A multi-optical-axis calibration device, a multi-optical-axis calibration system, and a multi-optical-axis calibration method

Abstract

This invention relates to the field of optical equipment technology, and discloses a multi-axis calibration device, a multi-axis calibration system, and a multi-axis calibration method. The multi-axis calibration device includes a plane mirror, a concave mirror, and a target. Along the beam propagation direction, the plane mirror is located between the target and the concave mirror. The target has a calibration structure located at the reflection focal point of the concave mirror. The plane mirror is used to reverse the beam direction. Since the target is located at the reflection focal point of the concave mirror, it is equivalent to the target being located at the focal point of the concave mirror. Therefore, the diverging beam emitted from the calibration structure on the target, after being reflected sequentially by the plane mirror and the concave mirror, allows the concave mirror to emit a parallel beam, thus simulating the optical path of an "infinitely distant target." When calibrating multi-axis equipment, there is no need to gradually adjust preset distances sequentially, making the operation simple and less susceptible to external interference, resulting in high calibration accuracy.

Description

Technical Field

[0001] This invention relates to the field of optical equipment technology, and in particular to a multi-axis calibration device, a multi-axis calibration system, and a multi-axis calibration method. Background Technology

[0002] Multi-axis optical devices integrate multiple optical elements, each with its own independent optical axis. These elements work together to perform functions such as detection, measurement, calibration, and aiming. Multi-axis optical devices are widely used in fields such as industrial safety, optical testing, and precision manufacturing. For example, multi-axis optical devices can be used in infrared thermal imaging equipment, multi-axis laser rangefinders, and 3D cameras.

[0003] To ensure consistent operation of the optical components in a multi-axis optical system, it is necessary to calibrate multiple optical components. The purpose of calibration is to align the optical axes of these components with a target. Currently, calibration of multi-axis optical systems involves drawing marks on white paper, which serve as the target. A preset distance exists between the target and the multi-axis equipment. By moving the target or the equipment, this preset distance is gradually increased, thereby calibrating the multiple optical components sequentially. For example, the preset distance might change sequentially to 1m, 5m, 10m, 20m, etc.

[0004] Because the preset spacing is always limited, the operation is relatively cumbersome, and it is easily affected by external factors such as weather, the calibration accuracy of optical components in multi-axis equipment is relatively low. Summary of the Invention

[0005] The present invention aims to provide a multi-optical-axis calibration device, a multi-optical-axis calibration system, and a multi-optical-axis calibration method to solve the technical problem of low calibration accuracy of optical components in existing multi-optical-axis devices.

[0006] The technical solutions adopted by the embodiments of the present invention to solve their technical problems are as follows: One embodiment of the present invention provides a multi-optical axis calibration device, comprising a plane mirror, a concave mirror, and a target; Along the direction of beam propagation, the planar reflector is located between the target and the concave reflector; The target is provided with a calibration structure, which is located at the reflection focal point of the concave mirror.

[0007] In some embodiments, the calibration structure includes a perforated hole and a heating element. The perforated hole is located at the reflection focal point of the concave mirror, and the heating element is located on the side of the target away from the planar mirror and is disposed along the edge of the perforated hole.

[0008] In some embodiments, the perforation is cross-shaped.

[0009] Another embodiment of the present invention provides a multi-optical axis calibration system, including the multi-optical axis calibration device described above.

[0010] In some embodiments, the multi-axis calibration system further includes a moving device for mounting the multi-axis device and driving the multi-axis device to move.

[0011] In some embodiments, the mobile device includes a base, a platform panel, a first mobile component, a second mobile component, and a third mobile component; The first moving component is mounted on the base, the second moving component is mounted on the first moving component, the third moving component is mounted on the second moving component, and the platform panel is mounted on the third moving component. The platform panel is used to mount the multi-optical axis device. The first moving component and the third moving component are capable of moving in the horizontal direction, and the first moving component is capable of moving in a direction parallel to the concave mirror, the third moving component is capable of moving in a direction closer to or farther from the concave mirror, and the second moving component is capable of moving in the vertical direction. The moving directions of the first moving component, the second moving component, and the third moving component are perpendicular to each other.

