Robots for high temperature applications

Abstract

The present disclosure relates to robots for high temperature applications. An apparatus comprising: a robot drive; and a robot arm connected to the robot drive, wherein the robot arm comprises a first link connected to the robot drive, a second link rotatably connected to the first link at a first rotatable connection, and an end effector rotatably connected to the second link at a second rotatable connection. The end effector comprises a thermal choke between a substrate support area of the end effector and the second rotatable connection. At least one of the first rotatable connection or the second rotatable connection comprises a rotational thermal coupling having interleaved members rotatable relative to each other.

Description

[0001] This application is a divisional application of Chinese patent application No. 202180049008.5, filed on June 1, 2021, entitled "Robot for High Temperature Applications". Background Technology

[0002] The exemplary and non-limiting embodiments generally relate to robots capable of handling thermal payloads and suitable for operation in high-temperature environments, such as in semiconductor wafer processing systems. A brief description of previous developments

[0003] U.S. Patent No. 10,569,430 discloses heat transfer in robot actuators and arms, which is incorporated herein by reference in its entirety. U.S. Patent No. 10,424,498 discloses a service loop for supplying coolant, which is incorporated herein by reference in its entirety. U.S. Patent No. 10,541,167 discloses heat transfer, which is incorporated herein by reference in its entirety. Summary of the Invention

[0004] The following description is for illustrative purposes only. It is not intended to limit the scope of the claims.

[0005] According to one aspect, an example apparatus may be provided, comprising: a robot actuator; and a robot arm connected to the robot actuator, wherein the robot arm includes a first link connected to the robot actuator, a second link rotatably connected to the first link at a first rotatable connection, and an end effector rotatably connected to the second link at a second rotatable connection, wherein the end effector includes a heat choke located between a substrate support area of ​​the end effector and the second rotatable connection, and wherein at least one of the first rotatable connector or the second rotatable connection includes a rotary thermal coupling having interlaced members rotatable relative to each other.

[0006] According to another aspect, an example device may be provided, comprising: a robot actuator; and a robot arm connected to the robot actuator, wherein the robot arm includes a first link connected to the robot actuator, a second link rotatably connected to the first link at a first rotatable connection, and at least one third link rotatably connected to the second link at at least one second rotatable connection, wherein the at least one third link includes a thermal choke located between a substrate support region of the at least one third link and the second rotatable connection, and wherein at least one of the first rotatable connector or the second rotatable connection includes a rotatable thermal coupling having interlaced members rotatable relative to each other.

[0007] According to another aspect, an example method may be provided, comprising: providing an end effector including a thermal choke located between a first end of the end effector having a substrate support region and an opposing second end of the end effector; connecting the second end of the end effector to a link at a rotatable connection, wherein the link and the end effector are configured to at least partially form an arm of a substrate delivery robot, wherein the connection from the second end of the end effector to the link includes providing a rotatable thermal coupling having interlaced members rotatable relative to each other at the rotatable connection.

[0008] According to another aspect, an example method may be provided, comprising: moving a robotic arm to position a substrate on an end effector of the robotic arm, wherein the robotic arm includes a first link connected to a robot actuator, a second link rotatably connected to the first link at a first rotatable connection, and an end effector rotatably connected to the second link at a second rotatable connection, wherein the end effector includes a thermal choke located between a substrate support region of the end effector and the second rotatable connection, and wherein the second rotatable connection includes a rotary thermal coupling having interlaced members rotatable relative to each other; and transferring heat from the robotic arm to outside the robot actuator, wherein the thermal choke assists in reducing heat transfer from the substrate support region to the second link and the second rotatable connection, and wherein the rotary thermal coupling at the second rotatable connection assists in increasing heat transfer from the end effector to the second link. Attached Figure Description

[0009] The above aspects and other features are explained in the following description taken in conjunction with the accompanying drawings, wherein:

[0010] Figure 1A It is a top view of the robot including the features described in this article;

[0011] Figure 1B yes Figure 1A The side view of the robot shown;

[0012] Figure 2 yes Figure 1A-Figure 1B A schematic cross-sectional view of the robot shown;

[0013] Figure 3A This is a schematic cross-sectional view of an example rotating thermal coupler;

[0014] Figure 3B This is a schematic cross-sectional view of another example of a rotating thermal coupler;

[0015] Figure 3C This is a schematic diagram illustrating an example embodiment including a thermal choke at the joint, a heat pipe, and a thermal coupling.

[0016] Figure 4 yes Figure 1A-Figure 2 A block diagram of a simplified thermal model of the example robot is shown.

