A leak detection method and system, computer readable storage medium

Abstract

This invention provides a leak detection method and system, and a computer-readable storage medium. The leak detection method is used to detect whether the cooling water of an object to be cooled is leaking. The object to be cooled is connected to a water supply pipe and a water outlet pipe, respectively. Cooling water flows sequentially along the water supply pipe, the object to be cooled, and the water outlet pipe. The leak detection method includes: acquiring a first flow rate of cooling water in the water supply pipe and a second flow rate of cooling water in the water outlet pipe in real time; acquiring a first difference between the first flow rate and the second flow rate at the same moment; integrating the first difference over time to obtain an integral value; and determining whether the cooling water of the object to be cooled is leaking based on the integration time, the integral value, a preset time, and a preset leakage volume threshold. This method can be executed independently for each object to be cooled to effectively locate the cooling water leak of a single object, and also has the advantages of high accuracy and no need to add chemicals.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a leakage detection method and system, and a computer-readable storage medium. Background Technology

[0002] Local scrubbers in semiconductor wafer fabs, also known as point-of-use (POU) scrubbers, are installed at the exhaust end of individual process equipment (such as etching equipment, chemical vapor deposition equipment, EUV lithography machines, etc.). Their core function is to treat exhaust gases emitted from process equipment locally, protecting wafers, equipment, and the entire wafer fab environment. Currently, process cooling water is used to cool the heat exchangers and combustion chambers of the local scrubber. The process cooling water is a closed-loop high-purity water system with a typical flow rate of 5L / min to 50L / min. During normal operation, leak detection of the cooling water at the local scrubber is required.

[0003] Existing leak detection methods include differential detection, fluorescent tracer detection, sodium ion detection, pH detection, and offline helium detection. Among these, the differential detection method is susceptible to interference from valve pulsation and switching, and is prone to missing small, chronic leaks (less than 0.2 L / min). The fluorescent tracer method requires continuous chemical dosing, resulting in high costs and increased wastewater treatment burden. Sodium ion detection and pH detection methods are easily affected by wastewater composition and cannot pinpoint the specific local scrubber where the leak is occurring. Offline helium detection requires system shutdown and cannot achieve continuous monitoring. Summary of the Invention

[0004] The purpose of this invention is to provide a leak detection method and system, and a computer-readable storage medium, to achieve leak detection of the object to be cooled with zero chemical addition, high accuracy, and the ability to pinpoint the specific leak.

[0005] To achieve the above objectives, the present invention provides a leakage detection method for detecting whether the cooling water of an object to be cooled is leaking. The object to be cooled is connected to a water supply pipe and a water outlet pipe, and the cooling water flows sequentially along the water supply pipe, the object to be cooled, and the water outlet pipe. The leakage detection method includes:

[0006] The first flow rate of cooling water in the water supply pipe and the second flow rate of cooling water in the water outlet pipe are acquired in real time.

[0007] Obtain the first difference between the first flow rate and the second flow rate at the same time.

[0008] Integrate the first difference over time to obtain the integral value;

[0009] The system determines whether the cooling water of the object to be cooled is leaking based on the integration time, the integration value, the preset time, and the preset leakage volume threshold.

[0010] Optionally, a first flow meter is provided on the water supply pipe, the first flow meter being configured to measure the flow rate of the fluid in the water supply pipe and provide a first reading; a second flow meter is provided on the water outlet pipe, the second flow meter being configured to measure the flow rate of the fluid in the water outlet pipe and provide a second reading;

[0011] The steps for obtaining the first traffic and the second traffic include:

[0012] The first reading and the second reading are acquired in real time;

[0013] The first flow rate is obtained based on the first reading; and,

[0014] The second flow rate is obtained based on the second reading.

[0015] Optionally, a first flow meter is provided on the water supply pipe, the first flow meter being configured to measure the flow rate of the fluid in the water supply pipe and provide a first reading; a second flow meter is provided on the water outlet pipe, the second flow meter being configured to measure the flow rate of the fluid in the water outlet pipe and provide a second reading;

[0016] The steps for obtaining the first traffic and the second traffic include:

[0017] The first reading and the second reading are acquired in real time;

[0018] Determine whether the first reading is valid. If so, obtain the first flow rate based on the first reading. If the first reading at a certain moment is invalid, obtain a first substitute value for the first reading at the corresponding moment based on the valid first readings before and after the corresponding moment and linear interpolation, and obtain the first flow rate based on the first substitute value; and,

[0019] Determine whether the second reading is valid. If it is, obtain the second flow rate based on the second reading. If the second reading at a certain moment is invalid, obtain the second alternative value of the second reading at the corresponding moment based on the valid second readings before and after the corresponding moment and the linear interpolation method, and obtain the second flow rate based on the second alternative value.

[0020] Optionally, the step of determining whether the first reading is valid includes at least one of the following:

[0021] The validity of the first reading is determined based on the signal-to-noise ratio of the first flow meter.

[0022] The validity of the first reading is determined based on the signal quality index of the first flow meter.

[0023] The validity of the first reading is determined based on statistical filtering; and / or,

[0024] The steps for determining whether the second reading is valid include at least one of the following:

[0025] The validity of the second reading is determined based on the signal-to-noise ratio of the second flow meter.

[0026] The validity of the second reading is determined based on the signal quality indicators of the second flow meter.

[0027] The validity of the second reading is determined based on statistical filtering.

[0028] Optionally, the steps of determining whether the first reading is valid and whether the second reading is valid include:

[0029] Obtain the second difference between the first reading and the second reading at the same time.

[0030] Obtain the average of the second difference over multiple consecutive time points;

[0031] Determine whether the ratio of the second difference to the average value at any time point in the series of time points is greater than a set value. If not, determine that both the first and second readings at the corresponding time point are valid; if so, determine that both the first and second readings at the corresponding time point are invalid.

[0032] Optionally, the step of obtaining the first flow rate based on the first reading includes: using the first reading as the first flow rate;

[0033] The step of obtaining the second flow rate based on the second reading includes: using the second reading as the second flow rate; or...

[0034] The steps of obtaining the first traffic and the second traffic also include:

[0035] The first temperature of the cooling water in the water supply pipe and the second temperature of the cooling water in the water outlet pipe are acquired in real time.