[0012] In some embodiments, the first moving component includes a motor, a gear, a first mounting plate, and two first slide rails. The two first slide rails are disposed on the base and arranged parallel to each other in the horizontal direction. The two ends of the first mounting plate are slidably mounted on the two first slide rails. A rack is provided on one side of the first slide rail near the other first slide rail. The motor and the second moving component are mounted on the first mounting plate. The gear is mounted on the output end of the motor, and the gear and the rack mesh.

[0013] In some embodiments, the flatness of the plane on which the platform panel’s movement trajectory lies is less than 0.133 mm / ㎡.

[0014] In some embodiments, the second moving component includes a servo motor, a second mounting plate, a second slide rail, a third mounting plate, and a lead screw. The two second slide rails are disposed on the first mounting plate and are arranged parallel to each other in the vertical direction. The two second slide rails are connected to the second mounting plate. The servo motor is mounted on the second mounting plate and is connected to the lead screw to drive the lead screw to rotate. The two ends of the third mounting plate are slidably mounted on the two second slide rails, and the third mounting plate is screwed to the lead screw.

[0015] Another embodiment of the present invention provides a multi-optical-axis calibration method applied to the above-mentioned multi-optical-axis calibration system, wherein the multi-optical-axis device includes at least two optical elements, including: S1. Move and adjust the multi-optical-axis device to align the optical axis of an optical element with the target. S2. Move and adjust the multi-optical-axis device along the vertical plane to align the optical axis of the next optical element with the target. S3. Fix the next optical element relative to the multi-axis optical device; S4. Repeat steps S2 to S3 until all optical elements have been calibrated.

[0016] Compared to existing technologies, in the multi-axis calibration device of this embodiment, a plane mirror is used to redirect the light beam, facilitating target placement. After the plane mirror redirects, the target is located at the reflection focal point of the concave mirror, which is equivalent to the target being located at the focal point of the concave mirror. Therefore, the diverging light beam emitted from the calibration structure of the target, after being reflected sequentially by the plane mirror and the concave mirror, allows the concave mirror to emit a parallel light beam, thus simulating the optical path of an "infinitely distant target." When calibrating the multi-axis device, there is no need to gradually adjust the preset distance sequentially, making the operation simple and less susceptible to external interference, resulting in high calibration accuracy.

[0017] The multi-axis calibration system in this embodiment also has the above-mentioned advantages, which will not be repeated here.

[0018] In the multi-axis calibration method of this embodiment, the position of the multi-axis device is adjusted to align the optical axis of one optical element with the target, thereby achieving calibration of the optical element relative to the target. Then, the moving device continues to drive the multi-axis device to move along a vertical plane. Since the moving plane of the multi-axis device is vertical, it does not affect the calibration status of the previously calibrated optical element. However, after calibrating the next optical element, it can be fixed relative to the multi-axis device, thus completing the calibration of the next optical element. This process is repeated, using the first calibrated optical element as a reference, to calibrate the remaining optical elements sequentially. Because the multi-axis calibration device can simulate an infinitely long optical path, and the moving device can drive the multi-axis device to move, the operation is simple and the calibration accuracy is high. Attached Figure Description

[0019] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings do not constitute a limitation on scale.

[0020] Figure 1 This is a schematic diagram of the structure of a multi-optical axis calibration system according to an embodiment of the present invention; Figure 2 yes Figure 1 A schematic diagram of the structure of the multi-optical axis calibration device in the multi-optical axis calibration system; Figure 3 yes Figure 2 Optical path schematic diagram of the multi-axis calibration device in the diagram; Figure 4 This is a flowchart of a multi-optical axis calibration method in one embodiment of the present invention; Figure 5 yes Figure 1 A schematic diagram of the moving device in a multi-optical-axis calibration system; Figure 6 yes Figure 5 Enlarged view of section A in the middle; Figure 7 yes Figure 5 Enlarged view of section B marked in the middle.

