A planetary rotary evaporation device capable of realizing gradient coating layer

Abstract

This invention relates to the field of vapor deposition equipment technology, specifically a planetary rotary vapor deposition device capable of achieving gradient coating. It includes a top cover and a vapor deposition tank, the top cover being detachably mounted on the tank. A vapor deposition assembly is housed inside the tank, and a rotating assembly is located below the top cover. The rotating assembly has several driven components that drive the driven components to rotate. Each driven component has a loading section and several locking sections. The loading section holds paper, and the locking sections are located outside the loading section. The locking sections on the driven components ensure reliable clamping of the loading tray during the coating process and automatic release of the loading tray at the start of coating. Combined with the heat dissipation holes on the loading tray, this effectively solves the problem of deformation of flexible paper due to uneven heating on both sides. Furthermore, the unique clamping design simplifies the paper clamping process and improves operational efficiency. This solves the problems of easy substrate deformation and inconvenient clamping.

Description

Technical Field

[0001] This invention relates to the field of vapor deposition equipment technology, and in particular to a planetary rotary vapor deposition equipment capable of achieving gradient coating. Background Technology

[0002] Vacuum-metallized paper is widely used in packaging, decoration, and other fields due to its excellent metallic luster and environmentally friendly properties. The core of traditional metallized paper production processes, whether direct metallization or transfer metallization, is to form a uniform aluminum layer on the paper surface to achieve stable appearance and barrier properties.

[0003] In traditional processes, direct metallization involves placing paper in a vacuum chamber, allowing aluminum atoms evaporated at high temperatures to be directly deposited onto the paper surface. Transfer metallization, on the other hand, first forms an aluminum layer on a PET film, then transfers it to the paper surface using an adhesive. Although the two methods have different process paths, both aim for a high degree of uniformity in the coating on a macroscopic scale. This technological orientation stems primarily from two reasons: firstly, uniform coatings are easier to achieve large-scale continuous production through standardized processes; and secondly, the packaging industry's long-standing aesthetic preference for consistent metallic luster.

[0004] This "one-size-fits-all" uniform coating model is gradually revealing its limitations. In the high-end packaging sector, consumers' pursuit of visual depth and tactile differentiation makes it difficult for a single metallic luster to meet personalized design needs; in the anti-counterfeiting field, uniform coatings are easily imitated, making it difficult to form an effective technological barrier; in functional applications, such as food packaging requiring zoned control of oxygen permeability, and electronic devices requiring localized conductivity or shielding, uniform coatings cannot achieve differentiated configurations of regional functions.

[0005] To overcome these limitations, researchers began exploring the precise control of the spatial distribution of coating thickness on the same substrate. Currently, the main technical approach to achieving gradient coatings involves placing a shield between the evaporation source and the substrate. By designing shields of specific shapes and arrangements, the deposition path of aluminum vapor can be locally blocked, thereby forming a coating distribution with gradually varying thickness on the paper surface. This principle is similar to the physical mask technique in semiconductor photolithography, enabling a continuous transition from completely uncoated areas to thickly coated areas, providing technical possibilities for gradient decorative effects and zoned barrier functions.

[0006] Applying this technology to paper substrates presents a series of engineering challenges. The most prominent issue is controlling the deformation of paper as a flexible, porous material. In a vacuum coating environment, the paper is under high vacuum, causing adsorbed moisture and gases to escape rapidly. Simultaneously, the thermal radiation from the evaporation source raises the substrate temperature. Since the paper's front and back faces the high-temperature evaporation source and the low-temperature cooling platform respectively, a significant temperature gradient is formed, leading to uneven thermal expansion and contraction. This thermal effect, combined with the pressure difference generated during vacuum extraction, easily causes paper warping, wrinkling, and even breakage, severely affecting the precision of coating thickness control and the continuity of the coating.

[0007] The method of clamping and fixing paper also restricts the production efficiency and quality stability of gradient coating. Although traditional roll-to-roll continuous coating equipment can achieve high-efficiency production, its paper force control system has difficulty ensuring that the paper maintains stable flatness when facing local obstruction plates. Vacuum coating of sheet paper mostly uses clamps for fixing, but existing clamps generally have problems such as cumbersome clamping, insufficient positioning accuracy, and easy damage to the paper edges, making it difficult to balance convenience and reliability.