[0036] The step of obtaining the first flow rate based on the first reading includes:

[0037] The first flow rate at the corresponding time is obtained based on the volume expansion coefficient of the cooling water, the first reading at the same time, and the first temperature;

[0038] The step of obtaining the second flow rate based on the second reading includes:

[0039] The second flow rate at the corresponding moment is obtained based on the volume expansion coefficient of the cooling water, the second reading at the same moment, and the second temperature.

[0040] Optionally, the step of obtaining the first traffic based on the first substitution value includes: using the first substitution value as the first traffic;

[0041] The step of obtaining the second traffic based on the second substitution value includes: using the second substitution value as the second traffic; or...

[0042] The steps of obtaining the first traffic and the second traffic also include:

[0043] The first temperature of the cooling water in the water supply pipe and the second temperature of the cooling water in the water outlet pipe are acquired in real time.

[0044] The step of obtaining the first flow rate at the corresponding time based on the first substitution value includes:

[0045] The first flow rate at the corresponding time is obtained based on the volume expansion coefficient of the cooling water, the first substitution value at the same time, and the first temperature;

[0046] The step of obtaining the second flow rate based on the second reading includes:

[0047] The second flow rate at the corresponding time is obtained based on the volume expansion coefficient of the cooling water, the second substitution value at the same time, and the second temperature.

[0048] Optionally, the leakage detection method further includes:

[0049] Training parameters are obtained based on all integral values ​​of the object to be cooled over a consecutive n days in which no cooling water leakage has occurred; n is a natural number greater than 0, and the training parameters include the mean, standard deviation, 95th percentile, maximum deviation, and rate of change of all integral values ​​of the object to be cooled over a consecutive n days in which no cooling water leakage has occurred.

[0050] The leakage volume threshold is updated based on the training parameters.

[0051] Optionally, the object to be cooled is a local scrubber, and the water supply pipe and the water outlet pipe are respectively connected to a cooling water storage tank;

[0052] After determining that there is a cooling water leak, the leak detection method further includes:

[0053] The ion index parameters in the cooling water storage tank are obtained, and it is determined whether the relationship between the ion index parameters and the benchmark value meets the preset requirements. If yes, it is determined that no ion leakage has occurred in the local scrubber, and a first-level alarm message is generated. If no, it is determined that at least one of the local scrubbers has ion leakage, and a second alarm message is generated. The second alarm message is different from the first alarm message.

[0054] Optionally, the number of local scrubbers is multiple, and the multiple local scrubbers are connected in parallel;

[0055] After the second-level alarm information is generated, the leakage detection method further includes:

[0056] Obtain the rate of change of the integral value of each of the local washers;

[0057] Check each of the objects to be cooled for ion leakage in descending order of the rate of change of the integral value.

[0058] To achieve the above objectives, the present invention also provides a leak detection system for detecting whether the cooling water of an object to be cooled is leaking. The object to be cooled is connected to a water supply pipe and a water outlet pipe, and the cooling water flows sequentially along the water supply pipe, the object to be cooled, and the water outlet pipe. The leak detection system includes:

[0059] A first flow meter is installed on the water supply pipe, and the first flow meter is configured to measure the flow rate of the fluid in the water supply pipe and provide a first reading;

[0060] A second flow meter, disposed on the outlet pipe, is configured to measure the flow rate of the fluid within the outlet pipe and provide a second reading; and,

[0061] The control unit is communicatively connected to the first flow meter and the second flow meter and is configured to perform the leak detection method as described above; wherein the first flow rate is related to the first reading and the second flow rate is related to the second reading.

[0062] To achieve the above objectives, the present invention also provides a computer-readable storage medium having a program stored thereon, which, when executed, performs the leakage detection method as described above.

[0063] Compared with the prior art, the leakage detection method and system and the computer-readable storage medium of the present invention have the following advantages:

[0064] The aforementioned leak detection method is used to detect whether the cooling water of an object to be cooled is leaking. The object to be cooled is connected to a water supply pipe and a water outlet pipe, respectively, and the cooling water flows sequentially along the water supply pipe, the object to be cooled, and the water outlet pipe. The leak detection method includes: acquiring a first flow rate of cooling water in the water supply pipe and a second flow rate of cooling water in the water outlet pipe in real time; acquiring a first difference between the first flow rate and the second flow rate at the same moment; integrating the first difference over time to obtain an integral value; and determining whether the cooling water of the object to be cooled is leaking based on the integration time, the integral value, a preset time, and a preset leakage volume threshold. This leak detection method can be executed independently for each object to be cooled to effectively locate the cooling water leak of a single object. Furthermore, by using time integration for cooling water leak determination, it eliminates the need for chemical additives and reduces interference from factors such as pulsation and switching of cooling water valves, effectively improving the accuracy of the determination. Attached Figure Description

[0065] The accompanying drawings are provided to better understand the invention and are not intended to unduly limit the scope of the invention. Wherein:

[0066] Figure 1 This is a schematic diagram illustrating an application scenario of the leakage detection method provided by the present invention according to an embodiment;

[0067] Figure 2 This is a flowchart of a leakage detection method provided by the present invention according to an embodiment.

[0068] [The following are explanations of the reference numerals in the attached drawings]: 10-Object to be cooled, 20-Water supply pipe, 30-Water outlet pipe, 40-Cooling water storage tank, 110-First flow meter, 120-Second flow meter, 130-First temperature acquisition element, 140-Second temperature acquisition element, 150-Control unit, 160-Alarm, 170-pH meter, 180-Fluoride ion concentration detection element. Detailed Implementation

[0069] The following specific examples illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of the present invention. Therefore, the drawings only show components related to the present invention and are not drawn according to the actual number, shape, and size of components in the actual implementation. In the actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.

[0070] Furthermore, while each embodiment described below possesses one or more technical features, this does not imply that users of the present invention must simultaneously implement all technical features in any embodiment, or can only separately implement some or all technical features in different embodiments. In other words, provided it is feasible, those skilled in the art can, based on the disclosure of the present invention and depending on design specifications or implementation requirements, selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, thereby increasing the flexibility in implementing the present invention.