[0021] Figure label: 1000, Multi-axis calibration system; 300, Multi-axis device; 310, Optical element; 200, Moving device; 210, Base; 220, Platform panel; 230, First moving component; 232, Motor; 234, Gear; 236, First mounting plate; 238, First slide rail; 2382, Rack; 240, Second moving component; 242, Servo motor; 244, Second mounting plate; 246, Second slide rail; 248, Third mounting plate; 249, Lead screw; 250, Third moving component; 100, Multi-axis calibration device; 10, Plane mirror; 20, Concave mirror; 30, Target. Detailed Implementation

[0022] To facilitate understanding of the present invention, a more detailed description is provided below with reference to the accompanying drawings and specific embodiments. It should be noted that when an element is described as "connected" to another element, it can be directly on the other element, or one or more intermediate elements can exist between them. The terms "upper," "lower," "left," "right," "upper end," "lower end," "top," and "bottom," etc., used in this specification indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the invention.

[0024] The following detailed description, in conjunction with all the accompanying drawings, describes in detail the multi-optical axis calibration device 100, multi-optical axis calibration system 1000, and multi-optical axis calibration method provided in this application through specific embodiments.

[0025] Please refer to Figure 1 One embodiment of the present invention discloses a multi-optical axis calibration system 1000, including a multi-optical axis calibration device 100 and a moving device 200. The moving device 200 is used to install a multi-optical axis device 300 and drive the multi-optical axis device 300 to move.

[0026] In this embodiment, the moving device 200 is used to install the multi-optical axis device 300 and drive the multi-optical axis device 300 to move. The multi-optical axis device 300 is provided with a plurality of optical elements 310, each optical element 310 having an optical axis. The multi-optical axis calibration device 100 is used to calibrate the optical axis of each optical element 310, thereby realizing the calibration of the multi-optical axis device 300.

[0027] Please refer to the above as well. Figure 2 and Figure 3 In some embodiments, the multi-axis calibration device 100 includes a plane mirror 10, a concave mirror 20, and a target 30; Along the direction of beam propagation, the plane mirror 10 is located between the target 30 and the concave mirror 20; The target 30 is equipped with a calibration structure located at the reflection focus of the concave mirror 20.

[0028] In this embodiment, the plane mirror 10 is used to redirect the light beam, facilitating the placement of the target 30. After the plane mirror 10 redirects, the target 30 is located at the reflection focal point of the concave mirror 20, which is equivalent to the target 30 being located at the focal point of the concave mirror 20. Therefore, the diverging light beam emitted from the calibration structure of the target 30, after being reflected sequentially by the plane mirror 10 and the concave mirror 20, allows the concave mirror 20 to emit a parallel light beam, thus simulating the optical path of an "infinitely distant target." When calibrating the multi-axis optical device 300, it is not necessary to gradually adjust the preset distance sequentially, making the operation simple and less susceptible to interference from external factors, resulting in high calibration accuracy.

[0029] In this embodiment, the moving device 200 is used to move the multi-optical axis device 300, which facilitates the adjustment of the position of the multi-optical axis device 300 and makes operation convenient.

[0030] The direction of beam propagation includes the forward propagation direction and the reverse propagation direction. That is, the beam can propagate sequentially along the target 30, the plane mirror 10, the concave mirror 20, and the multi-axis device 300 on the moving device 200. Alternatively, the beam can propagate sequentially along the multi-axis device 300, the concave mirror 20, the plane mirror 10, and the target 30 on the moving device 200.

[0031] In some embodiments, the calibration structure includes a perforated hole and a heating element. The perforated hole is located at the reflection focal point of the concave reflector 20, and the heating element is located on the side of the target 30 away from the planar reflector 10 and is disposed along the edge of the perforated hole.

[0032] Specifically, the heating element can be a heating plate, which is heated by a heating coil.

[0033] In some embodiments, the perforation is cross-shaped.

[0034] Please refer to the above as well. Figure 4 In some embodiments, a multi-optical-axis calibration method is applied to the aforementioned multi-optical-axis calibration system 1000. The multi-optical-axis device 300 includes at least two optical elements 310, comprising: S1. Move and adjust the multi-optical-axis device 300 to align the optical axis of an optical element 310 with the target 30. S2. Move and adjust the multi-optical-axis device 300 along the vertical plane to align the optical axis of the next optical element 310 with the target 30. S3. Fix the next optical element 310 relative to the multi-axis optical device 300; S4. Repeat steps S2 to S3 until all optical elements 310 are calibrated.

