41. The PLC controller 41 controls the first drive device, the second drive device and the third drive device to operate. The flexible insulation material 50 on the second drive device is transmitted to the first drive device in the purification system to perform the purification operation and then wound onto the second drive shaft.

[0065] More specifically, when the flexible insulation material 46 to be purified on the second drive device enters the physical purification system 1, the impurities in the flexible insulation material 46 to be purified reach saturated vapor pressure in a high-temperature and vacuum environment. The generated gaseous impurities are discharged from the physical purification system 1 through the exhaust port 22 above the first drive device. Subsequently, the cooperation of the first drive device, the second drive device, and the third drive device transfers the physically purified flexible insulation material 46 to the chemical purification system 2. Under the action of the process gas introduced into the chemical purification system 2, the metal oxide impurities in the physically purified flexible insulation material 46 are transformed into metal halide impurities. Since the melting and boiling points of metal halides are lower than those of metal oxides, the generated impurity gas is discharged through the exhaust port 22.

[0066] Step S4: Repeat step S3 until the first drive shaft 29 is no longer covered with flexible insulation material 50. Then, control the first drive device, the second drive device and the third drive device to stop operating and perform a material replenishment operation. When the thickness of the purified flexible insulation material 45 covering the second drive shaft in the discharge system 48 reaches the preset thickness value, the first drive device, the second drive device and the third drive device are controlled to stop operating and perform the material picking operation.

[0067] Specifically, until the first drive shaft 29 is not covered with flexible insulation material 50, specifically, when the first distance measured by the first rangefinder 37 installed in the feeding system reaches a first preset distance value, the first preset distance value is the distance between the first rangefinder 37 itself and the outer surface of the first drive shaft 29 as measured by the first rangefinder 37. At this time, the purified flexible insulation material 45 on the side of the first drive shaft 29 near the first drive shaft 29 has been wound around the guide shaft in the purification system.

[0068] The process of performing the replenishment operation is as follows: The connection between the feeding system and the purification system, the gate valve 33 between the feeding system and the vacuum system 36, the first gate valve 34, and the first inlet valve 30 are closed sequentially to introduce argon gas into the feeding system. When the vacuum gauge 38 detects atmospheric pressure in the feeding system, the upper feed chamber 25 of the feeding system is opened, and the second inlet valve 31 is opened to introduce argon gas into the feeding system, preventing oxygen entering the feeding system during the operation from entering the physical purification system 1. Subsequently, the first drive shaft 29 on the second drive device is removed, and the replenishment assembly is reinstalled on the second drive device. The flexible insulation material 46 to be purified on the replenishment assembly is connected to the purified flexible insulation material 45 in the purification system via carbon rope 15. Specifically, the thickness of the flexible insulation material 45 is indirectly obtained by measuring the distance between itself and the outer surface of the flexible insulation material 50 covering the second drive shaft using the second rangefinder installed in the discharge system 48.

[0069] The material handling process is as follows: First, the gate valve 33 between the connection point of the purification system and the discharge system 48 and the vacuum system 36 is closed. Then, the second gate valve 35 is closed, and the first inlet valve 30 is opened to fill the discharge system 48 with argon gas. When the vacuum gauge 38 detects atmospheric pressure in the discharge system, the upper discharge chamber of the discharge system is opened. At this time, the third inlet valve 32 introduces argon gas towards the discharge system to prevent oxygen from entering the chemical purification system 1. Next, the second drive shaft covered with the purified flexible insulation material 45 is removed, and a second drive shaft without the flexible insulation material 50 is reinstalled. The end of the purified flexible insulation material 45 in the purification system, away from the feed system, is fixed to this second drive shaft.

[0070] Step S5: Repeat steps S3-S4 above until the entire purification process is completed.

[0071] Specifically, after the feeding operation is completed, before repeating step S3, the upper feed chamber 25 is closed and the feeding system is evacuated again. Then the first gate valve 34 is opened and the second air inlet valve 31 is closed to continue the purification operation.