[0008] Therefore, how to solve the problem of deformation of flexible paper due to uneven heating on both sides, and how to simplify the paper clamping process, are the main problems currently faced by vapor deposition equipment. Summary of the Invention

[0009] The main objective of this invention is to provide a planetary rotary vapor deposition apparatus capable of achieving gradient coating, thereby solving the problems raised in related technologies.

[0010] To achieve the above objectives, according to one aspect of the present invention, a planetary rotary vapor deposition apparatus for achieving gradient coating is provided, comprising a top cover and a vapor deposition tank, the top cover being detachably mounted on the vapor deposition tank, a vapor deposition assembly being disposed inside the vapor deposition tank, a rotating assembly being disposed below the top cover, and a plurality of driven assemblies being disposed on the rotating assembly, the rotating assembly being used to drive the driven assemblies to rotate; the driven assemblies being disposed of a loading part and a plurality of locking parts, the loading part being used to hold paper, the locking parts being located outside the loading part; when the locking parts are fastened to the loading part, the loading part is pressed against the driven assemblies; when the locking parts are disengaged from the loading part, the loading part is disengaged from the driven assemblies.

[0011] Furthermore, the inner wall of the vapor deposition tank is provided with several guide grooves, which are used to guide the rotating assembly, guide the installation of the entire rotating assembly, and restrict the rotation of the gear ring.

[0012] Furthermore, the rotating assembly includes a top plate and a gear ring. The top plate is rotatably disposed below the top cover. A main shaft is rotatably disposed in the middle of the top plate, and a drive gear is fixedly disposed at the end of the main shaft. An auxiliary shaft is disposed between the top plate and the driven assembly. The top end of the auxiliary shaft is rotatably connected to the top plate, and the bottom end is connected to the driven assembly. It is used to support the driven assembly in the gear ring and enable the gear ring to rotate under the drive of the gear ring.

[0013] Furthermore, a number of limiting blocks are fixedly provided on the outer side of the gear ring, a number of protruding rods are fixedly provided on the lower surface, and a number of upright rods are fixedly provided on the upper surface. A ring is fixedly provided on the top of the upright rod. The ring is rotatably connected to the top plate and fixedly connected to the top cover. The limiting blocks correspond one-to-one with the guide grooves and can slide up and down in the guide grooves. The guide grooves restrict the rotation of the gear rings through the limiting blocks, so that the gear rings remain stationary relative to the vapor deposition tank.

[0014] Furthermore, the driven component includes a driven gear, the driven gear having a cavity inside, the cavity being used to accommodate the end of the locking part; the end of the locking part is connected as a whole within the cavity, so that several locking parts can move synchronously.

[0015] Furthermore, the loading unit includes a loading tray, which is fixedly connected to the driven gear by a plurality of first springs. When the first springs naturally extend, they push the loading tray away from the driven gear, creating a gap between the driven gear and the loading tray. The loading tray can radiate heat through the gap to dissipate heat. The loading tray has a plurality of through-holes for heat dissipation. During coating, the temperature on both sides of the paper can be radiated through the heat dissipation holes to balance the temperature on both sides of the paper.

[0016] Furthermore, the locking part includes a friction component and a pressing component. The pressing component is used to press the loading disc onto the driven gear and to fix the loading disc onto the driven gear. The friction component is used to generate frictional force, to maintain the rotational position of the pressing component, and to limit the rotation of the pressing component on the driven gear.

[0017] Furthermore, the extrusion assembly includes a rotating column, on which pressure plates and crossbars are fixedly mounted. The pressure plates and crossbars are located on the same straight line and on both sides of the rotating column. The pressure plates are used to press the loading tray onto the driven gear. The crossbars protrude from the loading tray and the driven gear, contacting the convex rod and rotating under the obstruction of the convex rod, thereby driving the pressure plates to rotate. A knob is fixedly mounted at the lower end of the rotating column, and a friction assembly is mounted at the upper end. Rotating the knob can drive the rotating column to rotate, thereby driving the pressure plates to rotate. A sprocket is mounted at the common end of the top of the rotating column, and a chain is mounted on the outer ring of several sprockets. The chain and sprockets are all meshed. The rotating columns of the three locking parts are linked by the sprockets and the chain, so the three pressure plates rotate out synchronously, ensuring that the three loading trays are released at the same time, preventing the loading trays from tilting and shaking, causing wrinkles on the paper.