[0017] Figure 5 It is similar to a traditional robot. Figure 2 A schematic cross-sectional view;

[0018] Figure 6 yes Figure 5 A block diagram of a simplified thermal model of the robot shown;

[0019] Figures 7A-7B This is a schematic cross-sectional view and top view of an example of the connection between the thermal choke and the third link of the thermal choke to the robot arm;

[0020] Figures 8A-8B This is a schematic cross-sectional view and top view of an example of the connection between the thermal choke and the third link of the thermal choke to the robot arm;

[0021] Figure 9 This is a schematic cross-sectional view of the thermal choke and the connection between the thermal choke and the third link of the robot arm;

[0022] Figure 10 This is a schematic cross-sectional view of the thermal choke and the connection between the thermal choke and the third link of the robot arm;

[0023] Figures 11A-11B This is a top view and schematic cross-sectional view of an example of the connection between the thermal choke and the third link from the thermal choke to the robot arm;

[0024] Figure 12 This is a flowchart of some steps in the example method;

[0025] Figure 13 This is a flowchart of some steps in the example method;

[0026] Figure 14 This is a top plan view showing an example structure of multiple thermal chokes with arm linkages;

[0027] Figure 15 This is a cross-sectional view showing an example structure of multiple thermal chokes with connecting arms;

[0028] Figure 16 This is a cross-sectional view of an example structure showing a thermal choke inside the frame member of the arm link;

[0029] Figure 17 This is a top plan view showing the positions of multiple thermal chokes in multiple arm links. Detailed Implementation

[0030] refer to Figure 1A-Figure 1B The accompanying drawings show a top plan view and a side view of a device 10 with features incorporating an exemplary embodiment. Although the features will be described with reference to the exemplary embodiment shown in the drawings, it should be understood that the features may be implemented in many alternative embodiments. Furthermore, any suitable size, shape, or type of element or material may be used.

[0031] exist Figure 1A-Figure 1B In an example embodiment, the device is a robot including a drive unit 12, a robot arm 14, and a control system 16. The control system 16 may include at least one processor 18 and at least one memory 20 including software or code 22. The control system is configured to control the movement of motors in the drive unit 12 (and possibly in the arm 14) and to receive signals from sensors such as those in the drive unit 12 and / or the arm 14 and / or outside the robot 10. Figure 2 A simplified cross-sectional view of an example embodiment of robot 10 is provided in the figure.

[0032] Also refer to Figure 2 In the illustrated example, the drive unit 12 includes a housing 50 that can be fixedly attached to the wall 54 of the substrate transfer chamber, and a spindle assembly 52 located inside the housing 50, the spindle assembly 52 being configured to at least partially drive the robot arm 14. In this example, the spindle assembly 52 includes a spindle housing 56, one or more motors, and one or more driver shafts. In the example shown in FIG3, the spindle assembly 52 includes three motors M T1 M T2 M T3 And three drive shafts T1, T2, and T3. However, in alternative examples, more or fewer motors and shafts may be provided. The motor stator may be attached to the spindle housing 56, and the motor rotor may be attached to the drive shafts T1, T2, and T3. Figure 2 In the example, the three axes T1, T2, and T3 are coaxial driver axes. The outer axis is axis T1, the axis between the outer and inner axes is axis T2, and the inner axis is axis T3.

[0033] In this example, the drive unit also includes a vertical lifting mechanism 24. For example, the vertical lifting mechanism 24 may include one or more linear track bearing arrangements and a motor-driven ball screw configured to lift the spindle assembly 52 upward and downward in the vertical direction.

[0034] like Figure 2 As shown, the spindle housing (and / or an optional neck that may support the spindle T1) can be liquid-cooled, as indicated by coolant inlet pipe 58 and coolant outlet pipe 60. If the drive unit features a vertical lifting mechanism 24, the liquid coolant can enter and exit the spindle housing through channels via maintenance circuits, such as electrical connections and conductors associated with the operation of the spindle motor.

[0035] As another example that may be particularly convenient when the drive unit features a vertical lifting mechanism, the robot's frame can be liquid-cooled, such as the housing frame 50, and heat can be transferred from the spindle housing 56 to the drive unit frame 50 via radiation and conduction and convection through the atmospheric environment 62 between the spindle housing 56 and the drive unit frame 50. In this case, the effective area available for heat transfer can be increased as intended by utilizing one or more staggered vertical fins on the spindle housing 56 and the drive unit frame 50. This arrangement allows the spindle housing 56 to move vertically relative to the robot drive unit frame 50, and it can be guided through the maintenance loop without the need for liquid coolant.

[0036] Alternatively, forced air cooling of the conventional spindle housing can be used, which is typical in existing robots.

[0037] Considering that the robotic arm 14 can operate in a vacuum environment inside the substrate transfer chamber, the spindle assembly 52 of the drive unit may include seals and other features that allow the upper portions of shafts T1, T2, and T3, or shafts T1, T2, and T3, to be in a vacuum environment. As an example, a substantially cylindrical isolation barrier 64 between the rotor and stator of the motor can be used to contain an atmospheric environment on the stator side (outer side) of the isolation barrier and a vacuum environment on the rotor side (inner side) of the isolation barrier, in which case shafts T1, T2, and T3 can reside integrally in a vacuum environment. As another example, a rotary seal, such as a ferrofluid seal, can be used to allow the upper portions of shafts T1, T2, and T3 to protrude from the atmospheric environment 62 into the vacuum environment 63.

