Heating module structure of a topcon sintering furnace

Abstract

This invention discloses a heating module structure for a TOPCon sintering furnace, including a furnace body. Inside the furnace body, a conveying assembly supporting both ends of a silicon wafer is arranged. The silicon wafer is concave in the middle, forming an arc shape. A set of heating components is respectively arranged on the upper and lower sides of the conveying assembly. Each heating component is configured to match the arc shape of the silicon wafer. Each heating component includes an elastic strip and multiple heating tubes. A disassembly assembly is provided on the inner wall of the furnace body. By providing the disassembly assembly, after the arc-shaped heating component has been used for a period of time, the elastic strip can be removed from the inner wall of the furnace body. Then, the upper and lower sets of heating components can be swapped, and the elastic strip can be reconnected to the inner wall of the furnace body using the disassembly assembly. Furthermore, the bending elasticity of the elastic strip accommodates the arc change after the upper and lower sets of heating components are swapped, thereby ensuring heating uniformity after the heating components are swapped and fully utilizing both the upper and lower surfaces of the arc-shaped heating component.

Description

Technical Field

[0001] This invention relates to the field of crystalline silicon cell manufacturing technology, specifically to a heating module structure for a TOPCon sintering furnace. Background Technology

[0002] In the production of TOPCon cells, a ceramic roller sintering furnace is required for sintering. As the size of silicon wafers is continuously optimized and increased while the wafers become thinner, the sintering furnace uses symmetrically distributed rollers to support both ends of the wafer in order to ensure uniform heating of the upper and lower surfaces of the wafer. This causes the wafer to bend slightly downwards, resulting in uneven heating of the wafer under the conventional parallel heating tube setup.

[0003] In response, patent document CN116697762A discloses a heating module structure for a TOPCon sintering furnace, including a sintering furnace, wherein a heating module and a silicon wafer are arranged inside the sintering furnace, and the heating module includes an upper heating tube and a lower heating tube; both the upper and lower heating tubes are arc-shaped; the silicon wafer is located between the upper and lower heating tubes. The advantages of the heating module structure design of the TOPCon sintering furnace proposed in this invention are: First, the arc-shaped lamp tube design of the heating module ensures uniform heating and a stable temperature field across the entire surface area of ​​the silicon wafer, thereby greatly improving and enhancing the electrical performance and aging performance of the battery; Second, the heating module structure of this invention is designed to be detachable for maintenance and is convenient for industrial production.

[0004] However, due to the byproducts released during the high-temperature sintering of solar cells and the introduction of external impurities, these substances cool, condense, or undergo chemical reactions within the furnace, eventually adhering to components such as the furnace walls, heating tubes, and conveyor belts. When using the aforementioned arc-shaped heating tubes, contaminant deposition is severe in the direction corresponding to the silicon wafer, and the heating surface cannot be fully utilized as it can be rotated and adjusted like traditional parallel heating tubes. Therefore, a heating module structure for the TOPCon sintering furnace is urgently needed to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to provide a heating module structure for the TOPCon sintering furnace to address the aforementioned shortcomings in the prior art.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] A heating module structure for a TOPCon sintering furnace includes a furnace body. Inside the furnace body, there is a conveying assembly that supports both ends of a silicon wafer. The silicon wafer is concave in the middle and has an arc shape. A set of heating assemblies is respectively arranged on the upper and lower sides of the conveying assembly. The heating assemblies are configured to match the arc shape of the silicon wafer. Each heating assembly includes an elastic strip and multiple heating tubes. The multiple heating tubes are evenly and closely arranged on the elastic strip along the length of the elastic strip. The inner wall of the furnace body is provided with a disassembly and assembly assembly for connecting the ends of the elastic strip.

[0008] Preferably, the conveying assembly includes two sets of rollers symmetrically arranged inside the furnace body, one end of each roller extending through into the interior of the furnace body and having an overlapping portion, with the silicon wafer located above the overlapping portion.

[0009] Preferably, the bending radius of the heating component is R1300mm~R3500mm.