[0018] Furthermore, the friction assembly includes an upper turntable and a lower turntable. An upper pressure ring is coaxially fixed above the upper turntable, and a lower pressure ring is coaxially fixed below the lower turntable. A second spring is fixed between the upper and lower turntables. The second spring is always under pressure, pushing the lower turntable away from the upper turntable. The sprocket, upper pressure ring, upper turntable second spring, lower turntable, and lower pressure ring are all located in the cavity of the driven gear. The lower pressure ring is pressed against the lower surface of the driven gear cavity under the thrust of the second spring. The top end of the rotating column passes through the cavity of the driven gear and is rotatably connected to the driven gear.

[0019] Furthermore, the clamping part includes a clamping piece, both ends of which are provided with threaded rods. The lower end of the threaded rod is fixedly provided with a protruding shank, and the upper end is a smooth rod. A limiting ring is fixedly provided at the top of the smooth rod. The diameter of the limiting ring is larger than the diameter of the smooth rod, and it is used to restrict the threaded rod to the driven component.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] By using a locking mechanism on the driven component, reliable clamping of the loading tray during the coating process and automatic release of the loading tray at the start of coating are achieved. Combined with the heat dissipation holes on the loading tray, the problem of deformation of flexible paper due to uneven heating on both sides is effectively solved. Furthermore, the clamping part adopts a structure of threaded rod and clamping plate cooperation. Tightening or loosening the threaded rod quickly completes the fixing and release of the paper, making operation convenient and reliable, simplifying the clamping process of flexible substrates and improving production efficiency. This device, through the synergistic effect of the locking mechanism, heat dissipation holes, and clamping part, effectively solves the technical problems of easy deformation and inconvenient clamping of flexible paper during vacuum coating. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall invention;

[0023] Figure 2This is a cross-sectional view of the vapor deposition tank of the present invention;

[0024] Figure 3 This is a schematic diagram of the top cover structure of the present invention;

[0025] Figure 4 This is a schematic diagram showing the positional relationship between the driving gear, driven gear, and gear ring of the present invention;

[0026] Figure 5 This is a schematic diagram showing the locking part of the present invention in the state of being separated from the loading part;

[0027] Figure 6 This is a schematic diagram showing the state of the locking part pressing the loading part of the present invention;

[0028] Figure 7 This is a cross-sectional view of the driven gear of the present invention;

[0029] Figure 8 This is a schematic diagram of the locking mechanism of the present invention;

[0030] Figure 9 This is a cross-sectional view of the loading section of the present invention;

[0031] Figure 10 This is a partially enlarged schematic diagram of the present invention.

[0032] Figure label:

[0033] 1. Handle;

[0034] 2. Evaporation tank; 21. Guide channel; 22. Base; 23. Column; 24. Baffle plate; 25. Nozzle;

[0035] 3. Top cover; 31. Top plate; 32. Ring; 33. Main shaft; 34. Auxiliary shaft; 35. Vertical rod; 36. Gear ring; 37. Limiting block; 38. Protruding rod; 39. Drive gear;

[0036] 4. Driven component; 41. Driven gear; 42. Loading tray; 43. Heat dissipation hole; 44. First spring; 45. Chain;

[0037] 5. Locking part; 50. Crossbar; 51. Sprocket; 52. Upper pressure ring; 53. Upper turntable; 54. Second spring; 55. Lower turntable; 56. Lower pressure ring; 57. Rotating column; 58. Knob; 59. Pressure plate;

[0038] 6. Clamping part; 61. Clamping plate; 62. Threaded rod; 63. Protruding shank; 64. Polished rod; 65. Limiting ring. Detailed Implementation

[0039] To further illustrate the technical means and effects of the present invention in achieving its intended purpose, the following detailed description of the specific implementation methods, structures, features and effects of the present invention, in conjunction with the accompanying drawings and preferred embodiments, is provided below.