[0038] The robotic arm 14 may include one or more links that can be coupled to each other via appropriate mechanical couplings. Figure 2The example shows three links 66, 68, and 70 coupled to each other via a rotary joint. The third link 70 includes an end effector having a substrate support region 71 configured to support a payload 72, such as a semiconductor substrate.

[0039] The following terms are used throughout this document: The first link 66 of the example robot arm is referred to as link 1 or upper arm, the second link 68 is referred to as link 2 or forearm, and the third link 70 is referred to as link 3 or end effector. The rotary joint 74 between the spindle assembly 52 and the connecting rod 1 is called the shoulder joint, the rotary joint 76 between the connecting rod 1 and the connecting rod 2 is called the elbow joint, and the rotary joint 78 between the connecting rod 2 and the connecting rod 3 is called the wrist joint.

[0040] Link 3 can be configured to carry a payload 72. As an example, it can include an end effector suitable for picking up, carrying, and placing a semiconductor wafer.

[0041] Link 3 may consist of a first part (part 1) 80 adjacent to the payload, a second part (part 2) 82 adjacent to the wrist joint, and a thermal choke 84 between the two parts 80 and 82 of link 3. The thermal choke 84 may be configured to limit heat transfer from the first part 80 to the second part 82 of link 3. The heat transferred through the thermal choke 84 may be controlled by its thermal resistance, which may be selected along with other design parameters to achieve a desired temperature balance between the first part 80 and the second part 82 of link 3. For example, the thermal choke 84 may be implemented in the form of a section of material with low thermal conductivity, such as ceramic. The thermal choke may include a refractory material. A refractory material is a material that resists decomposition by temperature, pressure, or chemical erosion and retains its strength and shape at high temperatures. Refractory materials are typically polycrystalline, multiphase, inorganic, nonmetallic, porous, and heterogeneous. They are typically composed of oxides or non-oxides, such as carbides and nitrides, for example, carbides and nitrides of materials such as silicon, aluminum, magnesium, calcium, and zirconium. Some metals with melting points >1850 °C, such as niobium, chromium, zirconium, tungsten, rhenium, and tantalum, can also be considered as refractory materials.

[0042] like Figure 2 As shown, link 1 (upper arm) 66 can be connected to drive shaft T1. Link 2 (forearm) 68 can be coupled to link 1 via a rotary joint (elbow joint) 76 and actuated via shaft T3 using a transmission device. The transmission device may include a first shoulder pulley that can be attached to shaft T3, a first elbow pulley that can be attached to link 2, and a belt, cord, or cable 86 that can transmit motion between the two pulleys.

[0043] Link 3 can be coupled to link 2 via another rotary joint (wrist joint) and actuated via a two-stage transmission mechanism. The first stage of the transmission mechanism may include a second shoulder pulley, a second elbow pulley, and a belt, cord, or cable 88 that can transmit motion between the two pulleys. The second stage of the transmission mechanism may include a third elbow pulley, a wrist pulley, and another belt, cord, or cable 90 that can transmit motion between the two pulleys. Figure 2 As shown, the second shoulder pulley can be attached to shaft T2, the second elbow pulley can be connected to the third elbow pulley, and the wrist pulley can be attached to link 3.

[0044] One or more mechanical couplings in a robotic arm can be supplemented by one or more thermal couplings, which are configured to transfer heat between links connected by the respective mechanical couplings. (See again) Figure 2 For example, each rotational joint of the particular example arm, namely shoulder joint 74, elbow joint 76 and wrist joint 78, is supplemented by rotational thermal couplers 92, 94 and 96, respectively.

[0045] like Figure 3A As shown, the example rotary thermal coupler 30 may include two portions 32, 34, each characterized by one or more substantially cylindrical surfaces coaxially aligned with a corresponding rotary joint, and arranged such that the cylindrical surface on one portion of the thermal coupler faces the opposing cylindrical surface on the other portion. A small gap is provided between the portions so that the surfaces do not contact each other. The opposing cylindrical surfaces can be configured to transfer heat through radiation across the gap between the opposing substantially cylindrical surfaces of the rotary thermal coupler. If residual gas is present in the environment, the radiation mechanism can be supplemented by convection / conduction in the environment between the opposing substantially cylindrical surfaces of the rotary thermal coupler.

[0046] like Figure 3A As shown in the example, in order to increase the effective area and minimize the volume occupied by the example rotating thermal coupler, an array of substantially cylindrical features 32a, 34a can be provided on each of the two parts of the rotating thermal coupler, and the two arrays can be arranged in a staggered manner.