[0010] Preferably, the disassembly and assembly assembly includes a hook body disposed on the inner wall of the furnace body, a hanging post matching the hook body is disposed at the end of the elastic strip, and a limiting member matching the hanging post is elastically and movably disposed inside the hook body.

[0011] Preferably, the hook body is provided with a sliding groove, the limiting member is U-shaped and its lower end is movably connected in the sliding groove, and an elastic member connecting the limiting member is provided in the sliding groove.

[0012] Preferably, the furnace body is provided with a driving component for driving the upper and lower heating components to swap positions, and the two heating components still maintain curvature matching with the silicon wafer after swapping positions.

[0013] Preferably, the drive assembly includes a ring body rotatably disposed on the inner wall of the furnace body, and the hook body is connected to a first gear disposed on the inner side of the ring body via a rotating shaft that rotatably passes through the ring body. A first toothed ring that meshes with the first gear is disposed inside the furnace body, and the number of teeth of the first toothed ring is set to an integer multiple of 2 of the number of teeth of the first gear.

[0014] Preferably, the drive assembly includes a motor mounted on the furnace body, a second gear coaxially connected to the output end of the motor, and a second gear ring meshing with the second gear on the inner ring of the ring body.

[0015] Preferably, a push rod is coaxially arranged inside the rotating shaft, and the push rod is fixedly connected to the limiting member. An annular cavity matching the push rod is provided inside the furnace body, and a first top block and a second top block that wedge with the push rod are respectively provided at the highest and lowest ends of the annular cavity.

[0016] Preferably, the ring body has a relaxed position within its rotation range that allows the push rod to avoid the first and second top blocks. When the ring body is in the relaxed position, the elastic strip is freely extended.

[0017] In the above technical solution, the beneficial effects of the present invention are:

[0018] The heating module structure of the TOPCon sintering furnace is designed with a disassembly and assembly component. After the arc-shaped heating component has been used for a period of time, the elastic strip can be removed from the inner wall of the furnace. Then, the upper and lower heating components can be swapped, and the elastic strip can be reconnected to the inner wall of the furnace through the disassembly and assembly component. The bending elasticity of the elastic strip meets the arc change after the upper and lower heating components are swapped, thereby ensuring the heating uniformity after the heating components are swapped, and making full use of the upper and lower surfaces of the arc-shaped heating component.

[0019] It should be understood that the foregoing general description and the following detailed description are exemplary and illustrative only, and are not intended to limit this disclosure.

[0020] This application provides an overview of various implementations or examples of the technology described in this disclosure, and is not a full disclosure of the entire scope or all features of the disclosed technology. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0022] Figure 1 This is a schematic diagram of the overall structure of the invention using a continuous heating tube;

[0023] Figure 2 This is a schematic diagram of the overall structure of the present invention using a segmented heating tube;

[0024] Figure 3 This is a frontal cross-sectional view of the present invention.

[0025] Figure 4 For the present invention Figure 3 Enlarged structural diagram at point A;

[0026] Figure 5 This is a schematic diagram of the internal structure of the present invention;

[0027] Figure 6 For the present invention Figure 5 Enlarged structural diagram at point B;

[0028] Figure 7 This is a schematic diagram of the annular cavity structure of the present invention.

[0029] Explanation of reference numerals in the attached figures:

[0030] 1. Furnace body; 2. Elastic strip; 3. Heating tube; 4. Roller; 5. Overlapping part; 6. Hook; 7. Hanging column; 8. Limiting component; 9. Sliding groove; 10. Elastic component; 11. Ring body; 12. Rotating shaft; 13. First gear; 14. First gear ring; 15. Motor; 16. Second gear; 17. Second gear ring; 18. Push rod; 19. Annular cavity; 20. First top block; 21. Second top block. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0032] Please see Figure 1-7 The present invention provides a heating module structure for a TOPCon sintering furnace, comprising a furnace body 1, wherein a conveying assembly supporting both ends of a silicon wafer is disposed inside the furnace body 1, the silicon wafer is concave in the middle and arc-shaped, and a set of heating assemblies are respectively disposed on the upper and lower sides of the conveying assembly, the heating assemblies being configured as arc-shaped to match the silicon wafer, the heating assemblies including an elastic strip 2 and multiple heating tubes 3, the multiple heating tubes 3 being uniformly and tightly arranged on the elastic strip 2 along the length direction of the elastic strip 2, and a disassembly and assembly assembly for connecting the ends of the elastic strip 2 is disposed on the inner wall of the furnace body 1.