[0040] This embodiment provides a planetary rotary evaporation device capable of achieving gradient coating, such as... Figure 1 As shown, the device includes a vapor deposition tank 2 and a top cover 3 that is detachably fitted onto the vapor deposition tank 2. Two handles 1 are fixedly provided on the top of the top cover 3 for easy installation and removal by the operator. The interior of the vapor deposition tank 2 houses a vapor deposition assembly for generating and spraying aluminum vapor, while a rotating assembly for driving the substrate movement is located below the top cover 3.

[0041] like Figure 2 As shown, the vapor deposition assembly includes a nozzle 25, which is connected to an external high-temperature aluminum vapor source via a pipe. During operation, the nozzle 25 sprays aluminum vapor into the vapor deposition tank 2. To guide the vapor flow, a base plate 22 is fixedly mounted on the outer ring of the bottom of the nozzle 25. Multiple disc columns 23 are fixedly mounted on the outer ring of the upper surface of the base plate 22, and baffle plates 24 are fixedly mounted on the top of each disc column 23 via threaded rods. This threaded connection makes the replacement of the baffle plates 24 very convenient. The high-speed aluminum vapor ejected from the nozzle 25 first impacts the baffle plates 24, and then diffuses outwards, adhering more evenly to the surface of the paper on the loading tray 42, which will be described later.

[0042] like Figure 3 and Figure 4 As shown, the rotating assembly is installed below the top cover 3 and includes a top plate 31 and a gear ring 36. The top plate 31 is rotatably connected to the bottom of the top cover 3, and a main shaft 33 is rotatably inserted through its middle. One end of the main shaft 33, which extends into the interior of the vapor deposition tank 2, is fixedly equipped with a drive gear 39. Multiple limiting blocks 37 are fixedly provided on the outer side of the gear ring 36. These limiting blocks 37 correspond one-to-one with the guide grooves 21 opened in the inner wall of the vapor deposition tank 2 and can slide up and down along the guide grooves 21 to guide the installation of the entire rotating assembly and restrict the rotation of the gear ring 36. Multiple protruding rods 38 are fixedly provided on the lower surface of the gear ring 36. In addition, a vertical rod 35 is fixedly provided on the upper surface of the gear ring 36, and a ring 32 is fixedly provided on the top of the vertical rod 35. The ring 32 is rotatably connected to the top plate 31 and fixedly connected to the top cover 3, thereby suspending the entire rotating assembly below the top cover 3.

[0043] The top cover 3 is equipped with a motor, and the output shaft of the motor is fixedly connected to the top of the main shaft 33 to drive the main shaft 33 to rotate.

[0044] Three driven components 4 are mounted on the rotating component. For example... Figure 5 and Figure 6As shown, each driven component 4 includes a driven gear 41, the end of which is fixedly connected to the auxiliary shaft 34. The lengths of the auxiliary shaft 34 and the main shaft 33 are determined by design. After installation, the driven gear 41, the driving gear 39, and the gear ring 36 are located on the same horizontal plane, and the driven gear 41 meshes with the internal teeth of both the driving gear 39 and the gear ring 36. Therefore, when the motor inside the top cover 3 drives the main shaft 33 to rotate, the main shaft 33 drives the driving gear 39 to rotate, and the driving gear 39 drives the three driven gears 41 meshing with it to start rotating. At the same time, since the gear ring 36 is restricted by the limiting block 37 and the guide groove 21 and cannot rotate, the driven gear 41, while rotating, is also forced to revolve along the inner wall of the gear ring 36, forming a planetary motion trajectory.

[0045] The driven gear 41 has a loading section and three locking sections 5 on its lower surface. The loading section, including a loading tray 42, is used to hold the paper to be coated. The loading tray 42 is connected to the bottom surface of the driven gear 41 by multiple first springs 44, which allows the loading tray 42 to hang below the driven gear 41 in its natural state. The loading tray 42 has multiple through-holes 43 for heat dissipation during the coating process.