[0071] As used herein, the singular forms “a,” “an,” and “the” include plural objects, and the plural form “multiple” includes two or more objects, unless otherwise expressly indicated. As used herein, the term “or” is generally used to include the meaning of “and / or,” unless otherwise expressly indicated, and the terms “installed,” “connected,” and “linked” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection. Connections can be mechanical or electrical. Connections can be direct or indirect through an intermediate medium, and can be internal communication between two elements or an interaction between two elements. Relational terms such as “first,” “second,” etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate or imply relative importance or implicitly specify the number of indicated technical features. It should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Those skilled in the art can understand the specific meaning of the above terms in the present invention according to the specific circumstances.

[0072] To make the objectives, advantages, and features of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clearly illustrate the objectives of the embodiments of the present invention. The same or similar reference numerals in the drawings represent the same or similar parts.

[0073] One of the objectives of this invention is to provide a leakage detection method for detecting leaks such as... Figure 1 Check whether the cooling water of the object 10 to be cooled is leaking. (Reference) Figure 1 The object to be cooled 10 is connected to a water supply pipe 20 and an outlet pipe 30. Cooling water flows from a cooling water storage tank 40 into the object to be cooled 10 along the water supply pipe 20, and then flows back to the cooling water storage tank 40 along the outlet pipe 30. That is, the cooling water circulates between the cooling water storage tank 40, the water supply pipe 20, the object to be cooled 10, and the outlet pipe 30. Furthermore, the number of objects to be cooled 10 is at least one. When there are multiple objects to be cooled 10, the multiple objects to be cooled 10 are connected in parallel. The objects to be cooled 10 include, but are not limited to, local scrubbers.

[0074] The leakage detection method is as follows: Figure 2 As shown, it includes:

[0075] Step S10: Real-time acquisition of the first flow rate of cooling water in the water supply pipe 20 and the second flow rate of cooling water in the water outlet pipe 30.

[0076] Step S20: Obtain the first difference between the first flow rate and the second flow rate at the same time.

[0077] Step S30: Integrate the first difference over time to obtain the integral value.

[0078] Step S40: Determine whether the cooling water of the object to be cooled 10 is leaking based on the integration time, the integration value, the preset time, and the preset leakage volume threshold.

[0079] Each of the objects to be cooled 10 is connected to a water supply pipe 20 and a water outlet pipe 30, respectively. Therefore, the leakage detection method can be executed for each of the objects to be cooled 10, thereby accurately locating the object 10 where a cooling water leak has occurred. Determining whether a cooling water leak has occurred in the object 10 by integrating the first difference over time avoids interference caused by the opening and closing of related cooling water valves and valve pulsation, improving the accuracy of the determination. Furthermore, it eliminates the need for chemical additives, reducing costs and wastewater treatment complexity.

[0080] In practice, a first flow meter 110 is installed on the water supply pipe 20, and a second flow meter 120 is installed on the water outlet pipe 30. The first flow meter 110 is configured to measure the flow rate of the fluid in the water supply pipe 20 and provide a first reading, and the second flow meter 120 is configured to measure the flow rate of the fluid in the water outlet pipe 30 and provide a second reading. The first flow rate is related to the first reading, and the second flow rate is related to the second reading.

[0081] It should be noted that the first flow meter 110 and the second flow meter 120 have a set sampling frequency. The meaning of "real-time acquisition of the first flow rate in the water supply pipe 20 and the second flow rate in the water outlet pipe 30" in step S10 is to acquire the first flow rate based on the sampling frequency of the first flow meter 110 and to acquire the second flow rate based on the sampling frequency of the second flow meter 120.

[0082] It should also be noted that the fluid in the water supply pipe 20 includes cooling water or includes cooling water and air bubbles. The fluid in the water outlet pipe 30 includes cooling water or includes cooling water and air bubbles.

[0083] In addition, the leak detection method may also include the following step S50, which is executed when it is determined that the cooling water of the object to be cooled 10 is leaking, and includes generating a first alarm message. This alerts the operator that the cooling water of the object to be cooled 10 is leaking.

[0084] The following describes the leakage detection method in more detail through several embodiments.

[0085] <Example 1>

[0086] In this embodiment, step S10 includes:

[0087] Step S111: Acquire the first reading in real time and use the first reading as the first flow rate.

[0088] Step S112: Acquire the second reading in real time and use the second reading as the second flow rate.

[0089] This approach allows for quick and easy acquisition of the first and second traffic flows, reducing computational load.

[0090] The specific operation in step S20 includes: subtracting the first flow rate and the second flow rate at the same time to obtain the first difference value.

[0091] Step S30 is performed based on formula (1), which is: ,in This represents the integral value. Let t represent the first difference, and t represent time.

[0092] The specific operation of step S40 includes: if the integral value obtained when the integral time is less than or equal to the preset time is greater than the preset leakage volume threshold, then it is determined that the cooling water of the object to be cooled 10 is leaking; if the integral value obtained when the integral time is greater than or equal to the preset time is less than or equal to the preset leakage volume threshold, then it is determined that the cooling water of the object to be cooled 10 is not leaking.

[0093] In practice, both the preset duration and the preset leakage volume threshold are determined as needed.

[0094] Step S50 is performed with reference to existing technology.

[0095] Taking the water supply pipe 20 and the water outlet pipe 30 with diameters of 3 / 4 inch to 1 inch, the sampling frequency of the first flow meter 110 and the second flow meter 120 of 5 seconds / time, the preset duration of 4 hours, and the preset leakage volume threshold of 30L as an example, the effectiveness of the leakage detection method provided in this embodiment will be explained. Specifically:

[0096] The leakage rate of cooling water in the object to be cooled 10 is simulated to be 0.1 L / min, and the leakage detection method provided in this embodiment is executed. During step S30, when the integration time is 3.2 h, the obtained integral value reaches 32.5 L, meaning that the integral value obtained when the integration time is less than 4 h is greater than 30 L. Therefore, when step S40 is executed, it is determined that the object to be cooled 10 has experienced cooling water leakage.

[0097] The simulation assumes no cooling water leakage in the object to be cooled 10, and the leakage detection method provided in this embodiment is executed. During step S30, when the integration time reaches 12 hours, the obtained integral value is 2.1L, which is much less than 30L. Therefore, when step S40 is executed, it is determined that the object to be cooled 10 has no cooling water leakage. In fact, when step S30 is executed, the integral value obtained when the integration time is 4 hours is less than 30L, and step S40 can be executed to determine that the object to be cooled 10 has no cooling water leakage.