[0033] Specifically, the interior of the furnace body 1 is set as a frame structure, and the heating components are set inside the frame structure. The frame structure includes an upper frame and a lower frame. The upper heating components are set inside the upper frame, and the lower heating components are set inside the lower frame. The upper and lower frames are U-shaped, and the opening ends of the upper and lower frames are symmetrically arranged. This frame structure is easy to disassemble and install, which facilitates the assembly of the conveying components and the subsequent maintenance work inside the furnace body 1. The conveying assembly maintains horizontal support and conveys the silicon wafer; the horizontal length of the heating assembly is set greater than the corresponding horizontal width of the silicon wafer to ensure coverage of the heating range; the elastic strip 2 has bending elasticity and can change its curvature; multiple heating tubes 3 are distributed along the length direction of the elastic strip 2, thus forming an arc-shaped heat radiation zone with the curvature of the elastic strip 2, meeting the need for uniform heating of the silicon wafer, and can move with the bending of the elastic strip 2. Furthermore, the heating wires in the ends of the heating tubes 3 can be densely arranged to fill the gaps at the joints of the heating tubes 3; each heating tube 3 is controlled by a servo system to ensure the generation of a uniform heat radiation zone; the heating tubes 3 can be conventional straight tubes, which are arranged in an arc shape by combining multiple segments to reduce manufacturing costs and can be replaced independently to reduce maintenance costs. The inner wall of the furnace body 1 is provided with two sets of disassembly and assembly assemblies on the upper and lower sides of the conveying assembly, corresponding to the two sets of heating assemblies respectively, and the installation curvature of the heating assemblies matched by the upper and lower sets of disassembly and assembly assemblies is matched with the distance between the upper and lower sides of the silicon wafer. In practical use, after the arc-shaped heating component has been used for a period of time, the elastic strip 2 can be removed from the inner wall of the furnace body 1. Then, the upper and lower heating components can be swapped. The elastic strip 2 can be reconnected to the inner wall of the furnace body 1 by disassembling and reassembling the components. The bending elasticity of the elastic strip 2 meets the arc change after the upper and lower heating components are swapped, thereby ensuring the heating uniformity after the heating components are swapped and making full use of the upper and lower surfaces of the arc-shaped heating component.

[0034] Compared with the prior art, the heating module structure of the TOPCon sintering furnace proposed in this embodiment of the invention is provided with a disassembly and assembly component. After the arc-shaped heating component has been used for a period of time, the elastic strip 2 can be removed from the inner wall of the furnace body 1. Then, the upper and lower heating components are swapped, and the elastic strip 2 is reconnected to the inner wall of the furnace body 1 through the disassembly and assembly component. The bending elasticity of the elastic strip 2 meets the arc change after the upper and lower heating components are swapped, thereby ensuring the heating uniformity after the heating components are swapped, and making full use of the upper and lower surfaces of the arc-shaped heating component.

[0035] As a preferred technical solution in this embodiment, the conveying assembly includes two sets of rollers 4 symmetrically arranged inside the furnace body 1. One end of each roller 4 extends through into the interior of the furnace body 1 and has an overlapping portion 5. The silicon wafer is located above the overlapping portion 5. Specifically, the two sets of rollers 4 support the silicon wafer at the same height, and one side of the silicon wafer is supported by at least two rollers 4 simultaneously. The rollers 4 are preferably made of ceramic material. The overlapping portion 5 has a certain taper, and the outer diameter of the end closer to the silicon wafer is smaller. A convex ring is provided at the connection between the roller 4 and the overlapping portion 5 to limit the silicon wafer. The distance between the convex rings on the corresponding rollers 4 on both sides is just matched with the width of the silicon wafer, thereby preventing the silicon wafer from shifting along the axial direction of the roller 4 during the conveying process.