[0046] The locking part 5 is located on the outside of the loading tray 42 and is used to control the position of the loading tray 42 relative to the driven gear 41. Figure 8 As shown, the locking part 5 includes a pressing assembly and a friction assembly. The main body of the pressing assembly is a rotating column 57 rotatably connected to the driven gear 41. A pressure plate 59 and a crossbar 50 are fixedly mounted on the rotating column 57, with the pressure plate 59 and the crossbar 50 located on the same straight line and on opposite sides of the axis of the rotating column 57. A knob 58 is fixedly mounted at the lower end of the rotating column 57 for easy manual operation. The upper end of the rotating column 57 is connected to the friction assembly.

[0047] The friction assembly is housed in a cavity inside the driven gear 41. Its structure, from top to bottom, consists of: a sprocket 51, an upper pressure ring 52, an upper turntable 53, a second spring 54, a lower turntable 55, and a lower pressure ring 56. These components are all fixedly mounted on the rotating column 57. The sprocket 51 is connected to the sprockets 51 of the other two locking parts 5 via a chain 45, enabling synchronous rotation. The upper pressure ring 52 is fixedly connected to the upper turntable 53, and the lower pressure ring 56 is fixedly connected to the lower turntable 55. The second spring 54 is always under pressure, and its elastic force is transmitted to the lower pressure ring 56 through the lower turntable 55, causing the lower pressure ring 56 to press tightly against the cavity wall of the driven gear 41, thereby generating a large static friction force. This friction force allows the rotating column 57 to remain fixed when no external force is applied; only by applying a sufficiently large torque to the knob 58 can the friction force be overcome to drive its rotation.

[0048] To secure the paper to the loading tray 42, the loading tray 42 is also provided with two clamping parts 6. For example... Figure 9 and Figure 10 As shown, the clamping part 6 includes a clamping plate 61 and a threaded rod 62. The lower end of the threaded rod 62 is rotatably connected to the end of the clamping plate 61, and a protruding handle 63 for easy gripping is fixed to the lower end of the threaded rod 62. The upper end of the threaded rod 62 is a smooth rod 64, and a limiting ring 65 with a diameter larger than the smooth rod 64 is fixed to the top of the smooth rod 64. A threaded hole that mates with the threaded rod 62 is provided on the loading plate 42.

[0049] When metallizing paper, first remove the top cover 3 from the vapor deposition tank 2 using handle 1 and place it on the matching support. Then, the operator pushes the loading tray 42 upwards, causing it to overcome the elastic force of the first spring 44 and move towards the driven gear 41. Next, turn the knob 58 to rotate the rotating column 57, causing the pressing plate 59 to rotate above the loading tray 42. Figure 6 As shown. At this time, the crossbar 50 extends outward, and the pressure plate 59 presses down on the loading tray 42, overcoming the elastic force of the first spring 44, maintaining its retracted state close to the driven gear 41, preventing it from shaking during the paper loading process, and facilitating operation.

[0050] Next, pinch the convex handle 63 and loosen the threaded rod 62 in the opposite direction, causing the threaded rod 62 to descend until the bare rod 64 falls into the threaded hole of the loading tray 42. At this time, the clamping piece 61 and the threaded rod 62 naturally droop under the action of gravity and separate from the surface of the loading tray 42. Since the diameter of the limiting ring 65 is larger than the threaded hole, the clamping part 6 as a whole will not fall off the loading tray 42. Place the two ends of the paper to be coated between the corresponding clamping pieces 61 and the loading tray 42, and then tighten the threaded rod 62 in the forward direction. The threaded rod 62 moves upward through its cooperation with the threaded hole, pressing the clamping piece 61 tightly onto the loading tray 42, thereby firmly fixing the paper to the surface of the loading tray 42.

[0051] After all three loading trays 42 are filled with paper, the top cover 3 is reinstalled into the vapor deposition tank 2. During installation, ensure that the limiting block 37 on the toothed ring 36 is aligned with the guide groove 21 on the inner wall of the vapor deposition tank 2 and inserted. After the top cover 3 is installed and locked, start the motor and steam source, and the nozzle 25 begins to spray aluminum vapor into the vapor deposition tank 2.