[0098] <Example 2>

[0099] The density of cooling water is related to its temperature. In practice, for every 1°C increase in temperature, the density of cooling water decreases by approximately 0.02%, thus increasing the volume of the same mass of cooling water. After flowing through the object to be cooled 10, the temperature of the cooling water increases; that is, the temperature of the cooling water in the outlet pipe 30 is higher than the temperature of the cooling water in the supply pipe 20.

[0100] In some scenarios, the first flow meter 110 and the second flow meter 120 are volumetric flow meters, measuring the volumetric flow rate of the fluid. As a result, the temperature references corresponding to the first flow rate obtained based on the first reading and the second flow rate obtained based on the second reading are different, which will affect the detection results of the leak detection method.

[0101] Therefore, the difference between this embodiment and Embodiment 1 is that the first reading is not directly used as the first flow rate, and the second reading is not directly used as the second flow rate. Instead, the influence of temperature is taken into account, and the first reading and the second reading are corrected by temperature.

[0102] Therefore, the specific operation of step S10 in this embodiment includes:

[0103] Step S121: Acquire the first reading and the second reading in real time; and acquire the first temperature of the cooling water in the water supply pipe 20 and the second temperature of the cooling water in the water outlet pipe 30 in real time.

[0104] Step S122: Based on the first reading and the first temperature at the same time, and the volume expansion coefficient of the cooling water, obtain the first flow rate at the corresponding time.

[0105] Step S123: Based on the second reading and the second temperature at the same time, and the volume expansion coefficient of the cooling water, obtain the second flow rate at the corresponding time.

[0106] Specifically, step S121 includes: acquiring the first reading, the second reading, the first temperature, and the second temperature at a first time point; acquiring the first reading, the second reading, the first temperature, and the second temperature at a second time point; ... acquiring the first reading, the second reading, the first temperature, and the second temperature at a p-th time point. The value of p is an integer greater than 1.

[0107] Step S122 includes: obtaining the first flow rate at the first time based on the first reading and the first temperature at the first time and the volume expansion coefficient of the cooling water; obtaining the first flow rate at the second time based on the first reading and the first temperature at the second time and the volume expansion coefficient of the cooling water... obtaining the first flow rate at the p-th time based on the first reading and the first temperature at the p-th time and the volume expansion coefficient of the cooling water.

[0108] Step S123 includes: obtaining the second flow rate at the first time based on the second reading and the second temperature at the first time, and the volume expansion coefficient of the cooling water; obtaining the second flow rate at the second time based on the second reading and the second temperature at the second time, and the volume expansion coefficient of the cooling water... obtaining the second flow rate at the p-th time based on the second reading and the second temperature at the p-th time, and the volume expansion coefficient of the cooling water.

[0109] Both the first temperature and the second temperature can be obtained through temperature acquisition elements. That is, as shown below... Figure 1 As shown, the water supply pipe 20 is equipped with a first temperature acquisition element 130, which is configured to acquire the first temperature of the cooling water in the water supply pipe 20. The water outlet pipe 30 is equipped with a second temperature acquisition element 140, which is configured to acquire the second temperature of the cooling water in the water outlet pipe 30.

[0110] Both steps S122 and S123 are performed based on formulas (2) and (3). Formula (2) is: Formula (3) is: ;in, Indicates the reference temperature; Indicates the cooling water at the reference temperature The density of the cooling water; α represents the volume expansion coefficient of the cooling water; when performing step S122, This represents the first flow rate. This indicates the first reading. This indicates the first temperature. This indicates that the cooling water is at the first temperature. The density below; when performing step S123, This indicates the second flow rate. This indicates the second reading. This indicates the second temperature. This indicates that the cooling water is at the second temperature. The density below.

[0111] The reference temperature The coefficient of volumetric expansion α of the cooling water is predetermined and measured experimentally beforehand. Specifically, it is assumed that 20°C is used as the reference temperature. The steps for measuring the volumetric expansion coefficient α of the cooling water include: measuring the density of the cooling water at 15°C, 20°C, 25°C, and 30°C respectively, and then obtaining the volumetric expansion coefficient α of the cooling water through linear fitting. It should be noted that when measuring the density of the cooling water at different temperatures, the holding time at each temperature must be at least 30 minutes.

[0112] The specific execution method of steps S20 to S50 in this embodiment is the same as that in Embodiment 1, and will not be repeated here.

[0113] The effects of the leakage detection method provided in Example 1 and the leakage detection method provided in this example will be explained next.

[0114] A simulation was performed on a scenario where the leakage rate of the cooling water in the object to be cooled 10 was 0.04 L / min, and the temperature of the cooling water in the outlet pipe 30 was 5°C higher than the temperature of the cooling water in the supply pipe 20. The leakage detection method provided in Example 1 and the leakage detection method provided in this example were executed respectively. The integral value obtained when the integration time of the leakage detection method provided in Example 1 reached 5.8 h was equal to the integral value obtained when the integration time of the leakage detection method provided in this example was 3.8 h, which is ΔV1.

[0115] As can be seen, if the preset duration is 6 hours and the preset leakage volume threshold is ΔV1, the leakage detection method provided in Embodiment 1 detects cooling water leakage after an integration time of 5.8 hours, while the leakage detection method provided in this embodiment can detect cooling water leakage after an integration time of 3.8 hours, resulting in a shorter detection time. If the preset duration is 4 hours and the preset leakage volume threshold is ΔV1, Embodiment 1 cannot detect cooling water leakage in the object to be cooled 10, while the leakage detection method provided in this embodiment can detect cooling water leakage in the object to be cooled 10. In other words, when the amount of cooling water leakage is unknown, the lower limit of the cooling water leakage amount that the leakage detection method provided in this embodiment can detect is smaller than the lower limit of the cooling water leakage amount that the leakage detection method provided in Embodiment 1 can detect. In other words, the leakage detection method provided in this embodiment can detect cooling water leakage more sensitively and reliably than the leakage detection method provided in Embodiment 1. In practice, the lower limit of cooling water leakage detection provided in this embodiment can reach 0.03 L / min.