[0036] As a preferred technical solution in this embodiment, the bending radius of the heating component is R1300mm~R3500mm. Specifically, the distance between the lowest point of the heating component and the silicon wafer is kept consistent with the distance between other positions and the silicon wafer. In other words, in actual use, the distance between each position of the heating component and the silicon wafer is close, with an error of no more than 2mm.

[0037] As a preferred embodiment, the disassembly and assembly assembly includes a hook 6 disposed on the inner wall of the furnace body 1, and a hanging post 7 matching the hook 6 disposed at the end of the elastic strip 2. A limiting member 8 matching the hanging post 7 is elastically and movably disposed inside the hook 6. Specifically, the hook 6 is bent into a G-shape with the opening facing upward; the hanging post 7 is cylindrical, and the hanging post 7 is axially horizontal and parallel to the inner wall of the furnace body 1. The two ends of the hanging post 7 are fixedly connected to the ends of the elastic strip 2 through two parallel connecting pieces. The distance between the two connecting pieces corresponds to the distance between the hook 6 and the hanging post 7. The axial widths are matched, and a ring-shaped buckle is formed between the ends of the hanging post 7 and the elastic strip 2 and the two connecting pieces, making it easy to hook onto the hook body 6. When the hanging post 7 connects to the hook body 6, the two connecting pieces fit perfectly against the opposite sides of the hook body 6, thereby achieving a stable connection between the elastic strip 2 and the hook body 6, and the arc-shaped axis of the elastic strip 2 remains parallel to the arc-shaped axis of the silicon wafer; the limiting member 8 is U-shaped, with the opening facing upward, and the size of the opening matches the outer diameter of the hanging post 7; the limiting member 8 is located in the middle position of the hook body 6, and the limiting member 8 is perpendicular to the interior of the furnace body 1. The sidewall moves in the direction of movement; preferably, the bent end of the hook 6 is forked, and the upper end of the limiting member 8 extends above the height of the hook 6, facilitating the operation of the limiting member 8 to facilitate the installation of the hanging post 7; when the limiting member 8 moves until its opening aligns with the opening of the hook 6, the hanging post 7 can simultaneously move upward away from both the hook 6 and the limiting member 8; in the relaxed state, the horizontal length of both ends of the elastic strip 2 is sufficient to ensure that both hanging posts 7 are simultaneously within the corresponding hook 6, and that the opening of the hook 6 is misaligned with the opening of the limiting member 8, thereby preventing the hanging post 7 from accidentally detaching from the hook 6, and At this time, the elastic movement of the limiting member 8 is just in the relaxed position. In actual operation, when the elastic strip 2 needs to be removed from the two hooks 6, first actively move the elastic strip 2 towards one side of the hook 6 so that the hanging post 7 on that side drives the limiting member 8 to overlap with the hook 6. Then, take the hanging post 7 on that side out of the corresponding hook 6. Then, remove the hanging post 7 on the other side of the elastic strip 2 in the same way. This completes the disassembly of the elastic strip 2. When the elastic strip 2 is installed, ensure that the hanging post 7 will not detach from the hook 6 on its own.

[0038] As a further preferred technical solution of this embodiment, a sliding groove 9 is provided inside the hook body 6, and the limiting member 8 is U-shaped and its lower end is movably connected in the sliding groove 9. An elastic member 10 connecting the limiting member 8 is provided inside the sliding groove 9. Specifically, the elastic member 10 is preferably a spring. Under the action of the elastic member 10, the limiting member 8 is automatically held in a position where its opening is misaligned with the opening of the hook body 6.

[0039] In another embodiment of the present invention, the furnace body 1 is provided with a driving component for driving the upper and lower heating components to swap positions, and the two heating components still maintain curvature matching with the silicon wafer after swapping positions. Specifically, the driving component automatically swaps the upper and lower heating components under the control of the servo system, and keeps the curvature direction of the heating components still matching the silicon wafer, thereby expanding the usable area of ​​the heating components.