[0035] In this embodiment, by adjusting the position of the multi-optical-axis device 300, the optical axis of one optical element 310 is aligned with the target 30, thereby achieving calibration of the optical element 310 relative to the target 30. Then, the moving device 200 continues to drive the multi-optical-axis device 300 to move along a vertical plane. Since the moving plane of the multi-optical-axis device 300 is vertical, it does not affect the calibration status of the previously calibrated optical element 310. However, after calibrating the next optical element 310, it can be fixed relative to the multi-optical-axis device, thus completing the calibration of the next optical element 310. Similarly, using the first calibrated optical element 310 as a reference, the remaining optical elements 310 can be calibrated sequentially. Because the multi-optical-axis calibration device 100 can simulate parallel light at infinity, and the moving device 200 can drive the multi-optical-axis device 300 to move, the operation is simple and the calibration accuracy is high.

[0036] In some specific embodiments, after the multi-optical axis device 300 is mounted on the moving device 200, the moving device 200 can drive the multi-optical axis device 300 to move, thereby adjusting the position of the multi-optical axis device 300. The multi-optical axis device 300 can be an infrared thermal imaging device, and the optical element 310 can include infrared optical elements, laser optical elements, visible light optical elements, etc. When calibrating the optical element 310, the optical axis of the optical element 310 and the calibration structure of the target 30 can be calibrated. Specifically, in one embodiment, a multi-optical axis calibration method includes: S0. The multi-axis optical device 300 is mounted on the mobile device 200, and the infrared optical element is fixed relative to the multi-axis optical device 300. It can be understood that the infrared optical element can also be fixed relative to the multi-axis optical device 300 in step S1. S1. Adjust the movement of the multi-axis optical device 300 to calibrate the optical axis of the infrared optical element and the calibration structure of the target 30; Specifically, the infrared optical element can be an infrared lens. The heating element of the calibration structure emits infrared light, which exits through the perforation of the calibration structure and is reflected by the plane mirror 10. The plane mirror 10 reflects the infrared light to the concave mirror 20. Since the perforation is located at the reflection focal point of the concave mirror 20, the concave mirror 20 can reflect the infrared light into parallel light. By moving and adjusting the multi-axis device 300, the infrared lens receives the parallel light and senses the cross-shaped perforation. The infrared optical axis coordinate parameters of the infrared lens in the infrared thermal imager are called to align the infrared optical axis with the cross-shaped perforation.

[0037] S2. The multi-axis optical device 300 is moved and adjusted along the vertical plane to calibrate the laser spot emitted by the laser optical element on the multi-axis optical device 300 and the calibration structure of the target 30. Specifically, the laser optical element can be a laser ranging module. The laser emitted by the laser optical element on the multi-axis device 300 is reflected by the concave reflector 20 and the plane reflector 10 to the target 30. The multi-axis device 300 is moved and adjusted along the vertical plane so that the laser spot emitted by the laser optical element is aligned with the cross-shaped cutout of the target 30, thus completing the alignment of the optical axis of the laser optical element with the cross-shaped cutout of the target 30.

[0038] S3. Fix the laser optical components relative to the multi-axis optical device 300; Specifically, a torque-controlled tightening tool can be used to tighten the fixing screws of the laser optical element in a diagonally alternating tightening sequence to achieve a rigid connection between it and the reference structure of the calibration part.

[0039] S4. Continue to move and adjust the multi-axis optical device 300 along the vertical plane to calibrate the optical axis of the visible light optical element and the target 30, thereby completing the calibration of the visible light optical element.

[0040] Specifically, the visible light optical element can be a visible light lens. Visible light rays emitted from the cutout are reflected by the plane mirror 10 to the concave mirror 20. Since the cutout is located at the reflection focal point of the concave mirror 20, the concave mirror 20 can reflect the visible light rays into parallel light. By moving and adjusting the multi-axis device 300, the visible light lens receives the parallel light, and the visible light lens senses the cross-shaped cutout. Continuing to move and adjust the multi-axis device 300 along the vertical plane, the optical axis of the visible light lens is aligned with the cross-shaped cutout.

[0041] In some other embodiments, if there are more optical elements 310 on the multi-optical-axis device 300, steps S3 to S4 can be repeated to complete the calibration of the optical axes of all optical elements 310.