[0116] <Example 3>

[0117] Air bubbles may be present in the water supply pipe 20 and the water outlet pipe 30. When air bubbles are present in the water supply pipe 20, the first flow meter 110 measures the total flow rate of cooling water and air bubbles in the water supply pipe 20; when air bubbles are present in the water supply pipe 30, the second flow meter 120 measures the total flow rate of cooling water and air bubbles in the water outlet pipe 30. Therefore, if there are too many air bubbles in the water supply pipe 20, the first flow rate obtained directly based on the first reading will be inaccurate; if there are too many air bubbles in the water outlet pipe 30, the second flow rate obtained directly based on the second reading will be inaccurate.

[0118] Based on this, the difference between this embodiment and Embodiment 1 or Embodiment 2 is that step S10 includes a step of determining whether the first reading and the second reading are valid. That is, in this embodiment, step S10 includes:

[0119] Step S131: Acquire the first reading and the second reading in real time.

[0120] Step S132: Determine whether the first reading and the second reading are valid. If both the first reading and the second reading are valid, proceed to step S133. If the first reading at a certain moment is invalid, proceed to steps S134 and S135 in sequence. If the second reading at a certain moment is invalid, proceed to steps S136 and S137 in sequence.

[0121] Step S133: Obtain the first flow rate based on the first reading, and obtain the second flow rate based on the second reading.

[0122] Step S134: Obtain a first alternative value for the first reading at the corresponding time based on the valid first reading before the corresponding time and the valid first reading after the corresponding time and the linear interpolation method.

[0123] Step S135: Obtain the first traffic based on the first substitution value.

[0124] Step S136: Obtain a second alternative value for the second reading at the corresponding time based on the valid second reading before the corresponding time and the valid second reading after the corresponding time and the linear interpolation method.

[0125] Step S137: Obtain the second flow rate based on the second substitution value.

[0126] Optionally, the step of determining whether the first reading is valid includes:

[0127] Step S1321: Determine whether the first reading is valid based on the signal-to-noise ratio of the first flow meter 110.

[0128] When the signal-to-noise ratio of the first flow meter 110 is greater than a first set value, the first reading is determined to be valid; when the signal-to-noise ratio of the first flow meter 110 is less than or equal to the first set value, the first reading is determined to be invalid. The first set value is set according to actual conditions; in an optional example, the first set value is 35 dB.

[0129] When the first flow meter 110 is an ultrasonic flow meter, optionally, the step of determining whether the first reading is valid includes:

[0130] Step S1322: Determine whether the first reading is valid based on the signal quality index of the first flow meter 110.

[0131] The signal quality index of the first flow meter 110 refers to the similarity index obtained by the first flow meter 110 after performing a correlation analysis on the waveforms of the ultrasonic signal at the previous moment and the waveforms of the ultrasonic signal at the next moment. It characterizes the signal quality of the first flow meter 110. The value range of the signal quality index of the first flow meter 110 is 0~1. Generally, when the signal quality index of the first flow meter 110 is greater than or equal to 0.85, the ultrasonic signal quality of the first flow meter 110 is considered good; when the signal quality index of the first flow meter 110 is less than 0.85, the ultrasonic signal quality of the first flow meter 110 is considered poor. Therefore, when the signal quality index of the first flow meter 110 is greater than or equal to 0.85, the first reading can be determined to be valid; when the signal quality index of the first flow meter 110 is less than 0.85, the first reading can be determined to be invalid.

[0132] Optionally, the step of determining whether the first reading is valid includes:

[0133] Step S1323: Determine whether the first reading is valid based on the statistical filtering method.

[0134] The statistical filtering method includes Z-score statistical method and / or median filtering method. When the statistical filtering method includes Z-score statistical method, in If the value is greater than the second set value, the first reading is deemed invalid. The meaning is the standardized deviation of the current first reading relative to the first readings within a preset time period. The second setting value is set as needed; in a specific example, the second setting value is 3.5. When the statistical filtering method includes median filtering, the specific operation of determining whether the first reading is valid based on median filtering is well known to those skilled in the art and will not be elaborated here.

[0135] Optionally, the step of determining whether the second reading is valid includes:

[0136] Step S1324: Determine whether the second reading is valid based on the signal-to-noise ratio of the second flow meter 120.

[0137] When the second flow meter 120 is an ultrasonic flow meter, optionally, the step of determining whether the second reading is valid includes:

[0138] Step S1325: Determine whether the second reading is valid based on the signal quality index of the second flow meter 120.

[0139] Optionally, the step of determining whether the second reading is valid includes:

[0140] Step S1326: Determine whether the second reading is valid based on the statistical filtering method.

[0141] Step S1324 can be performed with reference to step S1221, step S1325 can be performed with reference to step S1222, and step S1326 can be performed with reference to step S1223.

[0142] Optionally, step S132 includes:

[0143] Step S1327: First, obtain the second difference between the first reading and the second reading at the same time. Then, obtain the average value of the second difference at multiple consecutive times. Subsequently, determine whether the ratio of the second difference at any time to the average value is greater than a third set value. If yes, determine that the first reading and the second reading at the corresponding time are both invalid. If no, determine that the first reading and the second reading at the corresponding time are both valid.

[0144] It should be noted that step S132 may include at least one of steps S1321, S1322, and S1323, and at least one of steps S1324, S1325, and S1326; it may also include only step S1327; or it may include at least one of steps S1321, S1322, and S1323, and at least one of steps S1324, S1325, and S1326, as well as step S1337. Regardless of the method, if there is a case where the first reading is determined to be invalid, then the first reading is determined to be invalid; and if there is a case where the second reading is determined to be invalid, then the second reading is determined to be invalid. In other words, if there are multiple judgment logics for determining whether the first reading is valid in step S132, the first reading can only be determined to be valid if all the judgment logics for determining whether the first reading is valid determine that the first reading is valid; otherwise, the first reading is determined to be invalid. Similarly, if there are multiple judgment logics for determining whether the second reading is valid in step S132, the second reading can only be determined to be valid if all the judgment logics for determining whether the second reading is valid determine that the second reading is valid; otherwise, the second reading is determined to be invalid.

[0145] In some examples, step S133 includes using the first reading as the first flow rate and the second reading as the second flow rate. Step S135 includes using the first substitute value as the first flow rate. Step S137 includes using the second substitute value as the second flow rate.