[0047] Alternative locations, such as Figure 3B As shown in the example, the two portions 42, 44 of the rotating thermal coupler 40 may provide opposing disc-shaped features 42a, 44a, which are configured for non-contact heat transfer over the gap between them. Alternatively, any other suitable shape of the effective features of the rotating thermal coupler may be utilized, including but not limited to conical and spherical shapes, and combinations thereof.

[0048] The effective surfaces of a rotating thermal coupler can be treated to improve its thermal emissivity. For example, both parts of the rotating thermal coupler can be made of aluminum, and the effective surfaces can be anodized.

[0049] To facilitate heat transfer between the two links of the robot arm, a portion of the example rotary thermal coupling can be attached to one link, and another portion of the example rotary dynamic coupling can be attached to an adjacent link in a substantially coaxial arrangement with the rotary joint connecting the two links. Alternatively, features of the rotary thermal coupling can be directly integrated into the links of the robot arm.

[0050] The links of a robotic arm can be made of materials with high thermal conductivity, such as aluminum alloys or stainless steel. If the links of a robotic arm are made of a material with high thermal conductivity, the temperature gradient (difference) between the joints of each link can be considered negligible. If one or more links of the robotic arm are long, the cross-sectional area of ​​one or more links of the robotic arm may be small, and / or if the material of one or more links of the robotic arm does not provide sufficient thermal conductivity, heat transfer through one or more such links of the robotic arm can be improved by using one or more heat pipes, such as... Figure 3C As shown in the diagram.

[0051] A heat pipe is a heat transfer device that combines thermal conductivity and the principle of phase change to transfer heat between two heat-conducting interfaces. It typically consists of a sealed tubular shell with a hot interface at one end and a cold interface at the other, a wick structure, and a working fluid. The working principle of a heat pipe can be described as follows: at the hot interface, the liquid working fluid comes into contact with the heat-conducting interface and absorbs heat from it, turning into vapor. The vapor then travels along the heat pipe to the cold interface, where it condenses back into a liquid state, releasing latent heat. This process results in high effective thermal conductivity between the hot and cold interfaces of the heat pipe.

[0052] For example, such as Figure 3C As shown in the diagram, one or more heat pipes 400, 401 can be used to facilitate or supplement heat transfer through the forearm (link 2), for example, from the rotary thermal coupler 402 at the wrist joint to the rotary thermal coupler 404 at the elbow joint. Similarly, as... Figure 3C As shown in the diagram, one or more heat pipes 401 can be configured to transfer heat through the upper arm (link 1), for example, from a rotary thermal coupler 404 at the elbow joint to a rotary thermal coupler 406 at the shoulder joint.

[0053] The hot and cold interfaces (hot and cold ends) of (multiple) heat pipes 400, 401 can be mechanically and thermally connected to links of the robot arm or to rotary thermal couplings of the robot arm with minimal thermal resistance. As an example, this can be achieved using clamping, bonding, potting, welding, or brazing. Using the features described herein, example embodiments can be provided that include one or more thermal chokes and one or more heat pipes. For example, one or more thermal chokes can be provided at the end effector link of the robot arm, and heat pipes can be provided behind (multiple) thermal chokes, such as at or between any other links, joints, and / or actuators, or possibly in at least a portion of the end effector. For example, refer to... Figure 1A One or more heat pipes may be located in a portion of the end effector 70 (between the thermal choke 84 and joint 78), at link 68, at link 66, and / or at actuator 50. Therefore, a combination of thermal chokes and heat pipes can be used to help control heat transfer within the robotic arm. In one example embodiment, the device may include only one or more heat pipes without using a thermal choke. In another example, a heat transfer device instead of heat pipes may be used to help accelerate heat transfer from a portion of the robotic arm to an area separated from the end effector and potentially outside the robotic arm.

