Heating disc based on diffusion barrier mechanism of pure aluminum interlayer and preparation method thereof

By introducing a pure aluminum intermediate layer between the aluminum alloy substrate and the fluorinated layer, the problem of uneven corrosion caused by the diffusion of alloying elements at high temperatures in high-strength aluminum alloy heating plates is solved, achieving uniform corrosion and high-temperature stability of the heating plates, thereby improving equipment reliability and product yield.

CN122214864APending Publication Date: 2026-06-16PIOTECH (SHENYANG) SEMICONDUCTOR EQUIPMENT CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
PIOTECH (SHENYANG) SEMICONDUCTOR EQUIPMENT CO LTD
Filing Date
2026-04-17
Publication Date
2026-06-16

AI Technical Summary

Technical Problem

In the existing technology, the uneven corrosion caused by the diffusion of alloying elements in high-strength aluminum alloy heating plates at high temperatures affects the reliability of equipment and the yield of products. Existing improvement solutions have failed to effectively prevent the diffusion of alloying elements, resulting in uneven fluorination layers.

Method used

A pure aluminum interlayer is introduced between the aluminum alloy substrate and the fluorinated layer. A dense aluminum fluoride layer is formed through physical vapor deposition and electrochemical fluorination processes. The pure aluminum interlayer prevents the diffusion of alloying elements, thus forming a uniform fluorinated layer.

Benefits of technology

It effectively blocks the diffusion of alloying elements to the surface, avoids uneven corrosion, improves the uniformity of the fluorinated layer and the thermomechanical stability of the equipment, reduces the risk of spalling and discharge, and improves process yield and equipment reliability.

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Abstract

The application discloses a heating disc based on a diffusion blocking mechanism of a pure aluminum intermediate layer and a preparation method thereof, and relates to the technical field of semiconductor manufacturing equipment. The heating disc comprises an aluminum alloy base body, a pure aluminum intermediate layer, an aluminum fluoride layer and the like. The pure aluminum intermediate layer is covered on the surface of the aluminum alloy base body and has an aluminum element content higher than 99%. The pure aluminum intermediate layer is used for blocking the diffusion of alloy elements in the aluminum alloy base body to the surface at high temperature. The aluminum fluoride layer is covered on the surface of the pure aluminum intermediate layer. The application breaks through the limitation of the base body material of the heating disc, can be optimized according to the mechanical property requirement, solves the problem of high-temperature deformation of the heating disc by selecting a high-strength aluminum alloy, avoids the adverse influence of alloy elements on the uniformity of fluorination corrosion, and provides greater flexibility for equipment design.
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