[0072] After the material handling operation is completed, before repeating step S3, first close the upper discharge hopper and perform a vacuuming operation on the discharge system 48 again. Then open the second gate valve 35, close the third air inlet valve 32, and continue the purification operation.

[0073] Regarding the specific structure of this invention, it should be noted that the connection relationships between the various component modules used in this invention are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this invention without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this invention, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A continuous purification drive system for high-temperature resistant flexible insulation materials, characterized in that, It includes a feeding system, a purification system and a discharge system connected in sequence (48); The purification system is equipped with a first driving device, which is used to wind the flexible insulation material (50). The flexible insulation material (50) in the purification system winds around the guide shafts installed on the first driving device in a wave-shaped path. The feeding system is equipped with a second drive device, and a first drive shaft (29) is detachably mounted on the second drive device. The first drive shaft (29) is wound with a flexible heat-insulating material (46) to be purified. The discharge system (48) is equipped with a third drive device, and a second drive shaft is detachably installed on the third drive device. The second drive shaft is used to collect the purified flexible insulation material (45). One end of the flexible insulation material (50) in the purification system is connected to one end of the flexible insulation material (46) to be purified on the first drive shaft (29), and the other end of the flexible insulation material (50) in the purification system is fixed on the second drive shaft; The first drive unit, the second drive unit, and the third drive unit work together to purify the flexible thermal insulation material (46) and store it on the second drive shaft after purification by the purification system.

2. The continuous purification drive system for high-temperature resistant flexible thermal insulation materials according to claim 1, characterized in that, A first gate valve (34) and a second air inlet valve (31) are installed on the vacuum pipeline (47) connecting the feeding system and the purification system. The first gate valve (34) is located between the feeding system and the second air inlet valve (31). The first gate valve (34) and the second air inlet valve (31) cooperate with each other to control the flow of gas between the feeding system and the purification system. A second gate valve (35) and a third inlet valve (32) are installed on the vacuum pipe (47) connecting the purification system and the discharge system (48). The second gate valve is located between the discharge system (48) and the third inlet valve (32). The second gate valve (35) and the third inlet valve (32) cooperate with each other to control the flow of gas between the purification system and the discharge system (48).

3. The continuous purification drive system for high-temperature resistant flexible thermal insulation materials according to claim 1, characterized in that, The purification system has multiple air extraction ports (22), and each of the multiple air extraction ports (22) corresponds to a first driving device located in the gas flow direction within the purification system.

4. The continuous purification drive system for high-temperature resistant flexible thermal insulation materials according to claim 1, characterized in that, The first drive unit includes multiple upper booms (3) fixedly connected to the top of the purification system and multiple lower support booms (4) fixedly connected to the bottom of the purification system. A guide shaft is movably connected between every two oppositely arranged upper booms (3) and between every two oppositely arranged lower support booms (4); multiple guide shafts on the upper booms (3) are located in the same plane, multiple guide shafts on the lower support booms (4) are located in the same plane, and all guide shafts are arranged in parallel. Each of the left and right ends of the guide shaft set on the upper boom (3) is coupled with a set of drive motors. Each of the left and right ends of the guide shaft set on the lower support arm (4) is also coupled with a set of drive motors. The two sets of drive motors at the left and right ends work together to drive the guide shaft to move by alternating switching.

5. The continuous purification drive system for high-temperature resistant flexible thermal insulation materials according to claim 1, characterized in that, The purified flexible insulation material (45) is provided between the flexible insulation material (46) to be purified on the first drive shaft (29) and the first drive shaft (29). The purified flexible insulation material (45) is also provided on the side of the flexible insulation material (46) to be purified away from the first drive shaft (29). The purified flexible insulation material (45) on the side away from the first drive shaft (29) is used to be pre-wound around the guide shaft of the first drive device when the purification operation is performed for the first time. The flexible insulation material (46) to be purified and the purified flexible insulation material (45) are fixedly connected by carbon rope (15); The lengths of the flexible insulation material (46) to be purified on the first drive shaft (29) and the purified flexible insulation material (45) between the first drive shaft (29), the flexible insulation material (46) to be purified on the first drive shaft (29) and the purified flexible insulation material (45) on the side away from the first drive shaft (29) are all greater than the total length of the continuous purification drive system path.