[0146] In some other examples, step S10 further includes: acquiring the first temperature of the cooling water in the water supply pipe 20 and the second temperature of the cooling water in the water outlet pipe 30 in real time. Furthermore, step S133 includes acquiring the first flow rate at a corresponding time based on the first reading and the first temperature at the same moment, and the volume expansion coefficient of the cooling water; and acquiring the second flow rate at a corresponding time based on the second reading and the second temperature at the same moment, and the volume expansion coefficient of the cooling water. Step S135 includes acquiring the first flow rate based on the first substitution value and the first temperature at the same moment, and the volume expansion coefficient of the cooling water. Step S137 includes acquiring the second flow rate based on the second substitution value and the second temperature at the same moment, and the volume expansion coefficient of the cooling water. Here, steps S133, S135, and S137 are all executed based on the aforementioned formulas (2) and (3). It is easy to understand that during the execution of step S133, when acquiring the first flow rate, This represents the first flow rate. This indicates the first reading. This indicates the first temperature. This indicates that the cooling water is at the first temperature. The density below; when obtaining the second flow rate, This indicates the second flow rate. This indicates the second reading. This indicates the second temperature. This indicates that the cooling water is at the second temperature. The density below; when performing step S135, This represents the first flow rate. This represents the first substitution value. This indicates the first temperature. This indicates that the cooling water is at the first temperature. The density below; when performing step S137, This indicates the second flow rate. This represents the second substitution value. This indicates the second temperature. This indicates that the cooling water is at the first temperature. The density below.

[0147] Furthermore, linear interpolation is an existing technology. Therefore, the specific execution methods of steps S134 and S136 are content that can be known by those skilled in the art based on the existing technology, and will not be elaborated here.

[0148] The application of the leakage detection method provided in this embodiment can effectively reduce the interference of air bubbles in cooling water, and further improve the accuracy and reliability of cooling water leakage detection.

[0149] In practice, a defoamer (not shown in the figure) is installed inside the cooling water storage tank 40. Further, the cooling water detection method preferably includes step S60, which is executed when m consecutive first readings and / or m consecutive second readings are determined to be invalid. Step S60 includes generating a second alarm message. m is an integer greater than 1, preferably greater than 3, for example, 5. The second alarm message is different from the first alarm message. By executing step S60, the operator can be reminded that there are too many air bubbles in the water supply pipe 20 and / or the water outlet pipe 30, and the defoamer should be checked for abnormalities.

[0150] <Example 4>

[0151] The difference between this embodiment and embodiments one to three is that the cooling water detection method further includes step S70, which specifically includes:

[0152] Step S71: Obtain training parameters based on the integral values ​​of the object to be cooled 10 over a consecutive n days when no cooling water leakage has occurred. The training parameters include the mean, standard deviation, 95th percentile, maximum deviation, and rate of change of all the integral values ​​of the object to be cooled 10 over the consecutive n days when no cooling water leakage has occurred. n is a natural number greater than 0.

[0153] Step S72: Update the leakage volume threshold based on the training parameters.

[0154] In step S71, n is specifically determined as needed, for example, n is any one of 3, 5, and 7. Step S71 is performed using existing technology.

[0155] In step S72, a data normalization method can be used for model training, and the leakage volume threshold can be updated based on the training results. An example of a possible normalization method is the StandardScaler normalization method.

[0156] That is, in this embodiment, the leakage volume threshold is not a fixed value, but a value that is dynamically adjusted according to the operating state of the object to be cooled 10. This further improves the accuracy and sensitivity of the leakage detection method when detecting cooling water leaks, and shortens the detection time for cooling water leaks.

[0157] <Example 5>

[0158] In this embodiment, the object to be cooled 10 includes the local scrubber. Generally, if the local scrubber does not leak cooling water, it will not leak ions; however, if the local scrubber leaks cooling water, it may leak ions.

[0159] One difference between the leakage detection method provided in this embodiment and embodiments one to four is that it also includes a step of determining whether ion leakage has occurred in the local scrubber.

[0160] Specifically, after determining that a cooling water leak has occurred in the local scrubber, and before performing step S50, the leak detection method further includes:

[0161] Step S81: Obtain the ion index parameters in the cooling water storage tank 40.

[0162] Step S82: Determine whether the relationship between the ion index parameter and the benchmark value meets the preset requirements. If the determination result of step S82 is yes, it indicates that none of the local scrubbers have experienced ion leakage; if the determination result of step S82 is no, it indicates that at least one of the local scrubbers has experienced ion leakage.

[0163] The second difference between this embodiment and embodiments one through four is that the first alarm information includes a first-level alarm information and a second-level alarm information, and the second-level alarm information is different from the first-level alarm information. Furthermore, based on the judgment result of step S82, step S50 generates either the first-level alarm information or the second-level alarm information. Specifically, step S50 generates the first-level alarm information when the judgment result of step S82 is yes, and generates the second-level alarm information when the judgment result of step S82 is no.

[0164] By generating different levels of the first alarm information, the operator can be alerted not only to a cooling water leak but also to an ion leak from the local scrubber, so that the operator can take appropriate measures to reduce the losses caused by various leaks.

[0165] In this embodiment, the ion index parameters include at least one of pH value and fluoride ion concentration.

[0166] When the ion index parameter includes the pH value, the preset relationship is: the pH value is greater than or equal to the reference value. That is, when it is determined that the pH value is greater than or equal to the reference value, step S50 generates a first-level alarm message; when the pH value is less than the reference value, step S50 generates a second-level alarm message.

[0167] When the ion index parameter includes the fluoride ion concentration, the preset relationship is: the fluoride ion concentration is less than or equal to the benchmark value. That is, when the fluoride ion concentration is less than or equal to the benchmark value, step S50 generates a first-level alarm message; when the fluoride ion concentration is greater than the benchmark value, step S50 generates a second-level alarm message.

[0168] When the ion index parameters include the pH value and the fluoride ion concentration, the reference values ​​include a first reference value and a second reference value. The preset relationship includes: the pH value is greater than or equal to the first reference value, and the fluoride ion concentration is less than or equal to the second reference value. That is, when the pH value is greater than or equal to the first reference value, and the fluoride ion concentration is less than or equal to the second reference value, step S50 generates a first-level alarm message; when the pH value is less than the first reference value, and / or the fluoride ion concentration is greater than the second reference value, step S50 generates a second-level alarm message.