[0040] As a preferred embodiment, the driving assembly includes a ring 11 rotatably disposed on the inner wall of the furnace body 1. A hook 6 is connected to a first gear 13 disposed on the inner side of the ring 11 via a rotating shaft 12 that rotatably passes through the ring 11. A first gear ring 14 meshing with the first gear 13 is disposed inside the furnace body 1. The number of teeth on the first gear ring 14 is an integer multiple of two of the number of teeth on the first gear 13. Specifically, the ring 11 is disposed away from the conveying assembly; the axial direction of the ring 11 is perpendicular to the inner wall of the furnace body 1; the ring 11 is provided with… Two rings are arranged symmetrically on the inner wall of the furnace body 1. The two rings 11 in one group rotate synchronously, keeping the hooks 6 on them horizontally corresponding to each other. The axis of the rotating shaft 12 is parallel to the axis of the ring 11. The number of teeth of the first toothed ring 14 is set to an integer multiple of 2 of the number of teeth of the first gear 13. After the ring 11 rotates half a turn, the first gear 13 rotates a full number of turns. Thus, after the hooks 6 switch between up and down positions, they still keep their openings facing upwards, thereby ensuring that the arc direction of the heating component still matches the silicon wafer.

[0041] As a preferred technical solution in this embodiment, the driving component includes a motor 15 mounted on the furnace body 1, a second gear 16 coaxially connected to the output end of the motor 15, and a second gear ring 17 meshing with the second gear 16 on the inner ring of the ring body 11. Specifically, the motor 15 is controlled by a servo system, which drives the second gear ring 17 through the second gear 16 to rotate the ring body 11, and can precisely control the rotation angle of the ring body 11.

[0042] In another embodiment of the present invention, a push rod 18 is coaxially disposed inside the rotating shaft 12. The push rod 18 is fixedly connected to the limiting member 8. An annular cavity 19 matching the push rod 18 is disposed inside the furnace body 1. A first top block 20 and a second top block 21 that wedge with the push rod 18 are respectively disposed at the highest and lowest ends of the annular cavity 19. Specifically, both the first top block 20 and the second top block 21 are configured with a raised middle section and sloped sides, and the sloped sides are transitionally connected to the inner wall of the annular cavity 19. The middle of the first top block 20 corresponds to the highest position of the annular cavity 19, and the middle of the second top block 21 corresponds to the lowest position of the annular cavity 19. The height of the raised middle section of the first top block 20 is greater than the height of the raised middle section of the second top block 21. When the ring 11 rotates, the end of the push rod 18 away from the limiting member 8 moves within the annular cavity 19. When the hook 6 driven by the ring 11 approaches its highest position, the push rod 18 on the hook 6 corresponds to the first top block 20 and undergoes a wedge-shaped pressing action, causing the limiting member 8 to move away from the inner wall of the furnace body 1 until the push rod 18 moves to the middle position of the first top block 20. This allows the limiting members 8 on both sides to actively press and bend the elastic strip 2 to match the upper curvature of the silicon wafer. When the hook 6 approaches its lowest position, the push rod 18 on the hook 6 undergoes a wedge-shaped pressing action with the second top block 21. Similarly, the limiting members 8 on both sides actively press and bend the elastic strip 2 to match the lower curvature of the silicon wafer. The bending curvature of the elastic strip 2 is greater when it is above the corresponding silicon wafer.

[0043] As a preferred technical solution in this embodiment, the ring body 11 has a relaxed position within its rotation range, allowing the push rod 18 to avoid the first top block 20 and the second top block 21. When the ring body 11 is in the relaxed position, the elastic strip 2 is freely extended. Specifically, when the ring body 11 rotates and allows the push rod 18 to avoid the first top block 20 and the second top block 21, the push rod 18 is freely relaxed. At this time, the limiting member 8 and the elastic strip 2 are also freely relaxed, thereby preventing the elastic strip 2 from being continuously subjected to force when the heating assembly stops running and extending its service life. In addition, when the ring body 11 is in the relaxed position, the push rod 18 can move further into the annular cavity 19, thereby satisfying the need for the limiting member 8 to move closer to the inner wall of the furnace body 1, and enabling the disassembly and installation of the elastic strip 2.