6. The continuous purification drive system for high-temperature resistant flexible thermal insulation materials according to claim 1, characterized in that, The flexible insulation material (46) to be purified on the first drive shaft (29) is also provided with a purified flexible insulation material (45) between the first drive shaft (29) and the first drive shaft (29). The flexible insulation material (46) to be purified and the purified flexible insulation material (45) are fixedly connected by a carbon rope (15). The length of the purified flexible insulation material (45) between the first drive shaft (29) and the first drive shaft (29) is greater than the total length of the continuous purification drive system path.

7. The continuous purification drive system for high-temperature resistant flexible insulation materials according to claim 1, characterized in that, The connection between the feeding system and the purification system, the connection between the purification system and the discharge system (48), and the side of each air extraction port (22) on the purification system away from the first drive device are all connected to the vacuum system (36) through vacuum pipes (47). A gate valve (33) is installed at the connection between the feeding system and the purification system, the connection between the purification system and the discharge system (48), and on the vacuum pipe (47) connecting each air extraction port (22) of the purification system to the vacuum system (36) to control the opening and closing of the air path.

8. The continuous purification drive system for high-temperature resistant flexible thermal insulation materials according to claim 1, characterized in that, Both the feeding system and the discharging system (48) are equipped with rangefinders (37); The rangefinder (37) installed on the feeding system is used to measure the distance between itself and the first drive shaft (29) or the outer surface of the flexible insulation material (50) covering the first drive shaft (29); The distance measuring instrument (37) installed on the discharge system (48) is used to measure the distance between itself and the outer surface of the second drive shaft or the flexible insulation material (50) covering the second drive shaft.

9. The continuous purification drive system for high-temperature resistant flexible thermal insulation materials according to claim 1, characterized in that, A tension controller (40) is installed at the purified flexible insulation material (45) in the discharge system (48) to monitor in real time the tension value borne by the flexible insulation material (50) in the continuous purification drive system during the transmission process.

10. A continuous purification method for high-temperature resistant flexible thermal insulation materials, characterized in that, Using the system as described in any one of claims 1-9 includes the following steps: Step S1: Install the first drive shaft (29) covered with the flexible insulation material (46) to be purified on the second drive device in the feeding system, and connect one end of the purified flexible insulation material (45) to one end of the flexible insulation material (46) to be purified. Then, fix the other end of the purified flexible insulation material (45) on the second drive shaft of the discharge system (48) after passing through each guide shaft in the purification system in sequence. Step S2: Vacuuming and leak detection operations are performed sequentially on the feeding system, purification system and discharge system (48). When the vacuum degree and leakage rate of the feeding system, purification system and discharge system (48) reach the preset value, heating operation is performed. When the temperature in the purification system reaches the preset value, purification operation is performed. Step S3: Drive the first drive device, the second drive device and the third drive device to operate, transfer the flexible insulation material (46) to be purified on the second drive device to the purification system to perform purification operation, and wind the purified flexible insulation material (45) onto the second drive shaft; Step S4: Repeat step S3 until the first drive shaft (29) is no longer covered with flexible insulation material (50), then control the first drive device, the second drive device and the third drive device to stop operating and perform the material replenishment operation; When the thickness of the purified flexible insulation material (45) wrapped on the second drive shaft in the discharge system (48) reaches the preset thickness value, the first drive device, the second drive device and the third drive device are controlled to stop operating and perform the material taking operation. Step S5: Repeat steps S3-S4 above until the entire purification process is completed.

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