[0169] It should be understood that the reference values ​​are set as needed.

[0170] Typically, there are multiple local scrubbers. Once it is determined that an object 10 to be cooled has experienced ion leakage, it is necessary to identify as soon as possible which local scrubbers are experiencing the ion leakage, and to shut down and repair the local scrubbers experiencing the ion leakage.

[0171] Optionally, the third difference between this embodiment and embodiments one to four is that, after the second-level alarm information is generated, the leakage detection method may further include the step of confirming that the local scrubber has experienced ion leakage.

[0172] In some examples, the identification of which of the local scrubbers is experiencing ion leakage is achieved by performing steps S91 and S92 as follows.

[0173] Step S91 includes: obtaining the rate of change of the integral value of each of the local washers.

[0174] Step S92 includes: sequentially checking each of the local scrubbers for ion leakage in descending order of the rate of change of the integral value.

[0175] That is, priority is given to investigating whether the local scrubbers with large rates of change in the integral value have experienced ion leakage. This approach facilitates the rapid identification of local scrubbers experiencing ion leakage.

[0176] The specific execution method of step S91 is known to those skilled in the art, and step S92 can be executed in any suitable manner.

[0177] It should also be noted that the cooling water storage tank 40 is equipped with a pH meter 170 and / or a fluoride ion concentration detection element 180, wherein the pH meter 170 is used to measure the pH value in the cooling water storage tank 40, and the fluoride ion concentration detection element 180 is used to detect the fluoride ion concentration in the cooling water storage tank 40.

[0178] A second objective of this invention is to provide a leak detection system. For example... Figure 1 As shown, the leak detection system includes a first flow meter 110 and a second flow meter 120, and also includes a control unit 150. The control unit 150 is communicatively connected to the first flow meter 110 and the second flow meter 120, and is configured to receive the first reading of the first flow meter 110 and the second reading of the second flow meter 120, and to perform the leak detection method as described above.

[0179] In some embodiments, the first flow meter 110 is fixedly mounted on the water supply pipe 20, and the sensing end of the first flow meter 110 is located inside the water supply pipe 20; and the second flow meter 120 is fixedly mounted on the water outlet pipe 30, and the sensing end of the second flow meter 120 is located inside the water outlet pipe 30. Here, the first flow meter 110 can be a turbine flow meter or an electromagnetic flow meter; similarly, the second flow meter 120 can be a turbine flow meter or an electromagnetic flow meter. It should be understood that this arrangement ensures that the number of the first flow meters 110 and the number of the second flow meters 120 included in the leak detection system are the same as the number of the objects to be cooled 10.

[0180] In other embodiments, the first flow meter 110 is disposed outside the water supply pipe 20, and the second flow meter 120 is disposed outside the water outlet pipe 30. More preferably, the first flow meter 110 is detachably disposed on the water supply pipe 20, and the second flow meter 120 is detachably disposed on the water outlet pipe 30. Here, the first flow meter 110 and the second flow meter 120 can be ultrasonic flow meters. Furthermore, this arrangement allows the leak detection system to include only one first flow meter 110 and one second flow meter 120, and can be applied to multiple objects 10 to be cooled, reducing the hardware investment of the leak detection system.

[0181] More preferably, the leak detection system further includes an alarm 160. The control unit 150 is communicatively connected to the alarm 160 and controls the alarm 160 to generate alarm information according to the actual situation. The alarm information includes both the first alarm information and the second alarm information.

[0182] When the first flow meter 110 is fixedly installed on the water supply pipe 20 and the second flow meter 120 is fixedly installed on the water outlet pipe 30, it is preferable that the number of the alarms 160 is the same as the number of the objects to be cooled 10, and the alarms 160 are arranged in a one-to-one correspondence with the objects to be cooled 10, so that the operator can confirm the object to be cooled 10 that has a cooling water leak based on the alarms 160 that generate alarm information.

[0183] More preferably, the leak detection system further includes a first thermometer 130 and a second thermometer 140. The control unit 150 is communicatively connected to the first thermometer 130 and the second thermometer 140, and is configured to receive the first temperature measured by the first thermometer 130 and the second temperature measured by the second thermometer 140.

[0184] More preferably, the leak detection system may further include the pH meter 170 and / or the fluoride ion concentration detection element 180. The control unit 150 is communicatively connected to the pH meter 170 and / or the fluoride ion concentration detection element 180, and is configured to receive the pH value measured by the pH meter 170 and / or the fluoride ion concentration measured by the fluoride ion concentration detection element 180.

[0185] It should be noted that when the number of alarms 160 is the same as the number of objects 10 to be cooled, and they correspond one-to-one, and when the first alarm information includes the first-level alarm information and the second-level alarm information, each alarm 160 can generate the first-level alarm information and the second-level alarm information. However, when an alarm 160 generates the second-level alarm information, it only indicates that the local scrubber corresponding to that alarm 160 has experienced cooling water leakage, and does not indicate that the corresponding local scrubber has necessarily experienced ion leakage.

[0186] A third objective of this invention is to provide a computer-readable storage medium storing a program that, when executed, performs the aforementioned leakage detection method.

[0187] While the present invention has been disclosed above, it is not limited thereto. Those skilled in the art can make various modifications and variations to the present invention without departing from its spirit and scope. Therefore, if such modifications and variations fall within the scope of the claims and their equivalents, the present invention also intends to include such modifications and variations.

Claims

1. A leak detection method for detecting whether cooling water is leaking from an object to be cooled, wherein the object to be cooled is connected to a water supply pipe and a water outlet pipe, and the cooling water flows sequentially along the water supply pipe, the object to be cooled, and the water outlet pipe; characterized in that, The leakage detection method includes: The first flow rate of cooling water in the water supply pipe and the second flow rate of cooling water in the water outlet pipe are acquired in real time. Obtain the first difference between the first flow rate and the second flow rate at the same time. Integrate the first difference over time to obtain the integral value; The system determines whether the cooling water of the object to be cooled is leaking based on the integration time, the integration value, the preset time, and the preset leakage volume threshold.