[0052] The motor drives the main shaft 33 to rotate, which in turn drives the drive gear 39 to rotate. The drive gear 39 drives the driven gear 41 to rotate. As the driven gear 41 rotates, the crossbar 50 extending from its rotating column 57 contacts the protruding rod 38 fixed to the lower surface of the gear ring 36. The thrust applied by the protruding rod 38 acts on the crossbar 50, pushing the entire rotating column 57 to rotate against the friction of the friction assembly. This rotation causes the pressure plate 59 to rotate away from the top of the loading tray 42. Since the rotating columns 57 of the three locking parts 5 are linked by the sprocket 51 and the chain 45, the three pressure plates 59 rotate away synchronously, ensuring that the three loading trays 42 are released simultaneously, preventing the loading trays 42 from tilting and shaking, which would cause wrinkles in the paper on them. After the first spring 44 loses its constraint, it immediately rebounds, pushing the loading tray 42 to move smoothly downward, forming a gap with the driven gear 41.

[0053] Subsequently, the driven gear 41 rotates on its own axis while also revolving around the gear ring 36. This planetary motion causes the position and angle of the paper fixed on the loading tray 42 relative to the fixed nozzle 25 and baffle 24 to change periodically. Aluminum vapor is ejected from the nozzle 25, diffused by the baffle 24, and deposited on the paper surface. Because different areas of the paper have different effective exposure times and angles to the evaporation source during movement, the thickness of the deposited aluminum layer also changes regularly, ultimately forming the desired gradient coating on the paper surface. At the same time, the revolution of all driven components 4 ensures that the paper on each loading tray 42 undergoes the same movement trajectory, thereby guaranteeing the consistency of the coating thickness and its gradient change among the sheets of paper within a batch.

[0054] During the coating process, the gap between the loading disk 42 and the driven gear 41 serves to dissipate heat. In a vacuum environment, the heat on the back of the paper can be radiated to this gap through the heat dissipation hole 43, making it easier for the heat to be transferred to the cooler driven gear 41 and surrounding components through radiation. This effectively balances the temperature on both sides of the paper and prevents the paper from deforming or wrinkling due to uneven heating on both sides.

[0055] After the coating is completed, turn off the motor and steam source, remove the top cover 3, and loosen the threaded rod 62 of the clamping part 6 again to easily remove the coated paper and prepare for the next batch of production.

[0056] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A planetary rotary vapor deposition apparatus for achieving gradient coating, comprising a top cover (3) and a vapor deposition tank (2), characterized in that, The top cover (3) is detachably mounted on the vapor deposition tank (2). The vapor deposition tank (2) is equipped with a vapor deposition assembly. A rotating assembly is located below the top cover (3). The rotating assembly is equipped with several driven assemblies (4). The rotating assembly is used to drive the driven assemblies (4) to rotate. The driven assemblies (4) are equipped with a loading part and several locking parts (5). The loading part is used to place paper. The locking parts (5) are located outside the loading part. When the locking parts (5) are fastened to the loading part, the loading part is pressed onto the driven assemblies (4). When the locking parts (5) are removed from the loading part, the loading part is removed from the driven assemblies (4).

2. The planetary rotary vapor deposition apparatus for achieving gradient coating according to claim 1, characterized in that, The inner wall of the vapor deposition tank (2) is provided with several guide grooves (21), which are used to guide the rotating components.

3. The planetary rotary vapor deposition apparatus for achieving gradient coating according to claim 2, characterized in that, The rotating assembly includes a top plate (31) and a gear ring (36). The top plate (31) is rotatably disposed below the top cover (3). A main shaft (33) is rotatably disposed in the middle of the top plate (31), and a drive gear (39) is fixedly disposed at the end of the main shaft (33). An auxiliary shaft (34) is disposed between the top plate (31) and the driven assembly (4). The top end of the auxiliary shaft (34) is rotatably connected to the top plate (31), and the bottom end is connected to the driven assembly (4). It is used to support the driven assembly (4) in the gear ring (36) and enable the gear ring (36) to rotate under the drive of the gear ring (36).

4. The planetary rotary vapor deposition apparatus for achieving gradient coating according to claim 3, characterized in that, The toothed ring (36) is fixed with several limiting blocks (37) on its outer side, several protruding rods (38) on its lower surface, and several uprights (35) on its upper surface. The top of the uprights (35) is fixed with a ring (32). The ring (32) is rotatably connected to the top plate (31) and fixedly connected to the top cover (3). The limiting blocks (37) correspond one-to-one with the guide grooves (21) and can slide up and down in the guide grooves (21). The guide grooves (21) restrict the rotation of the toothed ring (36) through the limiting blocks (37), so that the toothed ring (36) remains stationary relative to the vapor deposition tank (2).