[0054] Figure 4 The block diagram depicts a simplified thermal model of the example robot. The following nomenclature (in alphabetical order) is used in the diagram and throughout the text: A1 - Outer surface area (m2) of connecting rod 1 (upper arm) A1S - Effective area (m2) of shoulder joint thermal coupling connector A2 - Outer surface area (m2) of link 2 (forearm) A21 - Effective area (m2) of elbow joint thermal coupling connector A3 - The outer surface area (m2) of the first part of connecting rod 3. A32 - Effective area (m2) of wrist joint thermal coupling connector AS - Outer surface area of ​​the spindle housing (m2) FC - Flow rate of the cooling medium for the spindle housing (l / min) P - Environmental pressure of the robotic arm (Torr) P01 - Heat (W) transferred from the surrounding environment to connecting rod 1 P02 - Heat (W) transferred from the surrounding environment to connecting rod 2 P03 - Heat (W) transferred from the payload and surrounding environment to link 3 P1SRJ - Heat (W) transferred from link 1 to spindle housing via the rotary joint. P1STC - Heat (W) transferred from connecting rod 1 to the spindle housing via thermal coupling. P21RJ - Heat (W) transferred from link 2 to link 1 via the rotary joint. P21TC - Heat (W) transferred from link 2 to link 1 via thermal coupling. P32RJ - Heat (W) transferred from link 3 to link 2 via the rotary joint. P32TC - Heat (W) transferred from link 3 to link 2 via thermal coupling. P0S - Heat transferred from the surrounding environment to the spindle housing (W) PM - Heat generated by the spindle motor (W) PMS - Heat transferred from the spindle motor to the spindle housing (W) PSC - Heat transferred from the spindle housing to the cooling medium (W) T01 - Temperature of the environment surrounding connecting rod 1 (deg C) T02 - Temperature of the environment surrounding connecting rod 2 (deg C) T03 - Temperature of the ambient environment surrounding the first part of connecting rod 3 (deg C) T0S - Temperature of the environment surrounding the spindle (deg C) T1 - Temperature of Link 1 (Upper Arm) (deg C) T2 - Temperature of Linkage 2 (Forearm) (deg C) T31 - Temperature (deg C) of the first section of link 3 (between the payload and the thermal choke). Temperature (deg C) of the second part of link 3 (between the thermal choke and wrist joint) of T32. TC - Inlet temperature of the cooling medium for the spindle housing (deg C) TERA - Thermal emissivity of the outer surface of the robot arm link TETC - Thermal emissivity of the effective surface of a thermal coupling connector TM - Spindle motor temperature (deg C) TS - Spindle housing temperature (deg C)

[0055] like Figure 4 As shown, the main components of the robot, including the spindle housing, link 1 (upper arm), link 2 (forearm), the first part of link 3 (between the payload and the thermal choke), and the second part of link 3 (between the thermal choke and the wrist joint), are represented by discrete lumped thermal masses in the thermal model.

[0056] Considering the expectation that the example robot will handle a hot payload and operate in a high-temperature environment, it is assumed that heat can be transferred from the payload to link 3, and that the payload can be picked up or placed from the environment (this is determined by...). Figure 4 The heat source block is represented in the image; for thermal modeling purposes, the heat source can be characterized by temperature T03, as described above. Figure 4 As shown, it is also assumed that heat can be transferred from its surrounding environment to links 1 and 2. Heat transfer mechanisms may include radiation from the surrounding environment and convection / conduction if residual gas is present in the environment. Similarly, as Figure 4 As shown, the spindle housing can receive heat from the spindle motor, and it can also receive heat from the surrounding atmosphere and other environmental factors.

[0057] exist Figure 4 In the example, it is assumed that heat is dissipated from the robot through liquid cooling in the spindle housing.

[0058] Table 1 lists the parameters and inputs for an example thermal model. As an example, these parameters can represent a material handling robot in a vacuum environment semiconductor wafer processing system. Table 1

[0059] As shown in Table 1, the ambient temperature of the first part of link 3 is selected as 400 deg C, which can represent, for example, the temperature of the wafer carried by the robot and / or the temperature of the process module from which wafers can be picked up or placed. The ambient temperature of links 1 and 2 is selected as 200 deg C, which can represent, for example, the temperature of the wall of the vacuum transfer chamber in which the robot arm operates. It is also assumed that the spindle housing is water-cooled, with an inlet temperature of 20 deg C and a flow rate of 2.8 l / min, as shown in Table 1.

[0060] In comparison, Figure 5 The diagram illustrates a conventional robot equivalent to existing technology. As shown, the robot arm's link 3 lacks a thermal choke and rotating thermal coupling, although some heat may still be transferred through the rotating joint itself, and the spindle housing is air-cooled.

[0061] exist Figure 6 The diagram illustrates... Figure 5 A simplified thermal model of a conventional robot equivalent to existing technology is provided. Since link 3 is not characterized by a thermal choke, it is represented by a single thermal mass in the thermal model. There are no rotating thermal couplers in the thermal model, and forced air cooling of the spindle housing is considered in the thermal model.

[0062] For comparative purposes, the same thermal model parameters and inputs were used. The results of the thermal performance comparison are shown in Table 2.

[0063] Table 2

[0064] As shown in the comparison of Tables 1 and 2, the temperature of the links in the example robot has been significantly reduced compared to conventional robots of equivalent prior art. Specifically, the temperature of link 3 (the second part of link 3) adjacent to the wrist joint has been reduced from 385 deg C to a manageable level of approximately 85 deg C, the temperature of link 2 has been reduced from 213 deg C to approximately 80 deg C, and the temperature of link 1 has been reduced from 178 deg C to approximately 60 deg C. This directly addresses the challenges associated with excessive temperature rise of robot arm components, including thermal expansion issues, reduced bearing life, premature lubricant failure, and thermal damage to active components such as sensors and electronics that may be integrated into the robot arm.