[0042] In some specific embodiments, step S3, fixing the laser optical element relative to the multi-axis device 300, includes: The laser optical element is fixed to the multi-axis optical device 300 using screws or similar screws, thus fixing the laser optical element and the multi-axis optical device 300 relative to each other. Once the laser optical element is fixed, it maintains its calibrated state during the calibration of other optical elements 310, thus not affecting its calibration status. Before the laser optical element is fixed relative to the multi-axis optical device 300, it can be fine-tuned relative to the device, facilitating adjustment and calibration. It is understood that the fixing and adjustment principles of other types of optical elements 310 are basically the same as those of the laser optical element, and therefore will not be elaborated further.

[0043] Please refer to the above as well. Figures 5 to 7 In some embodiments, the mobile device 200 includes a base 210, a platform panel 220, a first mobile component 230, a second mobile component 240, and a third mobile component 250; The first moving component 230 is mounted on the base 210, the second moving component 240 is mounted on the first moving component 230, the third moving component 250 is mounted on the second moving component 240, and the platform panel 220 is mounted on the third moving component 250. The platform panel 220 is used to mount the multi-axis optical device 300. The first moving component 230 and the third moving component 250 can move in the horizontal direction, and the first moving component 230 can move in the direction parallel to the concave mirror 20, the third moving component 250 can move in the direction close to or away from the concave mirror 20, and the second moving component 240 can move in the vertical direction. The moving directions of the first moving component 230, the second moving component 240, and the third moving component 250 are perpendicular to each other.

[0044] In this embodiment, the base 210 is used to mount the first moving component 230, the first moving component 230 is used to mount and drive the second moving component 240 to move, the second moving component 240 is used to mount and drive the third moving component 250 to move, the third moving component 250 is used to mount and drive the platform panel 220 to move, and the platform panel 220 is used to mount the multi-optical axis device 300, facilitating the movement and adjustment of the multi-optical axis device 300 in three-dimensional space. Specifically, the first moving component 230 is used for the main position adjustment of the multi-optical axis device 300. The second moving component 240 is used for compensation adjustment of the multi-optical axis device 300 to ensure that the movement trajectory of the multi-optical axis device 300 is located in a vertical plane, and the third moving component 250 is used for height adjustment of the multi-optical axis device 300.

[0045] In some specific embodiments, the first moving component 230 moves along the X-axis, the second moving component 240 moves along the Z-axis, and the third moving component 250 moves along the Y-axis.

[0046] In some embodiments, the mobile device 200 further includes a controller, which controls the movement of the first mobile component 230, the second mobile component 240 and the third mobile component 250, and can obtain the position coordinates of the first mobile component 230, the second mobile component 240 and the third mobile component 250, that is, can obtain the position coordinates of the multi-optical axis device 300, thereby realizing precise adjustment of the multi-optical axis device 300.

[0047] In some specific embodiments, the controller can be a microcontroller, a computer, or the like.

[0048] In some embodiments, the first moving component 230 includes a rack and pinion moving mechanism, and the second moving component 240 and the third moving component 250 each include a servo motor moving mechanism.

[0049] In this embodiment, since the first moving component 230 is used for the main position adjustment of the multi-axis optical device 300, when the first moving component 230 includes a gear and rack moving mechanism, it facilitates the adjustment of the multi-axis optical device 300 and provides a large adjustment range. For example, the adjustment range of the first moving component 230 along the X-axis can reach 5 to 10 meters. Since the second moving component 240 is used for height adjustment of the multi-axis optical device 300 and the third moving component 250 is used for compensation adjustment of the multi-axis optical device 300, their adjustment range is smaller and the precision requirements are higher. Therefore, when the second moving component 240 and the third moving component 250 respectively include servo motor moving mechanisms, the precision adjustment requirements of the multi-axis optical device 300 can be met.

[0050] In some specific embodiments, the gear and rack moving mechanism includes a motor 232, a gear 234, a first mounting plate 236, and two first slide rails 238. The two first slide rails 238 are arranged in parallel and along the X-axis direction. The two ends of the first mounting plate 236 are slidably mounted on the two first slide rails 238. A rack 2382 is provided on the side of one first slide rail 238 near the other first slide rail 238. The motor 232 and the second moving component 240 are mounted on the first mounting plate 236. The gear 234 is mounted on the output end of the motor 232. The gear 234 and the rack 2382 mesh. When the motor 232 rotates, it can drive the first mounting plate 236 to move along the length direction of the first slide rail 238, thereby driving the second moving component 240, the third moving component 250, and the multi-axis device 300 to move along the length direction of the first slide rail 238, that is, along the X-axis direction.