[0044] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A heating module structure for a TOPCon sintering furnace, comprising a furnace body (1), wherein a conveying assembly supporting both ends of a silicon wafer is disposed inside the furnace body (1), the silicon wafer is concave in the middle and arc-shaped, and a set of heating assemblies are respectively disposed on the upper and lower sides of the conveying assembly, the heating assemblies being configured as arc-shaped to match the silicon wafer, characterized in that, The heating assembly includes an elastic strip (2) and multiple heating tubes (3). The multiple heating tubes (3) are evenly and closely arranged on the elastic strip (2) along the length direction of the elastic strip (2). The inner wall of the furnace body (1) is provided with a disassembly and assembly assembly for connecting the ends of the elastic strip (2).

2. The heating module structure of the TOPCon sintering furnace according to claim 1, characterized in that, The conveying assembly includes two sets of rollers (4) symmetrically arranged inside the furnace body (1). One end of each roller (4) extends through into the interior of the furnace body (1) and has an overlapping part (5). The silicon wafer is located above the overlapping part (5).

3. The heating module structure of the TOPCon sintering furnace according to claim 1, characterized in that, The bending radius of the heating component is R1300mm~R3500mm.

4. The heating module structure of the TOPCon sintering furnace according to claim 1, characterized in that, The disassembly and assembly assembly includes a hook (6) provided on the inner wall of the furnace body (1), and a hanging post (7) matching the hook (6) provided at the end of the elastic strip (2). A limiting member (8) matching the hanging post (7) is elastically and movably provided inside the hook (6).

5. The heating module structure of the TOPCon sintering furnace according to claim 4, characterized in that, The hook body (6) is provided with a sliding groove (9), the limiting member (8) is U-shaped and its lower end is movably connected in the sliding groove (9), and the sliding groove (9) is provided with an elastic member (10) that connects to the limiting member (8).

6. The heating module structure of the TOPCon sintering furnace according to claim 4, characterized in that, The furnace body (1) is provided with a drive component for driving the upper and lower heating components to switch positions, and the two heating components still maintain the curvature matching with the silicon wafer after switching positions.

7. The heating module structure of the TOPCon sintering furnace according to claim 6, characterized in that, The drive assembly includes a ring (11) rotatably disposed on the inner wall of the furnace body (1). The hook (6) is connected to a first gear (13) disposed on the inner side of the ring (11) by a rotating shaft (12) that rotatably passes through the ring (11). A first toothed ring (14) meshing with the first gear (13) is disposed inside the furnace body (1). The number of teeth of the first toothed ring (14) is set to be an integer multiple of 2 of the number of teeth of the first gear (13).

8. The heating module structure of the TOPCon sintering furnace according to claim 7, characterized in that, The drive assembly includes a motor (15) mounted on the furnace body (1), with a second gear (16) coaxially connected to the output end of the motor (15), and a second toothed ring (17) meshing with the second gear (16) on the inner ring of the ring body (11).

9. The heating module structure of the TOPCon sintering furnace according to claim 7, characterized in that, A push rod (18) is coaxially installed inside the rotating shaft (12). The push rod (18) is fixedly connected to the limiting member (8). An annular cavity (19) matching the push rod (18) is provided inside the furnace body (1). The highest and lowest ends of the annular cavity (19) are respectively provided with a first top block (20) and a second top block (21) that wedge with the push rod (18).

10. The heating module structure of the TOPCon sintering furnace according to claim 9, characterized in that, The ring (11) has a relaxed position within the rotation range that allows the push rod (18) to avoid the first top block (20) and the second top block (21). When the ring (11) is in the relaxed position, the elastic strip (2) is freely extended.

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