[0065] For example, the dimensions, shape, and materials of the thermal chokes and connections used in the first and second portions 80, 82 of the third link 70 can be appropriately selected based on the robot's working environment, such as the expected weight of the payload 72 and the temperature of the payload and substrate processing chamber. See also... Figures 7A-7B An example is shown in which the thermal choke includes a refractory material whose interlaced portions are fixedly attached to the fingers 100, 102 of the first and second metal portions 80, 82. Figure 7A A cross-sectional view is shown, and Figure 7B A top view is shown. Interlocking shapes can be used to bond materials together, and, for example, heat chokes can be molded on the first and second parts. Alternatively or additionally, fasteners can be used. Examples of fastener use are shown below. Figure 8A and Figure 8B As shown, the thermal choke is sandwiched between sections of the first and second parts, which form the top and bottom plates of the sandwich, and fasteners 104 attach the layers together. Fasteners 104 can serve as structural reinforcements between the two parts 80, 82, either in direct contact or not in direct contact with the two parts 80, 82.

[0066] Also refer to Figure 9 In this example, two layers of heat-resistant material 84a, 84b are used, and the thin-thick fingers 100, 102 of the first and second metal portions 80, 82 can be in direct contact with each other simply to increase structural integrity at the joints with the refractory material. See also... Figure 10 In this example, the thermal choke has multiple layers of different refractory materials 84c, 84d, 84e, which are arranged in a sandwich arrangement between sections of the first and second metal parts 80, 82. Figures 11A-11BIt is shown that material 110 (e.g., high-temperature epoxy) can be applied to the joint between the first and second parts and the thermal choke to prevent gas release from the adhesive or refractory and to prevent dust or refractory fragments from peeling off the connecting rod 70. In an alternative example, any suitable high-temperature refractory cap can be provided on the joint, and the refractory can be at least partially located inside one or both of the first and second parts.

[0067] While the examples above describe features of a three-bar linkage robotic arm with a rotary joint, robots incorporating the features described herein can utilize any suitable arm mechanism, including but not limited to various serial and parallel mechanisms, and the robotic arm mechanism can employ a variety of mechanical couplings, including but not limited to rotary, prism, and spherical joints. Furthermore, although the examples above consider a robot with a single robotic arm, a robot can feature more than one arm.

[0068] The features described in this paper can be used to address the negative impacts of heat emanating from the payload carried by a robotic arm and from the surrounding environment. Heat received by a robotic arm, if not dissipated through appropriate cooling, can cause excessive temperature rise in its components, potentially leading to thermal expansion problems, reduced bearing life, premature lubricant failure, and thermal damage to active components integrated into the robotic arm, such as sensors and electronics. Cooling mechanisms for robotic arms are particularly challenging in vacuum environments, where conduction and convection are very limited or nonexistent, and where forced air or liquid cooling within the robotic arm may not be a viable option. The features described in this paper can be used to provide solutions applicable even in these challenging conditions.

[0069] An example embodiment may provide an apparatus comprising: a robot actuator; and an arm connected to the robot actuator, wherein the arm includes a first link connected to the robot actuator, a second link rotatably connected to the first link at a first rotatable connection, and an end effector rotatably connected to the second link at a second rotatable connection, wherein the end effector includes a thermal choke located between a substrate support region of the end effector and the second rotatable connection, and wherein at least one of the first rotatable connector or the second rotatable connection includes a rotatable thermal coupling having interlaced members rotatable relative to each other.

[0070] The robot actuator may include an actuator housing and a spindle assembly movably located within the actuator housing, wherein the spindle assembly includes a coaxial actuator shaft and a motor connected to the actuator shaft. The device may include a first rotary thermal coupling located at the outer shaft of the coaxial actuator shaft. The rotary thermal coupling may include a second rotary thermal coupling located at a first rotatable connection and a third rotary coupling located at the second rotatable connection. The robot arm may include pulleys and belts configured to rotate a second link and an end effector at the first and second rotatable connections. The first rotatable connector may include a first rotary thermal coupling having first interlacing members, wherein the first interlacing members are rotatable relative to each other about a rotation axis of the first rotatable connector. The second rotatable connector may include a second rotary thermal coupling having second interlacing members, wherein the second interlacing members are rotatable relative to each other about a rotation axis of the second rotatable connector. A thermal choke may include a refractory material connecting a first portion of the end effector to a second portion of the end effector. The thermal choke may space the first portion from the second portion. The thermal choke may include segments that intersect with segments of the first and / or second portions of the end effector. The end effector may include an encapsulating material surrounding the connection between the thermal choke and the first and second portions of the end effector. The thermal choke may include different material layers. The robot arm may include at least one heat pipe having opposing ends thermally connected to at least one link in the robot arm's linkages and / or thermally connected to a rotary thermal coupler of the robot arm.

[0071] Also refer to Figure 12 An example method may be provided, comprising: as shown in block 200, providing an end effector including a thermal choke located between a first end of the end effector having a substrate support region and an opposing second end of the end effector; and as shown in block 202, connecting the second end of the end effector to a link at a rotatable connection, wherein the link and the end effector are configured to at least partially form an arm of a substrate delivery robot, wherein the connection from the second end of the end effector to the link includes providing a rotatable thermal coupling having interlaced members that rotate relative to each other at the rotatable connection.