[0051] In some specific embodiments, the servo motor moving mechanism of the second moving component 240 includes a servo motor 242, a second mounting plate 244, a second slide rail 246, a third mounting plate 248, and a lead screw 249. The two second slide rails 246 are arranged in parallel and fixed relative to the second mounting plate 244. The servo motor 242 is mounted on the second mounting plate 244. The two ends of the third mounting plate 248 are slidably mounted on the two second slide rails 246, and the third mounting plate 248 is screwed to the lead screw 249. The third mounting plate 248 of the second moving component 240 is used to mount the third moving component 250. The second slide rail 246 of the second moving component 240 is arranged along the Z-axis direction. The servo motor 242 drives the lead screw 249 to rotate, and the lead screw 249 drives the third mounting plate 248 to move along the length direction of the second slide rail 246, thereby enabling adjustment of the platform panel 200 along the Z-axis direction.

[0052] The servo motor moving mechanism of the third moving component 250 and the servo motor moving mechanism of the second moving component 240 have the same structure, so they will not be described again. The third mounting plate of the third moving component 250 is used to mount the platform panel 220. The second slide rail 246 of the third moving component 250 is set along the Y-axis direction.

[0053] In some specific embodiments, there are two second moving components 240, and the two ends of the second mounting plate of the third moving component 250 are respectively connected to the third mounting plates 248 of the two second moving components 240, thereby enabling stable support and adjustment of the third moving component 250. The third mounting plate of the third moving component 250 is arranged in a horizontal direction to facilitate the installation of the platform panel 220.

[0054] During the calibration process, if the visible light lens is calibrated first, i.e., the visible light lens is used as the reference, and the focal length of the infrared lens is taken as the maximum value of 225mm, then the maximum focal offset between the two is calculated as follows: the product of the offset corresponding to the standard requirement of multi-axis equipment 300 (not exceeding 5 pixels) and the pixel pitch (12μm) is 5×12μm; according to the infinity image height formula "5×12μm=225mm×tanα", the maximum tilt angle α=0.0153° can be calculated; if the optical axis tilt angle is 0.0153°, the maximum tilt angle of the vertical plane can be obtained. With an oblique angle of 0.0153°, and assuming the planar length of the moving trajectory is 1m, the midpoint of the plane is the point where the highest oblique angle is met, and all other points satisfy the condition. From: tan0.0153°X1000mm / 2=0.133mm / ㎡; it can be seen that the flatness of the plane forming the moving trajectory is better than 0.0153° or 0.133mm / ㎡; therefore, in some embodiments, the flatness of the plane where the moving trajectory of the platform panel 220 is located is less than 0.133mm / ㎡, wherein the plane where the moving trajectory of the platform panel 220 is located is perpendicular to the reflection direction of the concave reflector 20.

[0055] In this embodiment, since the multi-optical-axis device 300 is mounted on the platform panel 220, the movement trajectories of the multi-optical-axis device 300 and the platform panel 220 are the same. The plane of the reflection direction of the vertical concave mirror 20 is the vertical plane. This arrangement ensures the calibration accuracy of each of the multiple optical elements 310.

[0056] In some embodiments, the multi-axis calibration system 1000 further includes a connector (not shown), and the platform panel 220 has at least two mounting holes. The connector is used to adjustably mount the multi-axis device 300 on the platform panel 220.

[0057] In this embodiment, the multi-axis device 300 is installed on the platform panel 220 by means of a connector. The multi-axis device 300 can be installed on the platform panel 220. By installing it in different mounting holes, the installation position of the multi-axis device 300 can be adjusted.

[0058] In some specific embodiments, the connector can be a bolt or screw, and the mounting hole can be a threaded hole. Correspondingly, the multi-axis device 300 is provided with a corresponding through hole or threaded hole, so that the multi-axis device 300 can be installed at the mounting hole of the platform panel 220.