5. The planetary rotary vapor deposition apparatus for achieving gradient coating according to claim 4, characterized in that, The driven component (4) includes a driven gear (41), which has a cavity inside. The cavity is used to accommodate the end of the locking part (5). The end of the locking part (5) is connected as a whole in the cavity so that several locking parts (5) can move synchronously.

6. The planetary rotary vapor deposition apparatus for achieving gradient coating according to claim 5, characterized in that, The loading section includes a loading disk (42), which is fixedly connected to the driven gear (41) by a number of first springs (44). When the first springs (44) naturally extend, they push the loading disk (42) away from the driven gear (41), creating a gap between the driven gear (41) and the loading disk (42). The loading disk (42) can radiate heat through the gap to dissipate heat. The loading disk (42) is provided with a number of through heat dissipation holes (43). During coating, the temperature on both sides of the paper can be radiated through the heat dissipation holes (43) to balance the temperature on both sides of the paper.

7. The planetary rotary vapor deposition apparatus for achieving gradient coating according to claim 6, characterized in that, The locking part (5) includes a friction component and a pressing component. The pressing component is used to press the loading disk (42) onto the driven gear (41) and to fix the loading disk (42) onto the driven gear (41). The friction component is used to generate friction force, to maintain the rotational position of the pressing component, and to limit the rotation of the pressing component on the driven gear (41).

8. The planetary rotary vapor deposition apparatus for achieving gradient coating according to claim 7, characterized in that, The extrusion assembly includes a rotating column (57), on which a pressure plate (59) and a crossbar (50) are fixedly mounted. The pressure plate (59) and the crossbar (50) are located on the same straight line and on both sides of the rotating column (57). The pressure plate (59) is used to press the loading disc (42) onto the driven gear (41). The crossbar (50) protrudes from the outside of the loading disc (42) and the driven gear (41) and is used to contact the convex rod (38) and press the convex rod (38) onto the convex rod (38). The rotating column (57) rotates under the obstruction of the 38), thereby driving the pressure plate (59) to rotate; the lower end of the rotating column (57) is fixedly provided with a knob (58), and the upper end is provided with a friction component; rotating the knob (58) can drive the rotating column (57) to rotate, thereby driving the pressure plate (59) to rotate; the top end of the rotating column (57) is provided with a sprocket (51), and a chain (45) is sleeved on the outer ring of several sprockets (51), and the chain (45) and the sprocket (51) are all meshed.

9. The planetary rotary vapor deposition apparatus for achieving gradient coating according to claim 8, characterized in that, The friction assembly includes an upper turntable (53) and a lower turntable (55). An upper pressure ring (52) is coaxially fixed above the upper turntable (53), and a lower pressure ring (56) is coaxially fixed below the lower turntable (55). A second spring (54) is fixed between the upper turntable (53) and the lower turntable (55). The second spring (54) is always under pressure, pushing the lower turntable (55) away from the upper turntable (53). The sprocket (51), the upper pressure ring (52), the upper turntable (53), the second spring (54), the lower turntable (55), and the lower pressure ring (56) are all located in the cavity of the driven gear (41). The lower pressure ring (56) is pressed against the lower surface of the cavity of the driven gear (41) under the thrust of the second spring (54). The top end of the rotating column (57) passes through the cavity of the driven gear (41) and is rotatably connected to the driven gear (41).

10. The planetary rotary vapor deposition apparatus for achieving gradient coating according to claim 1, characterized in that, The clamping part (6) includes a clamping piece (61), and both ends of the clamping piece (61) are provided with threaded rods (62). The lower end of the threaded rod (62) is fixedly provided with a protruding shank (63), and the upper end is a smooth rod (64). The top of the smooth rod (64) is fixedly provided with a limiting ring (65). The diameter of the limiting ring (65) is larger than the diameter of the smooth rod (64), and it is used to restrict the threaded rod (62) on the driven component (4).

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