2. The leakage detection method according to claim 1, characterized in that, The water supply pipe is equipped with a first flow meter, which is configured to measure the flow rate of the fluid in the water supply pipe and provide a first reading; the water outlet pipe is equipped with a second flow meter, which is configured to measure the flow rate of the fluid in the water outlet pipe and provide a second reading. The steps for obtaining the first traffic and the second traffic include: The first reading and the second reading are acquired in real time; The first flow rate is obtained based on the first reading; and, The second flow rate is obtained based on the second reading.

3. The leakage detection method according to claim 1, characterized in that, The water supply pipe is equipped with a first flow meter, which is configured to measure the flow rate of the fluid in the water supply pipe and provide a first reading; the water outlet pipe is equipped with a second flow meter, which is configured to measure the flow rate of the fluid in the water outlet pipe and provide a second reading. The steps for obtaining the first traffic and the second traffic include: The first reading and the second reading are acquired in real time; Determine whether the first reading is valid. If so, obtain the first flow rate based on the first reading. If the first reading at a certain moment is invalid, obtain a first substitute value for the first reading at the corresponding moment based on the valid first readings before and after the corresponding moment and linear interpolation, and obtain the first flow rate based on the first substitute value; and, Determine whether the second reading is valid. If it is, obtain the second flow rate based on the second reading. If the second reading at a certain moment is invalid, obtain the second alternative value of the second reading at the corresponding moment based on the valid second readings before and after the corresponding moment and the linear interpolation method, and obtain the second flow rate based on the second alternative value.

4. The leakage detection method according to claim 3, characterized in that, The steps for determining whether the first reading is valid include at least one of the following: The validity of the first reading is determined based on the signal-to-noise ratio of the first flow meter. The validity of the first reading is determined based on the signal quality index of the first flow meter. The validity of the first reading is determined based on statistical filtering; and / or, The steps for determining whether the second reading is valid include at least one of the following: The validity of the second reading is determined based on the signal-to-noise ratio of the second flow meter. The validity of the second reading is determined based on the signal quality indicators of the second flow meter. The validity of the second reading is determined based on statistical filtering.

5. The leakage detection method according to claim 3, characterized in that, The steps for determining whether the first reading is valid and whether the second reading is valid include: Obtain the second difference between the first reading and the second reading at the same time. Obtain the average of the second difference over multiple consecutive time points; Determine whether the ratio of the second difference to the average value at any time point in the series of time points is greater than a set value. If not, determine that both the first and second readings at the corresponding time point are valid; if so, determine that both the first and second readings at the corresponding time point are invalid.

6. The leakage detection method according to claim 2 or 3, characterized in that, The step of obtaining the first flow rate based on the first reading includes: using the first reading as the first flow rate; The step of obtaining the second flow rate based on the second reading includes: using the second reading as the second flow rate; or... The steps of obtaining the first traffic and the second traffic also include: The first temperature of the cooling water in the water supply pipe and the second temperature of the cooling water in the water outlet pipe are acquired in real time. The step of obtaining the first flow rate based on the first reading includes: The first flow rate at the corresponding time is obtained based on the volume expansion coefficient of the cooling water, the first reading at the same time, and the first temperature; The step of obtaining the second flow rate based on the second reading includes: The second flow rate at the corresponding moment is obtained based on the volume expansion coefficient of the cooling water, the second reading at the same moment, and the second temperature.

7. The leakage detection method according to claim 3, characterized in that, The step of obtaining the first traffic based on the first substitution value includes: using the first substitution value as the first traffic; The step of obtaining the second traffic based on the second substitution value includes: using the second substitution value as the second traffic; or... The steps of obtaining the first traffic and the second traffic also include: The first temperature of the cooling water in the water supply pipe and the second temperature of the cooling water in the water outlet pipe are acquired in real time. The step of obtaining the first flow rate at the corresponding time based on the first substitution value includes: The first flow rate at the corresponding time is obtained based on the volume expansion coefficient of the cooling water, the first substitution value at the same time, and the first temperature; The step of obtaining the second flow rate based on the second reading includes: The second flow rate at the corresponding time is obtained based on the volume expansion coefficient of the cooling water, the second substitution value at the same time, and the second temperature.

8. The leakage detection method according to claim 1, characterized in that, The leakage detection method further includes: Training parameters are obtained based on all integral values ​​of the object to be cooled over a consecutive n days in which no cooling water leakage has occurred; n is a natural number greater than 0, and the training parameters include the mean, standard deviation, 95th percentile, maximum deviation, and rate of change of all integral values ​​of the object to be cooled over a consecutive n days in which no cooling water leakage has occurred. The leakage volume threshold is updated based on the training parameters.

9. The leakage detection method according to claim 1, characterized in that, The object to be cooled includes a local scrubber, and the water supply pipe and the water outlet pipe are respectively connected to a cooling water storage tank; After determining that there is a cooling water leak, the leak detection method further includes: The ion index parameters in the cooling water storage tank are obtained, and it is determined whether the relationship between the ion index parameters and the reference value meets the preset requirements. If yes, it is determined that no ion leakage has occurred in the local scrubber, and a first-level alarm message is generated. If no, it is determined that at least one of the local scrubbers has ion leakage, and a second alarm message is generated. The second-level alarm message is different from the first-level alarm message.

10. The leakage detection method according to claim 9, characterized in that, The number of local scrubbers is multiple, and the multiple local scrubbers are connected in parallel; After the second-level alarm information is generated, the leakage detection method further includes: Obtain the rate of change of the integral value of each of the local washers; Check each of the objects to be cooled for ion leakage in descending order of the rate of change of the integral value.

11. A leak detection system for detecting whether cooling water is leaking from an object to be cooled, wherein the object to be cooled is connected to a water supply pipe and a water outlet pipe, and the cooling water flows sequentially along the water supply pipe, the object to be cooled, and the water outlet pipe, characterized in that, The leak detection system includes: A first flow meter is installed on the water supply pipe, and the first flow meter is configured to measure the flow rate of the fluid in the water supply pipe and provide a first reading; A second flow meter, disposed on the outlet pipe, is configured to measure the flow rate of the fluid within the outlet pipe and provide a second reading; and, The control unit is communicatively connected to the first flow meter and the second flow meter and is configured to perform the leakage detection method as described in any one of claims 1-10; wherein the first flow rate is related to the first reading and the second flow rate is related to the second reading.

12. A computer-readable storage medium having a program stored thereon, characterized in that, When the program is executed, the leakage detection method as described in any one of claims 1-10 is performed.

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