[0059] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; under the concept of the present invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of the present invention as described above, which are not provided in detail for the sake of brevity; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A multi-optical-axis calibration device (100), characterized in that, It includes a plane mirror (10), a concave mirror (20), and a target (30). Along the direction of beam propagation, the planar reflector (10) is located between the target (30) and the concave reflector (20); The target (30) is provided with a calibration structure, which is located at the reflection focus of the concave mirror (20).

2. The multi-axis calibration device (100) according to claim 1, characterized in that, The calibration structure includes a perforated hole and a heating element. The perforated hole is located at the reflection focal point of the concave mirror (20), and the heating element is located on the side of the target (30) away from the planar mirror (10) and is arranged along the edge of the perforated hole.

3. The multi-axis calibration device (100) according to claim 2, characterized in that, The perforated hole is cross-shaped.

4. A multi-optical-axis calibration system (1000), characterized in that, Includes the multi-axis calibration device (100) as described in any one of claims 1 to 3.

5. The multi-axis calibration system (1000) according to claim 4, characterized in that, It also includes a moving device (200) for mounting the multi-axis optical device (300) and driving the multi-axis optical device (300) to move.

6. The multi-axis calibration system (1000) according to claim 5, characterized in that, The mobile device (200) includes a base (210), a platform panel (220), a first mobile component (230), a second mobile component (240), and a third mobile component (250). The first moving component (230) is mounted on the base (210), the second moving component (240) is mounted on the first moving component (230), the third moving component (250) is mounted on the second moving component (240), and the platform panel (220) is mounted on the third moving component (250). The platform panel (220) is used to mount the multi-axis optical device (300). The first moving component (230) and the third moving component (250) are capable of moving in the horizontal direction, and the first moving component (230) is capable of moving in the direction parallel to the concave mirror (20), the third moving component (250) is capable of moving in the direction closer to or further away from the concave mirror (20), and the second moving component (240) is capable of moving in the vertical direction. The moving directions of the first moving component (230), the second moving component (240), and the third moving component (250) are perpendicular to each other.

7. The multi-axis calibration system (1000) according to claim 6, characterized in that, The first moving component (230) includes a motor (232), a gear (234), a first mounting plate (236), and two first slide rails (238). The two first slide rails (238) are mounted on the base (210) and are arranged parallel to each other in the horizontal direction. The two ends of the first mounting plate (236) are slidably mounted on the two first slide rails (238). One of the first slide rails (238) is provided with a rack (2382) on the side of the first slide rail (238) close to the other first slide rail (238). The motor (232) and the second moving component (240) are mounted on the first mounting plate (236). The gear (234) is mounted on the output end of the motor (232). The gear (234) and the rack (2382) mesh.

8. The multi-axis calibration system (1000) according to claim 6, characterized in that, The flatness of the plane on which the moving trajectory of the platform panel (220) is located is less than 0.133 mm / ㎡.

9. The multi-axis calibration system (1000) according to claim 6, characterized in that, The second moving component (240) includes a servo motor (242), a second mounting plate (244), a second slide rail (246), a third mounting plate (248), and a lead screw (249). The two second slide rails (246) are mounted on the first mounting plate (236) and are arranged parallel to each other in the vertical direction. The two second slide rails (246) are connected to the second mounting plate (244). The servo motor (242) is mounted on the second mounting plate (244). The servo motor (242) and the lead screw (249) are connected in a transmission to drive the lead screw (249) to rotate. The two ends of the third mounting plate (248) are slidably mounted on the two second slide rails (246). The third mounting plate (248) is screwed to the lead screw (249).

10. A multi-optical-axis calibration method, characterized in that, Applied to the multi-optical axis calibration system (1000) according to any one of claims 4-9, the multi-optical axis device (300) includes at least two optical elements (310), comprising: S1. The multi-optical axis device (300) is moved and adjusted so that the optical axis of an optical element (310) is aligned with the target (30); S2. The multi-optical axis device (300) is moved and adjusted along the vertical plane so that the optical axis of the next optical element (310) is aligned with the target (30); S3. Fix the next optical element (310) relative to the multi-optical axis device (300); S4. Repeat steps S2 to S3 until all optical elements (310) are calibrated.

Images