[0072] Also refer to Figure 13An example method may be provided, comprising: moving a robotic arm to position a substrate on an end effector of the robotic arm, as shown in block 300, wherein the robotic arm includes a first link connected to a robot actuator, a second link rotatably connected to the first link at a first rotatable connection, and an end effector rotatably connected to the second link at a second rotatable connection, wherein the end effector includes a thermal choke located between a substrate support region of the end effector and the second rotatable connection, and wherein the second rotatable connection includes a rotary thermal coupling having interlaced members rotatable relative to each other; and transferring heat from the robotic arm to outside the robot actuator, as shown in block 302, wherein the thermal choke assists in reducing heat transfer from the substrate support region to the second link and the second rotatable connection, and wherein the rotary thermal coupling at the second rotatable connection assists in increasing heat transfer from the end effector to the second link. The first rotatable connection may include a first rotatable thermal coupling member having interlaced members that are rotatable relative to each other, and wherein the first rotatable thermal coupling member, which transfers heat from the robot arm to the robot actuator, is included at the first rotatable connection, thereby assisting in increasing heat transfer from the second link to the first link.

[0073] Figures 14-17 Other alternative examples of thermal chokes are shown in the figure. Figure 14 This illustrates that multiple thermal chokes can be arranged at different lengths along the connecting rod 70'. These thermal chokes may also comprise one or more different refractory materials, as well as one or more different sizes and shapes. Figure 15 It is shown that multiple heat-resistant components can be inserted into grooves inside a single metal component; possibly from different sides, such as from the top and bottom or from the left and right sides. The link 70'' may have a single metal frame component having a lattice shape or multiple groove shapes to accommodate the component 84, or having the component 84 molded or formed therein. Figure 16 The integral frame member shown for the connecting rod 70''' may have a closed or substantially closed recess 73 for receiving member 84. The opening of the recess 73 may be closed after assembly by any suitable means, such as an attached door, hatch, or other cover. Figure 17 This illustrates that arm 14' can have more than one thermal choke in more than one link. Figure 17 In this configuration, the third link 70 has a heat choke 84 closer to the rotary joint 78 than the substrate support region 71 (closer to the rear of the link 70 than the front of the link 70), and the second link 68' has a heat choke 84' closer to the rotary joint 78 than the rotary joint 76 (closer to the front of the link 68' than the rear of the link 68'). Therefore, more than one link can be provided with a heat choke, and the position of the heat choke on the link can be any suitable longitudinal length position; it may be different or it may be the same.

[0074] It should be understood that the foregoing description is illustrative only. Various alternatives and modifications can be devised by those skilled in the art. For example, the features recited in the various dependent claims can be combined with each other in any suitable combination(s). Furthermore, features from the different embodiments described above can be selectively combined to form new embodiments. Therefore, this specification is intended to include all such alternatives, modifications, and variations falling within the scope of the appended claims.

Claims

1. An apparatus comprising: Robot actuator; as well as A robotic arm connected to the robot actuator, wherein the robotic arm includes, The first link connected to the robot actuator A second link rotatably connected to the first link at the first rotatable connection, and An end effector rotatably connected to the second link at a second rotatable connection, wherein the end effector includes, Substrate support region, and A thermally resistant choke is positioned between a second rotatable connection and a substrate support region, coupling the second rotatable connection to the substrate support region. The thermally resistant choke includes at least one first material having a resistance configured to control heat transfer between the substrate support region and the second rotatable connection. At least one second material is disposed on and covers at least a portion of the thermally resistant choke, the substrate support region, and the second rotatable connection, and also covers the thermally resistant choke, the at least a portion of the substrate support region, and the at least a portion of the second rotatable connection. At least one of the first rotatable connection or the second rotatable connection includes a rotatable thermal coupling member having interlaced members that are rotatable relative to each other.

2. The apparatus of claim 1, wherein the robot actuator includes an actuator housing and a spindle assembly movably located within the actuator housing, wherein the spindle assembly includes a coaxial actuator shaft and a motor connected to the actuator shaft.

3. The apparatus of claim 2, wherein the rotary thermal coupling comprises a first rotary thermal coupling located at an external driver shaft of the coaxial driver shaft.

4. The apparatus of claim 3, wherein the rotatable thermal coupling member comprises a second rotatable thermal coupling member located at the first rotatable connection and a third rotatable coupling member located at the second rotatable connection.

5. The apparatus of claim 1, wherein the robotic arm includes pulleys and a belt, the pulleys and the belt being configured to rotate the second link and the end effector at the first rotatable connection and the second rotatable connection.

6. The apparatus of claim 5, wherein the first rotatable connection comprises a first rotatable thermal coupling member having a first interlaced member, wherein the first interlaced member is rotatable relative to each other about a rotation axis of the first rotatable connector.

7. The apparatus of claim 6, wherein the second rotatable connection includes a second rotatable thermal coupling member having second interlaced members, wherein the second interlaced members are rotatable relative to each other about a rotation axis of the second rotatable connection.

8. The apparatus of claim 1, wherein the at least one first material of the thermal resistance choke comprises a refractory material connecting the first portion of the end effector to the second portion of the end effector.

9. The apparatus of claim 8, wherein the at least one second material comprises an epoxy, the at least one second material being disposed on the at least a portion of the substrate support region, the thermal resistance choke, and the at least a portion of the second rotatable connection.

10. The apparatus of claim 8, wherein the thermal choke separates the first portion from the second portion.

11. The apparatus of claim 1, further comprising at least one heat pipe having opposing ends thermally connected to at least one link of the robotic arm or thermally connected to the rotary thermal coupling of the robotic arm.

12. An apparatus comprising: Robot actuator; as well as A robotic arm connected to the robot actuator, wherein the robotic arm includes, The first link connected to the robot actuator A second link rotatably connected to the first link at the first rotatable connection, and At least one third link is rotatably connected to the second link at at least one second rotatable connection, wherein the at least one third link includes a thermal resistance choke positioned between a substrate support region of the at least one third link and the second rotatable connection, and coupling the substrate support region of the at least one third link to the second rotatable connection, the thermal resistance choke comprising, At least one first material, said first material having a resistance configured to control thermal transfer between the substrate support region and the second rotatable connection, and At least one second material is disposed on at least one first material of the thermal resistance choke, at least a portion of the substrate support region, and at least a portion of the second rotatable connection, and covers the at least one first material of the thermal resistance choke, at least a portion of the substrate support region, and at least a portion of the second rotatable connection. At least one of the first rotatable connection or the second rotatable connection includes a rotatable thermal coupling member having interlaced members that are rotatable relative to each other.

13. The apparatus of claim 12, further comprising at least one heat pipe having opposing ends thermally connected to at least one link of the links of the robot arm or thermally connected to the rotary thermal coupling of the robot arm.

14. The apparatus of claim 12, wherein the at least one first material of the thermal resistance choke comprises a refractory material.

15. The apparatus of claim 14, wherein the at least one second material comprises an epoxy, the at least one second material being disposed on the at least one first material of the thermal resistance choke and the at least a portion of the substrate support region of the end effector and the at least a portion of the second rotatable connection, and covering the at least one first material of the thermal resistance choke and the at least a portion of the substrate support region of the end effector and the at least a portion of the second rotatable connection.

16. A method comprising: An end effector is provided, the end effector including a thermal resistance choke positioned between a first end of the end effector having a substrate support region and an opposite second end of the end effector, and coupling the first end of the end effector having the substrate support region to the opposite second end of the end effector, wherein the thermal resistance choke includes at least one first material having a resistance configured to control thermal transfer between the substrate support region and the opposite second end of the end effector, and wherein at least one second material is disposed on and over the at least one first material and at least a portion of the first end of the end effector and the opposite second end of the end effector; as well as The second end of the end effector is connected to a link at a rotary connection, wherein the link and the end effector are configured to at least partially form the arm of a substrate delivery robot, wherein the connection of the relative second end of the end effector to the link includes providing a rotary thermal coupling having interlaced members that are rotatable relative to each other at the rotary connection.

17. A method comprising: A mobile robotic arm is used to position a substrate on an end effector of the robotic arm, wherein the robotic arm includes a first link connected to a robot actuator, a second link rotatably connected to the first link at a first rotatable connection, and an end effector rotatably connected to the second link at a second rotatable connection, wherein the end effector includes a thermally resistant choke positioned between a substrate support region of the end effector and the second rotatable connection, and coupling the substrate support region of the end effector to the second rotatable connection, wherein the thermally resistant choke includes at least one first material having a resistance configured to control heat transfer between the substrate support region and the second rotatable connection, and wherein at least one second material is disposed on the thermally resistant choke and at least a portion of the substrate support region of the end effector and at least a portion of the second rotatable connection, and covers the thermally resistant choke and at least a portion of the substrate support region of the end effector and at least a portion of the second rotatable connection, and wherein the second rotatable connection includes a rotational thermal coupling having interlaced members rotatable relative to each other; as well as Heat is transferred from the robot arm to the outside of the robot actuator, wherein the thermal choke assists in reducing the heat to be transferred from the substrate support region to the second link and the second rotatable connection, and wherein the rotary thermal coupling at the second rotatable connection assists in increasing the heat transfer from the end effector to the second link.

18. The method of claim 17, wherein the first rotatable connection comprises a first rotatable thermal coupling member having interlaced members rotatable relative to each other, and wherein the transfer of heat from the robot arm to outside the robot actuator comprises: The first rotatable thermal coupling at the first rotatable connection assists in increasing heat transfer from the second link to the first link.

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